CN101319892B - Distance/speed meter and distance/speed measuring method - Google Patents
Distance/speed meter and distance/speed measuring method Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P3/00—Measuring linear or angular speed; Measuring differences of linear or angular speeds
- G01P3/36—Devices characterised by the use of optical means, e.g. using infrared, visible, or ultraviolet light
- G01P3/366—Devices characterised by the use of optical means, e.g. using infrared, visible, or ultraviolet light by using diffraction of light
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/093—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by photoelectric pick-up
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
- G01S17/50—Systems of measurement based on relative movement of target
- G01S17/58—Velocity or trajectory determination systems; Sense-of-movement determination systems
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Abstract
A distance/speed meter provided by the invention includes first and second semiconductor lasers emit parallel laser light beams to a measurement target. A first laser driver drives the first semiconductor laser such that the oscillation interval in which at least the oscillation wavelength monotonically increases repeatedly exists. A second laser driver drives the second semiconductor laser such that the oscillation wavelength increases/decreases inversely to the oscillation wavelength of the first semiconductor laser. First and second light-receiving devices convert optical outputs from the first and second semiconductor lasers into electrical signals. A counting unit counts the numbers of interference waveforms generated by the first and second laser light beams and return light beams of the first and second laser light beams. A computing device computes the distance to the measurement target and the speed of the measurement target.
Description
Technical field
The present invention relates to a kind of distance/velograph and distance/speed measurement method that utilizes interference of light that at least one side in the speed of the distance of distance determination object and determination object is measured.
Background technology
The range observation that has utilized the interference of light that is produced by laser instrument can the interference measurement object because of belonging to non-cpntact measurement, is used as high-precision measuring method in the past always.Recently, for the miniaturization of implement device, semiconductor laser is used as the photo measure light source.As its representational example, there is the type that adopts FM heterodyne system (heterodyne) interferometer.Can carry out the measurement of longer distance in this case, and also have good accuracy, but owing to adopt interferometer in the outside of semiconductor laser, so have the complicated such shortcoming of optical system.
With respect to this, (just going up the field at document 1, hillside plot is pure, Chinese wistaria is near, " utilize the distance meter of the self-coupling effect of semiconductor laser ", 1994 annual electrical relation Hui East sea branch associating conference speech collections of thesis, 1994), (hillside plot is pure for document 2, the nearly Jin of Chinese wistaria Tian Ji gives birth to, last field just, " the relevant small-sized research that utilizes the self-coupling effect of semiconductor laser " apart from meter, like to know that the research Reported of polytechnical university accuses, No. 31 B, p.35～42,1996), document 3 (Guido Giuliani, Michele Norgia, Silvano Donatiand Thierry Bosch, " Laser diode self-mixing technique for sensingapplications ", JOURNAL OF OPTICS A:PURE AND APPLIED OPITCS, year) etc. p.283～294,2002 proposed to utilize at the output light of laser instrument and between from the back light of measuring object at the measuring instrument of the interference (self-coupling effect) of semiconductor laser inside.
According to this laser measuring apparatus, because that the semiconductor laser of built in light electric diode has concurrently is luminous, each function of interfering, receiving light, so can simplify the external intervention optical system significantly from coupled mode.Therefore, detecting means only is made of semiconductor laser and lens, compares with the situation in past, for small-sized.In addition, have the feature of range determination scope greater than triangulation.
The compound resonator model of FP type (Fabry-Perot Fabry Perot type) semiconductor laser has been shown among Figure 39.Turn back to the inside in vibration zone easily from the catoptrical part of determination object 104.Return the laser coupled in next faint light and the semiconductor laser resonator device 101, it is unstable that work will become, and produce noise (compound resonator noise or back light noise).Even export light relatively relative to return light quantity extremely small, but since the variation of the characteristic of the semiconductor laser that back light causes still significantly present.Such phenomenon is not limited to Fabry-Perot (Fabry-Perot) type (hereinafter referred to as the FP type) semiconductor laser, presents too in vertical cavity surface emitting laser (Vertical Cavity Surface Emitting Laser) type (hereinafter referred to as the VCSEL type), distributed feedback laser (Distributed Feedback Laser) type (hereinafter referred to as the Distributed Feedback Laser type) wait the semiconductor laser of other kind.
If the oscillation wavelength of laser instrument is λ, when being L from opening the distance of face 102 till determination object 104 near the wall of the semiconductor crystal of measuring phenomenon 104, when then satisfying following condition of resonance, the laser in the back light resonator 101 is strengthened mutually, and laser instrument output will increase slightly.
L＝qλ/2 …(1)
In formula (1), q is an integer.Even if extremely faint at scattered light from determination object 104, but, just produced amplification by the apparent reflectance in the resonator 101 that increases semiconductor laser, can fully observe this phenomenon.
Because semiconductor laser according to the size of injection current and therefore the different laser of transmission frequency when the modulating oscillation frequency, do not need external modulator, can directly be modulated by injection current.Figure 40 is the graph of a relation between the output waveform of oscillation wavelength when being illustrated in ratio according to a certain regulation the oscillation wavelength of semiconductor laser being changed and photodiode 103.Satisfying L=q λ/2 shown in the formula (1) o'clock, the phase differential of the laser in the back light resonator 101 becomes 0 ° (same-phase), and the laser in the back light resonator 101 are farthest strengthened mutually; When L=q λ/2+ λ/4, phase differential is 180 ° (antiphases), and the laser in the back light resonator 101 farthest weaken mutually.Thus, if the oscillation wavelength of semiconductor laser is changed, then laser instrument output situation that strengthens and the situation that weakens alternately repeats, when detecting the laser instrument output of this moment by the photodiode 103 that is arranged at resonator 101, just as shown in figure 40, obtain the stepped waveform of fixed cycle.Such waveform is commonly referred to as interference fringe.
With this stair-stepping waveform, be to be called mode hopping pulse (mode hoppulse) (being called MHP below) one by one in the interference fringe.MHP is and mode hopping (mode hopping) phenomenon that phenomenon is different.Such as, if when the distance of distance determination object 104 is L1, the quantity of MHP is 10, then when the distance L 2 of half, the quantity of MHP is 5.That is, when making the oscillation wavelength change of semiconductor laser under a certain set time, quantity and the measuring distance of MHP change pro rata.Therefore,, measure the frequency of MHP, then can carry out range observation easily if detect MHP by photodiode 103.
In the laser measuring apparatus of coupled mode, owing to can simplify the interference optics of resonator outside significantly, can make equipment miniaturization, and not need circuit at a high speed, the advantage of the random light intensity of anti-interference so have.In addition, because also can be extremely faint from the back light of determination object, so have the reflectivity that does not influence determination object, promptly do not select the advantage of determination object.But, comprising that in the interfere type measuring instrument in past of coupled mode the problem of existence is, even can measure apart from the distance of static determination object, also can't measure the distance of the determination object with speed.
Therefore, the inventor has proposed a kind of distance/velograph, and shown in document 4 (spy opens 2006-313080), it not only can be measured apart from the distance of static determination object, and can measure the speed of determination object.The structure of this distance/velograph shown in Figure 41.Distance/velograph of Figure 41 comprises: to the semiconductor laser 201 of determination object irradiating laser; The light output of semiconductor laser 201 is converted to the photodiode 202 of electric signal; Lens 203, it converges from the light of semiconductor laser 201, to determination object 210 irradiation, and converges back light from determination object 210, makes it incide semiconductor laser 201; Laser driver 204, its 2nd duration of oscillation that oscillation wavelength increases continuously in semiconductor laser 201 the 1st duration of oscillation and oscillation wavelength are reduced continuously alternately repeats; Current-voltage switching amplifier 205, its output current with photodiode 202 is converted to voltage and amplifies; Signal extraction circuit 206, its output voltage to current-voltage switching amplifier 205 carry out 2 subdifferentials to be handled; Counting circuit 207, the quantity of the MHP that is comprised in its output voltage to signal extraction circuit 206 is counted; Arithmetic unit 208, it calculates apart from the speed of the distance sum measurement object 210 of determination object 210; Display device 209, it shows the result of calculation of arithmetic unit 208.
The laser that penetrates from semiconductor laser 201 is by lens 203 optically focused, to determination object 210 incidents.The light of determined object 210 reflections is by lens 203 optically focused, to semiconductor laser 201 incidents.Photodiode 202 is converted to electric current with the light output of semiconductor laser 201.Current-voltage switching amplifier 205 is converted to voltage with the output current of photodiode 202 and amplifies, and the output voltage of 206 pairs of current-voltage switching amplifiers 205 of signal extraction circuit carries out 2 subdifferentials to be handled.Counting circuit 207 is at during each of the 1st duration of oscillation P1 and the 2nd duration of oscillation P2, and the quantity of the MHP that is comprised in the output voltage to signal extraction circuit 206 is counted.Arithmetic unit 208 calculates apart from the speed of the distance sum measurement object 210 of determination object 210 according to the quantity of the MHP of minimum oscillation wavelength lambda a, the full swing wavelength X b of semiconductor laser 201, the quantity of MHP among the 1st duration of oscillation P1 and the 2nd duration of oscillation P2.
Summary of the invention
According to disclosed distance/velograph in document 4, can measure simultaneously apart from the speed of the distance sum measurement object of determination object.But, in this distance/velograph, for measuring distance and speed, need through at least 3 times for example the 1st duration of oscillation t-1, the 2nd duration of oscillation t and the 1st duration of oscillation t+1 quantity of MHP is counted, have the long problem of needed time of measuring.
Research and develop the present invention in order to solve above-mentioned problem, its purpose is, utilizing interference of light not only can measure distance apart from static determination object, in the distance/velograph and distance/speed measurement method that can also measure the speed of determination object, the shortening Measuring Time.
A kind of distance/velograph is provided, and this distance/velograph comprises: the 1st semiconductor laser (1-1), and it is to determination object (11) irradiation the 1st laser; The 2nd semiconductor laser (1-2), its to determination object according to shining the 2nd laser with the mode of the 1st laser parallel; The 1st laser driver (4-1), its mode that exists repeatedly according to the dull continuously duration of oscillation that increases of oscillation wavelength at least drives above-mentioned the 1st semiconductor laser; The 2nd laser driver (42), it drives above-mentioned the 2nd semiconductor laser according to the increase and decrease of the oscillation wavelength mode opposite with above-mentioned the 1st semiconductor laser; The 1st optical receiver (2-1), its light output transform to above-mentioned the 1st semiconductor laser of major general is an electric signal; The 2nd optical receiver (2-2), its light output transform to above-mentioned the 2nd semiconductor laser of major general is an electric signal; Counting mechanism (13), comprise in its output signal above-mentioned the 1st optical receiver, by the quantity from the interference waveform that back light produced of determination object of the 1st laser and this laser, and comprise in the output signal of above-mentioned the 2nd optical receiver, count respectively by the quantity from the interference waveform that back light produced of determination object of the 2nd laser and this laser; And arithmetical organ (8), it is according to the count results of minimum oscillation wavelength and the full swing wavelength and the above-mentioned counting mechanism of the above-mentioned the 1st and the 2nd semiconductor laser, at least one side of calculating in the speed of the distance sum measurement object of determination object, above-mentioned counting mechanism, during 1st counting shorter than the duration of oscillation of the above-mentioned the 1st and the 2nd semiconductor laser, obtain with the above-mentioned the 1st and the 2nd semiconductor laser in the quantity of the interference waveform that comprised in the output signal of the corresponding optical receiver of semiconductor laser that increasing of oscillation wavelength, simultaneously with the 1st counting during during the 2nd counting in the identical moment, obtain with the above-mentioned the 1st and the 2nd semiconductor laser in the quantity of the interference waveform that comprised in the output signal of the corresponding optical receiver of semiconductor laser that reducing of oscillation wavelength; Above-mentioned arithmetical organ, comprise: distance/speed calculation mechanism (81), it is based on the count results of minimum oscillation wavelength and the full swing wavelength and the above-mentioned counting mechanism of the above-mentioned the 1st and the 2nd semiconductor laser, calculates apart from the candidate value of the speed of the candidate value of the distance of determination object and determination object; Condition judgement mechanism (82,82a), it judges the state of determination object based on the candidate value by above-mentioned distance/speed that speed calculation mechanism is calculated; And distance/speed determines mechanism (86,86a), and it is based on the result of determination of above-mentioned condition judgement mechanism, determines in the speed of the distance sum measurement object of determination object at least one.
The invention provides a kind of distance/speed measurement method, this distance/speed measurement method comprises: the mode according to the dull continuously duration of oscillation that increases of oscillation wavelength at least exists repeatedly drives the step that determination object is shone the 1st semiconductor laser of the 1st laser; According to the increase and decrease and the opposite mode of above-mentioned the 1st semiconductor laser of oscillation wavelength, drive step to the 2nd semiconductor laser of determination object and the 1st laser parallel ground irradiation the 2nd laser; The counting step that the quantity from the interference waveform that back light produced of determination object because of the 2nd laser and this laser that comprises in the output signal from the quantity of the interference waveform that back light produced of determination object and the 2nd optical receiver because of the 1st laser and this laser that comprises in the output signal to the 1st optical receiver is counted; And according to the minimum oscillation wavelength and the full swing wavelength of the above-mentioned the 1st and the 2nd semiconductor laser, and with the count results of the 1st and the 2nd each autocorrelative interference waveform of laser, at least one side of calculating in the speed of the distance sum measurement object of determination object calculation procedure is in above-mentioned counting step, during 1st counting shorter than the duration of oscillation of the above-mentioned the 1st and the 2nd semiconductor laser, obtain with the above-mentioned the 1st and the 2nd semiconductor laser in the quantity of the interference waveform that comprised in the output signal of the corresponding optical receiver of semiconductor laser that increasing of oscillation wavelength, simultaneously with the 1st counting during during the 2nd counting in the identical moment, obtain with the above-mentioned the 1st and the 2nd semiconductor laser in the quantity of the interference waveform that comprised in the output signal of the corresponding optical receiver of semiconductor laser that reducing of oscillation wavelength; In the aforementioned calculation step, comprise: distance/speed calculation step, based on the minimum oscillation wavelength of the above-mentioned the 1st and the 2nd semiconductor laser and full swing wavelength and count results, calculate apart from the candidate value of the speed of the candidate value of the distance of determination object and determination object in above-mentioned counting step; The condition judgement step based on the candidate value in above-mentioned distance/speed that the speed calculation step is calculated, is judged the state of determination object; And distance/speed determining step, based on result of determination, determine at least one in the speed of the distance sum measurement object of determination object in above-mentioned condition judgement step.
Description of drawings
Fig. 1 becomes the block diagram of distance/velograph of the 1st embodiment of the present invention for expression.
Fig. 2 is the figure of an oscillation wavelength example over time of the semiconductor laser among expression the 1st embodiment of the present invention.
Fig. 3 A and Fig. 3 B are the figure that schematically shows 2 the current-voltage switching amplifiers output voltage waveforms separately among the 1st embodiment of the present invention.Fig. 3 C is the figure that schematically shows identical 2 filtering circuits output voltage waveforms separately with Fig. 3 D.
Fig. 4 is the block scheme of an example of the structure of the counting assembly among expression the 1st embodiment of the present invention.
Fig. 5 is the process flow diagram of work of the counting assembly of presentation graphs 4.
Fig. 6 A～6D is the figure during the counting of counting assembly of presentation graphs 4.
Fig. 7 is the block scheme of an example of the structure of the arithmetic unit among expression the 1st embodiment of the present invention.
Fig. 8 is the process flow diagram of work of the arithmetic unit of presentation graphs 7.
Fig. 9 A～9C is the conversion that is used to illustrate along with the wavelength variations of semiconductor laser, the figure of the variation of the quantity of mode hopping pulse.
Figure 10 is used for illustrating at the 1st embodiment of the present invention from the figure of laser driver to the method for adjustment of the amplitude of the triangular wave drive current of semiconductor laser supply.
Figure 11 is the front and back that are used to illustrate in the moment of the wavelength variations conversion of semiconductor laser, the figure that makes the result of calculation of speed or distance have the method for continuation.
Figure 12 is the block scheme of an example of the structure of the counting assembly among expression the 2nd embodiment of the present invention.
Figure 13 is the process flow diagram of the work of the counting assembly of expression Figure 12.
Figure 14 is the block scheme of an example of the structure of the count results correction portion in the counting assembly of expression Figure 12.
Figure 15 A～Figure 15 F is the figure of action that is used to illustrate the counting assembly of Figure 12.
Figure 16 is the figure of an example of the number of degrees distribution in the cycle of expression mode hopping pulse.
Figure 17 A and Figure 17 B are the correction schematic diagram of count results that is used for illustrating the counter of the 2nd embodiment of the present invention.
Figure 18 is the number of degrees distribution plan in the cycle of expression mode hopping pulse.
Figure 19 contains the number of degrees distribution plan in cycle of the mode hopping pulse of noise for expression.
Figure 20 contains the figure of median in cycle of the mode hopping pulse of noise for expression.
Figure 21 is cut apart the probability distribution graph in the cycle of modulus of periodicity formula jump pulse for expression 2.
Figure 22 is cut apart the number of degrees distribution plan in the cycle of modulus of periodicity formula jump pulse for expression 2.
Figure 23 is cut apart the number of degrees distribution plan in the cycle of modulus of periodicity formula jump pulse for expression 2.
Figure 24 is cut apart the number of degrees distribution plan in the cycle of modulus of periodicity formula jump pulse for expression 2.
Figure 25 is the figure of the revised error of expression Counter Value.
Figure 26 becomes the figure that the number of degrees in cycle of 2 times modulus of periodicity formula jump pulse distribute for expression.
Figure 27 is the number of degrees distribution plan in the cycle of the 2 mode hopping pulses of cutting apart in the middle of the mode hopping pulse that lacks when being illustrated in counting.
Figure 28 is the number of degrees distribution plan in the cycle of the 2 mode hopping pulses of cutting apart in the middle of the mode hopping pulse that lacks when being illustrated in counting.
Figure 29 is illustrated in that counting occurs lacking simultaneously the time and the excessive number of degrees distribution plan in the cycle of the mode hopping pulse of the situation of counting.
Figure 30 is the block scheme of an example of the structure of the counting assembly among expression the 3rd embodiment of the present invention.
Figure 31 is the process flow diagram of the work of the counting assembly of expression Figure 30.
Figure 32 is the block scheme of an example of the structure of the count results correction portion in the counting assembly of expression Figure 30.
Figure 33 is the block scheme of an example of the structure of the arithmetic unit among expression the 4th embodiment of the present invention.
Figure 34 is the process flow diagram of the action of the arithmetic unit of expression Figure 33.
Figure 35 is the process flow diagram of the action of the condition judgement portion in the arithmetic unit of expression Figure 33.
Figure 36 becomes the block scheme of structure of distance/velograph of the 6th embodiment of the present invention for expression.
Figure 37 is the figure of oscillation wavelength another example over time of the semiconductor laser among expression the 1st～the 6th embodiment of the present invention.
Figure 38 is the figure of oscillation wavelength another example over time of the semiconductor laser among expression the 1st～the 6th embodiment of the present invention.
Figure 39 is the figure of the compound resonator model of the semiconductor laser in the existing laser instrument measuring instrument of expression.
Figure 40 is the graph of a relation between the output waveform of expression oscillation wavelength of semiconductor laser and built in light electric diode.
Figure 41 is the block scheme of the structure of the existing distance/velograph of expression.
Figure 42 is the figure of an oscillation wavelength example over time of the semiconductor laser in distance/velograph of expression Figure 41.
Embodiment
The present invention's ripple that to be a kind of basis penetrate when adopting the sensing of wavelength-modulated and by the interference signal between the ripple of object reflection, the technology of measuring distance.Therefore, also applicable to the interferometer of the optical profile type beyond coupled mode, the interferometer beyond the light.If the situation of coupling certainly that adopts semiconductor laser is more specifically described, then on one side from semiconductor laser to the determination object irradiating laser, when the oscillation wavelength of laser instrument is changed, oscillation wavelength become from minimum oscillation wavelength the full swing wavelength during the displacement of determination object of (or change during) from full swing wavelength to minimum oscillation wavelength by the quantity reflection of MHP.So the quantity of the MHP in the time of can oscillation wavelength being changed by research is come the state of detection assay object.It more than is interferometric ultimate principle.
(the 1st embodiment)
With reference to the accompanying drawings, describe the 1st embodiment of the present invention in detail.Fig. 1 becomes the block scheme of structure of distance/velograph of the 1st embodiment of the present invention for expression.The distance meter of Fig. 1 comprises: to the 1st, the 2nd semiconductor laser 1-1, the 1-2 of determination object 11 irradiating lasers; Respectively the light of semiconductor laser 1-1,1-2 being exported the 1st, the 2nd optical receiver that is converted to electric signal is photodiode 2-1,2-2; Assemble the light from semiconductor laser 1-1,1-2 respectively, to determination object 11 irradiations, and gathering makes it incide lens 3-1, the 3-2 of semiconductor laser 1-1,1-2 from the back light of determination object 11; Make the 1st, the 2nd laser driver 4-1, the 4-2 that in semiconductor laser 1-1,1-2, alternately repeat to produce the 2nd duration of oscillation that the 1st duration of oscillation that oscillation wavelength increases continuously and oscillation wavelength reduce continuously; Output current with photodiode 2-1,2-2 is converted to voltage respectively, and amplified current-voltage transitions amplifier 5-1,5-2; From the output voltage of current-voltage switching amplifier 5-1,5-2, remove filtering circuit 6-1, the 6-2 of carrier wave; The counting assembly 7 that the quantity of the MHP that is comprised in the output voltage to filtering circuit 6-1,6-2 is counted; Calculating is apart from the arithmetic unit 8 of the speed of the distance sum measurement object 11 of determination object 11; The display device 9 that shows the result of calculation of arithmetic unit 8; With control laser driver 4-1,4-2 so that the suitable amplitude adjustment apparatus 10 of the amplitude of the drive current of semiconductor laser 1-1,1-2.Current-voltage switching amplifier 5-1,5-2, filtering circuit 6-1,6-2 and counting assembly 7 constitute count section 13.
For easy explanation, suppose and in semiconductor laser 1-1,1-2, adopt the type (VCSEL type, Distributed Feedback Laser type) that does not have the mode hopping phenomenon below.
Laser driver 4-1,4-2 will about the time according to constant rate of change repeatedly the increase and decrease the triangular wave drive current as injection current, semiconductor supply laser instrument 1-1,1-2.Thus, semiconductor laser 1-1,1-2 are driven according to the mode that alternate repetition ground produces the 1st duration of oscillation and the 2nd duration of oscillation, in the 1st duration of oscillation, being in proportion of oscillation wavelength and injection current increases continuously with constant rate of change, in the 2nd duration of oscillation, being in proportion of oscillation wavelength and injection current reduces with constant rate of change.At this moment, laser driver 4-1,4-2 supply with drive current according to the opposite mode of increase and decrease of oscillation wavelength among semiconductor laser 1-1, the 1-2.That is, in semiconductor laser 1-1,1-2, the absolute value of the rate of change of oscillation wavelength is identical, and the polarity of rate of change is opposite.So when the oscillation wavelength of semiconductor laser 1-1 was maximal value, the oscillation wavelength of semiconductor laser 1-2 was a minimum value, when the oscillation wavelength of semiconductor laser 1-1 was minimum value, the oscillation wavelength of semiconductor laser 1-2 was a maximal value.
Fig. 2 is the oscillation wavelength figure over time of expression semiconductor laser 1-1,1-2.In Fig. 2, LD1 is the waveform of semiconductor laser 1-1, LD2 is the waveform of semiconductor laser 1-2, P1 was the 1st duration of oscillation, P2 was the 2nd duration of oscillation, λ a is the minimum value of the oscillation wavelength in during each, and λ b is the maximal value of the oscillation wavelength in during each, and T is triangle wave period.In the present embodiment, the maximal value λ b of oscillation wavelength and the minimum value λ a of oscillation wavelength remain fixing respectively, and their difference λ b-λ a also remains fixing.
The laser that penetrates from semiconductor laser 1-1,1-2 incides determination object 11 by lens 3-1,3-2 optically focused.At this moment, the laser of semiconductor laser 1-1,1-2 penetrates in parallel to each other, and incides determination object 11., incide among semiconductor laser 1-1, the 1-2 respectively by lens 3-1,3-2 optically focused by the light of semiconductor laser 1-1, the 1-2 of determination object 11 reflection.Have, it is optional to carry out optically focused by lens 3-1,3-2 again.Photodiode 2-1,2-2 are converted to electric current with the light output of semiconductor laser 1-1,1-2 respectively.Current-voltage switching amplifier 5-1,5-2 are converted to voltage with the output current of photodiode 2-1,2-2 respectively, and amplify.
Filtering circuit 6-1,6-2 have the function that extracts overlapped signal from modulating wave.Fig. 3 A, Fig. 3 B are respectively the figure of the output voltage waveforms of schematic expression current-voltage switching amplifier 5-1,5-2, and Fig. 3 C, Fig. 3 D are respectively the figure of the output voltage waveforms of schematic expression filtering circuit 6-1,6-2.These accompanying drawings are represented the waveform (modulating wave) of Fig. 3 A, Fig. 3 B from the output that is equivalent to photodiode 2-1,2-2, remove the waveform (carrier wave) of semiconductor laser 1-1, the 1-2 of Fig. 2, with the process of the MHP waveform (superimposed wave) that extracts Fig. 3 C, Fig. 3 D.
Counting assembly 7 is momentarily counted the quantity of MHP that comprised, time per unit in the output of filtering circuit 6-1,6-2 at each circuit of filtering circuit 6-1,6-2.Fig. 4 is the block scheme of an example of the structure of expression counting assembly 7, and Fig. 5 is the process flow diagram of the work of expression counting assembly 7.Counting assembly 7 is made of change-over switch 70, the 71-1 of period measurement portion, 71-2, converter section 72-1,72-2.
Whether at first, the change-over switch of counting assembly 7 70 is judged switching time (the step S100 of Fig. 5), if switching time, and being connected between the output of then switching filtering circuit 6-1,6-2 and the 71-1 of period measurement portion, the 71-2 (step S101).Result from each time of 1/2 of the period T of triangular wave the switching time of change-over switch 70.That is, change-over switch 70 is at the 1st duration of oscillation P1, and the output of filtering circuit 6-1 is connected with the input of the 71-1 of period measurement portion, and the output of filtering circuit 6-2 is connected with the 71-2 of period measurement portion; At the 2nd duration of oscillation P2, the output of filtering circuit 6-2 is connected with the input of the 71-1 of period measurement portion, the output of filtering circuit 6-1 is connected (step S101) with the 71-2 of period measurement portion.
In other words, in the 71-1 of period measurement portion, all the time in the output of input filter circuit 6-1 or 6-2 semiconductor laser 1-1 that is increasing corresponding to oscillation wavelength or the output of 1-2,, in the 71-2 of period measurement portion, all the time in the output of input filter circuit 6-1 or 6-2, the semiconductor laser 1-1 that reducing corresponding to oscillation wavelength or the output of 1-2.Have, current time is will be notified by laser driver 4-1,4-2 in the 1st duration of oscillation P1 or the 2nd duration of oscillation again.Change-over switch 70 is carried out switch operating according to the notice from laser driver 4-1,42-2.
The 71-1 of period measurement portion, each when producing rising edge in from the input of change-over switch 70, measure during the 1st counting in from cycle (that is the cycle of MHP) (the step S102 of Fig. 5) of the rising edge of the input of change-over switch 70.Equally, the 71-2 of period measurement portion, each when producing rising edge in from the input of change-over switch 70, measure during the 2nd counting in from cycle (cycle of MHP) (step S102) of the rising edge of the input of change-over switch 70.
Adopt Fig. 6 A～Fig. 6 D, to describing during the 1st, the 2nd the counting here.Fig. 6 A, Fig. 6 B are respectively the figure of the output voltage waveforms of schematic expression current-voltage conversion amplifier 5-1,5-2, and Fig. 6 C, Fig. 6 D are respectively the figure of the output voltage waveforms of schematic expression filtering circuit 6-1,6-2.Pn1, Pn2, Pn3, Pn4, Pn5, Pn6, Pn7, Pn8 be the 1st the counting during, Pm1, Pm2, Pm3, Pm4, Pm5, Pm6, Pm7, Pm8 be the 2nd the counting during, t0a, t1, t2, t0b, t3, t4, t0c, t5, t6, t0d, t7, t8 are the beginning or the finish time of the 1st counting period P n (Pn1, Pn2, Pn3, Pn4, Pn5, Pn6, Pn7, Pn8) and the 2nd counting period P m (Pm1, Pm2, Pm3, Pm4, Pm5, Pm6, Pm7, Pm8).
Shown in Fig. 6 C, Fig. 6 D, in the output at filtering circuit 6-1 or 6-2, with semiconductor laser 1-1 or the corresponding output of 1-2 that oscillation wavelength is increasing, set the 1st the counting period P n (Pn1, Pn2, Pn3, Pn4, Pn5, Pn6, Pn7, Pn8); In the output at filtering circuit 6-1 or 6-2, with semiconductor laser 1-1 or the corresponding output of 1-2 that oscillation wavelength is reducing, set the 2nd the counting period P m (Pm1, Pm2, Pm3, Pm4, Pm5, Pm6, Pm7, Pm8).
Preferred the 1st counting period P n and the 2nd counting period P m are than the length of the 1st duration of oscillation P1 and the 2nd duration of oscillation P2, and promptly 1/2 time of the period T of triangular wave is shorter.In addition, the 1st counting period P n and the 2nd counting period P m corresponding with it constantly must be consistent.But at the 1st counting period P n each other, the time can a part overlap, and at the 2nd counting period P m each other, the time also can a part overlap.
Being input to the gate signal GS among the 71-1 of period measurement portion, the 71-2, is the signal that rises when the beginning of the 1st counting period P n and the 2nd count cycle Pm, descends during the end at the 1st counting period P n and the 2nd count cycle Pm.Have again, with the 1st counting period P n and the 2nd counting period P m be set at remove the triangular wave drive current become the best part (P1 obtains from P2 to part that P1 switches to the part that P2 switches from oscillation period) during.
Then, the mean value in the cycle of the MHP that the converter section 72-1 of counting assembly 7 measures the 71-1 of period measurement portion is converted to the quantity X (quantity of the interference waveform of the semiconductor laser that oscillation wavelength is increasing) of the MHP of the time per unit among the 1st counting period P n, and the mean value in the cycle of the MHP that converter section 72-2 measures the 71-2 of period measurement portion is converted to the quantity Y (quantity of the interference waveform of the semiconductor laser that oscillation wavelength is reducing) (the step S103 of Fig. 5) of the MHP of the time per unit among the 2nd counting period P m.If establishing the average period of MHP is Ts, the triangle wave frequency is f, and then the quantity of the MHP of time per unit just can be calculated by { 2/ (f * Ts) }.The unit interval of this moment is time of 1/2 of the period T of triangular wave.
Counting assembly 7 carries out above such processing when each the 1st, the 2nd counting period P n, Pm.Therefore, when calculating the quantity X of MHP, calculate the quantity Y of MHP, ask quantity X and the Y of MHP so so simultaneously by the work of 71-2 of period measurement portion and transformation component 72-2 by the action of the 71-1 of period measurement portion and transformation component 72-1.
Then, arithmetic unit 8 calculates apart from the distance of determination object 11 and the speed of determination object 11 according to minimum oscillation wavelength lambda a, the full swing wavelength X b of semiconductor laser 1-1,1-2 and quantity X, the Y of MHP.Fig. 7 is the block scheme of an example of the structure of expression arithmetic unit 8, the process flow diagram that Fig. 8 does than the merit of arithmetic unit 8 for expression.The structure of arithmetic unit 8 comprises: the storage part 80 of quantity X, the Y of the MHP that storage is calculated by counting assembly 7 and the result of calculation of arithmetic unit 8; According to minimum oscillation wavelength lambda a, the full swing wavelength X b of semiconductor laser 1-1,1-2 and quantity X, the Y of MHP, calculate apart from the distance/speed calculation portion 81 of the candidate value of the speed of the candidate value of the distance of determination object 11 and determination object 11; Judge the condition judgement portion 82 of the state of determination object 11 according to the result of calculation of distance/speed calculation portion 81; According to the judged result of state judging part 82, determine the speed determination portion 83 of the speed of determination object 11; And, determine apart from the distance determining part 84 of the distance of determination object 11 according to the judged result of state judging part 82.Speed determination portion 83 and distance determining part 84 constitute distance/speed determination portion 86.
In the present embodiment, the state of establishing determination object 11 is to satisfy any one of the micro-displacement state of defined terms or the displacement state bigger than the change of micro-displacement state.When the average displacement of the determination object 11 during each of counting period P n and counting period P m is V, so-called micro-displacement state be satisfied (λ b-λ a)/state of λ b＞V/Lb, so-called displacement state be satisfied (λ b-λ a)/state of λ b≤V/Lb.But Lb is the middle distance apart from determination object 11 constantly of the 1st, the 2nd counting period P n, Pm.
At first, the storage part 80 of arithmetic unit 8 is stored quantity X, the Y (Fig. 8 step S201) of the MHP that is calculated by counting assembly 7.
Then, the distance of arithmetic unit 8/speed calculation portion 81, calculate determination object 11 speed the candidate value and apart from the candidate value of the distance of determination object 11, and the value that will calculate is kept at (the step S202 of Fig. 8) in the storage part 80.
Press shown in the following formula, distance/speed calculation portion 81 counts the quantity X (t) of the MHP among the period P n and the 1st candidate value V α 1 (t that next the 2nd quantity Y (t+1) that counts the MHP among the period P m+1 constantly calculates the speed among the moment t to t+1 according to the 1st, t+1), count the quantity Y (t) of the MHP among the period P m and the 2nd candidate value V α 2 (t that next the 1st quantity X (t+1) that counts the MHP among the period P n+1 constantly calculates the speed among the moment t to t+1 according to the 2nd, t+1), according to the quantity X (t) of MHP and the 3rd candidate value V β 3 (t of the speed among Y (t+1) the calculating moment t to t+1, t+1), with the 4th candidate value V β 4 (t that calculate the speed among the t to t+1 constantly according to the quantity Y (t) of MHP and X (t+1), and be kept at (step S202) in the storage part 80 t+1).
Vα1(t，t+1)＝(X(t)-Y(t+1))×λb/4 …(2)
Vα2(t，t+1)＝(Y(t)-X(t+1))×λa/4 …(3)
Vβ3(t，t+1)＝(X(t)+Y(t+1))×λb/4 …(4)
Vβ4(t，t+1)＝(Y(t)+X(t+1))×λb/4 …(5)
In addition, press shown in the following formula, the 5th candidate value V α 5 (t) and the 6th candidate value V β 6 (t) of the speed among the moment t-1 to t calculate according to the quantity Y (t) of the MHP among the 2nd counting period P m of the quantity X (t) of the MHP among the 1st counting period P n and synchronization in distance/speed calculation portion 81, and are kept at (step S202) in the storage part 80.
Vα5(t)＝(X(t)-Y(t))×(λa+λb)/8 …(6)
Vβ6(t)＝(X(t)+Y(t))×(λa+λb)/8 …(7)
In addition, press shown in the following formula, distance/speed calculation portion 81, count the quantity X (t) of the MHP among the period P n and the 1st candidate value L α 1 (t that next the 2nd quantity Y (t+1) that counts the MHP among the period P m+1 constantly calculates the distance among the moment t to t+1 according to the 1st, t+1), count the quantity Y (t) of the MHP among the period P m and the 2nd candidate value L α 2 (t that next the 1st quantity X (t+1) that counts the MHP among the period P n+1 constantly calculates the distance among the moment t to t+1 according to the 2nd, t+1), according to the quantity X (t) of MHP and the 3rd candidate value L β 3 (t of the distance among Y (t+1) the calculating moment t to t+1, t+1), with the 4th candidate value V β 4 (t that calculate the distance among the t to t+1 constantly according to the quantity Y (t) of MHP and X (t+1), and be kept at (step S202) in the storage part 80 t+1).
Lα1(t，t+1)＝λa×λb(X(t)+Y(t+1))/(4×(λa-λb))?…(8)
Lα2(t，t+1)＝λa×λb(Y(t)+X(t+1))/(4×(λa-λb))?…(9)
Lβ3(t，t+1)＝λa×λb(X(t)-Y(t+1))/(4×(λa-λb))?…(10)
Lβ4(t，t+1)＝λa×λb(Y(t)-X(t+1))/(4×(λa-λb))?…(11)
And, press shown in the following formula, distance/speed calculation portion 81, calculate the 5th candidate value L α 5 (t) and the 6th candidate value L β 6 (t) among the moment t-1 to t according to the quantity Y (t) of the MHP among the 2nd counting period P m of the quantity X (t) of the MHP among the 1st counting period P n and synchronization, and be kept at (step S202) in the storage part 80 apart from the distance of determination object 11.
Lα5(t)＝λa×λb(X(t)+Y(t))/(4×(λa-λb)) …(12)
Lβ6(t)＝λa×λb(X(t)-Y(t))/(4×(λa-λb)) …(13)
In formula (2)～formula (13), candidate value V α 1 (t, t+1), V α 2 (t, t+1), V α 5 (t), L α 1 (t, t+1), L α 2 (t, t+1), L α 5 (t) is that hypothesis determination object 11 is in the value that the micro-displacement state computation goes out, candidate value V β 3 (t, t+1), V β 4 (t, t+1), V β 6 (t), L β 3 (t, t+1), L β 4 (t, t+1), L β 6 (t) be the hypothesis determination object 11 be in the value that displacement state calculates.
T+1 is the finish time of the 1st counting period P n+1 and the 2nd counting period P m+1 constantly, t is the finish time of preceding 1 time counting period P n and the 2nd counting period P m of Pn+1, Pm+1 constantly, and t-1 is the finish time of the 1st preceding 2 times counting period P n-1 and the 2nd counting period P m-1 of Pn+1, Pm+1 constantly.X (t+1) is the quantity of the MHP among the 1st counting period P n+1, and X (t) is the quantity of the MHP among the 1st counting period P n, and Y (t+1) is the quantity of the MHP among the 2nd counting period P m+1, and Y (t) is the quantity of the MHP among the 2nd counting period P m.
For example, if current time is t+1=t2, then the 1st counting period P n+1 is the Pn2 of Fig. 6 C, and the 1st preceding 1 time counting period P n is Pn1, and the 2nd counting period P m+1 is the Pm2 of Fig. 6 D, and the 2nd preceding 1 time counting period P m is Pm1.In addition, if current time is t+1=t3, then the 1st counting period P n+1 is Pn3, and the 1st preceding 1 time counting period P n is Pn2, and the 2nd counting period P m+1 is Pm3, and the 2nd preceding 1 time counting period P m is Pm2.Arithmetic unit 8 carries out the calculating of formula (2)～formula (13) in the moment of the quantity of utilizing counting assembly 7 every calculating MHP.
Then, the condition judgement portion 82 of arithmetic unit 8 uses the result of calculation that is stored in formula (the 2)～formula (5) in the storage part 80, judges the state (Fig. 8 step S203) of determination object 11.Condition judgement portion 82, V α 1 (t, t+1)=(t t+1), be under the result of calculation of formula (2) and formula (3) situation about equating, judges that determination object 11 is in the micro-displacement state to V α 2.In addition, condition judgement portion 82 V β 3 (t, t+1)=(t t+1), be under the result of calculation of formula (4) and formula (5) situation about equating, judges that determination object 11 is in displacement state to V β 4.Have, condition judgement portion 82 judges that they equate under the situation of error in the error range of regulation of the result of calculation of the result of calculation of formula (2) and formula (3) again.No matter whether the result of calculation of formula (4) and formula (5) equates, all similarly can judge.
The speed determination portion 83 of arithmetic unit 8 is determined the absolute value (the step S204 of Fig. 8) of the speed of determination object 11 according to the result of determination of condition judgement portion 82.Promptly, speed determination portion 83, judging that determination object 11 is under the situation of micro-displacement state, determine to be stored in the candidate value V α 1 (t of the speed in the storage part 80, t+1) and V α 2 (t, t+1) mean value between is the absolute value (step S204) of the speed of the determination object 11 among the t-1 to t+1 constantly.
In addition, speed determination portion 83 is judging that determination object 11 is under the situation of displacement state, determine to be stored in the candidate value V β 3 (t of the speed in the storage part 80, t+1) and V β 4 (t, t+1) mean value between is the absolute value (step S204) of the speed of the determination object 11 among the t-1 to t+1 constantly.
So, the mean value of the result of calculation of the mean value of the result of calculation by using formula (2) and formula (3) or formula (4) and formula (5) just can improve noise tolerance.Have again, though noise tolerance is poor, but speed determination portion 83 judging that determination object 11 is under the situation of micro-displacement state, also can be determined the candidate value V α 1 (t of speed, t+1) and V α 2 (t, t+1) any one is the absolute value of the speed of determination object 11, judging that determination object 11 is under the situation of displacement state, also can determine the candidate value V β 3 (t of speed, t+1), (t, t+1) any one is the absolute value of the speed of determination object 11 to V β 4.
Have, speed determination portion 83 is judging that determination object 11 is under the situation of micro-displacement state again, also can determine to be stored in the absolute value (step S204) of candidate value V α 5 (t) of the speed in the storage part 80 for the speed of the determination object 11 among the moment t-1 to t.In addition, speed determination portion 83 is judging that determination object 11 is under the situation of displacement state, also can calculate the absolute value (step S204) of candidate value V β 6 (t) of the speed that is stored in the storage part 80 as the speed of the determination object 11 among the moment t-1 to t.
Than the situation of the result of calculation of using formula (2)～formula (5), use formula (6) or formula (7) can calculate more accurate speed.
Then, speed determination portion 83 is calculated following formula (14), formula (15), determines the direction (Fig. 8 step S205) of the speed of determination object 11.
∑X＝X(t)+X(t+1) …(14)
∑Y＝Y(t)+Y(t+1) …(15)
The size of the ∑ X of speed determination portion 83 comparison formula (14) and the ∑ Y of formula (15) is judged determination object 11 just near distance/velograph under the ∑ X situation bigger than ∑ Y, judge that under the ∑ Y situation bigger than ∑ X determination object 11 is just away from distance/velograph.
Have again, in step S204, speed determination portion 83 is used the result of calculation of formula (6) or formula (7) to substitute the result of calculation of using formula (2)～formula (5) to determine under the situation of absolute value of speed, compare the quantity X (t) of MHP and the size of Y (t), judge determination object 11 just near distance/velograph at X (t) under than the big situation of Y (t), Y (t) than the big situation of X (t) under judgement determination object 11 just away from distance/velograph.
Then, distance determining part 84 is according to the definite distance (the step S206 of Fig. 8) apart from determination object 11 of the result of determination of condition judgement portion 82.Promptly, distance determining part 84 judging that determination object 11 is under the situation of micro-displacement state, determines to be stored in the candidate value L α 1 (t of the distance in the storage part 80, t+1) and L α 2 (t, mean value t+1) they are the mean distance apart from determination object 11 (step S206) among the t-1 to t+1 constantly.
In addition, distance determining part 84 is judging that determination object 11 is under the situation of displacement state, (t, t+1) (t, t+1) mean value between be the mean distance apart from determination object 11 (step S206) of the moment among the t-1 to t+1 with L β 4 to determine to be stored in the candidate value L β 3 of the distance in the storage part 80.Have again, though noise tolerance is poor, but distance determining part 84 judging that determination object 11 is under the situation of micro-displacement state, also can be determined the candidate value L α 1 (t of distance, t+1) and L α 2 (t, t+1) any one is the distance apart from determination object 11, judging that determination object 11 is under the situation of displacement state, also can determine the candidate value L β 3 (t of distance, t+1), (t, t+1) any one is the distance apart from determination object 11 to L β 4.
Have, distance determining part 84 is judging that determination object 11 is under the situation of micro-displacement state again, and candidate value L α 5 (t) that also can determine to be stored in the distance in the storage part 80 are the mean distance apart from determination object 11 (step S206) among the moment t-1 to t.In addition, distance determining part 84 is judging that determination object 11 is under the situation of displacement state, and candidate value L β 6 (t) that also can determine to be stored in the distance in the storage part 80 are the mean distance apart from determination object 11 (step S206) among the moment t-1 to t.
Than the situation of the result of calculation of using formula (8)～formula (11), use formula (12) or formula (13) can calculate more accurate distance.
For example, arithmetic unit 8 is up to there being till user's indication measurement finishes (being the step S207 at Fig. 8), all carries out the processing of above such step S201～S206 in the moment of the quantity of utilizing counting assembly 7 every calculating MHP.
On the other hand, amplitude adjustment apparatus 10 uses the result of determination of the condition judgement portion 82 of arithmetic unit 8, and control laser driver 4-1,4-2 are so that the amplitude of the triangular wave drive current of semiconductor laser 1-1,1-2 is suitable.
As present embodiment, in using distance/velograph of a plurality of semiconductor laser 1-1,1-2,, will in measured value, produce error in case in the absolute value of the wavelength variable quantity of semiconductor laser 1-1,1-2, there are differences.Fig. 9 A～9C is the switching that is used to illustrate with the wavelength variations of semiconductor laser 1-1,1-2, the figure of the quantity X of MHP, the variation of Y, Fig. 9 A is the oscillation wavelength figure over time of expression semiconductor laser 1-1,1-2, Fig. 9 B is the figure of variation of quantity X, the Y of the MHP of the absolute value of the wavelength variable quantity of expression semiconductor laser 1-1,1-2 when equating, and Fig. 9 C is the figure of variation of quantity X, the Y of the MHP of the absolute value of the wavelength variable quantity of expression semiconductor laser 1-1,1-2 when there are differences.In Fig. 9 A～Fig. 9 C, LD1 is the waveform of semiconductor laser 1-1, LD2 is the waveform of semiconductor laser 1-2, X1, X2 are respectively the quantity of MHP of semiconductor laser 1-1, the 1-2 of the situation that increasing of oscillation wavelength, and Y1, Y2 are respectively the quantity of MHP of semiconductor laser 1-1, the 1-2 of the situation that reducing of oscillation wavelength.
Under the situation that the absolute value of the wavelength variable quantity of semiconductor laser 1-1,1-2 equates, shown in Fig. 9 B, even if at the oscillation wavelength of semiconductor laser 1-1,1-2 from increasing to minimizing, or from reducing to increasing moment SW1, the SW2 that switches, the front and back of SW3, though the quantity X that M is, Y keep continuity respectively, but in case there are differences in the absolute value of the wavelength variable quantity of semiconductor laser 1-1,1-2, just shown in Fig. 9 C, the quantity X of MHP, Y can lose continuity respectively.
Therefore, the speed candidate value V α 1 (t that the amplitude adjustment apparatus 10 of present embodiment uses the distance/speed calculation portion 81 of arithmetic unit 8 to calculate, t+1), V α 2 (t, t+1), V β 3 (t, t+1), V β 4 (t, t+1) in the middle of, based on the result of determination of condition judgement portion 82, speed determination portion 83 is judged as a side's who is not true value and does not adopt speed candidate value and carries out the amplitude adjustment.Judging under the situation that determination object 11 moves with the micro-displacement state, the side's that speed determination portion 83 does not adopt speed candidate value is V β 3 (t, t+1) and V β 4 (t, t+1) mean value, judging under the situation that determination object 11 moves with displacement state, the side's that speed determination portion 83 does not adopt speed candidate value is that (t is t+1) with V α 2 (t, t+1) mean value between for V α 1.
Amplitude adjuster 10 is by laser driver 4-1,4-2 adjusts the amplitude of triangular wave drive current, so that the candidate value V α 1 (t of the side's that speed determination portion 83 does not adopt speed, t+1) and V α 2 (t, t+1) mean value between or V β 3 (t, t+1) and V β 4 (t, t+1) mean value between, be substantially equal to the candidate value L α 1 (t that is judged to be the distance that is true value and the side that adopts in distance determining part 84, t+1) and L α 2 (t, t+1) mean value between or L β 3 (t, t+1) (t t+1) multiply by semiconductor laser 1-1 on the mean value between with L β 4, the wavelength variations rate of 1-2 (λ b-λ a)/value of λ b.At this moment, both can adjust from laser driver 4-1 and offer the drive current of semiconductor laser 1-1 and these both sides of drive current that offer semiconductor laser 1-2 from laser driver 4-2, also can adjust any one party.Judging that determination object 11 is under the situation of micro-displacement state, the candidate value of the side's that distance determining part 84 adopts distance is L α 1 (t, t+1) and L α 2 (t, t+1) mean value between, judging that determination object 11 is under the situation of displacement state, the candidate value of the side's that distance determining part 84 adopts distance is that (t is t+1) with L β 4 (t, t+1) mean value between for L β 3.
Figure 10 is the figure of the method for adjustment of the amplitude that is used to illustrate the triangular wave drive current that provides to semiconductor laser 1-1,1-2 from laser driver 4-1,4-2.According to indication from amplitude adjustment apparatus 10, laser driver 4-1,4-2, it is constant (in the example of Figure 10 to be fixed on fixed value by the maximal value with drive current, the higher limit CL of drive current by semiconductor laser 1-1,1-2 regulation), increase or reduce the minimum value of drive current, adjust the amplitude A MP of drive current.So like this, can with the amplitude setting of drive current suitable value.
As present embodiment, by adjusting the amplitude of triangular wave drive current, the absolute value of the wavelength variable quantity of semiconductor laser 1-1,1-2 is equated, can reduce the measuring error of distance and speed.
Have again, use the result of calculation of formula (6) or formula (7) to replace using the result of calculation of formula (2)～formula (5) to determine under the situation of absolute value of speed in speed determination portion 83, amplitude adjustment apparatus 10 is adjusted the amplitude of triangular wave drive currents, is substantially equal to that to be judged to be in distance determining part 84 be to multiply by semiconductor laser 1-1 on true value and the side's that adopts candidate value L α 5 (t) of distance or the L β 6 (t) so that speed determination portion 83 is judged to be a side's who is not true value and does not adopt candidate value V α 5 (t) of speed and V β 6 (t), the wavelength variations rate of 1-2 (λ b-λ a)/value of λ b.Judging under the situation that determination object 11 moves with the micro-displacement state, the side's that speed determination portion 83 does not adopt speed candidate value is V β 6 (t), judging that the side's that speed determination portion 83 does not adopt speed candidate value is V α 5 (t) under the situation that determination object 11 moves with displacement state.Be under the situation of micro-displacement state being judged to be determination object 11, the candidate value of the side's that distance determining part 84 adopts distance is L α 5 (t), judging that determination object 11 is under the situation of displacement state, the candidate value of the side's that distance determining part 84 adopts distance is L β 6 (t).
In addition, amplitude adjuster 10 also can be adjusted the amplitude of triangular wave drive current by laser driver 4-1,4-2, so that based on the result of determination of condition judgement portion 82, speed determination portion 83 is judged as the candidate value V α 1 (t of the speed that is true value and the side that adopts, t+1) and V α 2 (t, t+1) mean value between or V β 3 (t, t+1) and V β 4 (t, t+1) mean value between keeps continuity before and after the moment that the wavelength variations of semiconductor laser 1-1,1-2 is switched.In addition, replace using the result of calculation of formula (2)～formula (5) and use the result of calculation of formula (6) or formula (7) to determine under the situation of absolute value of speed in speed determination portion 83, amplitude adjustment apparatus 10 also can be adjusted the amplitude of triangular wave drive current, so that speed determination portion 83 is judged as candidate value V α 5 (t) or the V β 6 (t) of the speed that is true value and the side that adopts, before and after the moment that the wavelength variations of semiconductor laser 1-1,1-2 is switched, keep continuity.
Have, current time is that the 1st duration of oscillation P1 or the 2nd duration of oscillation P2 can be notified by laser driver 4-1,4-2 again, and the moment that the wavelength variations of semiconductor laser 1-1,1-2 is switched also can be notified by laser driver 4-1,4-2.Amplitude adjustment apparatus 10 is according to carrying out work from the notice of laser driver 4-1,4-2.
In addition, amplitude adjustment apparatus 10 also can be adjusted the amplitude of triangular wave drive current, so that based on the result of determination of condition judgement portion 82, distance determining part 84 is judged as the candidate value L α 1 (t of the distance that is true value and the side that adopts, t+1) and L α 2 (t, t+1) mean value between or L β 3 (t, t+1) and L β 4 (t, t+1) mean value between keeps continuity before and after the moment that the wavelength variations of semiconductor laser 1-1,1-2 is switched.In addition, replace the result of calculation of use formula (8)～formula (11) and use the result of calculation of formula (12) or formula (13) to determine under the situation of distance in distance determining part 84, amplitude adjustment apparatus 10 also can be adjusted the amplitude of triangular wave drive current, so that distance determining part 84 is judged as candidate value L α 5 (t) or the L β 6 (t) of the distance that is true value and the side that adopts, before and after the moment that the wavelength variations of semiconductor laser 1-1,1-2 is switched, keep continuity.
Front and back for moment of switching in the wavelength variations of semiconductor laser 1-1,1-2 make the result of calculation of speed or distance have continuity, also can use for example least square method.In addition, as shown in figure 11, amplitude adjustment apparatus 10, also can adjust the amplitude of triangular wave drive current, so that the family curve VL of the result of calculation of prolongation binding speed (or distance) is behind the timing SW that the wavelength variations of semiconductor laser 1-1,1-2 is switched, in scope ER, contain the result of calculation VV of the initial speed (or distance) behind the SW constantly with respect to the regulation of this extended line.
As mentioned above, in the present embodiment, in semiconductor laser 1-1,1-2, alternately repeat the 2nd duration of oscillation that the 1st duration of oscillation that oscillation wavelength increases continuously and oscillation wavelength reduce continuously, each diode at photodiode 2-1 and 2-2, the quantity of the MHP that is comprised in the output signal to photodiode 2-1,2-2 is counted, minimum oscillation wavelength lambda a and full swing wavelength X b based on this count results and semiconductor laser 1-1,1-2 just can calculate apart from the speed of the distance sum measurement object 11 of determination object 11.Consequently, in the present embodiment, one side is applied flexibly what is called (a) can make equipment miniaturization; (b) do not need circuit at a high speed; (c) the random light of strong anti-interference; (d) do not select the advantage of the so existing laser measuring apparatus from coupled mode of determination object, one side not only can be measured apart from the distance of determination object 11, can also measure the speed of determination object 11.In addition,, can judge that determination object 11 is to move at the uniform velocity, the motion beyond still moving at the uniform velocity according to present embodiment.
In addition, in the present embodiment, from the opposite semiconductor laser 1-1 of the increase and decrease of oscillation wavelength, among the 1-2, make the laser while directive determination object 11 that is parallel to each other, at the 1st counting period P n than the 1st duration of oscillation and the 2nd duration of oscillation weak point, obtain the quantity X of the MHP that is comprised in the output of photodiode 2-1 or 2-2, counting period P m with the 1st counting period P n with the 2nd of the moment, obtain the quantity Y of the MHP that is comprised in the output of photodiode 2-2 or 2-1, thus can be with time measuring distance and the speed shorter than disclosed distance/velograph in the document 4.In document 4 in disclosed distance/velograph, though need come the quantity of MHP is counted through at least 3 times for example the 1st duration of oscillation t-1, the 2nd duration of oscillation t and the 1st duration of oscillation t+1, but in the present embodiment, for example at the 1st counting period P n1 and the 2nd counting period P m1, quantity X, Y to MHP carry out counting 1 time, also at the 1st timing period P n2 and the 2nd counting period P m2 quantity X, the Y of MHP being carried out 1 counting gets final product, by 2 countings the quantity of MHP is counted, just can be obtained distance and speed thus.
In addition, in the present embodiment, the absolute value of the wavelength variable quantity by making semiconductor laser 1-1,1-2 equates, just can improve the measuring accuracy of distance and speed.
(the 2nd embodiment)
Then, the 2nd embodiment of the present invention is described.In the present embodiment because the one-piece construction of distance/velograph is identical with the 1st embodiment, so use the symbol of Fig. 1 to describe.Figure 12 is the block scheme of an example of the structure of the counting assembly 7 among expression the 2nd embodiment of the present invention, and Figure 13 is the process flow diagram of the work of this counting assembly 7 of expression.The counting assembly 7 of present embodiment is by change-over switch 70a, detection unit 73-1,73-2, the 74-1 of AND operation portion (AND), 74-2, counter 75-1,75-2, count results correction portion 76-1,76-2, storage part 77, cycle and calculating part 78-1,78-2 and number calculating part 79-1,79-2 constitute.
Figure 14 is the block scheme of an example of the structure of expression count results correction portion 76-1.Count results correction portion 76-1 is made portion 761, median calculating part 762 and modified value calculating part 763 and is constituted by period measurement portion 760, number of degrees distribution.The structure of count results correction portion 76-2 is owing to identical with count results correction portion 76-1, so omit explanation.
Figure 15 A～Figure 15 F is the shop drawing that is used to illustrate the counting assembly 7 of present embodiment, Figure 15 A schematically shows filtering circuit 6-1, the waveform of the output voltage of 6-2 is the oscillogram of MHP, Figure 15 B is the detection unit 73-1 of expression corresponding diagram 15A, the output map of 73-2, Figure 15 C is the figure that expression is input to the gate signal GS of counting assembly 7, Figure 15 D is the count results figure of the counter 75-1 of expression corresponding diagram 15B, Figure 15 E is the figure of clock signal clk that expression is input to counting assembly 7, and Figure 15 F is the measurement result figure of period measurement portion 760 of the count results correction portion 76-1 of expression corresponding diagram 15B.Have again, in Figure 15 A～Figure 15 F, the work of the 1st duration of oscillation P1 that the oscillation wavelength that shows relevant semiconductor laser 1-1 increases, the oscillation wavelength of semiconductor laser 1-2 reduces.
At first, the change-over switch 70a of counting assembly 7 judges to be switching time (the step S300 of Figure 13), if then switch the output of filtering circuit 6-1,6-2 and the connection (step S301) between detection unit 73-1, the 73-2 switching time.The switching time of change-over switch 70a, result from each time of 1/2 of the period T of triangular wave.That is, change-over switch 70a is at the 1st duration of oscillation P1, and the output of filtering circuit 6-1 is connected with the input of detection unit 73-1, and the output of filtering circuit 6-2 is connected with the input of detection unit 73-2; At the 2nd duration of oscillation P2, the output of filtering circuit 6-2 is connected with the input of detection unit 73-1, the output of filtering circuit 6-1 is connected (step S301) with detection unit 73-2.
In other words, in detection unit 73-1, all the time can input filter circuit 6-1 or the output of 6-2 in, the semiconductor laser 1-1 that increasing corresponding to oscillation wavelength or the output of 1-2, in detection unit 73-2, all the time can input filter circuit 6-1 or the output of 6-2 in, the semiconductor laser 1-1 that reducing corresponding to oscillation wavelength or the output of 1-2.Have, current time is can be notified by laser driver 4-1,4-2 in the 1st duration of oscillation P1 or the 2nd duration of oscillation again.Change-over switch 70a carries out switch operating according to the notice from laser driver 4-1,42-2.
The output voltage of filtering circuit 6-1,6-2 shown in the detection unit 73-1 process decision chart 15A of counting assembly 7 is high level (H) or low level (L), the result of determination that output map 15B is such.At this moment, detection unit 73-1 is judged to be high level when output voltage rising the becoming threshold value TH1 of filtering circuit 6-1 or 6-2 is above, (TH2＜TH1) is judged to be low level when following, thus with output 2 values (the step S302 of Figure 13) of filtering circuit 6-1,6-2 to be declined to become threshold value TH2 at the output voltage of filtering circuit 6-1 or 6-2.Similarly, detection unit 73-2 is with output 2 values (step S302) of filtering circuit 6-2 or 6-1.
Shown in Figure 15 D, the result of the AND operation between the such gate signal GS of the output of AND74-1 output detection unit 73-1 and Figure 15 C, counter 75-1 counts (Figure 13 step S303) to the rising edge of the output of AND74-1.Similarly, the output of AND74-2 output detection unit 73-2 and the result of the AND operation between the gate signal GS, counter 75-2 counts (step S303) to the rising edge of the output of AND74-2.At this, gate signal GS is the signal that rises when the beginning of the 1st counting period P n and the 2nd count cycle Pm, descends when the end of the 1st counting period P n and the 2nd count cycle Pm.Therefore, counter 75-1,75-2 will count the quantity (that is the quantity of the rising edge of MHP) of the rising edge of the output of AND74-1,74-2 among the 1st, the 2nd counting period P n, the Pm.The definition of the 1st counting period P n and the 2nd counting period P m is according to the explanation of Fig. 6 A～Fig. 6 D.
On the other hand, cycle (cycle of MHP) (the step S304 of Figure 13) of rising edge of the output of the AND74-1 among the 1st counting period P n is measured by the period measurement portion 760 of count results correction portion 76-1 when producing rising edge in the output of each AND74-1.At this moment, period measurement portion 760, with cycle of the clock signal clk shown in Figure 15 E be 1 cycle that MHP measures in unit.In the example of Figure 15 F, T α, T β, T γ measure successively as the MHP cycle in period measurement portion 760.As indicated in Figure 15 E, Figure 15 F, the size of period T α, T β, T γ is respectively 5 clocks, 4 clocks, 2 clocks.If the frequency of clock signal clk is far longer than the highest frequency of obtaining MHP.
Similarly, cycle (cycle of MHP) (step S304) of rising edge of the output of the AND74-2 among the 2nd counting period P m is measured by the period measurement portion 760 of count results correction portion 76-2 when producing rising edge in the output of each AND74-2.
The measurement result of the count results of storage part 77 memory counter 75-1,75-2 and count results correction portion 76-1,76-2 period measurement portion 760 separately.
Gate signal GS descends, after the 1st counting period P n finishes, the number of degrees of count results correction portion 76-1 distribute and make portion 761, make the number of degrees distributions (the step S305 of Figure 13) in the cycle of the MHP among the 1st counting period P n based on the measurement result that is stored in period measurement portion 760 in the storage part 77, count results correction portion 76-1.Similarly, after the 2nd counting period P m finishes, the number of degrees of count results correction portion 76-2 distribute and make portion 761, the number of degrees that make the cycle of the MHP among the 2nd counting period P m based on the measurement result of the period measurement portion 760 of count results correction portion 76-2 distribute (step S305).Have again, owing under the little situation of n, be used to the precise decreasing asking the number of degrees of median to tail off, ask median, so the number of degrees distribution when obtaining the median in the MHP cycle among the 1st counting period P n when using the cycle former than Pn will be stronger under continuing noise.
Then, the median calculating part 762 of count results correction portion 76-1 makes the number of degrees distribution that portion 761 makes based on the number of degrees distribution of count results correction portion 76-1, calculates median (media) T0 (Figure 13 step S306) in the cycle of the MHP among the 1st counting period P n.Similarly, the median calculating part 762 of count results correction portion 76-2, distributing based on the number of degrees of count results correction portion 76-2 makes the number of degrees that portion 761 makes and distributes, and calculates the median T0 (step S306) in the cycle of the MHP among the 2nd counting period P m.
The modified value calculating part 763 of count results correction portion 76-1, number of degrees distribution based on count results correction portion 76-1 makes the number of degrees distribution that portion 761 makes, obtain as the summation Ns of the number of degrees of the grade below 0.5 times of the median T0 in the cycle among the 1st counting period P n and as the summation Nw of the number of degrees of the grade more than 1.5 times of the median T0 in the cycle among the 1st counting period P n, and the count results (the step S307 of Figure 13) of pressing following formula correction counter 75-1.
N′＝N+Nw-Ns …(16)
In formula (16), N is the quantity as the MHP of the count results of counter 75-1, and N ' is revised count results.
Similarly, the modified value calculating part 763 of count results correction portion 76-2, number of degrees distribution based on count results correction portion 76-2 makes the number of degrees distribution that portion 761 makes, obtain as the summation Ns of the number of degrees of the grade below 0.5 times of the median T0 in the cycle among the 2nd counting period P m and as the summation Nw of the number of degrees of the grade more than 1.5 times of the median T0 in the cycle among the 2nd counting period P m, and by formula (16) revise the count results (step S307) of counter 75-2.
The example that the number of degrees in the cycle of MHP distribute has been shown among Figure 16.In Figure 16, Ts is 0.5 times the grade point of median T0 in the cycle of MHP, and Tw is 1.5 times the grade point of median T0.Undoubtedly, the grade among Figure 16 is the typical value in the cycle of MHF.Have again,, omit between median T0 and the Ts and the distribution of the number of degrees between median T0 and the Tw in order to simplify the record among Figure 16.
Figure 17 A and 17B are the figure of correction principle that is used to illustrate the count results of counter 75-1,75-2, Figure 17 A is the waveform that schematically shows the output voltage of filtering circuit 6-1, be the figure of MHP waveform, Figure 17 B is the figure of the count results of expression and the corresponding counter 75-1 of Figure 17 A.
Originally, though the MHP cycle is different because of the difference of the distance of distance determination object 11, if constant apart from the distance of determination object 11, then MHP occurred with the identical cycle.But because noise, in the MHP waveform, produce disappearance, perhaps produce the waveform that to count as signal, thereby in MHP quantity, produce error.
When the disappearance of signal took place, the period T w of the MHP at the position that has lacked became about 2 times of cycle originally.In other words, be median T0 about more than 2 times the time when the cycle of MHP, can be judged to be disappearance has taken place in signal.Therefore, can regard the number of times of signal deletion as, this Nw is added among the count results N of counter 75-1, come the disappearance of corrected signal by summation Nw with the number of degrees of the grade more than the period T w.
In addition, make at period T s and become about 0.5 times of original cycle the MHP at the position of noise count.In other words, be median about below 0.5 times the time when the cycle of MHP, can be judged to be signal has been carried out excessive counting.Therefore, regard the number of times that signal is excessively counted as by summation Ns, and from the count results N of counter 75-1, deduct this Ns, the noise of the counting that just can correct mistakes the number of degrees of the grade below the period T s.
Above-mentioned is the correction principle of the count results shown in the formula (16).The count results of counter 75-2 also can be revised by same principle.Have, in the present embodiment, establishing Ts is 0.5 times the value of the median T0 in cycle again, establishes Tw and be not 2 times the value of median T0 but 1.5 times the value of median T0 describes below the reason that is made as 1.5 times.
Then, the cycle of counting assembly 7 and calculating part 78-1 calculate the summation Sum (Figure 13 step S308) in the cycle of the MHP among the 1st counting period P n based on the measurement result that is stored in period measurement portion 760 in the storage part 77, count results correction portion 76-1.Similarly, cycle and calculating part 78-2 based on the measurement result of the period measurement portion 760 of count results correction portion 76-2, calculate the summation Sum (step S308) in the cycle of the MHP among the 2nd counting period P m.
The number calculating part 79-1 of counting assembly 7 calculates the quantity X (quantity of the interference waveform of the semiconductor laser that oscillation wavelength is increasing) of the MHP of the time per unit among the 1st counting period P n, and number calculating part 79-2 calculates the quantity Y (quantity of the interference waveform of the semiconductor laser that oscillation wavelength is reducing) (Figure 13 step 309) of the MHP of the time per unit among the 2nd counting period P m.Number calculating part 79-1, the summation Sum in the cycle by the MHP in using during the 1st counting that is calculated by cycle and calculating part 78-1 to remove the revised count results N ' that the modified value calculating part 763 by count results correction portion 76-1 calculates, thereby calculates the quantity X of the MHP of the time per unit among the 1st counting period P n.
X＝N′/Sum …(17)
Similarly, the summation Sum of number calculating part 79-2 by the cycle of the MHP in using during the 2nd counting that is calculated by cycle and calculating part 78-2 to remove the revised count results N ' that the modified value calculating part 763 by count results correction portion 76-2 calculates, thereby calculates the quantity Y of the MHP of the time per unit among the 2nd counting period P m.
Counting assembly 7 carries out above such processing in each the 1st, the 2nd counting period P n, Pm.Therefore, at the quantity X that calculates MHP by the work of detection unit 73-1, AND74-1, counter 75-1, count results correction portion 76-1, storage part 77, cycle and calculating part 78-1 and number calculating part 79-1, calculate the quantity X of MHP simultaneously by the work of detection unit 73-2, AND74-2, counter 75-2, count results correction portion 76-2, storage part 77, cycle and calculating part 78-2 and number calculating part 79-2, ask quantity X and the Y of MHP so so simultaneously.
Structure beyond the counting assembly 7 is identical with the 1st embodiment.In the present embodiment, the cycle of MHP in during the measurement count, the number of degrees in the cycle of the MHP in making during the counting based on this measurement result distribute, median based on cycle of number of degrees Distribution calculation MHP, distribute based on the number of degrees and to obtain as the summation Ns of the number of degrees of the grade below 0.5 times of median with as the summation Nw of the number of degrees of the grade more than 1.5 times of median, count results according to these number of degrees summation Ns and Nw corrected Calculation device, thus, just can revise the counting error of MHP, so, the measuring accuracy of distance and speed is improved than the 1st embodiment.
Then, in the present embodiment, median that the number of degrees of life cycle the distribute reason as the reference period of MHP is described, and to establish the threshold value in the cycle when obtaining number of degrees Nw be 1.5 times reason of median.
At first, at describing because of the correction of noise having been carried out the count results under the situation that miscount cuts apart the cycle 2 of MHP.Changing at the oscillation wavelength of semiconductor laser is under the linear situation, the cycle of MHP, with the quantity N with MHP remove count during the T0 of gained be that the center is normal distribution (Figure 18).
Next consider the cycle of the MHP cut apart because of noise 2.The MHP cycle of cutting apart as the result 2 of excessive counting noise, though cut apart by 2 with ratio at random owing to be to be the normal distribution at center with T0 by the cycle before cutting apart, thus just become the number of degrees with respect to the 0.5T0 symmetry distribute (Figure 19 a).
For the number of degrees in cycle of the MHP that comprises this noise distribute, when cutting apart the cycle, calculate the mean value and the median in the cycle of MHP because of noise 2 at the k% of hypothesis MHP.
During all cycle sums were counting all the time, though do not change, if the k% of MHP is cut apart the cycle because of noise 2, then because the integrated value of the number of degrees becomes (1+k[%]) N, so the mean value in MHP cycle will become (1/ (1+k[%])) T0.
On the other hand, in ignoring noise profile with the situation of normal distribution superposed part under, because the accumulation number of degrees of 2 noises of cutting apart become 2 times of the number of degrees that comprised in the grade between median and T0, therefore, the median in the cycle of MHP will be in the position that the area of the b of Figure 20 is 2 times of the areas of a.
In Excel (registered trademark) as the software of company of Microsoft (Microsoft), comprise the function that is called as NORMSDIST (), it can represent the internal ratio to the both sides value between the α σ from the mean value of normal distribution by " (1-(1-NORMSDIST (α)) * 2) * 100[%] ", if use this function, then can represent the median in the cycle of MHP by following formula:
(1-(1-NORMSDIST ((median-T0)/σ)) * 2) * (100-k)/2=k[%]
…(18)
According to foregoing description, if the accurate deviations of bidding is 0.02T0, then when MHP 10% when cutting apart the cycle, by the mean value T0 ' and the median T0 ' in cycle of the following MHP that calculates this moment because of noise 2.
T0′＝(1/(1+0.1))T0＝0.91T0 …(19)
T0′＝0.995T0 …(20)
Have again,, establish mean value and median all by T0 ' expression at this.Regulation Counter Value (integrated values of the number of degrees) is 1.1N, and counting error is 10%.
At this, 2 period T 1 after the MHP that considers a certain period T a is cut apart by 2, t2 (establishes the probability during the obtaining of T1 〉=T2).If the hypothesis noise produces at random, then as shown in figure 21, T2 can obtain the value of 0＜T2≤Ta/2 with identical probability.Similarly, T1 also can obtain the value of T/2≤T1＜Ta with identical probability.The area of the area of the probability distribution of obtaining of the T1 among Figure 21 and the probability distribution of obtaining of T2 all is 1.
Because period T a is that normal distribution is carried out at the center with T0, therefore, if when regarding Ta as set, then the number of degrees of the probability that obtains of T2 distribute, and to become with mean value be the accumulation number of degrees of the normal distribution of 0.5T0, the standard deviation 0.5 σ identical shapes that distribute.
In addition, as shown in figure 22, the number of degrees of the probability that obtains of T1 distribute, and to become mean value be that the accumulation number of degrees of the normal distribution of 0.5T0, standard deviation 0.5 σ distribute and mean value is distribute shapes after overlapping of the accumulation number of degrees of the normal distribution of T0, standard deviation.At this, the quantity k[% of the MHP after T1 and T2 quantity separately equals the cycle 2 cut apart] N.
If can be to the quantity k[% of the MHP after because of noise the cycle 2 being cut apart] N counts, and can use following formula to derive the quantity N of MHP so:
N＝N′-k[％]·N …(21)
As shown in figure 23, if can according to the quantity Ns of the MHP with the cycle below the Tb with cut apart by 2 after the quantity k[% of MHP] mode that equates of N sets Tb, then can count by quantity Ns to MHP with the cycle below the Tb, thus the quantity k[% of the MHP after indirectly the cycle being cut apart by 2] and N counts.
In Figure 23, the number of degrees of the period T 2 of the MHP in the cycle more than having Tb (c among Figure 23) and have the number of degrees (d among Figure 23) less than the period T 1 of the MHP in cycle of Tb when equating, the quantity with the MHP in following cycle of Tb will be that the quantity Ns (=k[%] N) of the MHP after being cut apart by 2 in the cycle equates with the quantity of T2.In other words, the quantity N of MHP can represent with following formula.
N＝N′-k[％]·N＝N′-Ns …(22)
Because the number of degrees shape of T1 and T2 is the shape by the 0.5Ta symmetry, when therefore judging as threshold value with 0.5Ta, the number of degrees summation Ns of the MHP after just can correctly being cut apart by 2 cycle (=k[%] N) count.
Then, though count by quantity to MHP with the cycle below the 0.5T0, can be to the 2 quantity k[% of cutting apart the MHP of all after dates] quantity of N counts indirectly, but can't distribute based on the number of degrees in cycle of the MHP that comprises noise (Figure 19) calculates T0.If the parent of MHP be as the number of degrees of Figure 19 distribute when mode (mode) during more near T0 unreasonable think and population parameter big more, then can use mode as T0 '.
At this, describe to use the quantity k[% of the MHP of mean value or median T0 '] counting of N.If represent with T0 '=yT0, and replace T0 and substitution T0 ' obtains Ns, then likening to is that the number of degrees Ns ' in littler cycle of the 0.5T0 ' that judges of 2 quantity of cutting apart the MHP of all after dates becomes yk[%] N (Figure 24).
Under the situation of using mean value or median T0 ', revised count value Nt is expressed as follows.
Nt＝N′-Ns′＝(1+k[％])N-yk[％]N
＝(1+(1-y)k[％])N＝N+(1-y)k[％]N …(23)
Having again, as (1-y) k[% of revised error] N is the number of degrees of the e part of Figure 25.
At this, the example of revising at the count results of the counter 75-1, the 75-2 that use mean value or median T0 ' describes.
If the accurate deviation of bidding is σ=0.02T0, MHP 10% when cutting apart the cycle (count results has 10% error) because of noise 2, then the mean value T0 ' in the cycle of MHP is 0.91T0, median T0 ' is 0.9949T0, therefore using the y in mean value T0 ' time is 0.91, using the y in median T0 ' time is 0.9949, and revised count results N ' is calculated as follows.
N′＝(1+0.1(1-0.91))N＝1.009N …(24)
N′＝(1+0.1(1-0.995))N＝1.0005N …(25)
The mean value revised count results N ' in T0 ' time is used in formula (24) expression, and the median revised count results N ' in T0 ' time is used in formula (25) expression.Using the error of the count results N ' in mean value T0 ' time is 0.9%.Using the error of the count results N ' in median T0 ' time is 0.05%.
Then, the accurate deviation of bidding is σ=0.05T0, MHP 20% when cutting apart the cycle (count results has 20% error), because the mean value T0 ' in the cycle of MHP is 0.83T0 because of noise 2, median T0 ' is 0.9682T0, is 0.83 so use the y in mean value T0 ' time.Using the y in median T0 ' time is 0.968, and revised count results N ' is calculated as follows:
N′＝(1+0.2(1-0.83))N＝1.034N …(26)
N′＝(1+0.2(1-0.968))N＝1.0064N …(27)
The mean value revised count results N ' in T0 ' time is used in formula (26) expression, and the median revised count results N ' in T0 ' time is used in formula (27) expression.Using the error of the count results N ' in mean value T0 ' time is 3.4%, and using the error of the count results N ' in median T0 ' time is 0.64%.
Based on the above fact as can be known, if use the median in the cycle of MHP to revise count results N, then can reduce the error of revised count results N '.
Next, the correction of the count results under the situation that produces disappearance in the waveform of MHP is described.Because the cycle of original MHP is to be the normal distribution at center with T0, become the normal distribution (f among Figure 26) that mean value is 2T0, standard deviation 2 σ so produce the cycle of the MHP under the situation of disappearance when the counting because of the intensity of MHP is little.If lacked j[%] MHP, therefore then the disappearance cycle number of degrees in cycle that become 2 times MHP are Nw (=j[%] N).In addition, because of the number of degrees in cycle of the disappearance in when counting about T0 after reducing are the g shown in Figure 26, the part that reduces of the represented number of degrees is 2Nw (=2j[%]) among the h of Figure 26.Therefore, the several N ' that the time do not produce the original MHP under the deletion condition of MHP at counting can represent with following formula.
N′＝N+j[％]＝N+Nw …(28)
The threshold value in the cycle when next, considering the Nw that is used to revise count results counted.At this, suppose that disappearance because of when counting becomes among 2 times the number of degrees Nw in cycle of MHP, because of noise 2 is cut apart p[% the cycle] situation.Among the MHP of disappearance, the number of degrees in the cycle of 2 MHP of cutting apart are Nw ' (=jp[%] N).The number of degrees that Figure 27 shows once more the cycle of 2 MHP of cutting apart distribute.If establish the threshold value in the cycle that is counted as Nw when being 1.5T0, cycle is that the number of degrees in the cycle of the following MHP of 0.5T0 are 0.5Nw ' (=0.5p[%] Nw), the number of degrees in the cycle of the MHP to 1.5T0 from 0.5T0 in cycle are Nw ' (=p[%] Nw), and the cycle is that the number of degrees in the cycle of the above MHP of 1.5T0 are 0.5Nw ' (=0.5p[%] Nw).
Therefore, the number of degrees in the cycle of all MHP distribute and become as shown in figure 28, are 0.5T0 if establish the threshold value of Ns, and when the threshold value of Nw was 1.5T0, then count results N can represent with following formula.
N＝(N′-2Nw)+(Nw-Nw′)+2
Nw′＝N′-Nw+Nw′ …(29)
As follows by formula (29) correction result, the several N ' of the original MHP when showing the disappearance that does not produce MHP when calculating counting.
N-0.5
Nw′+(0.5
Nw′+(Nw-Nw′))
＝(N-Nw+Nw′)+(0.5
Nw′+(Nw-Nw′))
＝N′ …(30)
Based on the above fact as can be known, be 1.5 times of median if establish the threshold value in the cycle when asking number of degrees Nw, just can revise count results N.Have again, identical with the situation in the cycle of cutting apart MHP because of noise 2, revise owing to use median to substitute T0, so also same error can take place.
In the above description, though the result of excessive counting noise has been described respectively, 2 cut apart MHP cycle situation and become 2 times situation because of cycle of the disappearance MHP in when counting, but because they are independent generations, therefore when a little situation of performance in number of degrees distribute, be that Figure 29 is such just.If establishing the threshold value of Ns is 0.5T0, when the threshold value of Nw was 1.5T0, then count results N can represent with following formula.
N＝(N′-2Nw-Ns)+(Nw-Nw′)+2
Nw′+2Ns
＝N′-Nw+Nw′+Ns …(31)
Below be by formula (31) correction result, show the quantity N ' of the original MHP of the situation that does not produce disappearance when calculating counting and excessively count.
N-{0.5
Nw′+Ns}+{0.5
Nw′+(Nw-Nw′)}
＝{N-Nw+Nw′+Ns}-{0.5
Nw′+Ns}+{0.5
Nw′+(Nw-Nw′)}
＝N′ …(32)
Have again, in the present embodiment,, also can be suitable for the present invention even if produce continuously under the situation of the disappearance more than 2 though, illustrated that the cycle because of 1 disappearance MHP becomes about 2 times situation in original cycle at the correction of the disappearance of MHP.Under the situation of 2 of MHP consecutive miss, think that the MHP in 3 times cycle of median is that 3 MHP become 1 situation.In the case, obtain the number of degrees,, just can revise the disappearance of MHP if these number of degrees are doubled as about grade more than 3 times of the median in cycle.If the consideration that vague generalization is so then can use following formula to replace formula (16).
N′＝N+Nw1+Nw2+Nw3+…-Ns …(33)
Nw1 is the summation as the number of degrees of the grade more than 1.5 times of the median in cycle, and Nw2 is the summation as the number of degrees of the grade more than 2.5 times of the median in cycle, and Nw3 is the summation as the number of degrees of about grade more than 3.5 times of the median in cycle.
(the 3rd embodiment)
Next, the 3rd embodiment of the present invention is described.In the 2nd embodiment, though count the quantity of asking MHP among the period P m at the 1st counting period P n and the 2nd of regular length, the 1st counting period P n and the 2nd counting period P m also can be variable-lengths.In the present embodiment, because the structure of distance/velograph is identical with the 1st embodiment, so use the symbol of Fig. 1 to describe.
Figure 30 is the block scheme of an example of the structure of the counting assembly 7 of expression present embodiment, and Figure 31 is the process flow diagram of the work of this counting assembly 7 of expression.The counting assembly 7 of present embodiment is by change-over switch 70a, the 71a-1 of period measurement portion, 71a-2, and detection unit 73-1,73-2, count results correction portion 76a-1,76a-2, storage part 77, cycle and calculating part 78-1,78-2 and number calculating part 79-1,79-2 constitute.
Figure 32 is the block scheme of an example of the structure of expression count results correction portion 76a-1.Count results correction portion 76a-1 makes the 761a of portion, median calculating part 762a by number of degrees distribution and modified value calculating part 763a constitutes.The structure of count results correction portion 76a-2 is owing to identical with count results correction portion 76a-1, so omit explanation.
At first, the work of change-over switch 70a identical with the step S300 of Figure 13, S301 (the step S400 of Figure 31, S401), the work of detection unit 73-1,73-2 identical with the step S302 of Figure 13 (the step S402 of Figure 31).
The 71a-1 of period measurement portion is at the cycle (the step S403 of Figure 31) of the individual MHP of the regulation number N (N is the natural number more than 2) in the output of the detection unit 73-1 shown in each survey sheet 15B of these MHP.Similarly, the 71a-2 of period measurement portion is at the cycle (step S403) of regulation number N MHP in the output of each measurement detection unit 73-2 of these MHP.At this moment, the 71a-1 of period measurement portion, 71a-2 are 1 cycle that MHP measures in unit with the cycle of clock signal clk.The measurement result of 77 memory cycle of storage part determination part 71a-1,71a-2.
After the measurement of the 71a-1 of period measurement portion finished, the number of degrees of count results correction portion 76a-1 distributed and make the 761a of portion, made the number of degrees distributions (Figure 31 step S404) in the cycle of MHP based on the measurement result that is stored in the 71a-1 of period measurement portion in the storage part 77.Similarly, after the measurement of the 71a-2 of period measurement portion finished, the number of degrees of count results correction portion 76a-2 distributed and make the 761a of portion, made the number of degrees distributions (step S404) in the cycle of MHP based on the measurement result of the 71a-2 of period measurement portion.
Then, the median calculating part 762a of count results correction portion 76a-1 is based on the distribute median T0 (the step S405 of Figure 31) in cycle of making the number of degrees Distribution calculation MHP that the 761a of portion makes of the number of degrees of count results correction portion 76a-1.Similarly, the median calculating part 762a of count results correction portion 76a-2 is based on the distribute median T0 (step S405) in cycle of making the number of degrees Distribution calculation MHP that the 761a of portion makes of the number of degrees of count results correction portion 76a-2.
The modified value calculating part 763a of count results correction portion 76a-1, number of degrees distribution based on count results correction portion 76a-1 makes the number of degrees distribution that the 761a of portion makes, obtain the cycle that the median calculating part 762a as count results correction portion 76a-1 calculates median T0 the grade below 0.5 times the number of degrees summation Ns and as the summation Nw of the number of degrees of the grade more than 1.5 times of the median T0 in this cycle, by formula (16) revise regulation number N (the step S406 of Figure 31).Similarly, the modified value calculating part 763a of count results correction portion 76a-2, number of degrees distribution based on count results correction portion 76a-2 makes the number of degrees distribution that the 761a of portion makes, obtain the cycle that the median calculating part 762a as count results correction portion 76a-2 calculates median T0 the grade below 0.5 times the number of degrees summation Ns and as the summation Nw of the number of degrees of the grade more than 1.5 times of the median T0 in this cycle, by formula (16) revise regulation number N (step S406).
Then, cycle and calculating part 78-1 calculate the summation Sum (Figure 31 step S407) in the cycle of MHP based on the measurement result that is stored in the 71a-1 of period measurement portion in the storage part 77.Similarly, cycle and calculating part 78-2 calculate the summation Sum (step S407) in the cycle of MHP based on the measurement result of the 71a-2 of period measurement portion.
The summation Sum in the cycle of number calculating part 79-1 by using the MHP that is calculated by cycle and calculating part 78-1 removes the revised count results N ' that the modified value calculating part 763a by count results correction portion 76a-1 calculates, thereby calculates the quantity X (Figure 31 step S408) of the MHP of the time per unit among the 1st counting period P n.Similarly, number calculating part 79-2, the summation Sum in the cycle by using the MHP that is calculated by cycle and calculating part 78-2 removes the revised count results N ' that the modified value calculating part 763a by count results correction portion 76a-2 calculates, thereby calculates the quantity Y (step S408) of the MHP of the time per unit among the 2nd counting period P m.
Counting assembly 7 carries out above such processing in each the 1st, the 2nd counting period P n, Pm.Though the situation and the 1st, the 2nd embodiment that calculate the quantity X of MHP and Y simultaneously are identical, in according to the above-mentioned present embodiment that carries out, the 1st counting period P n and the 2nd counting period P m are variable-length.In other words, the summation in the cycle of the MHP that is calculated by cycle and calculating part 78-1 is equivalent to the length of the 1st counting period P n, and the summation in the cycle of the MHP that is calculated by cycle and calculating part 78-2 is equivalent to the length of the 2nd counting period P m.The value of count results N that is equivalent to counter 75-1, the 75-2 of the 2nd embodiment will become the fixed value of so-called regulation number N in the present embodiment.
Other structure is identical with the 2nd embodiment.In the 2nd embodiment, because the 1st counting period P n and the 2nd counting period P m are regular length, so have the inconsistent situation of length of summation and the 1st counting period P n in the cycle of the MHP that calculates by cycle and calculating part 78-1, similarly exist the summation and the 2nd in the cycle of the MHP that calculates by cycle and calculating part 78-2 to count the inconsistent situation of length of period P m.Therefore, in the 2nd embodiment, exist among quantity n, the m of the MHP that obtains by counting assembly 7 and produce measuring error, in distance and speed, produce the possibility of measuring error.
With respect to this, in the present embodiment, owing to can make the summation and the 1st counting period P n, the 2nd in the cycle of the MHP that calculates by cycle and calculating part 78-1,78-2 count the equal in length of period P m, so can reduce several n of MHP, the measuring error of m.Therefore,, the effect identical not only can be obtained, the measuring accuracy of distance and speed can also be improved further with the 2nd embodiment according to present embodiment.
(the 4th embodiment)
Then, the 4th embodiment of the present invention is described.In the 1st～the 3rd embodiment, condition judgement portion 82 when the result of calculation of formula (2) and formula (3) equates, judges that determination object 11 is in the micro-displacement state, when the result of calculation of formula (4) and formula (5) equates, judge that determination object 11 is in displacement state.But, influence because of noise etc., the result of calculation of formula (2) and formula (3) equate and the unequal situation of result of calculation of formula (4) and formula (5) under, just can not judge the state of determination object 11, under the inconsistent situation of result of calculation of and formula (4) and formula (5) inconsistent, can not judge the state of determination object 11 in the result of calculation of formula (2) and formula (3).In the present embodiment, even if can not judge by condition judgement portion 82 under the situation of state of determination object 11, also realized calculating apart from the distance of determination object 11 and the speed of determination object 11.
In the present embodiment, because the structure of distance/velograph is identical with the 1st embodiment, so use the symbol of Fig. 1 to describe.Figure 33 is the block scheme of an example of the structure of the arithmetic unit 8 of expression present embodiment, and Figure 34 is the process flow diagram of expression than the work of arithmetic unit 8.The arithmetic unit 8 of present embodiment comprises: storage part 80, distance/speed calculation portion 81, judge the 82a of condition judgement portion of the state of determination object 11 according to the result of calculation of distance/speed calculation portion 81 and historical displacement calculating part described later, determine the speed determination portion 83a of the speed of determination object 11 according to the result of determination of the 82a of condition judgement portion, result of determination according to the 82a of condition judgement portion is determined apart from the distance determining part 84a of the distance of determination object 11, and calculate the candidate value of the distance that calculates by distance/speed calculation portion 81 and the difference of the candidate value of the distance that calculates before is the historical displacement calculating part 85 of historical displacement.Speed determination portion 83a and distance determining part 84a constitute distance/speed determination portion 86a.
At first, the action of the storage part 80 of arithmetic unit 8 identical with the step S201 of Fig. 8 (Figure 34 step S501), the action of distance/speed calculation portion 81 identical with the step S202 of Fig. 8 (Figure 34 step S502).
The historical displacement calculating part 85 of arithmetic unit 8, calculate according to following formula: the 2nd candidate value L α 2 (t-1 of the distance among the moment t-1 to t, t) and constantly the 1st candidate value L α 1 (t-2 of the distance among the t-2 to t-1, t-1) difference is historical displacement Vcal α 1 (t-2, t), the 1st candidate value L α 1 (t of the distance among the moment t to t+1, t+1) and constantly the 2nd candidate value L α 2 (t-1 of the distance among the t-1 to t, t) difference is historical displacement Vcal α 2 (t-1, t+1), the 1st candidate value L α 1 (t-1 of the distance among the moment t-1 to t, t) and constantly the 2nd candidate value L α 2 (t-2 of the distance among the t-2 to t-1, t-1) difference is historical displacement Vcal α 3 (t-2, t), the 2nd candidate value L α 2 (t of the distance among the moment t to t+1, t+1) and constantly the 1st candidate value L α 1 (t-1 of the distance among the t-1 to t, t) difference is historical displacement Vcal α 4 (t-1, t+1), the 4th candidate value L β 4 (t-1 of the distance among the moment t-1 to t, t) and constantly the 3rd candidate value L β 3 (t-2 of the distance among the t-2 to t-1, t-1) difference is historical displacement Vcal β 1 (t-2, t), the 3rd candidate value L β 3 (t of the distance among the moment t to t+1, t+1) and constantly the 4th candidate value L β 4 (t-1 of the distance among the t-1 to t, t) difference is historical displacement Vcal β 2 (t-1, t+1), the 3rd candidate value L β 3 (t-1 of the distance among the moment t-1 to t, t) and constantly the 4th candidate value L β 4 (t-2 of the distance among the t-2 to t-1, t-1) difference is historical displacement Vcal β 3 (t-2, t), the 4th candidate value L β 4 (t of the distance among the moment t to t+1, t+1) and constantly the 3rd candidate value L β 3 (t-1 of the distance among the t-1 to t, t) difference is historical displacement Vcal β 4 (t-1, and be kept at (the step S503 of Figure 34) in the storage part 80 t+1).
Vcalα1(t-2，t)
＝Lα2(t-1，t)-Lα1(t-2，t-1) …(34)
Vcalα2(t-1，t+1)
＝Lα1(t，t+1)-Lα2(t-1，t) …(35)
Vcalα3(t-2，t)
＝Lα1(t-1，t)-Lα2(t-2，t-1) …(36)
Vcalα4(t-1，t+1)
＝Lα2(t，t+1)-Lα1(t-1，t) …(37)
Vcalβ1(t-2，t)
＝Lβ4(t-1，t)-Lβ3(t-2，t-1) …(38)
Vcalβ2(t-1，t+1)
＝Lβ3(t，t+1)-Lβ4(t-1，t) …(39)
Vcalβ3(t-2，t)
＝Lβ3(t-1，t)-Lβ4(t-2，t-1) …(40)
Vcalβ4(t-1，t+1)
＝Lβ4(t，t+1)-Lβ3(t-1，t) …(41)
Historical displacement Vcal α 1 (t-2, t), Vcal α 2 (t-1, t+1), Vcal α 3 (t-2, t), (t-1 t+1) is in the value that the micro-displacement state calculates, historical displacement Vcal β 1 (t-2 for hypothesis determination object 11 to Vcal α 4, t), Vcal β 2 (t-1, t+1), Vcal β 3 (t-2, t), Vcal β 4 (t-1, t+1) for the hypothesis determination object 11 be in the value that displacement state calculates.
Historical displacement calculating part 85 carries out the calculating of formula (34)～formula (41) in the moment of whenever calculating the quantity of MHP by counting assembly 7.In addition, in formula (34)～formula (41), determination object 11 is decided to be positive speed near the direction of distance/velographs, will be decided to be negative speed away from the direction of this distance/velograph.
Then, the 82a of condition judgement portion of arithmetic unit 8 adopts and to be stored in the result of calculation of formula (the 2)～formula (5) in the storage part 80 and the result of calculation of formula (34)～formula (41) is judged the state of determination object 11 (the step S504 of Figure 34).Figure 35 is the process flow diagram of the work of the expression 82a of this condition judgement portion.
At first, the 82a of condition judgement portion is identical with the condition judgement portion 82 of the 1st embodiment, uses the result of calculation of formula (2)～formula (5) to judge the state of determination object 11 (the step S601 of Figure 35).
At this, when the result of calculation of formula (2) and formula (3) equates, the 82a of condition judgement portion judges that determination object 11 is in the micro-displacement state, when the result of calculation of formula (4) and formula (5) equates, judge that determination object 11 is in displacement state, be judged as condition judgement and finish (in step S602, judging "Yes"), the processing of end step S504.On the other hand, the 82a of condition judgement portion is under the situation that result of calculation is equal and result of calculation formula (4) and formula (5) also equates of formula (2) and formula (3), or under the also inconsistent situation of result of calculation of and formula (4) and formula (5) inconsistent in the result of calculation of formula (2) and formula (3), owing to can't judge, so enter step S603.
In step S603, the 82a of condition judgement portion uses the result of calculation of formula (2)～formula (5) and the result of calculation of formula (34)～formula (41) to judge the state of determination object 11.
As putting down in writing in the document 4, move under the situation of (movement at the uniform velocity) with the micro-displacement state at determination object 11, the symbol of supposing the historical displacement Vcal α that determination object 11 goes out for the micro-displacement state computation is constant, and the average absolute of the candidate value V α of the speed that goes out for the micro-displacement state computation of hypothesis determination object 11 and historical displacement Vcal α is equal.In addition, under the situation of determination object 11 with micro-displacement state movement at the uniform velocity, in the moment of the quantity of every calculating MHP, the symbol negate of the historical displacement Vcal β that hypothesis determination object 11 is calculated for displacement state.
Therefore, the historical displacement Vcal α 1 (t-2 of the formula (34) that the 82a of condition judgement portion calculates supposing determination object 11 to be in the micro-displacement state, t) and the historical displacement Vcal α 2 (t-1 of formula (35), t+1) symbol unanimity, and suppose that determination object 11 is in the candidate value V α 1 (t of the speed that the micro-displacement state computation goes out, t+1) and V α 2 (t, t+1) mean value, with historical displacement Vcal α 1 (t-2, t) absolute value and historical displacement Vcal α 2 (t-1, t+1) under the situation that average absolute equates, judge that determination object 11 moves at the uniform velocity with the micro-displacement state.
Perhaps, the 82a of condition judgement portion is in the historical displacement Vcal α 3 (t-2 of the formula (36) that the micro-displacement state computation goes out at hypothesis determination object 11, t) and the historical displacement Vcal α 4 (t-1 of formula (37), t+1) symbol unanimity, and suppose that determination object 11 is in the candidate value V α 1 (t of the speed that the micro-displacement state computation goes out, t+1) and V α 2 (t, t+1) mean value, with historical displacement Vcal α 3 (t-2, t) absolute value and historical displacement Vcal α 4 (t-1, t+1) under the situation that average absolute equates, judge that determination object 11 moves at the uniform velocity with the micro-displacement state.
As putting down in writing in the document 4, move under the situation of (movement at the uniform velocity) with displacement state at determination object 11, suppose that the symbol of the historical displacement Vcal β that determination object 11 calculates for displacement state fixes, and the average absolute of the candidate value V β of the speed that calculates for displacement state of hypothesis determination object 11 and historical displacement Vcal β is equal.In addition, under the situation of determination object 11 with displacement state movement at the uniform velocity, in the moment of the quantity of every calculating MHP, the symbol negate of the historical displacement Vcal α that hypothesis determination object 11 is gone out for the micro-displacement state computation.
Therefore, the 82a of condition judgement portion is in the historical displacement Vcal β 1 (t-2 of the formula (38) that displacement state calculates at hypothesis determination object 11, t) and the historical displacement Vcal β 2 (t-1 of formula (39), t+1) symbol unanimity, and suppose that determination object 11 is in the candidate value V β 3 (t of the speed that displacement state calculates, t+1) and V β 4 (t, t+1) mean value, with historical displacement Vcal β 1 (t-2, t) absolute value and historical displacement Vcal β 2 (t-1, t+1) under the situation that average absolute equates, be judged to be determination object 11 and move at the uniform velocity with displacement state.
Perhaps, the 82a of condition judgement portion is in the historical displacement Vcal β 3 (t-2 of the formula (40) that displacement state calculates at hypothesis determination object 11, t) and the historical displacement Vcal β 4 (t-1 of formula (41), t+1) symbol unanimity, and suppose that determination object 11 is in the candidate value V β 3 (t of the speed that displacement state calculates, t+1) and V β 4 (t, t+1) mean value, with historical displacement Vcal β 3 (t-2, t) absolute value and historical displacement Vcal β 4 (t-1, t+1) under the situation that average absolute equates, judge that determination object 11 moves at the uniform velocity with displacement state.
As putting down in writing in the document 4, under the situation of the motion of determination object 11 beyond moving at the uniform velocity with the micro-displacement state, suppose the candidate value V α of the speed that determination object 11 goes out for the micro-displacement state computation and suppose historical displacement Vcal α that determination object 11 goes out for the micro-displacement state computation average absolute inconsistent.Similarly, the historical displacement Vcal β that calculates for displacement state of the candidate value V β that supposes the speed that determination object 11 calculates for displacement state and hypothesis determination object 11 average absolute also inconsistent.
In addition, under the situation of the motion beyond determination object 11 moves at the uniform velocity with the micro-displacement state, the moment of the quantity of every calculating MHP, the symbol negate of the historical displacement Vcal α that hypothesis determination object 11 is gone out for the micro-displacement state computation, even if in the historical displacement Vcal β that hypothesis determination object 11 calculates for displacement state, there is the symbol change, in every moment of calculating the quantity of MHP, can not produce this change yet.
Therefore, the 82a of condition judgement portion is in the historical displacement Vcal α 1 (t-2 of the formula (34) that the micro-displacement state computation goes out at hypothesis determination object 11, t) and the historical displacement Vcal α 2 (t-1 of formula (35), t+1) symbol is inconsistent, and suppose that determination object 11 is in the candidate value V α 1 (t of the speed that the micro-displacement state computation goes out, t+1) and V α 2 (t, t+1) mean value, with historical displacement Vcal α 1 (t-2, t) absolute value and historical displacement Vcal α 2 (t-1, t+1) under the inconsistent situation of average absolute, the motion beyond judgement determination object 11 moves at the uniform velocity with the micro-displacement state.
Perhaps, the 82a of condition judgement portion is in the historical displacement Vcal α 3 (t-2 of the formula (36) that the micro-displacement state computation goes out at hypothesis determination object 11, t) and the historical displacement Vcal α 4 (t-1 of formula (37), t+1) symbol is inconsistent, and suppose that determination object 11 is in the candidate value V α 1 (t of the speed that the micro-displacement state computation goes out, t+1) and V α 2 (t, t+1) mean value, with historical displacement Vcal α 3 (t-2, t) absolute value and historical displacement Vcal α 4 (t-1, t+1) under the inconsistent situation of average absolute, the motion beyond judgement determination object 11 moves at the uniform velocity with the micro-displacement state.
Have again, if be conceived to the candidate value V β of speed, V β 3 (t then, t+1) absolute value and V β 4 (t, t+1) absolute value is a constant, this absolute value equal hypothesis determination object 11 be in the distance that the micro-displacement state computation goes out candidate value L α 1 (t, t+1) and L α 2 (t, multiply by on mean value t+1) semiconductor laser 1-1,1-2 the wavelength variations rate (λ b-λ a)/value of λ b.Therefore, the 82a of condition judgement portion, also can be in the candidate value V β 3 (t of the speed that displacement state calculates at hypothesis determination object 11, t+1) absolute value and V β 4 (t, t+1) the candidate value L α 1 (t that absolute value equals in distance, t+1) and L α 2 (t, t+1) multiply by on the mean value wavelength variations rate (λ b-λ a)/value of λ b, and suppose that determination object 11 is in the candidate value V α 1 (t of the speed that the micro-displacement state computation goes out, t+1) and V α 2 (t, t+1) mean value, with historical displacement Vcal α 1 (t-2, absolute value t) and historical displacement Vcal α 2 (t-1, under the inconsistent situation of average absolute t+1), the motion beyond judgement determination object 11 moves at the uniform velocity with the micro-displacement state.
In addition, the 82a of condition judgement portion also can be in the candidate value V β 3 (t of the speed that displacement state calculates at hypothesis determination object 11, t+1) absolute value and V β 4 (t, t+1) the candidate value L α 1 (t that absolute value equals in distance, t+1) and L α 2 (t, t+1) multiply by on the mean value wavelength variations rate (λ b-λ a)/value of λ b, and suppose that determination object 11 is in the candidate value V α 1 (t of the speed that the micro-displacement state computation goes out, t+1) and V α 2 (t, t+1) mean value, with historical displacement Vcal α 3 (t-2, t) absolute value and historical displacement Vcal α 4 (t-1, t+1) under the inconsistent situation of average absolute, the motion beyond judgement determination object 11 moves at the uniform velocity with the micro-displacement state.
Put down in writing as document 4, under the situation of the motion beyond determination object 11 moves at the uniform velocity with displacement state, the average absolute of supposing the historical displacement Vcal α that the candidate value V α of the speed that determination object 11 goes out for the micro-displacement state computation and hypothesis determination object 11 go out for the micro-displacement state computation is inconsistent, and the candidate value V β that suppose speed that determination object 11 calculates for displacement state is also inconsistent with the average absolute of supposing the historical displacement Vcal β that determination object 11 calculates for displacement state.In addition, under the situation of the motion beyond determination object 11 moves at the uniform velocity with displacement state, in every moment of calculating the quantity of MHP, the symbol negate of the historical displacement Vcal β that hypothesis determination object 11 is calculated for displacement state, even if in the historical displacement Vcal α that hypothesis determination object 11 goes out for the micro-displacement state computation, there is the symbol change, can not produce this change in every moment of calculating the quantity of MHP yet.
Therefore, the 82a of condition judgement portion is in the historical displacement Vcal β 1 (t-2 of the formula (38) that displacement state calculates at hypothesis determination object 11, t) and the historical displacement Vcal β 2 (t-1 of formula (39), t+1) symbol is inconsistent, and suppose that determination object 11 is in the candidate value V β 3 (t of the speed that displacement state calculates, t+1) and V β 4 (t, t+1) mean value, with historical displacement Vcal β 1 (t-2, t) absolute value and historical displacement Vcal β 2 (t-1, t+1) under the inconsistent situation of average absolute, the motion beyond judgement determination object 11 moves at the uniform velocity with displacement state.
Perhaps, the 82a of condition judgement portion is in the historical displacement Vcal β 3 (t-2 of the formula (40) that displacement state calculates at hypothesis determination object 11, t) and the historical displacement Vcal β 4 (t-1 of formula (41), t+1) symbol is inconsistent, and suppose that determination object 11 is in the candidate value V β 3 (t of the speed that displacement state calculates, t+1) and V β 4 (t, t+1) mean value, with historical displacement Vcal β 3 (t-2, t) absolute value and historical displacement Vcal β 4 (t-1, t+1) under the inconsistent situation of average absolute, the motion beyond judgement determination object 11 moves at the uniform velocity with displacement state.
Have again, if when being conceived to the candidate value V α of speed, V α 1 (t then, t+1) absolute value and V α 2 (t, t+1) absolute value is a constant, this absolute value equal hypothesis determination object 11 be in the distance that displacement state calculates candidate value L β 3 (t, t+1) and L β 4 (t, multiply by on mean value t+1) semiconductor laser 1-1,1-2 the wavelength variations rate (λ b-λ a)/value of λ b.Therefore, the 82a of condition judgement portion, also can be in the candidate value V α 1 (t of the speed that the micro-displacement state computation goes out at hypothesis determination object 11, t+1) absolute value and V α 2 (t, t+1) the candidate value L β 3 (t that absolute value equals in distance, t+1) and L β 4 (t, t+1) multiply by on the mean value wavelength variations rate (λ b-λ a)/value of λ b, and suppose that determination object 11 is in the candidate value V β 3 (t of the speed that displacement state calculates, t+1) and V β 4 (t, t+1) mean value, with historical displacement Vcal β 1 (t-2, absolute value t) and historical displacement Vcal β 2 (t-1, under the inconsistent situation of average absolute t+1), the motion beyond judgement determination object 11 moves at the uniform velocity with displacement state.
Perhaps, the 82a of condition judgement portion also can be in the candidate value V α 1 (t of the speed that the micro-displacement state computation goes out at hypothesis determination object 11, t+1) absolute value and V α 2 (t, t+1) the candidate value L β 3 (t that absolute value equals in distance, t+1) and L β 4 (t, t+1) multiply by on the mean value wavelength variations rate (λ b-λ a)/value behind the λ b, and suppose that determination object 11 is in the candidate value V β 3 (t of the speed that displacement state calculates, t+1) and V β 4 (t, t+1) mean value, with historical displacement Vcal β 3 (t-2, t) absolute value and historical displacement Vcal β 4 (t-1, t+1) under the inconsistent situation of average absolute, the motion beyond judgement determination object 11 moves at the uniform velocity with displacement state.
Through above processing, the processing of end step S603.The judgement of the step S603 of the 82a of condition judgement portion is operated in shown in the table 1.
Table 1
Then, the speed determination portion 83a of arithmetic unit 8 determines the absolute value (the step S505 of Figure 34) of the speed of determination object 11 according to the judged result of state judging part 82a.Promptly, speed determination portion 83a, under the situation of the motion beyond judgement determination object 11 moves at the uniform velocity or moves at the uniform velocity with the micro-displacement state, determine to be stored in the candidate value V α 1 (t of the speed in the storage part 80, t+1) and V α 2 (t, mean value t+1) they are the absolute value (step S505) of the speed of the determination object 11 among the t-1 to t+1 constantly.
In addition, under the situation of the motion of speed determination portion 83a beyond judgement determination object 11 moves at the uniform velocity or moves at the uniform velocity with displacement state, determine to be stored in the candidate value V β 3 (t of the speed in the storage part 80, t+1) and V β 4 (t, mean value t+1) they are the absolute value (step S505) of the speed of the determination object 11 among the t-1 to t+1 constantly.
Have again, speed determination portion 83a also can determine to be stored in the absolute value (step S505) of candidate value V α 5 (t) of the speed in the storage part 80 for the speed of the determination object 11 among the moment t-1 to t under the situation of the motion beyond judgement determination object 11 moves at the uniform velocity or moves at the uniform velocity with the micro-displacement state.In addition, speed determination portion 83a, also can under the situation of the motion beyond judgement determination object 11 moves at the uniform velocity or moves at the uniform velocity with displacement state, calculate the absolute value (step S505) of candidate value V β 6 (t) of the speed that is stored in the storage part 80 as the speed of the determination object 11 among the moment t-1 to t.
Then, the step S205 of speed determination portion 83a and Fig. 8 is computing formula (14), formula (15) in the same manner, determines the direction (the step S506 of Figure 34) of the speed of determination object 11.Have again, speed determination portion 83a uses the result of calculation of formula (6) or formula (7) substitute to use the result of calculation of formula (2)～formula (5) to determine under the situation of absolute value of speed in step S505, compare the several X (t) of MHP and the size of Y (t), just be judged to be under than the big situation of Y (t) near determination object 11 at X (t), be judged to be just away from determination object 11 (step S506) under than the big situation of X (t) at Y (t).
Then, distance determining part 84a is according to the definite distance (the step S507 of Figure 34) apart from determination object 11 of the result of determination of the 82a of condition judgement portion.Promptly, under the situation of the motion of distance determining part 84a beyond judgement determination object 11 moves at the uniform velocity or moves at the uniform velocity with the micro-displacement state, determine to be stored in the candidate value L α 1 (t of the distance in the storage part 80, t+1) and L α 2 (t, mean value t+1) they are the mean distance apart from determination object 11 (step S507) among the t-1 to t+1 constantly.
In addition, under the situation of the motion of distance determining part 84a beyond judgement determination object 11 moves at the uniform velocity or moves at the uniform velocity with displacement state, determine to be stored in the candidate value L β 3 (t of the distance in the storage part 80, t+1), (t, mean value t+1) are the mean distance apart from determination object 11 (step S507) among the moment t-1 to t+1 to L β 4.
Have again, distance determining part 84a also can be under the situation of the motion beyond judgement determination object 11 moves at the uniform velocity or moves at the uniform velocity with the micro-displacement state, and candidate value L α 5 (t) that determine to be stored in the distance in the storage part 80 are the mean distance apart from determination object 11 (step S507) among the moment t-1 to t.In addition, distance determining part 84a, also can be under the situation of the motion beyond judgement determination object 11 moves at the uniform velocity or moves at the uniform velocity with displacement state, candidate value L β 6 (t) that determine to be stored in the distance in the storage part 80 are the mean distance apart from determination object 11 (step S507) among the moment t-1 to t.
In the present embodiment,, also can judge the state of determination object 11, calculate apart from the speed of the distance sum measurement object 11 of determination object 11 even if can not judge in the 1st embodiment because of the influence of noise etc. under the situation of state of determination object 11.
(the 5th embodiment)
Then, the 5th embodiment of the present invention is described.In the motion of determination object 11 beyond moving at the uniform velocity since during the sign change of the acceleration of determination object 11 not at the respective regions of motion state, the symbol of formula will negate, so it is disconnected just to have produced erroneous judgement.Therefore, in the 4th embodiment, the 82a of condition judgement portion of arithmetic unit 8, also can be at the historical displacement Vcal α 2 (t-1 of formula (35), t+1) and the historical displacement Vcal α 4 (t-1 of formula (37), under the situation of symbol unanimity t+1), judge that determination object 11 is moving at the uniform velocity, historical displacement Vcal β 2 (t-1 at formula (39), t+1) and the historical displacement Vcal β 4 (t-1 of formula (41), under the situation of symbol unanimity t+1), the motion outside judgement determination object 11 moves at the uniform velocity.
(the 6th embodiment)
In the 1st～the 5th embodiment, though be applied to be illustrated at the present invention from the situation of the interferometer of coupled mode,, also can apply the present invention to the interferometer beyond coupled mode.Figure 36 gives identical symbol for the block scheme of the structure of distance/velograph of expression the 6th embodiment of the present invention to the structure identical with Fig. 1.In Figure 36, symbol 12-1,12-2 are separating incident light and catoptrical spectroscope (beamsplitter).
The laser of semiconductor laser 1-1,1-2 penetrates in parallel to each other, and it is identical with the 1st embodiment to incide determination object 11 this point.The laser that sees through spectroscope 12-1,12-2 and lens 3-1,3-2 incides determination object 11.And, in the present embodiment, be separated into the incident light of directive determination object 11 and direct light electric diode 2-1,2-2 respectively by spectroscope 12-1,12-2 by the light of semiconductor laser 1-1, the 1-2 of determination object 11 reflection.
Structure and 1st～5th embodiment later owing to photodiode 2-1,2-2 is identical, so explanation is omitted.Like this, even if in the interferometer beyond coupled mode, also can obtain identical effect with the 1st～the 5th embodiment.
Counting assembly 7 among the 1st～the 6th embodiment and arithmetic unit 8 can be realized by computing machine that for example possesses CPU, memory storage and interface and the program of controlling these hardware resources.Be provided for making the program of such computer operation with the state in the recording mediums such as floppy disk, CD-ROM, DVD-ROM, storage card of being recorded in.In the program write store that CPU will read in,, carry out the processing that in the 1st～the 6th embodiment, illustrates according to this program.
Have again, in the 1st～the 6th embodiment, when determination object 11 has the vibration of very little displacement (for example maximal rate 2nm), though the variation (amplitude) of actual distance is several nm, but because the resolution of distance calculation is lower than displacement resolution, so error becomes greatly.Therefore, be at determination object under the situation of motion state, substitute result of calculation, will carry out value behind the integration as the variation of distance, improve precision displacement (speed) with micro-displacement.
In addition, in the 1st～the 6th embodiment, though the minimum oscillation wavelength lambda α of noise spectra of semiconductor lasers 1-1 and 1-2 is identical and the identical situation of full swing wavelength X b of semiconductor laser 1-1 and 1-2 is illustrated, but be not limited to this, also can be as shown in figure 37, between semiconductor laser 1-1 and 1-2, minimum oscillation wavelength lambda a is different with full swing wavelength X b.In Figure 37, λ a1, λ b1 are minimum oscillation wavelength, the full swing wavelength of semiconductor laser 1-1, and λ a2, λ b2 are minimum oscillation wavelength, the full swing wavelength of semiconductor laser 1-2.In the case, λ a1 * λ b1/{4 * (λ b1-λ a1) } with λ a2 * λ b2/{4 * (λ b2-λ a2) can be identical fixed value all the time.In this situation, λ a, λ b as in formula (2)～formula (13) both can use λ a1, λ b1, also can use λ a2, λ b2.
In addition,, be not limited to this, also can make semiconductor laser 1-1,1-2 with the wavy vibration of sawtooth as shown in figure 38 though in the 1st～the 6th embodiment, make semiconductor laser 1-1,1-2 with the wavy vibration of triangle.That is, in the present invention,, semiconductor laser 1-2 work is got final product according to the increase and decrease of the oscillation wavelength mode opposite with semiconductor laser 1-1 as long as the mode that repeats to exist according at least the 1 duration of oscillation P1 makes semiconductor laser 1-1 work.Both can be identical with the situation of Figure 37, be λ a1 ≠ λ a2, λ b1 ≠ λ b2, also can be identical with the situation of Fig. 2, be λ a1=λ a2, λ b1=λ b2.
Action among the 1st duration of oscillation P1 is identical with the situation of triangular wave oscillation.But under the situation that makes semiconductor laser 1-1,1-2 with the wavy vibration of sawtooth, the change-over switch 70 of counting assembly 7, the output of 70a must be fixed.That is, change-over switch 70,70a, the output with filtering circuit 6-1 all the time is connected with the input of the 71-1 of period measurement portion, detection unit 73-1, and the output with filtering circuit 6-2 all the time is connected with the input of the 71-2 of period measurement portion, detection unit 73-2.
Have again, though make semiconductor laser 1-1,1-2 situation with the wavy vibration of triangle, irrelevant with the state of determination object 11, can carry out the amplitude adjustment by amplitude adjuster 10, but, under the situation that makes semiconductor laser 1-1,1-2 with the wavy vibration of sawtooth, only can carry out the amplitude adjustment during for stationary state at determination object 11.
Because the distance meter of interfere type is when measuring distance, being in static with determination object is absolute condition, so can't measure apart from having the distance of the determination object of speed.With respect to this, in the present invention, can also measure distance is not the distance that is in static determination object.That is,, can measure the speed (size, direction) and the distance of determination object simultaneously according to the present invention.In addition, in the present invention, shine the laser that is parallel to each other to determination object from the 1st, the 2nd reciprocal semiconductor laser of the increase and decrease of oscillation wavelength simultaneously, at each of the output signal of the 1st, the 2nd optical receiver, quantity to the interference waveform that comprised in the output signal of the 1st, the 2nd optical receiver is counted, thus, just can be with time measurement distance and the speed shorter than the past.
In addition, in the present invention, under the situation of the state that can't judge determination object according to the candidate value of speed, by using the result of calculation of historical displacement calculation mechanism, just can judge the state of determination object, and calculate apart from the distance of determination object and the speed of determination object.
In addition, in the present invention, the cycle of the interference waveform in the measurement count interval, the number of degrees in the cycle of the interference waveform in making between the count block based on this measurement result distribute, based on the distribute median in cycle of calculating interference waveform of the number of degrees, the summation Ns as the number of degrees of the grade below the 1st specified multiple of median is obtained in distribution based on the number of degrees, with summation Nw as the number of degrees of the grade more than the 2nd specified multiple of median, revise the count results of counting mechanism according to these number of degrees summation Ns and Nw, thus, disappearance when removing counting and the excessively influence of counting, owing to can revise the counting error of interference waveform, can improve the measuring accuracy of distance and speed.
In addition, in the present invention, replacement is counted the quantity of interference waveform with counting mechanism, measurement is the 1st, the cycle of the interference waveform of the regulation number that is comprised in the output signal of the 2nd optical receiver, the number of degrees that make the cycle of interference waveform based on this measurement result distribute, median based on cycle of this number of degrees Distribution calculation interference waveform, distribute based on these number of degrees and to obtain summation Ns as the number of degrees of the grade below the 1st specified multiple of median, with summation Nw as the number of degrees of the grade more than the 2nd specified multiple of median, revise the regulation number of interference waveform according to these number of degrees summation Ns and Nw, thus, the measuring error of quantity of the interference waveform of each unit interval can be reduced, the measuring accuracy of distance and speed can be further improved.
In addition, in the present invention, adjustment is from the 1st, the 2nd laser driver is to the 1st, the amplitude of at least one side in the drive current that the 2nd semiconductor laser provides, so that in the candidate value of the candidate value of the speed of hypothesis determination object when being in the micro-displacement state and the hypothesis determination object speed when being in displacement state, result of determination based on condition judgement mechanism, distance/speed determining unit is judged as the candidate value of a side's who is not true value and does not adopt speed, with being judged as in distance/speed determining unit is to multiply by the 1st on true value and the side's that adopts the candidate value of distance, the value of the wavelength variations rate of the 2nd semiconductor laser about equally, thus, just can make the 1st, the absolute value of the wavelength variable quantity of the 2nd semiconductor laser equates, can improve the measuring accuracy of distance and speed.
In addition, in the present invention, adjustment is from the 1st, the 2nd laser driver is to the 1st, the amplitude of at least one in the drive current that the 2nd semiconductor laser provides, so that in the speed or the candidate value of distance and the hypothesis determination object speed or the candidate value of distance when being in displacement state of hypothesis determination object when being in the micro-displacement state, result of determination based on condition judgement mechanism, it is true value and the side's that adopts the speed or the candidate value of distance that distance/speed determining unit is judged as, the 1st, keep continuity before and after the moment that the wavelength variations of the 2nd semiconductor laser is switched, thus, just can make the 1st, the absolute value of the wavelength variable quantity of the 2nd semiconductor laser equates, can improve the measuring accuracy of distance and speed.
Have, the present invention can be applicable to the technology of measurement apart from the speed of the distance sum measurement object of determination object again.
Claims (16)
1. distance/velograph comprises:
The 1st semiconductor laser (1-1), it is to determination object (11) irradiation the 1st laser;
The 2nd semiconductor laser (1-2), its to determination object according to shining the 2nd laser with the mode of the 1st laser parallel;
The 1st laser driver (4-1), its mode that exists repeatedly according to the dull continuously duration of oscillation that increases of oscillation wavelength drives above-mentioned the 1st semiconductor laser;
The 2nd laser driver (4-2), it drives above-mentioned the 2nd semiconductor laser according to the increase and decrease of the oscillation wavelength mode opposite with above-mentioned the 1st semiconductor laser;
The 1st optical receiver (2-1), its light output transform to above-mentioned the 1st semiconductor laser of major general is an electric signal;
The 2nd optical receiver (2-2), its light output transform to above-mentioned the 2nd semiconductor laser of major general is an electric signal;
Counting mechanism (13), comprise in its output signal above-mentioned the 1st optical receiver, by the quantity from the interference waveform that back light produced of determination object of the 1st laser and this laser, and comprise in the output signal of above-mentioned the 2nd optical receiver, count respectively by the quantity from the interference waveform that back light produced of determination object of the 2nd laser and this laser; And
Arithmetical organ (8), it is according to the count results of minimum oscillation wavelength and the full swing wavelength and the above-mentioned counting mechanism of the above-mentioned the 1st and the 2nd semiconductor laser, calculates at least one side in the speed of the distance sum measurement object of determination object,
Above-mentioned counting mechanism, during 1st counting shorter than the duration of oscillation of the above-mentioned the 1st and the 2nd semiconductor laser, obtain with the above-mentioned the 1st and the 2nd semiconductor laser in the quantity of the interference waveform that comprised in the output signal of the corresponding optical receiver of semiconductor laser that increasing of oscillation wavelength, simultaneously with the 1st counting during during the 2nd counting in the identical moment, obtain with the above-mentioned the 1st and the 2nd semiconductor laser in the quantity of the interference waveform that comprised in the output signal of the corresponding optical receiver of semiconductor laser that reducing of oscillation wavelength;
Above-mentioned arithmetical organ comprises:
Distance/speed calculation mechanism (81), it is based on the count results of minimum oscillation wavelength and the full swing wavelength and the above-mentioned counting mechanism of the above-mentioned the 1st and the 2nd semiconductor laser, calculates apart from the candidate value of the speed of the candidate value of the distance of determination object and determination object;
Condition judgement mechanism (82,82a), it judges the state of determination object based on the candidate value by above-mentioned distance/speed that speed calculation mechanism is calculated; And
Distance/speed is determined mechanism (86,86a), and it is based on the result of determination of above-mentioned condition judgement mechanism, determines in the speed of the distance sum measurement object of determination object at least one.
2. distance/velograph according to claim 1, wherein:
Above-mentioned distance/speed calculation mechanism, be in the situation of micro-displacement state at the supposition determination object, according to the 1st the counting during count results and 1 time after the 2nd the counting during count results, the 1st candidate value of computing velocity and the 1st candidate value of distance, and according to the 1st counting that calculates these the 1st candidate values during with the count results during the 2nd counting constantly and with the 2nd counting that calculates the 1st candidate value during with the count results during the 1st counting constantly, the 2nd candidate value of computing velocity and the 2nd candidate value of distance; Be in the situation of the change displacement state faster than micro-displacement state for the supposition determination object; According to the 1st the counting during count results and 1 time after the 2nd the counting during count results; The 3rd candidate value of computational speed and the 3rd candidate value of distance; And according to the 1st counting that calculates these the 3rd candidate values during with the count results during the 2nd the counting constantly and with the 2nd counting that calculates the 3rd candidate value during with the count results during the 1st counting constantly; The 4th candidate value of computational speed and the 4th candidate value of distance
Above-mentioned condition judgement mechanism under the 1st candidate value and the 2nd candidate value situation about equally by the speed that above-mentioned distance/speed calculation mechanism calculates, judges that determination object is in the micro-displacement state; Under the 3rd candidate value and the 4th candidate value situation about equally, judge that determination object is in displacement state by the speed that above-mentioned distance/speed calculation mechanism calculates.
3. distance/velograph according to claim 2, wherein:
Above-mentioned distance/speed is determined mechanism, judging that by above-mentioned condition judgement mechanism determination object is under the situation of micro-displacement state, if any one of the 1st candidate value of speed and the 2nd candidate value is the speed of determination object, establishes the 1st candidate value of distance and any one of the 2nd candidate value and be distance apart from determination object; Judging that by above-mentioned condition judgement mechanism determination object is under the situation of displacement state, if any one of the 3rd candidate value of speed and the 4th candidate value is the speed of determination object, establishes the 3rd candidate value of distance and any one of the 4th candidate value and be distance apart from determination object.
4. distance/velograph according to claim 2, wherein:
Above-mentioned distance/speed is determined mechanism, judging that by above-mentioned condition judgement mechanism determination object is under the situation of micro-displacement state, if the 1st candidate value of speed and the mean value of the 2nd candidate value are the speed of determination object, the 1st candidate value and the mean value between the 2nd candidate value of establishing distance are the distance apart from determination object; Judging that by above-mentioned condition judgement mechanism determination object is under the situation of displacement state, with the 3rd candidate value of speed and the mean value between the 4th candidate value speed, with the 3rd candidate value of distance and the mean value between the 4th candidate value distance as the distance determination object as determination object.
5. distance/velograph according to claim 2, wherein:
Above-mentioned distance/speed is determined mechanism, compare ∑ X and ∑ Y, wherein this ∑ X be calculate speed the 1st candidate value the 1st the counting during count results and calculate speed the 2nd candidate value the 1st the counting during the count results sum, this ∑ Y be calculate speed the 1st candidate value the 2nd the counting during count results and calculate speed the 2nd candidate value the 2nd the counting during the count results sum, this ∑ X than the big situation of this ∑ Y under, judge that determination object is just approaching, this ∑ Y than the big situation of this ∑ X under, judge determination object just away from.
6. distance/velograph according to claim 2, wherein:
Above-mentioned arithmetical organ, also comprise historical displacement calculation mechanism (85), it is in the situation of displacement state at situation and the supposition determination object that the supposition determination object is in the micro-displacement state, and the difference that calculates respectively by the candidate value of the candidate value of the distance that above-mentioned distance/speed calculation mechanism calculates and the distance that last computation goes out is historical displacement;
The state of determination object under the situation of the state that can't judge determination object based on the candidate value of speed, is judged by above-mentioned condition judgement mechanism (82a) according to the result of calculation of above-mentioned historical displacement calculation mechanism.
7. distance/velograph according to claim 1, wherein:
Above-mentioned counting mechanism comprises:
Counter (75-1,75-2), it is at each output signal of the above-mentioned the 1st and the 2nd optical receiver, counting the above-mentioned the 1st and the output signal of the 2nd optical receiver in the quantity of the interference waveform that comprised,
Period measurement mechanism (760), it is at each output signal of the above-mentioned the 1st and the 2nd optical receiver, when each input interference waveform, measure the counting that the quantity of interference waveform is counted during in cycle of interference waveform,
The number of degrees distribute and to make mechanism (761), and it is at each output signal of the above-mentioned the 1st and the 2nd optical receiver, and the number of degrees in the cycle of the interference waveform in making during the counting according to the measurement result of above-mentioned period measurement mechanism distribute,
Median calculation mechanism (762), it is at each output signal of the above-mentioned the 1st and the 2nd optical receiver, makes the median in the cycle of the number of degrees Distribution calculation interference waveform that mechanism makes according to being distributed by the above-mentioned number of degrees,
Modified value calculation mechanism (763), it makes the number of degrees distribution that mechanism makes according to being distributed by the above-mentioned number of degrees, obtaining below the 1st specified multiple of the median that is calculated by above-mentioned median calculation mechanism is the summation Ns of the number of degrees of grade, with be the summation Nw of the number of degrees of grade more than the 2nd specified multiple of median, each output signal at the above-mentioned the 1st and the 2nd optical receiver, revise the count results of above-mentioned counter based on these number of degrees Ns and Nw
Cycle and calculation mechanism (78-1,78-2), it is at each output signal of the above-mentioned the 1st and the 2nd optical receiver, calculates the summation in the cycle of interference waveform according to the measurement result of above-mentioned period measurement mechanism,
Number calculation mechanism (79-1,79-20), it is at each output signal of the above-mentioned the 1st and the 2nd optical receiver, the summation in the cycle that calculates according to the count results of being revised by above-mentioned modified value calculation mechanism with by above-mentioned cycle and calculation mechanism is calculated the quantity of the interference waveform of time per unit.
8. distance/velograph according to claim 7, wherein:
Above-mentioned modified value calculation mechanism when the count results of above-mentioned counter is N, adopts N '=N+Nw-Ns to ask revised value N '.
9. distance/velograph according to claim 8, wherein:
The 1st specified multiple is that 0.5, the 2 specified multiple is 1.5.
10. distance/velograph according to claim 1, wherein:
Above-mentioned counting mechanism comprises:
Period measurement mechanism (71a-1,71a-2), it is at each output signal of the above-mentioned the 1st and the 2nd optical receiver, when each input interference waveform, be determined at the above-mentioned the 1st and the output signal of the 2nd optical receiver in cycle of interference waveform of the regulation number that comprised
The number of degrees distribute and to make mechanism (761a), and it is at each output signal of the above-mentioned the 1st and the 2nd optical receiver, and make the number of degrees in the cycle of interference waveform according to the measurement result of above-mentioned period measurement mechanism and distribute,
Median calculation mechanism (762a), it makes the number of degrees distribution that mechanism makes at each output signal of the above-mentioned the 1st and the 2nd optical receiver according to being distributed by the above-mentioned number of degrees, calculates the median in the cycle of interference waveform,
Modified value calculation mechanism (763a), it makes the number of degrees distribution that mechanism makes according to being distributed by the above-mentioned number of degrees, obtaining below the 1st specified multiple of the median of being calculated by above-mentioned median calculation mechanism is the summation Ns of the number of degrees of grade, with be the summation Nw of the number of degrees of grade more than the 2nd specified multiple of median, and at each output signal of the above-mentioned the 1st and the 2nd optical receiver, revise the number of the interference waveform that in the mensuration in cycle, uses based on these number of degrees Ns and Nw
Cycle and calculation mechanism (78-1,78-2), it is at each output signal of the above-mentioned the 1st and the 2nd optical receiver, according to the measurement result of above-mentioned period measurement mechanism, calculates the summation in the cycle of interference waveform,
Number calculation mechanism (79-1,79-2), the summation in the cycle that it calculates according to the number of the interference waveform of being revised by above-mentioned modified value calculation mechanism with by above-mentioned cycle and calculation mechanism, at each output signal of the above-mentioned the 1st and the 2nd optical receiver, calculate the quantity of the interference waveform of time per unit.
11. distance/velograph according to claim 10, wherein:
Above-mentioned modified value calculation mechanism, the number of the interference waveform that uses in the mensuration in cycle adopt N '=N+Nw-Ns to obtain revised number N ' during as N.
12. distance/velograph according to claim 11, wherein:
The 1st specified multiple is that 0.5, the 2 specified multiple is 1.5.
13. distance/velograph according to claim 10, wherein:
Above-mentioned period measurement mechanism, during 1st counting shorter than the duration of oscillation of the above-mentioned the 1st and the 2nd semiconductor laser, obtain with the above-mentioned the 1st and the 2nd semiconductor laser in cycle of the interference waveform that comprised in the output signal of the corresponding optical receiver of semiconductor laser that increasing of oscillation wavelength, simultaneously with the 1st counting during during the 2nd counting in the identical moment, obtain with the above-mentioned the 1st and the 2nd semiconductor laser in cycle of the interference waveform that comprised in the output signal of the corresponding optical receiver of semiconductor laser that reducing of oscillation wavelength.
14. a distance/speed detecting method comprises:
Mode according to the dull continuously duration of oscillation that increases of oscillation wavelength exists repeatedly drives the step that determination object is shone the 1st semiconductor laser of the 1st laser;
According to the increase and decrease and the opposite mode of above-mentioned the 1st semiconductor laser of oscillation wavelength, drive step to the 2nd semiconductor laser of determination object and the 1st laser parallel ground irradiation the 2nd laser;
The counting step that the quantity from the interference waveform that back light produced of determination object because of the 2nd laser and this laser that comprises in the output signal from the quantity of the interference waveform that back light produced of determination object and the 2nd optical receiver because of the 1st laser and this laser that comprises in the output signal to the 1st optical receiver is counted; And
According to the minimum oscillation wavelength of the above-mentioned the 1st and the 2nd semiconductor laser and full swing wavelength and with the count results of the 1st and the 2nd each autocorrelative interference waveform of laser, at least one side of calculating in the speed of the distance sum measurement object of determination object calculation procedure
In above-mentioned counting step, during 1st counting shorter than the duration of oscillation of the above-mentioned the 1st and the 2nd semiconductor laser, obtain with the above-mentioned the 1st and the 2nd semiconductor laser in the quantity of the interference waveform that comprised in the output signal of the corresponding optical receiver of semiconductor laser that increasing of oscillation wavelength, simultaneously with the 1st counting during during the 2nd counting in the identical moment, obtain with the above-mentioned the 1st and the 2nd semiconductor laser in the quantity of the interference waveform that comprised in the output signal of the corresponding optical receiver of semiconductor laser that reducing of oscillation wavelength;
In the aforementioned calculation step, comprising:
Distance/speed calculation step based on the minimum oscillation wavelength of the above-mentioned the 1st and the 2nd semiconductor laser and full swing wavelength and count results in above-mentioned counting step, is calculated apart from the candidate value of the speed of the candidate value of the distance of determination object and determination object;
The condition judgement step based on the candidate value in above-mentioned distance/speed that the speed calculation step is calculated, is judged the state of determination object; And
Distance/speed determining step based on the result of determination in above-mentioned condition judgement step, is determined at least one in the speed of the distance sum measurement object of determination object.
15. distance/speed detecting method according to claim 14, wherein:
In above-mentioned counting step, comprising:
Second counting step, at each output signal of the above-mentioned the 1st and the 2nd optical receiver, counting the above-mentioned the 1st and the output signal of the 2nd optical receiver in the quantity of the interference waveform that comprised,
The period measurement step, at each output signal of the above-mentioned the 1st and the 2nd optical receiver, when each input interference waveform, measure the counting that the quantity of interference waveform is counted during in cycle of interference waveform,
The number of degrees distribute and to make step, and at each output signal of the above-mentioned the 1st and the 2nd optical receiver, the number of degrees in the cycle of the interference waveform in making during the counting according to the measurement result of above-mentioned period measurement step distribute,
The median calculation procedure at each output signal of the above-mentioned the 1st and the 2nd optical receiver, makes the median in the cycle of the number of degrees Distribution calculation interference waveform that step makes according to distributing at the above-mentioned number of degrees,
The modified value calculation procedure, make the number of degrees distribution that step makes according to distributing at the above-mentioned number of degrees, obtaining below the 1st specified multiple of the median that above-mentioned median calculation procedure calculates is the summation Ns of the number of degrees of grade, with be the summation Nw of the number of degrees of grade more than the 2nd specified multiple of median, each output signal at the above-mentioned the 1st and the 2nd optical receiver, revise the count results of above-mentioned second counting step based on these number of degrees Ns and Nw
Cycle and calculation procedure at each output signal of the above-mentioned the 1st and the 2nd optical receiver, are calculated the summation in the cycle of interference waveform according to the measurement result of above-mentioned period measurement step,
The number calculation procedure, each output signal at the above-mentioned the 1st and the 2nd optical receiver, according to the count results of being revised in above-mentioned modified value calculation procedure with in the summation in the cycle that above-mentioned cycle and calculation procedure calculate, calculate the quantity of the interference waveform of time per unit.
16. distance/speed detecting method according to claim 14, wherein:
In above-mentioned counting step, comprising:
The period measurement step, at each output signal of the above-mentioned the 1st and the 2nd optical receiver, when each input interference waveform, be determined at the above-mentioned the 1st and the output signal of the 2nd optical receiver in cycle of interference waveform of the regulation number that comprised,
The number of degrees distribute and to make step, and at each output signal of the above-mentioned the 1st and the 2nd optical receiver, make the number of degrees in the cycle of interference waveform according to the measurement result of above-mentioned period measurement step and distribute,
The median calculation procedure at each output signal of the above-mentioned the 1st and the 2nd optical receiver, makes the number of degrees distribution that step makes according to distributing at the above-mentioned number of degrees, calculates the median in the cycle of interference waveform,
The modified value calculation procedure, make the number of degrees distribution that step makes according to distributing at the above-mentioned number of degrees, obtaining below the 1st specified multiple of the median that above-mentioned median calculation procedure is calculated is the summation Ns of the number of degrees of grade, with be the summation Nw of the number of degrees of grade more than the 2nd specified multiple of median, and at each output signal of the above-mentioned the 1st and the 2nd optical receiver, revise the number of the interference waveform that in the mensuration in cycle, uses based on these number of degrees Ns and Nw
Cycle and calculation procedure at each output signal of the above-mentioned the 1st and the 2nd optical receiver, according to the measurement result of above-mentioned period measurement step, are calculated the summation in the cycle of interference waveform,
The number calculation procedure, according to the number of the interference waveform of being revised in above-mentioned modified value calculation procedure with in the summation in the cycle that above-mentioned cycle and calculation procedure calculate, at each output signal of the above-mentioned the 1st and the 2nd optical receiver, calculate the quantity of the interference waveform of time per unit.
Applications Claiming Priority (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007150102 | 2007-06-06 | ||
| JP2007-150102 | 2007-06-06 | ||
| JP2007150102 | 2007-06-06 | ||
| JP2008054706A JP5530070B2 (en) | 2007-06-06 | 2008-03-05 | Distance / speed meter and distance / speed measurement method |
| JP2008-054706 | 2008-03-05 | ||
| JP2008054706 | 2008-03-05 |
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| CN101319892A CN101319892A (en) | 2008-12-10 |
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| JP (1) | JP5530070B2 (en) |
| KR (1) | KR100984295B1 (en) |
| CN (1) | CN101319892B (en) |
| TW (1) | TW200916731A (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP5530069B2 (en) * | 2007-04-03 | 2014-06-25 | アズビル株式会社 | Distance / speed meter and distance / speed measurement method |
| JP5541773B2 (en) * | 2009-11-12 | 2014-07-09 | アズビル株式会社 | Physical quantity sensor and physical quantity measuring method |
| JP5702536B2 (en) * | 2010-01-05 | 2015-04-15 | アズビル株式会社 | Velocity measuring apparatus and method |
| JP6018662B2 (en) * | 2015-03-31 | 2016-11-02 | アズビル株式会社 | Counting device, physical quantity sensor, counting method and physical quantity measuring method |
| WO2017038659A1 (en) * | 2015-09-01 | 2017-03-09 | 国立大学法人東京大学 | Motion detection device and three-dimensional shape measurement device using same |
| CN108303705A (en) * | 2017-12-27 | 2018-07-20 | 西安理工大学 | Nd:YAG solid state lasers are from mixing velocity sensor and its speed-measuring method |
| JP7064167B2 (en) | 2018-01-18 | 2022-05-10 | オムロン株式会社 | Optical measuring device and optical measuring method |
| CN108490206B (en) * | 2018-04-04 | 2020-08-28 | 中冶长天国际工程有限责任公司 | Speed measuring system for sintering trolley |
| DE112018007502B4 (en) * | 2018-05-24 | 2024-06-06 | Mitsubishi Electric Corporation | OPTICAL DISTANCE MEASURING DEVICE AND PROCESSING DEVICE |
| JP7208052B2 (en) * | 2019-02-15 | 2023-01-18 | 株式会社豊田中央研究所 | optical rangefinder |
| JP6976371B2 (en) * | 2020-03-13 | 2021-12-08 | 三菱電機株式会社 | Rotation speed detector |
| CN115531661B (en) * | 2022-10-28 | 2023-07-18 | 巨翊医疗科技(苏州)有限公司 | Anti-interference intravenous infusion flow velocity measurement method, device and system |
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| US6100965A (en) * | 1997-04-02 | 2000-08-08 | Commissariat A L'energie Atomique | Laser speed measurement and range finding device |
| CN1589396A (en) * | 2001-09-21 | 2005-03-02 | 株式会社山武 | Physical quantity measuring method and its device |
| CN101281031A (en) * | 2007-04-03 | 2008-10-08 | 株式会社山武 | Distance/speed meter and distance/speed measuring method |
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| JP2885807B2 (en) * | 1988-10-21 | 1999-04-26 | 東京航空計器株式会社 | Distance detection device |
| JPH06242243A (en) * | 1993-02-18 | 1994-09-02 | Tokimec Inc | Quay approaching speedometer and distance measuring sensor used therefor |
| JP2954871B2 (en) * | 1996-03-25 | 1999-09-27 | 株式会社先進材料利用ガスジェネレータ研究所 | Optical fiber sensor |
| US7139446B2 (en) * | 2005-02-17 | 2006-11-21 | Metris Usa Inc. | Compact fiber optic geometry for a counter-chirp FMCW coherent laser radar |
| JP2006250853A (en) * | 2005-03-14 | 2006-09-21 | Fujitsu Ltd | Object surface shape measuring method and its system |
| JP5172077B2 (en) * | 2005-05-06 | 2013-03-27 | アズビル株式会社 | Distance / speed meter and distance / speed measurement method |
| JP2006322932A (en) * | 2006-04-25 | 2006-11-30 | Yamatake Corp | Signal detection circuit |
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- 2008-05-30 TW TW097120253A patent/TW200916731A/en not_active IP Right Cessation
- 2008-06-05 KR KR1020080052983A patent/KR100984295B1/en not_active IP Right Cessation
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| US6100965A (en) * | 1997-04-02 | 2000-08-08 | Commissariat A L'energie Atomique | Laser speed measurement and range finding device |
| CN1589396A (en) * | 2001-09-21 | 2005-03-02 | 株式会社山武 | Physical quantity measuring method and its device |
| CN101281031A (en) * | 2007-04-03 | 2008-10-08 | 株式会社山武 | Distance/speed meter and distance/speed measuring method |
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Also Published As
| Publication number | Publication date |
|---|---|
| TW200916731A (en) | 2009-04-16 |
| KR100984295B1 (en) | 2010-09-30 |
| CN101319892A (en) | 2008-12-10 |
| JP2009014701A (en) | 2009-01-22 |
| KR20080107301A (en) | 2008-12-10 |
| TWI366665B (en) | 2012-06-21 |
| JP5530070B2 (en) | 2014-06-25 |
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