CN112994513B - Hollow two-dimensional piezoelectric inertia impact driving platform - Google Patents
Hollow two-dimensional piezoelectric inertia impact driving platform Download PDFInfo
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- H02N2/04—Constructional details
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- H—ELECTRICITY
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- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
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- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
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Abstract
The invention discloses a hollow two-dimensional piezoelectric inertia impact driving platform which comprises a square platform, a packaging cover plate and a fixed base, wherein the square platform consists of a square outer frame, a square inner frame, a displacement amplification mechanism and a piezoelectric driver, the packaging cover plate is provided with a flexible mechanism and is installed on the upper surface of the square platform, the square platform is in friction coupling with the fixed base on the lower surface through the four corners of the square outer frame, and inertia impact motion is realized under sawtooth wave excitation voltage of the piezoelectric driver. The invention adopts the structural design with hollow center to provide observation aperture, adopts the friction coupling adjusting mechanism to ensure the stability of impact drive, and can further improve the application effect of multi-degree-of-freedom trans-scale precision drive positioning in microscopic imaging systems such as SEM and the like.
Description
Technical Field
The invention belongs to the technical field of piezoelectric precision positioning platform equipment, and particularly relates to a hollow two-dimensional piezoelectric inertia impact driving platform.
Background
With the rapid development of nanotechnology, in more and more occasions, nanoscale observation and control of tiny materials, devices, tissues and the like are required, so that the mechanical, electrical, biochemical and other characteristics of a sample are analyzed and researched, and the synthesis and assembly of the sample are assisted. When a nano manipulator, an AFM and other equipment are used for nano control, real-time image feedback is often required by means of SEM and other equipment, and in these occasions, a precision positioning platform is required to have an observation aperture so as to be convenient for SEM and other equipment to image a sample. At present, a mature precision positioning platform with a hollow structure is a piezoelectric flexible hinge platform, such as a P-612.2XY piezoelectric ceramic nano positioning system of PI company, and the platform has a nano-scale displacement resolution, but a motion stroke is only hundreds of microns, and an operation range is limited. Chinese patent publication No. CN110336485B adopts a friction impact driving principle to increase the movement stroke of the piezoelectric flexible hinge platform to tens of millimeters, but this design cannot provide an observation aperture, and the friction coupling has a stability problem. Therefore, the advantages of the piezoelectric flexible hinge platform and the impact driving principle need to be combined, the hollow two-dimensional piezoelectric driving platform is designed to realize cross-scale precision motion, and the application effect of the precision positioning platform in the field is improved.
Disclosure of Invention
In order to solve the problems, the invention provides a hollow two-dimensional piezoelectric inertia impact driving platform, which utilizes a central hollow structure design to provide an observation aperture for microscopic imaging equipment, adopts a driving principle of piezoelectric inertia impact to realize two-dimensional parallel connection cross-scale precision motion, and simultaneously increases a friction coupling adjusting mechanism to improve the precision and the stability of inertia impact driving.
The purpose of the invention can be realized by the following technical scheme:
a hollow two-dimensional piezoelectric inertia impact driving platform comprises a square platform, a packaging cover plate and a fixed base; the square platform consists of a square outer frame, a square inner frame, a displacement amplification mechanism and a piezoelectric driver; the center of the packaging cover plate is hollowed and is arranged on the upper surface of the square platform; the center of the fixed base is hollowed and arranged on the lower surface of the square platform;
the four inner sides of the square outer frame and the four outer sides of the square inner frame are respectively connected through displacement amplification mechanisms, and piezoelectric drivers are respectively arranged in the displacement amplification mechanisms; the piezoelectric driver acts on the displacement amplification mechanism to generate deformation, and the square outer frame and the square inner frame are respectively pushed to generate relative displacement in the plane orthogonal direction;
flexible mechanisms are respectively arranged between the four corner parts and the middle part of the packaging cover plate, the four corner parts of the packaging cover plate are respectively installed on the upper surfaces of the four corner parts of the square outer frame through screws and gaskets, and the middle part of the packaging cover plate is installed on the upper surface of the square inner frame through screws and gaskets;
the lower surface of the four corners of the square outer frame is in friction coupling with the upper surface of the fixed base, the bending hinges are respectively arranged between the four corners of the square outer frame and the middle part, and the heights of the four corners are adjusted through the bending hinges, so that the square outer frame is ensured to be in uniform contact with the fixed base.
Further, the displacement amplification mechanism is a triangular amplification mechanism, the piezoelectric driver is a piezoelectric ceramic stack, the flexible mechanism is an L-shaped cantilever beam, and the bending hinge is a rectangular-section beam.
Furthermore, through holes and hemispherical counter bores are symmetrically formed in the lower surfaces of the four corners of the square outer frame respectively, magnets are installed in the through holes, and friction balls are installed in the hemispherical counter bores; the upper surfaces of four corners of the fixed base are respectively provided with a lower ferromagnetic layer and an upper friction layer, the ferromagnetic layers and the magnets generate attractive magnetic force, and pre-pressure between the friction layers and the small friction balls is exerted.
Compared with the prior art, the invention has the advantages that:
(1) the upper surface of the square platform is provided with an encapsulation cover plate for protecting devices in the square platform and serving as a workbench for sample arrangement; the four corner parts and the middle part of the packaging cover plate are connected through a flexible mechanism and are respectively arranged on the square outer frame and the square inner frame, so that the stability of the packaging cover plate is ensured, and the influence of the packaging cover plate on the structural rigidity of the displacement amplification mechanism is avoided; the packaging cover plate also has a counterweight effect, the mass of the square outer frame is greater than that of the square inner frame, and the mass relation between the square outer frame and the square inner frame can be balanced through the packaging cover plate, so that stable inertial impact motion is generated.
(2) The lower surfaces of the four corners of the square outer frame are in friction coupling with the upper surface of the fixed base, and compared with the friction coupling of the lower surface of the square inner frame and the fixed base, the structure stability is better; the four corners of the square outer frame are connected with the middle part through a bending hinge, the height of the four corners can be adjusted by utilizing the plastic deformation of the bending hinge, and the consistent friction force of four contact points of the square outer frame and the fixed base is ensured; the inertia driving principle is adopted to replace the friction driving principle, the friction forces of the four contact points are uniformly and symmetrically distributed relative to the mass center of the driving platform all the time, extra torque cannot be generated by the friction force due to the change of the motion position of the driving platform, and the precision of inertia impact motion is improved.
Drawings
Fig. 1 shows an exploded view of a hollow two-dimensional piezoelectric inertial impactor driven platform according to an embodiment of the invention.
Fig. 2 illustrates a bottom view of a hollow two-dimensional piezoelectric inertial impact drive platform provided in accordance with an embodiment of the present invention.
Fig. 3 is a schematic diagram illustrating simulation results of a hollow two-dimensional piezoelectric inertia impact driving platform according to an embodiment of the present invention.
Fig. 4 is an equivalent mechanical model of the driving platform in the present invention.
FIG. 5 shows the step motion test results of the driving stage of the present invention.
FIG. 6 shows the results of the smooth motion test of the driving platform according to the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
As shown in fig. 1 and 2, a hollow two-dimensional piezoelectric inertia impact driving platform comprises a square platform 1, a packaging cover plate 2 and a fixed base 3; the square platform 1 consists of a square outer frame 4, a square inner frame 5, a displacement amplification mechanism 6 and a piezoelectric driver 7; the center of the packaging cover plate 2 is hollowed and is arranged on the upper surface of the square platform 1; the center of the fixed base 3 is hollowed and is arranged on the lower surface of the square platform 1;
the four inner sides of the square outer frame 4 and the four outer sides of the square inner frame 5 are respectively connected through displacement amplification mechanisms 6, and piezoelectric drivers 7 are respectively arranged inside the displacement amplification mechanisms 6; the piezoelectric driver 7 acts on the displacement amplification mechanism 6 to deform, and respectively pushes the square outer frame 4 and the square inner frame 5 to generate relative displacement in the plane orthogonal direction;
the lower surface of the four corners of the square outer frame 4 is in friction coupling with the upper surface of the fixed base 3, the bending hinges 11 are respectively arranged between the four corners of the square outer frame 4 and the middle part, and the heights of the four corners are adjusted through the bending hinges 11, so that the square outer frame 4 is ensured to be in uniform contact with the fixed base 3.
Further, the displacement amplification mechanism 6 is a triangular amplification mechanism, the piezoelectric driver 7 is a piezoelectric ceramic stack, the flexible mechanism 8 is an L-shaped cantilever beam, and the bending hinge 11 is a rectangular-section beam.
Furthermore, through holes and hemispherical counter bores are symmetrically formed in the lower surfaces of the four corners of the square outer frame 4, the magnets 12 are installed in the through holes, and the friction balls 13 are installed in the hemispherical counter bores; the upper surfaces of the four corners of the fixed base 3 are respectively provided with a lower ferromagnetic layer 14 and an upper friction layer 15, the ferromagnetic layer 14 and the magnet 10 generate attractive magnetic force, and pre-pressure between the friction layer 15 and the friction ball 13 is applied.
One specific embodiment of the invention is:
as shown in fig. 1 and 2, X, Y is a plane direction, Z is a thickness direction, the square outer frame 4, the square inner frame 5, the displacement amplification mechanism 6 and the bending hinge 11 of the square platform 1 can be integrally processed by a 65Mn steel plate wire cutting process, and the whole dimension is 45mm in length and width and 5mm in thickness; the four corners of the square outer frame 4 are respectively provided with 10mm multiplied by 10mm surfaces, the lower surface is respectively drilled with a through hole and a hemispherical counter bore, the magnets 12 and the friction small balls 13 are respectively installed by utilizing epoxy resin glue, the magnets 12 can be neodymium iron boron cylindrical magnets with the diameter of 5mm and the thickness of 5mm, and the friction small balls 13 can be alumina ceramic balls with the diameter of 2 mm; the piezoelectric driver 7 can be a piezoelectric ceramic stack with a section of 4mm multiplied by 4mm and a length of 18mm, and is pre-tightened and installed in the displacement amplification mechanism 6 by interference fit; the packaging cover plate 2 and the flexible mechanism 8 can be integrally processed by a 65Mn steel plate wire cutting process, and the whole size is long, the width is 45mm, and the thickness is 2 mm; the packaging cover plate 2 is arranged on the square platform 1 through a screw 9, and a gasket 10 provides a gap with the thickness of 5mm and integrally forms a driving platform; the fixed base 3 can be made of aluminum alloy, four sides can be fixed through mounting holes, four corners are respectively provided with the ferromagnetic layer 14 and the friction layer 15 by using epoxy resin glue, the ferromagnetic layer 14 can be a Q235 steel sheet with the surface of 20mm multiplied by 20mm and the thickness of 1mm, and the friction layer 15 can be a graphite film with the thickness of 0.2 mm; the driving platform is placed on the friction layer 15 of the fixed base 3, the central hollow size of the whole device is 20mm multiplied by 20mm, and the square platform 1 can respectively realize X, Y-direction movement in the range of the friction layer 15 by exciting the piezoelectric driver 7.
Taking the movement in the X direction as an example, the two piezoelectric drivers 7 in the X direction apply opposite excitation voltages respectively, the piezoelectric driver on the left extends, and the piezoelectric driver on the right shortens, so that the displacement amplification mechanisms 6 on the left and right respectively act to generate opposite deformations, and the relative displacement in the X direction between the square outer frame 4 and the square inner frame 5 is pushed. As shown in fig. 3, the simulation results show that: in the free state, the square platform 1 can generate the maximum relative displacement of 4.3 μm, and the natural vibration frequency is as high as 10380Hz, which means that the driving platform has higher driving displacement and working frequency.
As shown in FIG. 4, the drive platform may be equivalent to a mass-spring-mass system, where m1The total mass m of the square frame 4, the four corner portions of the package cover 2 and other attachments2The total mass k of the square inner frame 5, the middle part of the encapsulating cover 2 and other accessoriespFor the total stiffness of the displacement-amplifying mechanism 6, the piezoelectric actuator 7 and the flexible mechanism 8 in the direction X, Y, CpFor the damping coefficient, f is the frictional force between the friction ball 13 and the friction layer 15. Mass m1And m2The ratio of (a) has a direct influence on the inertial impulse driving process, while the mass of the square outer frame 4 is greater than the mass of the square inner frame 5, the mass m being balanced by the enclosing cover plate 2 and the flexural hinges 111And m2Equal, which is beneficial to generating stable inertia impact motion. The flexible mechanism 8 of the encapsulating cover 2 reduces the overall stiffness k of the encapsulating cover 2 pairpIs favorable for the piezoelectric actuator 7 to generate larger driving displacement. The flexural hinges 11 of the square frame 4 maintain the structural rigidity of the square platform 1 in the direction X, Y, facilitating the transmission of the driving displacement of the square platform 1 to the friction balls 13.
Under the action of sawtooth wave excitation voltage, the driving platform generates inertial impact motion, which can be divided into two action stages: (1) the excitation voltage rises slowly, the small friction balls 13 of the square outer frame 4 keep still on the friction layer 15, and the square inner frame 5 displaces towards the X direction under the action of the piezoelectric driver 7; (2) the excitation voltage drops rapidly, the piezoelectric driver 7 acts on the displacement amplification mechanism 6 to recover rapidly, an inertia impact effect is generated, the static friction force between the friction small ball 13 and the friction layer 15 is not enough to keep the position of the square outer frame 4, and the square platform 1 slides relative to the fixed base 3 to generate stepping displacement. As shown in fig. 5 and 6, the prototype test results show that: obvious stepping motion can be generated by applying sawtooth wave excitation voltage of 10Hz and 40V, and the stepping displacement of the driving platform reaches 1.8 mu m under the excitation voltage of 120V; when 200Hz and 40V sawtooth wave excitation voltage is applied, the motion of the driving platform tends to be smooth, the motion speed of the driving platform under 120V excitation voltage can reach 0.27mm/s, and the driving platform has strong motion output capability.
In the description herein, references to the description of "one embodiment," "an example," "a specific example" or the like are intended to mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
The foregoing is merely exemplary and illustrative of the present invention and various modifications, additions and substitutions may be made by those skilled in the art to the specific embodiments described without departing from the scope of the invention as defined in the following claims.
Claims (2)
1. The utility model provides a cavity two dimension piezoelectricity inertial impulse drive platform which characterized in that: comprises a square platform (1), a packaging cover plate (2) and a fixed base (3); the square platform (1) consists of a square outer frame (4), a square inner frame (5), a displacement amplification mechanism (6) and a piezoelectric driver (7); the center of the packaging cover plate (2) is hollowed and is arranged on the upper surface of the square platform (1); the center of the fixed base (3) is hollowed and is arranged on the lower surface of the square platform (1);
the four inner sides of the square outer frame (4) and the four outer sides of the square inner frame (5) are respectively connected through displacement amplification mechanisms (6), and piezoelectric drivers (7) are respectively arranged in the displacement amplification mechanisms (6); the piezoelectric driver (7) acts on the displacement amplification mechanism (6) to generate deformation, and the square outer frame (4) and the square inner frame (5) are respectively pushed to generate relative displacement in the plane orthogonal direction;
flexible mechanisms (8) are respectively arranged between the four corner parts and the middle part of the packaging cover plate (2), the four corner parts of the packaging cover plate (2) are respectively installed on the upper surfaces of the four corner parts of the square outer frame (4) through screws (9) and gaskets (10), and the middle part of the packaging cover plate (2) is installed on the upper surface of the square inner frame (5) through the screws (9) and the gaskets (10);
the lower surface of the four corners of the square outer frame (4) is in friction coupling with the upper surface of the fixed base (3), bending hinges (11) are respectively arranged between the four corners of the square outer frame (4) and the middle part, and the heights of the four corners are adjusted through the bending hinges (11), so that the square outer frame (4) is ensured to be in uniform contact with the fixed base (3);
the displacement amplification mechanism (6) is a triangular amplification mechanism, the piezoelectric driver (7) is a piezoelectric ceramic stack, the flexible mechanism (8) is an L-shaped cantilever beam, and the bending hinge (11) is a rectangular-section beam.
2. The hollow two-dimensional piezoelectric inertial impact driver platform according to claim 1, wherein: the lower surfaces of the four corners of the square outer frame (4) are respectively and symmetrically provided with a through hole and a hemispherical counter bore, a magnet (12) is arranged in the through hole, and a friction ball (13) is arranged in the hemispherical counter bore; the upper surfaces of the four corners of the fixed base (3) are respectively provided with a lower ferromagnetic layer (14) and an upper friction layer (15), the ferromagnetic layer (14) and the magnet (12) generate attractive magnetic force, and pre-pressure between the friction layer (15) and the small friction ball (13) is exerted.
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| WO2010058029A1 (en) * | 2008-11-24 | 2010-05-27 | Peter Hess | Drive mechanism for moving an object along an axis of motion and microvalve |
| CN103411106B (en) * | 2013-08-23 | 2015-08-19 | 苏州大学 | A kind of nesting type rhombus amplification two-dimensional precisely locating platform |
| CN105006254B (en) * | 2014-04-23 | 2017-05-03 | 东北大学 | Large-stroke quick-response X-Y micro-motion workbench with double displacement magnification |
| CN106847346A (en) * | 2017-03-31 | 2017-06-13 | 西安交通大学 | The big distance high frequency sound precisely locating platform of XY θ Three Degree Of Freedoms |
| CN109176420B (en) * | 2018-07-10 | 2021-08-06 | 天津大学 | Middle-mounted movable joint type flexible decoupling precision positioning structure |
| CN109546887B (en) * | 2018-12-05 | 2020-08-14 | 哈尔滨工业大学 | Rotating platform angle adjusting method of piezoelectric driving two-dimensional pointing adjusting mechanism with symmetrical structure |
| CN111854663A (en) * | 2020-06-08 | 2020-10-30 | 合肥工业大学 | Piezoelectric thread driving type one-dimensional positioning platform |
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