CN102263046A - Front Opening Unified Pod (FOUP) with elliptic bolt structure - Google Patents
Front Opening Unified Pod (FOUP) with elliptic bolt structure Download PDFInfo
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- CN102263046A CN102263046A CN2010101901702A CN201010190170A CN102263046A CN 102263046 A CN102263046 A CN 102263046A CN 2010101901702 A CN2010101901702 A CN 2010101901702A CN 201010190170 A CN201010190170 A CN 201010190170A CN 102263046 A CN102263046 A CN 102263046A
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Abstract
The invention provides a Front Opening Unified Pod (FOUP) with an elliptic bolt structure. The Front Opening Unified Pod comprises a box body and a door. The box body is provided with a plurality of slots to accommodate a plurality of wafers. An opening is formed at a side surface of the box body for input and output of the wafers. The door has an external surface and an inner surface. The interior surface of the door is combined with the opening of the box body to protect the wafers placed in the box body. A projecting platform of the door internal surface is provided with at least one bolt structure inside which comprises an elliptic cam and a braking part. A surface of the elliptic cam is provided with a chute, a pair of sliding devices with chimeric parts respectively, a pilot structure provided at a center of the elliptic cam, and a narrow and long spring provided on the pilot structure. The chimeric parts are embedded into the chute, thus the sliding devices are embedded on the elliptic cam. By controlling rotation of the elliptic cam, the sliding devices move back and forth between a jack and a latch hole.
Description
Technical field
The invention relates to a kind of front open type wafer box, particularly about a kind of bolt structure of door in the body that is disposed at the front open type wafer box.
Background technology
Therefore semiconductor wafer can be moved to different work stations owing to need the processing of the various different flow processs of process and need to cooperate process equipment.The carrying of disk for convenience and avoid being subjected to external pollution, regular meeting utilizes an airtight container to carry for automation equipment.Please refer to shown in Figure 1ly, is the wafer box schematic diagram of known technology.This wafer box is a kind of front open type wafer box (Front Opening UnifiedPod; FOUP); have a box body 10 and a body 20; but box body 10 inside are provided with a plurality of ccontaining a plurality of disks of slot 11 levels (not being shown among the figure); and in a side of box body 10 is to have an opening 12 can supply carrying and loading of disk; and door body 20 has an outer surface 21 and an inner surface 22; door body 20 is to be combined with the opening 12 of box body 10 by inner surface 22, in order to a plurality of disks of protection box body 10 inside.In addition, at least one bolt perforate 23 of configuration on the outer surface 21 of door body 20 is in order to open or sealing front open type wafer box.In above-mentioned front open type wafer box, because semiconductor wafer is flatly to place box body 10 inside, therefore, a disk limited part (wafer restraint) need be arranged in front open type wafer box handling process, move because of opening 12 directions that vibrations produce dystopy or past box body 10 to avoid disk.
Please refer to shown in Figure 2ly, is the door body schematic diagram of the disclosed a kind of front open type wafer box of No. the 6th, 736,268, U.S. bulletin patent.As shown in Figure 2, the inner surface 22 of door body 20 disposes a sunk area 24, this sunk area 24 be the top 221 from inner surface 22 extend to bottom 222 and be about between two bolt structures 230 (in door body inside), and in sunk area 24, further dispose the disk limiting piece module again, this disk limiting piece module by about two disk limited parts 100 formed, and be to have a plurality of disk contact heads 110 on each disk limited part 100, to utilize this disk contact head 110 to hold its relative disk, avoid disk in transport process, to move because of the opening direction of vibrations dystopy or past box body.Yet, above-mentioned disk limiting piece module is to be arranged among the sunk area 24 of a body 20 inner surfaces 22, this makes disk only can develop a body 20 its inner surfaces 22 or only can fall into sunk area 24 a little, can't allow disk fall into sunk area 24 to shorten the size of front open type wafer box anteroposterior diameter effectively.In addition, the particle dust that disk limiting piece module and disk friction are produced is accumulated in the sunk area 24 easily, on cleaning, need earlier the sunk area 24 of disk limiting piece module with door body 20 inner surfaces 22 to be separated, so separation and assembling repeatedly causes getting loose of disk limiting piece module easily.
In addition, in No. the 5th, 711,427, another part U.S. bulletin patent being bolt structure 230 schematic diagrames of exposing in the door body 20 of front open type wafer box.As shown in Figure 3.The combination of door body 20 and box body 10 mainly is that the both sides of in door body 20 (being between outer surface 21 and the inner surface 22) are provided with movable pin 231 respectively, and being provided with jack 13 (please refer to Fig. 1) near the edge of box body 10 opening parts can be corresponding with pin 231, and the rotation of the bolt perforate 23 (please refer to Fig. 1) on a body 20 outer surfaces 21 is located in utilization, pin 231 and jack 13 are interosculated and then reach the purpose that door body 20 is fixed in box body 10, the round activity that wherein utilizes the rotation of bolt perforate 23 to control pin 231 is can reach by the cam 232 of a circle.
And in the practical operation of semiconductor factory, the unlatching of front open type wafer box mainly is by a disk loader mechanism, the disk loader mechanism is to have one at least to open door bolt (Latch key), the disk loader mechanism is the bolt perforate 23 that utilizes on these door body 20 outer surfaces 21 of opening door bolt insertion front open type wafer box, and rotating cam 232 is finished unlatching or sealing front open type wafer box to drive movable pin 231.In addition, in the middle of every standard that SEMI formulated, wherein ordered a standard specification at the size of opening door bolt and bolt perforate, yet the designed front open type wafer box of specification according to this, can make that opening door bolt cooperates with the bolt perforate when rotating, produce the braking error of about 9.44 degree, therefore when front open type wafer box horizontal positioned, when if the error between unlatching door bolt and the bolt perforate is spent greater than about 9.44, open door bolt and can't rotate the bolt perforate, and cause a body to open smoothly with the drive cam rotation.
In addition, the United States Patent (USP) of the bolt structure of the Men Tizhong of the front open type wafer box that other has disclosed also has US5, and 915,562, US5,957,292, US6622883, US6902063 etc.These bolt structures all are when the Men Tiyu box body is engaged, reach airtight purpose, its movable pin can produce displacement in a longitudinal direction, so that by movable pin one flexible gas seal member is fixed, closes front open type wafer box and airtight purpose in the hope of reaching simultaneously.Yet these known bolt structure patents all are made up of complex mechanical construction, except meeting increases failure rate, also can produce too much mechanical friction in the process of actuating, and cause the pollution of disk; In addition, use the displacement of movable pin to fix the elasticity gas seal member, its airtight effect is not good enough, can't keep airtight for a long time.
And, also can dispose some limited parts on door body 20 inner surfaces of at present common front open type wafer box, when being covered on box body 10 with side door body 20, these limited parts can contact with disk, make that disk is completely fixed, in the front open type wafer box, produce dystopy because of transportation to reduce disk.And when limited part contacts with disk, strength causes the collision and the friction of disk too greatly, therefore, as shown in Figure 4, have some United States Patent (USP)s promptly disclose a kind of with elastic parts 86 be configured in the bolt structure 230 cam 232 and the door body 20 between, when cam 232 rotates and drives in the process of movable pin 231 sealing front open type wafer boxes, this elastic parts 86 can be brought into play the effect of damping, make the limited part that is disposed on a body 20 inner surfaces under gentle and smooth-going state, to contact with disk, so just can solve the problem of collision and friction, relevant with this design in addition United States Patent (USP) also comprises US6,880,718, US7,168,587, US7,182,203 etc.Yet the mode of this similar side direction traction produces a skew strength easily on the direction that movable pin 231 moves, can cause in the jack 13 that can't snap in box body 10, causes box body 10 and door body 20 to cover smoothly, and then causes technologic puzzlement.
Summary of the invention
In the door body structure according to the front open type wafer box of prior art, its bolt all is made up of complex mechanical construction, except meeting increases failure rate, also can produce too much mechanical friction in the process of actuating, and may cause the pollution of disk.For this reason, a main purpose of the present invention is the bolt structure that disposes elliptic cam in a kind of front open type wafer box is provided, and makes its carriage only carry out back and forth movement on single plane, so can simplify the structure of bolt.
Another main purpose of the present invention is to provide the bolt structure that disposes elliptic cam in a kind of front open type wafer box, can cooperating by fitting portion and chute, when making its elliptic cam drive carriage on single plane, carry out back and forth movement, frictional force in the time of can reducing back and forth movement is so can reduce pollution.
Another main purpose of the present invention is to provide the bolt structure that disposes elliptic cam in a kind of front open type wafer box, can be by the mutual interference of correcting structure and V-groove (v-notch), make when the angle of opening door bolt has error, also can accurately insert the bolt perforate and make the elliptic cam start, open the braking error that produces between door bolt and the bolt perforate with compensation and elimination, make a body be able to smooth unlatching.
A main purpose more of the present invention is to provide the bolt structure that disposes elliptic cam in a kind of front open type wafer box, can be by the mutual interference of correcting structure and long and narrow shell fragment, make when the angle of opening door bolt has error, also can accurately insert the bolt perforate and make the elliptic cam start, open the braking error that produces between door bolt and the bolt perforate with compensation and elimination, make a body be able to smooth unlatching.
Of the present invention also have a main purpose to be to provide the bolt structure that disposes elliptic cam in a kind of front open type wafer box, can be by the cooperatively interacting of location structure and locating notch, and make elliptic cam turn to level or vertically the time, can have the function of automatic location.
Of the present invention also have a main purpose to be to provide the bolt structure that disposes elliptic cam in a kind of front open type wafer box, can be by the cooperatively interacting of elastic piece structure and locating notch, and make elliptic cam turn to level or vertically the time, can have the function of automatic location.
The present invention also has a main purpose to be to provide the bolt structure that disposes elliptic cam in the front open type wafer box, and it can dispose disk limited part, fixed wafer effectively on the inner surface of door body.
The present invention also has a main purpose to be to provide the bolt structure that disposes elliptic cam in the front open type wafer box, the braking parts of its elliptic cam circle centre position can be made by the high molecule plastic material, wherein particularly use and have the polyetheretherketonematerials materials (PEEK) of high abrasion resistance, can reduce because of coming and going the particulate that utilization produces, reduce the pollution in the wafer box.
For reaching above-mentioned projects; the present invention discloses a kind of front open type wafer box; mainly comprise a box body; box body inside is provided with a plurality of slots with ccontaining a plurality of disks; and forming an opening in a side of box body can be for the input and the output of a plurality of disks; and body; have an outer surface and an inner surface; the door body combines with the opening of box body with inner surface; and in order to protect a plurality of disks of box body inside; wherein the front open type wafer box is characterised in that: internal surface configurations one sunk area of door body and sunk area are to protrude between the platform two; each protrudes platform internal configurations one bolt structure; and bolt structure comprises that an elliptic cam and is disposed at the braking parts of elliptic cam middle position; at least one pair of V-groove is disposed on the surface of elliptic cam; and be provided with at least one chute in the surface of elliptic cam; a pair of carriage and each fitting portion that respectively has a fitting portion is to be embedded in the chute; cause carriage to be embedded on the elliptic cam; an and correcting structure of being located on the carriage; control the rotation of elliptic cam by braking parts, make carriage travel to and fro between this to jack and this is in the door bolt hole.
The present invention then discloses a kind of front open type wafer box; mainly comprise a box body; box body inside is provided with a plurality of slots with ccontaining a plurality of disks; and in a side of box body is to form input and the output that an opening can supply a plurality of disks; and body; have an outer surface and an inner surface; the door body combines with the opening of box body with inner surface; and in order to protect a plurality of disks of box body inside; wherein the front open type wafer box is characterised in that: internal surface configurations one sunk area of door body; and sunk area is to protrude between the platform two; each protrudes platform internal configurations one bolt structure; and bolt structure comprises that an elliptic cam and is disposed at the braking parts of elliptic cam middle position; and a plurality of v-notch of configuration on the opposite end of the long and shorter diameter of elliptic cam; one surface of elliptic cam is provided with at least one chute; the a pair of carriage that respectively has a fitting portion and this are to be embedded in the chute to fitting portion; cause this that carriage is embedded on the elliptic cam; and one the correcting structural arrangements near the mutual chimeric end of carriage and elliptic cam; and the correcting structure is made up of a fixed wheel and at least one pair of correcting driving lever of being disposed on this fixed wheel; control the rotation of elliptic cam by braking parts, make carriage travel to and fro between this to jack and this is in the door bolt hole.
The present invention discloses a kind of front open type wafer box in addition; mainly comprise a box body; box body inside is provided with a plurality of slots with ccontaining a plurality of disks; and in a side of box body is to form input and the output that an opening can supply a plurality of disks; and body; be to have an outer surface and an inner surface; the door body combines with the opening of box body with inner surface; and in order to protect a plurality of disks of box body inside; wherein the front open type wafer box is characterised in that: internal surface configurations one sunk area of door body and this sunk area are to protrude between the platform two; each protrudes platform internal configurations one bolt structure; and bolt structure comprises that an elliptic cam and is disposed at the braking parts of the elliptic cam middle position of bolt; one surface of elliptic cam is provided with at least one chute; the a pair of carriage that respectively has a fitting portion; and this embeds in the chute fitting portion; cause this that carriage is embedded on the elliptic cam; one is disposed at the correcting structure of elliptic cam centre; and one frame be located at long and narrow shell fragment on the correcting structure; control the rotation of elliptic cam by braking parts, make carriage travel to and fro between this to jack and this is in the door bolt hole.
Wherein, further in each this perforation, a roller is set.
Wherein, this bearing is one to have the annulus of a groove.
Wherein, dispose a plurality of balls in this annulus.
Wherein, the material of this elliptic cam and this braking parts is to select in following combination: metal material or high molecule plastic material.
Wherein, the material of long and narrow shell fragment is to select in following combination: high molecule plastic material or elastomeric material.
Wherein, further on this two protrusions platform, respectively dispose at least one limiting piece module.
Description of drawings
For further specifying concrete technology contents of the present invention, below in conjunction with embodiment and accompanying drawing describes in detail as after, wherein:
Fig. 1 is the schematic diagram of known front open type wafer box.
Fig. 2 is the door body schematic diagram of known front open type wafer box.
Fig. 3 is another body schematic diagram of known front open type wafer box.
Fig. 4 is another body schematic diagram again of known front open type wafer box.
Fig. 5 A is the door body schematic diagram of a kind of front open type wafer box of the present invention.
Fig. 5 B is the schematic diagram of bolt structure of the present invention.
Fig. 5 C is the schematic perspective view of elliptic cam of the present invention.
Fig. 6 A-Fig. 6 E is the schematic diagram of bolt structure start of the present invention.
Fig. 7 A is the door body schematic diagram of a kind of front open type wafer box of the present invention.
Fig. 7 B is the front schematic view of bolt structure of the present invention.
Fig. 7 C is the reverse side schematic diagram of bolt structure of the present invention.
Fig. 8 A-Fig. 8 E is the schematic diagram of bolt structure start of the present invention.
Fig. 9 A is the door body schematic diagram of a kind of front open type wafer box of the present invention.
Fig. 9 B is the schematic diagram of bolt structure of the present invention.
Figure 10 A-Figure 10 C is the schematic diagram of bolt structure start of the present invention.
Figure 11 is the schematic diagram of a kind of front open type wafer box of the present invention.
The main element symbol description
10 box bodys, 24 sunk areas
100 disk limited parts 25 protrude platform
110 disk contact heads, 26 door bolt holes
11 slots, 30 bolt structures
12 openings, 31 elliptic cams
13 jack 311V type grooves
20 body 312 chutes
21 outer surfaces, 313 locating notches
22 inner surfaces, 314 oval platforms
315 brakings place of 221 tops
222 bottoms, 32 carriages
23 bolt perforates, 321 fitting portions
230 bolt structures, 322 correcting structures
231 pins, 323 location structures
232 cams, 324 elastic piece structures
325 location divisions, 512 chutes
33 Location resilient pieces, 513 braking parts
40 bolt structures, 52 carriages
41 elliptic cams, 521 fitting portions
The long limit of 41L 531 rectangular flange
41S minor face 532 circular inner grooves
415 brakings place, 533 rollers
412 chutes, 534 bearings
42 carriage 534a annulus
421 fitting portion 534b balls
535 perforation of 422 correcting structures
423 fixed wheels, 536 hollow circuit cylinders
424 correcting driving levers, 54 long and narrow shell fragments
425 elastic piece structures, 60 limiting piece modules
426 locating notches, 86 flexible members
50 bolt structure X, Y diameter
51 elliptic cams
Embodiment
Because the present invention discloses a kind of front open type wafer box; it has a box body and a body; but box body inside is to be provided with the ccontaining a plurality of disks of a plurality of slot levels; and in a side of box body is to have an opening can supply carrying and loading of disk; and the door body is combined with the opening of box body by its inner surface, in order to a plurality of disks of protection box body inside.In addition, at least one bolt perforate of configuration on the outer surface of door body is in order to open or sealing front open type wafer box.Because the structure of some front open type wafer boxes that the present invention used is same as described above, thus its detailed manufacturing or processing procedure, so in following explanation, do not do complete description.And the accompanying drawing in the literary composition in following, also not according to the actual complete drafting of relative dimensions, its effect is only being expressed the schematic diagram relevant with feature of the present invention.In addition, for technology contents, goal of the invention that the present invention is used and the effect reached thereof have more complete and clearly disclose, now under describe it in detail, and see also the accompanying drawing and the figure number of being taken off.
At first, the basic structure (please refer to Fig. 2) of front open type wafer box (FOUP) comprises that the inner surface 22 of a body 20 disposes a sunk area 24, and sunk area 24 is to protrude between the platforms 25 two, and each protrudes platform 25 inside and respectively disposes a bolt structure 230.Then, please refer to Fig. 5 A, is the top view of bolt structure first embodiment of the present invention.Shown in Fig. 5 B, each bolt structure 30 is made up of the elliptic cam 31 with a pair of V-groove 311, a pair of carriage that respectively has a fitting portion 321 32, a correcting structure 322 and the Location resilient piece 33 a pair of and that carriage 32 links into an integrated entity be located on the carriage 32; Wherein, above-mentioned correcting structure 322 is positioned at an end of carriage 32 and roughly is the U type.In addition, on the surface of elliptic cam 31, be provided with at least one chute 312, the fitting portion 321 of a pair of carriage 32 is embedded in respectively in the chute 312, a pair of carriage 32 can be embedded on the elliptic cam 31 thus; Then please refer to Fig. 5 C, two ends at the major and minor axis diameter of elliptic cam 31 respectively are provided with at least one relative locating notch 313, and have at elliptic cam 31 on the one side of chute 312 and convex with an oval platform 314 in addition, the area of this oval platform 314 is little than the area of elliptic cam 31, and the V-groove 311 on the elliptic cam 31 promptly is provided in a side of on the bigger two ends of oval platform 314 diameters.
In the first embodiment of the present invention, elliptic cam 31 can be metal material (as stainless steel etc.), its also can be high molecule plastic material (as Teflon, PEEK etc.) formation, the present invention is not limited.Shown in Fig. 5 B, the circle centre position of elliptic cam 31 is provided with a braking parts 315 in addition, after the unlatching door bolt (not being shown among the figure) of disk loader mechanism inserts the bolt perforate 23 of door body 20, promptly can be connected with braking parts 315, rotates to drive elliptic cam 31.Owing to drive in elliptic cam 31 rotating process, opening door bolt contacts with braking parts 315, therefore braking parts 315 of the present invention can be made by the high molecule plastic material, wherein particularly use and have the polyetheretherketonematerials materials (PEEK) of high abrasion resistance, can reduce because of coming and going the particulate that utilization produces, reduce the pollution in the wafer box.
Then, please refer to Fig. 6 A to Fig. 6 E, is the schematic diagram of the elliptic cam rotation process of the first embodiment of the present invention.Present embodiment is by the rotation of control elliptic cam 31, can make carriage 32 travel to and fro between in a pair of jack 13 (as shown in Figure 1) and a pair of door bolt hole 26 (as shown in Figure 2), it makes flowing mode such as Fig. 6 A to Fig. 6 E presents in regular turn, be one rotate clockwise 90 the degree schematic diagrames, by the major axis distance of elliptic cam, in order to carriage 32 is released door bolt hole 26 and insert in the jack 13.Vice versa, if with the elliptic cam rotation process by being current in regular turn as Fig. 6 E to Fig. 6 A, for promptly when the elliptic cam rotation process rotates the schematic diagram of 90 degree with a counterclockwise, can extract carriage 32 out jacks 13 and withdrawal is fastened with a bolt or latch in the hole 26.This theory of mechanics is because elliptic cam 31 has long short diameter Y (shown in Fig. 5 A) of diameter X and, and therefore when elliptic cam 31 rotations, carriage 32 can be followed due to the variation of elliptic cam 31 radiuses.In addition, be stressed that especially, rotating manner by above-mentioned elliptic cam 31, both interfere the correcting structure 322 that also can make carriage 32 and the V-groove of elliptic cam 31 311 mutually, so that elliptic cam 31 is when turning to certain angle, elliptic cam 31 can rotate to a location automatically, makes carriage 32 release or regain in door bolt hole 26.
Further specify the correcting structure 322 and V-groove 311 mutual interference modes of present embodiment: when elliptic cam 31 turned positions are Fig. 6 A, (location division 325 (please refer to Fig. 5 B) that is the location structure 323 of a pair of carriage 32 contacts with the locating notch 313 of elliptic cam 31 than the two ends of short diameter Y), correcting structure 322 only contacts with oval platform 314 and resists mutually; When elliptic cam 31 turned positions are Fig. 6 B, because elliptic cam 31 radiuses are elongated, can make carriage 32 stretch out to the outside, and because of carriage 32 be connected with Location resilient piece 33 one so, Location resilient piece 33 also can be subjected to the traction of carriage 32 and receive a pressure; (be about 68 degree from the rotated position of Fig. 6 A to Fig. 6 C) when elliptic cam 31 turns to Fig. 6 C, correcting structure 322 can contact and resist mutually with a summit of the V-groove 311 of elliptic cam 31, and Location resilient piece 33 suffered pressure can be greater than Fig. 6 B at this moment; When elliptic cam 31 turns to Fig. 6 D (angle of rotating is greater than 68 degree), what correcting structure 322 contacted with V-groove 311 and resisted mutually locates by its summit, therefore Location resilient piece 33 suffered pressure can be less than Fig. 6 C, and be subjected to the event that Location resilient piece 33 pressure discharge this moment, elliptic cam 31 can go to Fig. 6 E automatically, and correcting structure 322 can slip between two summits of V-groove 311 and stagnate.And via above-mentioned action, the carriage 32 of this moment has been pushed out door bolt hole 26 and has inserted in the middle of the jack 13 that is positioned on the box body 10, on the feasible door body 20 sealed box bodys 10.In the present embodiment, and when front open type wafer box horizontal positioned of the present invention, the unlatching of disk loader mechanism (Load Port) door bolt (not being shown among the figure) though angular error greater than 9.44 degree, still can with elliptic cam 31 starts, open the actuating error that produces between door bolt and the bolt perforate 23 with compensation and elimination, make a body be able to sealed smoothly or unlatching.Similarly, and if when desiring to make a body 20 to break away from box bodys 10, then be position by Fig. 6 E counterclockwise to rotate, rotate 22 degree during to Fig. 6 C approximately, and when rotational angle big 22 was spent, correcting structure 322 can be left V-groove 311 immediately, and finish breakdown action.
Except above-mentioned elliptic cam 31 do refer again to Fig. 5 B the flowing mode.The present invention is at close carriage 32 and elliptic cam 31 mutual chimeric ends, other is provided with a location structure 323, this location structure 323 is the elastic piece structures 324 for a basket sky, and it is outstanding from elastic piece structure 324 to have a location division 325, and this location structure 323 be with carriage 32 be to connect as one, and it is made in the mode of ejection formation, when elliptic cam 31 rotates to a location automatically, when elliptic cam 31 turns to horizontal location as shown in Figure 6A, or when elliptic cam 31 turns to perpendicular positioning shown in Fig. 6 E, location division 325 on the location structure 323 can engage the location mutually with locating notch 313, with the function that automatic aligning location is provided and stops.
Please refer to Fig. 7 A, be the top view of second embodiment of bolt structure of the present invention, and Fig. 7 A is the front schematic view of bolt structure, Fig. 7 C is the reverse side schematic diagram of Fig. 7 B.Shown in Fig. 7 B, each bolt structure 40 is by an elliptic cam 41, and have respectively in place, four circumference summits on the elliptic cam 41 elliptic cam 41 of a v-notch 411 of a pair of formation, a pair of carriage 42 that respectively has a fitting portion 421 (shown in Fig. 7 C) and one be located at correcting structure 422 on the carriage 42 composition.Then please refer to Fig. 7 C, on the surface of elliptic cam 41, be provided with at least one chute 412, the fitting portion 421 of a pair of carriage 42 is embedded in respectively in the chute 412, a pair of carriage 42 can be embedded on the elliptic cam 41 thus.In addition, be configured in the structure of the v-notch 411 on the opposite end of elliptic cam 41 length diameters, please refer to Fig. 7 B, its v-notch 411 is by being formed by a minor face 41S with long long limit 41L on one side and short one side.In addition, correcting structure 422 is to be located near carriage 42 and elliptic cam 41 mutual chimeric ends, this correcting structure 422 is made up of a fixed wheel 423 and a pair of correcting driving lever 424 that is disposed on the fixed wheel 423, and this is to protrude from the edge of fixed wheel 423 and be located at adjacent locating to correcting driving lever 424.In addition, fixed wheel 423 on the position between two correcting driving levers 424, further configurable at least one pair of locating notch 426.
In the present embodiment, elliptic cam 41 can be metal material (as stainless steel etc.), its also can be high molecule plastic material (as Teflon, PEEK etc.) formation, the present invention is not limited.Shown in Fig. 7 B, the circle centre position of elliptic cam 41 is provided with a braking parts 415 in addition, after the unlatching door bolt of disk loader mechanism (Load Port) inserts the bolt perforate 23 of door body 20, promptly can be connected with braking parts 415.Owing to drive in elliptic cam 41 rotating process, opening door bolt contacts with braking parts 415, therefore, open the friction that door bolt contacts with braking parts 415 in order to reduce, braking parts 415 of the present invention can be made by the high molecule plastic material, wherein particularly use to have the polyetheretherketonematerials materials (PEEK) of high abrasion resistance, can reduce, reduce the pollution in the wafer box because of coming and going the particulate that utilization produces.
Then, please refer to Fig. 8 A to Fig. 8 E, is the schematic diagram of the elliptic cam rotation process of second embodiment of the invention.Present embodiment can make carriage 42 travel to and fro between in a pair of jack 13 (as shown in Figure 1) and a pair of door bolt hole 26 (as shown in Figure 2) by the rotation of control elliptic cam 41.At first, when the jack 13 on will making carriage 42 combines with door bolt hole 26 (in the time of the door body 20 of front open type wafer box will being closed), it makes flowing mode such as Fig. 8 A to Fig. 8 C presents in regular turn, be that elliptic cam 41 is rotated 90 degree with counterclockwise, carriage 42 is released door bolt holes 26 and insert in the jack 13; And the jack 13 on will making carriage 42 is when breaking away from door bolt hole 26 (in the time of the door body 20 of front open type wafer box will being opened), it makes flowing mode such as Fig. 8 C to Fig. 8 E presents in regular turn, be to rotate 90 degree clockwise, with carriage 42 extraction jacks 13 and withdrawal door bolt hole 26 with elliptic cam 41.Above-mentioned theory of mechanics is because elliptic cam 41 has long short diameter Y (shown in Fig. 7 A) of diameter X and, and therefore when elliptic cam 41 rotations, carriage 42 can be followed due to the variation of elliptic cam 41 radiuses.In addition, rotating manner by elliptic cam 41, both interfere the correcting structure 422 that also can make carriage 42 and the v-notch of elliptic cam 41 411 mutually, so that elliptic cam 41 is when turning to certain angle, elliptic cam 41 can rotate to a location automatically makes carriage 42 release or regain in the door bolt hole 26.
Then, the correcting structure 422 that further specifies present embodiment is described as follows with v-notch 411 mutual interference modes: when elliptic cam 41 turned positions were Fig. 8 A, correcting driving lever 424 was arranged in the middle of the minor face 41S of v-notch 411; When elliptic cam 41 door bolt that is unlocked (is about 68 degree from the rotated position of Fig. 8 A to Fig. 8 C) when counterclockwise rotating, the long limit 41L of v-notch 411 can promote correcting driving lever 424 and then drive fixed wheel 423 to rotate, because elliptic cam 41 radiuses are elongated, can make carriage 42 stretch out to the outside; And when elliptic cam 41 turned to Fig. 8 B position, one of v-notch 411 was rectified between a pair of correcting driving lever 424 and is in contact with it and resists mutually; When elliptic cam 41 continues to rotate counterclockwise (promptly the angle of Zhuan Donging is greater than 68 degree), correcting driving lever 424 will slip into according to the long limit 41L of v-notch 411 in the middle of the v-notch 411 automatically, use correcting structure 422 stops and a correcting driving lever 424 can contact the minor face 41S that also resists mutually in v-notch 411, this moment, the angle that rotates counterclockwise of elliptic cam 41 was about 90 when spending, shown in Fig. 8 C.And via above-mentioned action, carriage 42 can be pushed out door bolt hole 26 and insert in the jack 13, makes that door body 20 is sealed to box body 10; In the present embodiment, when front open type wafer box horizontal positioned of the present invention, the unlatching of disk loader mechanism (Load Poet) door bolt (not being shown among the figure) though angular error greater than 9.44 degree, still can with elliptic cam 41 starts, open the actuating error that produces between door bolt and the bolt perforate 23 with compensation and elimination, make a body be able to sealed smoothly or unlatching.Then, if when desiring to make a body 20 to break away from box bodys 10, then be to rotate about 68 degree (promptly to shown in Fig. 8 D) in a clockwise direction, and when rotational angle big 68 was spent, correcting driving lever 424 can leave v-notch 411 immediately, and finish a body 20 breakdown actions by the position of Fig. 8 C.
Except doing the flowing mode of above-mentioned boss wheel 41, the present invention discloses a kind of embodiment that is provided with an elastic piece structure 425 on carriage 42 in addition again.Please please refer to Fig. 7 B again, the two ends of elastic piece structure 425 are that the middle extension of two side direction in the hollow structure of carriage 42 can be synthesized one the 3rd end, to form an approximate T type structure, so elastic piece structure 425 is to connect as one with carriage 42, and it is made in the mode of ejection formation, in addition, again this 3rd end is embedded on the locating notch 426 on the fixed wheel 423, when elliptic cam 41 rotates to a location automatically, elliptic cam 41 turns to horizontal location shown in Fig. 8 A, or elliptic cam 41 turns to perpendicular positioning shown in Fig. 8 C, the 3rd end of the T type structure of elastic piece structure 425 can engage the location with a pair of locating notch 426 respectively mutually, with the function that automatic aligning location is provided and stops.
Follow again, please refer to Fig. 9 A, be the top view of the 3rd embodiment of bolt structure 50 of the present invention.Shown in Fig. 9 B, each bolt structure 50 by an elliptic cam 51, a pair of carriage that respectively has a fitting portion 521 52, one be located at the correcting structure 53 of elliptic cam 51 centre and long and narrow shell fragment 54 that a frame is located on the correcting structure 53 is formed, wherein, the material of long and narrow shell fragment 54 can be the rubber-like material, for example high molecule plastic material, elastomeric material etc., the present invention is not limited.
Present embodiment is provided with at least one chute 512 on the surface of elliptic cam 51, the fitting portion 521 of a pair of carriage 52 is embedded in respectively in the chute 512, a pair of carriage 52 can be embedded on the elliptic cam 51 thus.In addition, the correcting structure 53 of present embodiment comprises a rectangular flange 531 and its inboard rectangular flange 531, a pair roller 533 and bearing 534 with a circular inner groove 532 that form, wherein one of rectangular flange 531 inboards relative corner respectively is provided with the inboard and the outside that a perforation 535 runs through rectangular flange 531, makes to be arranged at a roller 533 respectively in each perforation 535; In addition the circle centre position in circular inner groove 532 is provided with a hollow circuit cylinder 536, and wherein, elliptic cam 51, rectangular flange 531 and hollow circuit cylinder 536 are to be one of the forming and to make; In addition, more have a bearing 534 to be sheathed on the hollow circuit cylinder 536, and the edge of this bearing 534 has the annulus 534a of a groove, and in the groove of annulus 534a, dispose a plurality of ball 534b.Present embodiment promptly is the use by bearing 534, except the smooth degree that can increase elliptic cam 51 rotations, also can reduce the particulate that produces because of friction, avoids being polluted in the wafer box.
The detailed start process of present embodiment then is described.At first, in the present embodiment, elliptic cam 51 can be metal material (as stainless steel etc.), its also can be high molecule plastic material (as Teflon, PEEK etc.) formation, the present invention is not limited.Then, please refer to shown in Fig. 9 B, the circle centre position of elliptic cam 51 is provided with a braking parts 513 in addition, this braking parts 513 is a rectangle structure, and with the diameter X horizontal arrangement (shown in Fig. 9 A) of its long axis direction and elliptic cam 51, and correcting structure 53 is located on the braking parts 513, and joins with the two broadsides overlapping of braking parts 513 respectively with its a pair of corner that roller 533 is not set.After the unlatching door bolt of disk loader mechanism (Load Port) inserts the bolt perforate 23 of door body 20, promptly can be connected with braking parts 513.Owing to drive in elliptic cam 41 rotating process, opening door bolt contacts with braking parts 513, therefore, braking parts 513 of the present invention can be made by the high molecule plastic material, wherein particularly use and have the polyetheretherketonematerials materials (PEEK) of high abrasion resistance, can reduce because of coming and going the particulate that utilization produces, reduce the pollution in the wafer box.
Then, please refer to Figure 10 A to Figure 10 C, is the schematic diagram of the elliptic cam rotation process of third embodiment of the invention.Present embodiment can make carriage 52 travel to and fro between in a pair of jack 13 (as shown in Figure 1) and a pair of door bolt hole 26 (as shown in Figure 2) by the rotation of control elliptic cam 51.At first, when the jack 13 on will making carriage 42 combines with door bolt hole 26 (in the time of the door body 20 of front open type wafer box will being closed), it makes flowing mode such as Figure 10 A to Figure 10 C presents in regular turn, be that elliptic cam 41 is rotated 90 degree clockwise with one, carriage 52 is released door bolt hole 26 and insert in the jack 13; And the jack 13 on will making carriage 42 is when breaking away from door bolt hole 26 (in the time of the door body 20 of front open type wafer box will being opened), it makes flowing mode such as Figure 10 C to Figure 10 A presents in regular turn, be that elliptic cam 41 is rotated 90 degree with a counterclockwise, so that carriage 52 is extracted out jack 13 and regained door bolt hole 26.Above-mentioned theory of mechanics is because elliptic cam 51 has long short diameter Y (shown in Fig. 9 A) of diameter X and, and therefore when elliptic cam 51 rotations, carriage 52 can be followed due to the variation of elliptic cam 51 radiuses.In addition, rotating manner by above-mentioned elliptic cam 51, one end of carriage 52, the correcting structure 53 and long and narrow shell fragment 54 threes of elliptic cam 51 are interfered mutually, so that elliptic cam 51 is when turning to certain angle, elliptic cam 51 can rotate to a location automatically makes carriage 52 release or regain in the door bolt hole 26.
Follow again, be described as follows at an end of above-mentioned carriage 52, the mode that the correcting structure 53 and long and narrow shell fragment 54 threes of elliptic cam 51 interfere mutually: when elliptic cam 51 turned positions are Figure 10 A, carriage 52 contacts with long and narrow shell fragment 54 and resists mutually, and a side adjacent contact of the inner edge of long and narrow shell fragment 54 and correcting structure 53 rectangular flange 531, therefore long and narrow shell fragment 54 is that frame is located at the width that A/F on the correcting structure 53 approximates rectangular flange 531.When clockwise rotating, elliptic cam 51 (is about 45 degree to Figure 10 B) from the rotated position of Figure 10 A, long and narrow shell fragment 54 is changed into roller 533 by the side adjacent contact with rectangular flange 531 ways of contact and is contacted, and roller 533 also can slide along the inner edge of long and narrow shell fragment 54, and this moment, the A/F of long and narrow shell fragment 54 approximated rectangular flange 531 cornerwise length.When elliptic cam 51 continues to clockwise rotate (promptly the angle of Zhuan Donging is greater than 45 degree), the openings of sizes of long and narrow shell fragment 54 can be followed the rotation of rectangular flange 531 and successively decrease, long and narrow shell fragment 54 can produce restoring forces and made roller 533 be squeezed and slide into automatically till the inner edge adjacent contact with side of rectangular flange 531 and long and narrow shell fragment 54 this moment, shown in Figure 10 C, and this moment, long and narrow shell fragment 54 frames were located at the width that A/F on the correcting structure 53 approximates rectangular flange 531; And via above-mentioned action, carriage 52 can be pushed out door bolt hole 26 and insert jack 13 works as, on the feasible door body 20 sealed box bodys 10; In the present embodiment, and when front open type wafer box horizontal positioned, the unlatching of disk loader mechanism (Load Port) door bolt (not being shown among the figure) though angular error greater than 9.44 degree, still can with elliptic cam 51 starts, open the actuating error that produces between door bolt and the bolt perforate 23 with compensation and elimination, make a body be able to sealed smoothly or unlatching.Then if when desiring to make a body 20 to break away from box bodys 10, then be to rotate with counter clockwise direction by the position of Figure 10 C, rotate about 45 degree during to Figure 10 B approximately, and when rotational angle big 45 is spent, the rotation of rectangular flange 531 can change the change of long and narrow shell fragment 54 A/Fs, make long and narrow shell fragment 54 produce restoring forces and impel the slip of roller 533, and finish breakdown action.In addition,, also can significantly reduce the particulate that produces because of friction, avoid being polluted in the wafer box by cooperatively interacting of two rollers 533 and long and narrow shell fragment 54.
Then, seeing also shown in Figure 11ly, is the schematic diagram of a kind of wafer box of the present invention.This wafer box is a kind of front open type wafer box, mainly be to comprise a box body 10 and a body 20, in the inside of box body 10 is to be provided with a plurality of slots 11 with ccontaining a plurality of disks, and in one of them side of box body 10 is to have an opening 12 that the input and the output of disk can be provided, door body 20 then is to have an outer surface 21 and an inner surface 22, the outer surface 21 of door body 20 is at least one bolt perforate (not being shown among the figure) of configuration, in order to open or sealing front open type wafer box, and the inner surface 22 of door body 20 approximately in the middle of the place dispose a sunk area 24 and sunk area 24 is to protrude between the platforms 25 two, wherein two inside of protruding platforms 25 are to dispose aforesaid bolt structure 60.The main purpose of this sunk area 24 is a plurality of disks that are used for accepting box body 10 inside, to reduce the anteroposterior diameter size of whole wafer box, and on two protrusion platforms 25, respectively dispose a disk limiting piece module 60, except limiting disk toward opening direction moves, also can be used to control the amount that disk enters sunk area 24.
The length of above-mentioned door body 20 inner surfaces 22 sunk areas 24 is relevant with slot 11 spacings and the disk quantity of box body 10 inside.With 12 o'clock disk, for the spacing between the disk, existing standard code between industry can be held robotic arm simultaneously and stretches into and carry out disk input and output in the hope of reaching maximum disk carrying density; And common wafer box is approximately can ccontaining 25 disks at present.Yet the width of sunk area 24 of the present invention and the degree of depth can be more flexible, when the thickness of door body 20 remains unchanged, with the degree of depth of sunk area 24 establish bigger, then can allow disk to enter sunk area 24, and this moment sunk area 24 width also need with increase.
In addition, the inner surface 22 of door body 20 of the present invention is to be a plane, can be not cave in, and between inner surface 22 and outer surface 21, dispose at least one bolt structure ( element 30,40,50 as the aforementioned), and be to dispose a pair of bolt structure in the preferred embodiment.Because bolt structure 30,40,50 is identical with aforesaid embodiment, so repeat no more.In addition, when body 20 and box body 10 are covered, therefore can fix a plurality of disks that have been positioned in the box body 10, can on the inner surface 22 on above-mentioned plane, dispose at least one limiting piece module 60 or dispose at least one limiting piece module, as shown in figure 11 near the place of middle section.
Clearly, bolt structure of the present invention under the drive of elliptic cam, the back and forth movement that it advances and retreats, and not on any vertically (promptly vertically) direction, do not produce displacement, therefore, bolt structure of the present invention is a better simply design.When Men Tiyu tray cover of the present invention fashionable, elliptic cam is to drive a pair of carriage to move to the edge of door body, then the preceding transverse plane of carriage is passed the door bolt hole on the body and fix near edge, box opening place and with the corresponding jack in door bolt hole in.At last, can inflate the gas seal member (not being shown among the figure) that is disposed between the Men Tiyu box body via an aerating device again, so that box body inside and external isolation.
Though the present invention discloses as above with aforesaid preferred embodiment; right its is not in order to limit the present invention; any person that has the knack of the similar technique; without departing from the spirit and scope of the present invention; when can doing a little change and retouching, therefore scope of patent protection of the present invention must look claim claim defined is as the criterion.
Claims (8)
1. front open type wafer box with elliptic latch structure; mainly comprise a box body; this box body inside is provided with a plurality of slots with ccontaining a plurality of disks; and forming an opening in a side of this box body can be for the input and the output of these a plurality of disks; and an edge at this box opening place disposes at least one pair of jack; and body; have an outer surface and an inner surface and dispose at least one pair of in the edge of this body and this fastens the hole with a bolt or latch accordingly to jack; this body combines with this opening of this box body with this inner surface; and in order to protect these a plurality of disks of this box body inside, wherein this front open type wafer box is characterised in that:
This internal surface configurations one sunk area of this body and this sunk area protrude between the platform two, each should protrude platform internal configurations one bolt structure, this bolt structure comprises that an elliptic cam and is disposed at the braking parts of the middle position of this bolt, one surface of this elliptic cam is provided with at least one chute, the a pair of carriage that respectively has a fitting portion, one is disposed at the correcting structure of this elliptic cam centre, and one frame be located at long and narrow shell fragment on this correcting structure, wherein, this embeds in this chute fitting portion, cause this that carriage is embedded on this elliptic cam, control the rotation of this elliptic cam by this braking parts, make this carriage travel to and fro between this to jack and this is in the door bolt hole.
2. the front open type wafer box with elliptic latch structure as claimed in claim 1, it is characterized in that, this correcting structure comprises rectangular flange, a pair roller and the bearing with a circular inner groove, one relative corner of this rectangular flange inboard respectively is provided with a perforation, and the circle centre position in this circular inner groove disposes a hollow circuit cylinder, and a tangent plane of this hollow circuit cylinder links to each other with this elliptic cam surface.
3. the front open type wafer box with elliptic latch structure as claimed in claim 2 is characterized in that, further in each this perforation a roller is set.
4. the front open type wafer box with elliptic latch structure as claimed in claim 2 is characterized in that, this bearing is one to have the annulus of a groove.
5. the front open type wafer box with elliptic latch structure as claimed in claim 4 is characterized in that, disposes a plurality of balls in this annulus.
6. the front open type wafer box with elliptic latch structure as claimed in claim 1 is characterized in that, the material of this elliptic cam and this braking parts is to select in following combination: metal material or high molecule plastic material.
7. the front open type wafer box with elliptic latch structure as claimed in claim 1 is characterized in that the material of long and narrow shell fragment is to select: high molecule plastic material or elastomeric material in following combination.
8. the front open type wafer box with elliptic latch structure as claimed in claim 1 is characterized in that, further respectively disposes at least one limiting piece module on this two protrusions platform.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010101901702A CN102263046A (en) | 2010-05-26 | 2010-05-26 | Front Opening Unified Pod (FOUP) with elliptic bolt structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010101901702A CN102263046A (en) | 2010-05-26 | 2010-05-26 | Front Opening Unified Pod (FOUP) with elliptic bolt structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102263046A true CN102263046A (en) | 2011-11-30 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010101901702A Pending CN102263046A (en) | 2010-05-26 | 2010-05-26 | Front Opening Unified Pod (FOUP) with elliptic bolt structure |
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| Country | Link |
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| CN (1) | CN102263046A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103165499A (en) * | 2011-12-13 | 2013-06-19 | 家登精密工业股份有限公司 | Front-opening wafer box with latch structure |
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| CN102237289A (en) * | 2010-05-07 | 2011-11-09 | 家登精密工业股份有限公司 | Front opening unified pod with elliptical latch structure |
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| JP2003133405A (en) * | 2001-10-29 | 2003-05-09 | Shin Etsu Polymer Co Ltd | Lid engaging mechanism of substrate container |
| WO2008044495A1 (en) * | 2006-10-06 | 2008-04-17 | Shin-Etsu Polymer Co., Ltd. | Cover body and substrate receiving container |
| CN101677074A (en) * | 2008-09-16 | 2010-03-24 | 家登精密工业股份有限公司 | Front-open type disc plate box with bolt structure |
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| CN103165499A (en) * | 2011-12-13 | 2013-06-19 | 家登精密工业股份有限公司 | Front-opening wafer box with latch structure |
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Application publication date: 20111130 |