CN113437900A - Linear piezoelectric ultrasonic motor and driving method thereof - Google Patents

Linear piezoelectric ultrasonic motor and driving method thereof Download PDF

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Publication number
CN113437900A
CN113437900A CN202110569604.8A CN202110569604A CN113437900A CN 113437900 A CN113437900 A CN 113437900A CN 202110569604 A CN202110569604 A CN 202110569604A CN 113437900 A CN113437900 A CN 113437900A
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China
Prior art keywords
electrode
friction block
piezoelectric ceramic
ultrasonic motor
sliding block
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CN202110569604.8A
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Chinese (zh)
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郭明森
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Nanjing University of Aeronautics and Astronautics
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Nanjing University of Aeronautics and Astronautics
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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/028—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors along multiple or arbitrary translation directions, e.g. XYZ stages
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/04—Constructional details
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/06—Drive circuits; Control arrangements or methods

Abstract

The invention discloses a linear piezoelectric ultrasonic motor and a driving method thereof. One surface of the piezoelectric ceramic plate is provided with a grounding electrode, the other surface of the piezoelectric ceramic plate is provided with a first electrode, a second electrode and a third electrode, and the second electrode is positioned between the first electrode and the third electrode; a first alternating voltage V applied via the second electrode1sin (2 π ft) to vibrate the pad in the normal direction of the attached surface; the first electrode and the third electrode at both ends are simultaneously applied with a second AC voltage V2cos (2 pi ft) to vibrate the friction block along the tangential direction of the attached surface; so that the two motions are combined into an elliptical motion, and the sliding block is driven to do linear motion through friction force. Wherein V is adjusted independently1And V2The size of the friction block can be adjusted independentlyThe amplitude and the tangential amplitude are increased, so that the control precision of the motor is improved.

Description

Linear piezoelectric ultrasonic motor and driving method thereof
Technical Field
The invention belongs to the technical field of precision driving elements, and particularly relates to a linear piezoelectric ultrasonic motor and a driving method thereof.
Background
Compared with the traditional motor, the ultrasonic motor has the following characteristics: the structure is simple and compact, and the torque/volume ratio is large; the low-speed large torque can realize direct drive without a gear reduction mechanism; fast response (milliseconds); self-locking when power is off; the resolution ratio is high, and high precision (less than 100nm, and the motion precision of an ultrasonic motor with a certain special structure can reach below 10 nm) can be obtained under closed-loop control; no magnetic field is generated and is not interfered by an external magnetic field; the shape may vary (round, square, hollow, rod-like), etc. Due to its unique properties, the ultrasonic motor is superior to an electromagnetic motor in many occasions, and has a wide application prospect, especially in the application fields requiring quick response and high-precision position control (such as precision driving of optical elements in a medical imaging system), the ultrasonic motor has shown obvious superiority in the aspects of motion stroke, driving force, driving precision, response speed, power consumption and the like. In the field of industrial control, ultrasonic motors are also increasingly used. Linear piezoelectric ultrasonic motors developed by Physik Instruments (PI) corporation (described in US patent US 7598656) are used in large numbers for platform systems for high precision (micro to nano scale) positioning. The stator of the ultrasonic motor is formed by bonding a rectangular piezoelectric ceramic plate and a friction block, wherein a metal electrode on the upper surface of the piezoelectric ceramic plate is divided into a left area and a right area, when alternating-current voltage is applied to any metal electrode, 2 vibration modes (with close eigenfrequency, one mode is a symmetric mode SS-3, and the other mode is an anti-symmetric mode AS-3) are simultaneously excited, the friction block vibrates in a high-frequency micro-amplitude mode, and when the speed of the motor is controlled by adjusting the amplitude or the frequency of driving voltage, the tangential amplitude and the normal amplitude of the vibration of the friction block are simultaneously increased or reduced, so that the driving force of the friction block is increased or reduced. When it is necessary to control the motor to operate at an extremely low speed, the driving force thereof is drastically reduced, and a small disturbance of the friction force or the load force of the linear bearing may cause a large fluctuation in the operating speed of the motor, so that it is difficult to obtain a low-speed high-precision servo control.
In order to meet the requirements of products such as scientific instruments, biomedical treatment, aerospace and the like on low-speed high-precision actuators, a novel linear ultrasonic motor and a driving method are needed to be invented.
Disclosure of Invention
The invention aims to: aiming at various defects of the linear ultrasonic motor in actual use, a novel linear piezoelectric ultrasonic motor and a driving method thereof are provided; the tangential amplitude and the normal amplitude of the friction block can be independently adjusted respectively, so that the control precision is improved.
The invention relates to a linear piezoelectric ultrasonic motor, which adopts the following technical scheme:
a linear piezoelectric ultrasonic motor comprises a piezoelectric ceramic stator and a sliding block, wherein the piezoelectric ceramic stator comprises a piezoelectric ceramic plate and a friction block; the friction block is in elastic contact with the sliding block; the piezoelectric ceramic plate includes a first main surface, a second main surface opposite to the first main surface, and two side surfaces; the friction block is positioned on one side surface; the first major surface overlying a ground electrode; the second main surface is covered with a first electrode, a second electrode and a third electrode; wherein the second electrode is located between the first electrode and the third electrode; the second electrode is positioned at the positive center of the piezoelectric ceramic stator; the piezoelectric ceramic plate is polarized along the thickness direction, and the polarization direction of the area where the first electrode is located is opposite to the polarization direction of the area where the third electrode is located;
the sliding block is limited by the correspondingly arranged guide rail to slide along a straight line;
the second electrode is used for being applied with a first alternating voltage;
the first electrode and the third electrode are used for being simultaneously applied with a second alternating voltage.
Has the advantages that: according to the linear piezoelectric ultrasonic motor, the first alternating voltage is applied through the second electrode, and the second electrode is located at the midpoint of the piezoelectric ceramic stator; therefore, the friction block can vibrate along the normal direction of the attached surface after the first alternating voltage is applied; a second alternating voltage is simultaneously applied to the first electrode and the third electrode which are positioned at the two ends; and because the polarization direction of the area where the first electrode is located is opposite to the polarization direction of the area where the third electrode is located, the friction block can vibrate along the tangential direction of the attached surface. In this way, the normal direction vibration and the tangential direction vibration of the friction block can be independently adjusted, and the normal amplitude and the tangential amplitude of the friction block are independently adjusted by adjusting the first alternating voltage and the second alternating voltage respectively, so that the control precision of the motor is improved.
Further, the ground electrode completely covers the first major surface. The friction block is in the shape of one of a hemisphere, a trapezoid, a square or a short bar. The piezoelectric ceramic plate further comprises two end faces; one end face of the connecting rod is connected with an end face spring, and the other end face of the connecting rod is connected with a side guide rail; the side of the piezoelectric ceramic plate back to the friction block is connected with a side spring to enable the friction block to be in elastic contact with the sliding block. The first electrode, the second electrode and the third electrode are integrally and symmetrically distributed.
The driving method of the linear piezoelectric ultrasonic motor can adopt the following technical scheme:
grounding the grounding electrode;
applying an alternating voltage V to the second electrode1sin (2 pi ft) causes the friction block to vibrate along the normal direction of the surface of the attached sliding block;
simultaneously applying an alternating voltage V to the first electrode and the third electrode2cos (2 pi ft) enables the friction block to vibrate along the length direction in the surface plane of the attached sliding block;
by varying V2The tangential amplitude of the stator friction block is adjusted, and the motion speed of the sliding block is controlled.
By varying V1The size of the stator friction block is adjusted to the normal amplitude of the stator friction block.
Drawings
Fig. 1 is a schematic view of a structure and a driving method of a linear piezoelectric ultrasonic motor according to an embodiment of the present invention.
Fig. 2 is a schematic structural view of the piezoceramic stator shown in fig. 1.
Fig. 3 is a schematic diagram of the in-plane vibration mode SS-3.
Fig. 4 is a schematic diagram of the in-plane vibration mode AS-3.
FIG. 5 is the natural frequency ratio f of the vibration mode in the rectangular ceramic block surfaceAS-3/fSS-3The relationship is shown as a function of the width/length ratio.
Fig. 6 is a schematic diagram of an elliptical motion trajectory of the friction block.
Fig. 7 is a mechanical performance curve of the linear piezoelectric ultrasonic motor.
Detailed Description
In order to make the technical means and advantages of the present invention more apparent, the present invention will be described in further detail with reference to the accompanying drawings.
As can be seen from fig. 1: the linear piezoelectric ultrasonic motor 1 shown includes a piezoelectric ceramic stator 2, and the piezoelectric ceramic stator 2 is made of a rectangular piezoelectric ceramic plate 21, and a friction block 22 is bonded to a midpoint of a long side of a side of the rectangular piezoelectric ceramic plate 21. The friction block 22 may be in the shape of one of a hemisphere, trapezoid, square, or short bar and is made of a wear resistant material. The friction block 22 is bonded and compounded with the rectangular piezoelectric ceramic plate 21 by epoxy resin.
The linear piezoelectric ultrasonic motor 1 also has a sliding block 3. The main plane of the sliding block 3 is parallel to the plane of the friction block 22, and the sliding direction of the sliding block 3 is defined in a direction parallel to the length of the rectangular piezoelectric ceramic plate 21. The friction block 22 is in elastic contact with the sliding block 3, and is realized by pre-pressure generated by the spring 4 (or an elastic mechanism). Fig. 2 is a schematic structural view of the piezoceramic stator 2. The ratio of the length to the width of the rectangular piezoelectric ceramic plate 21 is set to a value such that the modes SS-3 and AS-3 have the same natural frequency f0. The rectangular piezoelectric ceramic plate 21 has 3 rectangular metal electrodes, i.e., a first electrode 21b, a second electrode 21a, and a third electrode 21c, symmetrically distributed on the upper surface thereof, and an entire metal ground electrode 21d on the lower surface thereof, and the rectangular piezoelectric ceramic plate 21 is polarized in the thickness direction, and the polarization directions of two side regions (the portions covered by the first electrode 21b and the third electrode 21 c) are opposite (the polarization directions can refer to black arrows in fig. 2). The polarization treatment of piezoelectric ceramic belongs to the field of material pretreatment, and is characterized by that on the metal electrode of ceramic surface a high direct-current voltage is applied and held for a period of time so as to make the electric dipoles turn to uniform arrangement, and after the treatment the piezoelectric ceramic is permanently changed. The electric driving method of the linear piezoelectric ultrasonic motor 1 is shown in fig. 1, the grounding electrode 21d is grounded, and the alternating voltage V is1sin (2 π ft) is applied to the second electrode 21a on the top surface (exciting in-plane vibration mode SS-3, the pad vibrates in the normal direction of the attached surface), and an AC voltage V2cos (2 π ft) is applied to the first electrode 21b and the third electrode 21c (excitation in-plane vibration mode AS-3, the rubbing block vibrates in the in-plane length direction of the attachment surface). When the driving voltage frequency f is close to the modal natural frequency f0When the amplitude of the motor is maximum, the end of the friction block 22 generates nano-to micron-sized high-frequency elliptical track motion, and the sliding block 3 is driven to do linear motion through friction force. The parameter f is the driving voltage frequency; t is the time.
Fig. 3 is a schematic diagram of the in-plane vibration mode SS-3 (SS-3 represents a 3 rd order "symmetric-symmetric" mode), (a) shows a displacement amplitude distribution, (b) shows a displacement X-direction component distribution, and (c) shows a displacement Y-direction component distribution. Define the displacement vector of the particle as
Figure BDA0003082144740000041
ux、uy、uzThe displacement components of the particles in the direction X, Y, Z,
Figure BDA0003082144740000042
respectively unit vectors in the direction of X, Y, Z. The components of the displacement in the X direction and the component in the Y direction of the in-plane vibration mode SS-3 satisfy the following symmetry:
ux(-ξ,η,ζ)＝-ux(ξ,η,ζ)
uy(-ξ,η,ζ)＝uy(ξ,η,ζ)
ux(ξ,-η,ζ)＝ux(ξ,η,ζ)
uy(ξ,-η,ζ)＝-uy(ξ,η,ζ)，
where (ξ, η, ζ) are the position coordinates of the particle.
Fig. 4 is a schematic diagram of the in-plane vibration mode AS-3 (AS-3 represents a 3 rd order "antisymmetric-symmetric" mode), (a) is a displacement amplitude distribution, (b) is a distribution of a displacement X-direction component, and (c) is a distribution of a displacement Y-direction component, which satisfies the following symmetry:
ux(-ξ,η,ζ)＝ux(ξ,η,ζ)
uy(-ξ,η,ζ)＝-uy(ξ,η,ζ)
ux(ξ,-η,ζ)＝ux(ξ,η,ζ)
uy(ξ,-η,ζ)＝-uy(ξ,η,ζ)，
wherein u isx、uy、uzThe displacement components of the particle in the direction X, Y, Z, respectively, (ξ, η, ζ) are the position coordinates of the particle.
FIG. 5 is the natural frequency ratio f of the vibration mode in the rectangular ceramic block surfaceAS-3/fSS-3The relationship is shown as a function of the width/length ratio. When the poisson's ratio of the ceramic material is 0.3, the width of the rectangular ceramic block should be set to 0.44 times the length.
Fig. 6 is a schematic diagram of an elliptical motion trajectory of the friction block 22, where x is a length direction of the rectangular piezoelectric ceramic plate 21, and y is a width direction of the rectangular piezoelectric ceramic plate 21. The tangential x-direction amplitude of the friction block 22 ends is passed by a voltage V2By regulation, the speed of movement of the sliding block 3 decreases as the tangential amplitude of the stator friction block 22 decreases.
Fig. 7 is a mechanical performance curve of the ultrasonic motor 1. The normal amplitude and the tangential amplitude of the elliptical motion track of the friction block 22 can be independently adjusted, the normal amplitude cannot be reduced along with the adjustment of the tangential amplitude, and the ultrasonic motor 1 still has larger driving force when running at low speed, so that more stable low-speed motion can be realized.

Claims (7)

1. The utility model provides a linear type piezoelectricity supersound motor, includes piezoceramics stator and sliding block, its characterized in that: the piezoelectric ceramic stator comprises a piezoelectric ceramic plate and a friction block; the friction block is in elastic contact with the sliding block; the piezoelectric ceramic plate includes a first main surface, a second main surface opposite to the first main surface, and two side surfaces; the friction block is positioned on one side surface; the first major surface overlying a ground electrode; the second main surface is covered with a first electrode, a second electrode and a third electrode; wherein the second electrode is located between the first electrode and the third electrode; the second electrode is positioned at the positive center of the piezoelectric ceramic stator; the piezoelectric ceramic plate is polarized along the thickness direction, and the polarization direction of the area where the first electrode is located is opposite to the polarization direction of the area where the third electrode is located;
the sliding block is limited by the correspondingly arranged guide rail to slide along a straight line;
the second electrode is used for being applied with a first alternating voltage;
the first electrode and the third electrode are used for being simultaneously applied with a second alternating voltage.
2. The linear piezoelectric ultrasonic motor according to claim 1, wherein: the ground electrode completely covers the first major surface.
3. The linear piezoelectric ultrasonic motor according to claim 1 or 2, wherein: the friction block is in the shape of one of a hemisphere, a trapezoid, a square or a short bar.
4. The linear piezoelectric ultrasonic motor according to claim 1, wherein: the piezoelectric ceramic plate further comprises two end faces; one end face of the connecting rod is connected with an end face spring, and the other end face of the connecting rod is connected with a side guide rail; the side of the piezoelectric ceramic plate back to the friction block is connected with a side spring to enable the friction block to be in elastic contact with the sliding block.
5. The linear piezoelectric ultrasonic motor according to claim 1, wherein: the first electrode, the second electrode and the third electrode are integrally and symmetrically distributed.
6. A driving method of the linear piezoelectric ultrasonic motor according to any one of claims 1 to 5, characterized in that:
grounding the grounding electrode;
applying an alternating voltage V to the second electrode1sin (2 pi ft) causes the friction block to vibrate along the normal direction of the surface of the attached sliding block;
simultaneously applying an alternating voltage V to the first electrode and the third electrode2cos (2 pi ft) enables the friction block to vibrate along the length direction in the surface plane of the attached sliding block;
by varying V2The tangential amplitude of the stator friction block is adjusted, and the motion speed of the sliding block is controlled.
7.The driving method according to claim 6, characterized in that: by varying V1The size of the stator friction block is adjusted to the normal amplitude of the stator friction block.
CN202110569604.8A 2021-05-25 2021-05-25 Linear piezoelectric ultrasonic motor and driving method thereof Pending CN113437900A (en)

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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4918122B2 (en) * 2009-08-31 2012-04-18 セイコーインスツル株式会社 Ultrasonic motor and electronic device with ultrasonic motor
CN104467524A (en) * 2014-10-16 2015-03-25 南京航空航天大学 Working method of plate type linear piezoelectric motor based on in-plane mode
US20200204088A1 (en) * 2017-07-25 2020-06-25 PHYSIK INSTRUMENTE (Pl) GMBH & CO. KG Method for closed-loop motion control for an ultrasonic motor

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4918122B2 (en) * 2009-08-31 2012-04-18 セイコーインスツル株式会社 Ultrasonic motor and electronic device with ultrasonic motor
CN104467524A (en) * 2014-10-16 2015-03-25 南京航空航天大学 Working method of plate type linear piezoelectric motor based on in-plane mode
US20200204088A1 (en) * 2017-07-25 2020-06-25 PHYSIK INSTRUMENTE (Pl) GMBH & CO. KG Method for closed-loop motion control for an ultrasonic motor

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
陈乾伟: "新型多工作模式塔形直线超声电机的研究", 《中国优秀博硕士学位论文全文数据库(博士) 工程科技Ⅱ辑》 *
陈乾伟等: "工作模态控制解耦的塔形直线超声电机", 《振动、测试与诊断》 *

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Application publication date: 20210924