CN101511533B - 垫表面上具有微槽的抛光垫 - Google Patents

垫表面上具有微槽的抛光垫 Download PDF

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Publication number
CN101511533B
CN101511533B CN2007800324668A CN200780032466A CN101511533B CN 101511533 B CN101511533 B CN 101511533B CN 2007800324668 A CN2007800324668 A CN 2007800324668A CN 200780032466 A CN200780032466 A CN 200780032466A CN 101511533 B CN101511533 B CN 101511533B
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China
Prior art keywords
pad
soluble
polishing pad
microflute
fibre
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CN2007800324668A
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English (en)
Chinese (zh)
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CN101511533A (zh
Inventor
许启智
M·C·金
D·A·韦尔斯
J·E·奥尔德伯勒
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Innopad Inc
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Innopad Inc
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Publication of CN101511533A publication Critical patent/CN101511533A/zh
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/24—Lapping pads for working plane surfaces characterised by the composition or properties of the pad materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/26—Lapping pads for working plane surfaces characterised by the shape of the lapping pad surface, e.g. grooved

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
CN2007800324668A 2006-07-19 2007-07-19 垫表面上具有微槽的抛光垫 Active CN101511533B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US83159506P 2006-07-19 2006-07-19
US60/831,595 2006-07-19
PCT/US2007/073921 WO2008011535A2 (en) 2006-07-19 2007-07-19 Polishing pad having micro-grooves on the pad surface

Publications (2)

Publication Number Publication Date
CN101511533A CN101511533A (zh) 2009-08-19
CN101511533B true CN101511533B (zh) 2012-10-10

Family

ID=38957633

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2007800324668A Active CN101511533B (zh) 2006-07-19 2007-07-19 垫表面上具有微槽的抛光垫

Country Status (9)

Country Link
US (3) US8137166B2 (enExample)
EP (1) EP2040878A4 (enExample)
JP (1) JP5460316B2 (enExample)
KR (1) KR101409377B1 (enExample)
CN (1) CN101511533B (enExample)
CA (1) CA2658127A1 (enExample)
MY (1) MY151014A (enExample)
TW (1) TWI409136B (enExample)
WO (1) WO2008011535A2 (enExample)

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JP2011517111A (ja) * 2008-04-11 2011-05-26 イノパッド，インコーポレイテッド ボイドネットワークを有する化学機械的平坦化パッド
TWI409137B (zh) * 2008-06-19 2013-09-21 Bestac Advanced Material Co Ltd 研磨墊及其微型結構形成方法
US9276747B2 (en) * 2008-08-04 2016-03-01 Technology Policy Associates, Llc Remote profile security system
US8435099B2 (en) 2009-01-27 2013-05-07 Innopad, Inc. Chemical-mechanical planarization pad including patterned structural domains
SG173547A1 (en) 2009-02-12 2011-09-29 Innopad Inc Three-dimensional network in cmp pad
USD678745S1 (en) * 2011-07-07 2013-03-26 Phuong Van Nguyen Spinning insert polishing pad
US20130205679A1 (en) * 2012-02-14 2013-08-15 Innopad, Inc. Method of manufacturing a chemical mechanical planarization pad
US9308620B2 (en) 2013-09-18 2016-04-12 Texas Instruments Incorporated Permeated grooving in CMP polishing pads
KR102347711B1 (ko) 2014-04-03 2022-01-06 쓰리엠 이노베이티브 프로퍼티즈 컴파니 폴리싱 패드 및 시스템과 이의 제조 및 사용 방법
US9873180B2 (en) 2014-10-17 2018-01-23 Applied Materials, Inc. CMP pad construction with composite material properties using additive manufacturing processes
CN107078048B (zh) 2014-10-17 2021-08-13 应用材料公司 使用加成制造工艺的具复合材料特性的cmp衬垫建构
US9776361B2 (en) 2014-10-17 2017-10-03 Applied Materials, Inc. Polishing articles and integrated system and methods for manufacturing chemical mechanical polishing articles
US11745302B2 (en) 2014-10-17 2023-09-05 Applied Materials, Inc. Methods and precursor formulations for forming advanced polishing pads by use of an additive manufacturing process
US10875153B2 (en) 2014-10-17 2020-12-29 Applied Materials, Inc. Advanced polishing pad materials and formulations
US9643294B2 (en) * 2015-07-14 2017-05-09 K&D Pads LLC Buffing pad and methods of making and using the same
WO2017066077A1 (en) * 2015-10-16 2017-04-20 Applied Materials, Inc. Method and apparatus for forming advanced polishing pads using an additive manufacturing process
KR20230169424A (ko) 2015-10-30 2023-12-15 어플라이드 머티어리얼스, 인코포레이티드 원하는 제타 전위를 가진 연마 제품을 형성하는 장치 및 방법
US10593574B2 (en) 2015-11-06 2020-03-17 Applied Materials, Inc. Techniques for combining CMP process tracking data with 3D printed CMP consumables
US10391605B2 (en) 2016-01-19 2019-08-27 Applied Materials, Inc. Method and apparatus for forming porous advanced polishing pads using an additive manufacturing process
JP6829037B2 (ja) * 2016-09-30 2021-02-10 富士紡ホールディングス株式会社 研磨パッド及びその製造方法
US11471999B2 (en) 2017-07-26 2022-10-18 Applied Materials, Inc. Integrated abrasive polishing pads and manufacturing methods
WO2019032286A1 (en) 2017-08-07 2019-02-14 Applied Materials, Inc. ABRASIVE DISTRIBUTION POLISHING PADS AND METHODS OF MAKING SAME
JP7273796B2 (ja) * 2017-08-25 2023-05-15 スリーエム イノベイティブ プロパティズ カンパニー 表面突起研磨パッド
JP6980509B2 (ja) * 2017-12-12 2021-12-15 富士紡ホールディングス株式会社 研磨パッド及び研磨加工物の製造方法
CN112654655A (zh) 2018-09-04 2021-04-13 应用材料公司 先进抛光垫配方
KR102674356B1 (ko) * 2019-06-19 2024-06-11 주식회사 쿠라레 연마 패드, 연마 패드의 제조 방법 및 연마 방법
CN111515872B (zh) * 2020-04-10 2022-01-11 广东大市智能装备有限公司 一种中空金刚石的粉末冶金一体成型方法
CN112809550B (zh) * 2020-12-31 2022-04-22 湖北鼎汇微电子材料有限公司 一种抛光垫
US11878389B2 (en) 2021-02-10 2024-01-23 Applied Materials, Inc. Structures formed using an additive manufacturing process for regenerating surface texture in situ
US11951590B2 (en) 2021-06-14 2024-04-09 Applied Materials, Inc. Polishing pads with interconnected pores
USD1004393S1 (en) * 2021-11-09 2023-11-14 Ehwa Diamond Industrial Co., Ltd. Grinding pad
CN117103107A (zh) * 2022-05-16 2023-11-24 成都高真科技有限公司 还原料浆用抛光装置
USD1000928S1 (en) * 2022-06-03 2023-10-10 Beng Youl Cho Polishing pad
CN114918824B (zh) * 2022-06-29 2024-08-20 万华化学集团电子材料有限公司 一种具有径向微沟槽的抛光垫

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US6383066B1 (en) * 2000-06-23 2002-05-07 International Business Machines Corporation Multilayered polishing pad, method for fabricating, and use thereof
CN1494983A (zh) * 2002-06-03 2004-05-12 Jsr��ʽ���� 抛光垫及多层抛光垫
CN1498723A (zh) * 2002-11-05 2004-05-26 Jsr株式会社 抛光垫
CN1592955A (zh) * 2002-08-08 2005-03-09 Jsr株式会社 半导体晶片用抛光垫的加工方法以及半导体晶片用抛光垫
CN1610962A (zh) * 2001-12-28 2005-04-27 旭化成电子材料元件株式会社 研磨垫及其制法和研磨方法

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JP2668016B2 (ja) * 1988-09-21 1997-10-27 スピードファム株式会社 ポリッシングパッド及びその製造方法
US5533923A (en) * 1995-04-10 1996-07-09 Applied Materials, Inc. Chemical-mechanical polishing pad providing polishing unformity
US6337280B1 (en) * 1998-05-11 2002-01-08 Kabushiki Kaisha Toshiba Polishing cloth and method of manufacturing semiconductor device using the same
US6656018B1 (en) * 1999-04-13 2003-12-02 Freudenberg Nonwovens Limited Partnership Polishing pads useful in chemical mechanical polishing of substrates in the presence of a slurry containing abrasive particles
US6953388B2 (en) * 1999-12-22 2005-10-11 Toray Industries, Inc. Polishing pad, and method and apparatus for polishing
US6712681B1 (en) 2000-06-23 2004-03-30 International Business Machines Corporation Polishing pads with polymer filled fibrous web, and methods for fabricating and using same
US6964604B2 (en) * 2000-06-23 2005-11-15 International Business Machines Corporation Fiber embedded polishing pad
CA2441419A1 (en) * 2000-11-20 2002-12-19 International Business Machines Corporation Polishing pads with polymer filled fibrous web, and methods for fabricating and using same
US6852020B2 (en) * 2003-01-22 2005-02-08 Raytech Innovative Solutions, Inc. Polishing pad for use in chemical—mechanical planarization of semiconductor wafers and method of making same
US20030207661A1 (en) * 2002-05-01 2003-11-06 Alexander Tregub Annealing of CMP polishing pads
JP2004071985A (ja) 2002-08-08 2004-03-04 Jsr Corp 半導体ウェハ用研磨パッドの加工方法及び半導体ウェハ用研磨パッド
TW592894B (en) * 2002-11-19 2004-06-21 Iv Technologies Co Ltd Method of fabricating a polishing pad
US20040224622A1 (en) * 2003-04-15 2004-11-11 Jsr Corporation Polishing pad and production method thereof
KR20040093402A (ko) 2003-04-22 2004-11-05 제이에스알 가부시끼가이샤 연마 패드 및 반도체 웨이퍼의 연마 방법
US7086932B2 (en) * 2004-05-11 2006-08-08 Freudenberg Nonwovens Polishing pad
JP2008000831A (ja) * 2006-06-20 2008-01-10 Saitama Univ 研磨パッドの製造方法
FR2933004B1 (fr) 2008-06-27 2010-08-20 Inst Francais Du Petrole Solution absorbante contenant un inhibiteur de degradation derive du thiadiazole et methode pour limiter la degradation d'une solution absorbante

Patent Citations (5)

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Publication number Priority date Publication date Assignee Title
US6383066B1 (en) * 2000-06-23 2002-05-07 International Business Machines Corporation Multilayered polishing pad, method for fabricating, and use thereof
CN1610962A (zh) * 2001-12-28 2005-04-27 旭化成电子材料元件株式会社 研磨垫及其制法和研磨方法
CN1494983A (zh) * 2002-06-03 2004-05-12 Jsr��ʽ���� 抛光垫及多层抛光垫
CN1592955A (zh) * 2002-08-08 2005-03-09 Jsr株式会社 半导体晶片用抛光垫的加工方法以及半导体晶片用抛光垫
CN1498723A (zh) * 2002-11-05 2004-05-26 Jsr株式会社 抛光垫

Non-Patent Citations (1)

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Title
同上.

Also Published As

Publication number Publication date
US8137166B2 (en) 2012-03-20
WO2008011535A3 (en) 2008-10-02
EP2040878A2 (en) 2009-04-01
JP2009543709A (ja) 2009-12-10
US20120178348A1 (en) 2012-07-12
WO2008011535A2 (en) 2008-01-24
MY151014A (en) 2014-03-31
US20080085661A1 (en) 2008-04-10
TW200810878A (en) 2008-03-01
JP5460316B2 (ja) 2014-04-02
TWI409136B (zh) 2013-09-21
CA2658127A1 (en) 2008-01-24
US20150056894A1 (en) 2015-02-26
US8900036B2 (en) 2014-12-02
CN101511533A (zh) 2009-08-19
EP2040878A4 (en) 2012-09-12
KR20090031629A (ko) 2009-03-26
US9375822B2 (en) 2016-06-28
KR101409377B1 (ko) 2014-06-20

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