CN101593663B - 短弧型水银灯 - Google Patents

短弧型水银灯 Download PDF

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Publication number
CN101593663B
CN101593663B CN2009101410464A CN200910141046A CN101593663B CN 101593663 B CN101593663 B CN 101593663B CN 2009101410464 A CN2009101410464 A CN 2009101410464A CN 200910141046 A CN200910141046 A CN 200910141046A CN 101593663 B CN101593663 B CN 101593663B
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CN
China
Prior art keywords
container
short
yttrium
mercury lamp
hydrogen
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Active
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CN2009101410464A
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English (en)
Chinese (zh)
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CN101593663A (zh
Inventor
安田幸夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ushio Denki KK
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Ushio Denki KK
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Publication date
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Publication of CN101593663A publication Critical patent/CN101593663A/zh
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Publication of CN101593663B publication Critical patent/CN101593663B/zh
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00Gas-discharge or vapour-discharge lamps
    • H01J61/02Details
    • H01J61/12Selection of substances for gas fillings; Specified operating pressure or temperature
    • H01J61/18Selection of substances for gas fillings; Specified operating pressure or temperature having a metallic vapour as the principal constituent
    • H01J61/20Selection of substances for gas fillings; Specified operating pressure or temperature having a metallic vapour as the principal constituent mercury vapour
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70Microphotolithographic exposure; Apparatus therefor
    • G03F7/70008Production of exposure light, i.e. light sources
    • G03F7/70016Production of exposure light, i.e. light sources by discharge lamps
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00Gas-discharge or vapour-discharge lamps
    • H01J61/02Details
    • H01J61/04Electrodes; Screens; Shields
    • H01J61/06Main electrodes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00Gas-discharge or vapour-discharge lamps
    • H01J61/02Details
    • H01J61/04Electrodes; Screens; Shields
    • H01J61/06Main electrodes
    • H01J61/067Main electrodes for low-pressure discharge lamps
    • H01J61/0675Main electrodes for low-pressure discharge lamps characterised by the material of the electrode
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00Gas-discharge or vapour-discharge lamps
    • H01J61/02Details
    • H01J61/04Electrodes; Screens; Shields
    • H01J61/06Main electrodes
    • H01J61/073Main electrodes for high-pressure discharge lamps
    • H01J61/0732Main electrodes for high-pressure discharge lamps characterised by the construction of the electrode
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00Gas-discharge or vapour-discharge lamps
    • H01J61/02Details
    • H01J61/24Means for obtaining or maintaining the desired pressure within the vessel
    • H01J61/26Means for absorbing or adsorbing gas, e.g. by gettering; Means for preventing blackening of the envelope
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00Gas-discharge or vapour-discharge lamps
    • H01J61/02Details
    • H01J61/36Seals between parts of vessels; Seals for leading-in conductors; Leading-in conductors
    • H01J61/366Seals for leading-in conductors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00Gas-discharge or vapour-discharge lamps
    • H01J61/84Lamps with discharge constricted by high pressure
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00Gas-discharge or vapour-discharge lamps
    • H01J61/84Lamps with discharge constricted by high pressure
    • H01J61/86Lamps with discharge constricted by high pressure with discharge additionally constricted by close spacing of electrodes, e.g. for optical projection

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • General Physics & Mathematics (AREA)
  • Discharge Lamp (AREA)
  • Vessels And Coating Films For Discharge Lamps (AREA)
CN2009101410464A 2008-05-28 2009-05-18 短弧型水银灯 Active CN101593663B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2008-139181 2008-05-28
JP2008139181A JP4525798B2 (ja) 2008-05-28 2008-05-28 ショートアーク型水銀ランプ
JP2008139181 2008-05-28

Publications (2)

Publication Number Publication Date
CN101593663A CN101593663A (zh) 2009-12-02
CN101593663B true CN101593663B (zh) 2013-10-16

Family

ID=41408253

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2009101410464A Active CN101593663B (zh) 2008-05-28 2009-05-18 短弧型水银灯

Country Status (4)

Country Link
JP (1) JP4525798B2 (https=)
KR (1) KR100981227B1 (https=)
CN (1) CN101593663B (https=)
TW (1) TW200949893A (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010010022A (ja) * 2008-06-30 2010-01-14 Ushio Inc 放電ランプ
JP4826669B2 (ja) * 2009-11-05 2011-11-30 ウシオ電機株式会社 ショートアーク型放電ランプ
JP5321425B2 (ja) * 2009-11-26 2013-10-23 ウシオ電機株式会社 ショートアーク型放電ランプ
CN101882556B (zh) * 2010-08-05 2012-01-11 上海大愚光源科技有限公司 一种连续氪灯用金属阴极
US8421333B2 (en) * 2011-03-07 2013-04-16 Osram Sylvania Inc. Energy saving gas discharge lamp including a xenon-based gaseous mixture

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1144395A (zh) * 1995-07-31 1997-03-05 松下电子工业株式会社 荧光灯及其制造方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL7315641A (nl) * 1973-11-15 1975-05-20 Philips Nv Hogedrukgasontladingslamp.
JPS52103879A (en) * 1976-02-25 1977-08-31 Toshiba Corp Metallic vapor discharge lamp
NL7611137A (nl) * 1976-10-08 1978-04-11 Philips Nv Hogedrukontladingslamp.
JP2000188085A (ja) * 1998-12-22 2000-07-04 Ushio Inc ショートアーク型水銀ランプおよび紫外線発光装置
JP3994880B2 (ja) 2002-04-26 2007-10-24 ウシオ電機株式会社 放電ランプ
JP4412124B2 (ja) 2004-09-13 2010-02-10 ウシオ電機株式会社 ショートアーク型キセノンランプ
JP4548290B2 (ja) * 2004-11-25 2010-09-22 ウシオ電機株式会社 放電ランプ
JP2007095598A (ja) * 2005-09-30 2007-04-12 Iwasaki Electric Co Ltd 放電ランプ
JP2008034222A (ja) * 2006-07-28 2008-02-14 Ushio Inc ショートアーク型水銀ランプ

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1144395A (zh) * 1995-07-31 1997-03-05 松下电子工业株式会社 荧光灯及其制造方法

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
JP特开2006-179461A 2006.07.06
JP特开2007-95598A 2007.04.12

Also Published As

Publication number Publication date
JP4525798B2 (ja) 2010-08-18
KR100981227B1 (ko) 2010-09-10
TWI338316B (https=) 2011-03-01
TW200949893A (en) 2009-12-01
JP2009289519A (ja) 2009-12-10
CN101593663A (zh) 2009-12-02
KR20090123774A (ko) 2009-12-02

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