CN100399692C - Ultra-low repeated frequency high-voltage rectangular pulse power supply - Google Patents
Ultra-low repeated frequency high-voltage rectangular pulse power supply Download PDFInfo
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- CN100399692C CN100399692C CNB2005100457272A CN200510045727A CN100399692C CN 100399692 C CN100399692 C CN 100399692C CN B2005100457272 A CNB2005100457272 A CN B2005100457272A CN 200510045727 A CN200510045727 A CN 200510045727A CN 100399692 C CN100399692 C CN 100399692C
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Abstract
The present invention provides a power supply capable of outputting ultra-low repeated frequency high-voltage rectangular-wave pulse, which can meet polarized requirements of nonlinear crystal materials of various kinds of thickness. A stepping motor drives a rotary frisbee type mechanical spark switch to form an electric copper, and the output voltage of the direct-current high-voltage power supply is converted into the ultra-low frequency high-voltage rectangular-wave pulse. The power supply of the present invention capable of outputting the high-voltage pulse has the output characteristics that (1) the output pulse amplitude can be adjusted between 2kV and 100kV; (2) the repeated frequency range of the output pulse is 0.5 to 100Hz; (3) the width range of the output pulse is 0.5 ms to 1.9s; (4) the current of the output pulse is larger than 300 microamperes; (5) the flat top drop of the output pulse is less than 2%. With the power supply of the present invention capable of outputting ultra-low frequency high-voltage rectangular-wave pulse, the optimal experimental parameters of the periodic polarization reversal of a nonlinear crystal can be measured, and batch production experiments for ferroelectric domain crystal chips with periodic reversed structures can be performed.
Description
Technical field
The present invention relates to the power supply of a kind of exportable high voltage square wave pulse, can satisfy the needs of all thickness nonlinear crystalline material polarization.
Background technology
The development of Modern Optics Technology has proposed to upgrade higher requirement to laser.Widen the laser output wavelength scope, one of the most frequently used, effective method utilizes the frequency transform techniques of nonlinear crystal exactly.Because nonlinear crystalline material is when carrying out frequency inverted, must satisfy the requirement of this condition of phase matched, at present people's accurate phase matched QPMQuasi-phase-matching technology of utilizing the birefringence phase matched PMPhase Matching technology of aeolotropic crystal birefringent characteristic usually and prepare periodic structure artificially on nonlinear crystal realizes efficient frequency conversion.Because quasi-phase matching has its unique technique advantage, solved the insoluble problem of conventional PM, widen the range of application of nonlinear crystal, greatly improved frequency conversion efficiency, become one of research focus of numerous areas such as nonlinear optical material and solid state laser.
The ferroelectric domain periodic polarization inversion structure of the accurate phase matching non-linear process of employing body material can compensate the phase mismatch between light wave.The extra electric field polarization method is a kind of method that realizes the periodic polarized counter-rotating of ferroelectric ferroelectric domain.The extra electric field polarization method is to utilize matured photoetching process in the semiconductor technology, makes the electrode of some cycles on the nonlinear crystal of poling, applies high voltage electric field at the positive and negative farmland of crystal face then, just can obtain the periodic reversal domain structure.Advantages such as the method has the counter-rotating layer depth, technology is simple and with low cost are that many a kind of methods are used in research at present.Use the extra electric field polarization method and cut LiNbO thick for the Z of 0.25mm
3, LiTaO
3And KTiOPO
4Prepared ferroelectric domain periodic inversion structure on the crystal prototype.
For using the extra electric field polarization method, the performance of high voltage source is extremely important to obtaining desirable periodicity domain structure, and the abundant high voltage source of output waveform is absolutely necessary to the mechanism that research nonlinear crystal electricity causes polarization.Need a kind of pulse duration, repetition rate, all adjustable rectangular pulse power supply of pulse amplitude, its key technical indexes is:
1 pulse amplitude: 2-100kV, 2 frequency range 0.5-100Hz, 3 pulse duration 0.2%-50%T cycles 4 pulse current descends less than 2% greater than 300 microampere of 5 flat-top
In original technology of extra electric field polarization method, power circuit is all realized by electronic device, mainly contains in the method that high-voltage rectangular pulse produces: high-frequency impulse adds the low-frequency pulse modulation, pulse transformer boosts and high reverse withstand voltage switching tube DC chopped-wave.High-frequency impulse adds the method for low-frequency pulse modulation, and power supply output pulse frequency minimum is 75Hz, and the maximum 12kV of output pulse amplitude is in the requirement that is difficult to satisfy the polarization of all size wafer aspect the whole scope of frequency adjustable, the output amplitude adjustable range; The method that pulse transformer boosts, because the electric field polarization method requires the power supply output pulse frequency low, volume of transformer is huge, is difficult for making, impulse waveform is difficult to guarantee requirement simultaneously; The method of high reverse withstand voltage switching tube DC chopped-wave, owing to be subjected to the restriction of existing production technique, the maximum reverse of the switching tube of present commercialization is withstand voltage has only 3kV, therefore output voltage amplitude is restricted, though the reverse withstand voltage height of hydrogen brake pipe, because cost height, and dependence on import, the not meaning of generally promoting.Because the electric field polarization method requires the power supply output pulse frequency low, pulse duration is wide, the pulse amplitude height, flat-top descends little, and all multi-parameters in use need to adjust, and therefore adopt conventional method, not only are difficult to reach the specification requirement of all size wafer polarization, and because the production technique of device is restricted difficult the manufacturing, present this power supply still belongs to blank at home and abroad.
Summary of the invention
In order to overcome boost method and utilize that high reverse withstand voltage switching tube carries out that DC chopped-wave method power volume is big, output high-voltage pulse amplitude is restricted, the technical shortcoming such as realization that is difficult to of conventional pulse transformer, the present invention proposes a kind of ultra-low repeated frequency square wave output high voltage source that nonlinear crystal periodic reversal farmland is made in the extra electric field polarization that can be used for, its output pulse repetition frequency is adjustable in the 0.5-100Hz scope, output voltage can be adjustable in the 2-100kV scope, the linearity of its output high pressure and the requirement that stability all satisfies the electric field polarization method.At LiNbO
3Carried out repeatedly polarization experiment on the crystal, effect is fine.
The technical solution adopted for the present invention to solve the technical problems is, a kind of high-voltage rectangular pulse power supply, comprise: high-voltage DC power supply 2, flying disk type mechanical spark switch 8 and the stepping motor 9 that is used to drive the flying disc low speed rotation as chopper, this power supply also comprises: voltage regulator 1, be used to store the storage capacitor 3 of the output electric energy of high-voltage DC power supply 2, first fixed electrode 4, second fixed electrode 5, first rotating electrode 6, second rotating electrode 7, first wafer 15, second wafer 16, the 3rd wafer 17 and the pulse shaping electric capacity 11 that is used for output pulse waveform is carried out shaping, first wafer 15, second wafer 16, the 3rd wafer 17 is sandwiched between two metal thick cyclinders 18, the metal thick cyclinder 18 and first wafer 15, second wafer 16, be provided with O-ring seal 19 between the 3rd wafer 17, be perfused with conducting liquid 20 in the metal thick cyclinder 18, the high-voltage rectangular pulse of high-voltage output terminal 12 outputs is applied to first wafer 15 by conducting liquid 20, second wafer 16, on the 3rd wafer 17, voltage regulator 1 is high-voltage DC power supply 2 power supplies, make the Adjustable Output Voltage of high-voltage DC power supply 2, the output of high-voltage DC power supply 2 is connected to the storage capacitor 3 and first fixed electrode 4, the output electric energy is stored in 3 li of storage capacitors, first fixed electrode 4 and first rotating electrode 6 constitute a gap, second fixed electrode 5 and second rotating electrode 7 constitute a gap, first rotating electrode 6 and second rotating electrode 7 are fixed on the flying disk type mechanical spark switch 8, flying disk type mechanical spark switch 8 is by stepping motor 9 driven rotary, the velocity of rotation of stepping motor 9 is controlled by controller 10, link to each other by lead 22 between first rotating electrode 6 and second rotating electrode 7, horizontal interval angular range between first rotating electrode 6 and second rotating electrode 7 is 18 degree-342 degree, first rotating electrode 6 is connected with pulse shaping electric capacity 11 by metal needle electrode 23 with second rotating electrode 7, pulse shaping electric capacity 11 is connected with high-voltage output terminal 12, high-voltage output terminal 12, first wafer 15, second wafer 16, constitute the loop between the 3rd wafer 17 and the ground electrode 14, storage capacitor 3, first fixed electrode 4, second fixed electrode 5, first rotating electrode 6, second rotating electrode 7, flying disk type mechanical spark switch 8 and pulse shaping electric capacity 11 are sealed in the metallic shield shell 13 and carry out electromagnetic shielding, the pulse amplitude of high-voltage output terminal 12 outputs is 2-100kV, its output range of pulse repetition frequency is 0.5-100Hz, pulse width range is 0.5ms-1.9, and the output voltage of high-voltage DC power supply 2 is 0-100.First rotating electrode 6 and second rotating electrode 7 are installed in the upper and lower faces of flying disk type mechanical spark switch 8 respectively, place, 18 degree angles, every interval, the edge of flying disk type mechanical spark switch 8 is provided with a rotating electrode relative position and adjusts hole 25, and flying disk type mechanical spark switch 8 is made by high voltage insulating materials.
The present invention is applicable to that it is the high-voltage pulse of 24-100kV/mm that periodic polarized counter-rotating experiment of the nonlinear crystal of 0.25mm-1mm thickness range and batch process electric field polarization method require power supply that intensity can be provided.
It is adjustable in the 2-100kV scope that high-voltage DC power supply 2 positive polaritys or negative polarity produce the continuously controllable dc high voltage, set the THICKNESS CALCULATION of the output valve of high direct voltage according to first wafer 15, second wafer 16, the 3rd wafer 17 according to needed pulse amplitude in the use, extra electric field intensity is 24-100kV/mm.The output of high-voltage DC power supply 2 is connected to storage capacitor 3, and the output electrical power storage is in this electric capacity the inside.First fixed electrode 4 and 5 one of second fixed electrodes connect storage capacitor 3, one connects the earth 14, between first rotating electrode 6 and second rotating electrode 7 be communicated with lead 22, first fixed electrode 4, second fixed electrode 5 and first rotating electrode 6, second rotating electrode 7 form two pairs of spark gaps, spark gap is used for 11 chargings of paired pulses shaping electric capacity and to load discharge, spark gap be used to chop output voltage off and release pulse shaping electric capacity 11 and load on electric energy.Storage capacitor 3 is connected to first fixed electrode 4.First rotating electrode 6 and second rotating electrode 7 are fixed on the flying disk type mechanical spark switch 8, be installed in the above and below of flying disk type mechanical spark switch 8 respectively, the position differs certain angle, this angle decision output pulse width, flying disk type mechanical spark switch 8 are driven by stepping motor 9 and horizontally rotate.Rotating electrode is connected with pulse shaping electric capacity 11 and load wafer, when the rotating electrode above being positioned at flying disk type mechanical spark switch 8 turns to and is connected to the approximated position of fixed electrode of storage capacitor 3, air breakdown takes place, the gap conducting, storage capacitor 11 paired pulses shaping electric capacity and load discharges.When the rotating electrode below being positioned at flying disk type mechanical spark switch 8 turns to approximated position of ground connection fixed electrode, air breakdown takes place, the gap conducting, the electric energy in pulse shaping electric capacity 11 and the load is released.What obtain in load like this is the high-voltage pulse of rectangle.
The repetition rate of output high-voltage pulse is by the rotating speed decision of stepping motor 9.Stepping motor 9 is the open loop control elements that electric impulse signal changed into angular displacement or displacement of the lines.The frequency and the umber of pulse of pulse signal are only depended in the rotating speed of stepping motor 9, the position that stops, and are not subjected to the influence of load variations, add a pulse signal promptly for stepping motor 9, and 9 of stepping motors turn over a step angle.Among the present invention, by control unit output pulse signal control step motor 9 low speed rotation, when stopping pulse signal being provided to stepping motor 9, stepping motor 9 is braked rapidly.In this way, realized of the accurate control of high pressure output pulse frequency with the output pulse number.The adjustment of output high-voltage pulse width is realized by the interval angle that changes between first rotating electrode 6 and second rotating electrode 7.Flying disk type mechanical spark switch 8 horizontally rotates, and flying disk type mechanical spark switch 8 is by 20 five equilibriums, and the minimum interval angle between first rotating electrode 6 and second rotating electrode 7 is 18 degree, and the largest interval angle is 342 degree.When output high-voltage pulse repetition rate was 0.5Hz, minimum pulse width was 0.1s, and maximum pulse is 1.9s; When output high-voltage pulse repetition rate was 100Hz, minimum pulse width was 0.5ms, and maximum pulse is 9.5ms.
The course of work of the present invention is: the output voltage of high-voltage DC power supply 2 is adjusted to set point by voltage regulator 1 and is determined pulse amplitude, the velocity of rotation of stepping motor 9 is adjusted to set point by controller 10 and is determined pulse frequency, and the relative position of first rotating electrode 6 and second rotating electrode 7 is adjusted to set point and determined pulse duration.When first rotating electrode 6 turned to first fixed electrode, 4 approximated positions, gap punctured, and dc high voltage is added in the load by gap, pulse shaping electric capacity 11, high-voltage output end 12; When second rotating electrode 7 turned to second fixed electrode, 5 approximated positions of ground connection, gap punctured, and the electric energy in pulse shaping electric capacity and the load is released by gap.Conducting in turn by two gaps applies the rectangle high-voltage pulse in load.
The invention has the beneficial effects as follows that this power supply possesses following characteristics: output pulse amplitude, repetition rate, width, flat-top all can be adjusted as required; The output pulse number can accurately be controlled; Be applicable to 0.25-1mm thickness wafer polarization experiment and batch process; Can realize that two pace pulses trigger inversion technique, promptly, epipole evenly be grown in the low-intensity pulse that continues with broad with the short pulse triggering epipole of hard intensity very.The batch process experiment of ferroelectric domain periodic inversion structured wafer is measured and had to the best experiment parameter that can carry out the periodic polarized counter-rotating of nonlinear crystal, further increases the application of photoparametric amplifier and optical parametric oscillator.
Description of drawings
Fig. 1 is a basic circuit diagram of the present invention.
Fig. 2 embodiments of the invention circuit diagram.
Fig. 3 wafer chuck structure chart of the present invention.
The structural representation of Fig. 4 flying disk type mechanical rotation of the present invention spark switch.
The plan structure schematic diagram of Fig. 5 flying disk type mechanical rotation of the present invention spark switch and rotating electrode relative position figure.
Among the figure: 1, voltage regulator, 2, high-voltage DC power supply, 3, storage capacitor, 4, first fixed electrode, 5, second fixed electrode, 6, first rotating electrode, 7, second rotating electrode, 8, flying disk type mechanical spark switch, 9, stepping motor, 10, controller, 11, pulse shaping electric capacity, 12, high-voltage output terminal, 13, the metallic shield shell, 14, ground electrode, 15, periodicity Al grid electrode, 16, the LiNbO3 crystal, 17, the aluminium film, 18, the metal thick cyclinder, 19, O-ring seal, 20, conducting liquid, 21, metal disk, 22, lead, 23, the metal needle electrode, 24, insulating base, 25, the rotating electrode relative position is adjusted the hole.
Embodiment
In Fig. 1, voltage regulator 1 is high-voltage DC power supply 2 power supplies, makes the Adjustable Output Voltage of high-voltage DC power supply 2.The output of high-voltage DC power supply 2 is connected to the storage capacitor 3 and first fixed electrode 4, and the output electric energy is stored in 3 li of storage capacitors.First fixed electrode 4 and first rotating electrode 6 constitute a gap, and second fixed electrode, 5 ground connection and second rotating electrode 7 constitute a gap.First rotating electrode 6 and second rotating electrode 7 are fixed on the flying disk type mechanical spark switch 8, and flying disk type mechanical spark switch 8 is made by the insulation poly (methyl methacrylate) plate, by stepping motor 9 driven rotary.The velocity of rotation of stepping motor 9 is controlled by controller 10.Link to each other by lead between first rotating electrode 6 and second rotating electrode 7, connect with pulse shaping electric capacity 11 by metal needle electrode 23 simultaneously.Pulse shaping electric capacity is connected to high-voltage output terminal 12, constitutes the loop between high-voltage output terminal 12, load wafer and the ground electrode 14.Storage capacitor 3, first fixed electrode 4 and second fixed electrode 5, first rotating electrode 6 and second rotating electrode 7, flying disk type mechanical spark switch 8, pulse shaping electric capacity 11 are sealed in the metal shell 13, carry out electromagnetic shielding.
In Fig. 2, the rectangle high-voltage pulse is applied on load first wafer 15, second wafer 16, the 3rd wafer 17.Wafer select poling for use Z cut LiNbO
3Crystal at first cleans crystal, the LiNbO after cleaning
3Crystal-the Z face carries out the evaporation of metal A l mask, and its thickness is 200nm.By photoetching technique crystal+the Z surface etch goes out the periodicity Al grid electrode 15 by designed mask plate structure.Therefore, the structure of wafer is+the Al grid electrode 15 of Z face, LiNbO
3Wafer 16 and-the aluminium film 17 of Z face, wafer is of a size of: 40 * 30 * 0.5mm.The rectangle high-voltage pulse of high-voltage output end 12 outputs is applied to the periodicity Al grid electrode 15 of wafer, and aluminium film 17 is connected to ground electrode 14.Because wafer is minimal thickness 0.5mm very, if crystal is applied a lasting high direct voltage, electric spring phenomenon can take place cause crystal to be crashed to pieces, and therefore, for fear of this phenomenon, need apply the rectangle high-voltage pulse of some to crystal.In addition,, prevent that wafer is crashed to pieces, used conducting liquid 20 for the impact of damping discharge to crystal.
Among Fig. 3, the effect of O-ring seal 19 is to be to prevent that the conducting liquid leakage from causing the crystal upper and lower surface to open circuit on the one hand, and the damping discharge prevents that to the impact of wafer wafer is crashed to pieces on the other hand.
Among Fig. 4, the gap between first fixed electrode 4 and first rotating electrode 6 has determined the minimum break-down voltage of spark gap, and among the present invention, the minimum break-down voltage of gap is 2kV, and promptly the minimum pulse peak value that can export of power supply is 2kV.When the gap between first fixed electrode 4 and first rotating electrode 6 was breakdown, the electric energy on the storage capacitor 3 was by first rotating electrode 6, lead 22, metal disk 21 and metal needle electrode 23 paired pulses shaping electric capacity 11 and the discharge of load wafer.Metal needle electrode 8 is fixed on the insulating base 24, and it mainly acts on and is: conduct electrical power supports flying disk type mechanical spark switch 8 on the other hand and does not influence rotation to pulse shaping electric capacity 11 and load on the one hand.Flying disk type mechanical spark switch 8 is made by the insulating material polymethyl methacrylate, and has certain thickness, with the electric insulation that guarantees between low-pressure section stepping motor 9 and high-pressure section first rotating electrode 6 and second rotating electrode 7, lead 22, metal disk 21, the metal needle electrode 23.Flying disk type mechanical spark switch 8 is by the stepping motor driven rotary, in the rotary course between two spark gap first fixed electrodes 4 and first rotating electrode 6, conducting in turn between second fixed electrode 5 and second rotating electrode 7, the rotating speed of flying disk type mechanical spark switch 8 has determined the frequency of output pulse.The width of output pulse realizes that by the relative position of adjusting between first rotating electrode 6 and second rotating electrode 7 18 degree angles, the every interval of the edge of flying disk type mechanical spark switch 8 are provided with an open-work, and promptly first rotating electrode, 6 relative positions are adjusted hole 25.In specific implementation process, second rotating electrode 7 maintains static, and first rotating electrode 6 will insert respectively in the different open-works as required.The minimum planes of first rotating electrode 6 and second rotating electrode 7 angle at interval is 18 degree, and maximum planes angle at interval is 342 degree.When output high-voltage pulse repetition rate was 0.5Hz, minimum pulse width was 0.1s, and maximum pulse is 1.9s; When output high-voltage pulse repetition rate was 100Hz, minimum pulse width was 0.5ms, and maximum pulse is 9.5ms.The high-voltage DC power supply maximum output voltage is 100kV, power 120W.Storage capacitor 3 and pulse shaping electric capacity 11 are selected low inductance, long-life high-voltage pulse capacitor for use, and the capacitance of storage capacitor 3 is selected greater than more than 10 times of pulse shaping capacitor, in 0.5-10 μ F scope.Because the load characteristic of polarized crystal is a capacitive character, therefore, relation between the capacitance of pulse shaping electric capacity 11 and the capacitance of load has determined the size that the output pulse waveform flat-top descends, the capacitance of selecting the former among the present invention is greater than more than 10 times of the latter, under such condition, flat-top descends less than 2%.
Claims (5)
1. high-voltage rectangular pulse power supply, comprise: high-voltage DC power supply (2), flying disk type mechanical spark switch (8) and stepping motor (9), it is characterized in that, this power supply also comprises: voltage regulator (1), storage capacitor (3), first fixed electrode (4), second fixed electrode (5), first rotating electrode (6), second rotating electrode (7), first wafer (15), second wafer (16), the 3rd wafer (17) and pulse shaping electric capacity (11), first wafer (15), second wafer (16), the 3rd wafer (17) is sandwiched between two metal thick cyclinders (18), metal thick cyclinder (18) and first wafer (15), second wafer (16), be provided with O-ring seal (19) between the 3rd wafer (17), be perfused with conducting liquid (20) in the metal thick cyclinder (18), the high-voltage rectangular pulse of high-voltage output terminal (12) output is applied to first wafer (15) by conducting liquid (20), second wafer (16), on the 3rd wafer (17), the output of high-voltage DC power supply (2) is connected on storage capacitor (3) and first fixed electrode (4), first fixed electrode (4) and first rotating electrode (6) constitute a gap, second fixed electrode (5) constitutes a gap with second rotating electrode (7), first rotating electrode (6) and second rotating electrode (7) are fixed on the flying disk type mechanical spark switch (8), flying disk type mechanical spark switch (8) is by stepping motor (9) driven rotary, the velocity of rotation of stepping motor (9) is controlled by controller (10), link to each other by lead (22) between first rotating electrode (6) and second rotating electrode (7), horizontal interval angular range between first rotating electrode (6) and second rotating electrode (7) is 18 degree-342 degree, first rotating electrode (6) is connected with pulse shaping electric capacity (11) by metal needle electrode (23) with second rotating electrode (7), pulse shaping electric capacity (11) is connected with high-voltage output terminal (12), high-voltage output terminal (12), first wafer (15), constitute the loop between second wafer (16) and the 3rd wafer (17) and the ground electrode (14), storage capacitor (3), first fixed electrode (4), second fixed electrode (5), first rotating electrode (6), second rotating electrode (7), flying disk type mechanical spark switch (8) and pulse shaping electric capacity (11) are sealed in the metallic shield shell (13) and carry out electromagnetic shielding, the pulse amplitude of high-voltage output terminal (12) output is 2-100kV, its output range of pulse repetition frequency is 0.5-100Hz, and pulse width range is 0.5ms-1.9s.
2. a kind of high-voltage rectangular pulse power supply according to claim 1 is characterized in that, the output voltage of described high-voltage DC power supply (2) is 0-100kV.
3. a kind of high-voltage rectangular pulse power supply according to claim 1 is characterized in that, described first rotating electrode (6) and second rotating electrode (7) are installed in the upper and lower faces of flying disk type mechanical spark switch (8) respectively.
4. a kind of high-voltage rectangular pulse power supply according to claim 1 is characterized in that, place, 18 degree angle, every interval, the edge of described flying disk type mechanical spark switch (8) is provided with a rotating electrode relative position and adjusts hole (25).
5. according to claim 1 or 4 described a kind of high-voltage rectangular pulse power supplies, it is characterized in that described flying disk type mechanical spark switch (8) is made by high voltage insulating materials.
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| CNB2005100457272A CN100399692C (en) | 2005-01-21 | 2005-01-21 | Ultra-low repeated frequency high-voltage rectangular pulse power supply |
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| CN100399692C true CN100399692C (en) | 2008-07-02 |
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| CN101534071B (en) * | 2009-04-09 | 2012-10-24 | 复旦大学 | All solid state high voltage nanosecond pulse power supply |
| CN102412739B (en) * | 2011-12-08 | 2013-08-28 | 大连理工大学 | Ultra low frequency high-voltage power supply |
| CN107294418B (en) * | 2017-06-29 | 2023-10-03 | 中国工程物理研究院电子工程研究所 | Integrated multipath high-power high-voltage pulse generating device |
| CN108362964A (en) * | 2018-02-09 | 2018-08-03 | 北京京航计算通讯研究所 | A kind of high-voltage square-wave clock of simulation complex electromagnetic environment |
| CN108414894B (en) * | 2018-03-12 | 2020-04-24 | 武汉三相电力科技有限公司 | Travelling wave generating device and controllable travelling wave generating device |
| CN108982412A (en) * | 2018-08-08 | 2018-12-11 | 中国科学院福建物质结构研究所 | A kind of instrument for domain structure real-time detection during Crystal polarization |
| CN109167244A (en) * | 2018-08-14 | 2019-01-08 | 杭州镭克普光电技术有限公司 | A kind of system using chirp domain inversion structures nonlinear crystal improving laser difference frequency medium-wave infrared laser output power |
| CN109374535A (en) * | 2018-10-10 | 2019-02-22 | 金华职业技术学院 | A kind of electrochemical experimental device for spectral measurement |
| CN110529944B (en) * | 2019-09-06 | 2021-02-26 | 郑兰洁 | Air purifier for machine part machining workshop |
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