CN101639339B - 光学相干断层成像方法和光学相干断层成像装置 - Google Patents

光学相干断层成像方法和光学相干断层成像装置 Download PDF

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CN101639339B
CN101639339B CN 200910160202 CN200910160202A CN101639339B CN 101639339 B CN101639339 B CN 101639339B CN 200910160202 CN200910160202 CN 200910160202 CN 200910160202 A CN200910160202 A CN 200910160202A CN 101639339 B CN101639339 B CN 101639339B
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spectrum
wavelength spectrum
light
elements
wavenumber
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CN101639339A (zh
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末平信人
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Canon Inc
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers
    • G01B9/02091—Tomographic interferometers, e.g. based on optical coherence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02041—Interferometers characterised by particular imaging or detection techniques
    • G01B9/02044—Imaging in the frequency domain, e.g. by using a spectrometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02083—Interferometers characterised by particular signal processing and presentation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G01N21/4795—Scattering, i.e. diffuse reflection spatially resolved investigating of object in scattering medium

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Optics & Photonics (AREA)
  • Radiology & Medical Imaging (AREA)
  • Engineering & Computer Science (AREA)
  • Signal Processing (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
CN 200910160202 2008-07-30 2009-07-30 光学相干断层成像方法和光学相干断层成像装置 Expired - Fee Related CN101639339B (zh)

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JP2008196619 2008-07-30
JP2008196619A JP5371315B2 (ja) 2008-07-30 2008-07-30 光干渉断層撮像方法および光干渉断層撮像装置
JP2008-196619 2008-07-30

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CN101639339A CN101639339A (zh) 2010-02-03
CN101639339B true CN101639339B (zh) 2011-09-07

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US (2) US8233152B2 (https=)
EP (1) EP2149776B1 (https=)
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US20120257165A1 (en) 2012-10-11
US8836952B2 (en) 2014-09-16
JP5371315B2 (ja) 2013-12-18
JP2010032426A (ja) 2010-02-12
US8233152B2 (en) 2012-07-31
US20100027019A1 (en) 2010-02-04
EP2149776A1 (en) 2010-02-03
EP2149776B1 (en) 2012-12-19
CN101639339A (zh) 2010-02-03

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