CN104658836B - Electrode of electric insulation structure - Google Patents
Electrode of electric insulation structure Download PDFInfo
- Publication number
- CN104658836B CN104658836B CN201310597646.8A CN201310597646A CN104658836B CN 104658836 B CN104658836 B CN 104658836B CN 201310597646 A CN201310597646 A CN 201310597646A CN 104658836 B CN104658836 B CN 104658836B
- Authority
- CN
- China
- Prior art keywords
- electrode
- support block
- insulating ceramics
- electrode tip
- ceramic component
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J17/00—Gas-filled discharge tubes with solid cathode
- H01J17/02—Details
- H01J17/04—Electrodes; Screens
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J17/00—Gas-filled discharge tubes with solid cathode
- H01J17/02—Details
- H01J17/04—Electrodes; Screens
- H01J17/10—Anodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2217/00—Gas-filled discharge tubes
- H01J2217/04—Electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2217/00—Gas-filled discharge tubes
- H01J2217/04—Electrodes
- H01J2217/10—Anodes
Landscapes
- Electron Sources, Ion Sources (AREA)
- Drying Of Semiconductors (AREA)
Abstract
The invention belongs to a glow discharge electrode and particularly relates to an electrode of an improved electric insulation structure. The electrode can be applied to glow discharge cleaning in large-size, middle-size and small-size fusion devices. The electrode comprises a re-deposition preventing support block and an electrode head. The re-deposition preventing support block, the electrode head, a first insulating ceramic component and a third insulating ceramic component are connected together by a bolt and a nut. Butterfly-shaped washers are placed on the first insulating ceramic component and the third insulating ceramic component. A second insulating ceramic component is mounted on the first insulating ceramic component. An electrode head cover plate is spot-welded on the surface of the electrode head. Vacuum chamber fixing bolts support the electrode in a vacuum chamber. The electrode has the advantages that 1, the number of sputtered impurity particles deposited on all surfaces of the electrode is decreased; 2, the performance of insulation between the electrode and the vacuum chamber is improved; 3, the electrode is simple in structure and convenient to mount and dissemble.
Description
Technical field
The invention belongs to a kind of glow-discharge electrode, and in particular to a kind of electrode of improved electric insulation, can be applicable to big
Glow Discharge Cleaning in middle-size and small-size fusion facility.
Background technology
In fusion field, Glow Discharge Cleaning, because it is simple to operate, energy consumption is little, and can be effectively reduced hydrogen concentration and
Part carbon oxygen impurities, and extensively applied by each device.During glow discharge, as anode, vacuum chamber is as negative electrode, profit for electrode
Positive ion bombardment vacuum chamber wall under being accelerated with cathode sheaths, foreign particle on wall for the absorption is bombarded out, then by
Vacuum-pumping system withdrawing device, the purpose reach wall cleaning, tempering.But during aura, the foreign particle sputtering goes out
After coming may redeposited on each surface of electrode, such as accumulation excessively can affect the insulating properties between electrode and vacuum chamber.This
Bright be aiming at reducing foreign particle redeposited on each surface of electrode, a kind of electrode of improved electric insulation is proposed.
Content of the invention
It is an object of the invention to provide a kind of electrode of electrically insulated structures, it can reduce foreign particle redeposition in electrode
Each surface, improves the insulating properties between electrode and vacuum chamber.
The present invention is achieved in that a kind of electrode of electrically insulated structures, and it includes anti-redeposition support block, electrode tip,
By bolts and nuts, anti-redeposition support block, electrode tip, the first insulating ceramics assembly and the 3rd insulating ceramics assembly are connected
Together, butterfly gasket is placed on the first insulating ceramics assembly and the 3rd insulating ceramics assembly, and the second insulating ceramics assembly is installed
On the first insulating ceramics assembly, in electrode head surface, vacuum chamber fixing bolt is by electrode supporting true for electrode epicranial plate spot welding
In empty room.
Described redeposited support block and electrode tip surrounding have the gap of 5mm, have necessarily continuous in its inner groovy lower plane
The inclined plane of radian, forms greatest gradient 1.5mm gap with electrode tip bottom surface section contact surface.
Described entirely anti-redeposition support block inner fluted surface scribble the second insulative ceramic coatings and electrode tip surrounding and
Lower surface is uniformly sprayed with the first insulative ceramic coatings.
It is an advantage of the invention that the foreign particle that 1, minimizing sputters is deposited on each surface of electrode；2nd, improve electrode with true
Insulating properties between empty room；3rd, system structure is simple, install and convenient disassembly etc..
Brief description
Fig. 1 is the electrode structure schematic diagram for a kind of electric insulation provided by the present invention.
Wherein：1 anti-redeposition support block；2 electrode tips, 3 first insulating ceramics assemblies, 4 second insulating ceramics assemblies, 5 spiral shells
Bolt, 6 butterfly gaskets, 7 electrode epicranial plates, 8 first insulative ceramic coatings, 9 second insulative ceramic coatings, 10 the 3rd insulating ceramics groups
Part, 11 nuts, 12 vacuum chamber fixing bolts.
Specific embodiment
With reference to the accompanying drawings and examples the present invention is described in detail：
As shown in figure 1, a kind of electrode of the electrically insulated structures for glow-discharge electrode includes anti-redeposition support block 1,
Electrode tip 2, insulating ceramics assembly 3,4,10, butterfly gasket 6, bolt 5, electrode epicranial plate 7, insulative ceramic coatings 8,9, nut
11, vacuum chamber fixing bolt 12.
Will be exhausted to anti-redeposition support block 1, electrode tip 2, the first insulating ceramics assembly 3 and the 3rd with nut 11 by bolt 5
Edge ceramic component 10 links together, and butterfly gasket 6 is placed on the first insulating ceramics assembly 3 and the 3rd insulating ceramics assembly 10,
Second insulating ceramics assembly 4 is arranged on the first insulating ceramics assembly 3, and 7 points of electrode epicranial plate is welded in electrode tip 2 surface, vacuum
Room fixing bolt 12 is indoor in vacuum by electrode supporting.
Redeposited support block 1 and electrode tip 2 surrounding have the gap of 5mm, have done certain continuous arc in its inner groovy lower plane
The inclined plane of degree, forms, with electrode tip bottom surface section contact surface, the gap that greatest gradient is 1.5mm, entirely anti-redeposited support
Block 1 inner fluted surface scribbles the second insulative ceramic coatings 9 and electrode tip 2 surrounding and lower surface is uniformly sprayed with the first insulating ceramics and applies
Layer 8.During glow discharge, bombardment a large amount of foreign particles out only have small part can sink by the gap entrance of 5mm is anti-again
Long-pending support block 1 and electrode tip 2 surrounding, most of foreign particle extracts vacuum chamber out by vacuum-pumping system.Due to anti-redeposition
Support block 1 groove lower surface forms greatest gradient 1.5mm gap with electrode tip 2 lower surface, and finally major part can be deposited on and prevent
Depositing support block 1 groove lower plane, so can effectively reduce the foreign particle sputtering and be deposited on each surface of electrode tip 2, improve
Insulating properties between electrode and vacuum chamber.
Claims (2)
1. a kind of electrode of electrically insulated structures, it include anti-redeposition support block (1), electrode tip (2) it is characterised in that：Pass through
Anti- redeposition support block (1), electrode tip (2), the first insulating ceramics assembly (3) and the 3rd are insulated by bolt (5) with nut (11)
Ceramic component (10) links together, and butterfly gasket (6) is individually positioned in the first insulating ceramics assembly (3) and the 3rd insulating ceramics
Inside assembly (10), the second insulating ceramics assembly (4) is arranged on the first insulating ceramics assembly (3), electrode epicranial plate (7) spot welding
In electrode tip (2) surface, electrode supporting is indoor in vacuum, the described redeposited support block (1) of vacuum chamber fixing bolt (12)
There is the gap of 5mm with electrode tip (2) surrounding, have the inclination of necessarily continuous radian in redeposited support block (1) inner groovy lower plane
Face, forms, with electrode tip (2) bottom surface section contact surface, the gap that greatest gradient is 1.5mm.
2. as claimed in claim 1 a kind of electrode of electrically insulated structures it is characterised in that：Entirely described anti-redeposited support
Block (1) inner fluted surface scribbles the second insulative ceramic coatings (9) and electrode tip (2) surrounding and lower surface is uniformly sprayed with the first insulation
Ceramic coating (8).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310597646.8A CN104658836B (en) | 2013-11-22 | 2013-11-22 | Electrode of electric insulation structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310597646.8A CN104658836B (en) | 2013-11-22 | 2013-11-22 | Electrode of electric insulation structure |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104658836A CN104658836A (en) | 2015-05-27 |
| CN104658836B true CN104658836B (en) | 2017-02-22 |
Family
ID=53249830
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310597646.8A Active CN104658836B (en) | 2013-11-22 | 2013-11-22 | Electrode of electric insulation structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104658836B (en) |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008202942A (en) * | 2007-02-16 | 2008-09-04 | Kyoto Univ | Fusion neutron generator |
| US7639770B2 (en) * | 2008-04-22 | 2009-12-29 | The Regents Of The University Of California | Cylindrical neutron generator |
| CN202034343U (en) * | 2010-12-29 | 2011-11-09 | 中核(北京)核仪器厂 | Boron proportional counter tube for out pile nuclear measuring detector |
| CN203026477U (en) * | 2012-12-26 | 2013-06-26 | 核工业西南物理研究院 | Glow discharge electrode with slot electrical insulation structure |
| CN203573941U (en) * | 2013-11-22 | 2014-04-30 | 核工业西南物理研究院 | Electrode of electric insulation structure |
-
2013
- 2013-11-22 CN CN201310597646.8A patent/CN104658836B/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN104658836A (en) | 2015-05-27 |
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| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |