CN205839120U - A kind of vacuum furnace body and the impressed current anode of use thereof - Google Patents
A kind of vacuum furnace body and the impressed current anode of use thereof Download PDFInfo
- Publication number
- CN205839120U CN205839120U CN201620758776.4U CN201620758776U CN205839120U CN 205839120 U CN205839120 U CN 205839120U CN 201620758776 U CN201620758776 U CN 201620758776U CN 205839120 U CN205839120 U CN 205839120U
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- China
- Prior art keywords
- heater
- vacuum furnace
- tubular construction
- furnace body
- anode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Abstract
This utility model provides the impressed current anode of a kind of vacuum furnace body and use thereof, and vacuum furnace body includes that body of heater, impressed current anode and negative electrode, described negative electrode are arranged on described furnace interior；Described impressed current anode is a tubular construction, tubular construction includes ring support and lower ring support, multiple strip structure or multiple arc plate structure it is fixedly installed between described upper ring support and lower ring support, multiple structure is staggered in grille-like, and the whole surface of at least one in multiple arc plate structures is uniformly distributed multiple hole；The difference in height of effective sputter area of described tubular construction and described negative electrode is within 10cm, and described tubular construction is arranged on the inside of described body of heater, relative with described negative electrode；The bottom of described body of heater is provided with multiple felt pad；It is additionally provided with anode terminal in described body of heater.Vacuum furnace body of the present utility model and the impressed current anode of use thereof, ionization during sputtering is effective, and even film layer is fine and close, and cathodic discharge work is more stable.
Description
[technical field]
This utility model relates to the impressed current anode of a kind of vacuum furnace body and use thereof.
[background technology]
During carrying out plated film magnetron sputtering in vacuum furnace body, if being not added with impressed current anode, the electricity in plasma
Son arrives the coating chamber inner surface of ground connection nearby under the common effect of electromagnetic field, encounters neutral particle and can enter in motor process
One step ionization, but generally operating path is short, and ionization effect is the most notable.After setting up auxiliary sun, the current potential of impressed current anode is positive electricity
Position, higher than coating chamber electromotive force, the part electronics in plasma will be assembled to the higher anode of electromotive force.Path in assembling process
It is extended, and obtains more energy.At electronics during anode movement, electrons touches with the neutral particle in way
Hitting, cause coating process ionization level to raise, impressed current anode current potential is higher than coating chamber inner surface and workpiece rotating frame, so formed
Electric field intensity is bigger, and the projectile energy of cation is bigger, and bombardment target surface ion kinetic energy increases the most accordingly.Sputter with conventional cathode
Comparing, sedimentation rate can get a promotion, and the film layer that plated film is formed also can be improved with the adhesive force of substrate.Anti-at compound
Answering sputter procedure, after deposition certain time, workpiece and sputtering target surface have certain thickness dielectric film, at the vacuum-chamber wall of ground connection
On also can deposit, cause electronics to cannot be introduced into anode, i.e. " anode disappearance " cause cathodic discharge unstable.By setting up auxiliary sun
Pole also can effectively solve the problem that the problem in terms of this.
As shown in Fig. 1 a～1b, the impressed current anode 200 arranged in vacuum furnace body at present is typically patty, passes through anode
Gripper shoe is arranged in the internal side wall of body of heater.Electrical connection aspect, anode 200 exposes the direct electric connection of power supply in one end of outside
Positive pole, thus outside power supply is guided on anode 200.The furnace wall of body of heater 100 is directly connected to the negative pole of power supply.Anode 200 with
Between body of heater 100, insulation is arranged.For guaranteeing the insulation between anode 200 and body of heater 100, it is usually and props up with anode at anode 200
Insulation board is set between fagging (not illustrating in figure), and it is exhausted to arrange one outside the screw cap connected between gripper shoe and anode 200
Edge cap.At present, the anode of this structure is relatively simple owing to installing, working, and this kind knot is widely used in the most existing vacuum furnace body
The impressed current anode of structure, but existing vacuum furnace body generally to there is ionization effect the highest, negative electrode works and aura occurs after a period of time
Degradation problem under electric discharge working effect.
[utility model content]
Technical problem to be solved in the utility model is: make up above-mentioned the deficiencies in the prior art, proposes a kind of vacuum drying oven
Body and the impressed current anode of use thereof, ionization during sputtering is effective, and even film layer is fine and close, and cathodic discharge work is more stable.
Technical problem of the present utility model is solved by following technical scheme:
A kind of vacuum furnace body, including body of heater, impressed current anode and negative electrode, described negative electrode is arranged on described furnace interior；Described
Impressed current anode is a tubular construction, and tubular construction includes ring support and lower ring support, described upper ring support and lower ring
Being fixedly installed multiple strip structure or multiple arc plate structure between shape support, multiple structures are staggered in grille-like, many
It is uniformly distributed multiple hole on the whole surface of at least one in individual arc plate structure；Described tubular construction has with described negative electrode
The difference in height of effect sputter area is within 10cm, and described tubular construction is arranged on the inside of described body of heater, relative with described negative electrode；
The bottom of described body of heater is provided with multiple felt pad, and described tubular construction is supported on the plurality of felt pad；In described body of heater
Being additionally provided with anode terminal, described tubular construction connects the positive pole of external power source by described anode terminal
A kind of impressed current anode for vacuum furnace body, described impressed current anode is a tubular construction, and tubular construction includes ring
Shape support and lower ring support, be fixedly installed multiple strip structure or multiple between described upper ring support and lower ring support
Arc plate structure, multiple structures are staggered in grille-like, on the whole surface of at least one in multiple arc plate structures all
The multiple hole of even distribution；Described tubular construction exists with the difference in height of effective sputter area of the negative electrode in vacuum furnace body to be applied
Within 10cm.
This utility model is compared with the prior art and provides the benefit that:
Vacuum furnace body of the present utility model, impressed current anode is tubular construction, and main body is grille-like or surface distributed
Porose arc plate structure, is arranged in body of heater.Tubular construction external surface area is big, can effectively absorb the electronics in each orientation.Peace
When being contained in furnace interior, tubular anode is in the opposite of sputter cathode, and in sputter procedure, the absorbable negative electrode magnetic control that departs from fetters
Electronics in major part.Quantity or the ability of this utility model absorption electronics are higher, higher owing to absorbing electronic capability, then electricity
Son is more with the probability of neutral atom in vacuum drying oven or molecular collision, thus uses the gas ionization rate height of the body of heater of this anode,
Ionization is effective.Additionally, grille-like or the design of loose structure on impressed current anode, CHARGE DISTRIBUTION on anode can be allowed more equal
Even, the height of tubular anode is close with sputter cathode effective coverage, it is ensured that workpiece entirety is in sputter cathode and tubular anode
Between plasma area, thus ensure the uniformity of workpiece upper, middle and lower film quality.Vacuum furnace body of the present utility model, magnet
During sputtering, ionization level is high；Plasma distribution is evenly up and down, thus the film layer of workpiece upper, middle and lower is evenly, and film layer is finer and close.
Additionally, the difference in height of the effective coverage of the height of impressed current anode of the present utility model and cathodic sputtering is within 10cm, at both
In same level height, then the skew of aura will not be caused because of the position of anode and length in cathodic discharge aura region, from
And make cathodic discharge work more stable.
[accompanying drawing explanation]
Fig. 1 a is the impressed current anode of prior art structural representation inside vacuum furnace body；
Fig. 1 b is the impressed current anode of prior art structural representation outside vacuum furnace body；
Fig. 2 is the perspective view of the vacuum furnace body of this utility model detailed description of the invention；
Fig. 3 is that the master of the vacuum furnace body of this utility model detailed description of the invention regards generalized section；
Fig. 4 is the top cross-sectional view of the vacuum furnace body of this utility model detailed description of the invention；
Fig. 5 a is the structural representation of the upper cover plate of the felt pad of this utility model detailed description of the invention；
Fig. 5 b is the structural representation of the protective cover of the felt pad of this utility model detailed description of the invention；
Fig. 5 c is the structural representation of the insulating base of the felt pad of this utility model detailed description of the invention；
Fig. 6 is the assembling schematic diagram of the felt pad of this utility model detailed description of the invention；
Fig. 7 is the structural representation of the anode terminal of this utility model detailed description of the invention；
Fig. 8 is the second structural representation of the tubular construction of the vacuum furnace body of this utility model detailed description of the invention；
Fig. 9 is the third structural representation of the tubular construction of the vacuum furnace body of this utility model detailed description of the invention.
[detailed description of the invention]
Below in conjunction with detailed description of the invention and compare accompanying drawing this utility model is described in further details.
Design of the present utility model is: in view of the problem that existing vacuum furnace body ionization effect is the highest, it may be possible to due to
The surface area of the impressed current anode of patty structure is less, be difficult to have with cathodic sputtering target as height or with cathodic sputtering target at
In same level position, cause absorption electron amount limited, or have influence on the skew in cathode glow discharging direction, and then cause true
The ionization effect played in empty stove is the highest or has influence on negative electrode normal glow discharge work.Round pie anode is mounted directly at present
On the furnace wall of vacuum furnace body, causing surface area less, absorbability is limited；Additionally the height of cake impressed current anode is much smaller than work
The height that part loads, the upper and lower uniformity of film layer can be affected.Therefore, this utility model redesigns the structure of impressed current anode,
For tubular construction, and the main body of tubular construction is grille-like or for being distributed the arc plate structure in multiple holes, and is coordinated
Felt pad is arranged on furnace interior, relative with negative electrode, is introduced the positive pole of external power source by anode terminal, it is achieved work.This
Sample, is improved by the structure of above-mentioned impressed current anode and matable assembly adjusts installation site, thus improves ionization effect, and negative electrode
Electric discharge work is more stable.
As shown in figs. 2 to 4, the vacuum furnace body of this detailed description of the invention includes body of heater 1, impressed current anode 2 and negative electrode 3.Auxiliary
Anode 2 is a tubular construction, the most columnar structured, and tubular construction includes ring support and lower ring support, upper and lower ring
Columnar structured main body between shape support is a coherent arc, and arc surface is uniformly distributed multiple hole, cylindrical shape
The difference in height of effective sputter area of the height of structure and negative electrode 3, within 10cm, columnar structured is arranged on the interior of body of heater 1
Portion, specifically may be provided at the middle within body of heater 1, relative with the negative electrode 3 within body of heater 1.The bottom of body of heater 1 is provided with multiple
Felt pad 4 (for being provided with four felt pads shown in Fig. 4), columnar structured is supported on multiple felt pad 4.Also set in body of heater
Being equipped with anode terminal 5, cylindrical shape network structure connects the positive pole of external power source by anode terminal.During work, workpiece 6 sets
Put between negative electrode 3 and impressed current anode 2.Height phase due to height and the effective coverage of sputter cathode 3 of tubular impressed current anode 2
Closely, both are in sustained height level, and the length loaded more than workpiece 6, it is thus possible to ensure workpiece 6 all in sputter cathode with
Plasma area between tubular anode.
The effect of felt pad 4 is to realize the insulation between the impressed current anode 2 of tubular construction and body of heater 1.Therefore, sustainable auxiliary
Supporing yang pole, and the structure of insulation all can be applicable in the vacuum furnace body of this detailed description of the invention.This detailed description of the invention is at this only
Enumerate the felt pad structure that a kind of simple in construction is easily achieved.As shown in Fig. 5 a, 5b, 5c and Fig. 6, felt pad includes upper cover plate
401, protective cover 402 and insulating base 403.Protective cover 402 is set on insulating base 403, and upper cover plate 401 is set in insulation base
On seat 403, it is positioned at the top of protective cover 402.The card embedded for columnar structured impressed current anode 2 it is provided with on upper cover plate 401
Groove structure.After three part combinations of the felt pad of this detailed description of the invention, insulating base mainly plays insulation and the work supported
With.Insulating properties aspect, it is preferable that the class of insulation is more than 20 megohms.Additionally, due to insulating base is arranged on furnace body inside, because of
This insulating base should also have the characteristic of high temperature resistant (more than 200 DEG C).The material selection insulation of insulating base and resistant to elevated temperatures material
Material, such as, may select the material that pottery or Muscovitum etc. are high temperature resistant and insulate.The effect of middle protective cover 402 is to prevent from sputtering
In journey, the main body of insulating base 403 is the most exposed and be coated with metallic diaphragm and become conductive material.
Anode terminal 5 is for guiding to columnar structured impressed current anode 2 by outside power supply.Tubular impressed current anode 2
The one end being exposed body of heater with anode terminal 5 by wire is connected, and anode terminal 5 one end outside body of heater connects external power source
Positive pole.
As it is shown in fig. 7, in this detailed description of the invention, anode connects post 5 and includes conductive lever 501, wire binding post 502 and absolutely
Edge structural member.One end of wire binding post 502 is used for connecting external power source.For to connect wire by screw 10 shown in figure, enter
And connected external power source by wire.The other end of wire binding post 502 links together with the first end of conductive lever 501, leads
Electricity screw rod 501 passes the through hole offered on body of heater 1, and it is cancellated that the second end of conductive lever 501 is used for electrically connecting cylindrical shape
Impressed current anode.For being set on conductive lever 501 clamping wire 7, and then wire 7 connecting cylinder by two nuts 8 shown in figure
Shape impressed current anode 2.Insulation fabric part is arranged between conductive lever 501 and body of heater 1, and conductive connector 502 and body of heater 1 it
Between, it is ensured that between wire binding post and body of heater, and it is insulation between conductive lever and body of heater.
Specifically, insulation fabric part includes insulating spacer 503.Anode terminal also includes standing screw 507.Insulating spacer
503 pass the through hole offered on body of heater 1, and conductive lever 501 passes the inside of insulating spacer 503, wire binding post 502 and insulation
Spacer 503 is fixed on body of heater 1 by standing screw 507.
Preferably, all seal between insulating spacer 503 and body of heater 1 and between insulating spacer 503 and wire binding post 502
Arrange.Being arranged by sealing, so that it is guaranteed that vacuum seals, thus anode terminal realizes with outside while introducing in vacuum drying oven
Seal isolation.Seal setting to be realized by two sealing rings.Specifically, between insulating spacer 503 and body of heater 1, first is arranged
Sealing ring 504, second sealing ring 505 between insulating spacer 503 and wire binding post 502.
It is further preferred that anode terminal also includes sheath 506.Sheath 506 is arranged on insulating spacer 503 and is positioned at body of heater
On one end in 1.Sheath 506 shown in figure is set in the periphery of one end of insulating spacer 503, thus can prevent insulating spacer
503 one end being positioned at stove plate conducting objects, and insulating spacer 503 plays the effect covered.
By anode terminal connect outside positive source power supply introduced the tubular impressed current anode 2 in body of heater.Outside
Power cathode connect body of heater 1.During sputtering vacuum deposition, turn on the power, set anode voltage, tubular auxiliary sun according to technological requirement
Pole 2 is connected to positive source, tubular impressed current anode 2 positively charged by conductive lever 501, wire binding post 502.Because auxiliary sun
The current potential of pole 2 is higher than coating chamber inner surface current potential, and under anode electric field effect, the electrons that vacuum sputtering process produces is at anode
The impressed current anode 2 of tubular construction is flown in the lower acceleration that attracts of voltage.During accelerating flight, electrons and the gas in body of heater
Body realizes a series of magnetic and hits, it is achieved the ionization of gas.
The impressed current anode of this detailed description of the invention is columnar structured, and is distributed multiple hole, is arranged in body of heater.Tubular is tied
Structure external surface area is big, can be in the electronics of all directions diverse location in stove with 360 ° of Omnibearing absorbings, substantially increase absorption
Ability.When tubular anode is arranged on furnace interior, tubular anode is in the opposite of sputter cathode, in sputter procedure, can depart from
Major part in the electronics of negative electrode magnetic control constraint is all concentrated and is in this region, and therefore major part can be absorbed by impressed current anode.This
Sample, is greatly increased the collision probability of electronics and neutral atom, improves gas ionization rate.Perforate on anode tubular structure sets
Meter, can make the CHARGE DISTRIBUTION on anode canister evenly, it is achieved plasma is the most uniform.And the height of tubular anode and sputtering the moon
Very effective region is close, and the length loaded more than workpiece, can guarantee that workpiece is all between sputter cathode and tubular anode
Plasma area, thus ensure the uniformity of the film quality of workpiece upper, middle and lower.Additionally, the vacuum furnace body of this detailed description of the invention
Cathodic discharge work can also be maintained more stable.
Shown in Fig. 8, for the schematic diagram of the optional tubular construction of the second.Upper ring support and the lower annular of tubular construction are propped up
Being fixedly installed multiple strip structure between frame, multiple strip structures are staggered in grille-like.This main body is the tubular of grille-like
Structure, is that external surface area is big equally, can be in the electronics of all directions diverse location in stove with 360 ° of Omnibearing absorbings, significantly carry
High absorbability, and the absorbable electronics being mostly disengaged from the constraint of negative electrode magnetic control, improve gas ionization rate, ionization effect
Good.The design of grille-like, it is possible to make the CHARGE DISTRIBUTION on anode canister evenly, it is achieved plasma is the most uniform.And tubular
The height of anode is close with sputter cathode effective coverage, and the length loaded more than workpiece, can guarantee that workpiece is all in sputtering the moon
Plasma area between pole and tubular anode, thus ensure uniformity and the compactness of the film quality of workpiece upper, middle and lower.This
Outward, cathodic discharge work also can be maintained more stable.
Shown in Fig. 9, for the schematic diagram of the third optional tubular construction.Upper ring support and the lower annular of tubular construction are propped up
Multiple arc plate structure it is fixedly installed, on the whole surface of at least one arc plate structure in multiple arc plate structures between frame
It is uniformly distributed multiple hole.The tubular construction of this structure is with the difference of the tubular construction shown in Fig. 3: the main body of this tubular construction
For multiple arcs spaced apart, and the main body in Fig. 3 is multiple arc plate structure links up into an entirety.This is spaced apart
Multiple arcs as main body time, when being arranged in body of heater so that it is be above distributed the arc plate structure in multiple hole just in body of heater
Negative electrode, thus play a role by pore structure is relative with negative electrode.Multiple arcs are as the tubular construction of main body, outside being equally
Surface area is big, can be in the electronics of all directions diverse location in stove with 360 ° of Omnibearing absorbings, substantially increase absorbability,
And it can absorb the electronics being mostly disengaged from the constraint of negative electrode magnetic control, improve gas ionization rate.Perforate design on arc, it is possible to
Make the CHARGE DISTRIBUTION on anode canister evenly, it is achieved plasma is the most uniform.And the height of tubular anode has with sputter cathode
Effect region close, and more than workpiece load length, can guarantee that workpiece all between sputter cathode and tubular anode etc. from
Subregion, thus ensure the uniformity of the film quality of workpiece upper, middle and lower.Additionally, cathodic discharge work also can be maintained more stable.
It addition, multiple arcs are spaced apart, spaced apart gap is easy to the dust etc. stretching into cleaning device absorption within arc
Material, it is simple to follow-up cleaning uses.
Above content is to combine concrete preferred implementation further detailed description of the utility model, it is impossible to
Assert that of the present utility model being embodied as is confined to these explanations.Ordinary skill for this utility model art
For personnel, make some replacements or obvious modification without departing from the concept of the premise utility, and performance or purposes
Identical, all should be considered as belonging to protection domain of the present utility model.
Claims (10)
1. a vacuum furnace body, including body of heater, impressed current anode and negative electrode, described negative electrode is arranged on described furnace interior；Its feature
Being: described impressed current anode is a tubular construction, tubular construction includes ring support and lower ring support, and described upper annular is propped up
Being fixedly installed multiple strip structure or multiple arc plate structure between frame and lower ring support, multiple structures are staggered in grid
Shape, the whole surface of at least one in multiple arc plate structures is uniformly distributed multiple hole；Described tubular construction is with described
The difference in height of effective sputter area of negative electrode is within 10cm, and described tubular construction is arranged on the inside of described body of heater, with described
Negative electrode is relative；The bottom of described body of heater is provided with multiple felt pad, and described tubular construction is supported on the plurality of felt pad；Institute
Being additionally provided with anode terminal in stating body of heater, described tubular construction connects the positive pole of external power source by described anode terminal.
Vacuum furnace body the most according to claim 1, it is characterised in that: described tubular construction is columnar structured.
Vacuum furnace body the most according to claim 1, it is characterised in that: the coherent formation of the plurality of arc plate structure one is whole
Body.
Vacuum furnace body the most according to claim 1, it is characterised in that: described felt pad includes upper cover plate, and protective cover is with exhausted
Edge pedestal；Described shielding cover is located on described insulating base, and described upper cover plate is set on described insulating base, is positioned at described
The top of protective cover；The notch embedded for described tubular construction it is provided with on described upper cover plate.
Vacuum furnace body the most according to claim 1, it is characterised in that: described anode terminal includes conductive lever, wire
Binding post and insulation fabric part；One end of described wire binding post is used for connecting described external power source, described wire binding post
The other end links together with the first end of described conductive lever, and described conductive lever passes the through hole offered on described body of heater,
Second end of described conductive lever is used for electrically connecting described tubular construction；Described insulation fabric part be arranged on described conductive lever with
Between described body of heater, and between described conductive connector and described body of heater.
Vacuum furnace body the most according to claim 5, it is characterised in that: described insulation fabric part includes insulating spacer；Described
Anode terminal also includes standing screw；Described insulating spacer pass described through hole, described conductive lever through described insulation every
The inside of set, described wire binding post and described insulating spacer are fixed on body of heater by described standing screw.
Vacuum furnace body the most according to claim 6, it is characterised in that: between described insulating spacer and described body of heater and institute
State and between insulating spacer and described wire binding post, all seal setting.
Vacuum furnace body the most according to claim 7, it is characterised in that: described anode terminal also include the first sealing ring and
Second sealing ring, described first sealing ring is arranged between described insulating spacer and described body of heater, and described second sealing ring is arranged
Between described insulating spacer and described wire binding post.
Vacuum furnace body the most according to claim 6, it is characterised in that: described anode terminal also includes sheath, described in protect
It is set on described insulating spacer to be positioned on one end of described body of heater.
10. the impressed current anode for vacuum furnace body, it is characterised in that: described impressed current anode is a tubular construction, and tubular is tied
Structure includes ring support and lower ring support, is fixedly installed multiple bar shaped knot between described upper ring support and lower ring support
Structure or multiple arc plate structure, multiple structures are staggered in grille-like, at least one in multiple arc plate structures whole
Multiple hole it is uniformly distributed on individual surface；Effective sputter area of the negative electrode in described tubular construction and vacuum furnace body to be applied
Difference in height is within 10cm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620758776.4U CN205839120U (en) | 2016-07-15 | 2016-07-15 | A kind of vacuum furnace body and the impressed current anode of use thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620758776.4U CN205839120U (en) | 2016-07-15 | 2016-07-15 | A kind of vacuum furnace body and the impressed current anode of use thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205839120U true CN205839120U (en) | 2016-12-28 |
Family
ID=57624259
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620758776.4U Withdrawn - After Issue CN205839120U (en) | 2016-07-15 | 2016-07-15 | A kind of vacuum furnace body and the impressed current anode of use thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205839120U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106011766A (en) * | 2016-07-15 | 2016-10-12 | 森科五金(深圳)有限公司 | Vacuum furnace body and adopted auxiliary anode |
-
2016
- 2016-07-15 CN CN201620758776.4U patent/CN205839120U/en not_active Withdrawn - After Issue
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106011766A (en) * | 2016-07-15 | 2016-10-12 | 森科五金(深圳)有限公司 | Vacuum furnace body and adopted auxiliary anode |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20161228 Effective date of abandoning: 20180904 |