JP4407552B2 - High pressure mercury lamp - Google Patents

Description

  The present invention relates to a short arc type high-pressure mercury lamp used in the photochemical industry field, semiconductor device manufacturing field, and the like, and more particularly to a high-pressure mercury lamp having a sealing structure suitable for a large current.

  High-pressure mercury lamps are generally widely used in fields that use ultraviolet rays emitted from the lamps, that is, in the photochemical industry, semiconductor device manufacturing, and other fields.

  The high-pressure mercury lamp used in the above technical field has a large amount of mercury, which is the main component of light emission, and therefore has a very high gas pressure inside the arc tube when it is turned on, and also generates a large amount of heat. For this reason, it has been required that the heat resistance and pressure resistance of the hermetic sealing tube portion be particularly large. For this reason, high pressure mercury lamps employ a so-called foil seal structure using metal foil.

  Examples of the technology related to the foil seal structure include those described in Japanese Utility Model Laid-Open No. 6-60960 and Japanese Patent Laid-Open No. 10-284001. A high-pressure mercury lamp according to these will be described with reference to the drawings. FIG. 5 is a schematic cross-sectional view of the high-pressure mercury lamp, and FIG. 6 is an enlarged cross-sectional view of the sealing tube portion 11a shown in FIG. Sealing tube portions 11 a and 11 b are connected to both ends of the arc tube 1, and a pair of electrodes 2 a and 2 b are disposed to face each other in the arc tube 1. The core rod 3a having the electrode 2a at the tip thereof is supported by a holding cylinder 4a which is a quartz glass tube for fixing the core rod disposed inside the sealing tube portion 11a. The disc-shaped first current collecting plate 5a is disposed along the arc tube side front end surface of the cylindrical glass member 7a, has a through hole 51a in the center of the end surface, and inserts the core rod 3a. The core rod 3a is welded. Further, the glass member 7a is disposed in contact with the glass member side end surface 52a of the first current collecting plate 5a, a tapered portion 73a is formed around the arc tube side end portion, and the glass member 7a is formed at the center of the arc tube side end surface. One fitting insertion hole 71a is formed in the axial direction, and a second fitting insertion hole 72a is formed in the axial direction at the center of the end face on the outer lead bar side. The core rod 3a is inserted into the first insertion hole 71a of the glass member 7a at the rear end. The outer lead rod 9a is inserted into the second insertion hole 72a of the glass member 7a at the tip.

  The electrode 2a passes through the first current collecting plate 5a, the metal foil 6a, and the second current collecting plate 8a from the core 3a and is electrically connected to the external lead rod 9a. The core rod 3a following the electrode 2a is electrically welded to the first current collector plate 5a. A metal foil 6a extending along the axial direction is disposed on the outer peripheral surface of the glass member 7a. The metal foil 6a is welded to the second current collector plate 8a at the end surface on the external lead bar side, and is welded to the side surface 53a of the first current collector plate 5a at the end surface on the arc tube side. The glass member 7a is connected to the second current collector plate 8a and the external lead rod 9a at the end face of the external lead rod. In addition, since the sealing tube part 11b of the electrode 2b arranged oppositely is the same structure, description was abbreviate | omitted.

By the way, in an apparatus used in the photochemical industry field, the semiconductor device manufacturing field, etc., an improvement in processing capability is required, and a quick start-up of the entire apparatus is required. In a high-pressure mercury lamp that is a light source, early transition to steady lighting is required at the start of lighting. For this purpose, it is desired that mercury sealed in the arc tube of the high-pressure mercury lamp completely evaporates to reach thermal equilibrium and quickly shift to a steady state. However, if there is a portion where the temperature is difficult to rise on the inner surface of the lamp arc tube, liquid mercury accumulates therein and does not evaporate, so that the time until the steady state is reached becomes longer. In particular, the arc tube side end surface 41a of the holding cylinder 4a does not reach the radiant heat from the discharge space due to being blocked by the electrode 2, and convective heat transfer from the gas enclosed in the arc tube is also compared to the arc tube center. Since the holding cylinders 4a and 4b are small and have a large heat capacity, they are heated mainly by heat conduction from the core rods 3a and 3b and the first current collector plates 5a and 5b, so that the temperature rise is slow. Further, when the lamp is used with the electrode 2a facing upward, the holding cylinder 4a facing downward, or the electrode 2b facing upward and the retaining cylinder 4b facing downward, immediately after the lamp is turned on, Liquid mercury is accumulated in the arc tube side end surface 41a or the other arc tube side end surface 41b. In such a case, the temperature rise of the arc tube-side end surface 41a or 41b of the holding cylinder is slow, and a large amount of liquid mercury accumulated therein is delayed in evaporation, so that it takes time to shift to steady lighting. There is a problem.
6-60960 JP-A-10-284001

  In an apparatus used in the photochemical industry field, semiconductor device manufacturing field, etc., it is required to improve the processing capability, and prompt start-up of the entire apparatus is required. For this reason, the high-pressure mercury lamp as a light source is required to make an early transition to steady lighting at the start of lighting.

  Therefore, the present invention has been made to solve the above problems in the sealed tube structure of a high-pressure mercury lamp. That is, an object of the present invention is to provide a high-pressure mercury lamp in which mercury enclosed in the arc tube is smoothly evaporated and the transition to steady lighting is quick.

A pair of electrodes disposed in the arc tube, a core rod having an electrode at the tip, a holding cylinder that supports the electrode and the core rod, and an electrical connection to the core rod that is disposed adjacent to the holding cylinder. In the high pressure discharge lamp comprising a current collector plate, a glass member adjacent to the current collector plate, and a metal foil having a tip connected to the current collector plate, the current collector plate is provided with a protrusion on the glass member side end surface , An air gap is formed between the current collector plate and the glass member .

Furthermore, the invention according to claim 2 is characterized in that the protrusion is provided as a separate member from the current collector plate.

  According to the high-pressure mercury lamp of the present invention, heat transfer to the glass member can be kept low, so that heat transfer to the arc tube side end face region of the holding cylinder can be enhanced. As a result, it is possible to provide a high-pressure mercury lamp that rises quickly, in which the mercury enclosed in the arc tube is smoothly evaporated and the time until the thermal equilibrium is reached is short and the transition to the steady state is made quickly.

  Hereinafter, a configuration of an embodiment of the high-pressure mercury lamp of the present invention will be described in detail with reference to the drawings. 1 is a schematic cross-sectional view of a high-pressure mercury lamp of the present invention, FIG. 2 is an enlarged cross-sectional view of a sealing tube portion 11a shown in FIG. 1, and FIG. 3 shows a configuration example of a first current collector plate 5a shown in FIG. It is a perspective view.

  The high-pressure mercury lamp is configured by connecting a substantially spherical arc tube 1 having a luminous space inside and sealing tube portions 11 a and 11 b to both ends of the arc tube 1. In the arc tube 1, a pair of electrodes 2a and 2b are arranged to face each other. The inside of the sealing tube portion 11a includes a core rod 3a, a holding cylinder 4a, a first current collecting plate 5a, a metal foil 6a, a glass member 7a, a second current collecting plate 8a, and an external lead rod 9a. Is done. The core rod 3a having the electrode 2a in the arc tube 1 at its tip is made of, for example, tungsten and supported by a holding cylinder 4a which is a quartz glass tube for fixing the core rod. The disc-shaped first current collecting plate 5a arranged adjacent to the holding cylinder 4a is made of, for example, molybdenum, arranged along the arc tube side end surface of the columnar glass member 7a, and the center of the end surface The part has a through hole 51a, is inserted into the core rod 3a, is welded to the core rod 3a, and is fixed in the sealed tube portion 11a by being sandwiched between the holding cylinder 4a and the glass member 7a. The glass member 7a is disposed in contact with the glass member side end surface 52a of the first current collecting plate 5a, a tapered portion 73a is formed around the arc tube side end portion, and the first current collector plate 5a has a first portion at the center of the arc tube side end surface. A fitting insertion hole 71a is formed in the axial direction, and a second fitting insertion hole 72a is formed in the axial direction at the center of the end face on the outer lead bar side. The rear end of the core rod 3a is inserted into the first fitting insertion hole 71a of the glass member 7a. Further, the outer lead rod 9a has its tip inserted into the second insertion hole 72a of the glass member 7a.

  The electrode 2a is electrically connected to the external lead rod 9a from the core rod 3a through the first current collecting plate 5a, the metal foil 6a, and the second current collecting plate 8a. The core rod 3a following the electrode 2a is electrically welded to the first current collector plate 5a. A metal foil 6a extending along the axial direction is disposed on the outer peripheral surface of the glass member 7a. The metal foil 6a is welded to the second current collector plate 8a at the end face on the external lead bar side, and the tip of the metal foil 6a is welded to the side face 53a of the first current collector plate 5a on the end face on the arc tube side. In this way, the first current collector plate 5a and the second current collector plate 8a are electrically connected via the metal foil 6a. Further, the glass member 7a is electrically connected to the second current collecting plate 8a and the external lead rod 9a which are arranged adjacent to each other on the end surface on the external lead rod side. Moreover, since the sealing tube part 11b of the electrode 2b arranged oppositely has the same structure, the description is omitted.

  As shown to Fig.3 (a), the current collection board 5a which concerns on this embodiment is provided with the through-hole 51a in the center of the current collection board 5, and the column-shaped digging 511 in the center of the glass member side end surface 52a. Thus, a protrusion 55a is formed on the outer ring of the current collector plate 5a, and a contact portion 56a is provided so that only the protrusion 55a contacts the glass member 7a. Thus, by providing the projection part 55a in the glass member side end surface 52a of the 1st current collecting plate 5a, the space | gap 57a arises between the 1st current collecting plate 5a and the glass member 7a, and 1st The area of the contact portion 56a where the current collecting plate 5a contacts the glass member 7a is reduced, the amount of heat transferred from the first current collecting plate 5a to the glass member 7a is reduced, and the amount of heat transferred to the holding cylinder 4a is increased. It becomes like this. As a result, the temperature of the holding cylinder 4a can be increased faster than before, and the arc tube-side end surface 41a of the holding cylinder 4a, which has been a part of the arc tube 1 that is difficult to warm, The temperature rises rapidly, vaporization of mercury is promoted, the state is shifted to a thermal equilibrium state at an early stage, and the time until the high-pressure mercury lamp reaches a steady state can be shortened. Needless to say, even if the configuration of the current collector plate of the present invention is adopted on the sealed tube portion 11b side, the same effect as that on the sealed tube portion 11a side is obtained.

  Next, FIG. 3B is a perspective view showing another configuration example of the first current collector plate 5a according to another embodiment of the present invention. The first current collector plate 5a shown in the figure is provided with a through hole 51a in the center of the first current collector plate 5a, and a groove 521 is formed in a cross shape on the glass member side end surface 52a. A protruding portion 55a is formed at the outer end of the current collector plate 5a, and a contact portion 56a is provided so that only the protruding portion 55a contacts the glass member 7a. One or more grooves 521 provided in the first current collecting plate 5a may be provided radially on the glass member side end surface 52a from the central portion of the first current collecting plate 5a. The portions 55a may be formed so as to be parallel to each other. Thus, by providing the projection part 55a in the glass member side end surface 52a of the 1st current collecting plate 5a, the space | gap 57a arises between the 1st current collecting plate 5a and the glass member 7a, and 1st The area of the contact portion 56a where the current collecting plate 5a contacts the glass member 7a is reduced, the amount of heat transferred from the first current collecting plate 5a to the glass member 7a is reduced, and the amount of heat transferred to the holding cylinder 4a is increased. It becomes like this. As a result, the temperature of the holding cylinder 4a can be increased faster than before, and the arc tube-side end surface 41a of the holding cylinder 4a, which has been a part of the arc tube 1 that is difficult to warm, The temperature rises rapidly, vaporization of mercury is promoted, the state is shifted to a thermal equilibrium state at an early stage, and the time until the high-pressure mercury lamp reaches a steady state can be shortened. Needless to say, even if the configuration of the current collector plate of the present invention is adopted on the sealed tube portion 11b side, the same effect as that on the sealed tube portion 11a side is obtained.

  Next, FIG. 3C is a perspective view showing another configuration example of the first current collector plate 5a according to another embodiment of the present invention. The first current collector plate 5a shown in the figure has a through hole 51a in the center of the first current collector plate 5a, and the outer end portion 531 of the glass member side end surface 52a is removed, thereby forming a cross shape. A protruding portion 55a is provided by forming a convex portion, and an abutting portion 56a is provided so that only the protruding portion 55a contacts the glass member 7a. One or more convex portions 532 provided on the first current collecting plate 5a may be provided radially on the glass member side end surface 52a from the central portion of the first current collecting plate 5a. The protrusions 55a may be formed so as to be parallel to each other. Thus, by providing the projection part 55a in the glass member side end surface 52a of the 1st current collecting plate 5a, the space | gap 57a arises between the 1st current collecting plate 5a and the glass member 7a, and 1st The area of the contact portion 56a where the current collector plate 5a contacts the glass member 7a is reduced, the amount of heat transferred from the first current collector plate 5a to the glass member 7a is reduced, and the amount of heat transferred to the holding cylinder 4a is increased. To come. As a result, the temperature of the holding cylinder 4a can be increased faster than before, and the arc tube-side end surface 41a of the holding cylinder 4a, which has been a part of the arc tube 1 that is difficult to warm, The temperature rises rapidly, vaporization of mercury is promoted, the state is shifted to a thermal equilibrium state at an early stage, and the time until the high-pressure mercury lamp reaches a steady state can be shortened. Needless to say, even if the configuration of the current collector plate of the present invention is adopted on the sealed tube portion 11b side, the same effect as that on the sealed tube portion 11a side is obtained.

  Next, FIG. 3D is a perspective view showing another configuration example of the first current collector plate 5a according to another embodiment of the present invention. The first current collector plate 5a shown in the figure is provided with a through hole 51a at the center of the first current collector plate 5a, and a plurality of (here, four) protrusions 541 are formed on the glass member side end surface 52a. A contact portion 56a is provided so that only the projection 55a contacts the glass member 7a. Thus, by providing the projection part 55a in the glass member side end surface 52a of the 1st current collecting plate 5a, the space | gap 57a arises between the 1st current collecting plate 5a and the glass member 7a, and 1st The area of the contact portion 56a where the current collector plate 5a contacts the glass member 7a is reduced, the amount of heat transferred from the first current collector plate 5a to the glass member 7a is reduced, and the amount of heat transferred to the holding cylinder 4a is increased. To come. As a result, the temperature of the holding cylinder 4a can be increased faster than before, and the arc tube-side end surface 41a of the holding cylinder 4a, which has been a part of the arc tube 1 that is difficult to warm, The temperature rises rapidly, vaporization of mercury is promoted, the state is shifted to a thermal equilibrium state at an early stage, and the time until the high-pressure mercury lamp reaches a steady state can be shortened. Needless to say, even if the configuration of the current collector plate of the present invention is adopted on the sealed tube portion 11b side, the same effect as that on the sealed tube portion 11a side is obtained.

  FIG. 4 is a cross-sectional view showing the structure of the sealing tube portion 11a in the high-pressure mercury lamp, which is another embodiment of the present invention. As shown in the figure, a metal member 551 that is a donut-shaped disk made of tungsten, for example, is disposed adjacent to the glass member side end surface 52a of the first current collector plate 5a, and further, the arc tube side of the glass member 7a. Arrange along the front end face. The inner diameter of the metal member 551 is larger than the outer diameter of the core rod 3a, and the outer diameter of the metal member 551 is equal to or smaller than the outer diameter of the glass member 7a. An air gap 57a is formed between 7a and 7a. Thus, the protrusion 55a of the first current collector plate 5a may be provided by the metal member 551 which is a separate member. The area of the contact portion 56a where the first current collecting plate 5a comes into contact with the glass member 7a via the metal member 551 is reduced, and the amount of heat transferred from the first current collecting plate 5a to the glass member 7a is reduced. The amount of heat transmitted to the cylinder 4a increases. As a result, the temperature of the holding cylinder 4a can be increased faster than before, and the arc tube-side end surface 41a of the holding cylinder 4a, which has been a part of the arc tube 1 that is difficult to warm, The temperature rises rapidly, vaporization of mercury is promoted, the state is shifted to a thermal equilibrium state at an early stage, and the time until the high-pressure mercury lamp reaches a steady state can be shortened. Needless to say, even if the configuration of the current collector plate of the present invention is adopted on the sealed tube portion 11b side, the same effect as that on the sealed tube portion 11a side is obtained.

  As mentioned above, although embodiment of this invention was described, it can change suitably, without being limited to the said structure. For example, the configuration of the current collector plate of the present invention is not necessarily provided in both the sealed tube portion 11a and the sealed tube portion 11b, and may be formed in only one of them. The core member 3a may be configured not to be inserted into the glass member 3a without forming the first insertion hole 71a at the center of the end face of the glass member 7a on the arc tube side. The tapered portion of the glass member 7a may not be provided, and a cylindrical shape having the same diameter may be formed from the arc tube side end surface to the lead rod side end surface. The connection between the metal foil 6a and the first current collector plate 5a is made at the arc tube side end surface of the first current collector plate 5a by bending the tip of the metal foil 6a to the butt surface 54a of the first current collector plate 5a. It may be welded. In addition, drawing is described in order to demonstrate the relationship of each structural member in an easy-to-understand manner. The thickness of the metal foil 6a, the thickness of the first current collector plate 5a, the second current collector plate 8a, and each configuration The size of the gap between the members is somewhat exaggerated.

  Next, regarding the high pressure mercury lamp having the configuration of the conventional first current collector plate and the high pressure mercury lamp having the configuration of the first current collector plate of the present invention, the end face on the arc tube side of the holding cylinder (4a) ( The time change of the temperature in 41a) was verified. Two high-pressure mercury lamps according to the present invention were used, which were designated as lamp A and lamp B, respectively. The lamp A is a lamp according to FIGS. 1 and 2, and the configuration of the first current collector plate is that in which a cylindrical digging is formed at the center of the glass member side end surface as shown in FIG. It is. Further, the lamp B is the lamp according to FIG. 4, and the protrusion of the first current collector plate is provided as a separate member.

  A high-pressure mercury lamp model according to the present invention used in the experimental example was created under the following conditions and used as lamp A. Encapsulated mercury amount 30mg / cc. The arc tube is made of quartz glass, has a total length of 100 to 160 mm, and a maximum diameter portion outer diameter of 80 to 120 mm. The anode is made of tungsten, has a diameter of 25 to 30 mm, and an overall length of 40 to 60 mm. The cathode is made of tungsten, has a diameter of 15 to 20 mm, and a total length of 30 to 40 mm. The core rod is made of tungsten, has an outer diameter of 8.0 mm, and an overall length of 70 to 100 mm. The holding cylinder is made of quartz glass, has an outer diameter of 13.3 to 29.0 mm, an inner diameter of 8.3 mm, and a total length of 20 mm. The first current collector plate is made of molybdenum, has an outer diameter of 13.3 to 29.0 mm, an overall length of 3 mm, and has a depth of 1.0 mm and a diameter of φ11.3 to 27.0 mm in the center of the glass member side end surface. Is forming. The material of the glass member is quartz glass, the maximum diameter is 13.3 to 29.0 mm, and the total length is 50 mm. The metal foil is made of molybdenum, 5 sheets, 30 μm thick. However, the component is made into the same shape in both sealing part sides.

  The lamp B was under the following conditions. The first current collector plate is made of molybdenum, has an outer diameter of 13.3 to 29.0 mm, and an overall length of 3.0 mm. The metal member (551) is made of molybdenum, has an outer diameter of 13.3 to 29.0 mm, an inner hole diameter of 7.3 to 13.0 mm, and an overall length of 3.0 mm. The other components have the same shape as the lamp A.

  For comparison, in the core rod configuration, the disk-shaped first current collector plate without the configuration of the present invention, except that the outer diameter is 13.3 to 29.0 mm and the total length is 3.0 mm. A lamp C according to the related art having the same configuration as the lamp A was produced.

  When the lamp rated power consumption was 4 kW, 8 kW, and 12 kW, the time change of the temperature of the outer surface of the arc tube (42a) in contact with the arc tube side end of the holding cylinder was measured. The time required to reach 520 ° C., which is the temperature at which all the mercury enclosed in the arc tube of the high-pressure mercury lamp evaporates, was measured as the temperature rise time. Table 1 shows the measurement results of the temperature rise time of lamps A and B, which are high-pressure mercury lamps of the present invention, and lamp C, which is a high-pressure mercury lamp of the prior art.

  Time [sec] required for mercury enclosed in the arc tube to rise to 520 ° C

  Compared with the lamp C, which is a conventional lamp, in the lamp A in which a cylindrical digging is formed in the center of the glass member side end surface of the first current collector plate, the arc tube side end portion of the holding cylinder The temperature rise time of the arc tube outer surface (42a) in contact was 10 to 15% faster, and mercury evaporated more quickly than the conventional high-pressure mercury lamp, resulting in thermal equilibrium and shifting to a steady state. In the lamp B in which the protruding portion of the first current collector plate is provided as a separate member, the temperature rise time of the arc tube outer surface (42a) contacting the arc tube side end of the holding cylinder is 3 to 5% faster. As a result, mercury evaporates more quickly than the high-pressure mercury lamp of the prior art, resulting in thermal equilibrium and shifting to a steady state. As a result, in the lamp A and the lamp B having the configuration of the first current collector plate of the high pressure mercury lamp of the present invention, the rise time of the high pressure mercury lamp is shortened.

The schematic sectional drawing of the high pressure mercury lamp of this invention is represented. Sectional drawing of the sealing tube part of the high pressure mercury lamp of this invention is represented. The perspective view which shows the structural example of the current collecting plate of the high pressure mercury lamp of this invention is represented. Sectional drawing of the sealing tube part of the high pressure mercury lamp of this invention is represented. The schematic sectional drawing of the conventional high pressure mercury lamp is represented. Sectional drawing of the sealing tube part of the conventional high pressure mercury lamp is represented.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Light-emitting tube 2a, 2b Electrode 3a, 3b Core rod 4a, 4b Holding cylinder 5a, 5b 1st current collection board 6a, 6b Metal foil 7a, 7b Glass member 8a, 8b 2nd current collection board 9a, 9b External lead rods 11a and 11b Sealing tube portion 41a Light emitting tube side end surface 42a Light emitting tube outer surface 51a Through hole 52a Glass member side end surface 53a Side surface 54a Abutting surface 55a Protruding portion 56a Abutting portion 57a Air gaps 71a and 71b First insertion Hole 72a, 72b Second fitting insertion hole 73a Tapered portion 511 Dimming 521 Groove 531 Outer end portion 541 Protrusion 551 Metal member

Claims (2)

A pair of electrodes disposed in the arc tube, a core rod having an electrode at the tip, a holding cylinder that supports the electrode and the core rod, and an electrical connection to the core rod that is disposed adjacent to the holding cylinder. In the high pressure discharge lamp comprising a current collector plate, a glass member adjacent to the current collector plate, and a metal foil having a tip connected to the current collector plate, the current collector plate is provided with a protrusion on the glass member side end surface , A high-pressure discharge lamp , wherein a gap is formed between the current collector plate and the glass member . The high-pressure discharge lamp according to claim 1, wherein the protrusion is provided as a separate member from the current collector plate.

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