KR100981227B1 - 쇼트 아크형 수은 램프 - Google Patents

쇼트 아크형 수은 램프 Download PDF

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Publication number
KR100981227B1
KR100981227B1 KR1020090031802A KR20090031802A KR100981227B1 KR 100981227 B1 KR100981227 B1 KR 100981227B1 KR 1020090031802 A KR1020090031802 A KR 1020090031802A KR 20090031802 A KR20090031802 A KR 20090031802A KR 100981227 B1 KR100981227 B1 KR 100981227B1
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KR
South Korea
Prior art keywords
container
short arc
mercury lamp
yttrium
hydrogen
Prior art date
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KR1020090031802A
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English (en)
Korean (ko)
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KR20090123774A (ko
Inventor
유키오 야스다
Original Assignee
우시오덴키 가부시키가이샤
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Publication of KR20090123774A publication Critical patent/KR20090123774A/ko
Application granted granted Critical
Publication of KR100981227B1 publication Critical patent/KR100981227B1/ko
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/12—Selection of substances for gas fillings; Specified operating pressure or temperature
    • H01J61/18—Selection of substances for gas fillings; Specified operating pressure or temperature having a metallic vapour as the principal constituent
    • H01J61/20—Selection of substances for gas fillings; Specified operating pressure or temperature having a metallic vapour as the principal constituent mercury vapour
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70008—Production of exposure light, i.e. light sources
    • G03F7/70016—Production of exposure light, i.e. light sources by discharge lamps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/04—Electrodes; Screens; Shields
    • H01J61/06—Main electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/04—Electrodes; Screens; Shields
    • H01J61/06—Main electrodes
    • H01J61/067—Main electrodes for low-pressure discharge lamps
    • H01J61/0675—Main electrodes for low-pressure discharge lamps characterised by the material of the electrode
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/04—Electrodes; Screens; Shields
    • H01J61/06—Main electrodes
    • H01J61/073—Main electrodes for high-pressure discharge lamps
    • H01J61/0732—Main electrodes for high-pressure discharge lamps characterised by the construction of the electrode
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/24—Means for obtaining or maintaining the desired pressure within the vessel
    • H01J61/26—Means for absorbing or adsorbing gas, e.g. by gettering; Means for preventing blackening of the envelope
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/36—Seals between parts of vessels; Seals for leading-in conductors; Leading-in conductors
    • H01J61/366—Seals for leading-in conductors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/84—Lamps with discharge constricted by high pressure
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/84—Lamps with discharge constricted by high pressure
    • H01J61/86—Lamps with discharge constricted by high pressure with discharge additionally constricted by close spacing of electrodes, e.g. for optical projection

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • General Physics & Mathematics (AREA)
  • Discharge Lamp (AREA)
  • Vessels And Coating Films For Discharge Lamps (AREA)
KR1020090031802A 2008-05-28 2009-04-13 쇼트 아크형 수은 램프 Active KR100981227B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2008139181A JP4525798B2 (ja) 2008-05-28 2008-05-28 ショートアーク型水銀ランプ
JPJP-P-2008-139181 2008-05-28

Publications (2)

Publication Number Publication Date
KR20090123774A KR20090123774A (ko) 2009-12-02
KR100981227B1 true KR100981227B1 (ko) 2010-09-10

Family

ID=41408253

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020090031802A Active KR100981227B1 (ko) 2008-05-28 2009-04-13 쇼트 아크형 수은 램프

Country Status (4)

Country Link
JP (1) JP4525798B2 (https=)
KR (1) KR100981227B1 (https=)
CN (1) CN101593663B (https=)
TW (1) TW200949893A (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010010022A (ja) * 2008-06-30 2010-01-14 Ushio Inc 放電ランプ
JP4826669B2 (ja) * 2009-11-05 2011-11-30 ウシオ電機株式会社 ショートアーク型放電ランプ
JP5321425B2 (ja) * 2009-11-26 2013-10-23 ウシオ電機株式会社 ショートアーク型放電ランプ
CN101882556B (zh) * 2010-08-05 2012-01-11 上海大愚光源科技有限公司 一种连续氪灯用金属阴极
US8421333B2 (en) * 2011-03-07 2013-04-16 Osram Sylvania Inc. Energy saving gas discharge lamp including a xenon-based gaseous mixture

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20000048332A (ko) * 1998-12-22 2000-07-25 다나카 아키히로 쇼트아크형 수은램프 및 자외선 발광장치
JP2004006246A (ja) 2002-04-26 2004-01-08 Ushio Inc 放電ランプ
JP2006080016A (ja) 2004-09-13 2006-03-23 Ushio Inc ショートアーク型キセノンランプ
JP2006179461A (ja) 2004-11-25 2006-07-06 Ushio Inc 放電ランプ

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL7315641A (nl) * 1973-11-15 1975-05-20 Philips Nv Hogedrukgasontladingslamp.
JPS52103879A (en) * 1976-02-25 1977-08-31 Toshiba Corp Metallic vapor discharge lamp
NL7611137A (nl) * 1976-10-08 1978-04-11 Philips Nv Hogedrukontladingslamp.
CN1089188C (zh) * 1995-07-31 2002-08-14 松下电器产业株式会社 荧光灯及其制造方法
JP2007095598A (ja) * 2005-09-30 2007-04-12 Iwasaki Electric Co Ltd 放電ランプ
JP2008034222A (ja) * 2006-07-28 2008-02-14 Ushio Inc ショートアーク型水銀ランプ

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20000048332A (ko) * 1998-12-22 2000-07-25 다나카 아키히로 쇼트아크형 수은램프 및 자외선 발광장치
JP2004006246A (ja) 2002-04-26 2004-01-08 Ushio Inc 放電ランプ
JP2006080016A (ja) 2004-09-13 2006-03-23 Ushio Inc ショートアーク型キセノンランプ
JP2006179461A (ja) 2004-11-25 2006-07-06 Ushio Inc 放電ランプ

Also Published As

Publication number Publication date
JP4525798B2 (ja) 2010-08-18
TWI338316B (https=) 2011-03-01
TW200949893A (en) 2009-12-01
JP2009289519A (ja) 2009-12-10
CN101593663A (zh) 2009-12-02
CN101593663B (zh) 2013-10-16
KR20090123774A (ko) 2009-12-02

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