CN101534071A - All solid state high voltage nanosecond pulse power supply - Google Patents

All solid state high voltage nanosecond pulse power supply Download PDF

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CN101534071A
CN101534071A CN200910049032A CN200910049032A CN101534071A CN 101534071 A CN101534071 A CN 101534071A CN 200910049032 A CN200910049032 A CN 200910049032A CN 200910049032 A CN200910049032 A CN 200910049032A CN 101534071 A CN101534071 A CN 101534071A
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switch
voltage
series
capacitor
discharge
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CN101534071B (en
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刘克富
邱剑
王冬冬
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Fudan University
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Fudan University
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Abstract

The invention belongs to the technical field of the power supply, in particular to an all solid state high voltage nanosecond pulse power supply. The power supply is divided into the following two parts: a series voltage booster circuit and a pulse compression circuit, wherein the series voltage booster circuit consists of a series of voltage units which are connected in series to realize the function of voltage boost; each voltage unit is provided with a capacitor connected with a switch which can be connected and disconnected, and capacitors of the series of the voltage units form a capacitor unit; one part in the switch is a charge switch to charge the capacitors in parallel, while the other part is a discharge switch to discharge the capacitors in series; the pulse compression circuit is connected with a magnetic switch in a series connection mode by an energy storage capacitor or a sharpening capacitor. The power supply reduces system volume to connect more voltage units in series, and uses a direct current charge power supply with lower voltage to charge a pulse generator; the adopted switch device generator has longer service life and higher frequency; and the used magnetic switch reduces rise time of voltage pulse output by a Marx circuit, and is free of maintenance and has low failure rate.

Description

All solid state high voltage nanosecond pulse power supply
Technical field
The invention belongs to power technique fields, be specifically related to a kind of all solid state high voltage nanosecond pulse power supply.
Background technology
Many applications all need to produce the pulse power of high-voltage pulse.High current particle beam accelerator, high power pulsed laser, High-Power Microwave, material surface are handled and ion injects, flash X-ray is taken a picture, pulsed plasma discharges and commercial Application etc. is the application example that needs high-voltage pulse.In legacy system, the pulse power uses capacitor, inductor etc. to carry out energy storage, and the method for use cascade or pulse transformer etc. boost, and use trigger tube and thyratron etc. to carry out switch control.
Usually adopt the principle of Marx generator and form the pulse power of the above-mentioned type.The Marx generator is a kind of by a group capacitor charged in parallel is produced then the circuit of high-voltage pulse to these capacitors in series discharges.Figure 1 shows that the example of typical Marx generator.
After capacitor 104 is fully charged, apply trigger impulse voltage can for usually first order ball crack, make first order ball crack puncture, such two capacitors effectively are together in series and cause next stage ball crack to puncture.Very fast, all ball cracks puncture, so capacitor 104 is connected in series and high-voltage pulse is passed to load 108.Usually adopt transformer to capacitor 104 chargings.In some embodiments, the resistance 102 that has replaced charging current limiter and discharge buffer action with inductance.The ball crack can substitute with other gas switchs, as rotary switch, and insufflation switch, thyratron or counterfeit spark switch etc.
The common using gases switch of traditional Marx generator though quite high crest voltage and peak current, switching speed faster can be provided, is all having very big limitation aspect repetition rate, stability and life-span, overall system efficiency is also very low.In addition,, make the Marx generator that very large volume and weight be arranged when output voltage reaches hundreds of kilovolts, and have bigger ground connection parasitic capacitance owing to adopt power frequency charging device and bigger current-limiting resistance or inductance.Parasitic capacitance can increase the rising/fall time of potential pulse.In order to satisfy the high voltage requirement, adopt transformer oil to insulate usually, this just makes maintenance work become complicated.
Along with the development of power electronics semiconductor solid-state switching device in recent decades and progressively ripe, a lot of researchers both domestic and external begin to develop and adopt the high-voltage pulse generator of semiconductor switch as main switch.Last century, the nineties just had many scholars to propose the potential solution of the direct serial connection technology of various semiconductor switchs latter stage, and had carried out a large amount of experiments.But more than ten years have gone over still not make a breakthrough, the direct serial connection technology of semiconductor also not seen widespread use in commercial power.The difficult point of the direct serial connection technology of semiconductor switch is that each switching tube opening or the transient state of shutdown moment is all pressed problem, because this problem never is well solved, has restricted its practical application.
The researcher is also arranged with the gaseous state switch in the alternative traditional Marx generator of semiconductor switch, construct a kind of novel Marx generator.The application of semiconductor switch has overcome traditional Marx circuit in some shortcomings aspect repetition rate, stability and life-span, and the transient state that exists when not existing semiconductor switch directly to connect to use is all pressed problem.Also have big gap but semiconductor switch is compared with the gaseous state switch at aspects such as switching speed, through-current capability and withstand voltage levels, therefore can not replace traditional Marx well in most of Application for Field.
Summary of the invention
The object of the present invention is to provide that a kind of volume is little, the life-span is long, failure rate is low, pulse duration and amplitude are easy to adjust, rising edge is less than all solid state high voltage pulse powers of 100 nanoseconds.
The all solid state high voltage nanosecond pulse power supply that the present invention proposes is divided into following two parts: series connection booster circuit and narrowing circuit.Wherein, the series connection booster circuit is connected in series by a series of voltage cell and forms, and realizes boost function.Each voltage cell comprises the capacitor that is connected with the switch that can turn on and off (such as the classes of semiconductors switch); The capacitor of a series of voltage cell forms a capacitor group; Adopt a part (being called charge switch) in the above-mentioned switch to the capacitor charged in parallel, another part (being called discharge switch) makes the capacitors in series discharge; Narrowing circuit is made of in the mode that is connected in series intermediate energy storage electric capacity (or sharpening capacitor) and magnetic switch (saturable reactor just), can further reduce to connect rise time of potential pulse of booster circuit output, play the effect of pulse compression.
In series connection booster circuit when work, if be in charged state, discharge switch all turn-offs, and charge switch is all connected, for the capacitor of each voltage cell provides charging current.If be in discharge condition, discharge switch is all connected, and charge switch all turn-offs, the capacitors in series of each voltage cell that the has been full of electricity output voltage pulse of getting up.Such advantage is, can reduce system bulk, thereby reduce some parasitic capacitance relevant with traditional Marx generator to the capacitor charging under the situation of not using inductor, resistor.
By the diode that is connected with each voltage cell, can form the path of charging current of condenser, and can be under the situation that some discharge switches lost efficacy bypass correspondent voltage unit, make system still can export the potential pulse that peak value reduces.When capacitor was charging or be charged, the discharge switch between the continuous electric container was in off state to prevent discharge.When discharge switch was connected, capacitors in series connected and discharge.At interdischarge interval, charge switch turn-offs.For capacitor is charged once more, discharge switch disconnects and charge switch recloses.
The potential pulse of series connection booster circuit output is delivered to above the intermediate energy storage electric capacity (or sharpening capacitor) of narrowing circuit, just middle storage capacitor (or sharpening capacitor) is charged.The capacity of intermediate energy storage electric capacity equals the equivalent capacity after each the cell capacitance series connection of Marx generator, the whole energy in its store M arx generator; The capacity of sharpening capacitor is much smaller than the equivalent capacity of Marx generator, so a storage area energy.When charging proceeds to a certain moment, the saturable reactor that is connected with intermediate energy storage electric capacity (or sharpening capacitor) is by the insatiable hunger state and become saturation condition, thereby has finished magnetic switch from being disconnected to the transformation of connection.Then intermediate energy storage electric capacity (or sharpening capacitor) by the magnetic switch connected to load discharge.Intermediate energy storage electric capacity discharges whole energy of storage, sharpening capacitor then with the Marx generator together to load discharge.In the previous case, the width of system's output voltage pulse is determined jointly by narrowing circuit and load characteristic; Under latter event, the rising edge of narrowing circuit decision potential pulse, the duration of Marx circuit decision potential pulse.Under the situation of appropriate design, the speed of opening of magnetic switch is compared fast a lot with the semiconductor switch that identical electric pressure series connection is used, therefore can shorten the rise time of the potential pulse of aforementioned series connection booster circuit output, from dropping in 100 nanoseconds hundreds of nanosecond even number microsecond.In addition, higher through-current capability of magnetic switch and the withstand voltage level deficiency that also remedied the pulse of simple dependence semiconductor switch output voltage.
Can adjust the amplitude of output voltage pulse by the operating state of certain or certain several voltage cell in the control series connection booster circuit, and the passages through which vital energy circulates punching press is contracted, and can not be a greater impact after the circuit compression rise time of potential pulse.That is to say, one or more voltage cell is not worked, thereby do not influencing the amplitude that changes potential pulse under the situation that produces the potential pulse ability.Simultaneously, the inefficacy of certain or certain several unit can not stop pulse generator to produce pulse.
When the electric capacity of narrowing circuit was sharpening capacitor, the ON time that changes semiconductor switch in the Marx generator can be adjusted the width of output voltage pulse.
Because the employing of technique scheme, the present invention compared with prior art has following advantage:
Save reactor, resistor general in traditional Marx pulse generator, replaced semiconductor switch device.This method has reduced system bulk, has reduced the influence of parasitic capacitance.
Reducing of system bulk, the feasible more voltage cell of can connecting, thus therefore can the lower dc charging power supply paired pulses generator charging of working voltage produce potential pulse greatly.
With respect to traditional Marx generator, the generator life-span of employing semiconductor switch device is longer, operating frequency is higher.
The inefficacy of certain or certain several voltage cell can not stop pulse generator to produce pulse in the system.
There is narrowing circuit in system in output stage, with the output pulse of magnetic switch compression semiconductor Marx generator.The speed of opening of magnetic switch is compared fast a lot with the semiconductor switch that identical electric pressure series connection is used, therefore can shorten the rise time of the potential pulse of semiconductor Marx circuit output, from dropping in 100 nanoseconds hundreds of nanosecond even number microsecond.
Magnetic switch has stronger through-current capability and higher withstand voltage grade, has remedied the deficiency of simple dependence semiconductor switch output voltage pulse.In addition, magnetic switch is non-maintaining substantially, and failure rate is extremely low.
By the conducting and the shutoff of semiconductor switch in the control system, can change the amplitude and the pulsewidth of output voltage pulse easily.
Description of drawings
Fig. 1 is the circuit structure of typical Marx generator;
Wherein: 100-Marx generator; 102-charging resistor; 104-capacitor; 106-ball crack; 108-load; 110-charging voltage.
Fig. 2 is the general structure block diagram of all solid state high voltage nanosecond pulse power supply;
Wherein: 200-pulse power system; 202-switched capacitor bank; 204-narrowing circuit; 206-load; 208-switch driver; 210-control signal; 212-voltage cell; 214-semiconductor switch; 216-intermediate energy storage electric capacity; 218-magnetic switch.
Fig. 3 is the execution mode block diagram of all solid state high voltage nanosecond pulse power supply;
Wherein: 300-pulse power system; 302-DC power supply; 304,306 and 308-switch drive; 310,312 and 314-charge switch; 316,318 and 320-switch drive; 322,324 and 326-discharge switch; 328 and 330-charging current loop; 332,334 and 336-capacitor; 338,340 and 342-diode; 344-intermediate energy storage electric capacity (or sharpening capacitor); 346-magnetic switch; 348-load.
Fig. 4 is the execution mode block diagram of all solid state high voltage nanosecond pulse power supply of generation negative voltage pulse;
Wherein: 400-pulse power system; 402-DC power supply; 404,406 and 408-switch drive; 410,412 and 414-charge switch; 416,418 and 420-switch drive; 422,424 and 426-discharge switch; 428,430 and 432-capacitor; 434,436 and 438-diode; 440-intermediate energy storage electric capacity (or sharpening capacitor); 442-magnetic switch; 444-load; 446,448 and 450-voltage cell.
Fig. 5 is the execution mode block diagram of all solid state high voltage nanosecond pulse power supply of generation positive voltage pulse;
Wherein: 500-pulse power system; 502-DC power supply; 504,506 and 508-switch drive; 510,512 and 514-charge switch; 516,518 and 520-switch drive; 522,524 and 526-discharge switch; 528,530 and 532-capacitor; 534,536 and 538-diode; 540-intermediate energy storage electric capacity (or sharpening capacitor); 542-magnetic switch; 544-load.
Embodiment
The present invention relates to be used to produce the system and method for potential pulse.The present invention can control the amplitude of potential pulse, the duration of potential pulse, and make the rise of output voltage edge less than 100 nanoseconds.
Comprise a series of voltage cell in the embodiments of the present invention, and be used for the intermediate energy storage capacitor (or sharpening capacitor device) and the magnetic switch of compression pulse with series capacitors and switch.Charge switch in each voltage cell provides path for the charging current that applies by diode.The advantage of sort circuit structure is to adopt reactor general in traditional pulse generator, resistor and power frequency charge power supply, can export the potential pulse with fast rise edge simultaneously.In addition, system bulk reduce to have reduced the ground connection parasitic capacitance relevant with system and method described here, this makes the more voltage cell of can connecting.
Fig. 2 illustrates and is used to produce and to the pulse generator of load transferring high voltage pulse or the general structure block diagram of system.
Particularly, pulse current 200 produces and to load 206 transferring high voltage pulses.In system 200, switched capacitor bank 202 is connected by the mode of semiconductor switch 214 with (during charging) in parallel or series connection (during discharge) by a plurality of voltage cell 212.Voltage cell 212 is used to store the potential pulse that passes to narrowing circuit 204.Narrowing circuit 204 is made of intermediate energy storage electric capacity (or sharpening capacitor) 216 and magnetic switch 218 series connection.
Voltage cell 212 is connected with the semiconductor switch of controlling by switch driver 208 214 usually.By the control signal of by-pass cock driver 208, switch driver 208 opening/closing semiconductor switchs 214.State decision voltage cell 212 chargings of semiconductor switch 214 are still to narrowing circuit 204 discharges.In concrete enforcement, thus such structure decrease the influence of the parasitic capacitance more voltage cell of can connecting.The more voltage cell owing to can connect, 212 chargings produce big potential pulse to voltage cell thereby therefore can use lower direct voltage.The all or part of energy that intermediate energy storage electric capacity (or sharpening capacitor) 216 transmitted during with voltage cell 212 discharged in series temporarily stores, and the compression through magnetic switch 218 is delivered to load 206.In concrete enforcement, this method has remedied slow, the electric current smaller defect of the high-voltage pulse rising edge of exporting when using semiconductor switch to make discharge switch.
In the execution mode of system 200, the state by control switch 214 carries out charged in parallel and makes the voltage cell discharged in series voltage cell.An advantage of system 200 is can not stop this system to load 206 transferring high voltage pulses under the situation of the discharge switch inefficacy in one or more voltage cell 212 and the semiconductor switch 214.Owing to the characteristic of magnetic switch, can make system under the situation that output voltage reduces, the rising edge of a pulse that is similar to when still keeping with rated voltage output.System's 200 transmission positive voltage pulses or transmission negative voltage pulse.
Fig. 3 illustrates the execution mode of high-voltage pulse generator.Comprise three voltage cell in this execution mode, but as mentioned above, those of ordinary skill in the art should be realized that, can comprise more or less level.
To capacitor 332,334 and 336 chargings the time, by the control signal of switch drive 308,306 and 304, charge switch 310,312 and 314 is in on-state; By the control signal of switch drive 320,318 and 316, discharge switch 322,324 and 326 is in off state.Path 328 expression is from the current path that capacitor 336 is charged of DC power supply 302.Simultaneously, DC power supply 302 by path 330 transmission currents so that capacitor 334 is charged.To the electric current of capacitor 332 charging flow through charge switch 314,312 and 310 and diode 342,340 and 338.Diode 342,340 and 338 is opened the high-voltage pulse and the isolated from power of interdischarge interval generation.Simultaneously, described diode allows pulse to walk around the voltage cell of any inefficacy.
At the capacitor interdischarge interval,, make charge switch 310,312 and 314 be in off state and discharge switch 322,324 and 326 is in on-state by applying corresponding switch drive.Like this, each voltage cell intermediate energy storage electric capacity (or sharpening capacitor) 344 chargings in the paired pulses compressor circuit that are connected in series.After capacitor 344 chargings are finished, magnetic switch 346 saturation conductions, 344 pairs of loads of capacitor, 348 discharges form high-voltage pulse.
Magnetic switch 346 is applied in here, has not only that switching speed is fast, through-current capability is strong and the withstand voltage advantages of higher, can also realize high repetition frequency (greater than 1000Hz) and long-life operation (stable 10 a powers pulse that produces above 10).
Fig. 4 expresses the block diagram of the pulse generator that comprises a plurality of voltage cell (also being referred to as level or part).The execution mode of pulse generator shown in Figure 4 is used for producing negative voltage pulse.Comprise three voltage cell in this execution mode, but as mentioned above, those of ordinary skill in the art should be realized that, can comprise more or level still less.Fig. 4 illustrates the charge switchs 414,412 of employing by switch drive 404,406 and 408 controls and 410 and discharge switches 426,424 by control switch 416,418 and 420 controls and 422 voltage cell 450,448 and 446 that are connected in mode as mentioned above, and Fig. 4 also shows intermediate energy storage electric capacity (or sharpening capacitor) 440 and magnetic switch 442.
In this embodiment, switch 410,412 and 414 and switch 422,424 and 426 can be the semiconductor switch of any type as known in the art.Triode thyristor (SCR), dipole electric power triode (BJT), power field effect pipe (Power MOSFET), insulated gate bipolar transistor npn npn (IGBT), static induction transistor (SIT), static induction thyristor (SITH), gate turn off thyristor (GTO) etc. are the embodiment of available switch here.Each voltage cell comprises the switch drive that is used to control the switch drive of charge switch and controls discharge switch.For example, voltage cell 446 comprises the switch drive 416 that is used to control discharge switch 426.In this embodiment, control the grid of discharge switches 426 by switch drive 416.The grid of switch drive 404 control charge switchs 414.
DC power supply 402 by charge switch 410,412 and 414 and 434,436 and 438 pairs of capacitors 432,430 and 428 of diode charge.Charge in this mode and can use inductor, resistor or isolated supplies general in traditional Marx generator.Switch can be by such as optical fiber coupling, the transformer coupled triggering.
Can under the situation of delay can't be connected or exist to the switch of specific voltage unit, provide the current path of walking around this specific voltage unit by diode 434,436 and 438 diode chain that constitute of series connection, guarantee to still have potential pulse output.
When making magnetic switch, should select the core material that magnetic hysteresis loop rectangle characteristic is good, saturation flux is big, soft magnetic characteristic is good and high-frequency loss is little.Usually there is this different materials of ferrite, amorphous alloy and nanometer crystal alloy available
Fig. 5 illustrates the another kind of execution mode of pulse generator.Fig. 5 is similar to pulse generator shown in Figure 4, and the difference of the two existence is that the pulse generator of Fig. 5 produces positive pulse and the pulse generator generation negative pulse of Fig. 4.Fig. 5 compares with Fig. 4 on circuit structure, has changed the polarity of charge power supply, has changed the direction of charge switch, discharge switch and diode chain.

Claims (2)

1. an all solid state high voltage nanosecond pulse power supply is characterized in that being divided into following two parts: series connection booster circuit and narrowing circuit; Wherein, the series connection booster circuit is connected in series by a series of voltage cell and forms, and realizes boost function; Each voltage cell has a capacitor that is connected with the switch that can turn on and off, and the capacitor of a series of voltage cell forms a capacitor group; Part in the above-mentioned switch is called charge switch, and to the capacitor charged in parallel, another part is called discharge switch, makes the capacitors in series discharge; Narrowing circuit is made of in the mode that is connected in series intermediate energy storage electric capacity or sharpening capacitor and magnetic switch;
In series connection booster circuit when work, if be in charged state, discharge switch all turn-offs, and charge switch is all connected, for the capacitor of each voltage cell provides charging current; If be in discharge condition, discharge switch is all connected, and charge switch all turn-offs, the capacitors in series of each voltage cell that the has been full of electricity output voltage pulse of getting up;
The diode that is connected with each voltage cell forms the path of charging current of condenser, and under the situation that some discharge switches lost efficacy bypass correspondent voltage unit, make system still can export the potential pulse that peak value reduces; When capacitor was charging or be charged, the discharge switch between the continuous electric container was in off state to prevent discharge; When discharge switch was connected, capacitors in series connected and discharge; At interdischarge interval, charge switch turn-offs; For capacitor is charged once more, discharge switch disconnects and charge switch recloses;
The potential pulse of series connection booster circuit output is delivered to above the intermediate energy storage electric capacity of narrowing circuit, to middle storage capacitor charging; Intermediate energy storage electric capacity by the magnetic switch connected to load discharge.
2. all solid state high voltage nanosecond pulse power supply according to claim 1, it is characterized in that switched capacitor bank (202) by a plurality of voltage cell (212) by semiconductor switch (214) with parallel connection) or the series connection mode connect; Voltage cell (212) is used for storing the potential pulse that passes to narrowing circuit (204); Narrowing circuit (204) is by intermediate energy storage electric capacity or sharpening capacitor (216) and magnetic switch (218) series connection formation;
Voltage cell (212) is connected with the semiconductor switch of controlling by switch driver (208) (214); The control signal of by-pass cock driver (208), switch driver (208) opens or closes semiconductor switch (214); State decision voltage cell (212) charging of semiconductor switch (214) is still discharged to narrowing circuit (204).
CN200910049032A 2009-04-09 2009-04-09 All solid state high voltage nanosecond pulse power supply Expired - Fee Related CN101534071B (en)

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