CN101331399B - 光化学传感器及其制造方法 - Google Patents

光化学传感器及其制造方法 Download PDF

Info

Publication number
CN101331399B
CN101331399B CN2006800476897A CN200680047689A CN101331399B CN 101331399 B CN101331399 B CN 101331399B CN 2006800476897 A CN2006800476897 A CN 2006800476897A CN 200680047689 A CN200680047689 A CN 200680047689A CN 101331399 B CN101331399 B CN 101331399B
Authority
CN
China
Prior art keywords
substrate
metal layer
detection layers
reflection
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN2006800476897A
Other languages
English (en)
Chinese (zh)
Other versions
CN101331399A (zh
Inventor
尼尔·拉科
迈克尔·S·文德兰
迈克尔·C·帕拉佐托
多拉·M·保卢奇
理查德·J·波里尔
斯特凡·H·格里斯卡
约翰·E·特伦德
莫塞斯·M·大卫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
3M Innovative Properties Co
Original Assignee
3M Innovative Properties Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 3M Innovative Properties Co filed Critical 3M Innovative Properties Co
Publication of CN101331399A publication Critical patent/CN101331399A/zh
Application granted granted Critical
Publication of CN101331399B publication Critical patent/CN101331399B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/75Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated
    • G01N21/77Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator
    • G01N21/78Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator producing a change of colour
    • G01N21/783Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator producing a change of colour for analysing gases
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/75Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated
    • G01N21/77Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator
    • G01N2021/7769Measurement method of reaction-produced change in sensor
    • G01N2021/7779Measurement method of reaction-produced change in sensor interferometric

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Plasma & Fusion (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By The Use Of Chemical Reactions (AREA)
  • Investigating Or Analyzing Non-Biological Materials By The Use Of Chemical Means (AREA)
CN2006800476897A 2005-12-21 2006-12-05 光化学传感器及其制造方法 Expired - Fee Related CN101331399B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11/275,268 2005-12-21
US11/275,268 US7556774B2 (en) 2005-12-21 2005-12-21 Optochemical sensor and method of making the same
PCT/US2006/046386 WO2007075273A1 (en) 2005-12-21 2006-12-05 Optochemical sensor and method of making the same

Publications (2)

Publication Number Publication Date
CN101331399A CN101331399A (zh) 2008-12-24
CN101331399B true CN101331399B (zh) 2012-09-05

Family

ID=38173726

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2006800476897A Expired - Fee Related CN101331399B (zh) 2005-12-21 2006-12-05 光化学传感器及其制造方法

Country Status (5)

Country Link
US (1) US7556774B2 (https=)
EP (1) EP1963852B1 (https=)
JP (1) JP4861431B2 (https=)
CN (1) CN101331399B (https=)
WO (1) WO2007075273A1 (https=)

Families Citing this family (48)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7704751B2 (en) * 2006-09-18 2010-04-27 3M Innovative Properties Company Polymeric fluorescent chemical sensor
WO2009001065A1 (en) * 2007-06-25 2008-12-31 Qinetiq Limited Preconcentrator device incorporating a polymer of intrinsic microporosity
US8137979B2 (en) * 2007-06-25 2012-03-20 Qinetiq Limited Preconcentrator device
JP2010540966A (ja) * 2007-10-05 2010-12-24 スリーエム イノベイティブ プロパティズ カンパニー ミクロ孔質ポリマーを含む有機化学センサー、及び使用方法
EP2208058B1 (en) * 2007-10-05 2018-07-11 3M Innovative Properties Company Organic chemical sensor comprising plasma-deposited microporous layer, and method of making and using
CN102308208B (zh) * 2008-12-23 2014-12-03 3M创新有限公司 具有微孔有机硅酸盐材料的有机化学传感器
CN202794129U (zh) * 2009-01-29 2013-03-13 3M创新有限公司 用于检测环境空气中有机被分析物存在情况的监控器
KR101720364B1 (ko) 2009-03-30 2017-03-27 쓰리엠 이노베이티브 프로퍼티즈 컴파니 분석물의 검출을 위한 광전자 방법 및 장치
CN102460119B (zh) 2009-05-22 2015-01-28 3M创新有限公司 多层比色传感器
US8537358B2 (en) 2009-05-22 2013-09-17 3M Innovative Properties Company Multilayer colorimetric sensor arrays
US8336543B2 (en) * 2009-05-22 2012-12-25 3M Innovative Properties Company Filter cartridge having cover for masking service life indicator
US8225782B2 (en) * 2009-05-22 2012-07-24 3M Innovative Properties Company Filter cartridge having location-registered view window for end-of-service-life-indicator (ESLI)
US8365723B2 (en) * 2009-05-22 2013-02-05 3M Innovative Properties Company Filter cartridge having cone of visibility for end-of-service-life-indicator (ESLI)
US8955515B2 (en) * 2009-10-23 2015-02-17 3M Innovative Properties Company Patterned chemical sensor having inert occluding layer
EP2553437A4 (en) 2010-04-02 2017-12-06 3M Innovative Properties Company Alignment registration feature for analyte sensor optical reader
US8821621B2 (en) 2010-04-02 2014-09-02 3M Innovative Properties Company Filter systems including optical analyte sensors and optical readers
BR112012025178A2 (pt) 2010-04-02 2016-06-14 3M Innovative Properties Co sistema de filtro que incluem sensores ópticos de analito
EP2583090B1 (en) 2010-06-15 2016-04-06 3M Innovative Properties Company Variable capacitance sensors and methods of making the same
GB201015401D0 (en) 2010-09-15 2010-10-27 Univ Cardiff Polymers, their method of manufacture and use thereof
GB201015397D0 (en) 2010-09-15 2010-10-27 Univ Cardiff Polymerisation method
CN103154712B (zh) 2010-09-30 2015-11-25 3M创新有限公司 传感器元件及其制备方法和包括所述传感器元件的传感器装置
JP5932806B2 (ja) 2010-09-30 2016-06-08 スリーエム イノベイティブ プロパティズ カンパニー センサー素子、その製造方法、及びそれを含むセンサー装置
BR112013007516A2 (pt) 2010-10-01 2020-10-06 3M Innovative Properties Company monitor portátil para indicação de final de vida útil
US9291484B2 (en) 2010-10-01 2016-03-22 3M Innovative Properties Company Method for correlating a monitoring device to the end of service life of a filter cartridge
US9442073B2 (en) * 2011-03-28 2016-09-13 3M Innovative Properties Company Sensor comprising a masking layer adhesive
WO2012141925A1 (en) * 2011-04-13 2012-10-18 3M Innovative Properties Company Method of detecting volatile organic compounds
KR101968999B1 (ko) 2011-04-13 2019-04-15 쓰리엠 이노베이티브 프로퍼티즈 컴파니 흡수 센서 요소를 사용하는 방법
US9506888B2 (en) 2011-04-13 2016-11-29 3M Innovative Properties Company Vapor sensor including sensor element with integral heating
KR101875174B1 (ko) * 2011-06-16 2018-07-06 쓰리엠 이노베이티브 프로퍼티즈 컴파니 표면 플라즈몬 공명 센서 요소 및 이를 포함하는 센서
LU91841B1 (en) * 2011-07-15 2013-01-16 Ct De Rech Public Gabriel Lippmann Method for forming gas sensing layers
CN104093780B (zh) * 2011-11-09 2016-09-14 3M创新有限公司 用于含氟聚合物的固化组合物
US9358494B2 (en) 2011-12-12 2016-06-07 3M Innovative Properties Company End of service life indicating systems for layered filter cartridges
WO2013090188A1 (en) 2011-12-13 2013-06-20 3M Innovative Properties Company Method for identification and quantitative determination of an unknown organic compound in a gaseous medium
CN104583763B (zh) 2012-06-25 2017-03-08 3M创新有限公司 传感器元件及其制备和使用方法
KR20150060819A (ko) * 2012-09-25 2015-06-03 쓰리엠 이노베이티브 프로퍼티즈 컴파니 중합성 스피로비스인단 단량체 및 이로부터 제조된 중합체
WO2014149917A1 (en) 2013-03-15 2014-09-25 3M Innovative Properties Company End of service life indicating systems for layered filter cartridges
KR102215926B1 (ko) * 2019-06-28 2021-02-17 한국생산기술연구원 미세 균열이 형성된 스트레인 게이지의 제작방법
US11881093B2 (en) 2020-08-20 2024-01-23 Denso International America, Inc. Systems and methods for identifying smoking in vehicles
US11760170B2 (en) 2020-08-20 2023-09-19 Denso International America, Inc. Olfaction sensor preservation systems and methods
US12017506B2 (en) 2020-08-20 2024-06-25 Denso International America, Inc. Passenger cabin air control systems and methods
US11760169B2 (en) 2020-08-20 2023-09-19 Denso International America, Inc. Particulate control systems and methods for olfaction sensors
US11813926B2 (en) 2020-08-20 2023-11-14 Denso International America, Inc. Binding agent and olfaction sensor
US12251991B2 (en) 2020-08-20 2025-03-18 Denso International America, Inc. Humidity control for olfaction sensors
US11932080B2 (en) 2020-08-20 2024-03-19 Denso International America, Inc. Diagnostic and recirculation control systems and methods
US12377711B2 (en) 2020-08-20 2025-08-05 Denso International America, Inc. Vehicle feature control systems and methods based on smoking
US11636870B2 (en) 2020-08-20 2023-04-25 Denso International America, Inc. Smoking cessation systems and methods
US11828210B2 (en) 2020-08-20 2023-11-28 Denso International America, Inc. Diagnostic systems and methods of vehicles using olfaction
US12269315B2 (en) 2020-08-20 2025-04-08 Denso International America, Inc. Systems and methods for measuring and managing odor brought into rental vehicles

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4776869A (en) * 1986-05-28 1988-10-11 Avl Ag Method for preparing substrates for optical sensors
EP0665425A2 (en) * 1984-07-06 1995-08-02 Photonetics, Inc. Spectral modulation sensor
US5611998A (en) * 1994-04-12 1997-03-18 Avl Medical Instruments Ag Optochemical sensor and method for production
US6007904A (en) * 1995-12-06 1999-12-28 Bartec Componenete Und Systeme Gmbh Optical sensor element
US20040184948A1 (en) * 2002-09-30 2004-09-23 3M Innovative Properties Company Colorimetric sensor

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5015843A (en) * 1990-02-15 1991-05-14 Polysense, Inc. Fiber optic chemical sensors based on polymer swelling
JP2665640B2 (ja) * 1991-07-22 1997-10-22 富士写真フイルム株式会社 乾式分析要素を用いた測定方法及び乾式分析要素
JPH08184560A (ja) * 1994-12-28 1996-07-16 Hoechst Japan Ltd 有機溶剤蒸気を検出するための光センサ装置
US6180318B1 (en) * 1999-05-19 2001-01-30 3M Innovative Properties Company Method of imaging an article
JP3469540B2 (ja) 2000-08-09 2003-11-25 サンクス株式会社 光学式センサ
US6396616B1 (en) * 2000-10-10 2002-05-28 3M Innovative Properties Company Direct laser imaging system
JP2002168790A (ja) * 2000-11-29 2002-06-14 Sony Corp 還元性大気汚染物質の検出具、その濃度測定具、その検出方法および、その濃度測定方法
US6878419B2 (en) * 2001-12-14 2005-04-12 3M Innovative Properties Co. Plasma treatment of porous materials
JP2004026547A (ja) 2002-06-24 2004-01-29 Nippon Sheet Glass Co Ltd 断熱合わせガラス
US20040062682A1 (en) * 2002-09-30 2004-04-01 Rakow Neal Anthony Colorimetric sensor
GB0317557D0 (en) 2003-07-26 2003-08-27 Univ Manchester Microporous polymer material
JP4543164B2 (ja) * 2003-11-06 2010-09-15 独立行政法人産業技術総合研究所 物質の収着により色が変化する構造性変色材
US7033667B2 (en) * 2003-12-18 2006-04-25 3M Innovative Properties Company Printed circuits on shrink film

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0665425A2 (en) * 1984-07-06 1995-08-02 Photonetics, Inc. Spectral modulation sensor
US4776869A (en) * 1986-05-28 1988-10-11 Avl Ag Method for preparing substrates for optical sensors
US5611998A (en) * 1994-04-12 1997-03-18 Avl Medical Instruments Ag Optochemical sensor and method for production
US6007904A (en) * 1995-12-06 1999-12-28 Bartec Componenete Und Systeme Gmbh Optical sensor element
US20040184948A1 (en) * 2002-09-30 2004-09-23 3M Innovative Properties Company Colorimetric sensor

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
JP特开2002-54990 2002.02.20

Also Published As

Publication number Publication date
EP1963852B1 (en) 2018-09-19
CN101331399A (zh) 2008-12-24
EP1963852A1 (en) 2008-09-03
JP4861431B2 (ja) 2012-01-25
WO2007075273A1 (en) 2007-07-05
US7556774B2 (en) 2009-07-07
US20070140907A1 (en) 2007-06-21
EP1963852A4 (en) 2017-09-06
JP2009521675A (ja) 2009-06-04

Similar Documents

Publication Publication Date Title
CN101331399B (zh) 光化学传感器及其制造方法
CN101573470B (zh) 等离子体沉积的微孔碳材料
CN101341404B (zh) 等离子体沉积微孔分析物检测层
CN103477215B (zh) 检测挥发性有机化合物的方法
AU2007351499B2 (en) Permeable nanoparticle reflector
US7449146B2 (en) Colorimetric sensor
EP2433112A2 (en) Multilayer colorimetric sensors
CN104024848A (zh) 用于识别和定量测定气体介质中的未知有机化合物的方法
US20030174384A1 (en) Nanoparticle-based all-optical sensors
US20090035179A1 (en) Colorimetric sensor
CN102308208A (zh) 具有微孔有机硅酸盐材料的有机化学传感器
CN113336184B (zh) 一种封闭膜结构mems红外光源及其制备方法
Zhan et al. Optical sensor array of chiral MOF-based Fabry–Pérot films for enantioselective odor sensing
CN110687068B (zh) 一种红外探测器及红外气体传感器
JP2025511142A (ja) 拡散識別ガスセンサー
Halas et al. Nanoparticle-based all-optical sensors
Steele et al. Surface functionalization and porosity studies of high-speed humidity sensors
AU2012201892A1 (en) Permeable nanoparticle reflector

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20120905

Termination date: 20201205

CF01 Termination of patent right due to non-payment of annual fee