CN101671841B - 一种用于直拉硅单晶制备中的含氮掺杂剂的制备方法 - Google Patents
一种用于直拉硅单晶制备中的含氮掺杂剂的制备方法 Download PDFInfo
- Publication number
- CN101671841B CN101671841B CN 200810222102 CN200810222102A CN101671841B CN 101671841 B CN101671841 B CN 101671841B CN 200810222102 CN200810222102 CN 200810222102 CN 200810222102 A CN200810222102 A CN 200810222102A CN 101671841 B CN101671841 B CN 101671841B
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- Prior art keywords
- crucible
- silicon
- dopant
- silicon nitride
- nitrogen dopant
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- 239000002019 doping agent Substances 0.000 title claims abstract description 42
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 32
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 32
- 239000010703 silicon Substances 0.000 title claims abstract description 32
- 239000013078 crystal Substances 0.000 title abstract description 31
- 238000000034 method Methods 0.000 title abstract description 21
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 title abstract description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 122
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 61
- 229910052581 Si3N4 Inorganic materials 0.000 claims abstract description 21
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims abstract description 19
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 17
- 239000002245 particle Substances 0.000 claims abstract description 15
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims abstract description 14
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims abstract description 13
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims abstract description 12
- 235000012239 silicon dioxide Nutrition 0.000 claims abstract description 11
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims abstract description 7
- 229910010271 silicon carbide Inorganic materials 0.000 claims abstract description 7
- 239000000126 substance Substances 0.000 claims abstract description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 7
- 229910052786 argon Inorganic materials 0.000 claims abstract description 6
- 239000000377 silicon dioxide Substances 0.000 claims abstract description 6
- 238000002360 preparation method Methods 0.000 claims description 14
- 238000001816 cooling Methods 0.000 claims description 7
- 238000001035 drying Methods 0.000 claims description 6
- 238000007654 immersion Methods 0.000 claims description 6
- 239000002210 silicon-based material Substances 0.000 claims description 6
- 230000004927 fusion Effects 0.000 claims description 5
- 239000007789 gas Substances 0.000 claims description 5
- 229960001866 silicon dioxide Drugs 0.000 claims description 5
- 229920005591 polysilicon Polymers 0.000 abstract description 7
- 238000010438 heat treatment Methods 0.000 abstract description 6
- 238000002156 mixing Methods 0.000 abstract description 5
- 238000007667 floating Methods 0.000 abstract description 4
- 229910045601 alloy Inorganic materials 0.000 abstract description 3
- 239000000956 alloy Substances 0.000 abstract description 3
- 239000000463 material Substances 0.000 abstract 2
- 238000002844 melting Methods 0.000 abstract 1
- 230000008018 melting Effects 0.000 abstract 1
- 238000002791 soaking Methods 0.000 abstract 1
- 238000005406 washing Methods 0.000 abstract 1
- 239000010453 quartz Substances 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000000155 melt Substances 0.000 description 4
- 230000007547 defect Effects 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 230000006837 decompression Effects 0.000 description 2
- 230000002950 deficient Effects 0.000 description 2
- 238000005468 ion implantation Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 230000000802 nitrating effect Effects 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 238000005204 segregation Methods 0.000 description 2
- 229910014299 N-Si Inorganic materials 0.000 description 1
- 229910007991 Si-N Inorganic materials 0.000 description 1
- 229910006294 Si—N Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 125000004122 cyclic group Chemical group 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005247 gettering Methods 0.000 description 1
- 238000000048 melt cooling Methods 0.000 description 1
- 239000005543 nano-size silicon particle Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 238000010298 pulverizing process Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910021332 silicide Inorganic materials 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
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- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
Description
Claims (3)
Priority Applications (1)
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CN 200810222102 CN101671841B (zh) | 2008-09-09 | 2008-09-09 | 一种用于直拉硅单晶制备中的含氮掺杂剂的制备方法 |
Applications Claiming Priority (1)
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CN 200810222102 CN101671841B (zh) | 2008-09-09 | 2008-09-09 | 一种用于直拉硅单晶制备中的含氮掺杂剂的制备方法 |
Publications (2)
Publication Number | Publication Date |
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CN101671841A CN101671841A (zh) | 2010-03-17 |
CN101671841B true CN101671841B (zh) | 2011-11-16 |
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CN 200810222102 Active CN101671841B (zh) | 2008-09-09 | 2008-09-09 | 一种用于直拉硅单晶制备中的含氮掺杂剂的制备方法 |
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Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101845666B (zh) * | 2010-06-03 | 2013-08-28 | 王敬 | 一种掺氮晶体硅及其制备方法 |
CN102531351B (zh) * | 2012-03-10 | 2014-05-21 | 锦州聚泰石英玻璃有限公司 | 抗软化氮化硅梯度掺杂石英坩埚制备方法 |
CN102877122A (zh) * | 2012-10-24 | 2013-01-16 | 英利能源(中国)有限公司 | 一种硅料掺杂剂的加工工艺 |
CN103014872A (zh) * | 2012-12-12 | 2013-04-03 | 江西旭阳雷迪高科技股份有限公司 | 一种太阳能用硅片掺杂剂破碎方法 |
CN113846378A (zh) * | 2021-09-29 | 2021-12-28 | 西安奕斯伟材料科技有限公司 | 用于制造氮掺杂的单晶硅的方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6059875A (en) * | 1999-01-11 | 2000-05-09 | Seh America, Inc. | Method of effecting nitrogen doping in Czochralski grown silicon crystal |
US6468881B1 (en) * | 1997-12-26 | 2002-10-22 | Sumitomo Metal Industries, Ltd. | Method for producing a single crystal silicon |
CN1414147A (zh) * | 2001-10-26 | 2003-04-30 | 北京有色金属研究总院 | 一种用于直拉硅单晶制备中的掺杂方法及其装置 |
CN1422989A (zh) * | 2002-12-02 | 2003-06-11 | 浙江大学 | 多晶硅融化掺氮生长微氮硅单晶的方法 |
-
2008
- 2008-09-09 CN CN 200810222102 patent/CN101671841B/zh active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6468881B1 (en) * | 1997-12-26 | 2002-10-22 | Sumitomo Metal Industries, Ltd. | Method for producing a single crystal silicon |
US6059875A (en) * | 1999-01-11 | 2000-05-09 | Seh America, Inc. | Method of effecting nitrogen doping in Czochralski grown silicon crystal |
CN1414147A (zh) * | 2001-10-26 | 2003-04-30 | 北京有色金属研究总院 | 一种用于直拉硅单晶制备中的掺杂方法及其装置 |
CN1422989A (zh) * | 2002-12-02 | 2003-06-11 | 浙江大学 | 多晶硅融化掺氮生长微氮硅单晶的方法 |
Non-Patent Citations (1)
Title |
---|
JP特开2001-72493A 2001.03.21 |
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CN101671841A (zh) | 2010-03-17 |
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Address after: 101300 south side of Shuanghe Road, Linhe Industrial Development Zone, Shunyi District, Beijing Patentee after: Youyan semiconductor silicon materials Co.,Ltd. Address before: 101300 south side of Shuanghe Road, Linhe Industrial Development Zone, Shunyi District, Beijing Patentee before: GRINM SEMICONDUCTOR MATERIALS Co.,Ltd. |