CN101677074A - Front-open type disc plate box with bolt structure - Google Patents
Front-open type disc plate box with bolt structure Download PDFInfo
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- CN101677074A CN101677074A CN200810160830A CN200810160830A CN101677074A CN 101677074 A CN101677074 A CN 101677074A CN 200810160830 A CN200810160830 A CN 200810160830A CN 200810160830 A CN200810160830 A CN 200810160830A CN 101677074 A CN101677074 A CN 101677074A
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- garden
- open type
- film magazine
- front open
- carriage
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- Cultivation Receptacles Or Flower-Pots, Or Pots For Seedlings (AREA)
Abstract
The invention provides a front-open type disc plate box, comprising a box body, wherein, one side surface of the box body is provided with an opening; the inner part of the box body is provided with plural slots which can accommodate plural disc plates; and a door body is utilized to combine with the opening of the box body to protect the disc plates inside the slots. The invention is characterized in that at least one bolt structure is collocated between the outer surface and the inner surface of the door body. The bolt structure comprises a cam and a pair of sliding devices, wherein, the camis provided with a pair of arc-shaped glide slots which are used for fastening a guide rod on one end of the sliding device; each sliding device is provided with a sliding groove which is used for the embedment of the pulley wheels arranged between the outer surface and the inner surface of the door body, to ensure that forward and backward back and forth movement of the other end of the slidingdevice can be carried out by rotating the cams.
Description
Technical field
The invention relates to a kind of front open type garden film magazine, particularly about a kind of bolt structure (Latch) that is disposed at the Men Tizhong of front open type garden film magazine.
Background technology
Therefore semiconductor garden sheet can be moved to different work stations owing to need the processing of the various different flow processs of process and need to cooperate process equipment.The carrying of garden sheet for convenience and avoid being subjected to external pollution, regular meeting utilizes an airtight container to carry for automation equipment.Please refer to shown in Figure 1ly, be the garden film magazine schematic diagram of known technology.This garden film magazine is a kind of front open type garden film magazine (Front Opening Unified Pod; FOUP); have a box body 10 and a body 20; but box body 10 inside are provided with the ccontaining a plurality of gardens of plurality of slots 11 levels sheet; and have an opening 12 in a side of box body 10 and can supply carrying and loading of garden sheet; and door body 20 has an outer surface 21 and an inner surface 22, and door body 20 is to be combined with the opening 12 of box body 10 by inner surface 22, in order to a plurality of gardens sheet of protection box body 10 inside.In addition, at least one bolt perforate 23 of configuration on the outer surface 21 of door body 20 is in order to open or sealing front open type garden film magazine.In the film magazine of above-mentioned front open type garden, because semiconductor garden sheet is flatly to place box body 10 inside, therefore, a garden sheet limited part (wafer restraint) need be arranged in the film magazine handling process of front open type garden, move because of opening 12 directions that vibrations produce dystopy or past box body 10 to avoid the garden sheet.
Please refer to shown in Figure 2ly, is the door body schematic diagram of U.S. bulletin patent 6,736,268 disclosed a kind of front open type garden film magazines.As shown in Figure 2, the inner surface 22 of door body 20 disposes a sunk area 24, this sunk area 24 be the top 221 from inner surface 22 extend to bottom 222 and about between two bolt structures 230 (in door body inside), and in sunk area 24, further dispose garden sheet limiting piece module again, this garden sheet limiting piece module by about two garden sheet limited parts 100 formed, and on each garden sheet limited part 100, has a plurality of gardens sheet contact head 110, to utilize this garden sheet contact head 110 to hold its relative garden sheet, avoid the garden sheet in transport process, to move because of the opening direction of vibrations dystopy or past box body.Yet, above-mentioned garden sheet limiting piece module is arranged among the sunk area 24 of a body 20 inner surfaces 22, this makes the garden sheet only can develop a body 20 its inner surfaces 22 or only can fall into sunk area 24 a little, can't allow the garden sheet fall into sunk area 24 to shorten the size of front open type garden film magazine anteroposterior diameter effectively.In addition, the particle dust that garden sheet limiting piece module and the friction of garden sheet are produced is accumulated in the sunk area 24 easily, on cleaning, need earlier the sunk area 24 of garden sheet limiting piece module with door body 20 inner surfaces 22 to be separated, so separation and assembling repeatedly causes getting loose of garden sheet limiting piece module easily.
In addition, door body 20 its bolt structure 230 schematic diagrames of open front open type garden film magazine in another part United States Patent (USP) 5,711,427.As shown in Figure 3, the combination of door body 20 and box body 10 mainly is that the both sides of in door body 20 (being between outer surface 21 and the inner surface 22) are provided with movable pin 231 respectively, and being provided with jack (not being shown among the figure) near the edge of box body 10 opening parts can be corresponding with pin 231, and the rotation of the bolt perforate on a body 20 outer surfaces 21 is located in utilization, pin 231 and jack are interosculated and then reach the purpose that door body 20 is fixed in box body 10, the cam (cam) 232 that the round movable system that wherein utilizes the rotation of bolt perforate to control pin 231 sees through a circle can be reached.
And in the enforcement of semiconductor factory is handled, the unlatching of front open type garden film magazine is mainly by a garden sheet loader mechanism (not being shown among the figure), garden sheet loader mechanism has one at least and opens door bolt (not being shown among the figure), garden sheet loader mechanism is the bolt perforate 23 that utilizes on these door body 20 outer surfaces 21 of opening door bolt insertion front open type garden film magazine, and rotating cam 232 is finished unlatching or sealing front open type garden film magazine to drive movable pin 231.
In addition, the United States Patent (USP) of the bolt structure of the Men Tizhong of other disclosed front open type garden film magazine also has: US5,915,562, US5,957,292, US6622883 and US6902063 etc.When these bolt structures engage in order to make the Men Tiyu box body, reach airtight purpose, its movable pin can produce displacement in a longitudinal direction, so that by movable pin one flexible gas seal member is fixed, closes front open type garden film magazine and airtight purpose in the hope of reaching simultaneously.Yet these known bolt patents all are made up of complex mechanical construction, except meeting increases failure rate, also can produce too many mechanical friction in the process of actuating, and cause the pollution of garden sheet; In addition, fix the elasticity gas seal member via the displacement of movable pin, its airtight effect is not good enough, can't keep airtight for a long time.
And, also can dispose some limited parts on door body 20 inner surfaces of at present common front open type garden film magazine, when covering box body 10 with side door body 20, these limited parts can contact with the garden sheet, make that the garden sheet is completely fixed, in the film magazine of front open type garden, produce dystopy because of transportation to reduce the garden sheet.And when limited part contacted with the garden sheet, strength was too big and cause the collision and the friction of garden sheet; Therefore, as shown in Figure 4, have some United States Patent (USP)s promptly disclose a kind of with elastic parts 86 be configured in the bolt structure 230 cam 232 and the door body 20 between, when cam 232 rotates and drives in the process of movable pin 231 sealing front open type garden film magazines, this elastic parts 86 can be brought into play the effect of damping, make the limited part that is disposed on a body 20 inner surfaces under gentle and smooth-going state, to contact, so just can solve the problem of collision and friction with the garden sheet.These patents comprise: US6,880,718, US7,168,587 and US7,182,203 etc.Yet the mode of this similar side direction traction produces a skew strength easily and can cause in the jack that can't snap in box body 10 on the direction that movable pin 231 moves, cause box body 10 and door body 20 to cover.Simultaneously, also can increase the manufacturing cost of front open type garden film magazine.
Summary of the invention
In the door body structure according to the front open type garden film magazine of known technology, its bolt all is made up of complex mechanical construction, except meeting increases failure rate, also can produce too many mechanical friction in the process of actuating, and may cause the pollution of garden sheet.For this reason, the object of the present invention is to provide the bolt structure that disposes cam in the film magazine of a kind of front open type garden, make its carriage only on single plane, carry out back and forth movement, so can simplify the structure of bolt.
Another object of the present invention is to provide the bolt structure that disposes cam in the film magazine of a kind of front open type garden, can be by the design of pulley, when making its cam driven carriage carry out back and forth movement on single plane, the frictional force in the time of can reducing back and forth movement is so can reduce pollution.
A further object of the present invention is to provide the bolt structure that disposes cam in the film magazine of a kind of front open type garden, it can form a sunk area between bolt structure, make that this sunk area can effective ccontaining garden sheet, so can shorten the size of front open type garden film magazine anteroposterior diameter, and allow the center of gravity of whole garden film magazine concentrate on the centre of garden film magazine, to increase the stability of garden film magazine.
The present invention also has a purpose to be to provide the bolt structure that disposes cam in the front open type garden film magazine, and it can dispose garden sheet limited part on the inner surface of door body, can be effectively fixing garden sheet.
For achieving the above object; front open type provided by the invention garden film magazine; comprise a box body; box body inside is provided with plurality of slots with ccontaining a plurality of gardens sheet; and forming an opening in a side of box body can be for the input and the output of a plurality of gardens sheet; and the edge at box opening place disposes at least one pair of jack; and body; edge with an outer surface and an inner surface and Yu Menti disposes at least one pair of and above-mentioned jack is fastened the hole accordingly with a bolt or latch; the door body is to combine with the opening of box body with inner surface; and in order to protect a plurality of gardens sheet of box body inside; wherein front open type garden film magazine is characterised in that: internal surface configurations one sunk area of door body and sunk area protrude between the platform two; each protrudes platform internal configurations one bolt structure; bolt structure comprises a cam and a pair of carriage; dispose a pair of arc guide barrel on the cam therewith to the guide rod snapping on the end of carriage; and each carriage all has a chute to embed for being fixed at least one pulley that protrudes platform inside, so that carriage is by rotate the back and forth movement that this advances the other end of these carriages and retreat cam in above-mentioned jack and door bolt hole.
Front open type provided by the invention garden film magazine; also comprise a box body; box body inside is provided with plurality of slots with ccontaining a plurality of gardens sheet; and forming an opening in a side of box body can be for the input and the output of a plurality of gardens sheet; and the edge at box opening place disposes at least one pair of jack; and body; edge with an outer surface and an inner surface and Yu Menti disposes at least one pair of and above-mentioned jack is fastened the hole accordingly with a bolt or latch; the door body is to combine with the opening of box body with inner surface; and in order to protect a plurality of gardens sheet of box body inside; wherein front open type garden film magazine is characterised in that: at least one bolt structure of configuration between door external surface and the inner surface; bolt structure comprises a cam and a pair of carriage; dispose a pair of arc guide barrel on the cam therewith to the guide rod snapping on the end of carriage; and each carriage all has a chute to embed at least one pulley that is disposed between an external surface and the inner surface, so that the back and forth movement that carriage can be advanced the other end of these carriages and retreat in above-mentioned jack and door bolt hole by rotating cam.
Description of drawings
Fig. 1 is the garden film magazine schematic diagram of known technology;
Fig. 2 is the door body schematic diagram of the front open type garden film magazine of known technology;
Fig. 3 is the Men Tiqi bolt structure schematic diagram of the front open type garden film magazine of known technology;
Fig. 4 is the door body schematic diagram of the front open type garden film magazine of known technology;
Fig. 5 is an a kind of body schematic diagram of front open type of the present invention garden film magazine;
Fig. 6 A and Fig. 6 B are the enlarged diagrams of the carriage of the bolt structure among Fig. 5 of the present invention;
Fig. 7 is the another kind of door body schematic diagram of front open type of the present invention garden film magazine;
Fig. 8 A and Fig. 8 B are the enlarged diagrams of the carriage of the bolt structure among Fig. 7 of the present invention;
Schematic diagram when Fig. 9 is closing of bolt structure of the present invention;
Figure 10 is the schematic diagram of a kind of front open type of the present invention garden film magazine;
Figure 11 is the schematic diagram of a kind of front open type of the present invention garden its garden sheet limiting piece module of film magazine;
Figure 12 is the schematic diagram that a kind of front open type of the present invention garden its garden sheet limiting piece module of film magazine is fixed in a body;
Figure 13 is to be the schematic diagram of a kind of front open type of the present invention garden its garden sheet limiting piece module of film magazine in restriction garden sheet;
Figure 14 A is the integrally formed schematic diagram of a kind of front open type of the present invention garden its garden, left and right sides sheet limiting piece module of film magazine;
Figure 14 B is the schematic diagram that film magazine its garden, left and right sides integrally formed structure of sheet limiting piece module in a kind of front open type of the present invention garden is fixed in a body;
Figure 15 is to be the schematic diagram of another kind of front open type of the present invention garden film magazine;
Figure 16 is the schematic diagram of another kind of front open type of the present invention garden its garden sheet limiting piece module of film magazine;
Figure 17 A is that another kind of front open type of the present invention garden its garden sheet limited part of film magazine rigidly connects the schematic diagram that touches the garden sheet;
Figure 17 B is the schematic diagram of another kind of front open type of the present invention garden its garden sheet limited part of film magazine in restriction garden sheet;
Figure 18 is the schematic diagram of another front open type garden film magazine of the present invention;
Figure 19 is the schematic diagram of another its garden sheet limiting piece module of front open type garden film magazine of the present invention;
Figure 20 A is the schematic diagram that its garden sheet limited part of another front open type garden film magazine of the present invention does not contact the garden sheet; And
Figure 20 B is the schematic diagram of its garden sheet limited part of another front open type garden film magazine of the present invention in restriction garden sheet.
Primary clustering symbol description in the accompanying drawing
10 box bodys, 11 slots
20 bodies of 12 openings
21 outer surfaces, 22 inner surfaces
24 sunk areas 25 protrude platform
26 outstanding posts, 27 door bolt holes
28 jacks
30 limiting piece modules, 31 bases
The long limit of 31S minor face 31L
The 32 curved semicircular protuberances of the 32C of portion that prolong
32G central authorities guide groove 33 installing holes
34 holes
400 limiting piece modules, 40 limited parts
41 base portions, 42 bends
43 44 first contact jaws of cranking arm
45 second contact jaws, 500 limiting piece modules
50 limited parts, 51 base portions
52 first crank arm 53 second cranks arm
54 first contact jaws, 55 second contact jaws
56 the 3rd contact jaws, 57 hinges
62 cams, 621 guide grooves
64 carriages, 642 chutes
644 guide rods, 643 guide wheel driving levers
6431 pulleys, 646 planes
66 pulleys, 662 pulleys
664 pulleys, 68 Location resilient pieces
Embodiment
For technology contents, goal of the invention that the present invention is used and the effect reached thereof have more complete and clearly describe, following conjunction with figs. is done in detail.
Please refer to Fig. 5, is a kind of body schematic diagram of front open type of the present invention garden film magazine.As shown in Figure 5, include a pair of bolt structure 60 in the door body 20, and each bolt structure 60 comprises a cam 62 and carriage 64 a pair of and cam 62 two ends snappings, wherein, cam 62 is provided with a pair of guide groove 621 offering corresponding carriage 64 snappings, and each carriage 64 all has a chute 642 to embed for the pulley 66 that is disposed between a body 20 outer surfaces and the inner surface.
Then, please refer to Fig. 6 A, is the enlarged diagram of cam 62 and carriage 64 contact jaws among Fig. 5.As shown in Figure 6A, carriage 64 snaps together via the guide groove 621 on guide rod on the one end 644 (in the carriage another side) and the cam 62, and wherein, guide groove 621 is an arc structure.When door body 20 will be closed the opening 12 of box body 10, can earlier door body 20 be combined with box body 10, rotating cam 62 then.When cam 62 was rotated, position guide groove 621 thereon also can be driven simultaneously; For example: counter clockwise direction is revolved and is turn 90 degrees; Clearly, carriage 64 can be pushed away by the door body 20 of guide groove 621 to both sides, make the plane 646 of the other end of carriage 64 passed the door bolt hole 27 on the body 20 and stretch near the edge that is arranged in box body 10 openings 12 places and with door bolt hole 27 corresponding jacks (not being shown in figure), make the action that box body 10 and door body 20 are combined into one and close box body 10 to finish.When cam 62 clockwise directions revolve when turning 90 degrees, then the plane 646 of carriage 64 can break away from door bolt holes 27, and a box body 10 and a body 20 can be separated.Therefore, the present invention can be made carriage 64 back and forth movement of advancing and retreating in jack and door bolt hole 27 by the rotation to cam 62.
In addition, in the process that carriage 64 is driven by cam 62, at least one pulley 66 is arranged because the chute 642 of carriage 64 embeds, therefore, the frictional force in the time of can reducing carriage 64 and carry out back and forth movement.In an embodiment of the present invention, cam 62 can be a metal material, and it also can be that the high molecule plastic material forms, and the present invention is not limited.And cam 62 its profiles can be circular cams, but also can be oval-shaped cams.In addition, carriage 64 is near close cam 62 ends, and then the end with a location shell fragment 68 links together, and these Location resilient piece 68 its other ends then are fixed on the body 20.So when cam 62 rotates, (for example counterclockwise revolve and turn 90 degrees), carriage 64 can be pushed away to the door bolt hole of door body 20 27 directions by cam 62, make the plane 646 of carriage 64 be passed the door bolt hole 27 on the body 20, at this moment, can make Location resilient piece 68 be compressed.Then, when door body 20 will be opened (for example clockwise direction revolves and turn 90 degrees), along with cam 62 clockwise directions rotate, Location resilient piece 68 also can drive the position that carriage 64 returns to opening according to the power that Hooke's law provided.In an embodiment of the present invention, carriage 64 and Location resilient piece 68 can be metal materials, and it also can be that the high molecule plastic material forms, and the present invention is not limited.The material of pulley 66 is not also then limited.
In addition, shown in Fig. 6 B, in a preferred embodiment, pulley 66 is to be configured in couples between the outer surface and inner surface of a body 20, and each other at a distance of a suitable distance.Therefore, when pulley 662 and pulley 664 are embedded in the chute 642 of carriage 64, this can be correct to pulley 66 and plane 646 smooth-going ground guided slidable device 64 passed door bolt hole 27 on the body 20.
To emphasize at this, above-mentioned all is operating process that bolt structure 60 is described with a cam 62 and carriage 64, but in fact, each cam 62 contacts with a pair of carriage 64, and each body 20 internal configurations has a pair of bolt structure 60 (please refer to Fig. 5).
Then, refer again to Fig. 7, carriage 64 its Location resilient pieces 68 of the present invention can also not be fixed on the body 20, Location resilient piece 68 can be one-body molded with carriage 64, Location resilient piece 68 1 ends can be fixed in carriage 64 near close cam 62 ends, and Location resilient piece 68 other ends then are fixed in or approach the plane 646 of the other end of carriage 64.In addition, shown in Fig. 7, Fig. 8 A and Fig. 8 B, near on the plane 646 of a body 20 ends, can further dispose a pair of guide wheel driving lever 643 at carriage 64.One end of this guide wheel driving lever 643 be buckled in movably plane 646 on, then can be connected with a pulley 6431 again on the other end of guide wheel driving lever 643, so that when carriage 64 is advanced by cam 62 drives, can pass door bolt hole 27 that is arranged on the body 20 and a jack 28 that slips into box body 10, so the side can not produce pollutant because of friction smooth-goingly.Wherein, jack 28 profiles on the box body 10 can be identical with guide wheel driving lever 643, in order to the plane 646 of ccontaining guide wheel driving lever 643 and carriage 64.
Please refer to Fig. 9, is the schematic diagram of bolt structure of the present invention when closing.When cam 62 rotates (for example: counter clockwise direction is revolved and turn 90 degrees), carriage 64 can be pushed away to the door bolt hole of door body 20 27 directions by cam 62, makes the plane 646 of carriage 64 and position a pair of guide wheel driving lever 643 thereon can pass door bolt hole 27 on the body 20 and jack 28 that pulley 6431 can slip into box body 10 smooth-goingly.Clearly, at this moment, Location resilient piece 68 has been compressed.Then, when door body 20 will be opened (for example: clockwise direction revolves and turn 90 degrees), along with cam 62 rotates, Location resilient piece 68 also can be according to the power that Hooke's law provided, and the plane 646 that drives the other end of carriage 64 returns to the position of opening.Certainly, it can also an end be fixed in carriage 64 near near cam 62 ends above-mentioned Location resilient piece 68, and the other end then is fixed in guide wheel driving lever 643, makes guide wheel driving lever 643 also can more successfully return to the position of opening.In an embodiment of the present invention, carriage 64, Location resilient piece 68 and guide wheel driving lever 643 can be metal materials, and it also can be that the macromolecule material plastics form, and the present invention is not limited.The material of pulley 66 is not also then limited.
Then, seeing also shown in Figure 10ly, is the schematic diagram of a kind of front open type of the present invention garden film magazine.This front open type garden film magazine, mainly comprise a box body 10 and a body 20, be provided with plurality of slots 11 in the inside of box body 10 with ccontaining a plurality of gardens sheet, and there is an opening 12 that the input and the output of garden sheet can be provided in one of them side of box body 10, door body 20 then is to have an outer surface 21 and an inner surface 22, outer surface 21 at least one bolt perforate (not being shown among Figure 10) of configuration of door body 20, in order to open or sealing front open type garden film magazine, protrude between the platforms 25 two and dispose a sunk area 24 and sunk area 24 at the middle approximately place of the inner surface 22 of door body 20, wherein two internal configurations of protruding platforms 25 aforesaid bolt structure 60.The main purpose of this sunk area 24 is a plurality of gardens sheets that are used for accepting box body 10 inside, to reduce the anteroposterior diameter size of whole garden film magazine, and on two protrusion platforms 25, respectively dispose a garden sheet limiting piece module 30, except limiting the garden sheet toward opening direction moves, also can be used to control the amount that the garden sheet enters sunk area 24.
The length of above-mentioned door body 20 inner surfaces 22 sunk areas 24 is relevant with slot 11 spacings and the garden sheet quantity of box body 10 inside.With the garden sheet of 12 o'clock (about 30 centimetres), for the spacing between the sheet of garden, existing standard code between industry can be held robotic arm simultaneously and stretches into and carry out garden sheet input and output in the hope of reaching maximum garden sheet carrying density; And at present common garden film magazine system approximately can ccontaining 25 garden sheets.Yet the width of sunk area 24 of the present invention and the degree of depth can be more flexible, when the thickness of door body 20 remains unchanged, with the degree of depth of sunk area 24 establish bigger, then can allow the garden sheet to enter sunk area 24, and this moment sunk area 24 width also need to increase thereupon.
Secondly, seeing also Fig. 1 and shown in Figure 12, is a kind of front open type of the present invention garden its garden sheet limiting piece module of film magazine and the schematic diagram that is fixed in a body thereof.Garden sheet limiting piece module 30 is to have a strip base 31, strip base 31 has two long limit 31L and two minor face 31S, it is adjacent with sunk area 24 among the two long limit 31L a long limit 31L being arranged, and on above-mentioned adjacent long limit 31L, form a plurality of spaced curved portions 32 that prolong, each curved protuberance 32C that forms approximate half-circular between portion 32 and its free end that prolongs, and on the protuberance 32C of approximate half-circular, dispose a central guide groove 32G, contact with the garden sheet with central guide groove 32G, can limit corresponding garden sheet and move toward opening direction by semicircular protuberance 32C.
Its central guide groove 32G of the protuberance 32C of above-mentioned approximate half-circular is used for accepting the garden sheet, and the width of central guide groove 32G can be identical with the thickness of garden sheet, can allow the garden sheet be absorbed among this central guide groove 32G, to avoid moving up and down of garden sheet.And can coat a kind of wear-resisting consumptive material on the surface of its contact garden sheet of central guide groove 32G, for example: polyether-ether-ketone (polyetheretherketone, PEEK), to reduce friction to the garden sheet.In addition, garden sheet limiting piece module 30 can be integrally formed structure, and can be formed or made by a kind of material, for example: with base 31 and curvedly prolong that portion 32 makes with a kind of material and at the curved semicircular protuberance 32C that forms another kind of material in the portion 32 again that prolongs by two kinds of different materials.Clearly, the base 31 of strip forms an angle with the curved portion 32 that prolongs, and this angle is about 10～60 degree.Because the garden sheet limiting piece module 30 of sunk area 24 both sides is symmetrical, therefore,, can produce one only toward making a concerted effort that garden sheet central point direction pushes away when garden sheet limiting piece module 30 during at restriction garden sheet (as shown in figure 13), can not cause rocking about the sheet of garden.And garden sheet limiting piece module 30 is except limiting the garden sheet toward opening direction moves, also allow the garden sheet almost completely fall into sunk area 24, the anteroposterior diameter size of garden film magazine is dwindled, and allow the center of gravity of whole garden film magazine concentrate on the centre of garden film magazine, to increase the stability of garden film magazine.And as shown in figure 11, because jagged between the curved a plurality of semicircular protuberance 32C that prolongs in the portion 32, therefore curvedly prolong portion 32 bullet shape can relatively be arranged, can allow the compressing of garden sheet and a little distortion is arranged.
In addition, by Figure 12 and Figure 13 as can be known, base 31 has a plurality of installing holes 33, with respect to these a few installing holes 33 places outstanding post 26 is arranged then on the inner surface 22, garden sheet limiting piece module 30 is fixed on the protrusion platform 25 of a body 20 inner surfaces 22 sunk areas 24 both sides in the mode that snaps in (snap on).Certainly, for the convenience of producing, also like can garden sheet limiting piece module 30 is directly integrally formed with door body 20 inner surfaces 22, to avoid coming off of garden sheet limiting piece module 30.Then, please refer to Figure 14 A and Figure 14 B, the garden sheet limiting piece module 30 of sunk area 24 both sides can also be integrally formed, and this integrally formed structure is to have a hole 34 with the sunk area 24 to the body 20 of answering the door.And this integrally formed structure can be fixed in a body 20 inner surfaces 22 also or directly integrally formed with body 20 inner surface 22 with the mode that snaps in (snap on).
Secondly, seeing also shown in Figure 15ly, is the schematic diagram of another kind of front open type of the present invention garden film magazine.This front open type garden film magazine is identical with the front open type garden film magazine of above-mentioned the 10th figure, comprises a box body 10 and a body 20, and different is, and to be fixed in the garden sheet limiting piece module 400 of a body 20 inner surfaces 22 sunk areas 24 both sides different with above-mentioned garden sheet limiting piece module 30.Shown in Figure 16 and Figure 17 A, the garden sheet limiting piece module 400 of sunk area 24 both sides is made up of a plurality of spaced gardens sheet limited part 40, and garden sheet limited part 40 relative on the limiting piece module 400 of each garden sheet limited part 40 and sunk area 24 another sides aligns, wherein each limited part 40 has a base portion 41, base portion 41 is fixed on a body 20 inner surfaces 22, and base portion 41 has the contiguous sunk area 24 of a side and at above-mentioned side after the opening direction of box body 10 extends into a bend 42, transferring sunk area 24 centre to extends into one and cranks arm 43, make these a plurality of 43 both sides, top that are disposed at sunk area 24 of cranking arm, and 43 having one first contact jaw 44 with the place of bend 42 handing-over above-mentioned cranking arm, 43 the free end of cranking arm then has one second contact jaw 45.Shown in Figure 17 A, each garden sheet limited part 40 can be integrally formed elastic construction (for example: the thermoplastic elastic structure), when door body 20 do not combine with box body 10 or just will in conjunction with the time, first contact jaw 44 of garden sheet limited part 40 and online (44-45) of second contact jaw 45 with the door body 20 medial surface 22 parallel to each other.At this moment, the garden sheet is earlier with 45 contacts of second contact jaw, when the garden sheet contacts second contact jaw 45, can make bend 42 produce deformation and lever drives cranks arm 43, make another contact jaw of cranking arm on 43 promptly first contact jaw 44 contact the garden sheet in order.At this moment, shown in Figure 17 B, door body 20 follows the inner surface 22 of door body 20 to form an angle with first contact jaw 44 of box body 10 driving fits and garden sheet limited part 40 and online (44-45) of second contact jaw 45.Very clearly, each garden sheet limited part 40 is to produce with two contact jaws and garden sheet contact, can firmly hold the garden sheet or restriction garden sheet moves toward opening direction, can reduce the garden sheet in transportation, the generation particle dust because of vibrations.In addition, also allow the garden sheet effectively fall into sunk area 24, to shorten the anteroposterior diameter size of garden film magazine.
Above-mentioned garden sheet limited part 40 its bends 42 be an elastic construction (for example: the thermoplastic elastic structure), there is the angle of a bending in system, therefore when door body 20 and box body 10 driving fit never during to driving fit, this angle of bend can change, make first contact jaw 44 in regular turn second contact jaw 45 contact with the garden sheet.In addition, bend 42 43 can be two kinds of unlike materials with cranking arm, and as the plastics of different hardness, can make bend 42 produce bigger deformation and cranks arm and 43 be not easy deformation.And first contact jaw 44 and second contact jaw 45 also can respectively have a depression, and the garden sheet of making can be absorbed in the depression, and the garden sheet of avoiding moves up and down.In addition, a plurality of gardens sheet limited part 40 can be formed at a base, and this base is fixed in the inner surface 22 of a body 20.Certainly, a plurality of gardens sheet limited part 40 also can be directly integrally formed with the inner surface 22 of door body 20, can reduce and produce required cost.
Then, seeing also shown in Figure 180ly, is the schematic diagram of another front open type garden film magazine of the present invention.This front open type garden film magazine is identical with the front open type garden film magazine of above-mentioned Figure 15, comprise a box body 10 and a body 20, different is that garden sheet limiting piece module 500 its each the garden sheet limited parts that are fixed in a body 20 inner surfaces 22 sunk areas 24 both sides have three contact jaws.Shown in Figure 19 and Figure 20 A, the garden sheet limiting piece module 500 of sunk area 24 both sides is rearranged by a plurality of gardens sheet limited part 50, and garden sheet limited part 50 relative on the limiting piece module 500 of each garden sheet limited part 50 and sunk area 24 another sides aligns, wherein each garden sheet limited part 50 has a base portion 51, one end of base portion 51 is fixed on the inner surface 22 of a body 20, and its other end and one first is cranked arm and 52 is connected, this first cranks arm and 52 has two free ends, wherein form one first contact jaw 54 than free end away from sunk area 24 centre, and further crank arm and 53 be connected with one second near another free ends of sunk area 24 centre, second cranks arm 53 has one second contact jaw 55 and one the 3rd contact jaw 56.
Since the base portion 51 of garden sheet limited part 50 be an elastic construction (for example: the thermoplastic elastic structure), at least has a knee, when door body 20 do not combine with box body 10 or just will in conjunction with the time, it is 53 smooth or be suspended on the surface of sunk area 24 a little that second of garden sheet limited part 50 is cranked arm.At this moment, the garden sheet when the garden sheet contacts first contact jaw 54, can make base portion 51 produce deformation earlier with 54 contacts of first contact jaw, be that the knee angle produces and changes and lever drives first is cranked arm and 52 and second cranked arm 53, make second second contact jaw 55 and the 3rd contact jaw 56 contact garden sheets of cranking arm on 53.At this moment, shown in Figure 20 B, when door body 20 during with box body 10 driving fits, second cranks arm 53 by crank arm 52 lever drives and away from the surface of sunk area 24 of base portion 51 and first, and first contact jaw 54 of garden sheet limited part 50, second contact jaw 55 and the 3rd contact jaw 56 are with the contact of garden sheet.Clearly, because each garden sheet limited part 50 provides three contact jaws in the garden sheet, can more firmly limit the garden sheet and move or opening moves than the direction of both sides toward the opening direction centre.Certainly, present embodiment can also be cranked arm first and be disposed a hinge 57 between two free ends of 52 and on the side near door body 20 inner surfaces 22, this hinge 57 is fixed in a body 20 inner surfaces 22, so when base portion 51 deformation or during angle change of its knee more firmly lever drives first crank arm and 52 and second crank arm 53, first contact jaw 54, second contact jaw 55 and the 3rd contact jaw 56 all can be contacted with the garden sheet closely.
And as the embodiment of aforementioned two contact jaws, this a plurality of gardens sheet limited part 50 each garden sheet limited part 50 wherein can be integrally formed elastic construction (for example: the thermoplastic elastic structure), its base portion 51 and first crank arm 52 or second crank arm 53 can also be unlike material or elastic construction (for example: the thermoplastic elastic structure), as the plastics of different hardness, can make base portion 51 that bigger deformation is arranged and crank arm to be not easy deformation.Certainly, first contact jaw 54, second contact jaw 55 and the 3rd contact jaw 56 can also have a depression, and the garden sheet is absorbed in the depression, and the garden sheet of avoiding moves up and down.And above-mentioned a plurality of gardens sheet limited part 50 can also be to be formed at a base earlier, and this base is fixed in the inner surface 22 of a body 20 or a plurality of gardens sheet limited part 50 is directly directly integrally formed with the inner surfaces 22 of door body 20.
In addition, the inner surface 22 of door body 20 of the present invention can be a plane, can be not cave in, and dispose at least one bolt structure 60 between inner surface 22 and outer surface 21, and dispose a pair of bolt structure 60 in the preferred embodiment.Because bolt structure 60 is identical with aforesaid embodiment, so repeat no more.In addition, when body 20 and box body 10 are covered, therefore can fix a plurality of gardens sheet that has been positioned in the box body 10, can on the inner surface 22 on above-mentioned plane, dispose at least one limiting piece module or dispose at least one limiting piece module near the place of middle section.And the present invention is not limited the structure or the form of this limiting piece module, so it can comprise aforesaid limiting piece module 30, limiting piece module 400 or limiting piece module 500 or similar structure.Similarly, because the detailed construction of limiting piece module is identical with aforesaid embodiment, so repeat no more.
Clearly, bolt structure 60 of the present invention under the drive of cam 62,64 back and forth movements that advance and retreat of carriage, and produce displacement on not any more vertically (promptly vertically) direction, therefore, bolt structure 60 of the present invention is better simply designs.When door body 20 of the present invention covers with box body 10, the a plurality of gardens sheet limited part 50 that is fixed in a body 20 inner surfaces 22 is direct and the garden sheet contacts, and cam 62 drives a pair of carriage 64 and moves to the edge of door body 20, then the preceding transverse plane 646 of carriage 64 is passed the door bolt hole 27 on the body 20 and fix near edge, box body 10 openings, 12 place and with door bolt hole 27 corresponding jacks 28 in.At last, can inflate the gas seal member (not being shown among the figure) that is disposed between a body 20 and the box body 10 via an aerating device again, so that box body 10 inside and external isolation.
Though the present invention describes as above with aforesaid preferred embodiment; right its is not in order to limit the present invention; those skilled in the art without departing from the spirit and scope of the present invention; when can doing a little change and retouching, so the scope of the present invention must be looked the content that the claim scope of the present patent application defined and is as the criterion.
Claims (17)
1; a kind of front open type garden film magazine; mainly comprise a box body; this box body inside is provided with plurality of slots with ccontaining a plurality of gardens sheet; and forming an opening in a side of this box body can be for the input and the output of this a plurality of gardens sheet; and the edge at this box opening place disposes at least one pair of jack; and body; have an outer surface and an inner surface and dispose at least one pair of in the edge of this body and this fastens the hole with a bolt or latch accordingly to jack; this body is to combine with this opening of this box body with this inner surface; and in order to protect this a plurality of gardens sheet of this box body inside, wherein this front open type garden film magazine is characterised in that:
This internal surface configurations one sunk area of this body and this sunk area protrude between the platform two, each should protrude platform internal configurations one bolt structure, this bolt structure comprises a cam and a pair of carriage, dispose a pair of arc guide barrel on this cam and this is to the guide rod snapping on the end of carriage, and each this carriage all has a chute to embed at least one pulley that is fixed in this protrusions platform inside so that this carriage by rotation this to cam with the other end of those carriages in this back and forth movement that advances and retreat in to jack and this door bolt hole.
2, front open type as claimed in claim 1 garden film magazine wherein, disposes a location shell fragment on this carriage, this Location resilient piece one end and this carriage are fixed, and its other end and this body are fixed.
3, front open type as claimed in claim 1 garden film magazine wherein, disposes a location shell fragment on this carriage, this Location resilient piece and this carriage are one-body molded.
4, front open type as claimed in claim 1 garden film magazine, wherein, a pair of guide wheel driving lever of configuration on this other end of this carriage.
5, front open type as claimed in claim 4 garden film magazine, wherein, this is to respectively disposing a pulley on the guide wheel driving lever.
6, front open type as claimed in claim 4 garden film magazine wherein, disposes a location shell fragment on this carriage, this Location resilient piece one end and this carriage are fixed, and its other end and this guide wheel driving lever are fixed.
7, front open type as claimed in claim 1 garden film magazine, wherein, this two protrudes on platform and respectively disposes a limiting piece module.
8, front open type as claimed in claim 7 garden film magazine, wherein, those limiting piece modules have a base and via this base this limiting piece module are fixed on this protrusion platform, and form a plurality of spaced curved portions that prolong on the long limit of this base, each should curved prolong the protuberance that forms approximate half-circular between portion and its free end, and configuration one central guide groove contacts with the garden sheet with the central guide groove by this semicircular protuberance on the protuberance of each this approximate half-circular on each this limiting piece module.
9, front open type as claimed in claim 8 garden film magazine, wherein, the local surface that the central guide groove of this protuberance contacts with the garden sheet coats a wear-resisting consumptive material.
10, front open type as claimed in claim 7 garden film magazine, wherein, those limiting piece modules are made up of a plurality of spaced limited part, limited part on the limiting piece module at each this limited part and this another edge of sunk area aligns, wherein each this limited part has a base portion, this base portion is fixed on this inner surface of this body, and those base portions are on a side of contiguous this sunk area, after connecting a bend, each this bend further extends into one to this sunk area centre and cranks arm, and wherein those are cranked arm and are disposed at the top of this sunk area.
11, front open type as claimed in claim 10 garden film magazine, wherein, this limited part is a kind of elastic parts.
12, front open type as claimed in claim 10 garden film magazine, wherein, this is cranked arm and this bend junction forms one first contact jaw, and the free end that this is cranked arm forms one second contact jaw.
13, front open type as claimed in claim 7 garden film magazine, wherein, this limiting piece module is arranged institute by a plurality of limited parts and is formed, limited part on the limiting piece module at each this limited part and this another edge of sunk area aligns, wherein each this limited part has a base portion, one end of this base portion is fixed on this inner surface of this body, and its other end and one first is cranked arm and is connected, this first is cranked arm and has two free ends, wherein form one first contact jaw than free end away from this sunk area centre, and another free end of this first contact jaw is also cranked arm and is connected with one second relatively, and this second is cranked arm and have one second contact jaw and one the 3rd contact jaw.
14, front open type as claimed in claim 13 garden film magazine, wherein, this first is cranked arm dispose a hinge between this two free end and near on the side of this inner surface.
15, front open type as claimed in claim 14 garden film magazine, wherein, this hinge and this inner surface are fixed.
16; a kind of front open type garden film magazine; mainly comprise a box body; this box body inside is provided with plurality of slots with ccontaining a plurality of gardens sheet; and forming an opening in a side of this box body can be for the input and the output of this a plurality of gardens sheet; and the edge at this box opening place disposes at least one pair of jack; and body; have an outer surface and an inner surface and dispose at least one pair of in the edge of this body and this fastens the hole with a bolt or latch accordingly to jack; this body is to combine with this opening of this box body with this inner surface; and in order to protect this a plurality of gardens sheet of this box body inside, wherein this front open type garden film magazine is characterised in that:
This internal surface configurations one sunk area of this body and this sunk area protrude between the platform two, each should protrude platform internal configurations one bolt structure, this bolt structure comprises a cam, the a pair of arc guide barrel of configuration on it, a pair of carriage, the one end have a guide rod can with the guide groove snapping on this cam, at least one pulley, it is inner and be embedded in the chute of this carriage to be disposed at this protrusion platform, and one the location shell fragment, this Location resilient piece one end is connected with this carriage and its other end is connected with this body so that this carriage by the rotation of this cam make this to the other end of carriage in this back and forth movement that advances and retreat in to jack and this door bolt hole.
17, front open type as claimed in claim 16 garden film magazine, wherein, this two protrudes on platform and respectively disposes a limiting piece module.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200810160830.5A CN101677074B (en) | 2008-09-16 | 2008-09-16 | Front-open type disc plate box with bolt structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200810160830.5A CN101677074B (en) | 2008-09-16 | 2008-09-16 | Front-open type disc plate box with bolt structure |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101677074A true CN101677074A (en) | 2010-03-24 |
| CN101677074B CN101677074B (en) | 2014-10-29 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200810160830.5A Active CN101677074B (en) | 2008-09-16 | 2008-09-16 | Front-open type disc plate box with bolt structure |
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| Country | Link |
|---|---|
| CN (1) | CN101677074B (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102237289A (en) * | 2010-05-07 | 2011-11-09 | 家登精密工业股份有限公司 | Front opening unified pod with elliptical latch structure |
| CN102263046A (en) * | 2010-05-26 | 2011-11-30 | 家登精密工业股份有限公司 | Front Opening Unified Pod (FOUP) with elliptic bolt structure |
| CN105346817A (en) * | 2015-12-03 | 2016-02-24 | 安徽普伦智能装备有限公司 | Limiting device for electric heating tube storage |
| CN112871580A (en) * | 2021-01-19 | 2021-06-01 | 浙江睿自科技有限公司 | Power cable insulating layer coating robot based on millimeter wave imaging |
| WO2023221277A1 (en) * | 2022-05-16 | 2023-11-23 | 上海果纳半导体技术有限公司 | Wafer transmission box |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| JP3556480B2 (en) * | 1998-08-17 | 2004-08-18 | 信越ポリマー株式会社 | Precision substrate storage container |
| CN2427487Y (en) * | 2000-07-04 | 2001-04-25 | 财团法人工业技术研究院 | Chip box improved door structure |
| TWI276580B (en) * | 2003-12-18 | 2007-03-21 | Miraial Co Ltd | Lid unit for thin-plate supporting container |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102237289A (en) * | 2010-05-07 | 2011-11-09 | 家登精密工业股份有限公司 | Front opening unified pod with elliptical latch structure |
| CN102237289B (en) * | 2010-05-07 | 2013-07-24 | 家登精密工业股份有限公司 | Front opening unified pod with elliptical latch structure |
| CN103354214A (en) * | 2010-05-07 | 2013-10-16 | 家登精密工业股份有限公司 | Front opening wafer box with elliptical latch structure |
| CN103354214B (en) * | 2010-05-07 | 2016-04-06 | 家登精密工业股份有限公司 | A kind of front open type wafer box with elliptic latch structure |
| CN102263046A (en) * | 2010-05-26 | 2011-11-30 | 家登精密工业股份有限公司 | Front Opening Unified Pod (FOUP) with elliptic bolt structure |
| CN105346817A (en) * | 2015-12-03 | 2016-02-24 | 安徽普伦智能装备有限公司 | Limiting device for electric heating tube storage |
| CN112871580A (en) * | 2021-01-19 | 2021-06-01 | 浙江睿自科技有限公司 | Power cable insulating layer coating robot based on millimeter wave imaging |
| WO2023221277A1 (en) * | 2022-05-16 | 2023-11-23 | 上海果纳半导体技术有限公司 | Wafer transmission box |
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