CN203573941U - Electrode of electric insulation structure - Google Patents
Electrode of electric insulation structure Download PDFInfo
- Publication number
- CN203573941U CN203573941U CN201320750524.3U CN201320750524U CN203573941U CN 203573941 U CN203573941 U CN 203573941U CN 201320750524 U CN201320750524 U CN 201320750524U CN 203573941 U CN203573941 U CN 203573941U
- Authority
- CN
- China
- Prior art keywords
- electrode
- insulating ceramics
- electrode tip
- vacuum chamber
- ceramic component
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000009413 insulation Methods 0.000 title abstract description 10
- 239000000919 ceramic Substances 0.000 claims abstract description 37
- 238000000576 coating method Methods 0.000 claims description 9
- 239000011248 coating agent Substances 0.000 claims description 7
- 238000000151 deposition Methods 0.000 claims description 6
- 239000002245 particle Substances 0.000 abstract description 9
- 238000004140 cleaning Methods 0.000 abstract description 3
- 230000004927 fusion Effects 0.000 abstract description 3
- 239000012535 impurity Substances 0.000 abstract description 2
- 238000000429 assembly Methods 0.000 description 3
- 230000000712 assembly Effects 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 238000005086 pumping Methods 0.000 description 2
- KRQUFUKTQHISJB-YYADALCUSA-N 2-[(E)-N-[2-(4-chlorophenoxy)propoxy]-C-propylcarbonimidoyl]-3-hydroxy-5-(thian-3-yl)cyclohex-2-en-1-one Chemical compound CCC\C(=N/OCC(C)OC1=CC=C(Cl)C=C1)C1=C(O)CC(CC1=O)C1CCCSC1 KRQUFUKTQHISJB-YYADALCUSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000010849 ion bombardment Methods 0.000 description 1
- CSJDCSCTVDEHRN-UHFFFAOYSA-N methane;molecular oxygen Chemical compound C.O=O CSJDCSCTVDEHRN-UHFFFAOYSA-N 0.000 description 1
Images
Landscapes
- Drying Of Semiconductors (AREA)
Abstract
The utility model belongs to a glow discharge electrode and particularly relates to an electrode of an improved electric insulation structure. The electrode can be applied to glow discharge cleaning in large-size, middle-size and small-size fusion devices. The electrode comprises a re-deposition preventing support block and an electrode head. The re-deposition preventing support block, the electrode head, a first insulating ceramic component and a third insulating ceramic component are connected together by a bolt and a nut. Butterfly-shaped washers are placed on the first insulating ceramic component and the third insulating ceramic component. A second insulating ceramic component is installed on the first insulating ceramic component. An electrode head cover plate is spot-welded on a surface of the electrode head. Vacuum chamber fixing bolts support the electrode in a vacuum chamber. The electrode of the utility model has the following advantages: (1) the number of sputtered impurity particles deposited on the surfaces of the electrode is reduced; (2) the performance of insulation between the electrode and the vacuum chamber is improved; and (3) the electrode is simple in structure and convenient to install and dissemble.
Description
Technical field
The invention belongs to a kind of glow-discharge electrode, be specifically related to a kind of electrode of improved electric insulation, can be applicable to the Glow Discharge Cleaning in large, medium and small fusion facility.
Background technology
In fusion field, Glow Discharge Cleaning, because it is simple to operate, energy consumption is little, and can reduce hydrogen concentration and part carbon oxygen impurities effectively, and by each device extensive use.During glow discharge, electrode is as anode, and vacuum chamber is as negative electrode, utilize the positive ion bombardment vacuum chamber wall under the acceleration of cathode sheath layer, the foreign particle being adsorbed on wall is bombarded out, then by vacuum-pumping system withdrawing device, reach the object that wall cleans, takes exercise.But during aura, the foreign particle sputtering may be deposited on the each surface of electrode after out again, as accumulated, too much can affect the insulation property between electrode and vacuum chamber.The present invention is deposited on the each surface of electrode again for reducing foreign particle, proposes a kind of electrode of improved electric insulation.
Summary of the invention
The object of this invention is to provide a kind of electrode of electrically insulated structures, it can reduce foreign particle and be deposited on the each surface of electrode again, improves the insulation property between electrode and vacuum chamber.
The present invention realizes like this, a kind of electrode of electrically insulated structures, it comprises anti-deposit back-up block, electrode tip again, by bolts and nuts, will prevent depositing back-up block, electrode tip, the first insulating ceramics assembly and the 3rd insulating ceramics assembly links together again, butterfly gasket is placed on the first insulating ceramics assembly and the 3rd insulating ceramics assembly, the second insulating ceramics assembly is arranged on the first insulating ceramics assembly, electrode tip cover plate point is welded in electrode tip surface, vacuum chamber set bolt by electrode supporting in vacuum chamber.
Described deposit back-up block and electrode tip surrounding again and have the gap of 5mm, groove lower plane has certain inclined plane of radian continuously therein, forms greatest gradient 1.5mm gap with electrode tip bottom surface section contact-making surface.
The described whole anti-back-up block inner groovy surface that deposits again scribbles the second insulating ceramics coating and electrode tip surrounding and lower surface and is evenly sprayed with the first insulating ceramics coating.
Advantage of the present invention is, 1, reduce the foreign particle sputtering and be deposited on the each surface of electrode; 2, improve the insulation property between electrode and vacuum chamber; 3, simple, the installation of system configuration and convenient disassembly etc.
Accompanying drawing explanation
Fig. 1 is the electrode structure schematic diagram for a kind of electric insulation provided by the present invention.
Wherein: the 1 anti-back-up block that deposits again; 2 electrode tips, 3 first insulating ceramics assemblies, 4 second insulating ceramics assemblies, 5 bolts, 6 butterfly gaskets, 7 electrode tip cover plates, 8 first insulating ceramics coatings, 9 second insulating ceramics coatings, 10 the 3rd insulating ceramics assemblies, 11 nuts, 12 vacuum chamber set bolts.
Embodiment
Below in conjunction with drawings and Examples, the present invention is described in detail:
As shown in Figure 1, a kind of electrode of the electrically insulated structures for glow-discharge electrode comprises and anti-deposits back-up block 1, electrode tip 2, insulating ceramics assembly 3,4,10 again, butterfly gasket 6, bolt 5, electrode tip cover plate 7, insulating ceramics coating 8,9, nut 11, vacuum chamber set bolt 12.
By bolt 5 and nut 11, will prevent depositing back-up block 1, electrode tip 2, the first insulating ceramics assembly 3 and the 3rd insulating ceramics assembly 10 links together again, butterfly gasket 6 is placed on the first insulating ceramics assembly 3 and the 3rd insulating ceramics assembly 10, the second insulating ceramics assembly 4 is arranged on the first insulating ceramics assembly 3,7 of electrode tip cover plates are welded in electrode tip 2 surfaces, vacuum chamber set bolt 12 by electrode supporting in vacuum chamber.
Depositing back-up block 1 and electrode tip 2 surroundings has the gap of 5mm again, groove lower plane is made with certain inclined plane of radian continuously therein, form greatest gradient 1.5mm gap with electrode tip bottom surface section contact-making surface, the whole anti-back-up block 1 inner groovy surface that deposits again scribbles the second insulating ceramics coating 9 and electrode tip 2 surroundings and lower surface and is evenly sprayed with the first insulating ceramics coating 8.During glow discharge, bombardment a large amount of foreign particles out only have small part to enter anti-back-up block 1 and electrode tip 2 surroundings of depositing again by the gap of 5mm, and most of foreign particle is extracted vacuum chamber out by vacuum-pumping system.Due to anti-back-up block 1 groove upper surface and the electrode tip 2 lower surfaces formation greatest gradient 1.5mm gaps of depositing again, final major part can be deposited on the anti-plane on back-up block 1 groove that deposits again, can effectively reduce like this foreign particle sputtering and be deposited on the each surface of electrode tip 2, improve the insulation property between electrode and vacuum chamber.
Claims (3)
1. the electrode of an electrically insulated structures, it comprises the anti-back-up block (1) that deposits again, electrode tip (2), it is characterized in that: by bolt (5) and nut (11), will prevent depositing again back-up block (1), electrode tip (2), the first insulating ceramics assembly (3) and the 3rd insulating ceramics assembly (10) link together, butterfly gasket (6) is placed on the first insulating ceramics assembly (3) and the 3rd insulating ceramics assembly (10), the second insulating ceramics assembly (4) is arranged on the first insulating ceramics assembly (3), electrode tip cover plate (7) point is welded in electrode tip (2) surface, vacuum chamber set bolt (12) by electrode supporting in vacuum chamber.
2. the electrode of a kind of electrically insulated structures as claimed in claim 1, it is characterized in that: described deposit again back-up block (1) and electrode tip (2) surrounding and have the gap of 5mm, groove lower plane has certain inclined plane of radian continuously therein, forms greatest gradient 1.5mm gap with electrode tip (2) bottom surface section contact-making surface.
3. the electrode of a kind of electrically insulated structures as claimed in claim 1, is characterized in that: described whole anti-back-up block (1) the inner groovy surface that deposits again scribbles the second insulating ceramics coating (9) and electrode tip (2) surrounding and lower surface and is evenly sprayed with the first insulating ceramics coating (8).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320750524.3U CN203573941U (en) | 2013-11-22 | 2013-11-22 | Electrode of electric insulation structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320750524.3U CN203573941U (en) | 2013-11-22 | 2013-11-22 | Electrode of electric insulation structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203573941U true CN203573941U (en) | 2014-04-30 |
Family
ID=50541656
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320750524.3U Expired - Lifetime CN203573941U (en) | 2013-11-22 | 2013-11-22 | Electrode of electric insulation structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203573941U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104658836A (en) * | 2013-11-22 | 2015-05-27 | 核工业西南物理研究院 | Electrode of electric insulation structure |
| CN113236516A (en) * | 2021-06-30 | 2021-08-10 | 哈尔滨工业大学 | Structure for preventing deposition in discharge chamber of micro ion thruster |
-
2013
- 2013-11-22 CN CN201320750524.3U patent/CN203573941U/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104658836A (en) * | 2013-11-22 | 2015-05-27 | 核工业西南物理研究院 | Electrode of electric insulation structure |
| CN113236516A (en) * | 2021-06-30 | 2021-08-10 | 哈尔滨工业大学 | Structure for preventing deposition in discharge chamber of micro ion thruster |
| CN113236516B (en) * | 2021-06-30 | 2022-03-04 | 哈尔滨工业大学 | Structure for preventing deposition in discharge chamber of micro ion thruster |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP5824072B2 (en) | Sputtering equipment | |
| CN101402095A (en) | Plasma surface cleaning apparatus | |
| US20130092533A1 (en) | Sputter deposition apparatus | |
| CN203573941U (en) | Electrode of electric insulation structure | |
| CN103887133B (en) | A kind of magnetic-field-enhanced linear large-area ionic source | |
| CN202881369U (en) | Plasma cleaning electrode | |
| CN203411606U (en) | Mass diamond-like coating membrane plating device | |
| CN104658836B (en) | Electrode of electric insulation structure | |
| CN103820759A (en) | Method for improving utilization rate of rectangular planar magnetron sputtering cathode target material | |
| CN103695839B (en) | A kind of ion gun cleaning device being applied in filming equipment | |
| CN102828152A (en) | Preparation method of Mo film with low resistance rate | |
| CN204982040U (en) | Pure ion vacuum arc filming equipment | |
| KR20100129427A (en) | Ion pump with surface treated permanent magnet | |
| CN104213089B (en) | Magnetron sputtering apparatus and magnetically controlled sputter method | |
| CN203582958U (en) | Ion source cleaner used in coating equipment | |
| CN203700500U (en) | Cathode device | |
| CN209798088U (en) | electrostatic dust removal device and magnetron sputtering system | |
| CN205839120U (en) | A kind of vacuum furnace body and the impressed current anode of use thereof | |
| CN204170851U (en) | Electric cleaner | |
| CN219218135U (en) | Cathode device of magnetron sputtering coating equipment and magnetron sputtering coating equipment | |
| CN101694875B (en) | Power-type Ni/metal hydride battery plate surface modification method | |
| CN202347090U (en) | Vacuum magnetron sputtering film plating equipment with little dust fall | |
| CN107365968B (en) | A kind of sputtering unit and sputter system | |
| CN204898066U (en) | It prevents unusual device of shielded -plate tube coating film swiftly to change electrode stem electrode piece | |
| CN104599808A (en) | Rotary demagnetizer and lithium battery negative electrode material powder processing device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |