CN101452020A - In-situ measurement material surface resistivity method under vacuum environment - Google Patents
In-situ measurement material surface resistivity method under vacuum environment Download PDFInfo
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- CN101452020A CN101452020A CNA2007101958997A CN200710195899A CN101452020A CN 101452020 A CN101452020 A CN 101452020A CN A2007101958997 A CNA2007101958997 A CN A2007101958997A CN 200710195899 A CN200710195899 A CN 200710195899A CN 101452020 A CN101452020 A CN 101452020A
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- 239000000463 material Substances 0.000 title claims abstract description 22
- 238000000034 method Methods 0.000 title claims abstract description 22
- 238000012625 in-situ measurement Methods 0.000 title abstract description 8
- 229910052751 metal Inorganic materials 0.000 claims abstract description 34
- 239000002184 metal Substances 0.000 claims abstract description 34
- 239000011888 foil Substances 0.000 claims abstract description 31
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims abstract description 13
- 238000005259 measurement Methods 0.000 claims abstract description 13
- 229910052709 silver Inorganic materials 0.000 claims abstract description 8
- 239000004332 silver Substances 0.000 claims abstract description 8
- 239000003292 glue Substances 0.000 claims abstract description 7
- 238000005507 spraying Methods 0.000 claims abstract description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical group [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 12
- 239000011889 copper foil Substances 0.000 claims description 10
- 239000005030 aluminium foil Substances 0.000 claims 1
- 238000011065 in-situ storage Methods 0.000 abstract description 4
- 238000012360 testing method Methods 0.000 abstract description 2
- 239000000523 sample Substances 0.000 description 16
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 238000000691 measurement method Methods 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000003618 dip coating Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000007790 scraping Methods 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
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Abstract
本发明提供了一种原位测量真空环境下材料表面电阻率的方法，包括以下步骤：通过直接喷涂或粘接的方式将样品固定在样品基座上；将圆形金属箔电极和围绕圆形金属箔电极的环形金属箔电极分别通过导电银胶粘结在样品中央；将样品和粘结好的电极设置在真空容器中；分别从圆形金属箔电极和环形金属箔电极上引出导线，电连接到真空容器外的静电计上，通过测量时静电计在圆形电极和环形电极间施加一定的电压来读出样品的表面电阻率。本发明的测量方法可应用于模拟真空环境下材料表面电阻率的原位测量，避免了以往测试方法中电极和样品间压力大小的控制问题，测量结果具有更好的准确性和重复性。
The invention provides an in-situ method for measuring the surface resistivity of materials in a vacuum environment, comprising the following steps: fixing the sample on the sample base by direct spraying or bonding; placing a circular metal foil electrode and surrounding circular The ring-shaped metal foil electrodes of the metal foil electrodes are respectively bonded to the center of the sample through conductive silver glue; the samples and the bonded electrodes are placed in a vacuum container; the wires are respectively drawn from the circular metal foil electrodes and the ring-shaped metal foil electrodes, and the electric It is connected to the electrometer outside the vacuum container, and the surface resistivity of the sample is read by applying a certain voltage between the circular electrode and the ring electrode by the electrometer during measurement. The measuring method of the invention can be applied to the in-situ measurement of the material surface resistivity in a simulated vacuum environment, avoids the problem of controlling the pressure between the electrode and the sample in the previous testing methods, and has better accuracy and repeatability of the measuring results.
Description
技术领域 technical field
本发明属于材料电阻率的测量领域，更具体来说涉及一种通过电极粘结在真空环境下原位测量材料表面电阻率的方法。The invention belongs to the field of measurement of material resistivity, and more specifically relates to a method for in-situ measurement of material surface resistivity through electrode bonding in a vacuum environment.
背景技术 Background technique
航天器表面材料的电阻率对于控制空间环境下的充放电具有重要的作用，但在空间环境的作用下，航天器表面材料会发生退化，对卫星寿命末期的正常运行造成很大的影响。The resistivity of spacecraft surface materials plays an important role in controlling the charge and discharge in the space environment, but under the action of the space environment, the spacecraft surface materials will degrade, which will have a great impact on the normal operation of the satellite at the end of its life.
材料的表面电阻率是评估材料电性能的一个重要参数，因此，对材料的表面电阻率进行准确地测量是非常必要。但是，由于航天器所处的环境的特殊性，需要对其材料表面电阻率进行原位测量。通常，常规的航天器材料的表面电阻率的原位测量都采用金属电极按压法进行测量，其中，所采用的电极与测量样品进行接触并要施加一定的压力，然后进行表面电阻的测量。但通常在测量过程中，施加压力的大小很难控制，而该接触压力的不同，直接导致测量出的结果有非常显著的差异，极大地影响了测量结果的准确性，不能准确地反映出材料的实际电性能。为此，寻找一种高准确度的原位测量真空环境下的材料表面电阻率的方法来真实地反映航天器材料的表面电阻率非常必要。The surface resistivity of materials is an important parameter to evaluate the electrical properties of materials, therefore, it is very necessary to accurately measure the surface resistivity of materials. However, due to the particularity of the environment in which the spacecraft is located, in-situ measurement of the surface resistivity of its materials is required. Usually, the in-situ measurement of the surface resistivity of conventional spacecraft materials is carried out by the metal electrode pressing method, wherein the electrode used is in contact with the measurement sample and a certain pressure is applied, and then the surface resistance is measured. But usually in the measurement process, the magnitude of the applied pressure is difficult to control, and the difference in the contact pressure directly leads to very significant differences in the measured results, which greatly affects the accuracy of the measurement results and cannot accurately reflect the material actual electrical performance. For this reason, it is very necessary to find a high-accuracy in-situ method for measuring the surface resistivity of materials in a vacuum environment to truly reflect the surface resistivity of spacecraft materials.
发明内容 Contents of the invention
本发明的发明目的之一是提供一种高准确度且能真实反映真空环境于真空环境下的材料的表面电阻率进行了测量。One of the objectives of the present invention is to provide a high-accuracy measurement of the surface resistivity of a material that can truly reflect the vacuum environment.
本发明的技术方案如下：Technical scheme of the present invention is as follows:
本发明的原位测量真空环境下材料表面电阻率的方法，其包括以下步骤：The method for in situ measuring material surface resistivity under vacuum environment of the present invention, it comprises the following steps:
1)通过直接喷涂或粘接的方式将样品固定在样品基座上；1) Fix the sample on the sample base by direct spraying or bonding;
2)将圆形金属箔电极和围绕圆形金属箔电极的环形金属箔电极分别通过导电银胶粘结在样品中央；2) bonding the circular metal foil electrode and the annular metal foil electrode surrounding the circular metal foil electrode to the center of the sample through conductive silver glue;
3)将样品和粘结好的电极设置在真空容器中；3) The sample and the bonded electrodes are placed in a vacuum container;
4)分别从圆形金属箔电极和环形金属箔电极上引出导线，电连接到真空容器外的静电计上，通过测量时静电计在圆形电极和环形电极间施加一定的电压来读出样品的表面电阻率。4) Lead wires from the circular metal foil electrode and the ring metal foil electrode respectively, and electrically connect them to the electrometer outside the vacuum container, and read the sample by applying a certain voltage between the circular electrode and the ring electrode by the electrometer during measurement. surface resistivity.
上述方法中，所述金属箔电极为铜箔、铝箔和/或银箔电极，优选铜箔电极。In the above method, the metal foil electrode is a copper foil, aluminum foil and/or silver foil electrode, preferably a copper foil electrode.
上述方法中，所述金属箔的厚度为0.1mm-0.2mm，优选圆形金属箔和环形金属箔的厚度相等。In the above method, the thickness of the metal foil is 0.1mm-0.2mm, preferably the circular metal foil and the circular metal foil have the same thickness.
上述方法中，真空容器的真空度高于4×10-3Pa。In the above method, the vacuum degree of the vacuum container is higher than 4×10 -3 Pa.
上述方法中，步骤4)中所述引出导线包括将弹性钢丝通过固定支架按压在金属箔电极上后引出真空容器外或者将导线焊接在金属箔电极后引出空容器外。In the above method, the drawing out of the wire in step 4) includes pressing the elastic steel wire on the metal foil electrode through the fixing bracket to lead out of the vacuum container or welding the wire to the metal foil electrode and then leading out of the empty container.
与现有技术相比，本发明的方法具有如下的优点：Compared with prior art, method of the present invention has following advantage:
本发明的测量方法通过使用导电银胶来粘结金属箔(铜、铝或银箔)电极和样品从而测量真空环境下的材料电阻率。因此，本发明的测量方法不存在电极和样品间接触压力大小控制的问题，可有效地提高测量结果的重复性。而且，由于导电银胶电阻率极小，可以忽略其间的接触电阻，从而提高了测量的准确性。此外，本发明的测量方法可应用于模拟真空环境下材料表面电阻率的原位测量，避免了以往测试方法中电极和样品间压力大小的控制问题，测量结果具有更好的准确性和重复性。The measurement method of the present invention measures the material resistivity in a vacuum environment by using conductive silver glue to bond metal foil (copper, aluminum or silver foil) electrodes and samples. Therefore, the measurement method of the invention does not have the problem of controlling the size of the contact pressure between the electrode and the sample, and can effectively improve the repeatability of the measurement results. Moreover, since the resistivity of the conductive silver paste is extremely small, the contact resistance therebetween can be ignored, thereby improving the accuracy of measurement. In addition, the measurement method of the present invention can be applied to the in-situ measurement of material surface resistivity in a simulated vacuum environment, avoiding the problem of controlling the pressure between the electrode and the sample in the previous test method, and the measurement result has better accuracy and repeatability .
附图说明 Description of drawings
图1为本发明的金属箔电极粘接法原位测量真空环境下材料表面电阻率示意图。Fig. 1 is a schematic diagram of in-situ measurement of material surface resistivity in a vacuum environment by the metal foil electrode bonding method of the present invention.
其中，1、圆形电极；2、环形电极；3、导电银胶；4、样品；5、导线；6、静电计；7、样品基座；8、真空容器。Among them, 1. Circular electrode; 2. Ring electrode; 3. Conductive silver glue; 4. Sample; 5. Wire; 6. Electrometer; 7. Sample base; 8. Vacuum container.
具体实施方式 Detailed ways
以下结合附图对发明的具体实施方式作详细说明，以便本领域的技术人员更清楚地理解本发明。The specific embodiments of the invention will be described in detail below in conjunction with the accompanying drawings, so that those skilled in the art can understand the invention more clearly.
参照附图1，图1为金属箔电极粘接法原位测量真空环境下材料的表面电阻率示意图。当在真空环境下原位测量样品材料的表面电阻率时，主要进行如下步骤：首先将表面电阻率待测样品4通过任何常规的喷涂方法(例如旋涂，刮涂、浸涂等)或者粘接的方法固定在样品基座7上；然后将一厚度为0.1mm-0.2mm的圆形铜箔电极1(优选直径为25mm)通过导电银胶3粘接在样品4的中央，再围绕圆形铜箔电极1将一厚度为0.1mm-0.2mm环形铜箔电极2(环外部直径为39mm，内部直径为29mm)通过导电银胶3粘接在样品4上。固定好样品4并粘接好电极后放置到真空度高于4×10-3Pa真空容器8中。然后导线5分别银焊在金属箔电极上，并引出真空容器8外，然后与静电计6相连，测量时，通过静电计6在圆形铜箔电极1和环形铜箔电极2间施加一定的电压，通过静电计6读数得出样品的表面电阻率。Referring to accompanying drawing 1, Fig. 1 is a schematic diagram of the in-situ measurement of the surface resistivity of a material in a vacuum environment by the metal foil electrode bonding method. When the surface resistivity of the sample material is measured in situ in a vacuum environment, the following steps are mainly carried out: first, the surface resistivity test sample 4 is passed through any conventional spray coating method (such as spin coating, scraping coating, dip coating, etc.) or sticking Then, a circular copper foil electrode 1 (preferably 25mm in diameter) with a thickness of 0.1mm-0.2mm is bonded to the center of the sample 4 through conductive silver glue 3, and then surrounds the circle Shaped copper foil electrode 1 A ring-shaped copper foil electrode 2 with a thickness of 0.1mm-0.2mm (the outer diameter of the ring is 39mm and the inner diameter is 29mm) is bonded on the sample 4 through conductive silver glue 3 . After the sample 4 is fixed and the electrodes are bonded, it is placed in a vacuum container 8 with a vacuum degree higher than 4×10 −3 Pa. Then the wires 5 are respectively silver-welded on the metal foil electrodes, and are led out of the vacuum container 8, and then connected to the electrometer 6. During measurement, a certain voltage is applied between the circular copper foil electrode 1 and the annular copper foil electrode 2 by the electrometer 6. The voltage is read by the electrometer 6 to obtain the surface resistivity of the sample.
通过用银箔代替铜箔可形成新的实施方式，也可以使用其它厚度和尺寸的金属箔(铜箔、铝箔和/或银箔)形成新的实施方式。New embodiments can be formed by substituting silver foil for copper foil, and other thicknesses and dimensions of metal foil (copper, aluminum, and/or silver) can also be used to form new embodiments.
尽管上文对本发明的具体实施方式给予了详细描述和说明，但是应该指明的是，本领域的技术人员可以依据本发明的构想对上述实施方式进行各种等效改变和修改，其所产生的功能作用在未超出说明书及附图所涵盖的精神时，均应在本发明的保护范围之内。Although the specific embodiments of the present invention have been described and illustrated in detail above, it should be noted that those skilled in the art can make various equivalent changes and modifications to the above embodiments according to the concept of the present invention, and the resulting When the functional effect does not exceed the spirit covered by the specification and drawings, it shall be within the protection scope of the present invention.
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| CNA2007101958997A CN101452020A (en) | 2007-12-04 | 2007-12-04 | In-situ measurement material surface resistivity method under vacuum environment |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102128985A (en) * | 2010-12-30 | 2011-07-20 | 中国航天科技集团公司第五研究院第五一○研究所 | Method for testing conductivity of medium material |
| CN102645587A (en) * | 2012-04-27 | 2012-08-22 | 中航锂电（洛阳）有限公司 | Method and device for electric conductivity test of lithium ion battery pole piece |
| CN103063923A (en) * | 2012-12-25 | 2013-04-24 | 广州鹿山新材料股份有限公司 | Volume resistivity test method of ethylene vinyl acetate copolymer (EVA) adhesive film used for photovoltaic module packaging |
| CN103226167A (en) * | 2013-04-24 | 2013-07-31 | 兰州空间技术物理研究所 | Conductivity measurement device and method of dielectric material |
| CN104407236A (en) * | 2014-11-12 | 2015-03-11 | 西安交通大学 | Method for eliminating surface charge of material in vacuum |
| CN105486926A (en) * | 2016-01-29 | 2016-04-13 | 哈尔滨理工大学 | Three-electrode system for testing surface resistivity of bar-shaped insulating material |
| CN108225986A (en) * | 2017-12-20 | 2018-06-29 | 北京卫星环境工程研究所 | For the electrode measurement device of media particle object electric performance test |
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2007
- 2007-12-04 CN CNA2007101958997A patent/CN101452020A/en active Pending
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102128985A (en) * | 2010-12-30 | 2011-07-20 | 中国航天科技集团公司第五研究院第五一○研究所 | Method for testing conductivity of medium material |
| CN102128985B (en) * | 2010-12-30 | 2013-04-24 | 中国航天科技集团公司第五研究院第五一○研究所 | Method for testing conductivity of medium material |
| CN102645587A (en) * | 2012-04-27 | 2012-08-22 | 中航锂电（洛阳）有限公司 | Method and device for electric conductivity test of lithium ion battery pole piece |
| CN103063923A (en) * | 2012-12-25 | 2013-04-24 | 广州鹿山新材料股份有限公司 | Volume resistivity test method of ethylene vinyl acetate copolymer (EVA) adhesive film used for photovoltaic module packaging |
| CN103063923B (en) * | 2012-12-25 | 2015-06-03 | 广州鹿山新材料股份有限公司 | Volume resistivity test method of ethylene vinyl acetate copolymer (EVA) adhesive film used for photovoltaic module packaging |
| CN103226167A (en) * | 2013-04-24 | 2013-07-31 | 兰州空间技术物理研究所 | Conductivity measurement device and method of dielectric material |
| CN104407236A (en) * | 2014-11-12 | 2015-03-11 | 西安交通大学 | Method for eliminating surface charge of material in vacuum |
| CN105486926A (en) * | 2016-01-29 | 2016-04-13 | 哈尔滨理工大学 | Three-electrode system for testing surface resistivity of bar-shaped insulating material |
| CN105486926B (en) * | 2016-01-29 | 2018-03-27 | 哈尔滨理工大学 | Strip insulating materials surface resistivity tests three-electrode system |
| CN108225986A (en) * | 2017-12-20 | 2018-06-29 | 北京卫星环境工程研究所 | For the electrode measurement device of media particle object electric performance test |
| CN108225986B (en) * | 2017-12-20 | 2020-07-28 | 北京卫星环境工程研究所 | Electrode measuring device for electrical property test of dielectric particles |
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