CN101438130A - 表面测量探头 - Google Patents

表面测量探头 Download PDF

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Publication number
CN101438130A
CN101438130A CNA2007800165252A CN200780016525A CN101438130A CN 101438130 A CN101438130 A CN 101438130A CN A2007800165252 A CNA2007800165252 A CN A2007800165252A CN 200780016525 A CN200780016525 A CN 200780016525A CN 101438130 A CN101438130 A CN 101438130A
Authority
CN
China
Prior art keywords
parameter
probe
vibration
contact pilotage
contact
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CNA2007800165252A
Other languages
English (en)
Chinese (zh)
Inventor
尼古拉斯·约翰·韦斯顿
詹姆斯·弗格斯·罗伯逊
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Renishaw PLC
Original Assignee
Renishaw PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Renishaw PLC filed Critical Renishaw PLC
Publication of CN101438130A publication Critical patent/CN101438130A/zh
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/004—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points
    • G01B7/008—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points using coordinate measuring machines
    • G01B7/012—Contact-making feeler heads therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
    • G01B21/045—Correction of measurements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/0011—Arrangements for eliminating or compensation of measuring errors due to temperature or weight
    • G01B5/0014—Arrangements for eliminating or compensation of measuring errors due to temperature or weight due to temperature

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
CNA2007800165252A 2006-05-08 2007-05-08 表面测量探头 Pending CN101438130A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB0608999.9A GB0608999D0 (en) 2006-05-08 2006-05-08 Surface measurement probe
GB0608999.9 2006-05-08

Publications (1)

Publication Number Publication Date
CN101438130A true CN101438130A (zh) 2009-05-20

Family

ID=36604074

Family Applications (1)

Application Number Title Priority Date Filing Date
CNA2007800165252A Pending CN101438130A (zh) 2006-05-08 2007-05-08 表面测量探头

Country Status (6)

Country Link
US (1) US20090320553A1 (enExample)
EP (1) EP2027436A2 (enExample)
JP (1) JP2009536335A (enExample)
CN (1) CN101438130A (enExample)
GB (1) GB0608999D0 (enExample)
WO (1) WO2007129075A2 (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111133272A (zh) * 2017-09-26 2020-05-08 瑞尼斯豪公司 测量探针装置和方法
CN112050765A (zh) * 2019-06-07 2020-12-08 株式会社三丰 测定测头的不良状况判定单元及其不良状况判定方法
CN112179298A (zh) * 2020-08-21 2021-01-05 成都现代万通锚固技术有限公司 一种通过固有频率检测锚杆长度的方法

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008132483A1 (en) 2007-04-30 2008-11-06 Renishaw Plc Analogue probe with temperature control and method of operation
EP3128287A1 (en) 2015-08-06 2017-02-08 Renishaw plc Method of measurement of a slot
JP6727306B2 (ja) * 2015-12-22 2020-07-22 株式会社ミツトヨ Ｃｍｍタッチプローブのためのセンサ信号オフセット補正システム
FR3052559B1 (fr) 2016-06-10 2020-06-12 Onera (Office National D'etudes Et De Recherches Aerospatiales) Systeme et procede pour fournir l'amplitude et le retard de phase d'un signal sinusoidal
JP2021183926A (ja) * 2020-05-21 2021-12-02 株式会社ミツトヨ 測定器

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6147502A (ja) * 1984-08-13 1986-03-08 Mitsutoyo Mfg Co Ltd タツチ信号検出回路
US5247751A (en) * 1990-09-29 1993-09-28 Nikon Corporation Touch probe
JPH07167638A (ja) 1993-12-15 1995-07-04 Nikon Corp タッチプローブ
JP2889196B2 (ja) 1996-10-08 1999-05-10 株式会社ミツトヨ センサ信号の直流レベル変化検知回路
US6708420B1 (en) * 1999-01-06 2004-03-23 Patrick M. Flanagan Piezoelectric touch probe
US7532202B2 (en) * 2002-05-08 2009-05-12 3M Innovative Properties Company Baselining techniques in force-based touch panel systems
US7041963B2 (en) * 2003-11-26 2006-05-09 Massachusetts Institute Of Technology Height calibration of scanning probe microscope actuators

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111133272A (zh) * 2017-09-26 2020-05-08 瑞尼斯豪公司 测量探针装置和方法
CN111133272B (zh) * 2017-09-26 2021-10-29 瑞尼斯豪公司 测量探针装置和方法
US11415412B2 (en) 2017-09-26 2022-08-16 Renishaw Plc Measurement probe apparatus and method
CN112050765A (zh) * 2019-06-07 2020-12-08 株式会社三丰 测定测头的不良状况判定单元及其不良状况判定方法
CN112179298A (zh) * 2020-08-21 2021-01-05 成都现代万通锚固技术有限公司 一种通过固有频率检测锚杆长度的方法
CN112179298B (zh) * 2020-08-21 2021-11-26 成都现代万通锚固技术有限公司 一种通过固有频率检测锚杆长度的方法

Also Published As

Publication number Publication date
EP2027436A2 (en) 2009-02-25
GB0608999D0 (en) 2006-06-14
WO2007129075A8 (en) 2008-04-17
JP2009536335A (ja) 2009-10-08
WO2007129075A2 (en) 2007-11-15
WO2007129075A3 (en) 2008-03-06
US20090320553A1 (en) 2009-12-31

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SE01 Entry into force of request for substantive examination
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WD01 Invention patent application deemed withdrawn after publication

Open date: 20090520