CN207852612U - A kind of ion source filament conducting bracket - Google Patents
A kind of ion source filament conducting bracket Download PDFInfo
- Publication number
- CN207852612U CN207852612U CN201820292361.1U CN201820292361U CN207852612U CN 207852612 U CN207852612 U CN 207852612U CN 201820292361 U CN201820292361 U CN 201820292361U CN 207852612 U CN207852612 U CN 207852612U
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- China
- Prior art keywords
- connecting rod
- fixed
- conducting
- connect band
- rod
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Abstract
The utility model discloses a kind of ion source filament conducting bracket, including connecting rod, connect band, conducting rod, and electrode hole is arranged in the connecting rod top, and the electrode of filament is inserted into the electrode hole；The lower part of connecting rod and the top of connect band are fixed, and the lower part of connect band and the top of conducting rod are fixed, and the lower part of conducting rod is fixed on round base；The connecting rod is fixed on by fixed seat on the body cavity of source；Circular cylindrical cavity is arranged in the lower part of connecting rod, and guide post is embedded in the cylindrical cavity body, and the lower end of guide post is inserted into the sliding cavity on conducting rod top；The length of connect band be more than connecting rod between conducting rod at a distance from.The utility model has the advantages that：As a result of split type structure, connecting rod is fixed on and reduces the change in size that temperature band is come on the side wall of source body cavity；And the setting of guide post ensure that the coaxial of connecting rod and conducting rod, since connecting rod is fixed on the body cavity of source, conducting rod is fixed on round base, therefore ensure that the radial position of source body cavity is fixed.
Description
Technical field
The utility model is related to semiconductor equipment technology, specifically a kind of ion source.
Background technology
Ion source is by pressurizeing to arc chamber main cathode, the inert gas for being filled with arc chamber being ionized into through glow discharge
Plasma draws positively charged ion beam through ion-optic system, by downstream neutralization cathode to ion beam emittance with
The electron stream of beam current equivalent carries out charging neutrality, generates the neutral ion beam of high energy and high speed.
The top of arc chamber is transmitting panel, emits the centrally disposed bar-shaped trough of panel, gas is from the side plate of arc chamber
Gas access enter after, formed plasma after being ionized by filament (filament), most the transmitting panel output through top afterwards；
The filament fixed form of the prior art is generally inserted into using by the electrode of filament in the filament hole on conducting bracket, and conducting bracket is solid
It is scheduled on the outside of source body cavity；When due to work, the extreme temperatures of source body cavity cause the size of conducting bracket to change, in turn
The positioning for affecting filament, finally affects ionization effect.
Invention content
In order to solve the above technical problems, the purpose of this utility model is to provide a kind of conducting bracket, can effectively solve above-mentioned
Technical problem.Specific technical solution is as follows：
A kind of ion source filament conducting bracket, including connecting rod, connect band, conducting rod, the connecting rod top setting electricity
The electrode in pole hole, filament is inserted into the electrode hole；The lower part of connecting rod and the top of connect band are fixed, the lower part of connect band with
The top of conducting rod is fixed, and the lower part of conducting rod is fixed on round base；The connecting rod is fixed on source body by fixed seat
On chamber；Circular cylindrical cavity is arranged in the lower part of connecting rod, and guide post is embedded in the cylindrical cavity body, and conducting rod is inserted into the lower end of guide post
In the sliding cavity on top；The length of connect band be more than connecting rod between conducting rod at a distance from.
The connect band is arc.
The arc of the connect band sheet.
The utility model has the advantages that：As a result of split type structure, connecting rod is fixed on the side wall of source body cavity,
Therefore, the position of connecting rod is fixed；The material of connecting rod is molybdenum, and the material of connect band is silver, in this way, small by varying with temperature
Material is arranged on the body cavity of source and is directly fixed with filament, reduces the change in size that temperature band is come；And the setting of guide post ensures
Connecting rod is coaxial with conducting rod, and since connecting rod is fixed on the body cavity of source, conducting rod is fixed on round base, therefore
It ensure that the radial position of source body cavity is fixed.
Description of the drawings
Fig. 1 is the overall structure diagram of ion source；
Fig. 2 is the structural schematic diagram of conducting bracket；
In figure, 1 is round base, and 2 be source body cavity, and 3 be arc chamber, and 4 be transmitting panel, and 5 be bar-shaped trough, 6 for gas into
Mouth end, 7 be positioning convex platform, and 8 be tension spring, and 9 be fixed link, and 10 be filament support, and 11 be fixed seat, and 12 be connecting rod, and 13 be to lead
Electric pole, 14 be connect band, and 15 be guide post.
Specific implementation mode
The utility model is illustrated below in conjunction with the accompanying drawings, as shown, source body cavity 2, source body is arranged in 1 top of round base
Heating crucible is set in chamber 2, and arc chamber 3 is arranged in the top of source body cavity 2, and the top of arc chamber 3 is transmitting panel 4；The source
Positioning convex platform 7 is arranged in the top of body cavity, and through-hole is arranged on the positioning convex platform 7, and fixed link 9 passes through the through-hole, fixed link 9
Top hook is pressed in the top of transmitting panel 4, and the lower section of fixed link 9 is connect with tension spring 8, and tension spring 8 is fixed on round base 1；
The fixed link 9 is multiple, and the longitudinal axis along transmitting panel 4 is symmetrical arranged.
Conducting bracket 10 includes connecting rod 12, connect band 14, conducting rod 13, and electrode hole is arranged in 12 top of the connecting rod,
The electrode of filament is inserted into the electrode hole；The lower part of connecting rod 12 and the top of connect band 14 are fixed, the lower part of connect band 14
It is fixed with the top of conducting rod 13, the lower part of conducting rod 13 is fixed on round base 1；The connecting rod 14 passes through fixed seat 11
It is fixed on source body cavity 2；Circular cylindrical cavity is arranged in the lower part of connecting rod 12, and guide post 15 is embedded in the cylindrical cavity body, guide post
15 lower end is inserted into the sliding cavity on 13 top of conducting rod；The length of connect band be more than connecting rod between conducting rod at a distance from.
The connect band is arc.
The arc of the connect band sheet；The benefit of the structure is can to reduce deformation due to connect band to connecting rod and lead
Influence caused by electric pole, and ensure that the radial position of source body cavity is stablized.
Claims (3)
1. a kind of ion source filament conducting bracket, it is characterised in that：Including connecting rod, connect band, conducting rod, in the connecting rod
Electrode hole is arranged in portion, and the electrode of filament is inserted into the electrode hole；The lower part of connecting rod and the top of connect band are fixed, connect band
Lower part and the top of conducting rod fix, the lower part of conducting rod is fixed on round base；The connecting rod is solid by fixed seat
It is scheduled on the body cavity of source；Circular cylindrical cavity is arranged in the lower part of connecting rod, and guide post is embedded in the cylindrical cavity body, and the lower end of guide post is inserted
In the sliding cavity for entering conducting rod top；The length of connect band be more than connecting rod between conducting rod at a distance from.
2. ion source filament conducting bracket according to claim 1, it is characterised in that：The connect band is arc.
3. ion source filament conducting bracket according to claim 2, it is characterised in that：The arc of the connect band sheet.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820292361.1U CN207852612U (en) | 2018-03-02 | 2018-03-02 | A kind of ion source filament conducting bracket |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820292361.1U CN207852612U (en) | 2018-03-02 | 2018-03-02 | A kind of ion source filament conducting bracket |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207852612U true CN207852612U (en) | 2018-09-11 |
Family
ID=63408988
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820292361.1U Active CN207852612U (en) | 2018-03-02 | 2018-03-02 | A kind of ion source filament conducting bracket |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207852612U (en) |
-
2018
- 2018-03-02 CN CN201820292361.1U patent/CN207852612U/en active Active
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