CN101471255B - 形成介电膜的方法 - Google Patents

形成介电膜的方法 Download PDF

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Publication number
CN101471255B
CN101471255B CN2008101906925A CN200810190692A CN101471255B CN 101471255 B CN101471255 B CN 101471255B CN 2008101906925 A CN2008101906925 A CN 2008101906925A CN 200810190692 A CN200810190692 A CN 200810190692A CN 101471255 B CN101471255 B CN 101471255B
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China
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film
metal
sio
substrate
ion
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Expired - Fee Related
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CN2008101906925A
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Chinese (zh)
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CN101471255A (zh
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北川英夫
北野尚武
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Canon Anelva Corp
Canon Inc
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Canon Anelva Corp
Canon Inc
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/60—Formation of materials, e.g. in the shape of layers or pillars of insulating materials
    • H10P14/69—Inorganic materials
    • H10P14/692—Inorganic materials composed of oxides, glassy oxides or oxide-based glasses
    • H10P14/6921—Inorganic materials composed of oxides, glassy oxides or oxide-based glasses containing silicon
    • H10P14/6928—Inorganic materials composed of oxides, glassy oxides or oxide-based glasses containing silicon the material containing silicon and at least one metal element, e.g. metal silicate based insulators or metal silicon oxynitrides
    • H10P14/693—Inorganic materials composed of oxides, glassy oxides or oxide-based glasses containing silicon the material containing silicon and at least one metal element, e.g. metal silicate based insulators or metal silicon oxynitrides the material containing hafnium, e.g. HfSiOx or HfSiON
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/01—Manufacture or treatment
    • H10D64/013—Manufacture or treatment of electrodes having a conductor capacitively coupled to a semiconductor by an insulator
    • H10D64/01302—Manufacture or treatment of electrodes having a conductor capacitively coupled to a semiconductor by an insulator the insulator being formed after the semiconductor body, the semiconductor being silicon
    • H10D64/01332—Making the insulator
    • H10D64/01336—Making the insulator on single crystalline silicon, e.g. chemical oxidation using a liquid
    • H10D64/0134—Making the insulator on single crystalline silicon, e.g. chemical oxidation using a liquid with a treatment, e.g. annealing, after the formation of the insulator and before the formation of the conductor
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/01—Manufacture or treatment
    • H10D64/013—Manufacture or treatment of electrodes having a conductor capacitively coupled to a semiconductor by an insulator
    • H10D64/01302—Manufacture or treatment of electrodes having a conductor capacitively coupled to a semiconductor by an insulator the insulator being formed after the semiconductor body, the semiconductor being silicon
    • H10D64/01332—Making the insulator
    • H10D64/01336—Making the insulator on single crystalline silicon, e.g. chemical oxidation using a liquid
    • H10D64/01344—Making the insulator on single crystalline silicon, e.g. chemical oxidation using a liquid in a nitrogen-containing ambient, e.g. N2O oxidation
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/01—Manufacture or treatment
    • H10D64/013—Manufacture or treatment of electrodes having a conductor capacitively coupled to a semiconductor by an insulator
    • H10D64/01302—Manufacture or treatment of electrodes having a conductor capacitively coupled to a semiconductor by an insulator the insulator being formed after the semiconductor body, the semiconductor being silicon
    • H10D64/01332—Making the insulator
    • H10D64/0135—Making the insulator by deposition of a layer, e.g. metal, metal compound or polysilicon, followed by transformation thereof into the insulator
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/60—Formation of materials, e.g. in the shape of layers or pillars of insulating materials
    • H10P14/65—Formation of materials, e.g. in the shape of layers or pillars of insulating materials characterised by treatments performed before or after the formation of the materials
    • H10P14/6516—Formation of materials, e.g. in the shape of layers or pillars of insulating materials characterised by treatments performed before or after the formation of the materials of treatments performed after formation of the materials
    • H10P14/6518—Formation of materials, e.g. in the shape of layers or pillars of insulating materials characterised by treatments performed before or after the formation of the materials of treatments performed after formation of the materials by introduction of substances into an already-existing insulating layer
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/60—Formation of materials, e.g. in the shape of layers or pillars of insulating materials
    • H10P14/65—Formation of materials, e.g. in the shape of layers or pillars of insulating materials characterised by treatments performed before or after the formation of the materials
    • H10P14/6516—Formation of materials, e.g. in the shape of layers or pillars of insulating materials characterised by treatments performed before or after the formation of the materials of treatments performed after formation of the materials
    • H10P14/6518—Formation of materials, e.g. in the shape of layers or pillars of insulating materials characterised by treatments performed before or after the formation of the materials of treatments performed after formation of the materials by introduction of substances into an already-existing insulating layer
    • H10P14/6524—Formation of materials, e.g. in the shape of layers or pillars of insulating materials characterised by treatments performed before or after the formation of the materials of treatments performed after formation of the materials by introduction of substances into an already-existing insulating layer the substance being nitrogen
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/60—Electrodes characterised by their materials
    • H10D64/66—Electrodes having a conductor capacitively coupled to a semiconductor by an insulator, e.g. MIS electrodes
    • H10D64/68—Electrodes having a conductor capacitively coupled to a semiconductor by an insulator, e.g. MIS electrodes characterised by the insulator, e.g. by the gate insulator
    • H10D64/681—Electrodes having a conductor capacitively coupled to a semiconductor by an insulator, e.g. MIS electrodes characterised by the insulator, e.g. by the gate insulator having a compositional variation, e.g. multilayered
    • H10D64/685—Electrodes having a conductor capacitively coupled to a semiconductor by an insulator, e.g. MIS electrodes characterised by the insulator, e.g. by the gate insulator having a compositional variation, e.g. multilayered being perpendicular to the channel plane
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/60—Electrodes characterised by their materials
    • H10D64/66—Electrodes having a conductor capacitively coupled to a semiconductor by an insulator, e.g. MIS electrodes
    • H10D64/68—Electrodes having a conductor capacitively coupled to a semiconductor by an insulator, e.g. MIS electrodes characterised by the insulator, e.g. by the gate insulator
    • H10D64/691—Electrodes having a conductor capacitively coupled to a semiconductor by an insulator, e.g. MIS electrodes characterised by the insulator, e.g. by the gate insulator comprising metallic compounds, e.g. metal oxides or metal silicates 
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/60—Electrodes characterised by their materials
    • H10D64/66—Electrodes having a conductor capacitively coupled to a semiconductor by an insulator, e.g. MIS electrodes
    • H10D64/68—Electrodes having a conductor capacitively coupled to a semiconductor by an insulator, e.g. MIS electrodes characterised by the insulator, e.g. by the gate insulator
    • H10D64/693—Electrodes having a conductor capacitively coupled to a semiconductor by an insulator, e.g. MIS electrodes characterised by the insulator, e.g. by the gate insulator the insulator comprising nitrogen, e.g. nitrides, oxynitrides or nitrogen-doped materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/60—Formation of materials, e.g. in the shape of layers or pillars of insulating materials
    • H10P14/63—Formation of materials, e.g. in the shape of layers or pillars of insulating materials characterised by the formation processes
    • H10P14/6302—Non-deposition formation processes
    • H10P14/6319—Formation by plasma treatments, e.g. plasma oxidation of the substrate

Landscapes

  • Formation Of Insulating Films (AREA)
  • Insulated Gate Type Field-Effect Transistor (AREA)
CN2008101906925A 2007-12-27 2008-12-26 形成介电膜的方法 Expired - Fee Related CN101471255B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2007-336730 2007-12-27
JP2007336730 2007-12-27
JP2007336730A JP5221121B2 (ja) 2007-12-27 2007-12-27 絶縁膜の形成方法

Publications (2)

Publication Number Publication Date
CN101471255A CN101471255A (zh) 2009-07-01
CN101471255B true CN101471255B (zh) 2012-08-29

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CN2008101906925A Expired - Fee Related CN101471255B (zh) 2007-12-27 2008-12-26 形成介电膜的方法

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US (1) US7923360B2 (https=)
JP (1) JP5221121B2 (https=)
KR (1) KR101138273B1 (https=)
CN (1) CN101471255B (https=)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7723205B2 (en) * 2005-09-27 2010-05-25 Semiconductor Energy Laboratory Co., Ltd Semiconductor device, manufacturing method thereof, liquid crystal display device, RFID tag, light emitting device, and electronic device
WO2009031232A1 (ja) * 2007-09-07 2009-03-12 Canon Anelva Corporation スパッタリング方法および装置
US8148275B2 (en) * 2007-12-27 2012-04-03 Canon Kabushiki Kaisha Method for forming dielectric films
WO2010050291A1 (ja) 2008-10-31 2010-05-06 キヤノンアネルバ株式会社 誘電体膜、誘電体膜の製造方法、半導体装置、および、記録媒体
JP4494525B1 (ja) * 2008-10-31 2010-06-30 キヤノンアネルバ株式会社 誘電体膜の製造方法、半導体装置の製造方法、誘電体膜、およびコンピュータ読み取り可能な記録媒体
JP5247619B2 (ja) * 2009-07-28 2013-07-24 キヤノンアネルバ株式会社 誘電体膜、誘電体膜を用いた半導体装置の製造方法及び半導体製造装置
JP2011151366A (ja) * 2009-12-26 2011-08-04 Canon Anelva Corp 誘電体膜の製造方法
JP5937297B2 (ja) * 2010-03-01 2016-06-22 キヤノンアネルバ株式会社 金属窒化膜、該金属窒化膜を用いた半導体装置、および半導体装置の製造方法
DE112011104624B4 (de) 2010-12-28 2019-01-24 Canon Anelva Corporation Verfahren zum Herstellen einer Halbleitervorrichtung
US8993058B2 (en) * 2012-08-28 2015-03-31 Applied Materials, Inc. Methods and apparatus for forming tantalum silicate layers on germanium or III-V semiconductor devices
WO2018134024A1 (en) * 2017-01-17 2018-07-26 Zf Friedrichshafen Ag Method of manufacturing an insulation layer on silicon carbide

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ATE417275T1 (de) * 1997-09-22 2008-12-15 Novartis Vaccines & Diagnostic Puffern zur stabilizierung von hcv antigenen
WO2001082346A1 (en) 2000-04-24 2001-11-01 Beijing Normal University Method for fabricating silicon-on-insulator
JP3944367B2 (ja) 2001-02-06 2007-07-11 松下電器産業株式会社 絶縁膜の形成方法及び半導体装置の製造方法
US6720241B2 (en) 2001-06-18 2004-04-13 Matsushita Electric Industrial Co., Ltd. Method for manufacturing semiconductor device
JP3746968B2 (ja) 2001-08-29 2006-02-22 東京エレクトロン株式会社 絶縁膜の形成方法および形成システム
AU2003281112A1 (en) 2002-07-16 2004-02-02 Nec Corporation Semiconductor device, production method and production device thereof
US7144825B2 (en) * 2003-10-16 2006-12-05 Freescale Semiconductor, Inc. Multi-layer dielectric containing diffusion barrier material
JP2005222977A (ja) * 2004-02-03 2005-08-18 Hitachi Ltd 半導体装置の製造方法
JP2005311061A (ja) * 2004-04-21 2005-11-04 Nippon Telegr & Teleph Corp <Ntt> 絶縁層及びその製造方法
KR101117450B1 (ko) * 2006-03-09 2012-03-13 어플라이드 머티어리얼스, 인코포레이티드 낮은 에너지 플라즈마 시스템을 이용하여 하이 유전상수 트랜지스터 게이트를 제조하는 방법 및 장치
US7645710B2 (en) 2006-03-09 2010-01-12 Applied Materials, Inc. Method and apparatus for fabricating a high dielectric constant transistor gate using a low energy plasma system

Also Published As

Publication number Publication date
JP5221121B2 (ja) 2013-06-26
KR20090071505A (ko) 2009-07-01
US20090170340A1 (en) 2009-07-02
KR101138273B1 (ko) 2012-04-24
CN101471255A (zh) 2009-07-01
JP2009158782A (ja) 2009-07-16
US7923360B2 (en) 2011-04-12

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