CN207852613U - A kind of filament clamping structure of ion source arc chamber - Google Patents
A kind of filament clamping structure of ion source arc chamber Download PDFInfo
- Publication number
- CN207852613U CN207852613U CN201820292335.9U CN201820292335U CN207852613U CN 207852613 U CN207852613 U CN 207852613U CN 201820292335 U CN201820292335 U CN 201820292335U CN 207852613 U CN207852613 U CN 207852613U
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- filament
- arc chamber
- body cavity
- source
- hole
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Abstract
The utility model discloses a kind of filament clamping structure of ion source arc chamber, and source body cavity is arranged in round base top, and heating crucible is arranged in the body cavity of source, and arc chamber, the interior setting filament of arc chamber and reflecting plate is arranged in the top of source body cavity, and the top of arc chamber is transmitting panel；Fixed seat is arranged in the outer wall of the source body cavity, and filament folder is fixed on by the fixed seat on the body cavity of source；Setting elongate holes and filament mounting hole on the clamp of the filament folder, are arranged to the upper end of clamp from elongate holes and slot, through-hole is arranged between elongate holes and filament mounting hole；Setting insulation spacer ring, the position for the spacer ring that insulate are corresponding with the through-hole between two filament folders；The electrode of filament is inserted into the filament mounting hole；Bolt is fastened after passing through the through-hole and insulation spacer ring by nut.The utility model has the advantages that：As a result of secondary fastening structure, being stably connected with for filament ensure that, therefore, ion source the operation is stable, reliability improves.
Description
Technical field
The utility model is related to semiconductor equipment technology, specifically a kind of ion source.
Background technology
Ion source is by pressurizeing to arc chamber main cathode, the inert gas for being filled with arc chamber being ionized into through glow discharge
Plasma draws positively charged ion beam through ion-optic system, by downstream neutralization cathode to ion beam emittance with
The electron stream of beam current equivalent carries out charging neutrality, generates the neutral ion beam of high energy and high speed.
The top of arc chamber is transmitting panel, emits the centrally disposed bar-shaped trough of panel, gas is from the side plate of arc chamber
Gas access enter after, formed plasma after being ionized by filament (filament), most the transmitting panel output through top afterwards；
The filament fixed form of the prior art is generally inserted into using by the electrode of filament in the filament hole on filament folder, and which utilizes lamp
The dimensional fits in silk electrode and filament hole ensure the connection and fixation of filament；And due to work when filament extreme temperatures, can
Reach 2000 degree or more, therefore, causes the unstable of contact condition.
Invention content
In order to solve the above technical problems, the purpose of this utility model is to provide a kind of filament clamping structure, specific technical solution
It is as follows：
A kind of filament clamping structure of ion source arc chamber, round base top are arranged source body cavity, heating are arranged in the body cavity of source
Arc chamber is arranged in the top of crucible, source body cavity, filament and reflecting plate is arranged in arc chamber, the top of arc chamber is the surface of emission
Plate；Fixed seat is arranged in the outer wall of the source body cavity, and filament folder is fixed on by the fixed seat on the body cavity of source；The filament folder
Elongate holes and filament mounting hole are set on clamp, is arranged from elongate holes to the upper end of clamp and slots, elongate holes and filament
Through-hole is set between mounting hole；Setting insulation spacer ring, the position for the spacer ring that insulate are corresponding with the through-hole between two filament folders；Filament
Electrode is inserted into the filament mounting hole；Bolt is fastened after passing through the through-hole and insulation spacer ring by nut.
The both ends of the elongate holes are circular arc type.
The clamp is bolted in fixed seat.
The utility model has the advantages that：As a result of secondary fastening structure, being stably connected with for filament ensure that, therefore,
Ion source the operation is stable, reliability improve.
Description of the drawings
Fig. 1 is the structural schematic diagram of ion source；
Fig. 2 is the structural schematic diagram of filament folder；
Fig. 3 is the connection diagram of filament and filament folder；
In figure, 1 is round base, and 2 be source body cavity, and 3 be arc chamber, and 4 be transmitting panel, and 5 be bar-shaped trough, 6 for gas into
Mouth end, 7 be positioning convex platform, and 8 be tension spring, and 9 be fixed link, and 10 be filament support, and 11 be filament, and 12 be reflecting plate, and 13 be electrode,
14 be filament mounting hole, and 15 be elongate holes, and 16 be insulation spacer ring, and 17 be bolt, and 18 be nut, and 19 be fluting, and 101 be fixation
Seat.
Specific implementation mode
The utility model is illustrated below in conjunction with the accompanying drawings, as shown, source body cavity 2, source body is arranged in 1 top of round base
Heating crucible is set in chamber 2, and arc chamber 3 is arranged in the top of source body cavity 2, and the top of arc chamber 3 is transmitting panel 4；The source
Positioning convex platform 7 is arranged in the top of body cavity, and through-hole is arranged on the positioning convex platform 7, and fixed link 9 passes through the through-hole, fixed link 9
Top hook is pressed in the top of transmitting panel 4, and the lower section of fixed link 9 is connect with tension spring 8, and tension spring 8 is fixed on round base 1；
The fixed link 9 is multiple, and the longitudinal axis along transmitting panel 4 is symmetrical arranged.
Fixed seat is arranged in the outer wall of the source body cavity 2, and filament folder 10 is fixed on by the fixed seat on source body cavity 2；Institute
Setting elongate holes 15 and filament mounting hole 14 on the clamp of filament folder are stated, is arranged from elongate holes 15 to the upper end of clamp and slots
19, through-hole is set between elongate holes 15 and filament mounting hole 14；Setting insulation spacer ring 16 between two filament folders, insulation spacer ring 16
Position is corresponding with the through-hole；The electrode 13 of filament 11 is inserted into the filament mounting hole 14；Bolt 17 pass through the through-hole and
It is fastened by nut 18 after insulation spacer ring 16.
The both ends of the elongate holes are circular arc type.
The clamp is bolted in fixed seat.
Claims (3)
1. a kind of filament clamping structure of ion source arc chamber, it is characterised in that：Source body cavity is set above round base, in the body cavity of source
Heating crucible is set, and the top of source body cavity is arranged arc chamber, filament is arranged in arc chamber and reflecting plate, the top of arc chamber are
Emit panel；Fixed seat is arranged in the outer wall of the source body cavity, and filament folder is fixed on by the fixed seat on the body cavity of source；The lamp
Setting elongate holes and filament mounting hole on the clamp of silk folder are arranged to the upper end of clamp from elongate holes and slot, elongate holes
Through-hole is set between filament mounting hole；Setting insulation spacer ring, the position for the spacer ring that insulate are corresponding with the through-hole between two filament folders；
The electrode of filament is inserted into the filament mounting hole；Bolt is fastened after passing through the through-hole and insulation spacer ring by nut.
2. the filament clamping structure of ion source arc chamber according to claim 1, it is characterised in that：The two of the elongate holes
End is circular arc type.
3. the filament clamping structure of ion source arc chamber according to claim 1, it is characterised in that：The clamp passes through bolt
It is fixed in fixed seat.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820292335.9U CN207852613U (en) | 2018-03-02 | 2018-03-02 | A kind of filament clamping structure of ion source arc chamber |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820292335.9U CN207852613U (en) | 2018-03-02 | 2018-03-02 | A kind of filament clamping structure of ion source arc chamber |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207852613U true CN207852613U (en) | 2018-09-11 |
Family
ID=63409000
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820292335.9U Active CN207852613U (en) | 2018-03-02 | 2018-03-02 | A kind of filament clamping structure of ion source arc chamber |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207852613U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113838728A (en) * | 2021-09-03 | 2021-12-24 | 奕瑞影像科技成都有限公司 | Ion source filament assembly and welding method thereof |
-
2018
- 2018-03-02 CN CN201820292335.9U patent/CN207852613U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113838728A (en) * | 2021-09-03 | 2021-12-24 | 奕瑞影像科技成都有限公司 | Ion source filament assembly and welding method thereof |
| CN113838728B (en) * | 2021-09-03 | 2024-03-26 | 奕瑞影像科技成都有限公司 | Ion source filament assembly and welding method thereof |
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