CN101582364B - Double cup cover ion source filament seat structure for preventing metal spraying - Google Patents
Double cup cover ion source filament seat structure for preventing metal spraying Download PDFInfo
- Publication number
- CN101582364B CN101582364B CN 200910148118 CN200910148118A CN101582364B CN 101582364 B CN101582364 B CN 101582364B CN 200910148118 CN200910148118 CN 200910148118 CN 200910148118 A CN200910148118 A CN 200910148118A CN 101582364 B CN101582364 B CN 101582364B
- Authority
- CN
- China
- Prior art keywords
- cup cover
- ion source
- filament
- cover
- straight tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Electron Sources, Ion Sources (AREA)
Abstract
The invention relates to the technical field of ion sources, and particularly discloses a double cup cover ion source filament seat structure for preventing metal spraying. The structure adopts a simple double cup cover set shackle structure, and achieves the functional effect of insulation (tungsten filament spraying and plasma bombardment and the like) in bad working conditions by adding insulating parts as least as possible and size change at a position with limited space; an upper cover completely covers a rectangular block structure of a molybdenum rod, thus greatly reducing plasma bombardment which is easily suffered, fully utilizing the safety clearance between a lower cup cover and a ceramic straight tube to achieve better insulation effect and avoiding short-circuit phenomenon of an anode of an ion source metal wall and a filament cathode; by the design structure, the invention solves the problem that short circuit occurs to the ceramic insulation part of the seat body due to the metal plating and filament spraying and plasma bombardment in the research process of large-power ion source, greatly improves experiment safety coefficient and simultaneously prolongs the servicelife of the filament and the ceramic part.
Description
Technical field
The invention belongs to the technology of ion source field, be specifically related to a kind of ion source filament seat structure.
Background technology
Ion source adopts hot tungsten filament as the discharge negative electrode, and metallic walls is as anode, and discharge locular wall and end face arrange that permanent magnet produces the magnetically confined plasma, produces high density and inhomogeneity plasma.Usually an end flanges of ion source discharge chamber is arranged the filament and the facility of supplying gas, and the other end is drawn ion beam.Filament is fixing on end flanges or discharge locular wall.Support and insulation system (being also referred to as filament seat structure) are piths of ion source inner connecting structure design; Because the tungsten filament negative electrode in the ion source need be electrically heated to ability heat of emission electronics about 3000K; so usually can be owing to the filament material evaporation at high temperature and the boiler water circulation phenomenon of tungsten material; cause at whole ion source cavity inner-wall spraying, finally form the metal-plated rete.The generation of metal-plated rete causes two terminal shortcircuits of ion source metallic walls ion source anode and negative electrode and filament, makes insulation system ineffective, damages ion source and maybe can not work.Ion source filament seat spraying problem becomes the problem that the high-power ion source of development must solve.
Because ion source adopts scorching hot filament emitting electrons to excite high-density plasma, electron source also adopts scorching hot filament to produce electronics, so at high temperature the filament metal material sprays, is deposited on the inner surface of ion source, electron source by modes such as boiler water circulation, sputter, evaporations, this is present ion source and the unavoidable problem of electron source.If the surface was metallic conductor originally, the spraying of metallic filament influence is not too large, but if insulator, spraying will produce very serious consequence.At the indoor main insulation system of ion source discharge is the filament seat.
Traditional filament seat structure usually as shown in Figure 1, the filament base flange can be arranged the filament electrode of some in the ion source, the electrode of arc chamber inside mostly is by Mo and processes, one end inserts filament, the other end is a screw rod, but screw in the pottery valve electrode on the flange, how only valve electrode is welded on the same metal flange.Insulation system adopts ceramic straight tube, molybdenum rod is placed in wherein, this structure is usually because after ion source work a period of time, tungsten material filament is sprayed on ceramic straight tube outer wall and forms the metal-plated rete, cause molybdenum rod (filament seat) and filament seat pottery straight tube outer surface and pedestal metal flange (also being discharge anode), short circuit between the short circuit of ion source metal drum wall anode and filament cathode and the filament causes insulation system to lose efficacy; Owing to junction between filament and bearing is vulnerable to plasma bombardment without any protection, local temperature is too high simultaneously, very easily causes filament fusing.
Summary of the invention
The purpose of this invention is to provide a kind of be not vulnerable to plasma bombardment, that be difficult for to form negative and positive the two poles of the earth and filament two terminal shortcircuits, insulation effect is good, simple in structure, the double cup cover ion source filament seat structure of long service life, preventing metal spraying with low cost.
Technical scheme of the present invention is as follows: a kind of double cup cover ion source filament seat structure of preventing metal spraying, it comprises insulating cover, be provided with electrode in the insulating cover, wherein: described insulating cover is the columned upper and lower cup cover of left-hand thread, electrode is the molybdenum rod of rod shaped structure, molybdenum rod passes down the cup cover successively and goes up the cup cover, and an end of molybdenum rod is the rectangular block shape structure; The outside of the other end of molybdenum rod is with ceramic straight tube; One end opening of last cup cover, the other end is provided with small sircle hole, last cup cover covers the rectangular block shape structure of molybdenum rod fully, following cup cover is a solid section with the contacted end of last cup cover, and solid section has round tube hole, and ceramic straight tube is located at down in the cup cover, the internal diameter of pottery straight tube external diameter and round tube hole is complementary, and cooperate with the diameter of molybdenum rod, thereby ceramic straight tube is penetrated to the round tube hole of following glass of cover, and leave the gap between the outer wall of ceramic straight tube and the following glass of inwall that covers.
In the double cup cover ion source filament seat structure of above-mentioned preventing metal spraying, the small sircle hole diameter of described round tube hole external diameter and last cup cover equates.
In the double cup cover ion source filament seat structure of above-mentioned preventing metal spraying, the gap length between the inwall of the outer wall of ceramic straight tube and following glass of cover is 2.3mm～2.7mm.
Remarkable technique effect of the present invention: adopted easy two cup cover left-hand thread structures, on confined space position, by increasing the least possible insulating element and change in size, reach the functional effect that (tungsten filament spraying and plasma bombardment etc.) still can insulate under bad working environments; Last cup cover covers the rectangular block shape structure of molybdenum rod fully, significantly reduced the plasma bombardment that is subjected to easily, better insulation effect is played in the safety clearance that makes full use of down between cup cover and the ceramic straight tube, avoided the short circuit phenomenon of ion source metallic walls anode and filament cathode, by this project organization, solved in high-power ion source development process since the pedestal ceramic insulation part that filament spraying and plasma bombardment cause because of the metal coating problem of short-circuit, improve the experiment safety coefficient greatly, also prolonged the useful life of filament and ceramic member simultaneously.
Description of drawings
Fig. 1 is a filament seat structure schematic diagram of the prior art;
Fig. 2 is the profile of the double cup cover ion source filament seat structure of preventing metal spraying;
Fig. 3 is the double cup cover ion source filament seat structure schematic diagram of preventing metal spraying;
Fig. 4 is the ceramic cup body section figure in the double cup cover ion source filament seat structure of preventing metal spraying;
Among the figure: 1. molybdenum rod; 2. ceramic straight tube; 3. go up the cup cover; 4. following glass of cover; 5. round tube hole; 6. filament base flange; 7. filament.
Embodiment
Below in conjunction with drawings and the specific embodiments the present invention is described in further detail.
The double cup cover ion source filament seat structure of preventing metal spraying as shown in Figures 2 and 3, insulating cover are the columned upper and lower cup cover 3,4 of left-hand thread, and the cup cover material is a pottery; Electrode is the molybdenum rod 1 of rod shaped structure, and an end of molybdenum rod 1 is the rectangular block shape structure; The outside of the other end of molybdenum rod 1 is with ceramic straight tube 2; One end opening of last cup cover 3, the other end is opened small sircle hole, and last cup cover 3 covers the rectangular block shape structure of molybdenum rod 1 fully; Following cup cover 4 is a solid section with last cup cover 3 contacted ends, solid section has round tube hole 5, in following glass of cover 4, also be provided with ceramic straight tube 2, the internal diameter of pottery straight tube 2 external diameters and round tube hole 5 is complementary, and cooperate with the diameter of molybdenum rod 1, thereby make ceramic straight tube 2 penetrate down cup cover 4, and leave the gap between the inwall of the outer wall of ceramic straight tube 2 and following glass of cover 4.
Upper and lower cup cover 3, the 4 relative outsides, two ends are the conical surface, and conical surface center is provided with small sircle hole.
The small sircle hole diameter of round tube hole 5 external diameters and last cup cover 3 equates.
Leave the gap of 2.5mm between the outer wall of pottery straight tube 2 and the inwall of following glass of cover 4.
Two glasss of cover filament seat insulation systems adopt a cup rim of a cup to the ion source cavity, and lifting height has significantly reduced the plasma bombardment that originally is subjected to easily herein to covering filament and pedestal coupling part fully; Another ceramic cup (following glass cover 4) upset cup cover, rim of a cup be towards the design of bottom filament seat flange, the support of connecting inner pottery straight tube 2, and good insulation effect has been played in the safety clearance (2.5mm is got in the present embodiment intermediate gap) that makes full use of both.
As shown in Figure 4, with regard to single cup, what need consideration is the existence of plasma bombardment and metal coating, and the bigger variation of ambient temperature of living in is to the requirement of ceramic material structure; The end face of cup cover 3,4 is the conical surface up and down, and is rationally simple, easy operating and maintenance and with the cooperating of other parts
Through our test of many times, the selection of safety clearance, the wall thickness of ceramic material is all extremely important, should consider and install and operation easy, also need to consider complicated variation of temperature herein, otherwise 95 ceramic members breaks easily; Improve the cup project organization (as shown in Figure 4) that the back is determined through us; even cup and ceramic straight-bar are all formed the metal-plated rete by the tungsten filament spraying; but because the appropriate design of both gap sizes; with of the protection of anti-rim of a cup to inner straight tube; can not cause the short circuit phenomenon of ion source metallic walls anode and filament cathode, insulation system has played good action.The bevelling on 120 degree slopes, cup top designs, and has mainly considered the needs of hygral equilibrium, the convenience of installation and maintenance, and the demand of plasma bombardment direction and angle.By this project organization, solved in the ion source experimentation since the pedestal ceramic insulation part that filament spraying and plasma bombardment cause because of the metal coating problem of short-circuit, reduced the plasma bombardment that the junction is subjected between filament and bearing, improve the experiment safety coefficient greatly, also prolonged the useful life of filament and ceramic member simultaneously; Through this new filament seat insulation system of HL-2A neutral beam heating system experimental verification is safe and reliable.
The present invention is applicable to following field: ion source, electron gun; Plasma generator, ion accelerator and fusion research field; Various coating apparatus such as electron evaporation plating, magnetic control sputtering device, vacuum.
Claims (3)
1. the double cup cover ion source filament seat structure of a preventing metal spraying, it comprises insulating cover, be provided with electrode in the insulating cover, it is characterized in that: described insulating cover is the columned upper and lower cup cover (3 of left-hand thread, 4), electrode is the molybdenum rod (1) of rod shaped structure, and molybdenum rod (1) passes down cup cover (4) and last cup cover (3) successively, and an end of molybdenum rod (1) is the rectangular block shape structure; The outside of the other end of molybdenum rod (1) is with ceramic straight tube (2); One end opening of last cup cover (3), the other end is provided with small sircle hole, and last cup cover (3) covers the rectangular block shape structure of molybdenum rod (1) fully; Following cup cover (4) is a solid section with last cup cover (3) contacted end, solid section has round tube hole (5), pottery straight tube (2) is located at down in the cup cover (4), the internal diameter of pottery straight tube (2) external diameter and round tube hole (5) is complementary, and cooperate with the diameter of molybdenum rod (1), ceramic straight tube (2) is penetrated to the round tube hole (5) of following glass of cover (4), and leave the gap between the inwall of the outer wall of ceramic straight tube (2) and following glass of cover (4).
2. the double cup cover ion source filament seat structure of preventing metal spraying as claimed in claim 1 is characterized in that: the small sircle hole diameter of described round tube hole (5) external diameter and last cup cover (3) equates.
3. the double cup cover ion source filament seat structure of preventing metal spraying as claimed in claim 1 is characterized in that: the gap length between the inwall of the outer wall of ceramic straight tube (2) and following glass of cover (4) is 2.3mm～2.7mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200910148118 CN101582364B (en) | 2009-06-22 | 2009-06-22 | Double cup cover ion source filament seat structure for preventing metal spraying |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200910148118 CN101582364B (en) | 2009-06-22 | 2009-06-22 | Double cup cover ion source filament seat structure for preventing metal spraying |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101582364A CN101582364A (en) | 2009-11-18 |
| CN101582364B true CN101582364B (en) | 2011-06-22 |
Family
ID=41364457
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200910148118 Active CN101582364B (en) | 2009-06-22 | 2009-06-22 | Double cup cover ion source filament seat structure for preventing metal spraying |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101582364B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105355531A (en) * | 2015-10-30 | 2016-02-24 | 中国电子科技集团公司第四十八研究所 | Filament clamping device for ion sources |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106783460A (en) * | 2017-01-05 | 2017-05-31 | 武汉科技大学 | A kind of low work function cathode |
| CN113838728B (en) * | 2021-09-03 | 2024-03-26 | 奕瑞影像科技成都有限公司 | Ion source filament assembly and welding method thereof |
-
2009
- 2009-06-22 CN CN 200910148118 patent/CN101582364B/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105355531A (en) * | 2015-10-30 | 2016-02-24 | 中国电子科技集团公司第四十八研究所 | Filament clamping device for ion sources |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101582364A (en) | 2009-11-18 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN107045971B (en) | A kind of Electromagnetic isotope separator ion gun | |
| CN101582364B (en) | Double cup cover ion source filament seat structure for preventing metal spraying | |
| CN103299390A (en) | Device for producing an electron beam | |
| CN111385956B (en) | Radio frequency particle source | |
| CN104505325A (en) | Electronic gun device for high-voltage gas discharge | |
| CN109979794A (en) | A kind of radio frequency induction coupled plasma averager | |
| CN112635287A (en) | Novel ion source plasma neutralizer | |
| CN105390355B (en) | A kind of reflective electrode structure part and ion gun | |
| CN104362065A (en) | Large-caliber parallel beam ion source used for ion beam etcher | |
| CN102523673A (en) | Magnetic mirror field confining plasma sealing window and sealing method thereof | |
| CN202042452U (en) | Hollow cathode ion source | |
| CN106884150B (en) | Suspension anode and magnetron sputtering device with same | |
| US5216690A (en) | Electron beam gun with grounded shield to prevent arc down | |
| CN110137056B (en) | Suspension heating type electron source assembly | |
| CN205839120U (en) | A kind of vacuum furnace body and the impressed current anode of use thereof | |
| KR101132720B1 (en) | Tungsten coated liner and arc chamber of ion implantation apparatus | |
| CN219575554U (en) | Insulation structure of ion spray gun | |
| CN205473958U (en) | E type carbon nanotube electronic gun evaporation source | |
| CN114242549B (en) | Ion source device for forming plasma by material sputtering | |
| CN219575558U (en) | Graphite double-hole nozzle structure of arc starting cavity of ion spray gun | |
| CN219575557U (en) | Arcing chamber structure of ion source for ion implanter | |
| CN114828382B (en) | Mixed superconductive ECR ion source device | |
| CN216597491U (en) | Ion generator in ion implanter | |
| CN216528737U (en) | Ion source device for solid source injection process | |
| CN102244971A (en) | Atmospheric-pressure direct current arc discharge plasma generator and cathode manufacturing method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |