CN101524904A - 分层涂覆的切削工具 - Google Patents
分层涂覆的切削工具 Download PDFInfo
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
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- C—CHEMISTRY; METALLURGY
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- C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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Abstract
本发明涉及分层涂覆的切削工具,其包括硬质合金、金属陶瓷、陶瓷、立方氮化硼基材料或高速钢的主体,在该主体上至少在主体表面的功能部通过阴极弧蒸发涂覆有硬质耐磨涂层。所述涂层包括叠层的二元和三元多晶金属氮化物层,其具有重复形式A/B/A/C/A/B/A/C…,总叠层涂层厚度是0.5至10μm。层A是MeN且其中Me是金属元素Ti、Nb、Hf、V、Ta、Zr、Cr或Al的一种或多种。层B是(Ti1-xAlx)N其中0.3<x<0.95,以及层C是(Ti1-ySiy)N其中0.04<y<0.20。层A的平均厚度(dA)是2<dA<100nm,层B的平均厚度(dB)是4<dB<150,以及层C的平均厚度(dC)是4<dC<150,在整个涂层中各层的平均厚度基本上是恒定的,涂层具有显著地全部立方涂层结构。
Description
技术领域
本发明涉及用于通过排屑来进行机械加工的工具,其包括硬质合金(hard alloy of cemented carbide)、金属陶瓷、陶瓷、立方氮化硼基材料或高速钢的主体,及包括涂层,所述涂层包括叠层的立方结构的MeN以及(Ti,Al)N和(Ti,Si)N的稳定化立方相,其中Me是金属元素Ti、Nb、Hf、V、Ta、Zr、Cr、Al的一种或多种。所述涂层在产生高温的金属切削应用,例如超耐热合金(super alloy)和不锈钢的机械加工中特别有用。涂层通过物理气相淀积(PVD)、并优选通过阴极弧蒸发来生长。
背景技术
TiN已被广泛用作切削工具上的硬质层,但其在500℃以上温度下的耐氧化性差已经引起了对三元或四元化合物例如Ti-Al-N和Ti-Cr-Al-N的关注。更复杂的四元物例如Ti-Si-Al-N已被报道并被描述为由于其由NaCl型的晶体相与非晶Si3N4或SiNx组合构成的双相结构而超硬H>45GP。这些涂层材料显示出了改进的耐氧化性,及在机械加工硬化钢方面改进的性能。
EP1736565、WO2006/118513和EP0588350公开了包括(Ti,Si)N层的硬质涂层。
US7083868和US7056602公开了包括(Ti,Al)N层的硬质涂层。
涂层优化也已经通过涂覆不同概念的多层来实现,如交替的含Ti和Al的层(US6309738)、含氧和不含氧的层(US6254984)、堆叠在多层中的一个层自身由多层组成(US6077596)、交替的氮含量(US5330853)或者使用一种亚稳化合物(US5503912),或者如非周期性的多层。
为了环境保护而朝干作业过程发展的趋势,因为工具切削刀刃温度增加,对工具材料的特性带来了更高的要求,所述干作业过程即为不使用切削液(润滑剂)的金属切削操作和通过改进工艺加快机械加工速度。特别地,在高温下的涂层稳定性例如耐氧化性和耐磨性,已经变得更加关键。
发明内容
本发明的一个目的是提供涂覆的切削工具,其在通过排屑而进行的金属切削过程中具有改进的高温性能。
令人惊讶的是,已经发现包括交替的立方结构的MeN、(Ti,Al)N和(Ti,Si)N层的涂层产生了改进的耐磨性和耐温性。
附图说明
图1示意性的涂层结构包括(S)主体、(A)层A、(B)层B和(C)层C。
图2a淀积室的示意性侧视图,(1)真空室、(2)阴极、(3)工件夹具、(4)用于加偏压的电源、(5)阴极弧电源、(6)工艺气体的入口和(7)用于真空泵的出口。
图2b淀积室的示意性俯视图,(1)真空室、(2a)阴极位置1、(2b)阴极位置2、(2c)阴极位置3、(2d)阴极位置4和(3)工件夹具。
具体实施方式
根据本发明,提供了用于通过排屑进行机械加工的切削工具,其包括硬质合金、金属陶瓷、陶瓷、立方氮化硼基材料或高速钢的主体,在其上淀积有耐磨涂层,所述耐磨涂层包括立方结构的MeN、立方结构的(Ti,Al)N层和立方结构的均质(Ti,Si)N层的交替层,其中Me是金属元素Ti、Nb、Hf、V、Ta、Zr、Cr、Al的一种或多种,优选是Ti、Nb、Ta或Al中的一种或多种。涂层的平均组成是46at(原子)%<Zr+Hf+V+Cr+Nb+Ta+Ti+Al+Si<54原子%、优选48原子%<Zr+Hf+V+Cr+Nb+Ta+Ti+Al+Si<52原子%,及余量的N,其由例如EDS或WDS技术测定。
所述涂层(见图1),包括总厚度是0.5至10μm、优选0.5至5μm的叠层的多晶金属氮化物层的层状...A/B/A/C/A/B/A/C/A...结构,其中层A=MeN,层B=(Ti1-xAlx)N其中0.3<x<0.95、优选0.45<x<0.75,以及层C=(Ti1-ySiy)N其中0.04<y<0.20、优选0.06<y<0.12。层A的平均厚度(dA)是2<dA<100nm、优选2<dA<25nm,层B的平均厚度(dB)是4<dB<150、优选4<dB<50,以及层C的平均厚度(dC)是4<dC<150、优选4<dC<50,并且在整个涂层中各层的平均厚度基本上是恒定的(由于工件夹具的三重旋转(three-fold rotation),可能会发生一些变化)
所述主体可以根据现有技术涂覆有例如TiN、TiC、Ti(C,N)或(Ti,Al)N,优选(Ti,Al)N的单层和/或多层内涂层,和/或例如TiN、TiC、Ti(C,N)或(Ti,Al)N,优选(Ti,Al)N的单层和/或多层外涂层,总涂层厚度达到0.5至20μm、优选1至10μm且最优选2至7μm。
用于本发明的涂层的淀积方法是基于纯的或合金化的阴极在下列条件下的阴极弧蒸发:(Ti,Si)N层是使用具有在(95原子%Ti+5原子%Si)和(75原子%Ti+25原子%Si)之间、优选(95原子%Ti+5原子%Si)和(85原子%Ti+15原子%Si)之间组成的Ti+Si阴极来生长的;(Ti,Al)N层是使用具有在(70原子%Ti+30原子%Al)和(5原子%Ti+95原子%Al)之间、优选(40原子%Ti+60原子%Al)和(30原子%Ti+70原子%Al)之间组成的Ti+Al阴极来生长的;以及MeN层是使用纯的或合金化的Me阴极来生长的,其中Me是金属元素Ti、Nb、Hf、V、Ta、Zr、Cr、Al的一种或多种,优选Ti、Nb、Ta或Al的一种或多种。蒸发电流依赖于阴极尺寸是在50A和200A之间,使用63mm直径的阴极时优选在50A和80A之间。所述层是在总压力为0.5Pa至7.0Pa、优选1.5Pa至5.0Pa的Ar+N2气氛、优选纯N2气氛中生长的。偏压是-10V至-80V、优选-30V至-60V。淀积温度是在350℃和700℃之间、优选在400℃和650℃之间。
本发明也涉及根据上述的切削工具刀片在以50-400m/分钟、优选75-300m/分钟的切削速度在产生高温的切削应用中的用途,例如在不锈钢和超耐热合金的机械加工中的用途,其中根据切削速度和刀片几何形状,在铣削的情况下,每齿的平均走刀量是0.08-0.5mm、优选0.1-0.4mm。
实施例1
使用组成为94wt%WC-6wt%Co(WC颗粒尺寸为0.8μm)的硬质合金刀片。
在淀积前,将该刀片在碱溶液和乙醇的超声浴中清洗。淀积系统被抽真空至低于2.0×10-3Pa的压力,之后用Ar离子对该刀片溅射清洗。通过在总压力是4Pa的纯N2气氛中的阴极弧蒸发而生长交替的TiN/(Ti0.34Al0.66)N/TiN/(Ti0.91Si0.09)N/TiN...层,对于TiN、(Ti0.34Al0.66)N和(Ti0.91Si0.09)N分别使用直径为63mm的纯Ti阴极(图2b中的位置2a和2c)、33原子%Ti+67原子%Al阴极(图2b中的位置2b)和90原子%Ti+10原子%Si阴极(图2b中的位置2d)。所述层在500℃下使用-40V的偏压淀积至3μm的涂层厚度。对于不同的涂层(见表1),各单个层的厚度是通过在1和10rpm之间改变工件夹具的旋转速度以及在50和100A之间改变供应到阴极的蒸发电流来控制的。
涂层的平均组成是使用在10kV下工作的带有Thermo Noran EDS探测仪的LEO Ultra 55扫描电子显微镜,通过能量色散谱(EDS)分析面积来测定的。数据是使用Noran System Six(NSS ver 2)软件评价(见表1)。
表1
实施例2
将用于层A(图1)的Ti阴极用纯Ta阴极替换,重复实验1。
通过能量色散谱(EDS)分析(见实施例1)来测定涂层的平均组成,并总结在表2中。
表2
实施例3
将用于层A(图1)的Ti阴极用纯Zr阴极替换,重复实验1。
通过能量色散谱(EDS)分析(见实施例1)来测定涂层的平均组成,并总结在表3中。
表3
实施例4
将用于层A(图1)的Ti阴极用纯Nb阴极替换,重复实验1。
通过能量色散谱(EDS)分析(见实施例1)来测定涂层的平均组成,并总结在表4中。
表4
实施例5
将用于层A(图1)的Ti阴极用纯Nb阴极替换,重复实验1。
通过能量色散谱(EDS)分析(见实施例1)来测定涂层的平均组成,并总结在表5中。
表5
实施例6
将用于层A(图1)的Ti阴极用Ti+Nb(95原子%Ti+5原子%Nb)阴极替换,重复实验1。
通过能量色散谱(EDS)分析(见实施例1)来测定涂层的平均组成,并总结在表6中。
表6
实施例7
将用于层A(图1)的Ti阴极用Ti+Zr(70原子%Ti+30原子%Zr)阴极替换,重复实验1。
通过能量色散谱(EDS)分析(见实施例1)来测定涂层的平均组成,并总结在表7中。
表7
实施例8
参考例:根据现有技术,将3.0μm的Ti0.34Al0.66N层淀积在组成为94wt%WC-6wt%Co(WC颗粒尺寸为0.8μm)的硬质合金刀片上。
实施例9
在不锈钢上试验实施例1中的刀片,条件如下:
几何形状: CNMG120408-MF1
操作: 连续车削
工件材料: AISI 316L
切削速度: 230m/分钟
走刀量: 0.15mm/转
切削深度: 1mm
刀具寿命标准,侧面(flank)磨损(vb)>0.3mm
试验结果
表8
实施例10
在超耐热合金上试验实施例1中的刀片,条件如下:
几何形状: CNMG120412-MR3
操作: 连续车削
工件材料: Inconel 718
切削速度: 90m/分钟
走刀量: 0.2mm/转
切削深度: 0.5mm
刀具寿命标准,侧面磨损(vb) >0.2mm
试验结果
表9
Claims (8)
1.切削工具刀片,其包括硬质合金、金属陶瓷、陶瓷、立方氮化硼基材料或高速钢的主体,及多晶金属氮化物层的硬质耐磨叠层涂层,其特征在于,所述层具有总厚度为0.5至10μm、优选0.5至5μm的重复形式…A/B/A/C/A/B/A/C…,其中层A是立方结构的MeN且Me是金属元素Ti、Nb、Hf、V、Ta、Zr、Cr或Al的一种或多种,层B是立方结构的(Ti,Al)N,层C是立方结构的(Ti,Si)N,且所述叠层的平均组成是46原子%<Zr+Hf+V+Cr+Nb+Ta+Ti+Al+Si<54原子%、优选48原子%<Zr+Hf+V+Cr+Nb+Ta+Ti+Al+Si<52原子%及余量的N,其中单独层A的平均厚度(dA)是2<dA<100nm,单独层B的平均厚度(dB)是4<dB<150,单独层C的平均厚度(dC)是4<dC<150,在整个叠层中各层的平均厚度基本上是恒定的。
2.根据权利要求1的切削工具刀片,其特征在于,所述层具有2<dA<25nm、4<dB<50和4<dC<50的厚度。
3.根据权利要求1的切削工具刀片,其特征在于,Me是金属元素Ti、Ta、Nb或Al中的一种或多种。
4.根据权利要求1的切削工具刀片,其特征在于,层B是(Ti1-xAlx)N其中0.3<x<0.95、优选0.45<x<0.75,以及层C是(Ti1-ySiy)N其中0.04<y<0.20、优选0.06<y<0.12。
5.根据前述权利要求中任一项的切削工具刀片,其特征在于,所述涂层是用PVD、优选用阴极弧蒸发来进行淀积的。
6.根据前述权利要求中任一项的切削工具刀片,其特征在于,所述主体根据现有技术涂覆有例如TiN、TiC、Ti(C,N)或(Ti,Al)N,优选(Ti,Al)N的单层和/或多层内涂层,和/或涂覆有例如TiN、TiC、Ti(C,N)或(Ti,Al)N,优选(Ti,Al)N的单层和/或多层外涂层,总涂层厚度达到0.5至20μm、优选1至10μm。
7.制造根据权利要求1的切削工具刀片的方法,其特征在于,所述层具有重复形式A/B/A/C/A/B/A/C…,其中层A是MeN且Me是金属元素Ti、Nb、Hf、V、Ta、Zr、Cr或Al中的一种或多种,层B是(Ti,Al)N,层C是(Ti,Si)N,所述层是通过阴极弧蒸发生长至总涂层厚度0.5至5μm的MeN、(Ti,Al)N和(Ti,Si)N立方相,所述阴极弧蒸发分别使用纯的或合金化的Me阴极,具有在(70原子%Ti+30原子%Al)和(5原子%Ti+95原子%Al)之间、优选(40原子%Ti+60原子%Al)和(30原子%Ti+70原子%Al)之间组成的Ti+Al阴极,及具有在(95原子%Ti+5原子%Si)和(75原子%Ti+25原子%Si)之间、优选(95原子%Ti+5原子%Si)和(85原子%Ti+15原子%Si)之间组成的Ti+Si阴极,并根据阴极尺寸设定蒸发电流在50A和200A之间,在总压力0.5Pa和7.0Pa之间、优选1.5Pa和5.0Pa之间的Ar+N2气氛、优选纯N2中,偏压在-10V和-80V之间、优选在-30V和-60V之间,温度在350℃和700℃之间、优选在400℃和650℃之间。
8.根据权利要求1至6的切削工具刀片以50-400m/分钟、优选75-300m/分钟的切削速度对不锈钢和超耐热合金进行机械加工的用途,其中根据切削速度和刀片几何形状,在铣削的情况下每齿的平均走刀量是0.08-0.5mm、优选0.1-0.4mm。
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US8075744B1 (en) | 2011-12-13 |
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EP2098611A2 (en) | 2009-09-09 |
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