CN101644866B - 薄膜晶体管阵列基板 - Google Patents
薄膜晶体管阵列基板 Download PDFInfo
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- CN101644866B CN101644866B CN200910195080XA CN200910195080A CN101644866B CN 101644866 B CN101644866 B CN 101644866B CN 200910195080X A CN200910195080X A CN 200910195080XA CN 200910195080 A CN200910195080 A CN 200910195080A CN 101644866 B CN101644866 B CN 101644866B
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- 239000000758 substrate Substances 0.000 title claims abstract description 22
- 229910052751 metal Inorganic materials 0.000 claims abstract description 35
- 239000002184 metal Substances 0.000 claims abstract description 35
- 229910021417 amorphous silicon Inorganic materials 0.000 claims abstract description 13
- 239000010409 thin film Substances 0.000 claims description 12
- 239000004411 aluminium Substances 0.000 claims description 5
- 229910052782 aluminium Inorganic materials 0.000 claims description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 5
- 238000009413 insulation Methods 0.000 claims description 5
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 4
- 239000000956 alloy Substances 0.000 claims description 4
- 239000011651 chromium Substances 0.000 claims description 4
- 229910052804 chromium Inorganic materials 0.000 claims description 4
- 229920002120 photoresistant polymer Polymers 0.000 description 17
- 238000000034 method Methods 0.000 description 12
- 239000004973 liquid crystal related substance Substances 0.000 description 11
- 238000004519 manufacturing process Methods 0.000 description 11
- 230000008439 repair process Effects 0.000 description 11
- 238000010586 diagram Methods 0.000 description 10
- 239000004065 semiconductor Substances 0.000 description 7
- 239000000725 suspension Substances 0.000 description 7
- 238000005530 etching Methods 0.000 description 6
- 239000003990 capacitor Substances 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 239000011159 matrix material Substances 0.000 description 5
- 238000002161 passivation Methods 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 238000003860 storage Methods 0.000 description 5
- 238000000151 deposition Methods 0.000 description 4
- 230000008021 deposition Effects 0.000 description 4
- 238000013461 design Methods 0.000 description 4
- 238000011161 development Methods 0.000 description 4
- 239000012528 membrane Substances 0.000 description 4
- 239000012212 insulator Substances 0.000 description 3
- 241000294743 Gamochaeta Species 0.000 description 2
- 238000004380 ashing Methods 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- MRNHPUHPBOKKQT-UHFFFAOYSA-N indium;tin;hydrate Chemical compound O.[In].[Sn] MRNHPUHPBOKKQT-UHFFFAOYSA-N 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 241001391944 Commicarpus scandens Species 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 238000005289 physical deposition Methods 0.000 description 1
- 239000000049 pigment Substances 0.000 description 1
- 238000012797 qualification Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000004062 sedimentation Methods 0.000 description 1
- 230000008054 signal transmission Effects 0.000 description 1
- 238000007669 thermal treatment Methods 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- YVTHLONGBIQYBO-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) Chemical compound [O--].[Zn++].[In+3] YVTHLONGBIQYBO-UHFFFAOYSA-N 0.000 description 1
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- Thin Film Transistor (AREA)
Abstract
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN200910195080XA CN101644866B (zh) | 2009-09-03 | 2009-09-03 | 薄膜晶体管阵列基板 |
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CN200910195080XA CN101644866B (zh) | 2009-09-03 | 2009-09-03 | 薄膜晶体管阵列基板 |
Publications (2)
Publication Number | Publication Date |
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CN101644866A CN101644866A (zh) | 2010-02-10 |
CN101644866B true CN101644866B (zh) | 2011-05-18 |
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Application Number | Title | Priority Date | Filing Date |
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CN200910195080XA Expired - Fee Related CN101644866B (zh) | 2009-09-03 | 2009-09-03 | 薄膜晶体管阵列基板 |
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CN (1) | CN101644866B (zh) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102654705A (zh) * | 2011-03-23 | 2012-09-05 | 京东方科技集团股份有限公司 | 一种电泳显示器组件及其制造方法 |
CN103185994B (zh) * | 2011-12-29 | 2015-12-16 | 上海中航光电子有限公司 | 一种双栅型薄膜晶体管液晶显示装置的像素结构 |
CN103309108B (zh) | 2013-05-30 | 2016-02-10 | 京东方科技集团股份有限公司 | 阵列基板及其制造方法、显示装置 |
CN103915450B (zh) * | 2014-03-27 | 2017-10-24 | 京东方科技集团股份有限公司 | 一种阵列基板、制作方法及显示装置 |
CN104319279B (zh) | 2014-11-10 | 2017-11-14 | 京东方科技集团股份有限公司 | 阵列基板及其制造方法、显示装置 |
CN105720012A (zh) * | 2016-02-18 | 2016-06-29 | 深圳市华星光电技术有限公司 | 双栅极tft阵列基板及制作方法 |
CN105932032A (zh) | 2016-06-16 | 2016-09-07 | 深圳市华星光电技术有限公司 | 一种阵列基板及其制备方法 |
CN106502018B (zh) * | 2016-12-30 | 2019-02-26 | 惠科股份有限公司 | 像素结构和显示面板 |
CN109638079A (zh) * | 2018-11-30 | 2019-04-16 | 武汉华星光电技术有限公司 | 一种阵列基板及显示面板 |
CN109683371A (zh) * | 2019-01-29 | 2019-04-26 | 深圳市华星光电半导体显示技术有限公司 | 显示面板 |
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2009
- 2009-09-03 CN CN200910195080XA patent/CN101644866B/zh not_active Expired - Fee Related
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Owner name: NANJING CEC PANDA LCD TECHNOLOGY CO., LTD. Free format text: FORMER OWNER: SVA (GROUP) CO., LTD. Effective date: 20110617 |
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Free format text: CORRECT: ADDRESS; FROM: 200233 BUILDING 3, NO. 757, YISHAN ROAD, XUHUI DISTRICT, SHANGHAI TO: 210038 NO. 9, HENGYI ROAD, NANJING ECONOMIC AND TECHNOLOGICAL DEVELOPMENT ZONE, NANJING CITY, JIANGSU PROVINCE |
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Effective date of registration: 20110617 Address after: 210038 Nanjing economic and Technological Development Zone, Jiangsu Province, Hengyi Road, No. 9, No. Patentee after: NANJING CEC PANDA LCD TECHNOLOGY Co.,Ltd. Address before: 200233, Shanghai, Yishan Road, No. 757, third floor, Xuhui District Patentee before: SVA OPTRONICS |
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