CN101561218B - 真空氮气烘箱 - Google Patents
真空氮气烘箱 Download PDFInfo
- Publication number
- CN101561218B CN101561218B CN2008103011587A CN200810301158A CN101561218B CN 101561218 B CN101561218 B CN 101561218B CN 2008103011587 A CN2008103011587 A CN 2008103011587A CN 200810301158 A CN200810301158 A CN 200810301158A CN 101561218 B CN101561218 B CN 101561218B
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- CN
- China
- Prior art keywords
- interlayer
- casing
- sidewall
- side wall
- vacuum nitrogen
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 title claims abstract description 63
- 229910052757 nitrogen Inorganic materials 0.000 title claims abstract description 32
- 238000001816 cooling Methods 0.000 claims abstract description 43
- 239000011229 interlayer Substances 0.000 claims abstract description 36
- 238000009413 insulation Methods 0.000 claims abstract description 23
- 239000007789 gas Substances 0.000 claims abstract description 13
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 11
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 5
- 239000000498 cooling water Substances 0.000 description 5
- 239000011889 copper foil Substances 0.000 description 5
- 230000008878 coupling Effects 0.000 description 4
- 238000010168 coupling process Methods 0.000 description 4
- 238000005859 coupling reaction Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 229910000831 Steel Inorganic materials 0.000 description 2
- 230000003064 anti-oxidating effect Effects 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 235000015173 baked goods and baking mixes Nutrition 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005755 formation reaction Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 150000002829 nitrogen Chemical class 0.000 description 1
- 238000006479 redox reaction Methods 0.000 description 1
- 230000009183 running Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
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Abstract
Description
Claims (7)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2008103011587A CN101561218B (zh) | 2008-04-16 | 2008-04-16 | 真空氮气烘箱 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2008103011587A CN101561218B (zh) | 2008-04-16 | 2008-04-16 | 真空氮气烘箱 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101561218A CN101561218A (zh) | 2009-10-21 |
CN101561218B true CN101561218B (zh) | 2010-12-08 |
Family
ID=41220121
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2008103011587A Expired - Fee Related CN101561218B (zh) | 2008-04-16 | 2008-04-16 | 真空氮气烘箱 |
Country Status (1)
Country | Link |
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CN (1) | CN101561218B (zh) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5742114B2 (ja) * | 2010-05-17 | 2015-07-01 | 日産自動車株式会社 | 乾燥方法及び乾燥装置 |
CN102313442A (zh) * | 2010-07-06 | 2012-01-11 | 赵宽 | 锂离子电池极片卷真空干燥箱 |
CN102374771A (zh) * | 2010-08-26 | 2012-03-14 | 昆山大阳机电设备制造有限公司 | 高温无氧化程控烘箱 |
CN101957127A (zh) * | 2010-09-03 | 2011-01-26 | 昆山康和电子科技有限公司 | 真空干燥设备 |
CN101936645B (zh) * | 2010-09-30 | 2013-01-23 | 昆山康和电子科技有限公司 | 真空干燥箱 |
KR101193169B1 (ko) * | 2010-11-16 | 2012-10-19 | 삼성에스디아이 주식회사 | 극판 건조장치 및 방법 |
CN102589265B (zh) * | 2012-02-21 | 2016-01-20 | 山东润工自动化设备有限公司 | 隧道真空干燥设备 |
CN103105050A (zh) * | 2012-11-15 | 2013-05-15 | 昆山市大金机械设备厂 | 温控型烘箱 |
CN103256790B (zh) * | 2013-05-20 | 2015-09-09 | 东莞市科锐机电设备有限公司 | 一种高效恒温速冷真空干燥箱 |
CN105674690A (zh) * | 2016-02-23 | 2016-06-15 | 王亚萍 | 微循环真空二极管干燥箱 |
CN106288721A (zh) * | 2016-08-24 | 2017-01-04 | 桂林浩新科技服务有限公司 | 一种防氧化的汽车零配件烘烤箱 |
CN108895775A (zh) * | 2018-07-11 | 2018-11-27 | 武汉理工大学 | 一种微纳米石英晶体的真空烤箱加热与冷却装置 |
CN109855398A (zh) * | 2019-02-27 | 2019-06-07 | 青岛海汇生物工程有限公司 | 一种用于牡蛎贝壳中提取牛磺酸的真空干燥设备 |
CN116659196B (zh) * | 2023-08-02 | 2023-09-29 | 山东华玺食品科技有限公司 | 一种食品加工用烘干杀菌分类设备 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3111223A1 (de) * | 1981-03-21 | 1982-10-07 | Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh, 6334 Asslar | Vakuum-trockenverfahren |
US5315766A (en) * | 1989-10-27 | 1994-05-31 | Semifab Incorporated | Vapor device and method for drying articles such as semiconductor wafers with substances such as isopropyl alcohol |
US6058625A (en) * | 1997-10-06 | 2000-05-09 | Pharmacopeia Inc. | Rapid drying oven and methods for providing rapid drying of multiple samples |
US6170171B1 (en) * | 1997-12-19 | 2001-01-09 | Wacker-Chemie Gmbh | Vacuum drying of semiconductor fragments |
CN1971841A (zh) * | 2005-11-21 | 2007-05-30 | 大日本网目版制造株式会社 | 基板处理装置 |
CN101047116A (zh) * | 2006-03-31 | 2007-10-03 | 大日本网目版制造株式会社 | 基板处理装置 |
-
2008
- 2008-04-16 CN CN2008103011587A patent/CN101561218B/zh not_active Expired - Fee Related
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3111223A1 (de) * | 1981-03-21 | 1982-10-07 | Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh, 6334 Asslar | Vakuum-trockenverfahren |
US5315766A (en) * | 1989-10-27 | 1994-05-31 | Semifab Incorporated | Vapor device and method for drying articles such as semiconductor wafers with substances such as isopropyl alcohol |
US6058625A (en) * | 1997-10-06 | 2000-05-09 | Pharmacopeia Inc. | Rapid drying oven and methods for providing rapid drying of multiple samples |
US6170171B1 (en) * | 1997-12-19 | 2001-01-09 | Wacker-Chemie Gmbh | Vacuum drying of semiconductor fragments |
CN1971841A (zh) * | 2005-11-21 | 2007-05-30 | 大日本网目版制造株式会社 | 基板处理装置 |
CN101047116A (zh) * | 2006-03-31 | 2007-10-03 | 大日本网目版制造株式会社 | 基板处理装置 |
Also Published As
Publication number | Publication date |
---|---|
CN101561218A (zh) | 2009-10-21 |
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C06 | Publication | ||
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SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C56 | Change in the name or address of the patentee | ||
CP01 | Change in the name or title of a patent holder |
Address after: 518103 Shenzhen Province, Baoan District Town, Fuyong Tong tail Industrial Zone, factory building, building 5, floor, 1 Co-patentee after: Zhending Technology Co., Ltd. Patentee after: Fuku Precision Components (Shenzhen) Co., Ltd. Address before: 518103 Shenzhen Province, Baoan District Town, Fuyong Tong tail Industrial Zone, factory building, building 5, floor, 1 Co-patentee before: Honsentech Co., Ltd. Patentee before: Fuku Precision Components (Shenzhen) Co., Ltd. |
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ASS | Succession or assignment of patent right |
Owner name: STATE GRID TIANJIN ELECTRIC POWER COMPANY Free format text: FORMER OWNER: FUKUI PRECISION ASSEMBLY (SHENZHEN) CO., LTD. Effective date: 20141120 Free format text: FORMER OWNER: ZHENDING TECHNOLOGY CO., LTD. Effective date: 20141120 |
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Free format text: CORRECT: ADDRESS; FROM: 518103 SHENZHEN, GUANGDONG PROVINCE TO: 300010 HEBEI, TIANJIN |
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TR01 | Transfer of patent right |
Effective date of registration: 20141120 Address after: 300010 Tianjin city Hebei District Wujing Road No. 39 Patentee after: State Grid Tianjin Electric Power Company Address before: 518103 Shenzhen Province, Baoan District Town, Fuyong Tong tail Industrial Zone, factory building, building 5, floor, 1 Patentee before: Fuku Precision Components (Shenzhen) Co., Ltd. Patentee before: Zhending Technology Co., Ltd. |
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CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20101208 Termination date: 20200416 |
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CF01 | Termination of patent right due to non-payment of annual fee |