CN202042452U - Hollow cathode ion source - Google Patents
Hollow cathode ion source Download PDFInfo
- Publication number
- CN202042452U CN202042452U CN2011201432964U CN201120143296U CN202042452U CN 202042452 U CN202042452 U CN 202042452U CN 2011201432964 U CN2011201432964 U CN 2011201432964U CN 201120143296 U CN201120143296 U CN 201120143296U CN 202042452 U CN202042452 U CN 202042452U
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- cathode
- crucible
- negative electrode
- anode
- cover
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Abstract
The utility model discloses a hollow cathode ion source which at least comprises an electronic gun, an evaporator crucible, a connecting nut and a gas inlet pipe; in the electronic gun, a filament is positioned in a hollow cathode formed by an upper cathode, a lower cathode and a cathode insulating bush, an anode is arranged above the upper cathode, and a gap is reserved between the anode and the upper cathode; in the evaporator crucible, a heater is sheathed in a crucible bush, a crucible body is positioned in the heater, a heat screen is sheathed outside the crucible bush; external threads are arranged at the lower part of the crucible bush and the upper part of the cathode bush, the lower part of the crucible bush and the upper part of the cathode bush are connected by the connecting nut, and the crucible body and the upper part of the heater are connected with the gas inlet pipe. The ion source is convenient to disassemble, install, change, replace damaged parts, and clean.
Description
Technical field
The utility model relates to a kind of ion source, specifically, relates to a kind of hollow cathode ion source.
Background technology
Ion implantation technique is the material surface modifying and the doping means of rising the seventies in last century, is widely used in industry and scientific research fields such as semiconductor, integrated circuit, metal surface properties modification.Ion source is the core component of many equipment such as accelerator, ion implantor, isotron as the device that produces and draw ion beam.According to the kind and the charge state of desired ion, there is the ion source of multiple structure, each ionogenic operation principle has nothing in common with each other.
In the prior art, utilize 911 type ion sources to carry out the hollow cathode discharge, make electronics and metal vapors atomic collision produce ionization, form plasma, and draw ion beam current by extraction electrode.The ionogenic subject matter of 911 types is complex structure, existing evaporator crucible has electron gun again, the heater strip of evaporator crucible and the filament of electron gun all are easily worn parts, need often to change, and the raw metal in the evaporator crucible also need to change according to the needs of processing or scientific research business.Operation material usually pollutes cavity or short circuit in the electron gun, need clean.On the other hand, evaporator crucible and electron gun are not to need simultaneously to unload to change, and original integrated design has increased unnecessary workload.
Summary of the invention
For solving the aforementioned problems in the prior, the utility model provides a kind of hollow cathode ion source, and impaired parts and cleaning are convenient to dismantle, are installed, reload, change to the ion source that the utility model provides.
For reaching above-mentioned purpose, the utility model adopts following technical scheme: a kind of hollow cathode ion source, at least comprise electron gun, evaporator crucible, attaching nut and air inlet pipe, electron gun comprises filament, last negative electrode, following negative electrode, cathode insulation cover, goes up cathode connection ring, cathode cap, cathode sheath, anode, anode seat and anodized insulation cover, and evaporator crucible comprises crucible body, heater, crucible cover and heat shield; In electron gun, the following negative electrode that outer cover is equipped with cathode insulation cover is located at the center of cathode cap, last negative electrode is positioned at the top of negative electrode down, and be provided with the cathode insulation cover between last negative electrode and the following negative electrode, last negative electrode, following negative electrode and cathode insulation cover constitute hollow cathode, filament is positioned at hollow cathode, and in the cathode sheath that hollow cathode is installed on cathode cap is connected threadably, the top of last negative electrode is equipped with the anodized insulation cover successively, anode and anode seat, the bottom of anodized insulation cover is connected with the top of last negative electrode, anode between anodized insulation cover and anode seat and and last negative electrode between be provided with the gap, last cathode connection ring set is loaded on the outside that negative electrode and cathode insulation overlap; In evaporator crucible, the heaters set that is wound with heater strip is loaded in the crucible cover and the bottom is connected with the crucible cover, and the crucible body is positioned at heater, and heat shield is set in the outside that crucible overlaps in the draw-in groove mode; The bottom of crucible body is embedded in anode and the anode seat, the bottom of crucible cover and the top of cathode sheath are equipped with external screw thread, the bottom of crucible cover is connected by the attaching nut with the top of cathode sheath, the bottom of heater places the top of anode seat and cathode sheath, cathode cap is connected threadably with heat shield, and the top of crucible body and heater is connected with air inlet pipe.
The periphery of hollow cathode is provided with the field coil that is wound on the bobbin, and bobbin is positioned at the bottom of heat shield and is connected threadably with heat shield.
The winding direction of field coil is opposite with the winding direction of filament.
Compared with prior art, the bottom of the ionogenic crucible cover of the hollow cathode that the utility model provides and the top of cathode sheath are equipped with external screw thread, the bottom of crucible cover is connected by the attaching nut with the top of cathode sheath, therefore is convenient to dismantle, installs, reloads, changes impaired parts and cleaning.
Description of drawings
Accompanying drawing is an ionogenic structural representation of the present utility model.
Among the figure: the 1-filament; The last negative electrode of 2-; Negative electrode under the 3-; 4-cathode insulation cover; The last cathode connection ring of 5-; The 6-cathode cap; The 7-cathode sheath; The 8-anode; 9-anode seat; 10-anodized insulation cover; 11-crucible body; The 12-heater; 13-crucible cover; The 14-heat shield; 15-attaching nut; The 16-heater strip; The 17-air inlet pipe; The 18-bobbin.
Embodiment
Below in conjunction with accompanying drawing the hollow cathode ion source that the utility model provides is described in further details.
As shown in fig. 1, at least comprise electron gun, evaporator crucible, attaching nut 15 and air inlet pipe 17, electron gun comprises filament 1, goes up negative electrode 2, down negative electrode 3, cathode insulation cover 4, go up cathode connection ring 5, cathode cap 6, cathode sheath 7, anode 8, anode seat 9 and anodized insulation cover 10, evaporator crucible comprises crucible body 11, heater 12, crucible cover 13 and heat shield 14.
In electron gun, the following negative electrode 3 that outer cover is equipped with cathode insulation cover 4 is located at the center of cathode cap 6, last negative electrode 2 is positioned at the top of negative electrode 3 down, and be provided with cathode insulation cover 4 between last negative electrode 2 and the following negative electrode 3, last negative electrode 2, following negative electrode 3 and cathode insulation cover 4 constitute hollow cathode, filament 1 is positioned at hollow cathode, and hollow cathode is installed in the cathode sheath 7 that is connected threadably with cathode cap 6, the top of last negative electrode 2 is equipped with anodized insulation cover 10 successively, anode 8 and anode seat 9, the bottom of anodized insulation cover 10 is connected with the top of last negative electrode 2, anode 8 between anodized insulation cover 10 and anode seat 9 and and last negative electrode 2 between be provided with the gap, last cathode connection ring 5 is set in negative electrode 2 and cathode insulation overlaps 4 outside.
In evaporator crucible, the heater 12 that is wound with heater strip 16 is set in the crucible cover 13 and the bottom is connected with crucible cover 13, and crucible body 11 is positioned at heater 12, and heat shield 14 is set in crucible in the draw-in groove mode and overlaps 13 outside.
The bottom of crucible body 11 is embedded in anode 8 and the anode seat 9, the bottom of crucible cover 13 and the top of cathode sheath 7 are equipped with external screw thread, the bottom of crucible cover 13 is connected by the attaching nut with the top of cathode sheath 7, the bottom of heater 12 places the top of anode seat 9 and cathode sheath 7, cathode cap 6 is connected threadably with heat shield 14, and the top of crucible body 11 and heater 12 is connected with air inlet pipe 17.
The periphery of hollow cathode is provided with the field coil that is wound on the bobbin 18, and bobbin 18 is positioned at the bottom of heat shield 14 and is connected threadably with heat shield 14.
The winding direction of field coil is opposite with the winding direction of filament.
The hollow cathode ion source that the utility model provides in use, last negative electrode connects the direct current positive pole of 6V, 30A, following negative electrode is by the public ground of the outer shell joint of ion source, energising makes the filament emitting electrons.The direct current positive pole that crucible body and air inlet pipe meet 30V, 5A in order to and filament between play arc discharge, last negative electrode is as negative pole.The direct current of logical 15V, 20A on the heater strip of crucible, and by the public ground of crucible socket.Send into region of discharge through the current-carrying gas (Ar) that the solid matter of crucible heating sublimation is entered from air inlet pipe, form plasma through playing arc discharge and electron collision in the arc chamber that forms between anode and last negative electrode, ion beam current is drawn by extraction electrode.The magnetic field that the coiling direction field coil opposite with the coiling direction of filament produces with the counteracting filament can be set in the hollow cathode periphery, thereby help drawing of ion beam current.The educt beaming flow in this modified model hollow cathode source tens to the hundreds of microampere.
In ion source, the heater strip of evaporator crucible and the filament of electron gun are easily worn part, need often to change; Raw metal in the evaporator crucible also needs to change as the case may be; Operation material in the ion source also usually can pollute the cavity of electron gun or cause short circuit, needs often electron gun to be cleaned.The bottom of this ionogenic crucible cover and the top of cathode sheath are equipped with external screw thread, and the bottom of crucible cover is connected by the attaching nut with the top of cathode sheath; When needs are changed the heater strip of evaporator crucible or are changed raw material in the evaporator crucible, evaporator crucible can be screwed down from the attaching nut, change heater strip or change raw material in the evaporator crucible; When cleaning, electron gun can be screwed down from the attaching nut, change filament or electron gun and clean at the filament of needs replacing electron gun or to electron gun.
Claims (3)
1. hollow cathode ion source, it is characterized in that: comprise electron gun, evaporator crucible, attaching nut and air inlet pipe at least, electron gun comprises filament, last negative electrode, following negative electrode, cathode insulation cover, goes up cathode connection ring, cathode cap, cathode sheath, anode, anode seat and anodized insulation cover, and evaporator crucible comprises crucible body, heater, crucible cover and heat shield;
In electron gun, the following negative electrode that outer cover is equipped with cathode insulation cover is located at the center of cathode cap, last negative electrode is positioned at the top of negative electrode down, and be provided with the cathode insulation cover between last negative electrode and the following negative electrode, last negative electrode, following negative electrode and cathode insulation cover constitute hollow cathode, filament is positioned at hollow cathode, and in the cathode sheath that hollow cathode is installed on cathode cap is connected threadably, the top of last negative electrode is equipped with the anodized insulation cover successively, anode and anode seat, the bottom of anodized insulation cover is connected with the top of last negative electrode, anode between anodized insulation cover and anode seat and and last negative electrode between be provided with the gap, last cathode connection ring set is loaded on the outside that negative electrode and cathode insulation overlap;
In evaporator crucible, the heaters set that is wound with heater strip is loaded in the crucible cover and the bottom is connected with the crucible cover, and the crucible body is positioned at heater, and heat shield is set in the outside that crucible overlaps in the draw-in groove mode;
The bottom of crucible body is embedded in anode and the anode seat, the bottom of crucible cover and the top of cathode sheath are equipped with external screw thread, the bottom of crucible cover is connected by the attaching nut with the top of cathode sheath, the bottom of heater places the top of anode seat and cathode sheath, cathode cap is connected threadably with heat shield, and the top of crucible body and heater is connected with air inlet pipe.
2. hollow cathode ion source according to claim 1 is characterized in that: the periphery of hollow cathode is provided with the field coil that is wound on the bobbin, and bobbin is positioned at the bottom of heat shield and is connected threadably with heat shield.
3. hollow cathode ion source according to claim 2 is characterized in that: the winding direction of field coil is opposite with the winding direction of filament.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011201432964U CN202042452U (en) | 2011-05-09 | 2011-05-09 | Hollow cathode ion source |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011201432964U CN202042452U (en) | 2011-05-09 | 2011-05-09 | Hollow cathode ion source |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202042452U true CN202042452U (en) | 2011-11-16 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011201432964U Expired - Fee Related CN202042452U (en) | 2011-05-09 | 2011-05-09 | Hollow cathode ion source |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202042452U (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104078297A (en) * | 2014-07-05 | 2014-10-01 | 宁波大学 | Atmospheric pressure on-site ion source device and working method thereof |
| CN105318717A (en) * | 2015-11-05 | 2016-02-10 | 嘉兴皓特特种陶瓷有限公司 | Integrated graphite crucible |
| CN105762053A (en) * | 2016-04-20 | 2016-07-13 | 沈阳伊贝姆科技有限公司 | Plasma source of electrons and ions |
| CN110137056A (en) * | 2019-03-25 | 2019-08-16 | 南华大学 | Suspension heating electronic source component |
| CN113793791A (en) * | 2021-09-15 | 2021-12-14 | 中山市博顿光电科技有限公司 | Ion beam shape modification ion source, starting method thereof and vacuum chamber |
-
2011
- 2011-05-09 CN CN2011201432964U patent/CN202042452U/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104078297A (en) * | 2014-07-05 | 2014-10-01 | 宁波大学 | Atmospheric pressure on-site ion source device and working method thereof |
| CN105318717A (en) * | 2015-11-05 | 2016-02-10 | 嘉兴皓特特种陶瓷有限公司 | Integrated graphite crucible |
| CN105762053A (en) * | 2016-04-20 | 2016-07-13 | 沈阳伊贝姆科技有限公司 | Plasma source of electrons and ions |
| CN105762053B (en) * | 2016-04-20 | 2018-08-14 | 沈阳伊贝姆科技有限公司 | Plasma source of electrons and ions |
| CN110137056A (en) * | 2019-03-25 | 2019-08-16 | 南华大学 | Suspension heating electronic source component |
| CN110137056B (en) * | 2019-03-25 | 2023-12-19 | 南华大学 | Suspension heating type electron source assembly |
| CN113793791A (en) * | 2021-09-15 | 2021-12-14 | 中山市博顿光电科技有限公司 | Ion beam shape modification ion source, starting method thereof and vacuum chamber |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20111116 Termination date: 20160509 |