CN101635268B - 一种改进型半导体晶片真空夹持吸盘 - Google Patents
一种改进型半导体晶片真空夹持吸盘 Download PDFInfo
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- CN101635268B CN101635268B CN2009101818115A CN200910181811A CN101635268B CN 101635268 B CN101635268 B CN 101635268B CN 2009101818115 A CN2009101818115 A CN 2009101818115A CN 200910181811 A CN200910181811 A CN 200910181811A CN 101635268 B CN101635268 B CN 101635268B
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CN2009101818115A CN101635268B (zh) | 2009-07-29 | 2009-07-29 | 一种改进型半导体晶片真空夹持吸盘 |
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CN2009101818115A CN101635268B (zh) | 2009-07-29 | 2009-07-29 | 一种改进型半导体晶片真空夹持吸盘 |
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CN101635268A CN101635268A (zh) | 2010-01-27 |
CN101635268B true CN101635268B (zh) | 2011-08-10 |
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CN2009101818115A Expired - Fee Related CN101635268B (zh) | 2009-07-29 | 2009-07-29 | 一种改进型半导体晶片真空夹持吸盘 |
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Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
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CN102386051B (zh) * | 2010-09-02 | 2014-03-19 | 北京中电科电子装备有限公司 | 一种吸片台装置 |
JP6603480B2 (ja) * | 2015-05-20 | 2019-11-06 | 川崎重工業株式会社 | 電気機器取付装置および方法 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5192070A (en) * | 1990-09-06 | 1993-03-09 | Smc Kabushiki Kaisha | Suction pad |
US6184047B1 (en) * | 1999-05-27 | 2001-02-06 | St Assembly Test Services Pte Ltd | Contactor sleeve assembly for a pick and place semiconductor device handler |
CN1463906A (zh) * | 2002-06-22 | 2003-12-31 | 鸿富锦精密工业(深圳)有限公司 | 真空夹具及其使用方法 |
FR2888522A1 (fr) * | 2005-07-12 | 2007-01-19 | Renault Sas | Dispositif de prehension de tole comportant un dispositif de controle de la presence d'ecrou |
CN2932619Y (zh) * | 2006-06-07 | 2007-08-08 | 上海微电子装备有限公司 | 高精度硅片台 |
CN201214247Y (zh) * | 2007-02-27 | 2009-04-01 | 费斯托股份有限两合公司 | 吸入式抓斗和吸入式抓斗的支撑元件 |
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2009
- 2009-07-29 CN CN2009101818115A patent/CN101635268B/zh not_active Expired - Fee Related
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5192070A (en) * | 1990-09-06 | 1993-03-09 | Smc Kabushiki Kaisha | Suction pad |
US6184047B1 (en) * | 1999-05-27 | 2001-02-06 | St Assembly Test Services Pte Ltd | Contactor sleeve assembly for a pick and place semiconductor device handler |
CN1463906A (zh) * | 2002-06-22 | 2003-12-31 | 鸿富锦精密工业(深圳)有限公司 | 真空夹具及其使用方法 |
FR2888522A1 (fr) * | 2005-07-12 | 2007-01-19 | Renault Sas | Dispositif de prehension de tole comportant un dispositif de controle de la presence d'ecrou |
CN2932619Y (zh) * | 2006-06-07 | 2007-08-08 | 上海微电子装备有限公司 | 高精度硅片台 |
CN201214247Y (zh) * | 2007-02-27 | 2009-04-01 | 费斯托股份有限两合公司 | 吸入式抓斗和吸入式抓斗的支撑元件 |
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C53 | Correction of patent for invention or patent application | ||
CB03 | Change of inventor or designer information |
Inventor after: Tian Jun Inventor after: Gu Rongjun Inventor after: Zhu Xianglong Inventor before: Zhu Xianglong |
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Free format text: CORRECT: INVENTOR; FROM: ZHU XIANGLONG TO: TIAN JUN GU RONGJUN ZHU XIANGLONG |
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Owner name: DALIAN UNIVERSITY OF SCIENCE AND TECHNOLOGY |
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Effective date of registration: 20110325 Address after: 214061 Hubin Road, Binhu District, Jiangsu, Wuxi, 11 Applicant after: Wuxi Machine Tool Co., Ltd. Co-applicant after: Dalian University of Technology Address before: 214061 Hubin Road, Binhu District, Jiangsu, Wuxi, 11 Applicant before: Wuxi Machine Tool Co., Ltd. |
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