CN113838728B - Ion source filament assembly and welding method thereof - Google Patents

Ion source filament assembly and welding method thereof Download PDF

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Publication number
CN113838728B
CN113838728B CN202111032009.7A CN202111032009A CN113838728B CN 113838728 B CN113838728 B CN 113838728B CN 202111032009 A CN202111032009 A CN 202111032009A CN 113838728 B CN113838728 B CN 113838728B
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China
Prior art keywords
filament
base
welding
column
fixing
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CN113838728A (en
Inventor
朱伟平
黄翌敏
程锐
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Yirui Image Technology Chengdu Co ltd
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Yirui Image Technology Chengdu Co ltd
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/02Details
    • H01J49/10Ion sources; Ion guns
    • H01J49/14Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
    • H01J49/147Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers with electrons, e.g. electron impact ionisation, electron attachment
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K1/00Soldering, e.g. brazing, or unsoldering
    • B23K1/0008Soldering, e.g. brazing, or unsoldering specially adapted for particular articles or work
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K1/00Soldering, e.g. brazing, or unsoldering
    • B23K1/008Soldering within a furnace
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K3/00Tools, devices, or special appurtenances for soldering, e.g. brazing, or unsoldering, not specially adapted for particular methods
    • B23K3/08Auxiliary devices therefor
    • B23K3/087Soldering or brazing jigs, fixtures or clamping means
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00Ion beam tubes
    • H01J27/02Ion sources; Ion guns
    • H01J27/20Ion sources; Ion guns using particle beam bombardment, e.g. ionisers
    • H01J27/205Ion sources; Ion guns using particle beam bombardment, e.g. ionisers with electrons, e.g. electron impact ionisation, electron attachment
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02Manufacture of electrodes or electrode systems
    • H01J9/18Assembling together the component parts of electrode systems

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Combustion & Propulsion (AREA)
  • Manufacturing & Machinery (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

The invention provides an ion source filament component and a welding method thereof, wherein the filament component comprises: the lamp filament comprises a lamp filament base, fixed columns, a lamp filament electrode and a lamp filament, wherein the fixed columns are welded on the lamp filament base; the two filament electrodes are respectively welded on the fixed column; the two ends of the filament are welded on the two filament electrodes. The welding method specifically comprises the following steps: providing a filament assembly and a welding tool, wherein the welding tool comprises a tool base, a metal pressing sheet and a fastening screw; the filament electrode passes through the fixed column and is wound with solder; inserting the filament electrode and the fixed column into the tooling base; solder is placed on the contact surface of the fixed column and the filament base, and the filament base passes through the fixed column; the filament base and the fixed column are tightly pressed by the metal pressing sheet and the fastening screw; and brazing the assembled parts to be welded. According to the ion source filament assembly structure and the welding method adopting the welding tool, the stability and the welding strength of the filament assembly are greatly improved, and the welding tool can be used for batch manufacturing of the filament assembly.

Description

Ion source filament assembly and welding method thereof
Technical Field
The invention belongs to the technical field of welding, and particularly relates to an ion source filament assembly and a welding method thereof.
Background
The ion source is an indispensable important component of the mass spectrometer, and has the functions of ionizing, storing and focusing the gas to be detected into an ion beam with certain energy and shape, and the quality of the ion source is directly related to the detection sensitivity and the quantitative effect of the mass spectrometer, so that the mass spectrometer is called as a heart. A typical electron impact ion (EI) source is generally composed of three parts: an ionization chamber, a filament assembly, and an ion lens system. The filament electrode needs to keep normal and stable operation without damage under the relatively high vibration level, how to improve the welding reliability of the filament electrode, and the replacement economy is a problem to be solved by the EI source filament electrode.
The fixed base of the traditional ion source filament component generally adopts a multi-section connection structure, and the filament base is generally made of stainless steel/kovar materials, so that the filament base is used for fixing a lamp filament pole on one hand and is used as an ion repulsion or shielding electrode on the other hand. The filament pole is usually made of kovar/stainless steel, in the prior art, glass or ceramic is usually adopted between the filament pole and the filament base, the filament base is usually thinner than 1mm, so that the thickness of glass/ceramic sealing is also within 1mm, or a lengthened metal tube is specially arranged at the part for sealing the filament pole of the lamp, the metal tube is spot-welded on the filament base after sealing the metal tube and the filament pole, or the thickness of the filament base is increased to improve the welding reliability, and the common packaging structure is poor in reliability and vibration resistance, or the structural size of an instrument is increased, and the portability of the instrument is reduced.
Accordingly, there is a need to provide an improved solution to the above-mentioned deficiencies of the prior art.
Disclosure of Invention
In view of the above-mentioned drawbacks of the prior art, an object of the present invention is to provide an ion source filament assembly and a welding method thereof, which are at least used for solving the problems of poor welding reliability and poor vibration resistance of the filament assembly in the prior art.
To achieve the above and other related objects, the present invention provides an ion source filament assembly comprising:
a filament base;
the fixing column penetrates through the filament base and is fixed on the filament base in a welding mode, two column holes are formed in the fixing column, and the two column holes penetrate through the upper surface and the lower surface of the fixing column;
the two filament electrodes respectively penetrate through the column holes and are welded on the fixed columns;
and two ends of the filament are welded on the two filament electrodes respectively.
Preferably, two filament electrodes are provided with positioning grooves, and two ends of the filament are respectively arranged in the two positioning grooves and are in welded connection with the filament electrodes.
Preferably, the fixing column comprises two columns, the two columns are arranged in a discrete structure, and the two column holes are respectively and correspondingly arranged on the two columns.
Preferably, the fixing column comprises two columns and a base, the two columns are vertically arranged on the base, and the two column holes are correspondingly arranged on the two columns respectively and penetrate through the upper surface of the columns and the lower surface of the base.
Preferably, the filament base and the filament electrode are subjected to nickel plating treatment; the connection part of the fixed column and the filament base is metallized, and the connection part of the fixed column and the filament electrode is metallized.
Preferably, the filament base is a kovar alloy filament base; the fixing column is a 95 porcelain fixing column; the filament electrode is made of kovar wires; the filament is a spiral tungsten filament, a rhenium filament, a tungsten rhenium filament or an iridium filament with yttrium oxide coated on the surface.
The invention also provides a welding method of the ion source filament assembly, which comprises the following steps:
providing the ion source filament assembly as described in any one of the above, and providing a welding fixture, wherein the welding fixture comprises a fixture base, a metal pressing sheet and a fastening screw, which are arranged corresponding to the ion source filament assembly;
the filament electrode passes through the fixed column, and welding materials are wound on two sides of the filament electrode passing through the fixed column;
inserting the filament electrode and the fixing column into the tool base;
solder is placed on the contact surface of the fixed column and the filament base, and the filament base passes through the fixed column;
one end of the metal pressing sheet is placed on the filament base, and the filament base and the fixing column are pressed and fixed through the fastening screw;
the fixed and assembled parts to be welded are placed into a brazing furnace for brazing;
and welding the filament into the positioning groove of the filament electrode.
Preferably, the tool base is a stainless steel tool base or a graphite tool base, and a positioning hole is formed in the tool base and used for positioning the filament electrode.
Preferably, the fixture base is further provided with a fixing hole, and the fixing hole is used for accommodating the fixing column.
Preferably, the welding fixture further comprises a pressing mechanism, and the pressing mechanism is used for fixing and pressing the fixing column.
As described above, the ion source filament assembly and the welding method thereof of the present invention have the following advantageous effects:
the ion source filament assembly comprises a filament base, a fixed column, a filament electrode and a filament, wherein the fixed column penetrates through the filament base and is welded and fixed on the filament base, the filament base is a kovar alloy filament base, and the fixed column adopts 95 porcelain with the expansion coefficient close to that of the kovar alloy, so that the welding stability of the fixed column and the filament base is effectively improved; the filament electrode passes through the column hole of the fixed column and is welded and fixed on the fixed column, the inner wall of the column hole of the fixed column and the contact surface of the fixed column and the filament base are subjected to metallization treatment, so that the weldability of the fixed column and the filament electrode is greatly enhanced, and meanwhile, the weldability of the fixed column and the filament base is also enhanced, and the strength after welding is further ensured; furthermore, a positioning groove is formed in the filament electrode so as to increase the surface area of the filament electrode and the welding surface of the filament and enhance the welding reliability; thereby greatly improving the stability and welding strength of the filament assembly.
In addition, the welding method of the ion source filament assembly comprises the steps of assembling the ion source filament assembly by adopting a welding tool, then brazing, arranging a positioning hole and a fixing hole on a tool base for positioning a filament electrode and a fixing column, fixing the filament base in the welding process by a metal pressing sheet and a fastening screw, and fixing and pressing the fixing column by arranging a pressing sheet mechanism, so that the follow-up brazing process, namely the welding tool, is convenient for batch manufacturing of the filament assembly.
Drawings
Fig. 1 is a schematic perspective view showing a filament assembly in embodiment 1 of the present invention.
Fig. 2 is a schematic diagram of the rear view structure of fig. 1.
Fig. 3 is a schematic perspective view showing a filament assembly in embodiment 2 of the present invention.
Fig. 4 is a schematic diagram of the rear view structure of fig. 3.
Fig. 5 is a schematic perspective view of a fixing post in embodiment 2 of the present invention.
Fig. 6 is a schematic diagram of an assembled perspective structure of a filament assembly and a welding tool according to an embodiment of the invention.
Fig. 7 is a schematic view showing a sectional structure along A-A' in fig. 6.
Fig. 8 is a flow chart of a method for welding an ion source filament assembly according to an embodiment of the invention.
Description of element reference numerals
101. Filament base
102. Fixing column
1021. Column hole
1022. Column body
1023. Base seat
103. Filament electrode
104. Filament lamp
105. Positioning groove
201. Tool base
202. Metal tabletting
203. Fastening screw
Detailed Description
Further advantages and effects of the present invention will become apparent to those skilled in the art from the disclosure of the present invention, which is described by the following specific examples.
Please refer to fig. 1 to 8. It should be understood that the structures, proportions, sizes, etc. shown in the drawings are for illustration purposes only and should not be construed as limiting the invention to the extent that it can be practiced, since modifications, changes in the proportions, or otherwise, used in the practice of the invention, are not intended to be critical to the essential characteristics of the invention, but are intended to fall within the spirit and scope of the invention. Also, the terms such as "upper," "lower," "left," "right," "middle," and "a" and the like recited in the present specification are merely for descriptive purposes and are not intended to limit the scope of the invention, but are intended to provide relative positional changes or modifications without materially altering the technical context in which the invention may be practiced.
The ion source filament assembly comprises a filament base, a fixed column, a filament electrode and a filament, wherein the fixed column penetrates through the filament base and is welded and fixed on the filament base, the filament base is a kovar alloy filament base, and the fixed column adopts 95 porcelain with the expansion coefficient close to that of the kovar alloy, so that the welding stability of the fixed column and the filament base is effectively improved; the filament electrode passes through the column hole of the fixed column and is welded and fixed on the fixed column, the inner wall of the column hole of the fixed column and the contact surface of the fixed column and the filament base are subjected to metallization treatment, so that the weldability of the fixed column and the filament electrode is greatly enhanced, and meanwhile, the weldability of the fixed column and the filament base is also enhanced, and the strength after welding is further ensured; furthermore, a positioning groove is formed in the filament electrode so as to increase the surface area of the filament electrode and the welding surface of the filament and enhance the welding reliability; thereby greatly improving the stability and welding strength of the filament assembly. In addition, the welding method of the ion source filament assembly comprises the steps of assembling the ion source filament assembly by adopting a welding tool, then brazing, arranging a positioning hole and a fixing hole on a tool base for positioning a filament electrode and a fixing column, fixing the filament base in the welding process by a metal pressing sheet and a fastening screw, and fixing and pressing the fixing column by arranging a pressing sheet mechanism, so that the follow-up brazing process, namely the welding tool, is convenient for batch manufacturing of the filament assembly.
Example 1
Usually, an electron bombardment ion (EI) source of a mass spectrometer is provided with two groups of filaments, and the two groups of filaments can be switched to work, wherein the two groups of filaments can be arranged on one filament base 101, or a group of filaments can be respectively arranged on two filament bases 101 with symmetrical structures, and a complete double-filament assembly is formed by splicing and combining the two filament bases 101.
In this embodiment, preferably, two filament bases 101 are used to combine a complete dual filament assembly, and two filament bases 101 can be used to replace an abnormal filament assembly more conveniently, so that the reliability is higher, but the present embodiment is not excessively limited.
Referring to fig. 1 and 2, the present embodiment provides an ion source filament assembly, which includes: a filament base 101, a fixed leg 102, a filament electrode 103, and a filament 104; the fixed column 102 passes through the filament base 101 and is welded and fixed on the filament base 101, two column holes are formed in the fixed column 102, and the two column holes penetrate through the upper surface and the lower surface of the fixed column 102; the two filament electrodes 103 are arranged, and the two filament electrodes 103 respectively pass through the column holes and are welded on the fixed column 102; both ends of the filament 104 are welded to two filament electrodes 103, respectively.
Specifically, the filament bases 101 may be set to different shapes according to the specific use situation, and in this embodiment, it is preferable that two filament bases 101 are in a double-C-shaped splice structure, and a central splice round hole is used for installing a grid-like shielding/repulsive electrode. However, the specific shape and size of the filament base 101 are not limited thereto, and may be adjusted according to actual needs without being excessively limited thereto.
As an example, the filament base 101 is a kovar filament base 101; the fixing posts 102 are 95 porcelain fixing posts 102.
Specifically, the fixing column 102 is made of 95 porcelain materials, and the expansion coefficients of the 95 porcelain and the kovar alloy are close, namely, the expansion coefficients of the materials used by the fixing column 102 are close to those of the materials used by the filament base 101 and the filament 104; the expansion coefficient is a regularity coefficient of a substance, the geometric characteristic of which changes along with the change of temperature under the effect of thermal expansion and contraction, and the fixed column 102 passes through the filament base 101 and is welded and fixed on the filament base 101, and when the temperature changes, the fixed column 102 and the filament base 101 cannot generate larger relative deformation to be damaged, so that the stability of welding between the fixed column 102 and the filament base 101 can be improved. However, the materials of the fixing post 102, the filament base 101 and the filament 104 are not limited thereto, and only one of them is mentioned in the present embodiment.
As an example, the two filament electrodes 103 are provided with positioning grooves 105, and two ends of the filament 104 are respectively placed in the two positioning grooves 105 and are welded with the filament electrodes 103.
Specifically, two ends of the filament 104 are straight line segments, and the straight line segments are respectively placed in the two positioning grooves 105 and are fixedly connected by welding, so that the contact surface area of the filament electrode 103 and the filament 104 by welding is increased, and the welding reliability is enhanced. Wherein, preferably, the positioning groove 105 is arc-shaped, and the size of the positioning groove 105 is equivalent to the diameter of the filament 104. However, the specific shape and size of the positioning groove 105 are not limited herein.
As an example, referring to fig. 1 and 2, the fixing column 102 includes two columns, which are disposed in a discrete structure, and two column holes are disposed on the two columns respectively.
Preferably, the height of the fixing legs 102 is higher than the thickness of the filament base 101.
As an example, the filament base 101 and the filament electrode 103 are subjected to nickel plating treatment; the connection between the fixing leg 102 and the filament base 101 is metallized, and the connection between the fixing leg 102 and the filament electrode 103 is metallized.
Specifically, in order to further ensure the strength after welding, in this embodiment, the fixing column 102 adopts two discrete tubular columns, two welding through holes are formed on the filament base 101, and two columns disposed in a discrete structure respectively pass through the two welding through holes and are fixed on the filament base 101 through welding with solder, and the welding area is increased by adopting a discrete structure so as to ensure the strength after welding; in addition, the expansion coefficient of 95 porcelain selected by the fixing column 102 is close to that of kovar alloy selected by the filament base 101, and the middle section of the outer wall of the welding part of the column body and the filament base 101 is subjected to metallization treatment, so that the weldability of the welding through hole of the filament base 101 and the column body is greatly enhanced; moreover, the inner wall of the cylinder bore 1021 is also metallized, so that the weldability between the filament electrode 103 and the fixed cylinder 102 can be greatly enhanced.
As an example, the filament electrode 103 is made of kovar wire; filament 104 is a spiral tungsten wire, a rhenium wire, a tungsten rhenium wire, or an iridium wire coated with yttria on its surface.
Specifically, it is preferable to use a kovar wire having a diameter of 1.2mm to 1.8mm for the filament electrode 103.
In order to better understand how the ion source filament assembly according to the embodiment of the present invention is manufactured, the present embodiment also provides a welding method for the ion source filament assembly.
Referring to fig. 6 to 8, the welding method of the filament assembly of the ion source includes the following steps:
providing the ion source filament assembly and a welding tool, wherein the welding tool comprises a tool base 201, a metal pressing sheet 202 and a fastening screw 203 which are arranged corresponding to the ion source filament assembly;
the filament electrode 103 passes through the fixed column 102, and solder is wound on two sides of the filament electrode 103 passing through the fixed column 102;
inserting the filament electrode 103 and the fixed column 102 into the tooling base 201;
solder is placed on the contact surface of the fixed column 102 and the filament base 101, and the filament base 101 passes through the fixed column 102;
one end of a metal pressing sheet 202 is placed on the filament base 101, and the filament base 101 and the fixing column 102 are pressed and fixed through a fastening screw 203;
the fixed and assembled parts to be welded are placed into a brazing furnace for brazing;
the filament 104 is welded to the filament electrode 103.
As an example, the tooling base 201 is a stainless steel tooling base or a graphite tooling base, and the tooling base 201 is provided with a positioning hole for positioning the filament electrode 103.
Specifically, one end of the filament electrode 103 passes through the column hole 1021 of the fixing column 102, and the other end is placed in the positioning hole of the tooling base 201, so that the positional relationship between the filament electrode 103 and the fixing column 102 is better fixed, and the subsequent brazing process is facilitated. The size, shape and depth of the positioning hole should be better matched with the filament electrode 103, and are not excessively limited here.
As an example, the tool base 201 is further provided with a fixing hole (not shown in the figure) for accommodating the fixing post 102.
Specifically, a fixing hole is formed in the tool base 201, and a portion below the fixing column 102 is fixed in the fixing hole, so as to ensure stability of the fixing column 102 and the filament electrode 103 on the tool base 201. The size, shape and depth of the fixing hole should be better to stabilize the fixing post 102, which is not limited herein.
By way of example, the welding fixture also includes a press mechanism (not shown) for securing and compressing the fixing stud 102.
As an example, the solder is a silver-copper alloy.
Referring to fig. 6 and 7, the specific steps of the welding method of the ion source filament assembly are as follows:
firstly, preparing parts of a filament assembly except for a filament 104 and welding tools, and placing a tool base 201 on a horizontal workbench;
then, one end of the filament electrode 103 passes through the column hole 1021 of the fixed column 102, one to two circles of silver-copper alloy wires are wound on two sides of the filament electrode 103 passing through the column hole 1021, the bottom end of the fixed column 102 is inserted into a corresponding fixed hole of the tooling base 201, and the other end of the filament electrode 103 is inserted into a corresponding positioning hole;
then, placing a silver-copper alloy sheet on the contact surface of the fixed column 102 and the filament base 101, then passing the filament base 101 from the upper side of the fixed column 102, and pressing the silver-copper alloy sheet between the two by the filament base 101;
next, one end of the metal pressing sheet 202 is placed on the filament base 101, a threaded hole is formed in the metal pressing sheet 202, the filament base 101 and the fixing column 102 are pressed and fixed on the tool base 201 through the fastening screw 203, and a plurality of metal pressing sheets 202 and the fastening screw 203 can be arranged to ensure that the filament base 101 and the fixing column 102 are pressed and tightly pressed, but if the number is too large, the disassembly of the welding tool is inconvenient, so that the specific number and the setting positions of the metal pressing sheet 202 and the fastening screw 203 are not excessively limited;
then, the fixed and assembled piece to be welded is placed into a brazing furnace for brazing;
finally, the filament 104 is welded into the positioning groove 105 of the filament electrode 103 through an energy storage electric welding machine, so as to finish the welding of the filament assembly.
Example 2
Referring to fig. 3 to 5 and fig. 6 to 8, the present embodiment provides an ion source filament assembly and a welding method thereof, and the ion source filament assembly in the present embodiment is different from embodiment 1 mainly in that: referring to fig. 5, a fixing column 102 in the present embodiment is a one-piece fixing column 102, the fixing column 102 includes two columns 1022 and a base 1023, the two columns 1022 are vertically disposed on the base 1023, and two column holes 1021 are correspondingly disposed on the two columns 1022 and penetrate through the upper surface of the columns 1022 and the lower surface of the base 1023; the inner wall surface of the post 1021, the outer wall of the welded portion of the post 1022 and the filament base 101, and the contact surface of the base 1023 and the filament base 101 are all metallized.
Specifically, in order to further ensure the strength after welding, in this embodiment, the fixing column 102 is set as a connected fixing column 102, two columns 1022 are set on a base 1023, two columns 1022 are respectively provided with a column hole 1021, the column holes 1021 penetrate through the upper surface of the column 1022 and the lower surface of the base 1023, so as to be set, referring to fig. 3 and 4, the two columns 1022 penetrate through the welding through hole of the filament base 101, the base 1023 is blocked below the filament base 101, the contact surface between the base 1023 and the filament base 101 is increased, and the welding strength between the fixing column 102 and the filament base 101 is further increased by welding with solder. Of course, the structure of the fixing post 102 may be other structures, which are not limited herein.
In addition, the expansion coefficient of 95 porcelain selected by the fixing post 102 is close to that of kovar alloy selected by the filament base 101, and the outer wall of the welding part of the post 1022 and the filament base 101 is metallized, and the contact surface of the base 1023 and the filament base 101 is metallized, so that the weldability of the welding through hole of the filament base 101 and the post 1022 is greatly enhanced.
By way of example, the two posts 1022 and the base 1023 are integrally formed.
The welding method of the ion source filament assembly in this embodiment is the same as that in embodiment 1, and will not be described here again.
In summary, the ion source filament assembly in the invention comprises a filament base, a fixed post, a filament electrode and a filament, wherein the fixed post penetrates through the filament base and is welded and fixed on the filament base, the filament base is a kovar alloy filament base, and the fixed post adopts 95 porcelain with the expansion coefficient close to that of the kovar alloy, so that the welding stability of the fixed post and the filament base is effectively improved; the filament electrode passes through the column hole of the fixed column and is welded and fixed on the fixed column, the inner wall of the column hole of the fixed column and the contact surface of the fixed column and the filament base are subjected to metallization treatment, so that the weldability of the fixed column and the filament electrode is greatly enhanced, and meanwhile, the weldability of the fixed column and the filament base is also enhanced, and the strength after welding is further ensured; furthermore, a positioning groove is formed in the filament electrode so as to increase the surface area of the filament electrode and the welding surface of the filament and enhance the welding reliability; thereby greatly improving the stability and welding strength of the filament assembly. In addition, the welding method of the ion source filament assembly comprises the steps of assembling the ion source filament assembly by adopting a welding tool, then brazing, arranging a positioning hole and a fixing hole on a tool base for positioning a filament electrode and a fixing column, fixing the filament base in the welding process by a metal pressing sheet and a fastening screw, and fixing and pressing the fixing column by arranging a pressing sheet mechanism, so that the follow-up brazing process, namely the welding tool, is convenient for batch manufacturing of the filament assembly. Therefore, the invention effectively overcomes various defects in the prior art and has high industrial utilization value.
The above embodiments are merely illustrative of the principles of the present invention and its effectiveness, and are not intended to limit the invention. Modifications and variations may be made to the above-described embodiments by those skilled in the art without departing from the spirit and scope of the invention. Accordingly, it is intended that all equivalent modifications and variations of the invention be covered by the claims, which are within the ordinary skill of the art, be within the spirit and scope of the present disclosure.

Claims (7)

1. A method of welding an ion source filament assembly, the method comprising the steps of:
providing an ion source filament assembly and a welding tool, wherein the welding tool comprises a tool base, a metal pressing sheet and a fastening screw, which are arranged corresponding to the ion source filament assembly;
the filament assembly includes:
a filament base;
the fixing column penetrates through the filament base and is fixed on the filament base in a welding mode, two column holes are formed in the fixing column, and the two column holes penetrate through the upper surface and the lower surface of the fixing column; the fixing column comprises two columns and a base, wherein the two columns are vertically arranged on the base, and the two column holes are correspondingly arranged on the two columns respectively and penetrate through the upper surface of the columns and the lower surface of the base;
the two filament electrodes respectively penetrate through the column holes and are welded on the fixed columns;
the two ends of the filament are welded on the two filament electrodes respectively;
the filament electrode passes through the fixed column, and welding materials are wound on two sides of the filament electrode passing through the fixed column;
inserting the filament electrode and the fixing column into the tool base;
solder is placed on the contact surface of the fixed column and the filament base, and the filament base passes through the fixed column;
one end of the metal pressing sheet is placed on the filament base, and the filament base and the fixing column are pressed and fixed through the fastening screw;
the fixed and assembled parts to be welded are placed into a brazing furnace for brazing;
the filament is welded to the filament electrode.
2. The method of welding an ion source filament assembly of claim 1, wherein: positioning grooves are formed in the two filament electrodes, and two ends of the filament are respectively arranged in the two positioning grooves and are welded with the filament electrodes.
3. The method of welding an ion source filament assembly of claim 1, wherein: the filament base and the filament electrode are subjected to nickel plating treatment; the connection part of the fixed column and the filament base is metallized, and the connection part of the fixed column and the filament electrode is metallized.
4. The method of welding an ion source filament assembly of claim 1, wherein: the filament base is a kovar alloy filament base; the fixing column is a 95 porcelain fixing column; the filament electrode is made of kovar wires; the filament is a spiral tungsten filament, a rhenium filament, a tungsten rhenium filament or an iridium filament with yttrium oxide coated on the surface.
5. The welding method of an ion source filament assembly of claim 1, wherein the tooling base is a stainless steel tooling base or a graphite tooling base, and the tooling base is provided with positioning holes for positioning the filament electrode.
6. The method of claim 1, wherein the fixture base is further provided with a fixing hole, and the fixing hole is used for accommodating the fixing column.
7. The method of claim 1, wherein the welding fixture further comprises a press mechanism for fixing and pressing the fixing post.
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