CN103354214B - A kind of front open type wafer box with elliptic latch structure - Google Patents
A kind of front open type wafer box with elliptic latch structure Download PDFInfo
- Publication number
- CN103354214B CN103354214B CN201310136812.4A CN201310136812A CN103354214B CN 103354214 B CN103354214 B CN 103354214B CN 201310136812 A CN201310136812 A CN 201310136812A CN 103354214 B CN103354214 B CN 103354214B
- Authority
- CN
- China
- Prior art keywords
- elliptic
- elliptic cam
- open type
- front open
- type wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Packaging Frangible Articles (AREA)
Abstract
The present invention is a kind of front open type wafer box with elliptic latch structure, mainly comprise a box body and a body, tray interior is provided with multiple slot with accommodating multiple disk, one side of box body forms input and output that an opening supplies above-mentioned multiple disk, door body has an outer surface and an inner surface, and door body is it combines with the opening of box body with inner surface, and multiple disks of tray interior are placed in order to protection, wherein the feature of front open type wafer box is: at least one bolt structure of internal configurations of door body, it comprises one and has the elliptic cam of a pair V-groove and its surface is provided with a chute, respectively there is for a pair the carriage of a fitting portion, and one is located at correcting structure on carriage, fitting portion embeds in chute to be embedded on elliptic cam by pair of sliding device respectively.
Description
Technical field
The present invention about a kind of front open type wafer box, particularly about a kind of bolt structure be configured in the door body of front open type wafer box.
Background technology
Semiconductor wafer, owing to need need coordinate process apparatus through the process of various different flow process, therefore can be moved to different work stations.Conveniently the carrying and avoiding of disk is subject to extraneous pollution, and an airtight container often can be utilized to carry for automation equipment.Please refer to shown in Fig. 1, is the wafer box schematic diagram of prior art.This wafer box is a kind of front open type wafer box (FrontOpeningUnifiedPod; FOUP); there is a box body 10 and a body 20; box body 10 inside is provided with multiple slot 11 can the accommodating multiple disk (not being shown in figure) of level; and have an opening 12 to supply setting out and loading of disk at the side mask of box body 10; and door body 20 has an outer surface 21 and an inner surface 22; door body 20 is combined with the opening 12 of box body 10 by inner surface 22, in order to protect multiple disks of box body 10 inside.In addition, the outer surface 21 of door body 20 configures at least one bolt perforate 23, in order to open or closed front open type wafer box.In above-mentioned front open type wafer box, because semiconductor wafer is flatly placed in box body 10 inside, therefore, in front open type wafer box handling process, need a disk limited part (waferrestraint), to produce dystopy because of vibrations to avoid disk or move toward opening 12 direction of box body 10.
Please refer to shown in Fig. 2, is the door body schematic diagram of a kind of front open type wafer box disclosed by a U.S. the 6th, 736, No. 268 issued patents.As shown in Figure 2, the inner surface 22 of door body 20 is configured with a sunk area 24, this sunk area 24 extends to bottom 222 from the top 221 of inner surface 22 and is between two, left and right bolt structure 230 (inner in door body), and in sunk area 24, be configured with disk limiting piece module more further, this disk limiting piece module is made up of two, left and right disk limited part 100, and there is multiple disk contact head 110 on each disk limited part 100, its relative disk is held to utilize this disk contact head 110, because of vibrations, dystopy or the opening direction toward box body move in transport process to avoid disk.But, above-mentioned disk limiting piece module is arranged among the sunk area 24 of a body 20 inner surface 22, this makes disk only can develop its inner surface 22 of a body 20 or only can fall into sunk area 24 a little, cannot effectively allow disk fall into sunk area 24 to shorten the size of front open type wafer box anteroposterior diameter.In addition, disk limiting piece module and the disk particle dust produced that rubs easily is accumulated in sunk area 24, need first the sunk area 24 of disk limiting piece module with door body 20 inner surface 22 to be separated on clean, separation so repeatedly and assembling, easily cause getting loose of disk limiting piece module.
In addition, in another part U.S. the 5th, 711, No. 427 issued patents, expose bolt structure 230 schematic diagram in the door body 20 of front open type wafer box.As shown in Figure 3.The combination of door body 20 and box body 10 mainly in door body 20 both sides of (i.e. outer surface 21 and inner surface 22 between) movable pin 231 is set respectively, and be provided with jack 13 (please refer to Fig. 1) at the adjacent edges of box body 10 opening part can be corresponding with pin 231, and utilize the rotation of the bolt perforate 23 (please refer to Fig. 1) be located on a body 20 outer surface 21, pin 231 and jack 13 is made to be combined with each other and then to reach object door body 20 being fixed on box body 10, the rotation of bolt perforate 23 is wherein utilized to be can be reached by a circular cam 232 to control the round activity of pin 231.
And in the practical operation of semiconductor factory, the unlatching of front open type wafer box is mainly by a disk loader mechanism, disk loader mechanism at least has unlatching door bolt (Latchkey), disk loader mechanism utilizes the bolt perforate 23 on door body 20 outer surface 21 of this unlatching door bolt insertion front open type wafer box, and rotating cam 232 completes unlatching or closed front open type wafer box to drive movable pin 231.In addition, according to semiconductor equipment and materials industry association (SemiconductorEquipmentandMaterialsInternational, SEMI) in the middle of all standard formulated, wherein has a standard specification for the size of opening door bolt and bolt perforate, but the front open type wafer box according to this designed by specification, can make to open door bolt to coordinate when rotating with bolt perforate, produce the braking error of about 9.44 degree, therefore when front open type wafer box horizontal positioned, if when the error of opening between door bolt and bolt perforate is greater than about 9.44 degree, unlatching door bolt cannot rotate bolt perforate and rotate to be with moving cam, and cause a body to open smoothly.
In addition, the United States Patent (USP) of the bolt structure of the Men Tizhong of the front open type wafer box that other has disclosed also has US5,915, and 562, US5,957,292, US6622883, US6902063 etc.When these bolt structures are all to make Men Tiyu box body engage, reach airtight object, its movable pin can produce displacement in a longitudinal direction, to be fixed by one flexible gas seal member by movable pin, closes front open type wafer box and airtight object to reaching simultaneously.But these existing bolt structure patents are all made up of the mechanical structure of complexity, except increasing except failure rate, also in the process of actuating, too much mechanical friction can be produced, and causes the pollution of disk; In addition, use the displacement of movable pin to fix elasticity gas seal member, its airtight less effective, cannot keep airtight for a long time.
And, door body 20 inner surface of front open type wafer box common at present also can be configured with some limited parts, and when being covered on box body 10 with side door body 20, these limited parts can contact with disk, disk is completely fixed, in front open type wafer box, produces dystopy because of transportation to reduce disk.And in order to avoid limited part contact with disk time, strength causes too greatly collision and the friction of disk, therefore, as shown in Figure 4, having some United States Patent (USP)s namely to disclose a kind ofly is configured between cam 232 in bolt structure 230 and door body 20 by flexible member 86, rotate when cam 232 and drive movable pin 231 to close in the process of front open type wafer box, this flexible member 86 can play the effect of damping, the limited part be configured on a body 20 inner surface can be contacted with disk under gentle and smooth-going state, so just can the problem of solving collision and friction, United States Patent (USP) relevant to this design in addition also comprises US6, 880, 718, US7, 168, 587, US7, 182, 203 etc.But the mode of this similar side direction traction, easily produces a skew strength, can cause and cannot snap in the jack 13 of box body 10, cause box body 10 and door body 20 to cover smoothly, and then cause the puzzlement on processing procedure on the direction of movable pin 231 movement.
Summary of the invention
In door body structure according to the front open type wafer box of prior art, its bolt is all made up of the mechanical structure of complexity, except increasing except failure rate, also in the process of actuating, can produce too much mechanical friction, and may cause the pollution of disk.For this reason, a main purpose of the present invention is to provide the bolt structure being configured with elliptic cam in a kind of front open type wafer box, makes its carriage only on single plane, carry out back and forth movement, therefore can simplify the structure of bolt.
Another main purpose of the present invention is to provide the bolt structure being configured with elliptic cam in a kind of front open type wafer box, by coordinating of fitting portion and chute, when making its elliptic cam drive carriage to carry out back and forth movement on single plane, frictional force during back and forth movement can be reduced, therefore can pollution be reduced.
Another main purpose of the present invention is to provide the bolt structure being configured with elliptic cam in a kind of front open type wafer box, by the mutual interference of correcting structure and V-groove (v-notch), when making the angle of opening door bolt have an error, also can accurately insert bolt perforate and make elliptic cam start, to compensate and to eliminate the braking error of opening and producing between door bolt and bolt perforate, a body is made to be able to smooth unlatching.
A main purpose more of the present invention is to provide the bolt structure being configured with elliptic cam in a kind of front open type wafer box, by the mutual interference of correcting structure and long and narrow shell fragment, when making the angle of opening door bolt have an error, also can accurately insert bolt perforate and make elliptic cam start, to compensate and to eliminate the braking error of opening and producing between door bolt and bolt perforate, a body is made to be able to smooth unlatching.
Of the present invention also have a main purpose to be the bolt structure providing configuration line elliptic cam in a kind of front open type wafer box, by cooperatively interacting of location structure and locating notch, make elliptic cam turn to level or vertical time, the function of automatically locating can be had.
Of the present invention also have a main purpose to be to provide the bolt structure being configured with elliptic cam in a kind of front open type wafer box, by cooperatively interacting of elastic piece structure and locating notch, make elliptic cam turn to level or vertical time, the function of automatically locating can be had.
The present invention also has a main purpose to be to provide the bolt structure being configured with elliptic cam in a front open type wafer box, and it can configure disk limited part on the inner surface of door body, can fixed wafer effectively.
The present invention also has a main purpose to be to provide the bolt structure being configured with elliptic cam in a front open type wafer box, the braking parts of its elliptic cam circle centre position can made by high molecule plastic material, wherein particularly use the polyetheretherketonematerials materials (PEEK) with high abrasion resistance, the particulate produced because of round utilization can be reduced, reduce the pollution in wafer box.
For reaching above-mentioned projects, the present invention discloses a kind of front open type wafer box, mainly comprise a box body, tray interior is provided with multiple slot with accommodating multiple disk, and input and the output that an opening can supply multiple disk is formed in a side of box body, and an edge at this box opening place configures at least one pair of jack, and a body, this body has an outer surface and an inner surface and configures at least one pair of latch aperture corresponding to jack to this in the edge of this body, door body combines with the opening of box body with inner surface, and in order to protect multiple disks of tray interior, wherein the feature of front open type wafer box is: internal surface configurations one sunk area of door body and sunk area protrudes between platforms two, each protrudes platform interior and configures a bolt structure, and bolt structure comprises the braking parts that an elliptic cam and is configured at elliptic cam middle position, at least one pair of V-groove is configured at one of elliptic cam on the surface, and be provided with at least one chute in the surface of elliptic cam, respectively there is the carriage of a fitting portion and this is embedded in chute to fitting portion for a pair, carriage is caused to be embedded on elliptic cam, and one is located at correcting structure on each carriage, the rotation of elliptic cam is controlled by braking parts, this is travelled to and fro between in this relative jack and this latch aperture respectively to carriage.
Wherein, the oval platform of configuration one in the one side with chute of this elliptic cam further.
Wherein, the V-groove of this elliptic cam is configured at the larger two ends of this oval platform diameter.
Wherein, further in the two ends there is at least one pair of relative locating notch being configured at this elliptic cam diameter.
Wherein, on each this carriage, further configuration one location structure and this location structure combined by the elastic piece structure of a basket sky and a location division.
Wherein, each this carriage comprises a pair Location resilient piece further, and this links into an integrated entity to Location resilient piece and this carriage.
Wherein, the material of this elliptic cam and this braking parts is selected in following combination: metal material or high molecule plastic material.
Wherein, on this two protrusions platform, respectively at least one limiting piece module is configured further.
The present invention then discloses a kind of front open type wafer box, mainly comprise a box body, tray interior is provided with multiple slot with accommodating multiple disk, and input and the output that an opening can supply multiple disk is formed in a side of box body, and an edge at this box opening place configures at least one pair of jack, and a body, this body has an outer surface and an inner surface and configures at least one pair of latch aperture corresponding to jack to this in the edge of this body, door body combines with the opening of box body with inner surface, and in order to protect multiple disks of tray interior, wherein the feature of front open type wafer box is: internal surface configurations one sunk area of door body, and sunk area protrudes between platform two, each protrudes platform interior and configures a bolt structure, and bolt structure comprises the braking parts that an elliptic cam and is configured at elliptic cam middle position, and multiple v-notch is configured on the opposite end of the longer and shorter diameter of elliptic cam, one of elliptic cam is provided with at least one chute on the surface, respectively there is the carriage of a fitting portion and this is embedded in chute to fitting portion for a pair, this is caused to be embedded on elliptic cam to carriage, and a pair correcting structure is configured near this one end mutually chimeric with elliptic cam to carriage respectively, and correcting structure is made up of a fixed wheel and at least one pair of the correcting driving lever be configured on this fixed wheel, the rotation of elliptic cam is controlled by braking parts, this is travelled to and fro between in this relative jack and this latch aperture respectively to carriage.
Wherein, each this v-notch has a longer long limit and a shorter minor face.
Wherein, comprise an elastic piece structure further and be configured on each this carriage, the two ends middle extension of two side direction in the hollow structure of carriage of this elastic piece structure can synthesize one the 3rd end.
Wherein, this fixed wheel has at least one pair of locating notch further and is located at this to the corresponding part of correcting driving lever, and the 3rd end of this elastic piece structure engages location with this mutually to locating notch.
The present invention separately discloses a kind of front open type wafer box, mainly comprise a box body, tray interior is provided with multiple slot with accommodating multiple disk, and input and the output that an opening can supply multiple disk is formed in a side of box body, and a body, door body has an outer surface and an inner surface, door body combines with the opening of box body with inner surface, and in order to protect multiple disks of tray interior, wherein the feature of front open type wafer box is: internal surface configurations one sunk area of door body and this sunk area protrudes between platforms two, each protrudes platform interior and configures a bolt structure, and bolt structure comprises the braking parts that an elliptic cam and is configured at the elliptic cam middle position of bolt, one of elliptic cam is provided with at least one chute on the surface, respectively there is for a pair the carriage of a fitting portion, and this embeds in chute to fitting portion, this is caused to be embedded on elliptic cam to carriage, one correcting structure being configured at elliptic cam centre, and one frame be located at the upper long and narrow shell fragment of correcting structure, the rotation of elliptic cam is controlled by braking parts, each carriage is travelled to and fro between in this relative jack and this latch aperture.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of existing front open type wafer box.
Fig. 2 is the door body schematic diagram of existing front open type wafer box.
Fig. 3 is another body schematic diagram of existing front open type wafer box.
Fig. 4 is another body schematic diagram again of existing front open type wafer box.
Fig. 5 A is the door body schematic diagram of a kind of front open type wafer box of the present invention.
Fig. 5 B is the schematic diagram of bolt structure of the present invention.
Fig. 5 C is the schematic perspective view of elliptic cam of the present invention.
Fig. 6 A ~ Fig. 6 E is the schematic diagram of bolt structure start of the present invention.
Fig. 7 A is the door body schematic diagram of a kind of front open type wafer box of the present invention.
Fig. 7 B is the front schematic view of bolt structure of the present invention.
Fig. 7 C is the reverse side schematic diagram of bolt structure of the present invention.
Fig. 8 A ~ Fig. 8 E is the schematic diagram of bolt structure start of the present invention.
Fig. 9 A is the door body schematic diagram of a kind of front open type wafer box of the present invention.
Fig. 9 B is the schematic diagram of bolt structure of the present invention.
Figure 10 A ~ Figure 10 C is the schematic diagram of bolt structure start of the present invention.
Figure 11 is the schematic diagram of a kind of front open type wafer box of the present invention.
[main element symbol description]
10 box body 24 sunk areas
100 disk limited parts 25 protrude platform
110 disk contact head 26 latch aperture
11 slot 30 bolt structures
12 opening 31 elliptic cams
13 jack 311V type grooves
20 body 312 chutes
21 outer surface 313 locating notches
The oval platform of 22 inner surface 314
221 top 315 brakings place
222 bottom 32 carriages
23 bolt perforate 321 fitting portions
230 bolt structure 322 correcting structures
231 pin 323 location structures
232 cam 324 elastic piece structures
325 location division 512 chutes
33 Location resilient piece 513 braking parts
40 bolt structure 52 carriages
41 elliptic cam 521 fitting portions
411V type breach 53 correcting structure
41L long limit 531 rectangular flange
41S minor face 532 circular inner groove
415 braking place 533 rollers
412 chute 534 bearings
42 carriage 534a annulus
421 fitting portion 534b balls
422 correcting structures 535 are bored a hole
423 fixed wheel 536 hollow circuit cylinders
The long and narrow shell fragment of 424 correcting driving lever 54
425 elastic piece structure 60 limiting piece modules
426 locating notch 86 flexible members
50 bolt structure X, Y diameters
51 elliptic cams
Embodiment
Because the present invention discloses a kind of front open type wafer box; it has a box body and a body; tray interior is provided with multiple slot can the accommodating multiple disk of level; and have an opening to supply setting out and being loaded into of disk at the side mask of box body; and door body is combined with the opening of box body by its inner surface, in order to protect multiple disks of tray interior.In addition, the outer surface of door body configures at least one bolt perforate, in order to open or closed front open type wafer box.Due to, the structure of some front open type wafer boxes that the present invention uses is same as described above, therefore it manufactures or processing procedure in detail, therefore in the following description, does not do complete description.And graphic in following interior literary composition, also not according to the actual complete drafting of relative dimensions, its effect is only expressing the schematic diagram relevant with feature of the present invention.In addition, the technology contents used for making the present invention, goal of the invention and the effect reached thereof have more complete and clearly disclose, hereby in lower detailed description, and see also taken off diagram and figure number.
First, the basic structure (please refer to Fig. 2) of front open type wafer box (FOUP), the inner surface 22 comprising a body 20 configures a sunk area 24, and sunk area 24 protrudes between platform 25 two, and each protrudes the inner each configuration of platform 25 one bolt structure 230.Then, please refer to Fig. 5 A, is the top view of bolt structure first embodiment of the present invention.As shown in Figure 5 B, each bolt structure 30 by have a pair V-groove 311 elliptic cam 31, respectively have for a pair a fitting portion 321 carriage 32, be located at this for a pair respectively the Location resilient piece 33 that the correcting structure 322 on carriage 32 and a pair and each carriage 32 link into an integrated entity formed; Wherein, above-mentioned correcting structure 322 is positioned at one end of carriage 32 and generally u-shaped.In addition, the surface of elliptic cam 31 is provided with at least one chute 312, makes the fitting portion 321 of pair of sliding device 32 be embedded in chute 312 respectively, can pair of sliding device 32 is embedded on elliptic cam 31 thus; Then please refer to Fig. 5 C, at least one relative locating notch 313 is respectively provided with at the two ends of the major and minor axis diameter of elliptic cam 31, and the one side at elliptic cam 31 with chute 312 is separately convexly equipped with an oval platform 314, the area of this oval platform 314 is little compared with the area of elliptic cam 31, and the V-groove 311 on elliptic cam 31, be namely be located on the larger two ends of oval platform 314 diameter.
In the first embodiment of the present invention, elliptic cam 31 can be metal material (as stainless steel etc.), its also can be high molecule plastic material (as Teflon, PEEK etc.) formed, the present invention is not limited.As shown in Figure 5 B, the circle centre position of elliptic cam 31 is separately provided with a braking parts 315, after the bolt perforate 23 of (not being shown in figure) insertion door body 20 is fastened in the unlatching of disk loader mechanism with a bolt or latch, namely can be connected with braking parts 315, rotate to drive elliptic cam 31.In the process of rotating owing to driving elliptic cam 31, open door bolt to contact with braking parts 315, therefore braking parts 315 of the present invention can made by high molecule plastic material, wherein particularly use the polyetheretherketonematerials materials (PEEK) with high abrasion resistance, the particulate produced because of round utilization can be reduced, reduce the pollution in wafer box.
Then, please refer to Fig. 6 A to Fig. 6 E, is the schematic diagram of the elliptic cam rotation process of the first embodiment of the present invention.The present embodiment is by controlling the rotation of elliptic cam 31, this can be made to travel to and fro between relative jack 13 (as shown in Figure 1) respectively with latch aperture 26 (as shown in Figure 2) to carriage 32, it is made flowing mode such as Fig. 6 A to Fig. 6 E and sequentially presents, it is a schematic diagram rotating 90 degree clockwise, by the long wheelbase of elliptic cam from, in order to carriage 32 is released latch aperture 26 and inserts in jack 13.Vice versa, if by elliptic cam rotation process by such as Fig. 6 E to Fig. 6 A sequentially in current, for namely when elliptic cam rotation process rotates the schematic diagram of 90 degree with a counterclockwise, can carriage 32 be extracted out jack 13 and regain in latch aperture 26.This theory of mechanics is because elliptic cam 31 has an a longer diameter X and shorter diameter Y (as shown in Figure 5A), and therefore when elliptic cam 31 rotates, carriage 32 can with caused by the change of elliptic cam 31 radius.In addition, be stressed that especially, by the rotating manner of above-mentioned elliptic cam 31, also the correcting structure 322 of carriage 32 can be made mutually to interfere with both V-grooves 311 of elliptic cam 31, when turning to certain angle to make elliptic cam 31, elliptic cam 31 can be automatically rotated to a location, makes carriage 32 release or regain in latch aperture 26.
Further illustrate the correcting structure 322 of the present embodiment and V-groove 311 interference mode mutually: when elliptic cam 31 turned position is Fig. 6 A, (namely the locating notch 313 at the two ends of the diameter Y that the location division 325 (please refer to Fig. 5 B) of the location structure 323 of pair of sliding device 32 is shorter with elliptic cam 31 contacts), correcting structure 322 and oval platform 314 only contact and mutually resist; When elliptic cam 31 turned position is Fig. 6 B, because elliptic cam 31 radius is elongated, carriage 32 can be made externally to stretch out, and because of carriage 32 and Location resilient piece 33 be integrally connected therefore, Location resilient piece 33 also can be subject to the traction of carriage 32 and receive a pressure; (turn to Fig. 6 C from the position of Fig. 6 A when elliptic cam 31 turns to Fig. 6 C and be about 68 degree), correcting structure 322 also can resist mutually with an apexes contact of the V-groove 311 of elliptic cam 31, and the pressure now suffered by Location resilient piece 33 can be greater than Fig. 6 B; When elliptic cam 31 turns to Fig. 6 D (angle of rotating is greater than 68 degree), correcting structure 322 contacts with V-groove 311 and mutually resists part by its summit, therefore Fig. 6 C that the pressure suffered by Location resilient piece 33 can be less than, and be now subject to the event of Location resilient piece 33 earth pressure release, elliptic cam 31 can go to Fig. 6 E automatically, stagnates between two summits that correcting structure 322 can slip into V-groove 311.And via above-mentioned action, carriage 32 now has been pushed out latch aperture 26 and insertion is positioned in the middle of the jack 13 on box body 10, make on the sealed box body 10 of a body 20.In the present embodiment, and when front open type wafer box horizontal positioned of the present invention, disk loader mechanism (LoadPort) unlatching door bolt (not being shown in figure) even if angular error be greater than 9.44 degree, still can with elliptic cam 31 start, to compensate and to eliminate the actuating error of opening and producing between door bolt and bolt perforate 23, a body is made to be able to sealed or unlatching smoothly.Similarly, and if make a body 20 depart from box body 10 time, be then the position of Fig. 6 E counterclockwise to rotate, to about rotating 22 degree during Fig. 6 C, and when large 22 degree of rotational angle, correcting structure 322 can leave V-groove 311 immediately, and completes breakdown action.
Do except flowing mode except above-mentioned elliptic cam 31, refer again to Fig. 5 B.The present invention is in this one end mutually chimeric with elliptic cam 31 to carriage 32 close, respectively be provided with a location structure 323, this location structure 323 is the elastic piece structure 324 of a basket sky, and it is outstanding from elastic piece structure 324 to have a location division 325, and this location structure 323 connects as one with carriage 32, and with made by the mode of ejection formation, when elliptic cam 31 is automatically rotated to a location, when elliptic cam 31 turns to horizontal location as shown in Figure 6A, or when elliptic cam 31 turns to perpendicular positioning as illustrated in fig. 6e, location division 325 on location structure 323 can engage location mutually with locating notch 313, locate to provide auto-alignment and the function stopped.
Please refer to Fig. 7 A, be the top view of the second embodiment of bolt structure of the present invention, and Fig. 7 A is the front schematic view of bolt structure, Fig. 7 C is the reverse side schematic diagram of Fig. 7 B.As shown in Figure 7 B, each bolt structure 40 is by an elliptic cam 41, and four the circumference summits place on elliptic cam 41 have respectively an a pair formation v-notch 411 elliptic cam 41, respectively have for a pair a fitting portion 421 (as seen in figure 7 c) carriage 42 and be located at this for a pair respectively the correcting structure 422 on carriage 42 formed.Then please refer to Fig. 7 C, the surface of elliptic cam 41 is provided with at least one chute 412, make the fitting portion 421 of pair of sliding device 42 be embedded in chute 412 respectively, pair of sliding device 42 can be embedded on elliptic cam 41 thus.In addition, be configured in the structure of the v-notch 411 on the opposite end of elliptic cam 41 length diameter, please refer to Fig. 7 B, its v-notch 411 is formed with the minor face 41S on shorter one side by having longer long limit 41L by one.In addition, correcting structure 422 is located near carriage 42 one end mutually chimeric with elliptic cam 41, this correcting structure 422 is made up of a fixed wheel 423 and a pair correcting driving lever 424 be configured on fixed wheel 423, and this is protrude from the edge of fixed wheel 423 and be located at adjacent part to correcting driving lever 424.In addition, on the position of fixed wheel 423 between two correcting driving levers 424, at least one pair of locating notch 426 configurable further.
In the present embodiment, elliptic cam 41 can be metal material (as stainless steel etc.), its also can be high molecule plastic material (as Teflon, PEEK etc.) formed, the present invention is not limited.As shown in Figure 7 B, the circle centre position of elliptic cam 41 is separately provided with a braking parts 415, after the unlatching door bolt of disk loader mechanism (LoadPort) inserts the bolt perforate 23 of door body 20, namely can be connected with braking parts 415.In the process of rotating owing to driving elliptic cam 41, open door bolt to contact with braking parts 415, therefore, in order to reduce the friction of opening and fastening with a bolt or latch and contacting with braking parts 415, braking parts 415 of the present invention can made by high molecule plastic material, wherein particularly use the polyetheretherketonematerials materials (PEEK) with high abrasion resistance, the particulate produced because of round utilization can be reduced, reduce the pollution in wafer box.
Then, please refer to Fig. 8 A to Fig. 8 E, is the schematic diagram of the elliptic cam rotation process of second embodiment of the invention.The present embodiment, by controlling the rotation of elliptic cam 41, can make carriage 42 travel to and fro between a pair jack 13 (as shown in Figure 1) with a pair latch aperture 26 (as shown in Figure 2).First, when the jack 13 that will make on carriage 42 and latch aperture 26 in conjunction with time (when the door body 20 of front open type wafer box will be closed), it is made flowing mode such as Fig. 8 A to Fig. 8 C and sequentially presents, be that elliptic cam 41 is rotated 90 degree with counterclockwise, carriage 42 released latch aperture 26 and inserts in jack 13; And when the jack 13 that will make on carriage 42 departs from latch aperture 26 (when the door body 20 of front open type wafer box will be opened), it is made flowing mode such as Fig. 8 C to Fig. 8 E and sequentially presents, be by elliptic cam 41 to rotate 90 degree clockwise, extract carriage 42 out jack 13 and regain latch aperture 26.Above-mentioned theory of mechanics is because elliptic cam 41 has an a longer diameter X and shorter diameter Y (as shown in Figure 7 A), and therefore when elliptic cam 41 rotates, carriage 42 can with caused by the change of elliptic cam 41 radius.In addition, by the rotating manner of elliptic cam 41, also the correcting structure 422 of carriage 42 can be made mutually to interfere with both v-notch 411 of elliptic cam 41, when turning to certain angle to make elliptic cam 41, elliptic cam 41 can be automatically rotated to a location makes carriage 42 release or regain in latch aperture 26.
Then, the correcting structure 422 further illustrating the present embodiment is described as follows with the mutual interference mode of v-notch 411: when elliptic cam 41 turned position is Fig. 8 A, correcting driving lever 424 is arranged in the middle of the minor face 41S of v-notch 411; When elliptic cam 41 be unlocked door bolt counterclockwise to rotate time (turn to Fig. 8 C from the position of Fig. 8 A and be about 68 degree), the long limit 41L of v-notch 411 can promote correcting driving lever 424 and then drive fixed wheel 423 to rotate, because elliptic cam 41 radius is elongated, carriage 42 can be made externally to stretch out; And when elliptic cam 41 turns to Fig. 8 B position, one end of v-notch 411 to be sitting between a pair correcting driving lever 424 and to be in contact with it and mutually to resist; When elliptic cam 41 continues to rotate counterclockwise (angle of namely rotating is greater than 68 degree), correcting driving lever 424 will slip in the middle of v-notch 411 according to the long limit 41L of v-notch 411 automatically, use correcting structure 422 stops and a correcting driving lever 424 can contact and mutually resist the minor face 41S in v-notch 411, when the angle that now elliptic cam 41 rotates counterclockwise is about 90 degree, as shown in Figure 8 C.And via above-mentioned action, carriage 42 can be pushed out latch aperture 26 and insert in jack 13, make a body 20 sealed on box body 10; In the present embodiment, when front open type wafer box horizontal positioned of the present invention, disk loader mechanism (LoadPoet) unlatching door bolt (not being shown in figure) even if angular error be greater than 9.44 degree, still can with elliptic cam 41 start, to compensate and to eliminate the actuating error of opening and producing between door bolt and bolt perforate 23, a body is made to be able to sealed or unlatching smoothly.Then, if when making a body 20 depart from box body 10, be then rotated in a clockwise direction about 68 degree (namely to shown in Fig. 8 D) by the position of Fig. 8 C, and when large 68 degree of rotational angle, correcting driving lever 424 can leave v-notch 411 immediately, and completes a body 20 breakdown action.
Do except flowing mode except above-mentioned boss wheel 41, the present invention discloses a kind of embodiment being separately provided with an elastic piece structure 425 on carriage 42 again.Please please refer to Fig. 7 B again, the two ends middle extension of two side direction in the hollow structure of carriage 42 of elastic piece structure 425 can synthesize one the 3rd end, to form an approximate T-type structure, so elastic piece structure 425 and carriage 42 connect as one, and with made by the mode of ejection formation, in addition, again this 3rd end is embedded on a locating notch 426 on fixed wheel 423, when elliptic cam 41 is automatically rotated to a location, elliptic cam 41 turns to horizontal location as shown in Figure 8 A, or elliptic cam 41 turns to perpendicular positioning as shown in Figure 8 C, 3rd end of the T-type structure of elastic piece structure 425 can engage location with a pair locating notch 426 respectively mutually, locate to provide auto-alignment and the function stopped.
Again then, please refer to Fig. 9 A, is the top view of the 3rd embodiment of bolt structure 50 of the present invention.As shown in Figure 9 B, each bolt structure 50 is located at by an elliptic cam 51, the carriage 52, respectively for a pair with a fitting portion 521 the upper long and narrow shell fragment 54 that the correcting structure 53 of elliptic cam 51 centre and a frame be located at correcting structure 53 and is formed, wherein, the material of long and narrow shell fragment 54 can be have flexible material, such as high molecule plastic material, elastomeric material etc., the present invention is not limited.
The present embodiment is provided with at least one chute 512 on the surface of elliptic cam 51, makes the fitting portion 521 of pair of sliding device 52 be embedded in chute 512 respectively, pair of sliding device 52 can be embedded on elliptic cam 51 thus.In addition, the correcting structure 53 of the present embodiment comprises a rectangular flange 531 and forms rectangular flange 531, pair roller 533 and a bearing 534 with a circular inner groove 532 inside it, wherein the relative corner of one inside rectangular flange 531 is respectively provided with inner side and the outside that a perforation 535 runs through rectangular flange 531, makes to be arranged at a roller 533 respectively in each perforation 535; Circle centre position separately in circular inner groove 532 is provided with a hollow circuit cylinder 536, and wherein, elliptic cam 51, rectangular flange 531 and hollow circuit cylinder 536 are one of the forming and make; In addition, more have a bearing 534 to be sheathed on hollow circuit cylinder 536, and the edge of this bearing 534 has the annulus 534a of a groove, and in the groove of annulus 534a, configure multiple ball 534b.Namely the present embodiment is the use by bearing 534, except can increasing the smooth degree of elliptic cam 51 rotation, also can reduce the particulate produced because of friction, avoid being polluted in wafer box.
The detailed start process of the present embodiment is then described.First, in the present embodiment, elliptic cam 51 can be metal material (as stainless steel etc.), its also can be high molecule plastic material (as Teflon, PEEK etc.) formed, the present invention is not limited.Then, please refer to shown in Fig. 9 B, the circle centre position of elliptic cam 51 is separately provided with a braking parts 513, this braking parts 513 is a rectangle structure, and with the diameter X horizontal arrangement (as shown in Figure 9 A) of its long axis direction and elliptic cam 51, and correcting structure 53 is located in braking parts 513, and do not arrange with it that a pair corner of roller 533 is overlapping with two broadsides of braking parts 513 respectively to connect.After the unlatching door bolt of disk loader mechanism (LoadPort) inserts the bolt perforate 23 of door body 20, namely can be connected with braking parts 513.In the process of rotating owing to driving elliptic cam 41, open door bolt to contact with braking parts 513, therefore, braking parts 513 of the present invention can made by high molecule plastic material, wherein particularly use the polyetheretherketonematerials materials (PEEK) with high abrasion resistance, the particulate produced because of round utilization can be reduced, reduce the pollution in wafer box.
Then, please refer to Figure 10 A to Figure 10 C, is the schematic diagram of the elliptic cam rotation process of third embodiment of the invention.The present embodiment, by controlling the rotation of elliptic cam 51, can make carriage 52 travel to and fro between a pair jack 13 (as shown in Figure 1) with a pair latch aperture 26 (as shown in Figure 2).First, when the jack 13 that will make on carriage 42 and latch aperture 26 in conjunction with time (when the door body 20 of front open type wafer box will be closed), it is made flowing mode such as Figure 10 A to Figure 10 C and sequentially presents, that elliptic cam 41 is rotated 90 degree with one, clockwise carriage 52 is released latch aperture 26 and inserts in jack 13; And when the jack 13 that will make on carriage 42 departs from latch aperture 26 (when the door body 20 of front open type wafer box will be opened), it is made flowing mode such as Figure 10 C to Figure 10 A and sequentially presents, that elliptic cam 41 is rotated 90 degree, to extract carriage 52 out jack 13 and to regain latch aperture 26 with a counterclockwise.Above-mentioned theory of mechanics is because elliptic cam 51 has an a longer diameter X and shorter diameter Y (as shown in Figure 9 A), and therefore when elliptic cam 51 rotates, carriage 52 can with caused by the change of elliptic cam 51 radius.In addition, by the rotating manner of above-mentioned elliptic cam 51, also can make one end of carriage 52, correcting structure 53 and long and narrow shell fragment 54 three of elliptic cam 51 interfere mutually, when turning to certain angle to make elliptic cam 51, elliptic cam 51 can be automatically rotated to a location makes carriage 52 release or regain in latch aperture 26.
Again then, the mode of mutually interfering for one end of above-mentioned carriage 52, correcting structure 53 and long and narrow shell fragment 54 three of elliptic cam 51 is described as follows: when elliptic cam 51 turned position is Figure 10 A, carriage 52 contacts with long and narrow shell fragment 54 and mutually resists, and a side adjacent contact of the inner edge of long and narrow shell fragment 54 and correcting structure 53 rectangular flange 531, therefore the long and narrow shell fragment 54 frame A/F be located on correcting structure 53 approximates the width of rectangular flange 531.(turn to Figure 10 B from the position of Figure 10 A when elliptic cam 51 rotates clockwise and be about 45 degree), long and narrow shell fragment 54 and rectangular flange 531 way of contact are changed into by side adjacent contact and are contacted with roller 533, and roller 533 also can slide along the inner edge of long and narrow shell fragment 54, now the A/F of long and narrow shell fragment 54 approximates the cornerwise length of rectangular flange 531.When elliptic cam 51 continues to rotate clockwise (angle of namely rotating is greater than 45 degree), the openings of sizes of long and narrow shell fragment 54 can be successively decreased with the rotation of rectangular flange 531, now long and narrow shell fragment 54 can produce a restoring force and roller 533 is squeezed and till automatically sliding into the inner edge adjacent contact with a side of rectangular flange 531 and long and narrow shell fragment 54, as illustrated in figure 10 c, and now the long and narrow shell fragment 54 frame A/F be located on correcting structure 53 approximates the width of rectangular flange 531; And via above-mentioned action, carriage 52 can be pushed out latch aperture 26 and insert jack 13 works as, make on the sealed box body 10 of a body 20; In the present embodiment, and when front open type wafer box horizontal positioned, disk loader mechanism (LoadPort) unlatching door bolt (not being shown in figure) even if angular error be greater than 9.44 degree, still can with elliptic cam 51 start, to compensate and to eliminate the actuating error of opening and producing between door bolt and bolt perforate 23, a body is made to be able to sealed or unlatching smoothly.If when then making a body 20 depart from box body 10, then rotated with counter clockwise direction by the position of Figure 10 C, to about rotating about 45 degree during Figure 10 B, and when large 45 degree of rotational angle, the rotation of rectangular flange 531 can change the change of long and narrow shell fragment 54 A/F, make long and narrow shell fragment 54 produce a restoring force and impel the slip of roller 533, and complete breakdown action.In addition, by cooperatively interacting of two rollers 533 and long and narrow shell fragment 54, also can significantly reduce the particulate produced because of friction, avoid being polluted in wafer box.
Then, referring to shown in Figure 11, is the schematic diagram of a kind of wafer box of the present invention.A kind of front open type wafer box of this wafer box, mainly comprise a box body 10 and a body 20, multiple slot 11 is provided with accommodating multiple disk in the inside of box body 10, and have an opening 12 can provide input and the output of disk in one of them side of box body 10, door body 20 is then have outer surface 21 and an inner surface 22, the outer surface 21 of door body 20 configures at least one bolt perforate (not being shown in figure), in order to open or closed front open type wafer box, and be about configured with a sunk area 24 and sunk area 24 protrudes between platforms 25 two in middle at the inner surface 22 of door body 20, wherein two internal configurations protruding platform 25 aforesaid bolt structure 60.The main purpose of this sunk area 24 is used to the multiple disks accepting box body 10 inside, to reduce the anteroposterior diameter size of whole wafer box, and protrude each configuration one disk limiting piece module 60 on platform 25 two, except can limiting disk and moving toward opening direction, also can be used to control the amount that disk enters sunk area 24.
The length of above-mentioned door body 20 inner surface 22 sunk area 24 is relevant with slot 11 spacing of box body 10 inside and disk quantity.With 12 time disk, for the spacing between disk, existing standard regulation between industry, can hold robotic arm simultaneously and stretch into reaching maximum disk carrying density and carry out disk input and output; And wafer box common at present approximately can accommodating 25 disks.But the width of sunk area 24 of the present invention and the degree of depth, then can be more flexible, when the thickness of door body 20 remains unchanged, that the degree of depth of sunk area 24 is established is comparatively large, then disk can be allowed comparatively to enter sunk area 24, and now the width of sunk area 24 also need with increase.
In addition, the inner surface 22 of door body 20 of the present invention can be a plane, can not cave in, and between inner surface 22 and outer surface 21, be configured with at least one bolt structure (element 30,40,50 as the aforementioned), and be configured with a pair bolt structure in a preferred embodiment.Because bolt structure 30,40,50 is identical with aforesaid embodiment, therefore repeat no more.In addition, when covering to make a body 20 and box body 10, the multiple disks be positioned in box body 10 can be fixed, therefore can on the inner surface 22 of above-mentioned plane, be configured with at least one limiting piece module 60 or be configured with at least one limiting piece module close to the place of middle section, as shown in figure 11.
Clearly, bolt structure of the present invention is under the drive of elliptic cam, and it carries out the back and forth movement advancing and retreat, and on any longitudinal direction (namely vertical) direction, does not produce displacement, therefore, and the better simply design of bolt structure one of the present invention.When Men Tiyu box body of the present invention covers, elliptic cam drives pair of sliding device to move to the edge of door body, then to be fixed at box opening place adjacent edges and in the jack corresponding with latch aperture through the latch aperture on door body by the front plan of carriage.Finally, can inflate the gas seal member be configured between Men Tiyu box body (not being shown in figure) via an aerating device again, to make tray interior and external isolation.
Although the present invention discloses as above with aforesaid preferred embodiment; so itself and be not used to limit the present invention; any familiar similar those skilled in the art; without departing from the spirit and scope of the present invention; when doing a little change and retouching, what therefore scope of patent protection of the present invention must define depending on the claim appended by this specification is as the criterion.
Claims (6)
1. one kind has the front open type wafer box of elliptic latch structure, mainly comprise a box body, this tray interior is provided with multiple slot with accommodating multiple disk, and input and the output that an opening can supply the plurality of disk is formed in a side of this box body, and an edge at this box opening place configures at least one pair of jack, and a body, this body has an outer surface and an inner surface and configures at least one pair of latch aperture corresponding to jack to this in the edge of this body, this body combines with this opening of this box body with this inner surface, and in order to protect the plurality of disk of this tray interior, wherein the feature of this front open type wafer box is:
This internal surface configurations one sunk area of this body and this sunk area protrudes between platforms two, each this protrusion platform interior configures a bolt structure, this bolt structure comprises the braking parts that an elliptic cam and is configured at the middle position of this bolt, one of this elliptic cam is provided with at least one chute on the surface, respectively there is for a pair the carriage of a fitting portion, one correcting structure being configured at this elliptic cam centre, and one frame be located at this to the long and narrow shell fragment on correcting structure, wherein, this embeds in this chute to fitting portion, this is caused to be embedded on this elliptic cam to carriage, the rotation of this elliptic cam is controlled by this braking parts, this is respectively travelled to and fro between in this relative jack and this latch aperture carriage.
2. there is the front open type wafer box of elliptic latch structure as claimed in claim 1, it is characterized in that, this correcting structure comprises a rectangular flange with a circular inner groove, a pair roller and a bearing, inside this rectangular flange one relative corner is respectively provided with a perforation, and configure a hollow circuit cylinder in the circle centre position of this circular inner groove, and a tangent plane of this hollow circuit cylinder is connected with this elliptic cam surface.
3. there is the front open type wafer box of elliptic latch structure as claimed in claim 2, it is characterized in that, further a roller is set in each this perforation.
4. have the front open type wafer box of elliptic latch structure as claimed in claim 2, it is characterized in that, this bearing is an annulus with a groove.
5. there is the front open type wafer box of elliptic latch structure as claimed in claim 4, it is characterized in that, in this annulus, be configured with multiple ball.
6. have the front open type wafer box of elliptic latch structure as claimed in claim 1, it is characterized in that, the material of this long and narrow shell fragment selects in following combination: high molecule plastic material or elastomeric material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310136812.4A CN103354214B (en) | 2010-05-07 | 2010-05-07 | A kind of front open type wafer box with elliptic latch structure |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201010173448 CN102237289B (en) | 2010-05-07 | 2010-05-07 | Front opening unified pod with elliptical latch structure |
| CN201310136812.4A CN103354214B (en) | 2010-05-07 | 2010-05-07 | A kind of front open type wafer box with elliptic latch structure |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201010173448 Division CN102237289B (en) | 2010-05-07 | 2010-05-07 | Front opening unified pod with elliptical latch structure |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103354214A CN103354214A (en) | 2013-10-16 |
| CN103354214B true CN103354214B (en) | 2016-04-06 |
Family
ID=44887813
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310136812.4A Active CN103354214B (en) | 2010-05-07 | 2010-05-07 | A kind of front open type wafer box with elliptic latch structure |
| CN 201010173448 Active CN102237289B (en) | 2010-05-07 | 2010-05-07 | Front opening unified pod with elliptical latch structure |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201010173448 Active CN102237289B (en) | 2010-05-07 | 2010-05-07 | Front opening unified pod with elliptical latch structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (2) | CN103354214B (en) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102263046A (en) * | 2010-05-26 | 2011-11-30 | 家登精密工业股份有限公司 | Front Opening Unified Pod (FOUP) with elliptic bolt structure |
| TWI473752B (en) * | 2011-12-13 | 2015-02-21 | Gudeng Prec Ind Co Ltd | Latch structure of a large-sized front opening unified wafer pod |
| CN104140055B (en) * | 2014-08-01 | 2015-03-25 | 无为县特种电缆产业技术研究院 | Method for lifting object through cam mechanism |
| CN104129745B (en) * | 2014-08-01 | 2015-05-20 | 南通华工机械有限公司 | Method for lifting object through cam system |
| CN104140059B (en) * | 2014-08-01 | 2015-05-27 | 南通华工机械有限公司 | Cam system for lifting object |
| CN104891355B (en) * | 2015-04-17 | 2017-11-28 | 江苏迈道通信科技有限公司 | A kind of tower crane device and its operation method of cleanable pollutant |
| CN104787684B (en) * | 2015-04-17 | 2017-09-08 | 中启胶建集团有限公司 | A kind of tower crane device and its operation method by hydraulic regulation |
| CN104909283A (en) * | 2015-04-17 | 2015-09-16 | 舒泳军 | Tower crane apparatus capable of realizing self-cleaning, and running method thereof |
| CN116825689A (en) * | 2023-08-29 | 2023-09-29 | 芯岛新材料(浙江)有限公司 | Lid and have its wafer box |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1500053A (en) * | 2000-12-13 | 2004-05-26 | 恩特格里斯开曼有限公司 | System for preventing improper insertion of foup door into foup |
| CN101677073A (en) * | 2008-09-17 | 2010-03-24 | 家登精密工业股份有限公司 | Front opening type wafer box with elliptic latch structure |
| CN101677074A (en) * | 2008-09-16 | 2010-03-24 | 家登精密工业股份有限公司 | Front-open type disc plate box with bolt structure |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4115115B2 (en) * | 2001-10-29 | 2008-07-09 | 信越ポリマー株式会社 | Substrate storage container lid locking mechanism |
| US6880718B2 (en) * | 2002-01-15 | 2005-04-19 | Entegris, Inc. | Wafer carrier door and spring biased latching mechanism |
| JP4169736B2 (en) * | 2004-10-29 | 2008-10-22 | 信越ポリマー株式会社 | Substrate storage container |
| JP4841383B2 (en) * | 2006-10-06 | 2011-12-21 | 信越ポリマー株式会社 | Lid and substrate storage container |
-
2010
- 2010-05-07 CN CN201310136812.4A patent/CN103354214B/en active Active
- 2010-05-07 CN CN 201010173448 patent/CN102237289B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1500053A (en) * | 2000-12-13 | 2004-05-26 | 恩特格里斯开曼有限公司 | System for preventing improper insertion of foup door into foup |
| CN101677074A (en) * | 2008-09-16 | 2010-03-24 | 家登精密工业股份有限公司 | Front-open type disc plate box with bolt structure |
| CN101677073A (en) * | 2008-09-17 | 2010-03-24 | 家登精密工业股份有限公司 | Front opening type wafer box with elliptic latch structure |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102237289A (en) | 2011-11-09 |
| CN103354214A (en) | 2013-10-16 |
| CN102237289B (en) | 2013-07-24 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103354214B (en) | A kind of front open type wafer box with elliptic latch structure | |
| TWI418696B (en) | Switch structure of a thin-plate transporting vessel | |
| JP4573566B2 (en) | Storage container | |
| JP4668179B2 (en) | Substrate storage container | |
| KR20200014906A (en) | Board Transfer Box and Board Auto Transfer System | |
| KR101451477B1 (en) | Front opening unified pod with latch structure | |
| US11573244B2 (en) | Pipettor system | |
| TWI394695B (en) | A wafer container with oval latch | |
| US7971723B1 (en) | Wafer container with oval latch | |
| CN104206046A (en) | Mounting head cleaning device | |
| WO2000033376A1 (en) | Container | |
| KR102008202B1 (en) | Mapping apparatus for load port that detects the presence or position of wafer | |
| CN103247556B (en) | Handling device | |
| CN101677073B (en) | Front opening type wafer box with elliptic latch structure | |
| JP2006120791A (en) | Substrate storing container | |
| CN101677074B (en) | Front-open type disc plate box with bolt structure | |
| CN101685788A (en) | Front open type wafer box with latch and airtight structure | |
| CN102263046A (en) | Front Opening Unified Pod (FOUP) with elliptic bolt structure | |
| KR20130005747U (en) | Container for storing semiconductor device | |
| JP2010234835A (en) | Automatic carrying device | |
| JP2010540362A (en) | Docking device with two coupling closures and at least one locking unit for transferring bulk material in an environmentally sealed state | |
| JP3177145U (en) | Container for semiconductor devices | |
| JP4848271B2 (en) | Wafer storage system | |
| JP5686699B2 (en) | Lid and substrate storage container | |
| JP5886768B2 (en) | Article posture changing device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |