CN112466594B - Electric control vector magnetic field device and installation method thereof - Google Patents
Electric control vector magnetic field device and installation method thereof Download PDFInfo
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- CN112466594B CN112466594B CN202010922767.5A CN202010922767A CN112466594B CN 112466594 B CN112466594 B CN 112466594B CN 202010922767 A CN202010922767 A CN 202010922767A CN 112466594 B CN112466594 B CN 112466594B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F7/00—Magnets
- H01F7/02—Permanent magnets [PM]
- H01F7/0273—Magnetic circuits with PM for magnetic field generation
Abstract
The invention relates to the technical field of precise actuation, in particular to an electric control vector magnetic field device and an installation method thereof. Comprises a sample table, wherein a sample holder is arranged on the sample table; the magnetic field control mechanism comprises a moving part and a driving part for driving the moving part to do precise linear motion, a permanent magnet is loaded at the end part of the moving part, and the extension lines of the motion direction and the polarization direction of the permanent magnet are orthogonal to the center of the sample holder. The invention controls the precise actuation of the permanent magnet in one direction through the magnetic field control mechanism, and precisely controls the permanent magnet to be close to or far away from the sample on the sample support, thereby realizing the precise control of the magnetic field intensity of the sample. The electric control vector magnetic field device has the advantages of compact structure, high braking precision and large magnetic field regulation range.
Description
Technical Field
The invention relates to the technical field of precise actuation, in particular to a precise electric control vector magnetic field adjusting device and an installation method thereof.
Background
Precision actuation refers to a technique for controlling a load to achieve nanometer-scale precision motion along a given direction, and generally includes both linear actuation and rotational motion. The technology is widely applied to the fields of precise surface characterization, optical positioning adjustment, micro-nano processing and the like. For researching the surface science property under the electromagnetic field, a set of magnetic field control device integrated in the scanning probe of the scanning probe microscope system is necessary. On one hand, continuous and accurate regulation and control of the magnetic field intensity and direction are required to be realized; on the other hand, the apparatus itself must be compact and robust enough to accommodate the basic requirements of a highly shock resistant scanning probe system.
The existing magnetic field regulation and control device under room temperature atmosphere generally adopts a permanent magnet turntable or a linear horizontal pushing mode. The current commercial precision motion control console is large in size, complex in structure, poor in shock resistance, incapable of being compatible with the limited space inside a microscopic scanning probe, incapable of meeting the high shock resistance requirement of a scanning probe technology, and greatly limited in surface scientific research under an electromagnetic field environment.
Disclosure of Invention
The invention aims to provide an electric control vector magnetic field device and an installation method thereof, so as to improve the problems. In order to achieve the purpose, the technical scheme adopted by the invention is as follows:
in one aspect, an embodiment of the present application provides an electrically controlled vector magnetic field device, including: the device comprises a sample table, a scanning probe and a magnetic field control mechanism; a sample holder is arranged on the sample table; the scanning probe is arranged above the sample holder; the magnetic field control mechanism comprises a moving part and a driving part for driving the moving part to do linear motion, a permanent magnet is arranged at the end part of the moving part, and the polarization direction of the permanent magnet and the extension line of the motion direction are orthogonal to the center of the sample support.
Optionally, the number of the magnetic field control mechanisms is M, M is an integer greater than 0, and an included angle of 35.4 degrees is formed between each magnetic field control mechanism and the sample stage.
Optionally, the number of the magnetic field control mechanisms is 3, and an included angle between orthographic projections of two adjacent magnetic field control mechanisms on the sample stage is 120 degrees.
Optionally, the magnetic field control mechanism further comprises a fixing part, the fixing part comprises a first plane, and the first plane comprises a first installation plane and a second installation plane which are arranged in parallel; the fixed part further comprises a third mounting plane, the third mounting plane is arranged between the first mounting plane and the second mounting plane, and a 35.4-degree included angle is formed between the third mounting plane and the first plane.
Optionally, the first mounting plane and the second mounting plane are both provided with threaded holes for connecting with an external frame; and the third mounting plane is provided with a threaded hole for connecting with the driving part, and the fixing part is connected with the driving part through the third mounting plane.
Optionally, the drive member comprises a bracket, the bracket having a trapezoidal cross-section; the support groove is internally provided with a load prism, a piezoelectric ceramic stack is arranged between the load prism and the support groove, one end of the piezoelectric ceramic stack is fixedly connected with the support groove, and the other end of the piezoelectric ceramic stack is tightly attached to the load prism.
Optionally, the bracket includes a sixth mounting plane, a seventh mounting plane and an eighth mounting plane are respectively disposed at two ends of the sixth mounting plane, a sixth mounting plane and a first continuation plane are respectively disposed at two ends of the seventh mounting plane, and a fourth mounting plane is disposed at an end of the first continuation plane; a sixth mounting plane and a second extension plane are respectively arranged at two ends of the eighth mounting plane, a fifth mounting plane is arranged at the end part of the second extension plane, the first extension plane and the second extension plane are parallel to each other, and the first extension plane and the second extension plane are both vertical to the sixth mounting plane in space; a ninth mounting plane, a tenth mounting plane and an eleventh mounting plane are arranged on the outer side of the load prism; a first sapphire sheet is bonded and arranged on the outer side of the ninth mounting plane, a second sapphire sheet is bonded and arranged on the outer side of the tenth mounting plane, and a third sapphire sheet is bonded and arranged on the outer side of the eleventh mounting plane; a third piezoelectric ceramic stacking group is arranged between the eighth mounting plane and the first sapphire sheet, a first piezoelectric ceramic stacking group is arranged between the seventh mounting plane and the second sapphire sheet, an elastic piece is arranged between the fourth mounting plane and the fifth mounting plane, one end of the elastic piece is connected with the fourth mounting plane, and the other end of the elastic piece is connected with the fifth mounting plane; and a second piezoelectric ceramic stacking group is arranged between the elastic piece and the third sapphire piece.
Optionally, the elastic member comprises two first elastic members and two second elastic members parallel to each other; one end of the second piezoelectric ceramic stacking group is fixed on the first elastic piece, and the other end of the second piezoelectric ceramic stacking group is fixed on the second elastic piece; in first piezoceramics stack group, second piezoceramics stack group and the third piezoceramics stack group, all include the parallel piezoceramics stack of two polarization directions, and every the both ends of piezoceramics stack all are provided with the sapphire piece.
Optionally, a first terminal block is disposed on the sixth mounting plane; a second wiring platform is arranged on the seventh mounting plane; and a third wiring platform is arranged on the eighth mounting plane.
On the other hand, the embodiment of the present application provides an installation method of an electric control vector magnetic field device, including: fixing the first piezoelectric ceramic stacking group on the inner side of the seventh mounting plane through insulating glue; fixing the third piezoelectric ceramic stacking group on the inner side of the eighth mounting plane through insulating glue; fixing the first sapphire sheet on a ninth mounting plane through insulating cement, fixing the second sapphire sheet on a tenth mounting plane through insulating cement, and fixing the third sapphire sheet on an eleventh mounting plane through insulating cement; the first sapphire sheet is attached to a third piezoelectric ceramic stacking group, the second sapphire sheet is attached to the first piezoelectric ceramic stacking group, the second piezoelectric ceramic stacking group is attached to the third sapphire sheet, and the pressure between the first piezoelectric ceramic stacking group and the second sapphire sheet, the pressure between the second piezoelectric ceramic stacking group and the third sapphire sheet and the pressure between the third piezoelectric ceramic stacking group and the first sapphire sheet are adjusted by changing the deformation degrees of a first elastic piece and a second elastic piece through bolts; fixing the first wiring platform with pins to the outer side of the sixth mounting plane through bolts; fixing a second wiring platform with pins to the outer side of the seventh mounting plane through bolts; fixing a third wiring platform with pins to the outer side of the eighth mounting plane through bolts; the fixing part 10 is connected with the bracket through a bolt, and the electric control vector magnetic field device is fixed with the external frame through the first installation plane and the second installation plane of the fixing part.
The invention has the beneficial effects that:
the invention controls the permanent magnet to brake precisely in one direction through the magnetic field control mechanism, and precisely controls the permanent magnet to be close to or far away from the sample in the sample placing part, thereby realizing the precise control of the magnetic field intensity of the sample. The electric control vector magnetic field device has the advantages of compact structure, high braking precision and large moving range.
Additional features and advantages of the invention will be set forth in the description which follows, and in part will be obvious from the description, or may be learned by the practice of the embodiments of the invention. The objectives and other advantages of the invention will be realized and attained by the structure particularly pointed out in the written description and claims hereof as well as the appended drawings.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.
Fig. 1 is a schematic view of an installation structure of an electric control vector magnetic field device according to an embodiment of the present invention;
FIG. 2 is a schematic structural diagram of a magnetic field control mechanism according to an embodiment of the present invention;
FIG. 3 is a schematic structural view of another direction of the magnetic field control mechanism according to the embodiment of the present invention;
FIG. 4 is a schematic front view of a magnetic field control mechanism according to an embodiment of the present invention;
FIG. 5 is a schematic bottom view of a magnetic field control mechanism according to an embodiment of the present invention;
fig. 6 is a graph of a sawtooth voltage waveform as described in embodiments of the present invention.
The labels in the figure are: 1. a magnetic field control mechanism; 2. a sample stage; 3. a sample holder; 10. a fixing member; 20. a drive member; 30. a moving member; 101. a first mounting plane; 102. a second mounting plane; 103. a third mounting plane; 201. a first elastic member; 202. a first piezo ceramic stack group; 203. a second piezo-ceramic stack group; 204. a third piezo-ceramic stack group; 205. a second elastic member; 206. a fourth mounting plane; 207. a fifth mounting plane; 209. a first terminal block; 210. a second terminal block; 211. a third terminal block; 212. a sixth mounting plane; 213. a seventh mounting plane; 214. an eighth mounting plane; 215. a bracket; 301. a load prism; 302. a permanent magnet; 303. a ninth mounting plane; 304. a tenth mounting plane; 305. an eleventh mounting plane; 306. a first sapphire sheet; 307. a second sapphire sheet; 308. a third sapphire sheet.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. The components of the embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations. Thus, the following detailed description of the embodiments of the present invention, presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures. Meanwhile, in the description of the present invention, the terms "first", "second", and the like are used only for distinguishing the description, and are not to be construed as indicating or implying relative importance.
On one hand, as shown in fig. 1 to 5, the present embodiment provides an electrically controlled vector magnetic field apparatus, which includes a sample stage 2, a scanning probe, and a magnetic field control mechanism 1, wherein a sample holder 3 is disposed on the sample stage 2; the scanning probe is arranged above the sample holder 3; the magnetic field control mechanism 1 comprises a moving part 30 and a driving part 20 for driving the moving part 30 to do linear motion, a permanent magnet 302 is arranged at the end part of the moving part 30, and the polarization direction of the permanent magnet 302 and the extension line of the motion direction are orthogonal to the center of the sample holder 3.
Specifically, the sample stage 2 is parallel to the ground, the sample holder 3 is arranged at the center of the sample stage 2, and a sample can be placed in the sample holder 3. The permanent magnet 302 can be driven to approach or depart from the sample in the sample holder 3 by the driving part 20, so that the distance between the permanent magnet 302 and the sample can be accurately controlled, and the magnetic field intensity of the sample can be accurately controlled.
Optionally, as shown in fig. 1, the number of the magnetic field control mechanisms 1 is 3, each magnetic field control mechanism 1 forms an included angle of 35.4 degrees with the sample stage 2, and an included angle between orthogonal projections of two adjacent magnetic field control mechanisms 1 on the sample stage 2 is 120 degrees.
By combining the three magnetic field control mechanisms 1 in three different directions, a vector magnetic field region with adjustable strength and direction is formed around the sample. The compact motor design can be built in the limit space of the scanning probe system, the volume of the whole magnetic field device is effectively reduced, the moving range of the permanent magnet 302 is ensured, and the measuring range, the accuracy and the operability of magnetic field adjustment are improved.
Optionally, the magnetic field control mechanism 1 further comprises a fixed part 10, wherein the fixed part 10 comprises a first plane comprising a first installation plane 101 and a second installation plane 102 arranged in parallel; the fixing component 10 further includes a third mounting plane 103, the third mounting plane 103 is disposed between the first mounting plane 101 and the second mounting plane 102, and an included angle of 35.4 degrees is formed between the third mounting plane 103 and the first plane.
Optionally, the first mounting plane 101 and the second mounting plane 102 are both provided with a threaded hole connected with an external frame; the third mounting plane 103 is provided with a threaded hole for connecting with the driving component 20, and the fixing component 10 is connected with the driving component 20 through the third mounting plane 103.
Specifically, the first plane is parallel to the sample stage 2, and the first mounting plane 101 and the second mounting plane 102 are both provided with through holes or threaded holes, so that the magnetic field control mechanism 1 can be fixed to the external frame by bolts. The place where the outer frame is connected with the first plane is a mounting plane which is parallel to the sample table 2.
Optionally, the driving member 20 comprises a bracket 215, the bracket 215 having a trapezoidal cross-section; the load prism 301 is arranged in the bracket 215, the piezoelectric ceramic stack is arranged between the load prism 301 and the bracket 215, one end of the piezoelectric ceramic stack is fixedly connected with the bracket 215, and the other end of the piezoelectric ceramic stack is tightly attached to the load prism 301.
Optionally, the bracket 215 includes a sixth installation plane 212, both ends of the sixth installation plane 212 are respectively provided with a seventh installation plane 213 and an eighth installation plane 214, both ends of the seventh installation plane 213 are respectively provided with a sixth installation plane and a first continuation plane, and an end of the first continuation plane is provided with a fourth installation plane 206; a sixth installation plane and a second extension plane are respectively arranged at two ends of the eighth installation plane 214, a fifth installation plane 207 is arranged at the end of the second extension plane, the first extension plane and the second extension plane are parallel to each other, and the first extension plane and the second extension plane are both perpendicular to the sixth installation plane 212 in space; a ninth mounting plane 303, a tenth mounting plane 304 and an eleventh mounting plane 305 are arranged on the outer side of the load prism 301; a first sapphire sheet 306 is bonded to the outer side of the ninth mounting plane 303, a second sapphire sheet 307 is bonded to the outer side of the tenth mounting plane 304, and a third sapphire sheet 308 is bonded to the outer side of the eleventh mounting plane 305; a third piezoelectric ceramic stack group 204 is arranged between the eighth mounting plane 214 and the first sapphire sheet 306, and a first piezoelectric ceramic stack group 202 is arranged between the seventh mounting plane 213 and the second sapphire sheet 307; an elastic piece is arranged between the fourth mounting plane 206 and the fifth mounting plane 207, one end of the elastic piece is connected with the fourth mounting plane 206, and the other end of the elastic piece is connected with the fifth mounting plane 207; a second piezoceramic stack set 203 is arranged between the elastic piece and the third sapphire sheet 308.
Optionally, the elastic member includes two first elastic members 201 and two second elastic members 205 parallel to each other; one end of the second piezoceramic stack set 203 is fixed on the first elastic element 201, and the other end is fixed on the second elastic element 205; the first piezoelectric ceramic stack group 202, the second piezoelectric ceramic stack group 203 and the third piezoelectric ceramic stack group 204 respectively comprise two piezoelectric ceramic stacks with parallel polarization directions; each piezoelectric ceramic stack comprises 4 piezoelectric ceramic plates which are arranged in a staggered mode, and sapphire plates are arranged at two ends of each of the first piezoelectric ceramic stack group 202, the second piezoelectric ceramic stack group 203 and the third piezoelectric ceramic stack group 204.
Optionally, a first terminal block 209 is disposed on the sixth mounting plane 212; a second wiring platform 210 is arranged on the seventh mounting plane 213; a third land 211 is disposed on the eighth mounting plane 214.
Specifically, the first terminal block 209, the second terminal block 210, and the third terminal block 211 are all provided with two positive and negative pins.
The electric control vector magnetic field device in the embodiment has the following working process:
as shown in fig. 6, a sawtooth voltage type signal is applied to all the piezo-ceramic stacks at the same time, the rising edge of the sawtooth voltage is very steep, the piezo-ceramic stack in the driving part 20 will respond quickly and generate a tangential deformation, and at this time, there is a relative movement between the piezo-ceramic stack and the moving part 30; the relatively slow falling edge of the sawtooth-shaped voltage signal causes the piezo-ceramic stack in the driving member 20 to slowly return to its original shape, so that the rigid loading prism 301 in the moving member 30 is driven by friction force to have a slight relative displacement of about several tens of nanometers in the direction of the guide rail, for example, the direction of a1 in fig. 4, with respect to its original position. So that the moving member 30 moves one step forward in the a1 direction after the entire process. The above process is repeated continuously to realize the continuous stepwise movement of the moving member 30.
On the other hand, the present embodiment provides an electric control vector magnetic field device mounting method, which includes step S100, step S200, step S300, step S400 and step S500.
S100, fixing the first piezoelectric ceramic stack group 202 on the inner side of a seventh mounting plane 213 through insulating glue; fixing the third piezoceramic stack group 204 on the inner side of the eighth mounting plane 214 through insulating glue;
step S200, fixing a first sapphire sheet 306 on a ninth mounting plane 303 through insulating glue, fixing a second sapphire sheet 307 on a tenth mounting plane 304 through insulating glue, and fixing a third sapphire sheet 308 on an eleventh mounting plane 305 through insulating glue;
step S300, a first sapphire sheet 306 is attached to a third piezoelectric ceramic stack group 204, a second sapphire sheet 307 is attached to a first piezoelectric ceramic stack group 202, a second piezoelectric ceramic stack group 203 is attached to a third sapphire sheet 308, and the pressure between the first piezoelectric ceramic stack group 202 and the second sapphire sheet 307, the pressure between the second piezoelectric ceramic stack group 203 and the third sapphire sheet 308, and the pressure between the third piezoelectric ceramic stack group 204 and the first sapphire sheet 306 are adjusted by changing the deformation degrees of a first elastic piece 201 and a second elastic piece 205 through bolts;
step S400, fixing the first wiring platform 209 with pins to the outer side of the sixth mounting plane 212 through bolts; the second wire connecting table 210 with pins is fixed to the outer side of the seventh mounting plane 213 through bolts; the third land 211 with pins is fixed to the outside of the eighth mounting plane 214 by bolts;
step S500, connecting the fixing component 10 with the bracket 215 through the bolt, and connecting the electric control vector magnetic field device with the external frame through the first installation plane 101 and the second installation plane 102 of the fixing component 10.
The implementation principle and the generated technical effects of the installation method of the electric control vector magnetic field device provided by the embodiment of the invention are the same as those of the device embodiment, and for brief description, the corresponding contents in the device embodiment can be referred to where the method embodiment is not mentioned.
The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
The above description is only for the specific embodiments of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art can easily conceive of the changes or substitutions within the technical scope of the present invention, and all the changes or substitutions should be covered within the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.
Claims (9)
1. An electrically controlled vector magnetic field device, comprising:
the device comprises a sample table (2), wherein a sample holder (3) is arranged on the sample table (2);
the scanning probe is arranged above the sample holder (3); and
the magnetic field control mechanism (1) comprises a moving part (30) and a driving part (20) for driving the moving part (30) to do linear motion, a permanent magnet (302) is arranged at the end part of the moving part (30), and the polarization direction of the permanent magnet (302) and the extension line of the motion direction are orthogonal to the center of the sample holder (3);
the driving part (20) comprises a bracket (215), and the cross section of the bracket (215) is trapezoidal; the novel bracket is characterized in that a load prism (301) is arranged in the bracket (215), a piezoelectric ceramic stack is arranged between the load prism (301) and the bracket (215), one end of the piezoelectric ceramic stack is fixedly connected with the bracket (215), and the other end of the piezoelectric ceramic stack is tightly attached to the load prism (301).
2. An electrically controlled vector magnetic field apparatus according to claim 1, wherein: the magnetic field control mechanisms (1) comprise M magnetic field control mechanisms, M is an integer larger than 0, and each magnetic field control mechanism (1) and the sample table (2) form an included angle of 35.4 degrees.
3. An electrically controlled vector magnetic field apparatus according to claim 2, wherein: the magnetic field control mechanisms (1) comprise 3 magnetic field control mechanisms, and the included angle between the orthographic projections of the two adjacent magnetic field control mechanisms (1) on the sample table (2) is 120 degrees.
4. An electrically controlled vector magnetic field device according to claim 1, characterized in that said magnetic field control mechanism (1) further comprises a fixed part (10), said fixed part (10) comprising a first plane comprising a first mounting plane (101) and a second mounting plane (102) arranged in parallel; the fixing part (10) further comprises a third mounting plane (103), the third mounting plane (103) is arranged between the first mounting plane (101) and the second mounting plane (102), and an included angle of 35.4 degrees is formed between the third mounting plane (103) and the first plane.
5. An electrically controlled vector magnetic field apparatus according to claim 4, wherein: the first mounting plane (101) and the second mounting plane (102) are both provided with threaded holes for connecting with an external frame; the third mounting plane (103) is provided with a threaded hole used for being connected with the driving part (20), and the fixing part (10) is connected with the driving part (20) through the third mounting plane (103).
6. An electrically controlled vector magnetic field apparatus according to claim 1, wherein: the bracket (215) comprises a sixth installation plane (212), and a seventh installation plane (213) and an eighth installation plane (214) are respectively arranged at two ends of the sixth installation plane (212); a sixth mounting plane and a first extension plane are respectively arranged at two ends of the seventh mounting plane (213), and a fourth mounting plane (206) is arranged at the end part of the first extension plane; a sixth installation plane and a second continuation plane are respectively arranged at two ends of the eighth installation plane (214), a fifth installation plane (207) is arranged at the end part of the second continuation plane, the first continuation plane and the second continuation plane are parallel to each other, and the first continuation plane and the second continuation plane are both vertical to the sixth installation plane (212) in space; a ninth mounting plane (303), a tenth mounting plane (304) and an eleventh mounting plane (305) are arranged on the outer side of the load prism (301); a first sapphire sheet (306) is bonded and arranged on the outer side of the ninth mounting plane (303), a second sapphire sheet (307) is bonded and arranged on the outer side of the tenth mounting plane (304), and a third sapphire sheet (308) is bonded and arranged on the outer side of the eleventh mounting plane (305); a third piezoelectric ceramic stack group (204) is arranged between the eighth mounting plane (214) and the first sapphire sheet (306), and a first piezoelectric ceramic stack group (202) is arranged between the seventh mounting plane (213) and the second sapphire sheet (307); an elastic piece is arranged between the fourth mounting plane (206) and the fifth mounting plane (207), one end of the elastic piece is connected with the fourth mounting plane (206), and the other end of the elastic piece is connected with the fifth mounting plane (207); and a second piezoelectric ceramic stack group (203) is arranged between the elastic piece and the third sapphire piece (308).
7. An electrically controlled vector magnetic field apparatus according to claim 6, wherein: the elastic part comprises a first elastic part (201) and a second elastic part (205) which are parallel to each other; one end of the second piezoelectric ceramic stacking group (203) is fixed on the first elastic piece (201), and the other end of the second piezoelectric ceramic stacking group is fixed on the second elastic piece (205); in first piezoceramics stack group (202), second piezoceramics stack group (203) and third piezoceramics stack group (204), all include the parallel piezoceramics stack of two polarization directions, and every piezoceramics stack's both ends all are provided with the sapphire piece.
8. An electrically controlled vector magnetic field apparatus according to claim 6, wherein: a first wiring platform (209) is arranged on the sixth mounting plane (212); a second wiring platform (210) is arranged on the seventh mounting plane (213); and a third wiring platform (211) is arranged on the eighth mounting plane (214).
9. An electrically controlled vector magnetic field apparatus mounting method according to any one of claims 1 to 8, comprising:
fixing the first piezoelectric ceramic stack group (202) on the inner side of a seventh mounting plane (213) through insulating glue; fixing the third piezoelectric ceramic stack group (204) on the inner side of an eighth mounting plane (214) through insulating glue;
fixing a first sapphire sheet (306) on a ninth mounting plane (303) through insulating cement, fixing a second sapphire sheet (307) on a tenth mounting plane (304) through insulating cement, and fixing a third sapphire sheet (308) on an eleventh mounting plane (305) through insulating cement;
bonding a first sapphire sheet (306) and a third piezoelectric ceramic stack group (204), bonding a second sapphire sheet (307) and the first piezoelectric ceramic stack group (202), bonding a second piezoelectric ceramic stack group (203) and the third sapphire sheet (308), and adjusting the pressure between the first piezoelectric ceramic stack group (202) and the second sapphire sheet (307), the pressure between the second piezoelectric ceramic stack group (203) and the third sapphire sheet (308) and the pressure between the third piezoelectric ceramic stack group (204) and the first sapphire sheet (306) by changing the deformation degrees of a first elastic member (201) and a second elastic member (205) through bolts;
fixing the first wiring platform (209) with pins to the outer side of the sixth installation plane (212) through bolts; fixing the second wiring platform (210) with pins to the outer side of the seventh installation plane (213) through bolts; fixing the third wiring platform (211) with pins to the outer side of the eighth mounting plane (214) through bolts;
the fixing part 10 is connected with a bracket (215) through a bolt, and the electric control vector magnetic field device is fixed with an external frame through a first mounting plane (101) and a second mounting plane (102) of the fixing part (10).
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Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101446626A (en) * | 2008-12-19 | 2009-06-03 | 中国科学院微电子研究所 | Magnetic field generation device used for cold probe station |
| CN101833072A (en) * | 2010-04-28 | 2010-09-15 | 中国科学院半导体研究所 | Structure and method for realizing magnetic field scanning based on permanent magnet |
| CN202189227U (en) * | 2011-07-26 | 2012-04-11 | 中国科学院物理研究所 | Nano imaging and ultra-wide band electromagnetic property measurement system |
| CN104114960A (en) * | 2012-02-28 | 2014-10-22 | 制冷技术应用股份有限公司 | Magnetic field generator for magnetocaloric thermal appliance |
| CN104950269A (en) * | 2015-07-24 | 2015-09-30 | 中国工程物理研究院电子工程研究所 | Two-dimensional magnetic field probe table measuring system |
| EP3118642A1 (en) * | 2015-07-17 | 2017-01-18 | Honeywell International Inc. | Systems and methods for low power magnetic field generation for atomic sensors using electro-permanent magnets |
| CN209264567U (en) * | 2015-04-09 | 2019-08-16 | 必康达 | Use the imaging system of fluorescence nano diamond |
| CN111508683A (en) * | 2020-04-26 | 2020-08-07 | 南方科技大学 | Magnetic field generating system |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101783223B (en) * | 2009-01-21 | 2013-02-27 | 中国科学院微电子研究所 | Device for generating magnetic field and method for externally applying magnetic field to low temperature probe station |
| CN104493606B (en) * | 2014-12-31 | 2017-02-22 | 上海交通大学 | Processing machine tool and magnetostriction-based precise feeding driving device |
-
2020
- 2020-09-04 CN CN202010922767.5A patent/CN112466594B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101446626A (en) * | 2008-12-19 | 2009-06-03 | 中国科学院微电子研究所 | Magnetic field generation device used for cold probe station |
| CN101833072A (en) * | 2010-04-28 | 2010-09-15 | 中国科学院半导体研究所 | Structure and method for realizing magnetic field scanning based on permanent magnet |
| CN202189227U (en) * | 2011-07-26 | 2012-04-11 | 中国科学院物理研究所 | Nano imaging and ultra-wide band electromagnetic property measurement system |
| CN104114960A (en) * | 2012-02-28 | 2014-10-22 | 制冷技术应用股份有限公司 | Magnetic field generator for magnetocaloric thermal appliance |
| CN209264567U (en) * | 2015-04-09 | 2019-08-16 | 必康达 | Use the imaging system of fluorescence nano diamond |
| EP3118642A1 (en) * | 2015-07-17 | 2017-01-18 | Honeywell International Inc. | Systems and methods for low power magnetic field generation for atomic sensors using electro-permanent magnets |
| CN104950269A (en) * | 2015-07-24 | 2015-09-30 | 中国工程物理研究院电子工程研究所 | Two-dimensional magnetic field probe table measuring system |
| CN111508683A (en) * | 2020-04-26 | 2020-08-07 | 南方科技大学 | Magnetic field generating system |
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