CN101414796A - High output power two-dimension micro-driver apparatus based on sonic surface wave - Google Patents
High output power two-dimension micro-driver apparatus based on sonic surface wave Download PDFInfo
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- CN101414796A CN101414796A CNA2008102030241A CN200810203024A CN101414796A CN 101414796 A CN101414796 A CN 101414796A CN A2008102030241 A CNA2008102030241 A CN A2008102030241A CN 200810203024 A CN200810203024 A CN 200810203024A CN 101414796 A CN101414796 A CN 101414796A
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Abstract
The invention relates to a high output power two-dimensional micro actuator device based on acoustic surface wave in the technical field of micro-electro-mechanical system. The high output power two-dimensional micro actuator device comprises an upper plate, a large permanent magnet, four adjusting bolts, a small permanent magnet, a slide block, a two-dimensional drive platform and a lower plate, wherein, four adjusting bolts are distributed and fixed symmetrically towards the central connection line of the upper plate and the lower plate and adjusts the upper plate and the lower plate; the large permanent magnet is fixed exactly under the upper plate; the small permanent magnet is fixed on the slide block; the slide block is arranged on the lower plate; four sets of interdigital electrode pairs are symmetrically distributed on the two-dimensional drive platform; alternating current excitation with resonant frequency is loaded on the interdigital electrode pairs and can realize the drive towards the slide block arranged on the interdigital electrode pairs; and four adjusting bolts are adjusted to control the distance between the upper plate and the lower plate to adjust the volume of repulsion force between the large permanent magnet and the small permanent magnet and accordingly realize the adjustment of preload force. The high output power two-dimensional micro actuator device can not only realize two-dimensional drive, but also realize large preload force and accordingly realize higher output power.
Description
Technical field
The present invention relates to a kind of microdrive of field of micro electromechanical technology, particularly a kind of high output power two-dimension micro-driver apparatus based on surface acoustic wave.
Background technology
The research that the sound surface device is applied to driver starts from the eighties in last century.Concrete principle is as follows: when periodic alternating voltage is loaded on the piezoelectric substrate, just set up alternating electric field in substrate.This can excite periodically elastic vibration in substrate, and forms periodic elastic wave.After a slide block is placed on the surface and when adding a preload force, because the effect of frictional force, the displacement that slide block will produce regularity promptly realizes driving action.At present, surface acoustic wave drive unit stepping amplitude has accurately controlled to nanometer scale, the aspect such as can be widely used in accurately transporting.
Find through literature search prior art, Minoru Kuribayashi Kurusawa etc. rolled up " Twodimensionally self-holding deflection mirror using surface acoustic wavemotor " (the utilizing the self-holding speculum of two dimension of surface acoustic wave motor) of delivering on the 4th phase 195-200 page or leaf in 2006 the 13rd in " OpticalReview " (optics comment), had adopted a kind of surface acoustic wave motor of two dimension in this article.Specific as follows: as on slide block, to fix a neodymium permanent magnet, under two-dimensional stage, produce the magnetic field suction permanent magnet then, thereby on slide block, realize preload force, and then realize that two dimension drives with two orthogonal cored energization solenoids.This design has realized two-dimentional driving, but the magnetic field that weak point is an energization solenoid to be produced is more weak, can not realize bigger preload force, thereby limit the raising of power output.In addition, " the Sub-nanometer Resolution Stepping Motionof Surface Acoustic Wave Motor " that Minoru Kuribayashi Kurusawa etc. deliver at " Proceedings of the 1st InternationalConference on Positioning Technology " (first location technology international conference collection of thesis) (9 to 11 July in 2004) the sub-nm resolution stepping of surperficial motor (sound move) adopted a kind of surface acoustic wave motor of one dimension in this article.Specific as follows: as by making a guide rail scope of activities of slide block to be restricted to one dimension, on slide block, to install an adjustable spring assembly then additional and realize preload force.This design has realized bigger power output, but just one dimension drives, and can not realize that two dimension drives.
Summary of the invention
The present invention is directed to the deficiency of existing technology, a kind of high output power two-dimension micro-driver apparatus based on surface acoustic wave is provided, make it both can realize that two dimension drives, and can realize big pre-load force again, thereby realize higher power output.
The present invention is achieved by the following technical solutions, and the high output power two-dimension micro-driver apparatus based on surface acoustic wave of the present invention comprises that upper plate, big permanent magnet, four adjusting bolts, little permanent magnet, slide block, two dimensions drive platform, lower plate.Wherein, upper plate, big permanent magnet, little permanent magnet, slide block, two dimension drive platform, lower plate sets gradually from top to bottom, four regulate that bolt is symmetrically distributed about the upper plate lower plate line of centres and fixing, regulate upper plate and lower plate.Big permanent magnet is fixed under the upper plate, and little permanent magnet is fixed on the slide block, and slide block is placed on the lower plate.It is right that two dimension drives the four groups of interdigital electrodes that are symmetrically distributed on the platform, loads the ac-excited driving that can realize the slide block that is placed on it of resonance frequency in the above.By regulating four distances of regulating between bolt control upper plate and the lower plate, realize regulating the repulsion size between the large and small permanent magnet, thereby realize the adjusting of preload force.
Described big permanent magnet, little permanent magnet are all neodymium iron boron powerful permanent body.
Four jiaos of four circular holes that are symmetrically distributed are used to be provided with four and regulate bolt on described upper plate, the lower plate.
Described sliding block material is silicon materials, and the even little cylinder that distributes of lower surface.
The present invention a certain interdigital electrode on when loading alternating voltage, slide block can move towards loading end.Respectively in the interdigital electrode of different directions to on-load voltage, can realize that the two dimension of slide block drives.
The present invention compares with existing driver based on surface acoustic wave, both can realize that accurate two dimension drove, can realize the loading of big pre-load force again, thereby realizing realizing higher output work when two dimension drives: regulate bolt by four of accurate adjustment, the spacing of upper plate and lower plate is controlled at 30-100mm, can realize between big permanent magnet, little permanent magnet repulsion 2-200N on a large scale in accurately regulate.
Description of drawings
Fig. 1 is a structural representation of the present invention;
Fig. 2 assembles schematic diagram for the present invention;
Fig. 3 drives the platform schematic diagram for two dimension among the present invention;
Among the figure: 1 upper plate, 2 big permanent magnets are regulated bolt for 3 four, 4 little permanent magnets, 5 slide blocks, 6 two dimensions drive platform, 7 lower plates, four groups of interdigital electrodes are to 8,9,10,11.
Embodiment
Below in conjunction with accompanying drawing embodiments of the invention are elaborated: present embodiment is being to implement under the prerequisite with the technical solution of the present invention, provided detailed execution mode and concrete operating process, but protection scope of the present invention is not limited to following embodiment.
As shown in Figure 1, 2, the described high output power two-dimension micro-driver apparatus based on surface acoustic wave of this enforcement comprises upper plate 1, and 2, four of big permanent magnets are regulated bolt 3, little permanent magnet 4, and slide block 5, two dimension drives platform 6, lower plate 7.Wherein, upper plate 1, big permanent magnet 2, little permanent magnet 4, slide block 5, two dimension drive platform 6, lower plate 7 sets gradually from top to bottom, four regulate that bolt 3 is symmetrically distributed about upper plate 1 and lower plate 7 lines of centres and fixing, regulate upper plate 1 and lower plate 7.Big permanent magnet 2 is fixed under the upper plate 1, and little permanent magnet 4 is fixed on the slide block 5, and slide block 5 is placed on the lower plate 7.It is right that two dimension drives the four groups of interdigital electrodes that are symmetrically distributed on the platform 6, to 8,9, loads the ac-excited driving that can realize the slide block that is placed on it of resonance frequency in interdigital electrode on 10,11 respectively.
In the present embodiment, big permanent magnet 2, little permanent magnet 4 are all neodymium iron boron powerful permanent body, and big permanent magnet 2 is of a size of 100 * 100 * 20mm, and little permanent magnet 3 diameters are 8mm, highly are 5mm.
In the present embodiment, the size of upper plate 1, lower plate 7 all is 150 * 150 * 10mm, be symmetrically distributed about the upper plate 1 and lower plate 7 lines of centres, and four jiaos of four circular holes that are symmetrically distributed on every upper plate 1, the lower plate 7, Circularhole diameter is 10mm.
In the present embodiment, four pitch of regulating bolt are 2mm, and length is 140mm, and diameter is 10mm.Be symmetrically fixed on respectively in the circular hole of upper plate 1, lower plate 7.
In the present embodiment, slide block 5 is of a size of 4 * 4 * 0.5mm, and material is silicon materials, and the even little cylinder that distributes of lower surface, and cylinder diameter is 20 μ m, and spacing is 40 μ m, highly is 5 μ m, is obtained by fine process.
As shown in Figure 3, in the present embodiment, two dimension drives platform 6 and is of a size of 80 * 80 * 0.5mm, and material is 127.8 ° of YX type LiNbO3, and the material top is right about platform center four interdigital electrodes of symmetrical distribution, and interdigital electrode is a gold to material.Wherein, over against interdigital electrode be 35mm to spacing, each is interdigital to interdigitally constituting by two, each interdigital width is 100 μ m, and length is 26mm, highly is 1 μ m, each is interdigital to be 25mm to adjacent two interdigital intersection length, is obtained by fine process.
Present embodiment is regulated bolts 3 by accurately adjusting four, and the spacing of upper plate 1 and lower plate 7 is controlled at 30-100mm, thus the repulsion of realizing 1 of big permanent magnet 2, little permanent magnet 2-200N on a large scale in accurately adjusting.
In present embodiment when work, be decomposed into moving of X, Y direction with two dimension mobile, promptly by on X, the Y direction respectively driving sliding block 5 realize moving of two dimension.Institute add alternating voltage interdigital electrode to 9,11 on 9.6MHz, be 9.1MHz in interdigital electrode on to 8,10, power is input as 80-90W.
A certain interdigital electrode on when loading alternating voltage, slide block can move towards loading end, respectively in the interdigital electrode of different directions to on-load voltage, can realize that the two dimension of slide block drives.For example, when interdigital electrode loads alternating voltage on to 8, slide block towards interdigital electrode move 8 and away from interdigital electrode to 10.
Claims (5)
1, a kind of high output power two-dimension micro-driver apparatus based on surface acoustic wave, it is characterized in that comprising upper plate, big permanent magnet, regulate bolt for four, little permanent magnet, slide block, two dimension drives platform, lower plate, wherein: upper plate, big permanent magnet, little permanent magnet, slide block, two dimension drives platform, lower plate sets gradually from top to bottom, regulate bolt about upper plate lower plate line of centres symmetrical distribution and fixing for four, regulate upper plate and lower plate, big permanent magnet is fixed under the upper plate, little permanent magnet is fixed on the slide block, slide block is placed on the lower plate, it is right that two dimension drives the four groups of interdigital electrodes that are symmetrically distributed on the platform, in the ac-excited driving that can realize the slide block that be placed on it of interdigital electrode to top loading resonance frequency, regulate four distances of regulating between bolt control upper plate and the lower plate, realize regulating big, repulsion size between the little permanent magnet, thereby the adjusting of realization preload force.
2, the high output power two-dimension micro-driver apparatus based on surface acoustic wave according to claim 1, it is characterized in that, the spacing of described upper plate and lower plate is controlled at 30mm-100mm, realizes that the repulsion between big permanent magnet, little permanent magnet is regulated in the scope of 2N-200N.
3, the high output power two-dimension micro-driver apparatus based on surface acoustic wave according to claim 1 and 2 is characterized in that, described big permanent magnet, little permanent magnet are all neodymium iron boron powerful permanent body.
4, the high output power two-dimension micro-driver apparatus based on surface acoustic wave according to claim 1 and 2 is characterized in that, four jiaos of four circular holes that are symmetrically distributed are used to be provided with four and regulate bolt on described upper plate, the lower plate.
5, the high output power two-dimension micro-driver apparatus based on surface acoustic wave according to claim 1 is characterized in that, described sliding block material is silicon materials, and the even little cylinder that distributes of lower surface.
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| Application Number | Priority Date | Filing Date | Title |
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| CNA2008102030241A CN101414796A (en) | 2008-11-20 | 2008-11-20 | High output power two-dimension micro-driver apparatus based on sonic surface wave |
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| CNA2008102030241A CN101414796A (en) | 2008-11-20 | 2008-11-20 | High output power two-dimension micro-driver apparatus based on sonic surface wave |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114337583A (en) * | 2021-12-03 | 2022-04-12 | 中国科学院上海微系统与信息技术研究所 | Acoustic surface wave resonator |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114337583A (en) * | 2021-12-03 | 2022-04-12 | 中国科学院上海微系统与信息技术研究所 | Acoustic surface wave resonator |
| CN114337583B (en) * | 2021-12-03 | 2024-03-29 | 中国科学院上海微系统与信息技术研究所 | Surface acoustic wave resonator |
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Open date: 20090422 |