CN101634045A - 一种用于铜箔后处理的电解槽 - Google Patents
一种用于铜箔后处理的电解槽 Download PDFInfo
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- CN101634045A CN101634045A CN200810150446A CN200810150446A CN101634045A CN 101634045 A CN101634045 A CN 101634045A CN 200810150446 A CN200810150446 A CN 200810150446A CN 200810150446 A CN200810150446 A CN 200810150446A CN 101634045 A CN101634045 A CN 101634045A
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN2008101504467A CN101634045B (zh) | 2008-07-25 | 2008-07-25 | 一种用于铜箔后处理的电解槽 |
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CN2008101504467A CN101634045B (zh) | 2008-07-25 | 2008-07-25 | 一种用于铜箔后处理的电解槽 |
Publications (2)
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CN101634045A true CN101634045A (zh) | 2010-01-27 |
CN101634045B CN101634045B (zh) | 2012-05-23 |
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CN2008101504467A Expired - Fee Related CN101634045B (zh) | 2008-07-25 | 2008-07-25 | 一种用于铜箔后处理的电解槽 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107761156A (zh) * | 2016-08-22 | 2018-03-06 | 盛美半导体设备(上海)有限公司 | 电镀槽 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN2752274Y (zh) * | 2004-12-29 | 2006-01-18 | 北京远创铜箔设备有限公司 | 制备铜箔的电解装置 |
CN2767457Y (zh) * | 2004-12-30 | 2006-03-29 | 北京远创铜箔设备有限公司 | 用于铜箔生产后处理过程中防氧化的装置 |
CN201017773Y (zh) * | 2006-12-12 | 2008-02-06 | 乳源瑶族自治县东阳光化成箔有限公司 | 一种电极箔的化成装置及其化成槽 |
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2008
- 2008-07-25 CN CN2008101504467A patent/CN101634045B/zh not_active Expired - Fee Related
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107761156A (zh) * | 2016-08-22 | 2018-03-06 | 盛美半导体设备(上海)有限公司 | 电镀槽 |
CN107761156B (zh) * | 2016-08-22 | 2021-05-14 | 盛美半导体设备(上海)股份有限公司 | 电镀槽 |
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CN101634045B (zh) | 2012-05-23 |
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Legal Events
Date | Code | Title | Description |
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C06 | Publication | ||
PB01 | Publication | ||
C53 | Correction of patent for invention or patent application | ||
CB03 | Change of inventor or designer information |
Inventor after: Ren Xiaofeng Inventor after: Lv Shangning Inventor after: Chen Weina Inventor after: Ren Famin Inventor after: Du Hongqi Inventor before: Ren Xiaofeng Inventor before: Shang Ning Inventor before: Chen Weina Inventor before: Ren Famin Inventor before: Du Hongqi |
|
COR | Change of bibliographic data |
Free format text: CORRECT: INVENTOR; FROM: REN XIAOFENG SHANG NING CHEN WEINUO REN FAMIN DU HONGQI TO: REN XIAOFENG LV SHANGNING CHEN WEINUO REN FAMIN DU HONGQI |
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C14 | Grant of patent or utility model | ||
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CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120523 Termination date: 20170725 |
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CF01 | Termination of patent right due to non-payment of annual fee |