CN101677074B - Front-open type disc plate box with bolt structure - Google Patents
Front-open type disc plate box with bolt structure Download PDFInfo
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- CN101677074B CN101677074B CN200810160830.5A CN200810160830A CN101677074B CN 101677074 B CN101677074 B CN 101677074B CN 200810160830 A CN200810160830 A CN 200810160830A CN 101677074 B CN101677074 B CN 101677074B
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Abstract
The invention provides a front-open type disc plate box, comprising a box body, wherein, one side surface of the box body is provided with an opening; the inner part of the box body is provided with plural slots which can accommodate plural disc plates; and a door body is utilized to combine with the opening of the box body to protect the disc plates inside the slots. The invention is characterized in that at least one bolt structure is collocated between the outer surface and the inner surface of the door body. The bolt structure comprises a cam and a pair of sliding devices, wherein, the cam is provided with a pair of arc-shaped glide slots which are used for fastening a guide rod on one end of the sliding device; each sliding device is provided with a sliding groove which is used for the embedment of the pulley wheels arranged between the outer surface and the inner surface of the door body, to ensure that forward and backward back and forth movement of the other end of the sliding device can be carried out by rotating the cams.
Description
Technical field
The invention relates to a kind of front-open wafer box, particularly about the bolt structure (Latch) of a kind of Men Tizhong that is disposed at front-open wafer box.
Background technology
Semiconductor wafer, because need pass through the processing of various different flow processs and need to coordinate process equipment, therefore can be moved to different work stations.In order to facilitate the carrying of wafer and to avoid being subject to extraneous pollution, often can utilize an airtight container to carry for automation equipment.Please refer to shown in Fig. 1, is the wafer case schematic diagram of known technology.This wafer case is a kind of front-open wafer box (Front Opening Unified Pod; FOUP); there is a box body 10 and a body 20; box body 10 inside are provided with multiple slots 11 can the accommodating multiple wafers of level; and there is an opening 12 in a side of box body 10 and can supply setting out and loading of wafer; and door body 20 has an outer surface 21 and an inner surface 22, door body 20 is to be combined with the opening 12 of box body 10 by inner surface 22, in order to protect multiple wafers of box body 10 inside.In addition, on the outer surface 21 of door body 20, configure at least one bolt perforate 23, in order to open or sealing front-open wafer box.In above-mentioned front-open wafer box, because semiconductor wafer is to be flatly placed in box body 10 inside, therefore, in front-open wafer box handling process, need a wafer limiting piece (wafer restraint), to avoid wafer produce dystopy or move toward opening 12 directions of box body 10 because of vibrations.
Please refer to shown in Fig. 2, is the door body schematic diagram of U.S.'s bulletin patent 6,736,268 disclosed a kind of front-open wafer boxes.As shown in Figure 2, the inner surface 22 of door body 20 disposes a sunk area 24, this sunk area 24 is to extend to bottom 222 from the top 221 of inner surface 22 and between two of left and right bolt structure 230 (in door body inside), and in sunk area 24, further dispose again wafer limiting piece module, this wafer limiting piece module is made up of two wafer limiting pieces 100 in left and right, and on each wafer limiting piece 100, there are multiple wafer contact heads 110, to utilize this wafer contact head 110 to hold its relative wafer, avoid wafer to move because of vibrations dystopy or toward the opening direction of box body in transport process.But, above-mentioned wafer limiting piece module is arranged among the sunk area 24 of a body 20 inner surfaces 22, this makes wafer only can develop a body 20 its inner surfaces 22 or only can fall into a little sunk area 24, cannot effectively allow wafer fall into sunk area 24 to shorten the size of front-open wafer box anteroposterior diameter.In addition, wafer limiting piece module and the wafer particle dust producing that rubs is easily accumulated in sunk area 24, on clean, need first wafer limiting piece module to be separated with the sunk area 24 of door body 20 inner surfaces 22, separation and assembling so repeatedly, easily cause getting loose of wafer limiting piece module.
In addition door body 20 its bolt structure 230 schematic diagrames of open front-open wafer box in another part United States Patent (USP) 5,711,427.As shown in Figure 3, the combination of door body 20 and box body 10 is mainly that the both sides of in door body 20 (being between outer surface 21 and inner surface 22) arrange respectively movable pin 231, and near the edge of box body 10 opening parts, being provided with jack (not being shown in figure) can be corresponding with pin 231, and the rotation of the bolt perforate on a body 20 outer surfaces 21 is located in utilization, make pin 231 and jack interosculate and then reach the object that door body 20 is fixed on to box body 10, the round movable system that wherein utilizes the rotation of bolt perforate to control pin 231 sees through a circular cam (cam) 232 and can reach.
And in the enforcement of semiconductor factory is handled, the unlatching of front-open wafer box is mainly by a wafer loader mechanism (not being shown in figure), wafer loader mechanism at least has a unlatching door bolt (not being shown in figure), wafer loader mechanism is the bolt perforate 23 utilizing on these door body 20 outer surfaces 21 of opening door bolt insertion front-open wafer box, and rotating cam 232 is opened or sealing front-open wafer box to drive movable pin 231 to complete.
In addition, the United States Patent (USP) of the bolt structure of the Men Tizhong of other published front-open wafer box also has: US5,915,562, US5,957,292, US6622883and US6902063 etc.These bolt structures for make Men Tiyu box body engage time, reach airtight object, its movable pin can produce displacement in a longitudinal direction, to one flexible gas seal member is fixed by movable pin, closes front-open wafer box and airtight object to reach simultaneously.But these known bolt patents are all made up of complicated mechanical structure, except meeting increases failure rate, also can, in the process of actuating, produce too many mechanical friction, and cause the pollution of wafer; In addition, fix elasticity gas seal member via the displacement of movable pin, its airtight effect is not good enough, cannot keep for a long time airtight.
And, on door body 20 inner surfaces of at present common front-open wafer box, also can dispose some limited parts, while covering box body 10 with side door body 20, these limited parts can contact with wafer, wafer is completely fixed, with reduce wafer in front-open wafer box because transportation produces dystopy.And while contacting with wafer for fear of limited part, strength is too large and cause collision and the friction of wafer; Therefore, as shown in Figure 4, having some United States Patent (USP)s to disclose is a kind ofly configured in elastic parts 86 between cam 232 in bolt structure 230 and door body 20, when cam 232 rotates and drives movable pin 231 to seal in the process of front-open wafer box, this elastic parts 86 can be brought into play the effect of damping, making to be disposed at limited part on a body 20 inner surfaces can contact with wafer under gentle and smooth-going state, like this just can solving collision and the problem of friction.These patents comprise: US6,880,718, US7,168,587and US7,182,203 etc.But the mode of this similar side direction traction, produces a skew strength in the direction easily moving at movable pin 231 and can cause in the jack that cannot snap in box body 10, cause box body 10 and door body 20 to cover.Meanwhile, also can increase the manufacturing cost of front-open wafer box.
Summary of the invention
In door body structure according to the front-open wafer box of known technology, its bolt is all made up of complicated mechanical structure, except meeting increases failure rate, also can, in the process of actuating, produce too many mechanical friction, and may cause the pollution of wafer.For this reason, the object of the present invention is to provide the bolt structure that disposes cam in a kind of front-open wafer box, make its carriage only on single plane, carry out back and forth movement, therefore can simplify the structure of bolt.
Another object of the present invention is to provide the bolt structure that disposes cam in a kind of front-open wafer box, can be by the design of pulley, while making its cam driven carriage carry out back and forth movement on single plane, the frictional force can reduce back and forth movement time, therefore can reduce pollution.
A further object of the present invention is to provide the bolt structure that disposes cam in a kind of front-open wafer box, it can form a sunk area between bolt structure, make the effective accommodating wafer of this sunk area energy, therefore can shorten the size of front-open wafer box anteroposterior diameter, and allow the center of gravity of overall chip box concentrate on the centre of wafer case, to increase the stability of wafer case.
The present invention also has an object to be to provide the bolt structure that disposes cam in a front-open wafer box, and it can configure wafer limiting piece on the inner surface of door body, fixed wafer effectively.
For achieving the above object, front-open wafer box provided by the invention, comprise a box body, box body inside is provided with multiple slots with accommodating multiple wafers, and forming an opening in a side of box body can be for input and the output of multiple wafers, and the edge at box opening place configures at least one pair of jack, an and body, the edge with an outer surface and an inner surface and Yu Menti configures at least one pair of and above-mentioned jack is fastened hole accordingly with a bolt or latch, door body is to combine with the opening of box body with inner surface, and in order to protect multiple wafers of box body inside, wherein front-open wafer box is characterised in that: internal surface configurations one sunk area of door body and sunk area are between two protrusion platforms, each protrudes platform internal configurations one bolt structure, bolt structure comprises a cam and pair of sliding device, on cam, dispose a pair of arc guide barrel therewith to the guide rod snapping on one end of carriage, and each carriage all has a chute to embed at least one pulley that is fixed on protrusion platform inside, so that carriage is by the back and forth movement that rotates this cam is advanced the other end of these carriages and retreated in hole in above-mentioned jack and door bolt.
Front-open wafer box provided by the invention, also comprise a box body, box body inside is provided with multiple slots with accommodating multiple wafers, and forming an opening in a side of box body can be for input and the output of multiple wafers, and the edge at box opening place configures at least one pair of jack, an and body, the edge with an outer surface and an inner surface and Yu Menti configures at least one pair of and above-mentioned jack is fastened hole accordingly with a bolt or latch, door body is to combine with the opening of box body with inner surface, and in order to protect multiple wafers of box body inside, wherein front-open wafer box is characterised in that: between door external surface and inner surface, configure at least one bolt structure, bolt structure comprises a cam and pair of sliding device, on cam, dispose a pair of arc guide barrel therewith to the guide rod snapping on one end of carriage, and each carriage all has a chute to embed at least one pulley being disposed between an external surface and inner surface, so that the back and forth movement that carriage can be advanced the other end of these carriages and retreat by rotating cam in above-mentioned jack and door bolt hole.
Brief description of the drawings
Fig. 1 is the wafer case schematic diagram of known technology;
Fig. 2 is the door body schematic diagram of the front-open wafer box of known technology;
Fig. 3 is the Men Tiqi bolt structure schematic diagram of the front-open wafer box of known technology;
Fig. 4 is the door body schematic diagram of the front-open wafer box of known technology;
Fig. 5 is a kind of door body schematic diagram of front-open wafer box of the present invention;
Fig. 6 A and Fig. 6 B are the enlarged diagrams of the carriage of the bolt structure in Fig. 5 of the present invention;
Fig. 7 is the another kind of door body schematic diagram of front-open wafer box of the present invention;
Fig. 8 A and Fig. 8 B are the enlarged diagrams of the carriage of the bolt structure in Fig. 7 of the present invention;
Schematic diagram when Fig. 9 is closing of bolt structure of the present invention;
Figure 10 is the schematic diagram of a kind of front-open wafer box of the present invention;
Figure 11 is the schematic diagram of a kind of its wafer limiting piece module of front-open wafer box of the present invention;
Figure 12 is the schematic diagram that its wafer limiting piece module of a kind of front-open wafer box of the present invention is fixed on a body;
Figure 13 is to be that its wafer limiting piece module of a kind of front-open wafer box of the present invention is in the schematic diagram of restriction wafer;
Figure 14 A is the integrally formed schematic diagram of its left and right wafer limiting piece module of a kind of front-open wafer box of the present invention;
Figure 14 B is the schematic diagram that the integrally formed structure of its left and right wafer limiting piece module of a kind of front-open wafer box of the present invention is fixed on a body;
Figure 15 is to be the schematic diagram of another kind of front-open wafer box of the present invention;
Figure 16 is the schematic diagram of another kind of its wafer limiting piece module of front-open wafer box of the present invention;
Figure 17 A is the schematic diagram of the firm contact wafer of its wafer limiting piece of another kind of front-open wafer box of the present invention;
Figure 17 B is that its wafer limiting piece of another kind of front-open wafer box of the present invention is in the schematic diagram of restriction wafer;
Figure 18 is the schematic diagram of another front-open wafer box of the present invention;
Figure 19 is the schematic diagram of another its wafer limiting piece module of front-open wafer box of the present invention;
Figure 20 A is the not schematic diagram of contact wafer of its wafer limiting piece of another front-open wafer box of the present invention; And
Figure 20 B is that its wafer limiting piece of another front-open wafer box of the present invention is in the schematic diagram of restriction wafer.
Primary clustering symbol description in accompanying drawing
10 box body 11 slots
12 20 of openings bodies
21 outer surface 22 inner surfaces
24 sunk areas 25 protrude platform
26 outstanding posts 27 are fastened hole with a bolt or latch
28 jacks
30 limiting piece module 31 bases
The long limit of 31S minor face 31L
The 32 curved semicircular protuberances of the 32C of portion that prolong
32G central authorities guide groove 33 installing holes
34 holes
400 limiting piece module 40 limited parts
41 base portion 42 bends
43 44 first contact jaws of cranking arm
45 second contact jaw 500 limiting piece modules
50 limited part 51 base portions
52 first crank arm 53 second cranks arm
54 first contact jaw 55 second contact jaws
56 the 3rd contact jaw 57 hinges
W wafer 60 bolt structures
62 cam 621 guide grooves
64 carriage 642 chutes
644 guide rod 643 guide wheel driving levers
6431 pulley 646 planes
66 pulley 662 pulleys
664 pulley 68 Location resilient pieces
Embodiment
For technology contents, goal of the invention that the present invention is used and effect of reaching thereof have more complete and clearly describe, below coordinate accompanying drawing to do in detail.
Please refer to Fig. 5, is a kind of door body schematic diagram of front-open wafer box of the present invention.As shown in Figure 5, in door body 20, include a pair of bolt structure 60, and each bolt structure 60 comprises a cam 62 and carriage 64 a pair of and cam 62 two ends snappings, wherein, cam 62 is provided with a pair of guide groove 621 to offer corresponding carriage 64 snappings, and each carriage 64 all has a chute 642 to embed for the pulley 66 being disposed between a body 20 outer surfaces and inner surface.
Then, please refer to Fig. 6 A, is cam in Fig. 5 62 and the enlarged diagram of carriage 64 contact jaws.As shown in Figure 6A, carriage 64 snaps together via the guide rod 644 on its one end (in carriage another side) and the guide groove 621 on cam 62, and wherein, guide groove 621 is an arc structure.In the time that door body 20 will be closed the opening of box body 10 12, can be first by door body 20 and box body 10 combinations, then rotating cam 62.In the time that cam 62 is rotated, the guide groove 621 being located thereon also can be driven simultaneously; For example: counterclockwise 90-degree rotation; Clearly, carriage 64 can be pushed away to the door body 20 of both sides by guide groove 621, make the plane 646 of the other end of carriage 64 be able to through the door bolt hole 27 on door body 20 and stretch near the edge that is arranged in box body 10 opening 12 places and the jack (be not shown in figure) corresponding with door bolt hole 27, make box body 10 and door body 20 be combined into one to close the action of box body 10.In the time of cam 62 clockwise direction 90-degree rotation, the plane 646 of carriage 64 can depart from door bolt hole 27, and box body 10 and door body 20 can be separated.Therefore, the present invention can be by the back and forth movement that makes carriage 64 advance and retreat in jack and door bolt hole 27 rotation of cam 62.
In addition, in the process being driven by cam 62 at carriage 64, because embedding, the chute 642 of carriage 64 has at least one pulley 66, therefore, and the frictional force can reduce carriage 64 and carry out back and forth movement time.In an embodiment of the present invention, cam 62 can be metal material, and it can be also that high molecule plastic material forms, and the present invention is not limited.And cam 62 its profiles can be circular cams, but it can be also an oval-shaped cam.In addition, carriage 64, near near cam 62 ends, links together with one end of a Location resilient piece 68, and these Location resilient piece 68 its other ends are fixed on a body 20.Therefore for example, in the time that cam 62 rotates (counter clockwise direction 90-degree rotation), carriage 64 can be pushed away to door bolt hole 27 directions of door body 20 by cam 62, the plane 646 of carriage 64 is able to through the door bolt hole 27 on door body 20, now, can makes Location resilient piece 68 compressed.Then, for example,, in the time that door body 20 will be opened (clockwise direction 90-degree rotation), along with cam 62 clockwise directions rotate, the power that Location resilient piece 68 also can provide according to Hooke's law, drives carriage 64 to return to the position of opening.In an embodiment of the present invention, carriage 64 and Location resilient piece 68 can be metal materials, and it can be also that high molecule plastic material forms, and the present invention is not limited.The material of pulley 66 is not also limited.
In addition, as shown in Figure 6B, in a preferred embodiment, pulley 66 is to be configured in couples between the outer surface and inner surface of a body 20, and each other at a distance of a suitable distance.Therefore, in the time that pulley 662 and pulley 664 are embedded in the chute 642 of carriage 64, this can be correctly to pulley 66 and smoothly the plane 646 of guided slidable device 64 be able to through the door bolt hole 27 on door body 20.
To emphasize at this, above-mentioned is all operating process that bolt structure 60 is described with a cam 62 and carriage 64, but in fact, each cam 62 contacts with pair of sliding device 64, and each body 20 internal configurations has a pair of bolt structure 60 (please refer to Fig. 5).
Then, refer again to Fig. 7, carriage 64 its Location resilient pieces 68 of the present invention can also not be fixed on a body 20, Location resilient piece 68 can be one-body molded with carriage 64, carriage 64 can be fixed near near of cam 62 ends in Location resilient piece 68 one end, and Location resilient piece 68 other ends are fixed on or close to the plane 646 of the other end of carriage 64.In addition,, as shown in Fig. 7, Fig. 8 A and Fig. 8 B, near in the plane 646 of a body 20 ends, can further configure a pair of guide wheel driving lever 643 at carriage 64.One end of this guide wheel driving lever 643 is buckled in the upper of plane 646 movably, on the other end of guide wheel driving lever 643, can be connected with a pulley 6431 again, so that when carriage 64 is advanced by cam 62 drives, can pass the door bolt hole 27 being arranged on a body 20 jack 28 that smoothly slips into box body 10, so side can not produce because of friction pollutant.Wherein, jack 28 profiles on box body 10 can be identical with guide wheel driving lever 643, in order to the plane 646 of accommodating guide wheel driving lever 643 and carriage 64.
Please refer to Fig. 9, is the schematic diagram of bolt structure of the present invention in the time closing.For example, in the time that cam 62 rotates (: counterclockwise 90-degree rotation), carriage 64 can be pushed away to door bolt hole 27 directions of door body 20 by cam 62, makes the plane 646 of carriage 64 and a pair of guide wheel driving lever 643 that is located thereon can smoothly slip into through the door bolt hole 27 on door body 20 and pulley 6431 jack 28 of box body 10.Clearly, now, Location resilient piece 68 is compressed.Then, for example, in the time that door body 20 will be opened (: clockwise direction 90-degree rotation), along with cam 62 rotates, the power that Location resilient piece 68 also can provide according to Hooke's law, drives the plane 646 of the other end of carriage 64 to return to the position of opening.Certainly, it can also be fixed on carriage 64 near near cam 62 ends in one end above-mentioned Location resilient piece 68, and the other end is fixed on guide wheel driving lever 643, makes guide wheel driving lever 643 also can more successfully return to the position of opening.In an embodiment of the present invention, carriage 64, Location resilient piece 68 and guide wheel driving lever 643 can be metal materials, and it can be also that macromolecule material plastics form, and the present invention is not limited.The material of pulley 66 is not also limited.
Then, referring to shown in Figure 10, is the schematic diagram of a kind of front-open wafer box of the present invention.This front-open wafer box, mainly comprise a box body 10 and a body 20, be provided with multiple slots 11 in the inside of box body 10 with accommodating multiple wafers, and there is an opening 12 that input and the output of wafer can be provided in one of them side of box body 10, door body 20 is to have an outer surface 21 and an inner surface 22, outer surface 21 at least one bolt perforate (not being shown in Figure 10) of configuration of door body 20, in order to open or sealing front-open wafer box, and dispose a sunk area 24 and sunk area 24 in the about middle of inner surface 22 of door body 20 between two protrusion platforms 25, wherein two internal configurations of protruding platform 25 aforesaid bolt structure 60.The main purpose of this sunk area 24 is the multiple wafers for accepting box body 10 inside, to reduce the anteroposterior diameter size of whole wafer case, and on two protrusion platforms 25 each configuration one wafer limiting piece module 30, except limiting wafer toward opening direction moves, the amount that also can be used to control wafer and enter sunk area 24.
The length of above-mentioned door body 20 inner surface 22 sunk areas 24 is relevant with slot 11 spacing and the number of wafers of box body 10 inside.With the wafer of 12 inch (approximately 30 centimetres), for the spacing between wafer, existing standard regulation between industry, can hold robotic arm simultaneously and stretch into and carry out wafer input and output to reaching maximum crystal chip bearing density; And at present common wafer case system approximately can accommodating 25 wafer.But the width of sunk area 24 of the present invention and the degree of depth, can be more flexible, in the time that the thickness of door body 20 remains unchanged, what the degree of depth of sunk area 24 was established is larger, can allow wafer to enter sunk area 24, and now the width of sunk area 24 also needs to increase thereupon.
Secondly, referring to shown in Fig. 1 and Figure 12, is its wafer limiting piece module of a kind of front-open wafer box of the present invention and the schematic diagram that is fixed on a body thereof.Wafer limiting piece module 30 is to have a strip base 31, strip base 31 has two long limit 31L and two minor face 31S, it is adjacent with sunk area 24 in two long limit 31L, having a long limit 31L, and on above-mentioned adjacent long limit 31L, form multiple spaced curved portions 32 that prolong, each curved protuberance 32C that forms approximate half-circular between portion 32 and its free end that prolongs, and on the protuberance 32C of approximate half-circular, dispose a central guide groove 32G, to be contacted with wafer by the central guide groove 32G of semicircular protuberance 32C, can limit corresponding wafer moves toward opening direction.
Its central guide groove 32G of the protuberance 32C of above-mentioned approximate half-circular is for accepting wafer, and the width of central guide groove 32G can be identical with the thickness of wafer, can allow wafer be absorbed in this central guide groove 32G, to avoid moving up and down of wafer.And can be coated a kind of wear-resisting consumptive material on the surface of central its contact wafer of guide groove 32G, and for example: polyether-ether-ketone (polyetheretherketone, PEEK), to reduce the friction to wafer.In addition, wafer limiting piece module 30 can be integrally formed structure, and can be formed or be made by two kinds of different materials by a kind of material, for example: by base 31 and curvedly prolong that portion 32 makes with a kind of material and at the curved semicircular protuberance 32C that forms again another kind of material in portion 32 that prolongs.Clearly, the base of strip 31 with curved prolong portion 32 be shape at angle, this angle is about 10～60 degree.Because the wafer limiting piece module 30 of sunk area 24 both sides is symmetrical, therefore, when wafer limiting piece module 30 is in restriction when wafer (as shown in figure 13), can produce one only push away toward center wafer point direction make a concerted effort, can not cause rocking about wafer.And wafer limiting piece module 30 is except limiting wafer toward opening direction moves, also allow wafer almost fall into completely sunk area 24, the anteroposterior diameter size of wafer case is dwindled, and allow the center of gravity of overall chip box concentrate on the centre of wafer case, to increase the stability of wafer case.And as shown in figure 11, due to jagged between the curved multiple semicircular protuberance 32C prolonging in portion 32, therefore can relatively there be bullet shape in the curved portion 32 that prolongs, can allows the compressing of wafer and have a little distortion.
In addition, from Figure 12 and Figure 13, base 31 has multiple installing holes 33, on inner surface 22, there is outstanding post 26 with respect to these a few installing holes 33 places, wafer limiting piece module 30 is fixed on the protrusion platform 25 of a body 20 inner surface 22 sunk area 24 both sides to snap in the mode of (snap on).Certainly, for the convenience of producing, also like can wafer limiting piece module 30 is directly integrally formed with door body 20 inner surfaces 22, to avoid coming off of wafer limiting piece module 30.Then, please refer to Figure 14 A and Figure 14 B, the wafer limiting piece module 30 of sunk area 24 both sides can also be integrally formed, and this integrally formed structure is to have a hole 34 with the sunk area 24 to the body 20 of answering the door.And this integrally formed structure can also be fixed on a body 20 inner surfaces 22 or directly integrally formed with body 20 inner surface 22 by the mode that snaps in (snap on).
Secondly, referring to shown in Figure 15, is the schematic diagram of another kind of front-open wafer box of the present invention.This front-open wafer box is identical with the front-open wafer box of above-mentioned the 10th figure, comprises a box body 10 and a body 20, and different is, and to be fixed on the wafer limiting piece module 400 of a body 20 inner surface 22 sunk area 24 both sides different from above-mentioned wafer limiting piece module 30.As shown in Figure 16 and Figure 17 A, the wafer limiting piece module 400 of sunk area 24 both sides is made up of multiple spaced wafer limiting piece 40, and wafer limiting piece 40 relative on the limiting piece module 400 of each wafer limiting piece 40 and sunk area 24 another sides aligns, wherein each limited part 40 has a base portion 41, base portion 41 is fixed on a body 20 inner surfaces 22, and base portion 41 has the contiguous sunk area 24 of a side and extends into the opening direction of box body 10 after a bend 42 at above-mentioned side, transferring sunk area 24 centre to extends into one and cranks arm 43, make these multiple 43 both sides, top that are disposed at sunk area 24 of cranking arm, and there is one first contact jaw 44 in above-mentioned 43 places that join with bend 42 of cranking arm, 43 the free end of cranking arm has one second contact jaw 45.As shown in Figure 17 A, each wafer limiting piece 40 can be integrally formed elastic construction (for example: thermoplastic elastic structure), when door body 20 be not combined with box body 10 or just will in conjunction with time, the first contact jaw 44 of wafer limiting piece 40 and online (44-45) of the second contact jaw 45 with door body 20 medial surface 22 parallel to each other.Now, wafer first contacts with the second contact jaw 45, in the time that wafer contacts the second contact jaw 45, can make bend 42 produce deformation and lever drives cranks arm 43, i.e. the first contact jaw 44 contact wafer in order of another contact jaw that makes to crank arm on 43.Now, as shown in Figure 17 B, closely sealed and the first contact jaw 44 of wafer limiting piece 40 and online (44-45's door body 20) of the second contact jaw 45 have angle with inner surface 22 shapes of door body 20 with box body 10.Very clearly, each wafer limiting piece 40 is to produce and contact with wafer with two contact jaws, can firmly hold wafer or limit wafer and move toward opening direction, can reduce wafer in transportation, produces particle dust because of vibrations.In addition, also allow wafer effectively fall into sunk area 24, to shorten the anteroposterior diameter size of wafer case.
Above-mentioned wafer limiting piece 40 its bends 42 are an elastic construction (for example: thermoplastic elastic structure), there is the angle of a bending in system, therefore when door body 20 and box body 10 are never closely sealed when closely sealed, this angle of bend can change, make the first contact jaw 44 sequentially the second contact jaw 45 contact with wafer.In addition, bend 42 43 can be two kinds of unlike materials with cranking arm, and as the plastics of different hardness, can make bend 42 produce to crank arm compared with large deformation 43 to be not easy deformation.And the first contact jaw 44 and the second contact jaw 45 also can respectively have a depression, wafer can be absorbed in depression, avoid wafer to move up and down.In addition, multiple wafer limiting pieces 40 can be formed at a base, and this base is fixed on the inner surface 22 of a body 20.Certainly, multiple wafer limiting pieces 40 can be also directly integrally formed with the inner surface 22 of door body 20, can reduce and produce required cost.
Then, referring to shown in Figure 18, is the schematic diagram of another front-open wafer box of the present invention.This front-open wafer box is identical with the front-open wafer box of above-mentioned Figure 15, comprise a box body 10 and a body 20, different is that wafer limiting piece module 500 its each wafer limiting pieces that are fixed on a body 20 inner surface 22 sunk area 24 both sides have three contact jaws.As shown in Figure 19 and Figure 20 A, the wafer limiting piece module 500 of sunk area 24 both sides is rearranged by multiple wafer limiting piece 50, and wafer limiting piece 50 relative on the limiting piece module 500 of each wafer limiting piece 50 and sunk area 24 another sides aligns, wherein each wafer limiting piece 50 has a base portion 51, one end of base portion 51 is fixed on the inner surface 22 of a body 20, and its other end and one first is cranked arm and 52 is connected, this first cranks arm and 52 has two free ends, wherein form one first contact jaw 54 away from the free end of sunk area 24 centre, and further crank arm and 53 be connected with one second near another free ends of sunk area 24 centre, second cranks arm 53 has one second contact jaw 55 and one the 3rd contact jaw 56.
For example, because the base portion 51 of wafer limiting piece 50 is an elastic construction (: thermoplastic elastic structure), at least there is a knee, when door body 20 be not combined with box body 10 or just will in conjunction with time, it is 53 smooth or be suspended on a little the surface of sunk area 24 that second of wafer limiting piece 50 is cranked arm.Now, wafer first contacts with the first contact jaw 54, in the time that wafer contacts the first contact jaw 54, can make base portion 51 produce deformation, be that knee angle produces and changes and lever drives first is cranked arm and 52 and second cranked arm 53, make the second the second contact jaw 55 and the 3rd contact jaw 56 contact wafers of cranking arm on 53.Now, as shown in Figure 20 B, in the time that door body 20 and box body 10 are closely sealed, second cranks arm 53 by crank arm 52 lever drives and away from the surface of sunk area 24 of base portion 51 and first, and the first contact jaw 54 of wafer limiting piece 50, the second contact jaw 55 and the 3rd contact jaw 56 are with wafer contact.Clearly, because each wafer limiting piece 50 provides three contact jaws in wafer, can more firmly limit wafer and move or opening moves compared with the direction of both sides toward opening direction centre.Certainly, the present embodiment can also dispose a hinge 57 on the first side of cranking arm between two free ends of 52 and near door body 20 inner surfaces 22, this hinge 57 is fixed on a body 20 inner surfaces 22, so in the time of base portion 51 deformation or when the Angulation changes of its knee, more firmly lever drives first is cranked arm and 52 and second is cranked arm 53, and the first contact jaw 54, the second contact jaw 55 and the 3rd contact jaw 56 all can be contacted with wafer closely.
And as the embodiment of aforementioned two contact jaws, these multiple wafer limiting pieces 50 each wafer limiting piece 50 wherein can be integrally formed elastic construction (for example: thermoplastic elastic structure), its base portion 51 and first cranks arm 52 or second, and to crank arm 53 can also be unlike material or elastic construction (for example: thermoplastic elastic structure), as the plastics of different hardness, can make base portion 51 have compared with large deformation and crank arm and be not easy deformation.Certainly, the first contact jaw 54, the second contact jaw 55 and the 3rd contact jaw 56 can also have a depression, can make wafer be absorbed in depression, avoid wafer to move up and down.And above-mentioned multiple wafer limiting piece 50 can also be to be first formed at a base, and this base is fixed on the inner surface 22 of a body 20 or multiple wafer limiting piece 50 is directly directly integrally formed with the inner surface 22 of door body 20.
In addition, the inner surface 22 of door body 20 of the present invention can be a plane, can be not cave in, and between inner surface 22 and outer surface 21, dispose at least one bolt structure 60, and in a preferred embodiment, dispose a pair of bolt structure 60.Because bolt structure 60 is identical with aforesaid embodiment, therefore repeat no more.In addition, when a body 20 and box body 10 are covered, can fix the multiple wafers that have been positioned in box body 10, the place that therefore can dispose at least one limiting piece module on the inner surface of above-mentioned plane 22 or approach middle section disposes at least one limiting piece module.And structure or the form of the present invention to this limiting piece module do not limited, therefore it can comprise aforesaid limiting piece module 30, limiting piece module 400 or limiting piece module 500 or similar structure.Similarly, because the detailed structure of limiting piece module is identical with aforesaid embodiment, therefore repeat no more.
Clearly, bolt structure 60 of the present invention under the drive of cam 62,64 back and forth movements that advance and retreat of carriage, and not do not produce displacement in any longitudinally (vertically) direction again, therefore, bolt structure 60 of the present invention is better simply designs.In the time that door body 20 of the present invention covers with box body 10, the multiple wafer limiting pieces 50 that are fixed on a body 20 inner surfaces 22 are direct and wafer contacts, and cam 62 drives pair of sliding device 64 to move to the edge of door body 20, then the front transverse plane of carriage 64 646 is also fixed near box body 10 opening 12 edges, place and in the jack 28 corresponding with door bolt hole 27 through the door bolt hole 27 on door body 20.Finally, can inflate the gas seal member (not being shown in figure) being disposed between a body 20 and box body 10 via an aerating device again, to make box body 10 inside and external isolation.
Although the present invention describes as above with aforesaid preferred embodiment; so it is not in order to limit the present invention; those skilled in the art without departing from the spirit and scope of the present invention; when doing a little change and retouching, the content that therefore the scope of the present invention must define depending on the claim scope of the present patent application is as the criterion.
Claims (11)
1. a front-open wafer box, mainly comprises:
One box body, this box body inside is provided with multiple slots with accommodating multiple wafers, and forms input and the output of an opening for multiple wafers in a side of this box body, and the edge at this box opening place configures at least one pair of jack; And
A body, this body has an outer surface and an inner surface and configures at least one pair of in the edge of this body and those jacks are fastened hole accordingly with a bolt or latch, and this body is to combine with this opening of this box body with this inner surface, and in order to protect those wafers of this box body inside;
Wherein this front-open wafer box is characterised in that:
This internal surface configurations one sunk area of this body and this sunk area between two protrusion platforms, each this protrusion platform internal configurations one bolt structure, this bolt structure comprises:
One cam, a pair of arc guide barrel of configuration on it;
Pair of sliding device, its one end respectively have a guide rod respectively with this cam on guide groove snapping, the a pair of guide wheel driving lever of each configuration on the other end of those carriages, and dispose a Location resilient piece on each this carriage, this Location resilient piece one end and this carriage are fixed, and its other end and this guide wheel driving lever are fixed;
At least one pulley, be disposed at each this protrusion platform inside and be embedded in a chute of each this carriage, with the back and forth movement that can make the rotation of each this cam make the other end of each this carriage advance and retreat in each this jack and this door bolt hole.
2. front-open wafer box as claimed in claim 1, wherein, the fixing one end of this Location resilient piece and this carriage is formed in one.
3. front-open wafer box as claimed in claim 1, wherein, each configuration one limiting piece module on this two protrusions platform.
4. front-open wafer box as claimed in claim 3, wherein, each this limiting piece module has a base and via this base, this limiting piece module is fixed on this protrusion platform, and form multiple spaced curved portions that prolong on a long limit adjacent with sunk area of this base, each this curved prolonging between portion and its free end forms semicircular protuberance, and on this semicircular protuberance of each on each this limiting piece module, configure a central guide groove, to be contacted with wafer by the central guide groove of this semicircular protuberance.
5. front-open wafer box as claimed in claim 4, wherein, the coated wear-resisting consumptive material in surface, place that the central guide groove of this semicircular protuberance contacts with wafer.
6. front-open wafer box as claimed in claim 3, wherein, those limiting piece modules are made up of multiple spaced limited part, each this limited part aligns with each this limited part of the limiting piece module at this another edge of sunk area, wherein each this limited part has a base portion, this base portion is fixed on this inner surface of this body, and this base portion is on a side of contiguous this sunk area, connect after a bend, this bend further extends into one to this sunk area centre and cranks arm, and wherein cranks arm and is disposed at the top of this sunk area.
7. front-open wafer box as claimed in claim 6, wherein, each this limited part is a kind of elastic parts.
8. front-open wafer box as claimed in claim 6, wherein, this is cranked arm and forms one first contact jaw with this bend junction, and the free end that this is cranked arm forms one second contact jaw.
9. front-open wafer box as claimed in claim 3, wherein, each this limiting piece module is arranged institute by multiple limited parts and is formed, each this limited part aligns with each limited part of the limiting piece module at this another edge of sunk area, wherein each this limited part has a base portion, one end of this base portion is fixed on this inner surface of this body, and its other end and one first is cranked arm and is connected, this first is cranked arm and has two free ends, wherein form one first contact jaw away from the free end of this sunk area centre, and another free end of this first contact jaw is also cranked arm and is connected with one second relatively, this second is cranked arm and has one second contact jaw and one the 3rd contact jaw.
10. front-open wafer box as claimed in claim 9, wherein, this first is cranked arm between this two free end and disposes a hinge near on a side of this inner surface.
11. front-open wafer boxes as claimed in claim 10, wherein, this hinge and this inner surface are fixed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200810160830.5A CN101677074B (en) | 2008-09-16 | 2008-09-16 | Front-open type disc plate box with bolt structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200810160830.5A CN101677074B (en) | 2008-09-16 | 2008-09-16 | Front-open type disc plate box with bolt structure |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101677074A CN101677074A (en) | 2010-03-24 |
| CN101677074B true CN101677074B (en) | 2014-10-29 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN200810160830.5A Active CN101677074B (en) | 2008-09-16 | 2008-09-16 | Front-open type disc plate box with bolt structure |
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Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103354214B (en) * | 2010-05-07 | 2016-04-06 | 家登精密工业股份有限公司 | A kind of front open type wafer box with elliptic latch structure |
| CN102263046A (en) * | 2010-05-26 | 2011-11-30 | 家登精密工业股份有限公司 | Front Opening Unified Pod (FOUP) with elliptic bolt structure |
| CN105346817B (en) * | 2015-12-03 | 2018-02-09 | 安徽普伦智能装备有限公司 | A kind of electrothermal tube storage stopping means |
| CN112871580A (en) * | 2021-01-19 | 2021-06-01 | 浙江睿自科技有限公司 | Power cable insulating layer coating robot based on millimeter wave imaging |
| CN114628292B (en) * | 2022-05-16 | 2022-07-29 | 上海果纳半导体技术有限公司武汉分公司 | Wafer transmission box |
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| US6105782A (en) * | 1998-08-17 | 2000-08-22 | Shin-Etsu Polymers Co., Ltd. | Storage container for precision substrates |
| CN2427487Y (en) * | 2000-07-04 | 2001-04-25 | 财团法人工业技术研究院 | Chip box improved door structure |
| CN1629054A (en) * | 2003-12-18 | 2005-06-22 | 未来儿株式会社 | Lid unit for thin-plate supporting container |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6105782A (en) * | 1998-08-17 | 2000-08-22 | Shin-Etsu Polymers Co., Ltd. | Storage container for precision substrates |
| CN2427487Y (en) * | 2000-07-04 | 2001-04-25 | 财团法人工业技术研究院 | Chip box improved door structure |
| CN1629054A (en) * | 2003-12-18 | 2005-06-22 | 未来儿株式会社 | Lid unit for thin-plate supporting container |
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| CN101677074A (en) | 2010-03-24 |
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