CN204898066U - It prevents unusual device of shielded -plate tube coating film swiftly to change electrode stem electrode piece - Google Patents
It prevents unusual device of shielded -plate tube coating film swiftly to change electrode stem electrode piece Download PDFInfo
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- CN204898066U CN204898066U CN201520658171.3U CN201520658171U CN204898066U CN 204898066 U CN204898066 U CN 204898066U CN 201520658171 U CN201520658171 U CN 201520658171U CN 204898066 U CN204898066 U CN 204898066U
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Abstract
The utility model provides an it prevents unusual device of shielded -plate tube coating film swiftly to change electrode stem electrode piece, includes electrode stem, shielded -plate tube, passes through I support aluminium pig, positive plate and the electrode piece of connecting fixed shielded -plate tube of hexagon socket head cap screw, still includes: on the work rest shielded -plate tube is located to the insulating cover of shielded -plate tube, its cover, and hug closely the rear end and support the aluminium pig, the tetrafluoro piece, it is installed in shielded -plate tube and the insulating cover tail end of shielded -plate tube, sealed socket formula electrode piece insulated box body, its upper shed passes through interference fit to be installed on the positive plate, and the one of which sideband has the tetrafluoro piece to seal the slot, installs on the tetrafluoro piece, and, the insulating lid of sealed socket formula electrode piece, it is installed on sealed socket formula electrode piece insulated box body through socket, slot, be equipped with the positive plate recess on the positive plate, the electrode piece is through hole type electrode piece, in this through hole type electrode piece is fixed in the positive plate recess through the interference fit installation and through interior hexagonal double -screw bolt, the electrode stem tail end is fixed in through hole type electrode piece bottom through hexagon socket head cap screw II.
Description
Technical field
The utility model belongs to thin film solar photovoltaic cell technical field, is applied to the maintenance of PECVD work rest, and particularly a kind of convenient replacing battery lead rod electrode block prevents the device of shielded-plate tube plated film exception.
Background technology
At present, for making each electrode coating process in cvd furnace keep stability, need the electrode contact of plasma enhanced chemical vapor deposition device necessary good.Therefore, require regularly irregularly to carry out work rest maintenance.In work rest maintenance process, easily there is loosening oxidization condition in the connection of frequent discovery battery lead rod and electrode block and electrode block and positive plate, cause conducting resistance to increase, current capacity declines, and then easily occurs reflection, bad, the too low situation of power of plated film in process.Because working space is narrow and small, on existing electrode block, on three countersunk head screws and existing electrode block insulation booth, four hexagon socket head cap screws are difficult to dismounting and install and electrode block insulation booth sealing property is not good.
In addition, come out of the stove at work rest, blanking, in moving process, the rete that plated film is formed can come off and form silica flour etc., therefore during work rest cleaning, the water jets under high pressure of water blast gun ejection is mingled with silica flour etc. and likely enters in electrode block insulation booth and between insulation booth gap, so just for PECVD plated film has buried hidden danger: during plated film, because before electrode block, the shielded-plate tube at tetrafluoro block place is completely out exposed, do not take effective preventive measures, reflection is there is under superposition of electric field, cause the abnormal plated film of shielded-plate tube, have a strong impact on technique to proceed, cause product power too low, even scrap.So work rest spends more time and manpower to go to carry out the process of the abnormal plated film of shielded-plate tube before using next time, due to the obstruction of the lead screw of fixed side and narrow space, cause two of shielded-plate tube support fastening shielded-plate tube bolt disassembly on aluminium blocks utilize existing instrument carry out operating very inconvenient, and the access times of meeting serious curtailment shielded-plate tube and electrode side plate, increase the cleaning frequency of work rest, thus cause the costs such as human and material resources to increase.
Summary of the invention
The technical problems to be solved in the utility model is the above-mentioned defect how overcoming prior art, provides a kind of convenient replacing battery lead rod electrode block to prevent the device of shielded-plate tube plated film exception.
The utility model is achieved through the following technical solutions:
Convenient replacing battery lead rod electrode block prevents a device for shielded-plate tube plated film exception, comprises battery lead rod, the shielded-plate tube be sheathed on battery lead rod, the support aluminium block being connected and fixed shielded-plate tube by hexagon socket head cap screw I, positive plate and electrode block, also comprises:
Shielded-plate tube insulation covering, it to be sheathed on work rest shielded-plate tube and to be close to rear end and supports aluminium block;
Tetrafluoro block, it is installed on shielded-plate tube and shielded-plate tube insulation covering tail end;
Seal insert formula electrode block insulation box body, its upper shed is installed on positive plate by shrink-fit, and its side is with tetrafluoro block sealing slot, is installed on tetrafluoro block with tetrafluoro block sealing slot side;
And, seal insert formula electrode block insulation lid, it is installed on seal insert formula electrode block insulation box body by socket, slot;
Described positive plate is provided with positive plate groove, and described electrode block is through-hole type electrode block, and this through-hole type electrode block is installed by shrink-fit and is fixed in positive plate groove by interior hexagonal double-ended bolt;
Described battery lead rod tail end is fixed on bottom through-hole type electrode block by hexagon socket head cap screw II.
As optimization, described through-hole type electrode block is provided with 3 cylindrical holes.
As optimization, described interior hexagonal double-ended bolt and hexagon socket head cap screw II are 3.
The beneficial effects of the utility model are:
The utility model, structure is simple, design science, easy to use, mainly contains following advantage:
1, by the setting of through-hole type electrode block, for changing the effect playing convenient and swift dismounting in operation process at work rest maintenance electrode block, and through-hole type electrode block is installed by shrink-fit, and be fixed in positive plate groove by interior hexagonal double-ended bolt, the effect of the effective contact area increasing electrode block and work rest positive plate can be played, avoid original structure easily to occur loosened screw and produce loose contact, thus ensure the physical property of electrode block, stopping loose contact causes product power too low, and can convenient and swift replacing electrode block, avoid original structure due to working space narrow and small, change comparatively difficulty,
2, by arranging seal insert formula electrode block insulation box body and seal insert formula electrode block insulation lid, one, when the seal insert formula electrode block insulation box body upper shed shrink-fit by band tetrafluoro block being sealed slot one is arranged on and positive plate can be avoided because of cleaning workpiece frame, insulation booth water inlet causes the oxidation of the effective contact surface of electrode block and electrode block and battery lead rod; Two, seal insert formula electrode block insulation box body and seal insert formula electrode block insulation lid can be made, both realize sealing by the staggered superposition of slot and chamfering occlusion, prevent from leaking because of electrode block insulation booth poor sealing the superposition of electric field that radio frequency and shielded-plate tube and positive plate and shielded-plate tube are formed, cause the abnormal plated film of shielded-plate tube, so cause product rejection simultaneously convenient battery lead rod of observing be connected with electrode block and oxidization condition and convenient replacing battery lead rod electrode block;
3, by arranging shielded-plate tube insulation covering, when it is for preventing plated film, because before electrode block, the shielded-plate tube at tetrafluoro block place is completely out exposed, do not take effective preventive measures, reflection is easily there is under superposition of electric field effect, cause abnormal plated film, have a strong impact on technique and proceed, cause product rejection;
4, the utility model can when not affecting current processing requirement, effective convenient replacing battery lead rod electrode block prevents shielded-plate tube plated film abnormal, the stability of guard electrode contact and shielded-plate tube physical property, improve battery lead rod, electrode block and shielded-plate tube life-span, extend life cycle, greatly improve equipment mobility, reduce product rejection rate, reduce the labour intensity of human body; Significantly can reduce costs, for scale operation, there is great promotional value.
Accompanying drawing explanation
The device of shielded-plate tube plated film exception is prevented to be described further below in conjunction with accompanying drawing to a kind of convenient replacing battery lead rod electrode block:
Fig. 1 is the structural representation that a kind of convenient replacing battery lead rod electrode block prevents the device of shielded-plate tube plated film exception;
Fig. 2 is the main TV structure schematic diagram of through-hole type electrode block in Fig. 1;
Fig. 3 is the left TV structure schematic diagram of through-hole type electrode block in Fig. 1;
Fig. 4 is the plan structure schematic diagram of through-hole type electrode block in Fig. 1;
Fig. 5 is the main TV structure schematic diagram of seal insert formula electrode block insulation box body in Fig. 1;
Fig. 6 is the left TV structure schematic diagram of seal insert formula electrode block insulation box body in Fig. 1;
Fig. 7 be in Fig. 1 seal insert formula electrode block insulation box body look up structural representation;
Fig. 8 is the main TV structure schematic diagram of seal insert formula electrode block insulation lid in Fig. 1;
Fig. 9 is the left TV structure schematic diagram of seal insert formula electrode block insulation lid in Fig. 1;
Figure 10 is the plan structure schematic diagram of seal insert formula electrode block insulation lid in Fig. 1;
Figure 11 is the main TV structure schematic diagram of shielded-plate tube insulation covering in Fig. 1;
Figure 12 is the left TV structure schematic diagram of shielded-plate tube insulation covering in Fig. 1;
Figure 13 is the main TV structure schematic diagram of tetrafluoro block in Fig. 1;
Figure 14 is the left TV structure schematic diagram of tetrafluoro block in Fig. 1.
In figure: 1 be battery lead rod, 2 be shielded-plate tube, 3 be shielded-plate tube insulation covering for supporting aluminium block, 4,6 be tetrafluoro block, 7 be positive plate, 8 be interior hexagonal double-ended bolt, 9 be positive plate groove, 10 be electrode block, 11 be seal insert formula electrode block insulation box body, 13 be through hole, 15 seal slot for tetrafluoro block for seal insert formula electrode block insulation lid, 14 for hexagon socket head cap screw II, 12 for hexagon socket head cap screw I, 5.
Embodiment
For making the purpose of this utility model, technical scheme and advantage clearly understand, to develop simultaneously embodiment referring to accompanying drawing, the utility model is further described.
As shown in Fig. 1-Figure 14, a kind of convenient replacing battery lead rod electrode block prevents the device of shielded-plate tube plated film exception, comprise battery lead rod 1, the shielded-plate tube 2 be sheathed on battery lead rod 1, the support aluminium block 3 being connected and fixed shielded-plate tube 2 by hexagon socket head cap screw I 4, positive plate 7 and electrode block 10, also comprise:
Shielded-plate tube insulation covering 5, it to be sheathed on work rest shielded-plate tube 2 and to be close to rear end and supports aluminium block 3;
Tetrafluoro block 6, it is installed on shielded-plate tube 2 and shielded-plate tube insulation covering 5 tail end;
Seal insert formula electrode block insulation box body 12, its upper shed is installed on positive plate 7 by shrink-fit, and its side seals slot 15 with tetrafluoro block, is installed on tetrafluoro block 6 with tetrafluoro block sealing slot 15 side;
And, seal insert formula electrode block insulation lid 13, it is installed on seal insert formula electrode block insulation box body 12 by socket, slot;
Described positive plate 7 is provided with positive plate groove 9, and described electrode block 10 is through-hole type electrode block 10, and this through-hole type electrode block 10 is installed by shrink-fit and is fixed in positive plate groove 9 by interior hexagonal double-ended bolt 8;
Described battery lead rod 1 tail end is fixed on bottom through-hole type electrode block 10 by hexagon socket head cap screw II 11.
Design like this, 1, by the setting of through-hole type electrode block 10, for changing the effect playing convenient and swift dismounting in operation process at work rest maintenance electrode block, and through-hole type electrode block 10 is installed by shrink-fit, and be fixed in positive plate groove 9 by interior hexagonal double-ended bolt 8, the effect of the effective contact area increasing electrode block and work rest positive plate can be played, avoid original structure easily to occur loosened screw and produce loose contact, thus ensure the physical property of electrode block, stopping loose contact causes product power too low, and can convenient and swift replacing electrode block, avoid original structure due to working space narrow and small, change comparatively difficulty, 2, by arranging seal insert formula electrode block insulation box body 12 and seal insert formula electrode block insulation lid 13, one, when the seal insert formula electrode block insulation box body upper shed shrink-fit by band tetrafluoro block being sealed slot one is arranged on and positive plate can be avoided because of cleaning workpiece frame, insulation booth water inlet causes the oxidation of the effective contact surface of electrode block and electrode block and battery lead rod, two, seal insert formula electrode block insulation box body and seal insert formula electrode block insulation lid can be made, both realize sealing by the staggered superposition of slot and chamfering occlusion, prevent from leaking because of electrode block insulation booth poor sealing the superposition of electric field that radio frequency and shielded-plate tube and positive plate and shielded-plate tube are formed, cause the abnormal plated film of shielded-plate tube, so cause product rejection simultaneously convenient battery lead rod of observing be connected with electrode block and oxidization condition and convenient replacing battery lead rod electrode block, 3, by arranging shielded-plate tube insulation covering 5, when it is for preventing plated film, because before electrode block, the shielded-plate tube at tetrafluoro block place is completely out exposed, do not take effective preventive measures, reflection is easily there is under superposition of electric field effect, cause abnormal plated film, have a strong impact on technique and proceed, cause product rejection, 4, above-mentioned a kind of convenient replacing battery lead rod electrode block prevents the device of shielded-plate tube plated film exception can when not affecting current processing requirement, effective convenient replacing battery lead rod electrode block prevents shielded-plate tube plated film abnormal, the stability of guard electrode contact and shielded-plate tube physical property, improve battery lead rod, electrode block and shielded-plate tube life-span, extend life cycle, greatly improve equipment mobility, reduce product rejection rate, reduce the labour intensity of human body, significantly can reduce costs, for scale operation, there is great promotional value.
Concrete, described through-hole type electrode block 10 is provided with 3 cylindrical holes 14.Design like this, is convenient to processing and result of use is better.
Concrete, described interior hexagonal double-ended bolt 8 and hexagon socket head cap screw II 11 are 3.Design like this, is convenient to install and result of use is better.
Above-mentioned a kind of convenient replacing battery lead rod electrode block prevents the installation method of the device of shielded-plate tube plated film exception, comprises the following steps:
1) shielded-plate tube insulation covering is sheathed on amorphous silicon thin-film solar PECVD work rest shielded-plate tube, and at amorphous silicon thin-film solar PECVD shielded-plate tube and shielded-plate tube insulation covering tail end, sealing tetrafluoro block is installed, notice that the shielded-plate tube insulation covering be sheathed on shielded-plate tube will be close to rear end and support aluminium block, tetrafluoro block will be in place;
2) the sealing eye-splice-type electrode block insulation box body upper shed of band tetrafluoro block sealing slot one is arranged on positive plate by shrink-fit, will be installed on tetrafluoro block with tetrafluoro block sealing slot side;
3) convenient replacing through-hole type electrode block to be installed in work rest positive pole groove structure by shrink-fit and to tighten fixing by 3 interior hexagonal double-ended bolts;
4) battery lead rod is shifted onto with through-hole type electrode block bottom 3 bolts hole just to position, use extension rod hexagon socket head cap screw II fix in position;
5) convenient battery lead rod of observing to be connected with electrode block and the eye-splice-type electrode block of oxidization condition and the convenient replacing battery lead rod electrode block lid that insulate to be installed to by eye-splice, slot and to be with tetrafluoro block to seal slot sealing eye-splice-type electrode block integrally to insulate on box body.
In addition, loosen oxidization condition for battery lead rod electrode block, before and after technique, directly extracting sealing eye-splice-type electrode block insulation lid, being undertaken tightening or unloading replacing by lengthening interior hexagonal.
The utility model, structure is simple, design science, easy to use, can when not affecting current processing requirement, effective convenient replacing battery lead rod electrode block prevents shielded-plate tube plated film abnormal, and the stability of guard electrode contact and shielded-plate tube physical property, improve battery lead rod, electrode block and shielded-plate tube life-span, extend life cycle, greatly improve equipment mobility, reduce product rejection rate, reduce the labour intensity of human body; Significantly can reduce costs, for scale operation, there is great promotional value.
Above-mentioned embodiment is only concrete case of the present utility model, be not restriction the utility model being made to other form, any those skilled in the art may utilize the technology contents of above-mentioned announcement to be changed or be modified as the equivalent implementations of equivalent variations.But every do not depart from the prerequisite of the utility model know-why under, any simple modification, equivalent variations and the remodeling done above embodiment according to technical spirit of the present utility model, all should fall into scope of patent protection of the present utility model.
Claims (3)
1. a convenient replacing battery lead rod electrode block prevents the device of shielded-plate tube plated film exception, comprise battery lead rod, the shielded-plate tube be sheathed on battery lead rod, the support aluminium block being connected and fixed shielded-plate tube by hexagon socket head cap screw I, positive plate and electrode block, it is characterized in that, also comprise:
Shielded-plate tube insulation covering, it to be sheathed on work rest shielded-plate tube and to be close to rear end and supports aluminium block;
Tetrafluoro block, it is installed on shielded-plate tube and shielded-plate tube insulation covering tail end;
Seal insert formula electrode block insulation box body, its upper shed is installed on positive plate by shrink-fit, and its side is with tetrafluoro block sealing slot, is installed on tetrafluoro block with tetrafluoro block sealing slot side;
And, seal insert formula electrode block insulation lid, it is installed on seal insert formula electrode block insulation box body by socket, slot;
Described positive plate is provided with positive plate groove, and described electrode block is through-hole type electrode block, and this through-hole type electrode block is installed by shrink-fit and is fixed in positive plate groove by interior hexagonal double-ended bolt;
Described battery lead rod tail end is fixed on bottom through-hole type electrode block by hexagon socket head cap screw II.
2. a kind of convenient replacing battery lead rod electrode block as claimed in claim 1 prevents the device of shielded-plate tube plated film exception, it is characterized in that: described through-hole type electrode block is provided with 3 cylindrical holes.
3. a kind of convenient replacing battery lead rod electrode block as claimed in claim 2 prevents the device of shielded-plate tube plated film exception, it is characterized in that: described interior hexagonal double-ended bolt and hexagon socket head cap screw II are 3.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520658171.3U CN204898066U (en) | 2015-08-28 | 2015-08-28 | It prevents unusual device of shielded -plate tube coating film swiftly to change electrode stem electrode piece |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520658171.3U CN204898066U (en) | 2015-08-28 | 2015-08-28 | It prevents unusual device of shielded -plate tube coating film swiftly to change electrode stem electrode piece |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204898066U true CN204898066U (en) | 2015-12-23 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520658171.3U Active CN204898066U (en) | 2015-08-28 | 2015-08-28 | It prevents unusual device of shielded -plate tube coating film swiftly to change electrode stem electrode piece |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204898066U (en) |
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2015
- 2015-08-28 CN CN201520658171.3U patent/CN204898066U/en active Active
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20190131 Address after: Room 103, Building 2, Office District, Olympic Village, Chaoyang District, Beijing Patentee after: HANNENG PHOTOVOLTAIC TECHNOLOGY CO., LTD. Address before: 251200 Haneng Photovoltaic Industrial Park, Revitalization Avenue, Yucheng High-tech Zone, Dezhou City, Shandong Province Patentee before: Yucheng, Shandong Han Neng thin film solar Co., Ltd |
|
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20190307 Address after: Room 107, Building 2, Olympic Village Street Comprehensive Office District, Chaoyang District, Beijing Patentee after: Han energy mobile Energy Holding Group Co., Ltd. Address before: Room 103, Building 2, Office District, Olympic Village, Chaoyang District, Beijing Patentee before: HANNENG PHOTOVOLTAIC TECHNOLOGY CO., LTD. |
|
| TR01 | Transfer of patent right |