TW200916731A - Distance/speed meter, and distance/speed measuring method - Google Patents

Abstract

To shorten a measuring time in a distance/speed meter and a distance/speed measuring method. The distance/speed meter has a laser driver 4-1 operating a semiconductor laser 1-1 such that first oscillation periods in which oscillation wavelength increases and second oscillation periods in which oscillation wavelength decreases alternately exist; a laser driver 4-2 operating a semiconductor laser 1-2 to oscillate in an opposite phase to the laser 1-1; photodiodes 2-1, 2-2 converting the optical output of the lasers 1-1, 1-2 into electric signals; counting means 5-1, 5-2, 6-1, 6-2, 7 counting the number of interference waveforms included in the output of the photodiodes 2-1, 2-2 on each of the photodiodes 2-1, 2-2; and an arithmetic device 8 computing a distance to a measuring object and the speed of the measuring object from the minimum oscillation wavelength and maximum oscillation wavelength of the lasers 1-1, 1-2 and the counted result.; The measuring time is shortened in measuring the speed of the measuring object as well as the distance to the measuring object at rest utilizing interference of light.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a distance, a speedometer, and a distance/speed measuring method for measuring a distance from a measuring object and a speed of a measuring object by interference of light. [Prior Art] The distance measurement using the interference of the light generated by the laser does not interfere with the measurement target because it is a non-contact measurement, and has been used as a highly accurate measurement method since ancient times. Recently, in order to achieve miniaturization of a device, a semiconductor laser system is utilized as a light source for light measurement. In its representative case, there is a person who uses a heterodyne interferometry. This person can measure long distances with good accuracy, but because of the use of an interferometer outside the semiconductor laser, it has the disadvantage of being complicated by the optical system. In contrast, a measuring device that uses the laser output light and the return light from the measuring object to interfere with the inside of the semiconductor laser (self-coupling effect) has been proposed (see, for example, Non-Patent Document 1, Non-Patent Document 2) Non-patent document 3). According to the self-coupling type laser measuring device as described above, since the semiconductor laser of the built-in photodiode has functions of light emission, interference, and light receiving, the external interference optical system can be greatly simplified. Therefore, the sensor portion is only a semiconductor laser and a lens, and is relatively small compared with the conventional technology. In addition, it has the feature that the distance measurement range is larger than the triangulation method. In Fig. 40, a composite resonator model of the FP type (Fabry-Perot type) semiconductor mine 200916731 is shown. In Fig. 40, a 1 〇 1 type semiconductor laser '1 02 type semiconductor crystal wall opening surface, a 1300 series photodiode, and a 10 system measuring object. A part of the reflected light from the measurement object 104 is easily returned to the oscillation area. The weak light returned is coupled with the laser light in the resonator 101, and the operation becomes unstable to generate noise (composite resonator noise or return light noise). Even if the amount of relative return light relative to the output light is extremely small, the change in the characteristics of the semiconductor laser due to the return light is remarkably exhibited. The phenomenon shown above is not limited to the Fabry-Perot type (hereinafter referred to as FP type) semiconductor laser, and is a vertical cavity cavity type laser (Vertical Cavity Surface Emitting Laser type) (hereinafter referred to as The same is true for other types of semiconductor lasers, such as the VCSEL type) and the Distributed Feedback Laser type (hereinafter referred to as DFB laser type). When the oscillation wavelength of the laser is λ and the distance from the wall opening surface 102 of the measurement target 104 to the measurement target 1 〇4 is L, the return light and resonance are satisfied when the following resonance conditions are satisfied. The lasers in the device 1 0 1 are mutually enhanced and the laser output is slightly increased. L ~ q λ / 2 ( 1 ) In the formula (1), q represents an integer. In this case, even when the scattered light from the measuring object 104 is extremely weak, the apparent reflectance in the resonator 11 of the semiconductor laser can be increased to cause amplification, which is sufficient for sufficient observation. -5- 200916731 4 In semiconductor lasers, since laser light of different frequencies is radiated according to the magnitude of the injected current, when the oscillation frequency is modulated, an external modulator is not required, and the injection current can be directly performed. Modulation. Fig. 4 is a graph showing the relationship between the oscillation wavelength and the output waveform of the photodiode 1 〇 3 when the oscillation wavelength of the semiconductor laser is changed at a constant ratio. When L = qX/2 represented by the formula (1) is satisfied, the phase difference between the return light and the laser light in the resonator 101 becomes 〇° (in-phase), and the return light and the laser light in the resonator 101 are the most Mutual reinforcement, when L = ςλ/2 λλ/4, the phase difference is 1 800 ° (reverse phase), and the return light and the laser light in the resonator 1 0 1 mutually weaken each other most. Therefore, if the oscillation wavelength of the semiconductor laser is changed, the case where the laser output is enhanced and the case where the laser is amplified alternately appear repeatedly, if the photodiode 1 〇 3 provided in the resonator 1 0 1 is detected at this time. When the laser output is output, as shown in Fig. 41, a stepped waveform of a constant period is obtained. Such waveforms are generally referred to as interference fringes. One of the staircase waveforms, i.e., the interference fringes, is referred to as a mode hop pulse (hereinafter referred to as ΜΗΡ). MHP is a phenomenon different from the mode hopping phenomenon. For example, when the distance from the measurement object 104 is L1, if the number of MHPs is one, the number of MHPs is five at half the distance L2. That is, when the oscillation wavelength of the semiconductor laser is changed for a certain period of time, the number of MHPs changes in proportion to the measured distance. Therefore, if the MHP is detected by the photodiode 103 and the frequency of the MHP is measured, the distance measurement can be easily performed. In the self-coupling type of laser measuring instrument, since the interference optical system outside the -6 - 200916731% oscilloscope can be greatly simplified, the device can be miniaturized, and a high-speed circuit is not required to disturb the light intensity. advantage. Further, since the return light of the measurement target can be extremely weak, there is an advantage that the reflectance of the measurement is not affected, i.e., the measurement target is not selected. However, in the conventional interferometric measuring instrument including the package coupling type, there is a problem in that the distance between the measurable and the stationary measurement target is not measured, and the distance to the measurement target cannot be measured. Therefore, the inventors have proposed a distance/speedometer (refer to Patent 1) which can measure not only the distance from a stationary measurement target but also the speed of the measurement target. Figure 42 shows the distance and velocity. The distance/speed meter of Fig. 42 has a semiconductor laser 201 that emits a laser for the measurement target; the light of the semiconductor laser 2〇1 is output as an electro-optical body 202 of the electric yoke, and the lens 203 will come from The light of the semi-conductive 203 is condensed to be irradiated on the measurement object 210, and the return light from the object 210 is condensed to be incident on the semiconductor laser 201, and the radiation driver 2 0 4 is made to make the semiconductor laser 2 0 a second period in which the first oscillation period and the oscillation wavelength are increased continuously for the repeated vibrational wavelength; the current-voltage conversion amplifier 205 converts the output current of the photodiode 202 into a voltage and amplifies; the signal extraction circuit 206, the output voltage of the current-voltage conversion amplifier 205 is differentiated twice; the circuit 207 counts the number of output voltages of the signal extraction circuit 206; and the arithmetic device 208 calculates the distance from the measurement object 2 1 and determines The speed of the object 2 10 0; and the display device 209, the calculation result of the display device 208. And from the object of the speed literature and the possible calculation of the radiation conversion body: the continuous transmission of the lightning oscillating power ΜΗΡ 0 of the display 200916731 laser driver 2 04 will increase or decrease with time according to a constant rate of change The triangular wave drive current is supplied to the semiconductor laser 20 1 as an injection current. Thereby, the semiconductor laser 201 is driven such that the first oscillation period in which the oscillation wavelength continuously increases at a constant rate of change and the second oscillation period in which the oscillation wavelength continuously decreases at a constant rate of change are alternately repeated. The fourth graph shows a time-varying diagram of the oscillation wavelength of the semiconductor laser 20 1 . In Fig. 43, P1 indicates the first oscillation period, P2 indicates the second oscillation period λα indicates the minimum 値 of the oscillation wavelength in each period, kb indicates the maximum 値 of the oscillation wavelength in each period, and Τ indicates the period of the triangular wave. The laser light emitted from the semiconductor laser 201 is condensed by the lens 203 and incident on the measurement object 210. The light reflected by the measuring object 210 is condensed by the lens 203 and incident on the semiconductor laser 201. Photodiode 202 converts the light output of semiconductor laser 201 into a current. The current-voltage conversion amplifier 205 converts the output current of the photodiode 202 into a voltage for amplification, and the signal extraction circuit 206 differentiates the output voltage of the current-voltage conversion amplifier 205 twice. The counting circuit 207 counts the number of turns included in the output voltage of the signal extracting circuit 206 for each period of the first oscillation period Ρ1 and the second oscillation period Ρ2. The arithmetic unit 208 calculates and measures the number of ΜΗΡ in the first oscillation period Ρ1 and the number of Μ 中 in the second oscillation period Ρ 2 based on the minimum oscillation wavelength of the semiconductor laser 1, the maximum oscillation wavelength λΙ> The distance between 2 1 0 and the speed of the measurement object 2 10 . (Patent Document 1) Japanese Patent Publication No. 2 0 0 6 - 3 1 3 0 8 0 (Non-Patent Document 1) Ueda Masahiro, Yamada Aya, and Wisteria, "Distance Meter Using Self-Coupling Effect of 200916731 Semiconductor Laser" , 1994, 1994 (Non-patent Document 2) Yamada Satoshi, Wisteria Jin, Tsuda Kisho, Ueda Masa, "Relationship of small distance meters using the self-coupling effect of semiconductor lasers Research, Aichi University of Technology Research Report, No. 31, B, p.35 to 42, 1996

(Non-Patent Document 3) Guido Giuliani, Michele Norgia, Silvano D ο n at i and Thierry Bosch, Laser diode se Ifni ixing technique for sensing applications " , JOURNAL OF OPTICS A : PURE AND APPLIED OPITCS, p. 283 to 294, [Explanation of the Invention] (Problems to be Solved by the Invention) According to the distance/speedometer disclosed in Patent Document 1, the distance to the measurement target and the speed of the measurement target can be simultaneously measured. However, in the distance/speedometer, it is necessary to measure the distance and the speed, for example, at least three times in the first oscillation period t-1, the second oscillation period t, and the first oscillation period t+1, for the ΜP The number is counted, and there is a problem that the measurement takes a long time. The present invention has been made in order to solve the above problems. The purpose of the present invention is to reduce the distance to a stationary measurement target by using interference of light, and to measure the speed of the measurement target, the distance meter, and the distance. The measurement time is shortened in the speed measurement method. -9- 200916731 (Means for Solving the Problem) The distance/speed meter of the present invention includes: a first semiconductor laser that radiates first laser light to a measurement target; and a second semiconductor laser that is parallel to the first laser light The second laser beam is radiated to the measurement target; the first laser driver operates the first semiconductor laser so that the oscillation period in which the oscillation wavelength continuously monotonously increases is repeated; and the second laser driver oscillates The second semiconductor laser is operated in such a manner that the increase and decrease of the wavelength is opposite to the first semiconductor laser. The first light receiver converts the first laser light and the return light from the measurement target into the telecommunication. a second light receiver that converts the second laser beam and the return light from the measurement target into the electric signal; and the counting means for each of the output signals of the first and second photodetectors Counting the number of interference waveforms generated by the first and second laser beams and their returning light included in the output signals of the first and second photodetectors; and calculating means At least one of the distance between the measurement target and the speed of the measurement target is calculated based on the minimum oscillation wavelength of the first and second semiconductor lasers and the maximum oscillation wavelength and the counting result of the counting means. Further, the distance/speed meter of the present invention includes: a first semiconductor laser that radiates first laser light to a measurement target; and a second semiconductor laser that emits a second radiation target to the measurement target in parallel with the first laser light. Laser light; the first laser driver operates the first semiconductor laser so that the oscillation period continuously increasing monotonously at least at least the oscillation wavelength is performed: the second laser driver increases or decreases the oscillation wavelength and the first laser Semiconductor-10-200916731 The opposite method of laser strikes the second semiconductor laser; the first optical device converts the light output of the first semiconductor laser into an electrical signal; and the second optical device, the second semiconductor lightning The light output of the shot is converted into a telecommunication: the counting means for the output signals of the first and second photodetectors, and the first and second thunder included in the output signals of the first and second photodetectors Counting the number of waveforms generated by the self-coupling effect of the light and the returning light; and calculating means, according to the minimum oscillation wavelength and the maximum oscillation wavelength of the first and second semiconductor lasers, The result of counting by the number means calculates at least one of the distance from the measurement target and the speed of the predetermined object. Further, in the configuration example of the distance/speed meter of the present invention, the pre-counting means increases the oscillation wavelength in the first and second semiconductor lasers in the first counting period shorter than the oscillation period. The number of interference waveforms included in the output signal of the photodetector corresponding to the conductor laser, and the oscillation between the first and second semiconductor lasers in the second count at the same time as the first counting period The means for calculating the number of waveforms included in the output signal of the photoreceiver corresponding to the semiconductor laser having a decreasing wavelength, the calculation means comprising: distance calculation means, according to the first and second semiconductor lasers The most oscillating wavelength and the maximum oscillating wavelength and the counting result of the counting means, the candidate 値 of the distance to the measurement target and the candidate 速 of the measurement target; the state determination means is calculated based on the distance/speed calculation hand The candidate for the speed 判定 determines the state of the measurement target; and the distance/speed determination means is determined based on the determination of the state determination means The number of the first pre-drying and the half-measurement period is determined to be at least one of the distance from the measurement target and the speed of the measurement target in the dry-segmentation section -11 - 200916731. In the configuration example of the distance/speedometer of the present invention, the distance/speed calculation means is based on the result of the counting of the first counting period and the second time after the first measurement. The count result in the count period 'the first candidate 计算 of the calculation speed and the first candidate 距离 of the distance, and the count result and the second count period at the same time as the first count period in which the first candidate 已 has been calculated The count result of the first count period at the same time in the second count period of the first candidate , is calculated, and the second candidate 速度 of the speed and the second candidate 距离 of the distance are calculated, and it is assumed that the measurement target is in the variation ratio of the minute displacement In the case of the state in which the state is fast, the third candidate 速度 of the speed and the third candidate 距离 of the distance are calculated based on the counting result in the first counting period and the counting result in the second counting period after one time, and are calculated based on The count result of the second count period at the same time in the first count period of the third candidate, and the second count period in which the third candidate 已 has been calculated When the first candidate period of the time is counted, the fourth candidate 速度 of the speed and the fourth candidate 距离 of the distance are calculated, and the state determination means determines that the first candidate 値 and the second candidate 前述 of the speed are substantially equal. The measurement target is in a state of minute displacement, and when the third candidate 値 and the fourth candidate 値 of the speed are substantially equal, it is determined that the measurement target is in a displacement state. Further, in the configuration example of the distance/speedometer according to the present invention, the distance/speed determining means sets the first candidate 値 and the second candidate 前述 of the speed when the measurement target is in the minute displacement state. In any one of -12-200916731, the speed of the measurement target is set, and any one of the first candidate 値 and the second candidate 前述 of the distance is a distance from the measurement target, and it is determined that the measurement target is displaced. In the case of the state, the third candidate 値 and the fourth candidate 値 of the speed are set to the speed of the measurement target, and any of the third candidate 値 and the fourth candidate 前述 of the distance is set to The distance of the aforementioned measurement object. In the configuration example of the distance/speedometer of the present invention, the distance/speed determining means sets the first candidate 値 and the second candidate 前述 of the speed when the measurement target is in the micro displacement state. The average 値 is the speed of the measurement target, and the average 値 of the first candidate 値 and the second candidate 前述 of the distance is a distance from the measurement target, and when it is determined that the measurement target is in a displacement state, The average 値 of the third candidate 値 and the fourth candidate 前述 of the speed is the speed of the measurement target. The average 値 of the third candidate 値 and the fourth candidate 前述 of the distance is the distance from the measurement target. Further, in the configuration example of the distance and velocity meter of the present invention, the distance/speed determining means performs comparison ΣΧ and ΣΥ, wherein the ΣΧ is the counting result of the 丨 counting period of the i-th candidate 计算 calculating the speed. And the sum of the count results of the first count period of the second candidate 计算 calculating the speed, the 计数 is the count result of the second count period of the first candidate 计算 at which the speed is calculated, and the second candidate for calculating the speed The sum of the count results in the second count period of the 値 determines that the measurement target is approaching when the ΣΧ is larger than the ΣΥ, and when the ΣΥ is larger than the ΣΧ, the measurement target is determined to be far away. . Further, in the configuration example of the distance/speedometer according to the present invention, the calculation means further includes a history displacement calculation means for assuming that the measurement target is in a minute displacement state and that the measurement target is assumed to be In each case of the displacement state, the history displacement of the difference between the candidate 値 calculated by the distance/speed calculation means and the candidate 前 calculated by the previous time is calculated, and the state determination means is based on When the candidate for the speed cannot determine the state of the measurement target, the state of the measurement target is determined based on the calculation result of the history displacement calculation means. Further, in the configuration example of the distance and speed meter of the present invention, the counting means includes a counter for outputting the first and second photodetectors for each of the output signals of the first and second photodetectors. The number of the interference waveforms included in the signal is counted, and the period measuring means 'measures the number of the aforementioned thousand waveforms each time the interference waveform is input for each of the output signals of the first and second photodetectors Counting the period of the aforementioned thousand-waveform waveform in the counting period of ί; the frequency distribution generating means creates the interference in the counting period based on the measurement result of the period measuring means for each of the output signals of the first and second photodetectors The frequency distribution of the period of the waveform; the median calculation means 'calculates the median of the period of the interference waveform based on the frequency distribution 'for each of the output signals of the first and second photoreceivers; The frequency distribution is obtained as a frequency sum N s of a level equal to or less than a first predetermined multiple of the median number, and is the middle The frequency sum Nw of the level of the second predetermined multiple of the number of bits is equal to the number of the output signals of the first and second receivers, and the counting results of the counts are corrected based on the frequencies Ns and NW'; a period and a calculation means, for each of the output signals of the first and second receivers, calculating a sum of periods of the interference waveforms based on the measurement knots of the periodic measurement means; and the number calculation means for the first Each of the output signals of the second photodetector calculates the number of the dry waveforms per unit time based on the sum of the count result corrected by the complement correction means and the period calculated by the period and the means. Further, in the configuration example of the distance/speed meter of the present invention, the pre-counting means includes period measuring means for each time the input interference signal is input to each of the output signals of the first and second optical units. Measuring a period of a predetermined one of the interference waveforms included in the output signals of the first and second photodetectors, and a frequency distribution forming means for measuring the measurement of the hand based on the period of the output signals of the first and second photodetectors As a result, the frequency distribution of the period of the interference waveform is created, and the median calculation means calculates the median of the period of the interference waveform based on the frequency distribution for the output signals of the first and second photoreceivers; According to the frequency distribution, the frequency sum Ns of the level equal to or less than the first predetermined multiple of the number of bits and the frequency sum Nw of the level of the second predetermined multiple of the median number are obtained. Each of the output signals of the second photoreceiver corrects the predetermined number according to the equal ratios Ns and Nw; the period and the calculation means, the first and second receiving Each of the output signals of the device calculates the sum of the periods of the interference waveform according to the measurement result of the above-described peripheral measuring means. Λ 刖 涉 涉 涉 涉 涉 涉 涉 涉 -15 -15 -15 -15 -15 -15 -15 200916731 and the number calculation means' for each of the output signals of the first and second photoreceivers, the sum of the number of interference waveforms corrected by the correction correction means and the period calculated by the period and the calculation means , Calculate the number of the aforementioned interference waveforms per unit time. Further, in the configuration example of the distance/speed meter of the present invention, the correction 値 calculation means is configured by N'=N + Nw-Ns when the count result of the counter or the predetermined number is N. Find the corrected 値N,. Further, in one configuration example of the distance/speed meter of the present invention, the first predetermined number is 0.5, and the second predetermined number is 1.5. Further, in a configuration example of the distance/speedometer according to the present invention, the period measuring means obtains an oscillation wavelength in the first and second semiconductor lasers in the first counting period shorter than the oscillation period. The period of the interference waveform included in the output signal of the photodetector corresponding to the increased semiconductor laser is obtained, and the first and second semiconductor lasers are obtained in the second counting period at the same time as the first counting period. The period of the interference waveform included in the output signal of the receiver corresponding to the semiconductor laser whose oscillation wavelength is decreasing. In addition, in the configuration example of the distance/speedometer of the present invention, there is provided an amplitude adjustment means for the speed 的 when the measurement target is in the minute displacement state and the speed at which the measurement target is in the displacement state. According to the determination result of the state determination means, the distance/speed determining means determines the speed 的' of the speed that is not used but is not used, and the distance that the distance/speed determining means determines to be true. The candidate chirp is supplied to the first and second semiconductors by the first and second laser drivers in such a manner that the 値 obtained by multiplying the wavelengths of the first and second semiconductor lasers by the wavelength -16 - 200916731 is substantially equal. The amplitude of at least one of the laser drive currents. Further, in the configuration example of the distance and speedometer of the present invention, there is provided an amplitude adjustment means for the speed 的 when the measurement target is in the minute displacement state and the speed at which the measurement target is in the displacement state. According to the determination result of the state determination means, the candidate for the speed that the distance/speed determination means determines to be true is used before and after the timing of switching the wavelength change of the first and second semiconductor lasers The amplitude of at least one of the drive currents supplied to the first and second semiconductor lasers by the first and second laser drivers is adjusted so as to maintain continuity. Further, in the configuration example of the distance and velocity meter of the present invention, there is provided an amplitude adjustment means for the distance 的 when the measurement target is in the minute displacement state and the distance when the measurement target is in the displacement state. The candidate 距离 according to the determination result of the state determination means, the candidate 距离 of the distance used by the distance/speed determining means to determine the true distance, before and after the timing of switching the wavelength change of the first and second semiconductor lasers The amplitude of at least one of the drive currents supplied to the first and second semiconductor lasers by the first and second laser drivers is adjusted so as to maintain continuity. Further, the distance/speed measuring method of the present invention includes a first oscillation step of operating the first semiconductor laser so that at least the oscillation period in which the oscillation wavelength continuously monotonically increases is repeated; and the second oscillation step -17- 200916731, the second semiconductor laser is operated in such a manner that the increase and decrease of the oscillation wavelength is opposite to the first semiconductor laser; and the counting step is performed for the first laser light to be radiated by the first semiconductor laser and the laser light The number of interference waveforms generated by the first laser light and the return light included in the output signal of the first photodetector from which the return light of the measurement target is converted into an electric signal is counted, and the second semiconductor thunder is to be The second laser light emitted by the radiation and the output signal of the second light receiver that converts the return light from the measurement target into the electrical signal, and the second laser light and the return light thereof are included in the output signal of the second laser light. Counting the number of waveforms; and calculating steps based on the minimum oscillation wavelength and the maximum oscillation wavelength of the first and second semiconductor lasers At least one counting result of the counting step 'calculates the speed of the measurement target and the distance to the measurement target. Further, the distance and velocity measuring method of the present invention includes a first oscillation step of operating the first semiconductor laser so that at least the oscillation period in which the oscillation wavelength continuously monotonically increases is repeated, and the second oscillation step oscillates. The second semiconductor laser is operated in such a manner that the increase and decrease of the wavelength is opposite to the first semiconductor laser; and the counting step is performed on the output signal of the first photodetector that converts the optical output of the first semiconductor laser into an electrical signal. Including the number of thousands of waveforms generated by the self-affinity effect of the first laser light emitted by the first semiconductor laser and the return light from the measurement target of the laser light. The second laser light emitted by the second semiconductor laser and the return light from the measurement target included in the output signal of the second light receiver that converts the light output of the second semiconductor laser into an electric signal The number of interference waveforms generated by the self-referential effect -18-200916731 is counted; and the operation step is based on the first and second semiconductor lasers The counting result of the oscillation wavelength and a maximum oscillation wavelength of said counting step before, at least one of said front and from the measured speed of the object is calculated and the measured object. (Effect of the Invention) Since the interference type distance meter measures the distance and the measurement target is at rest, the distance to the measurement target having the velocity cannot be measured. On the other hand, in the present invention, the distance to the measurement target that is not at rest can be measured. That is, with the present invention, the speed (size, direction) and distance of the object to be measured can be simultaneously measured. Further, in the present invention, the first and second semiconductor lasers that are opposite to each other are increased and decreased by the oscillation wavelength, and the laser light parallel to each other is emitted to the measurement target, and the output signals of the first and second photodetectors are respectively By counting the number of interference waveforms included in the output signals of the first and second photodetectors, the distance and speed can be measured in a shorter time than in the past. Further, in the present invention, when the state of the measurement target cannot be determined based on the candidate of the speed, the state of the measurement target can be determined by using the calculation result of the history displacement calculation means, and the distance from the measurement target can be calculated. The speed of the object is measured. Further, in the present invention, the period of the interference waveform in the counting period is measured, and based on the measurement result, the frequency distribution of the period of the interference waveform in the counting period is calculated, and the median of the period of the interference waveform is calculated based on the frequency distribution, according to The frequency distribution is obtained as a frequency sum N s of the -19-200916731 level which is equal to or less than the first predetermined multiple of the median, and a frequency sum Nw of a level which is a second predetermined multiple or more of the median, according to the frequency Ns And Nw, the counting result of the counting means is corrected, thereby eliminating the influence of the missing and excessive counting at the time of counting, and correcting the counting error of the interference waveform, thereby improving the measurement accuracy of the distance and the speed. Further, in the present invention, instead of counting the number of interference waveforms by the counting means, the period of a certain number of interference waveforms included in the output signals of the first and second photodetectors is measured, and based on the measurement result, The frequency distribution of the period of the interference waveform is calculated, and the median of the period of the interference waveform is calculated based on the frequency distribution, and the frequency sum Ns of the level which is the first predetermined multiple of the median is obtained from the frequency distribution, and the sum is the median The frequency sum Nw of the second predetermined multiple or more of the number is used to correct a certain number of interference waveforms based on the frequencies Ns and Nw, thereby reducing the measurement error of the number of interference waveforms per unit time, and further Improve the measurement accuracy of distance and speed. Further, in the present invention, the candidate 値 of the speed when the measurement target is in the minute displacement state and the candidate 速度 of the speed at which the measurement target is in the displacement state are assumed, and the distance/speed is determined based on the determination result of the state determination means. The determination means determines the candidate speed of the speed which is not true and is not used, and the candidate 距离 of the distance which the distance/speed determination means determines to be true is multiplied by the wavelength change rate of the first and second semiconductor lasers. The first and second semiconductor lasers can be adjusted by adjusting the amplitude of at least one of the drive currents supplied to the first and second xenon conductors by the first and second laser drivers in substantially equal manner. The absolute value of the wavelength change is equal, -20- 200916731%, which can improve the measurement accuracy of distance and speed. Further, in the present invention, the candidate 値 of the speed or the distance when the measurement target is in the minute displacement state and the candidate 速度 of the speed or the distance when the measurement target is in the displacement state are assumed, and the distance is determined based on the determination result of the state determination means. • The speed/distance candidate that is determined by the speed determining means to be true, and the first and second lasers are adjusted so as to maintain continuity before and after the timing at which the wavelength changes of the first and second semiconductor lasers are switched. The driver is supplied to the amplitude of at least one of the driving currents of the first and second semiconductor lasers, whereby the absolute enthalpy of the wavelength change amount of the first and second semiconductor lasers can be made equal, and the distance and the speed can be increased. Measurement accuracy. [Embodiment] (First Embodiment) The present invention is a method for measuring a distance based on an interference signal of a wave emitted by sensing when wavelength modulation is applied and a wave reflected by an object. Therefore, it can be applied to an optical interferometer other than the self-coupling type or an interferometer other than light. More specifically, for the case of self-coupling using a semiconductor laser, when the laser beam is irradiated to the measuring object by a semiconductor laser, and the oscillation wavelength of the laser is changed, the oscillation wavelength is changed from the minimum oscillation wavelength to the maximum oscillation wavelength. The displacement of the measurement object in the period (or the period from the maximum oscillation wavelength to the minimum oscillation wavelength) is reflected in the number of MHPs. Therefore, the state of the measurement target can be detected by investigating the number of MHPs when the oscillation wavelength is changed. The above is the basic principle of the interferometer. -21 - 200916731 The first embodiment of the present invention will be described in detail with reference to the drawings. Fig. 1 is a block diagram showing a distance/speedometer according to the first embodiment of the present invention. The distance meter of Fig. 1 has the first and second semiconductor lasers 1-1 and 1-2 for the laser light to be measured, and the light output of the respective conductor lasers 1-1 and 1-2 is converted into The photodiodes 2-1 and 2-2 of the first and third optical signals of the optical signal; respectively, the light from the semiconductor laser and the I-2 are condensed and irradiated to the measuring object 1 1, and will be from the measuring object The return light of 11 is condensed to be incident on the semiconductor laser 1-1, 1-2 mirrors 3-1, 3-2; the semiconductor lasers 1-1, 1-2 are alternately repeated with the generation wavelength continuously increasing The first and second laser drivers 4-1 and 4-2 in the second oscillation period in which the first oscillation period and the oscillation wavelength are continuous; the output currents of the photodiodes 2-1 and 2-2 are converted into voltages And a current-voltage conversion amplifier 5-1, 5-2; a filter circuit 6-1 for removing the carrier from the output voltage of the current-voltage converters 5-1, 5-2; a filter circuit 6.1 a counting device 7 that counts the amount of MHP included in the output voltage of 6-2; an arithmetic unit 8 that calculates the speed of the fixed object 11 from the measurement target 11; a display device 9 that displays the result of the arithmetic unit 8; Semiconductor thunder Flooding stream amplitude becomes 1 -1, -2 appropriate controls laser drive control device 4-1, 4-2. The current-voltage conversion amplifiers 5-1 and 5-2, the filter paths 6-1, 6-2, and the counting device 7 constitute a counting means. Hereinafter, for the sake of easy explanation, it is assumed that the semiconductor laser 1 adopts a type of mode jump (m 0 d e h 0 p P 1 n g ) (V C S E L type, laser type).

Bright. The radiation is reduced by a half-by-one 1-1 paired permeation vibration amplification, the number of 6-2 and the measured junction electric amplitude device have DFB-22-200916731 laser driver 4-1, 4-2 The triangular wave drive current which is repeatedly increased or decreased according to a constant rate of change is supplied as an injection current to the semiconductor lasers 1-1 and 1-2. Thereby, the semiconductor lasers 1-1 and 1-2 are driven alternately over the first oscillation period and the second oscillation period, and the oscillation period is proportional to the magnitude of the injection current with a constant change during the first oscillation period. The rate is continuously increased, and the oscillation period is continuously proportional to the magnitude of the injection current in the second oscillation period at a constant rate of change. At this time, the laser drivers 4-1, 4-2 supply the drive current in the opposite manner in the increase and decrease of the oscillation wavelength in the semiconductor lasers 1-1, 1-2. That is, in the semiconductor lasers 1-1, 1-2, the absolute enthalpy of the rate of change of the oscillation wavelength is the same, and the polarity of the rate of change is reversed. Therefore, when the oscillation wavelength of the semiconductor laser 1-1 is the maximum 値, the oscillation wavelength of the semiconductor laser 1-2 is the minimum 値, and when the oscillation wavelength of the semiconductor laser 1-1 is the minimum ,, the semiconductor laser 1 - The oscillation wavelength of 2 is the maximum 値. Fig. 2 is a graph showing the time variation of the oscillation wavelength of the semiconductor lasers 1-1 and 1-2. In Fig. 2, LD1 indicates an oscillation waveform of the semiconductor laser 1-1, LD 2 indicates an oscillation waveform of the semiconductor laser 2, P 1 indicates a first oscillation period, P2 indicates a second oscillation period, and λα indicates each period. The minimum 値 of the oscillation wavelength, Xba represents the maximum 振荡' of the oscillation wavelength in each period Τ represents the period of the triangular wave. In the present embodiment, the maximum 値Xb of the oscillation wavelength and the minimum 値λ a of the oscillation wavelength are each constant, and the difference λ b -la of the temple is also constant. The laser light emitted from the semiconductor lasers 1-1 and 1-2 is condensed by the lenses 3 -1 and 3 - 2 and is incident on the measurement object 11 . At this time, the laser light of the semiconductor lasers 1 - -23 - 200916731 1 and 1 - 2 is emitted in parallel with each other, and is incident on the measurement object 11. The light beams of the semiconductor lasers 1-1 and 1-2 reflected by the measurement object 11 are condensed by the lenses 3-1 and 3-2, respectively, and incident on the semiconductor lasers i_i and 卜2. Among them, the condensing of the lenses 3-1 and 3-2 is not essential. The photodiodes 2 - 1 and 2 - 2 convert the light output of the semiconductor lasers 1-1 and 1-2 into currents, respectively. The current-voltage conversion amplifiers 5-1 and 5-2 convert the output currents of the photodiodes 2-1 and 2-2 into voltages and amplify them, respectively. The filter circuits 6-1, 6-2 have the function of extracting overlapping signals from the modulated waves. Fig. 3(A) and Fig. 3(B) show the output voltage waveforms of the current-voltage conversion amplifiers 5-1 and 5-2, respectively, in the mode, Fig. 3(C) and Fig. 3(D). The output voltage waveforms of the chopper circuits 6-1 and 6-2 are displayed in modes. These figures show the waveforms (modulated waves) of Figs. 3(A) and 3(B) corresponding to the outputs of the photodiodes 2-1 and 2-2, and the semiconductor thunder of Fig. 2 is removed. The oscillating waveform (carrier) of 1 - 1, 1 - 2 is taken to extract the MHP waveform (overlapping wave) of Figs. 3 (C) and 3 (D). The counting means 7 counts the number of MHPs per unit time included in the outputs of the filter circuits 6-1, 6-2 with respect to the respective circuits of the filter circuits 6-1, 6-2. Fig. 4 is a block diagram showing an example of the configuration of the counting device 7, and Fig. 5 is a flow chart showing the operation of the counting device 7. The counting device 7 is composed of a changeover switch 70, period measuring units 71-1 and 7:1-2, and converting units 7 2 -1 and 7 2 -2. First, the switching on relationship of the counting device 7 determines whether or not the switching is performed (step S1 0 〇 in FIG. 5), and if it is in the switching state, the switching of the furnace-24-200916731 wave breaker circuits 6-1, 6-2 is performed. The connection to the period measuring units 71-1 and 71-2 is output (step S1 0 1 ). The switching of the changeover switch 70 occurs every 1/2 of the period T of the triangular wave. In other words, the changeover switch 70 connects the output of the filter circuit 6-1 to the input of the period measuring unit 7 1 -1 in the first oscillation period P 1 , and outputs the output and period of the filter circuit 6 - 2 . The unit 71-2 is connected to each other. In the second oscillation period P2, the output of the filter circuit 6-2 is connected to the input of the period measuring unit 7 1 -1, and the output of the filter circuit 6-1 and the period measuring unit are connected. 7 - 2 phase connection (step S 1 0 1 ). In other words, the period measuring unit 7 1 · 1 is often input with an output corresponding to the semiconductor laser 1-1 or 1-2 in which the oscillation wavelength is increasing among the outputs of the filter circuit 6-1 or 6-2. The period measuring unit 7 1 - 2 is often input with an output corresponding to the semiconductor laser 1-1 or 1-2 whose oscillation wavelength is decreasing among the outputs of the filter circuit 6-1 or 6-2. Here, the current time point is the first oscillation period P 1 or the second oscillation period P2 is notified by the laser drivers 4-1 and 4-2. The changeover switch 70 performs a switching operation in accordance with a notification from the laser drivers 4-1 and 4-2. The period measuring unit 71-1 measures the period (i.e., the period of the MHP) of the rising edge of the input from the changeover switch 70 in the first counting period whenever a rising edge is generated at the input from the changeover switch 70 ( Step S 1 02 of Fig. 5). Similarly, the period measuring unit 7丨_2 is a period of the rising edge of the input from the switching switch 70 in the second counting period every time a rising edge is generated at the input from the switching switch 7 (the period of the MHP) The measurement is performed (step S 1 02 ). Here, the first and second -25 to 200916731 counting periods will be described using Figs. 6(A) to 6(D). Fig. 6(A) and Fig. 6(B) are diagrams showing the output voltage waveforms of the mode-indicating current-voltage conversion amplifiers 5-1 and 5-2, respectively (Fig. (C) and (D) The output voltage waveform diagrams of the filter circuits 6-1 and 6-2 are respectively displayed in a mode. Ρη丨, Ρη2, ρη3, Ρη4, Ρη5, Ρη6, Ρη7, Ρη8 indicate the first counting period, Pml, pm2, Pm3, Pm4, Pm5, Pm6, Pm7, Pm8 indicate that the second counting period is severely 1, tOa, T1, t2, tob, t3, t4, tOc, t5, t6, tOd't7, t8 are not in the first counting period Pn (Pnl, Pn2, Pn3, Pn4, Pn5, Pn6, Pn7, Pn8) and the second count The time of the start or end of the period PmCPml, Pm2, Pm3, Pm4, Pm5, Pm6, Pm7, Pm8). As shown in Fig. 6(C) and Fig. 6(D), the first counting period Pn (Pnl 'Pn2, Pn3, Pn4, Pn5, Pn6, Pn7, Pn8) is for the filter circuit 6-1 or 6- The output of 2 is set to correspond to the output of the semiconductor laser 1 - 1 or 1 - 2 whose oscillation wavelength is increased, and the second counting period Pm (Pml, Pm2, Pm3, Pm4, Pm5, Pm6, Pm7, Pm8) is The output of the filter circuit 6-1 or 6-2 is set to correspond to the output of the semiconductor laser 1-1 having a reduced oscillation wavelength or 1-2. Preferably, the first counting period Pn and the second counting period Pm are shorter than the lengths of the first oscillation period P1 and the second oscillation period P2, that is, the period of the period T of the triangular wave of 1 /2. Further, the first counting period Pn and the second counting period Pm corresponding thereto are required to coincide with each other. However, the first counting period Pn can overlap each other in time, and the second counting period Pm can also overlap the time portions. The gate signal GS input to the period measuring unit 7 I -1 and 7 1 -2 is increased from the beginning of the first counting period Pn and the second counting period Pm at -26-200916731, and in the first counting period Pn and the first 2 The signal that the end of Pm falls during the counting period. In the first counting period Pn and the second counting period Pm, the period other than the portion where the triangular wave drive current is the largest (the portion where the oscillation period P 1 is switched to P2 or the portion where P2 is switched to P1) is set. Next, the conversion unit 72-1 of the counter device 7 converts the average 値 of the period of the MHP measured by the period measuring unit 7 1 -1 to the number X of the MHP per unit time in the first counting period Pn (the oscillation wavelength The number of interference waveforms of the semiconductor laser in the case of increasing "transformation unit 72-2 converts the average 値 of the period of Μ Η P measured by the period measuring unit 7 1 - 2 into the second counting period Pm The number of turns per unit time Υ (the number of interference waveforms of the semiconductor laser in the case where the oscillation wavelength is decreasing) (step S 1 0 3 of Fig. 5). If the average period of Μ Η P is set to T s and the frequency of the triangular wave is set to f, the number of enthalpy per unit time can be calculated using { 2/ ( fxTs ) }. The unit time at this time is 1/2 of the period T of the triangular wave. The counting device 7 performs the above-described processing for each of the first and second counting periods Pn and Pm. Therefore, the number X of MHPs is calculated by the operations of the period measuring unit 7 1 -1 and the converting unit 72-1, and the number Y of MHPs is calculated by the operations of the period measuring unit 7 and the converting unit 72-2. In this way, the numbers X and Y of Μ Η P are simultaneously obtained. Next, the arithmetic unit 8 calculates the distance from the measurement target 11 and the measurement target 1 1 based on the minimum oscillation wavelength of the semiconductor lasers 1-1 and 1-2, the maximum oscillation wavelength Xb, and the number X of ΜΗΡ, Υ ' speed. The seventh embodiment shows a block diagram showing an example of the configuration of the arithmetic unit 8, and Fig. 8 is a flow chart showing the operation of the arithmetic unit 8. The arithmetic unit 8 is configured by a memory unit 80 for storing the numbers X and Y of the MHP calculated by the counting unit 7 and the calculation result of the arithmetic unit 8; according to the semiconductor lasers 1-1 and 1-2 The minimum oscillation wavelength, the maximum oscillation wavelength λ!?, and the number of MHPs X and Υ, the distance 候 between the candidate 値 of the distance to the measurement target 11 and the candidate 速度 of the velocity of the measurement target 1 1 • The velocity calculation unit 8 1 ; The calculation result of the speed calculation unit 8 1 determines the state of the measurement target 8 state determination unit 8 2 , and the speed determination unit 83 that determines the speed of the measurement target 11 based on the determination result of the state determination unit 8 2 and the state determination unit As a result of the determination of 82, the distance determining unit 84 that determines the distance from the measurement target 11 is determined. The speed determining unit 83 and the distance determining unit 84 constitute a distance/speed determining means. In the present embodiment, any one of a minute displacement state in which the state of the measurement target 11 satisfies a predetermined condition or a displacement state in which the fluctuation is larger than the micro displacement state is provided. When the average displacement of the measurement target Η in each period of the counting period Ρη and the counting period Pm is V, the so-called minute displacement state means satisfying (λΐ)-λα) / lb > the state of V/Lb 'the so-called displacement The state refers to a state in which (λΙ)−λα ) /λΐ? SV/Lb is satisfied. Wherein ' Lb is the distance from the measurement target 1 1 between the intermediate times of the first and second counting periods Pn and Pm. First, the memory unit 80 of the arithmetic unit 8 memorizes the number X and Y of the Η Η P calculated by the counting device 7 (step S 2 0 1 in Fig. 8). Next, the distance/speed calculating unit of the arithmetic unit 8 8 1 calculation -28- 200916731 The candidate 値 of the speed of the fixed object 1 1 and the candidate 距离 of the distance to the measurement target 11 are placed in the memory unit 80 (step S202 of Fig. 8) . As shown in the following equation, the distance/speed calculating unit 81 is based on the number X of ΜΗΡ in the first counting period Ρη and the number of Μ Η P in the second counting period P m + 1 at the next time (t) + 1 ) Calculate the first candidate 値Veil ( t, t + Ι ) of the velocity at time t to t + 1, based on the number Y of ΜΗΡ in the second counting period Pm and the first count at the next time The number of enthalpies X ( t+1 ) in the period Pn+1 calculates the second candidate 値V a 2 ( t,t +1 ) of the velocity in the time t to t+1, according to the number of Μ Η P X ( t And Y (t+1) calculate the third candidate 値νβ3 ( t, t+1 ) of the velocity in time t to t+1, and calculate the time according to the number of ΜΗΡ Y Y ( t) and X ( t+1 ) The fourth candidate 値νβ4(ί, t+1) of the speed in t to t+1 is stored in the storage unit 80 (step S202).

Val (t, t+ 1 ) = (X(t)-Y(t+l )) χλΙ>/4 (2) Va2(t, t+l) = (Y(t)-X(t+l) )xXa/4 -( 3 ) VP3(t, t+ 1 ) = (X(t) + Y(t+ 1 ))xXb/4 (4) Υβ4(ΐ, ί+1) = (Υ(ΐ) + Χ(ί+1)) χλα/4 (5) Further, as shown in the equation, the distance/speed calculating unit 8 1 is based on the number of MHPs (t) in the first counting period Ρη and at the same time The number Y(t) of the MHP in the second counting period Pm is calculated as the fifth candidate 値Va5(t) and the sixth candidate 値Υβ6(t) at the time t-Ι to t, and -29-200916731 is stored The memory unit 80 (step S202).

Va5(t) = (X(t)-Y(t))x(Xa + Xb)/8 (6)

Vp6(t) = (X(t) + Y(t))x(Xa + Xb)/8 (7) Further, as shown in the following equation, the distance/speed calculating unit 8 1 is in the root-counting period Pn The number of MHPs X ( t ) and the number of MHPs in the first period Pm+1 at the next moment Y ( t + Ι ) calculates the first candidate 値 La 1 ( t, t +1 ) of the distance at time t 3 . Calculate the second candidate from the time t to t+Ι according to the number Y ( t ) of the MHP in the second count Pm and the number X ( t+Ι ) of the MHP in the first count Pn+1 at the next time.値La2 ( t,t+Ι ), calculate the third candidate 値(t,t+Ι ) of the distance from time t to t+1 according to the number of MHPs X and Y ( t+1 ), and according to the number of MHP Y ( t ) and X ( t + Ι ) The fourth candidate 値 L04 ( t, t+1 ) of the distance from time t to t + l is placed in the memory unit 80 (step S 2 0 2 ).

Lal(t, t+l) = XaxXb(X(t) + Y(t+l))/(4x(Xa-Xb))...(8) La2(t,t+l) = XaxXb(Y(t ) + X(t+l))/(4x<>a4b))...(9) Lp3(t, t+Ι ) = λαχλΐ3(Χ(〇-Υ(ί+1))/(4χ(λ& -λΐ5))...(10) Lp4(t, t + l)=^a>ab(Y(t)-X(t+l))/(4x(Xa-Xb)) ."(11) As shown in the following equation, the distance/speed calculation unit 81 is the number of MHPs in the root loss count period Pn X ( t ) and the same time: the first time: the distance during the t+1 period (t) Lp3 Calculate and store the number of MHPs in the Pm period from time to time -30- 200916731 Υ ( t ) Calculate the 5th candidate 値Lct5 ( t ) and the 値Lp6(t) from the time t1 to the distance from the measurement object 1 1 And stored in the memory unit 80 (step S202).

La5(t) = kaxXb(X(t) + Y(t))/(4x0a-Xb))...(12)

Lp6(t) = XaxXb(X(t)-Y(t))/(4x(Xa-Xb)) (13) In the formula (2) to the formula (1 3 ), the candidate 値V cx 1 (t, Va2(t, t+l), Va5(t), Lal(t, t+l), La2), and La5(t) assume that the measurement target 1 1 is calculated in a small displacement state, and the candidate 値Νβ3 ( t, t+Ι ), νβ4 ( t,t+Ι ), ), LP3 ( t, t+1 ), ίβ4 ( t,t+1 ), ίβ6 ( t) assume that the image 1 1 is in a displacement state The calculated 値. The time t+1 is the end time of the first counting period pn+1 and the second counting period P, and the time t is the ending time of the previous period Pn and the second counting period Pm of Pn+1 and Pm+1, and the timing The first count period Pn-1 and the end time of the second interval Pm-Ι of pn+l and Pm+Ι. X ( t + Ι ) is the number of Pn MHP in the first counting period, X ( t ) is the MHP in the first counting period Pn, and Y ( t + Ι ) is the number of MHP in the second counting period Pm + )) The number of halos of the MHP in the second counting period Pm. For example, if the current time is t + l = t2 ', the first count Pn+1 is Pn2 of Fig. 6 (C), the first count period fl Pnl of the previous time, and the second count period Pm+1 is 6 (D) Pm2, 6 of t, t+1) (t, t+1 state νβ6 (t measured against 荀Pm+1 1 count t-ι count period + 1) , γ (the number of periods t ρ η is the previous time - 31 - 200916731 The second counting period pm is Pml. Further, if the current time is set to t + l = t3 ', the first counting period Pn+1 is Pn3, The first i-th count period Pn is Pn2, the second count period Pm+1 is pm3, and the previous S-th ten-digit period Pm is Pm2. The arithmetic unit 8 calculates the number of MHPs each time by the counting means 7. At the time of the calculation, the calculation of the equation (2) to the equation (丨3) is performed. Next, the state determination unit 82 of the arithmetic unit 8 uses the equation (2) to the equation (5) stored in the memory unit 80. As a result of the calculation, the state of the measurement target 11 is determined (step S203 in Fig. 8). The state determination unit 82 is in Val ( t, t+1 ) = Va2 ( t, t + Ι ), that is, the number (2) When the calculation result of the equation (3) is equal, the measurement target is determined丨1 is in a state of minute displacement. Further, state determination unit 8 2 is calculated at V β 3 ( t, t + 1 )=νβ4 ( t, t+ 1 ), that is, the calculation of equations (4) and (5) When the result is equal, the determination target 11 is in a displacement state. The state determination unit 82 is within a predetermined error range in which the error of the calculation result of the equation (2) and the calculation result of the equation (3) is within a predetermined error range. In the case where the calculation results of the equations (4) and (5) are equal or not, the determination can be made in the same manner. The speed determination unit 83 of the arithmetic unit 8 is based on the state determination unit 82. The determination result 'determines the absolute 値 of the speed of the measurement target 値 (step S 2 04 of Fig. 8). That is, the speed determination unit 8.3 determines that the measurement object 11 is in the state of minute displacement. The average 値 of the velocity 値Val ( t,t+1 ) and Va2 ( t,t+Ι ) of the velocity of the memory unit 80 is the absolute 値 of the velocity of the measurement target 1 1 at the time t-1 to t+1 (step -32- 200916731 S204) Further, the 'speed determination unit 8.3 determines that the measurement target 1 1 is in a displacement state. The average 値 of the candidate 値νβ3 ( I t+Ι ) and νβ4 ( t, t+Ι ) which determine the velocity of the memory in the memory portion 80 is the measurement object 1 1 at the time t-Ι to t+1 Absolute 値 of speed (step S 2 〇 4 ). As shown above, the noise resistance can be improved by using the average 値 of the calculation results of the equations (2) and (3) and the average 値' of the calculation results of the equations (4) and (5). . However, although the noise resistance is poor, the speed determining unit 83 can determine the speed candidates 値Val ( t, t+Ι ) and Va2 ( t, t+Ι in the case where it is determined that the measurement target n is in the minute displacement state. Any one of the absolute enthalpy of the velocity of the measurement target 1 1 may determine the candidate 値νβ3 ( t, t + Ι ) and ν β 4 ( t, in the case where the measurement target 1 1 is in the displacement state. Either t + Ι ) is the absolute 値 of the velocity of the measurement object 11. However, the speed determining unit 83 may determine that the candidate 値V a 5 ( t ) of the speed of the memory unit 80 is in the time t −1 to t when it is determined that the measurement target U is in the minute displacement state. The absolute value of the velocity of the object 11 is measured (step S2 04). Further, when the determination target 11 is in the displacement state, the speed determination unit 83 may calculate the candidate 値V β 6 ( t ) of the velocity of the memory unit 80 as the time t −1 to t. The absolute enthalpy of the velocity of the measurement object 1 1 (step S204) ° can be calculated using the equation (6) or the equation (7) as compared with the case of using the calculation results of the equations (2) to (5) More correct speed. Next, the speed determining unit 83 calculates the following equation (14) and number -33 - 200916731 (15), and specifies the direction of the speed of the measurement target 11 (step S 2 0 5 in Fig. 8). IX = X(t) + X(t+l) (14) IY = Y(t) + Y(t+l) ---(15) The speed determining unit 83 compares the equation (I4) In the case where the ΣΥ and the equation (15) are larger than ΣΧ, the measurement object 11 is determined to be close to the distance/speedometer, and when Σ Y is larger than Σ X, the measurement target is determined. 1 1 is far away from the distance • speed meter. In the step S204, the speed determining unit 83 determines the absolute value of the speed by using the calculation result of the equation (6) or the equation (7) instead of the calculation result using the equations (2) to (5). In the case of 'comparative Μ Η P number X ( t ) and Y ( t ), in the case where X ( t ) is larger than Y ( t ), it is determined that the measuring object 1 1 is approaching the distance • the speedometer 'in When Y ( t ) is larger than X ( t ), it is determined that the measurement target 11 is moving away from the distance/speedometer (step S205). Then, the distance determining unit 84 determines the distance from the measurement target I1 based on the determination result of the state determining unit 82 (step S206 in Fig. 8). In other words, the distance determining unit 84 determines the candidate 値Lai(t, t+Ι) and Lct2 (t, t+) of the distance stored in the memory unit 80 when it is determined that the measurement target 11 is in the state of minute displacement. The average 値 of Ι is the average distance from the measurement object 11 in the time t-Ι to t+1 (step s 2 0 6 ). Further, the distance determining unit 84 determines the candidates 値LP3 ( t, t+Ι ) and LP4 ( t, in the case where the measurement target 11 is in the state of displacement -34 - 200916731, in determining the distance of the memory unit 80. The average 値 of t + Ι ) is the average distance from the measurement target 11 in the time t-Ι to t+1 (step S206). Here, although the noise resistance is poor, the distance determining unit 84 can determine the candidate 値La 1 ( t, t+1 ) and La2 ( t, t+ of the distance in the case where the measurement target 1 1 is in the state of minute displacement. 1) is a distance from the measurement target 1 1 or a candidate for determining the distance 値Lp3 ( t, t+Ι ) and ίβ4 ( t, t in the case where it is determined that the measurement target 11 is in a displacement state. Either one of +Ι) is the distance from the measurement target 11. However, the distance determining unit 84 may determine that the candidate 値La5(t) of the distance stored in the memory unit 80 is the time t-1 to t when it is determined that the measurement target 11 is in the micro displacement state. The average distance of the object 11 is measured (step S206). Further, when determining that the measurement target 11 is in the displacement state, the distance determination unit 84 may determine that the candidate 値LP6(t) of the distance stored in the memory unit 80 is the time t-Ι to t and the measurement target 1 The average distance of 1 (step S 2 0 6 ). A more accurate distance can be calculated using the equation (12) or the equation (13) as compared with the case of using the calculation results of the equations (8) to (1 1 ). The arithmetic unit 8 is configured such that, for example, the user (user) instructs the measurement to be completed (YES in step s 207 of Fig. 8), and the number of MHPs is calculated by the counting device 7 each time, that is, as described above. The processing of steps S201 to S206 is shown. The display device 9 displays the distance from the measurement target 11 and the speed of the measurement target n calculated by the arithmetic unit -35-200916731 8 in real time. On the other hand, the amplitude adjustment device 10 uses the operation. As a result of the determination by the state determination unit 83 of the device 8, the laser drivers 4-1 and 4-2 are controlled such that the amplitudes of the triangular wave drive currents of the semiconductor lasers 1 _ 丨 and 2 are appropriate. In a distance/speedometer using a plurality of semiconductor lasers 1-1, 1-2, if there is a difference in the absolute enthalpy of the wavelength variation of the semiconductor lasers 1-1 and i_2, an error occurs in the measurement. . Figure 9 (A) to (C) are used to illustrate the change of the wavelength of the semiconductor lasers 1_1, 1-2, the change of the number of MHP X, Y, and the figure 9 (A) shows the semiconductor laser丨_ :!,! Time-varying diagram of the oscillation wavelength of _2, Fig. 9 (Β) shows the number of Μ Ρ X and the variation of Υ when the absolute wavelengths of the wavelength variations of the semiconductor lasers 1-1 and 1-2 are equal. Fig. 9(C) is a graph showing changes in the number of enthalpy X and Υ when there is a difference in the absolute enthalpy of the wavelength variation of the semiconductor lasers 1 _ 1 and 1 _ 2 . In Fig. 9 (Α) to Fig. 9 (C), the oscillating waveform of the LD1 semiconductor laser 1-1, the LD2 semiconductor laser 1:1 oscillation waveform, and X1 and Χ2 are the oscillation wavelengths increasing, respectively. In the case of the semiconductor lasers 1-1, 1-2, the number of '', Υ1, Υ2 are the number of semiconductor lasers 1 ->, 1 - 2 Μ Ρ 情形 in the case where the oscillation wavelength is decreasing, respectively. In the case where the absolute 値 of the wavelength variation of the semiconductor lasers 1-1 and 1-2 is equal, as shown in Fig. 9 (Β), even at the oscillation wavelengths of the semiconductor lasers 1-1 and 1-2 Increase the switching to reduce 'or reduce the number of switches to increase -36-200916731 before and after the timing SW1, SW2, SW3, although the number of MHP X, γ respectively maintain continuity, but if in the semiconductor laser 1-1, 1 -2 When there is a difference in the absolute enthalpy of the amount of change in the wavelength, as shown in Fig. 9(C), the number of enthalpies X and Υ respectively lose continuity. Therefore, the amplitude adjustment device 10 of the present embodiment uses the speed candidates 値Val(t, t+1), Va2(t, t+l), and Vp3 calculated by the distance/speed calculation unit 81 of the arithmetic unit 8. (t, t+1) and Vp4(t, t+1), based on the determination result of the state determination unit 8 2, the speed determination unit 83 determines that the speed candidate is not true and the speed candidate is not used. . When it is determined that the measurement target 1 1 is moving in the state of the minute displacement, the speed determining unit 83 does not use the average of the velocity candidate systems V β 3 ( t, t+ 1 ) and νβ4 ( t, t+1 ). In the case where it is determined that the measurement target 1 1 is moving in the displacement state, the speed determining unit 83 does not use the average of the velocity candidate systems Va 1 ( t, t + 1 ) and Va2 ( t, t + 1 ). . The amplitude adjuster 10 adjusts the amplitude of the triangular wave drive current through the laser drivers 4-1 and 4-2 so that the speed determining unit 83 does not use the speed candidates 値Val ( t, t + Ι ) and Va2 ( t The average 値 of t + Ι ) or the average 値 of νβ3 (t, t+1 ) and νβ4 ( t, t+1 ) is substantially equal to the distance candidate 采用La of the adopter determined by the distance determining unit 84 as true. The average 値 of 1 ( t, t+ 1 ) and La2(t, t+Ι) or the average 値 of Lp3(t, t+Ι) and Lp4(t, t+ 1 ) is multiplied by the semiconductor laser 1 _丨, 丨_ The wavelength change rate of 2 (λ!) - λ &) Ub 値. At this time, amplitude adjustment may be performed for both the drive current supplied to the semiconductor laser 1-1 by the laser driver 4_1 and the drive current supplied to the semiconductor laser 1-2 by the laser driver 4_2, or may be adjusted - 37- 200916731 either party. When it is determined that the measurement target 11 is in the state of minute displacement, the distance candidate 距离 of the distance determining unit 84 is the average 値 of La 1 ( t, t+ 1 ) and La2 ( t, t+1 ), and is determined. When the measurement target 11 is in the displacement state, the distance candidate 采用 of the distance determining unit 84 is the average 値 of Lp3 (t, t+1) and Lp4(t, t+1). Fig. 1 is an explanatory diagram for explaining a method of adjusting the amplitude of the dipole wave drive current supplied to the semiconductor lasers 1-1 and 1-2 by the laser drivers 4-1 and 4-2. According to the instruction from the amplitude adjusting device 1 ,, the laser drivers 4_1, 4-2 are fixed to the fixed 値 by the maximum 値 of the driving current (in the example of the first drawing, the semiconductor laser 1-1, 1 In the case of the upper limit 値CL of the drive current specified by -2, the amplitude AMP of the drive current is adjusted by directly increasing or decreasing the minimum 驱动 of the drive current. In this way, the amplitude of the drive current can be set to an appropriate value. As described in the present embodiment, by adjusting the amplitude of the triangular wave drive current, the absolute enthalpy of the wavelength change amounts of the semiconductor lasers 1-1 and 1-2 can be made equal, and the measurement error of the distance and the speed can be reduced. In the case where the speed determination unit 83 determines the absolute 値 of the velocity using the calculation result of the equation (6) or the equation (7) instead of using the calculation results of the equations (2) to (5), the amplitude adjustment is performed. The device 10 adjusts the amplitude of the triangular wave drive current so that the speed determining unit 83 determines that the speed candidate 値V a 5 ( t ) or V β 6 ( t ) is not equal to the distance. The determining unit 84 determines that the distance candidate 値L a 5 ( t ) or L β 6 ( t ) of the adopter is multiplied by the wavelength change rate (Xb-Xa ) of the semiconductor laser 1 -1; Ab's jealousy. When it is determined that the measurement target Π is moved in the micro-38-200916731 small displacement state, the speed determination unit 83 does not use the speed candidate system νβ6(t), and determines that the measurement target 11 is moving in the displacement state. In this case, the speed determining unit 83 does not use the speed candidate system Vot5(t). When it is determined that the measurement target U is in the state of minute displacement, the distance candidate 値 of the distance determining unit 84 is La5(t), and when it is determined that the measurement target 11 is in the displacement state, the distance determining unit 84 adopts The distance candidate is ίβ6 ( t ). Further, the amplitude adjuster 10 can adjust the amplitude of the triangular wave drive current by the laser drivers 4-1 and 4-2 so that the speed determining unit 83 determines that it is true based on the determination result of the state determining unit 82. The speed of the candidate 値V α 1 ( t,t + 1 ) and the average V of V a 2 ( t,t + 1 ) or V β 3 ( t,t+l) and V04(t,t+1) On average, continuity is maintained before and after the timing at which the wavelength changes of the semiconductor lasers 1-1 and 1-2 are switched. Further, in the case where the speed determination unit 83 determines the absolute 値 of the velocity using the calculation result of the equation (6) or the equation (7) instead of using the calculation results of the equations (2) to (5), the amplitude The adjusting device 10 can also adjust the amplitude of the triangular wave drive current so that the speed determining unit 83 determines that the speed candidate 値V a 5 ( t ) or V β 6 ( t ) is true, in the semiconductor laser Continuity is maintained before and after the timing at which the wavelength change of 1 -1 and 1-2 is switched. In the case where the current time is the first oscillation period P1 or the second oscillation period P 2 is notified by the laser drivers 4-1 and 4-2, and the timing of switching the wavelength changes of the semiconductor lasers 1-1 and 1-2 is also Notified by the laser driver 4 _丨, 4 - 2. The amplitude adjustment device 10 operates in accordance with a notification from the laser drivers 4_丨, 4-2. -39- 200916731 In addition, the amplitude adjustment device 1 〇 can also adjust the amplitude of the triangular wave drive current so that the distance determination unit 84 determines that the distance candidate 値Ltx1 is true based on the determination result of the state determination unit 8 2 ( The average 値 of t,t+Ι ) and Loi2 ( t,t+1 ) or the average 値 of Lp3 ( t, t+1 ) and LP4 ( t,t+1 ) in the semiconductor laser 1-1, 1 -2 The wavelength change is maintained until the timing of the switching is continuous. Further, in the case where the distance determination unit 84 uses the calculation result of the equation (12) or the equation (13) instead of using the calculation results of the equations (8) to (1 1 ) to determine the distance, the amplitude adjustment device 1 The amplitude of the triangular wave drive current may be adjusted so that the distance determining unit 84 determines that the distance candidate 値La5(t) or Lp6(t) is true at the wavelength of the semiconductor laser 1-1, 1-2. The timing of the change is switched to maintain continuity. In order to make the calculation result of the speed or the distance continuous before and after the timing of switching the wavelength changes of the semiconductor lasers 1-1 and 1-2, for example, the least square method can be used. Further, as shown in Fig. 1, the amplitude adjusting device 10 can also adjust the amplitude of the triangular wave drive current, and extend the characteristic line VL obtained by connecting the calculation results of the speed (or distance) to the semiconductor laser 1 - 1. After the timing SW at which the wavelength change of 1 - 2 is switched, the calculation result VV of the initial velocity (or distance) after the timing SW is included in the predetermined range ER with respect to the extension line. As described above, in the present embodiment, the first oscillation period in which the semiconductor lasers 1-1 and 1-2 are alternately repeated and the oscillation wavelength is continuously increased, and the second oscillation period in which the oscillation wavelength is continuously decreased 'for the photodiode 2 Each of the diodes of -1 and 2-2 counts the number of -40-200916731 MHPs included in the output signals of the photodiodes 2-1, 2-2, according to the counting result and the semiconductor laser ii, The distance between the measurement target 11 and the speed of the measurement object 11 can be calculated by the minimum oscillation wavelength ka of 1 - 2 and the maximum oscillation wavelength λ ΐ). As a result, in the present embodiment, (a) can be used to miniaturize the device; (b) no high-speed circuit is required; (c) strong anti-disturbing light; (d) no conventional object such as measurement object is selected. The advantage of the coupled laser measuring device is that it can measure not only the distance from the measuring object 11 but also the speed of the measuring object. Further, according to the present embodiment, it is possible to determine whether the measurement target 11 is performing a constant speed motion or a motion other than the constant velocity motion. Further, in the present embodiment, the laser beams which are parallel to each other are simultaneously radiated to the measurement target 11 by the increase and decrease of the oscillation wavelength to the opposite semiconductor lasers 1-1 and 1-2, and are longer than the first oscillation period and the second oscillation period. In the first counting period Pn in which the oscillation period is short, the number X of MHPs included in the output of the photodiode 2-1 or 2-1 is obtained, and the second counting period Pm simultaneously with the first counting period Pn is obtained. The number Y of MHPs included in the output of the photodiode 2-2 or 2-1 can be measured, and thus the distance and speed can be measured in a shorter time than the distance and velocity meter disclosed in Patent Document 1. In the distance/speed meter disclosed in Patent Document 1, the number of MHPs must be counted, for example, at least three times, for example, the first oscillation period t-1, the second oscillation period t, and the first oscillation period t+1. However, in the present embodiment, for example, in the first counting period Pn1 and the second counting period Pml, the number of MHPs X'Y is counted once, and in the first counting period Pn2 and the second counting period Pm2, the number of MHPs is counted. X and γ can be counted once, and the distance and speed can be obtained by counting the number of MHPs in two times. Further, in the present embodiment, by measuring the absolute 値 of the wavelength variations of the semiconductor lasers 1-1 and 1-2, the measurement accuracy of the distance and the speed can be improved. (Second embodiment) Next, a second embodiment of the present invention will be described. In the present embodiment, the overall configuration of the distance/speedometer is the same as that of the first embodiment, and the description will be made using the reference numerals of the first embodiment. Fig. 1 is a block diagram showing an example of the configuration of the counting device 7 in the second embodiment of the present invention. Fig. 1 is a flowchart showing the operation of the counting device 7. The counting device 7 of the present embodiment is composed of a changeover switch 70 a; determination sections 7 3 -1, 7 3 - 2; logical AND operation sections (AND) 74-1, 74-2; counters 75-1, 75-2. The count result correcting sections 76-1 and 76-2, the memory section 77, the cycle sum calculating sections 78_1 and 78-2, and the number calculating sections 79-1 and 79-2. Fig. 14 is a block diagram showing an example of the configuration of the count result correcting unit 76-1. The count result correcting unit 76-1 is composed of a period measuring unit 760, a frequency distribution creating unit 761, a median calculating unit 762, and a correction unit calculating unit 763. Since the configuration of the count result correcting unit 76-2 is the same as that of the count result correcting unit 76-1, the description thereof is omitted. Figs. 15(A) to 15(F) are diagrams for explaining the operation of the § tenth device 7 of the present embodiment. Fig. 15(A) shows the output of the filter circuit 1 by mode. The waveform of the voltage, that is, the waveform of the waveform of Μ Η P, Fig. 15 (C Β ) shows the output of the determination unit 7 3 - 1 and _2 corresponding to Fig. 5 (A), Fig. 15 (C) shows a map of the gate signal GS input to the counting device -42 - 200916731, and Fig. 15 (D) shows a graph of the counting result of the counter 75-1 corresponding to Fig. 15 (B). Fig. 15(E) shows a diagram of the clock signal CLK input to the counting device 7, and Fig. 15(F) shows the counting result correction unit 76-1 corresponding to the fifth figure (B). A graph showing the measurement results of the period measuring unit 760. In the fifteenth diagram (A) to the fifteenth diagram (F), the operation of the first oscillation period p1 in which the oscillation wavelength of the semiconductor laser 1-1 is increased and the oscillation wavelength of the semiconductor laser 1-2 is decreased is displayed. . First, the changeover switch 70a of the counting device 7 determines whether or not the switching is performed (step S3 0 0 of FIG. 3), and if it is switching, the output of the filter circuits 6-1 and 6-2 and the determination unit 73 are replaced. -1, 73-2 connection (step S301). The switching of the changeover switch 70a is generated at a time of 1 /2 of the period T of each triangular wave. In other words, the changeover switch 70a connects the output of the filter circuit 6-1 to the input of the determination unit 73-1 in the first oscillation period P1'. The output of the filter circuit 6-2 and the determination unit 73-2 The input phase is connected; in the second oscillation period P2, the output of the filter circuit 6_2 is connected to the input of the determination unit 73-1, and the output of the filter circuit 6-1 is connected to the determination unit 7 3 - 2 (step S). 3 0 1 ). That is, in the determination section 713, the output of the filter circuit 6-1 or 6-2 is often input to the output of the semiconductor laser id or 1-2 whose oscillation wavelength is increasing. In the section 7 3 - 2, an output corresponding to the semiconductor laser 1-1 or 1-2 whose oscillation wavelength is decreasing is often input to the output of the filter circuit 6-1 or 6-2. The current time is the first oscillation period p1 or the second oscillation period is notified by the laser driver 4-1, 4-2 -43-200916731. The changeover switch 70& performs the switching operation in accordance with the laser driver 4_], 4_2. The determining unit 73-1 of the counting device 7 determines that the output voltage of the filter circuit 6- or 6_2 of the first S-picture (A) is at a high level (H) level (L) 'output as shown in Fig. 15 (B) The result of the judgment shown. , 疋 7 3 - 1 is determined to be a high level when the output voltage of the filter circuit 6 _ 丨 or 6 _ 2 is above the threshold 値ΤΗ 1; the output voltage drops to 6 at the filter age or 6-2 Temporary 値th2 (TH2 When <TH1), it is judged to be a low level, whereby the filter circuit 6-丨 or 6_2 is turned off (step s 3 02 of the table 13). Similarly, the determination unit 73 degenerates the output of the filter circuit 6-2 or 6-1 (step S302) AND74-1 outputs the output of the determination unit 73-丨 and the fifteenth figure! As a result of the logical AND operation of the gate signal GS shown, the counter 75 increases the progression of the output of AND74_1 as shown in Fig. 15(D) (step S303 of Fig. 13). Similarly, AND74-2 is the result of the logical AND operation of the output of the output unit 7 3 - 2 and the gate signal G s , and the processor 75 - 2 counts the rise of the output of the AND 7 4-2 (step). Here, the gate signal GS is a signal that rises at the start of the first counting period Pn and the second period Pm, and falls at the end of the second counting period Pn and the second counting period Pm. Therefore, the counters 75-1, 75 count the number of rising edges of the AND 74-1, 74-2 of the first and second counting periods Pn, Pm (that is, the number of rising edges of the MHP. The first counting period Pn and the second counting period Pm are defined as shown in Fig. 6(A) to Fig. 6(D). The pass or low rises at this time ^ 6-1 The following output system 〇 [C ) -1 line Counting count S303 counts several weeks - 2 lines of input) Press -44 - 200916731 On the other hand, the circumference of the count result correcting unit 76-1 generates a rising edge count period Pn in the output of each AND74-1. The measurement of the rising edge of the output of the AND74-1, that is, the period of the MHP is measured. (Steps in Fig. 3, the period measuring unit 760 is measured in a unit of the period shown in Fig. 5 (E). In the example of the MHP, in the example, the period measuring unit 7 6 0 sequentially measures the periods of Τ α and MHP. The size of the 第 α, Τ β, and Τ γ in Fig. 15 (Ε) and the 15th graph are respectively 5 The frequency of the clock and the 4 o'clock clock signal CLK is much larger than that of the clock. The same is true for the period of the AND74-2 of the period of the count result correcting unit 76-2. The period in which the rising edge of the output of the AND 74-2 in the rising edge time period Pm is generated is measured (step S3〇4). The memory unit 7 7 is a period measuring unit for each of the number result correcting units 76-1 and 76-2 of the memory counters 7 5 -1 and 7 5 -2 . In the first counting period Pn number result correcting unit 7 6 -1 frequency distribution creating unit 7 6 1 The counting result of the counting result correcting unit 76-1 in the memory unit 77 is used to create the first counting period. The MHP distribution in Pn (step s 3 0 5 of Figure 13). Similarly, after the end of P m , the frequency 7 6 1 of the counting result correcting unit 7 6 - 2 is based on the cycle measurement period measuring unit 760 of the counting result correcting unit 7 6 - 2, that is, the period of the first edge (also S 3 0 4 ). At this time, the clock signal C L K Fig. 15 (F) Τβ and τγ are known as (F), and the clock is two clocks and two clocks. The highest frequency of the spoon. The setting unit 760 is configured to generate the second counting period (the Μ Η 计数 counting result and the measurement 760 after the measurement is completed), and the calculation is based on the frequency of the period of the period of the measurement unit 760. Measurement of the portion 760 -45 - 200916731 As a result, the frequency distribution of the period of the MHP in the second counting period Pm is generated (step S 3 0 5 ). When η is small, since the median is used for The frequency of the number is reduced, and the accuracy of the median is lowered. Therefore, when the period before the Ρη is used, the frequency distribution at the median of the period of ΜΗΡ in the first counting period Ρη is obtained. The continuous noise is stronger. The median calculation unit 762 of the count result correcting unit 76-1 calculates the first count based on the frequency distribution made by the frequency distribution creating unit 76 1 of the counting result correcting unit 76-1. The median (median) of the period of the Ρn in the period Ρ0 is (0 (step S306 in Fig. 13). Similarly, the median calculation unit 7 6 2 of the "counting result correcting unit 7.6" is based on the counting result correcting unit 7 The frequency distribution of the frequency distribution of 6 - 2 is made by the portion 7 6 1 , The median T 0 of the period of Μ Η P in the second counting period P m is calculated (step S 3 06 ) ° The correction result calculating unit 7 6 3 of the counting result correcting unit 7 6 - 1 is based on the counting result correcting unit 76 The frequency distribution prepared by the frequency distribution creating unit 76 of -1 is obtained as the median Τ0 of the period in the first counting period Ρη. The frequency sum N s of the level of 5 times or less and the first counting period. The median of the period in ρ η Τ 0 is the sum of the frequencies of the level of 1 · 5 times or more N w , and the result of the counter 75-1 is corrected as follows (step S 3 07 of Fig. 3) ° N, =N + Nw-Ns ( 1 6 ) In the equation (16), the 'N system is used as the counter 75·1 count result -46- 763 200916731 The number of MHP 'Ν' is the count result after correction. Similarly' The correction calculation unit of the counting result correction unit 7 6 - 2 is obtained by the frequency distribution of the frequency distribution creating unit 761 of the counting result correcting unit 76-2, and is obtained as 0.5 times the number T0 of the period in the second counting period Pm. The sum of the frequencies of the following levels Ns and the sum of the ranks of the median τ 0 of the period in the second period P m of 1.5 times or more Nw Further, the result N of the correction counter 75-2 is expressed as the equation (16) (step S307). An example of the frequency distribution of the period of the MHP is shown in Fig. 16. In the figure, the period of the Ts-based MHP is shown. The 値 of the median T0 is 0.5 times, and the Tw is the rank of 1.5 times the median T0. There is no doubt that the level in the figure 16 is the representative of the period of the MHP. Here, for the description in Fig. 16, the frequency distribution between the median T 0 and T s and between the numbers T0 and Tw is omitted. Figure 17 is a diagram for explaining the principle of the counter-compensation of the counters 75-1, 75-2, and Figure 17 (A) shows the waveform of the output voltage of the mode filter 6-1, that is, the waveform of the MHP. In the figure, the first (B) shows a result of the counter 75-1 corresponding to the figure (A) of Fig. 17. The period of the original MHP differs depending on the distance from the measurement object 1 1 . If the distance from the measurement object 1 1 does not change, the MHP appears in the same manner. However, due to noise, there will be a missing waveform in the MHP waveform or a waveform that should be counted as a signal, and the number of 计数 Η P generated by the number of the median counting frequency is at the first level, and the circuit of the simplified intermediate circuit is counted. However, the period is not error-47-200916731 When a signal gap occurs, the period TW of the portion where the leak has occurred is about twice the original period. That is, when the current period is about 2 times or more of the median T 0 , it is judged that the signal is missing. Therefore, the frequency of the level above the period T w is always the number of missing signals, and the Nw is added to the result N of the counter 75, thereby correcting the missing signal. Further, the MHP^ of the portion where the noise is counted is about 0.5 times the original period. That is, when the median of Μ Η 0 is less than 0. 5 times, it is judged that the excess count signal 'the frequency sum Ns of the level below the period Ts is regarded as the excess number, and is counter-counted by the counter 75-1 The count result N is used to reduce the noise of the correctable error. The counting result of the correction original 75-2 of the counting result shown by the above formula (16) can also be complemented by the same principle. In the present embodiment, the Ts is set to the period median T0. The reason why Tw is set to 1.5 times the median T0 instead of 2 2 times the middle β is set to be 1. 5 times. Next, the period of the counting device 7 and the calculation unit 78-1 are the measurement results of the period measurement by the counting result correcting unit 766-1 in the storage unit 7, and calculate the sum Sum of the 计数 in the first counting period ( 1 3 Figure S 3 0 8 ). Similarly, the cycle 78-2 calculates the cycle Sum of the MHP in the second count period pm based on the cycle measurement unit result of the count result correction unit 76-2 (step S3 08). The MHP's MHP has been issued in the week number and the Nw is -1 count. The i-spoon period Ts period is approximately the number. Therefore, the signal Ns is counted. Counting. Here, the sum of the measurement periods of the sum calculation unit 760 of the number 00 of the memory T1 is 0 - 5 times: -48 - 200916731 The number calculation unit 79-1 of the counting device 7 calculates the first counting period Pn. The number X of MHP per unit time (the number of interference waveforms of the semiconductor laser whose oscillation wavelength is increasing), and the number calculation unit 79-2 calculates the number Y of MHP per unit time in the second counting period Pm (oscillation) The number of interference waveforms of the semiconductor laser whose wavelength is decreasing) (Step 1 3 Figure 3 09). The number calculation unit 79-1 is divided by the correction 値 calculation unit 763 of the count result correction unit 76-1 by the sum Sum of the periods of the MHP in the first count period calculated by the period and calculation unit 78-1. The calculated corrected result Ν' is calculated, thereby calculating the number X of MHP per unit time in the first counting period Pn. X = N, /Sum (17) Similarly, the number calculation unit 79-2 divides the sum Sum of the periods of the MHP in the second count period calculated by the period and calculation unit 78-2. The corrected count result N'' calculated by the correction/calculation unit 763 of the count result correcting unit 76-2 calculates the number Y of MHPs per unit time in the second count period Pm. The counting device 7 performs the above-described processing for each of the first and second counting periods Pn and Pm. Therefore, the determination unit 73-1, the AND 74-1, the counter 759-1, the count result correction unit 6-1, the memory unit 7, the period and calculation unit 78-1, and the number calculation unit 79- The operation of 1 calculates the number X of MHPs, and the determination unit 73-2, the AND 74-2 'counter 75-2, the count result correction unit 76-2, the memory unit 77, the period and calculation unit 78-2, and the -49- 200916731 The operation of the number calculating unit 79-2 calculates the number X of ΜΗΡ and the Υ by calculating the number γ of MHPs. The configuration other than the counting device 7 is the same as that of the first embodiment. In the present embodiment, the period ' of the ΜΗΡ period in the count period is calculated based on the measurement result, and the frequency distribution of the period of the ΜΗΡ in the count period is calculated. The median of the period of the ΜΗΡ is calculated based on the frequency distribution, and the frequency distribution is determined as the middle based on the frequency distribution. The sum of the frequency of the number of digits 5. 5 times or less of the sum of the frequency N s and the frequency of the median of 1.5 times or more of the sum of the frequency Nw, according to the frequency Ns and N w correction calculator's counting result ' Since the counting error of Μ Η P can be corrected, the measurement accuracy of the distance and the speed can be improved as compared with the first embodiment. Next, in the present embodiment, the reason why the median of the frequency distribution of the period of use is used as the reference period of ΜΗΡ, and the threshold 周期 of the period when the frequency Nw is obtained is described as 1.5 times the median. reason. First, the correction of the count result in the case where the period of the MHP is divided into 2 due to the erroneous noise is explained. When the oscillation wavelength of the semiconductor laser changes linearly, the period of the MHP is normalized by dividing T 0 obtained by dividing the counting period by the number N of Μ Η P (Fig. 18). Next, consider the noise. And the period of Μ Ρ 分割 divided into 2. The period of the ΜΗΡ which is divided into two by the result of the excess count noise is divided into 2 ' at a random ratio, but the period before the division is a normal distribution centered on Τ0, and thus becomes a frequency distribution symmetric with respect to 0.5T0 (the first 1 <5 of the figure a). -50- 200916731 The frequency distribution of the period of the MHP containing the noise 'Assume that the K% of the MHP divides the period into 2 due to noise,' calculates the average 値 and median of the period of the MHP. The sum of all periods is constant, and the period does not change, but when the K% of the MHP divides the period into 2 due to noise, the integral of the frequency 値 becomes (l+k[%])N, so the MHP The average 値 of the period becomes (1/(1+ k[%])) TO. On the other hand, when the portion overlapping with the normal distribution is ignored by the distribution of the noise, the noise accumulation frequency divided into 2 becomes twice the frequency included in the level between the median and T0, so ' The median of the period of Μ Η P is located at twice the area of area b of the figure b, and the function of the so-called NORMSDIST () in Excel (registered trademark) belonging to the software of Microsoft Corporation. It can use "( 1- ( b NORMSDIST ( α ) ) χ 2) χ 100 [%]" to express the internal ratio of the average 値 from the normal distribution to the 値 between the two ,, if the function 'can be used as follows, Indicates the median of the period of ΜΗΡ. (l-(l-NORMSDIST((median-Τ0)/Σ))χ2)χ(100· k)/2 = k[%] "· (18) According to the above, if the standard deviation Σ is set to 0.02T0, and the average 値TO ' and the median TO ' of the period of 周期 Ρ Ρ 1 1 1 计算 计算 计算 计算 计算 计算 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 値 値 値 値 値 値 値 値 値 値-51 - 200916731 Τ0?= ( 1/ ( 1+0.1) ) Τ0 = 0·91Τ0 ...(19) Τ0,= 0.995 Τ0 ...(20 ) where, in this system, the average 値 and median are both Τ0' The indicator 値 (integral 频率 of the frequency) is 1 · Ν Ν 'The counting error is obtained here, considering that the period Ta of a certain period Ta is divided into two periods Τ1 and Τ2 (set to τ 1 2 Τ2) The hypothetical noise during the period is randomly generated, as shown in Figure 21, 'Τ2 is a probability to obtain 〇 < Τ 2 S Ta/2 値. Similarly, Τ1 can also take the chance to get T/2 STl <Ta's 値. The area of the probability distribution of T1 in Fig. 21 and the area T period T a of the probability distribution obtainable by T 2 are a normal distribution centered on T 0 'so that Ta is regarded as a set, and T2 can be obtained. The frequency distribution of the probability is the same as the average distribution of the rate distribution of the normal distribution of T. 5 T0 and the standard deviation of 0.5 Σ. Further, as shown in Fig. 2, the probability of the T1 can be obtained by forming the cumulative frequency distribution of the cloth having an average 値 of 0.5T0' standard deviation of 〇·5Σ, and the average 値 is Τ0, and the standard deviation is The cumulative frequency distribution of the state distribution overlaps the shape. Here, ' T 1 , each number, and the number k of ΜΗPs in which the period is divided into 2, etc. If it is possible to divide the period into 2 due to noise, Η 纪 P. Count 10%. The next 2 chances. The same same is obtained for all 1s. If the number of k-52-200916731 [%]· N which is formed as the cumulative frequency of the normal frequency is normal, the following equation can be used. The derivative N 〇N = N, -k [〇 / 〇] · N (21) As shown in Fig. 23, if the number NS having the Tb or less and the number of the MHP divided into 2 can be made k [ $ By setting Tb in an equal manner, it is possible to count indirectly the number k[%]·N of the MHP of week 2 by counting the number NS of MHPs having Tb. In Fig. 23, when the frequency of T2 having a period of Tb or more (c in Fig. 23) is the same as the frequency (d in Fig. 23) having a period T1 which is less than Tb, the MHP of the period below The number of the system and the number of T2, that is, the number N of MHPs of 2 (= k [%] · N) become the number of phases MHP N can be expressed by the following equation. N = N'-k[%] · N = N, -Ns (22) The frequency shape of T1 and T2 is correctly determined when 〇.5Ta is symmetric and 0.5 T a is used as a threshold. The frequency Ns (=k[%]·N) of the MHP cut to 2 is followed by 丨MHP for the MHP whose period is divided into 2 by counting the amount of period K having a value of 〇. 5 T 0 The MHP of the number of cycles] · N becomes the following cycle. The MHP that is divided into the cycle period of the MHP has Tb divided by one cycle, and the like. That is, the shape is therefore counted for the period. Number of M IIPs Female quantity k [%] -53- 200916731 • The number of N is counted indirectly, but T0 cannot be calculated from the frequency distribution of the period of the MHP containing noise (Fig. 19). If the mother group of the MHP is as shown in the frequency distribution of Fig. 19, the more the mode is equal to το, the more ideal and the larger the population parameter, the more the number can be used as TO'. Here, the number of MHPs obtained by using the average 値 or the median T0' is described as k [%]. If TO'= y· TO is not specified, and TO' is substituted for TO to obtain Ns, the frequency Ns' of 0.5T0' which is determined by the number of MHPs divided into 2 as the period is a small period. y · k[ %] . N (Fig. 2 4). If the average 値 or median T0' is used, the corrected 値Nt is shown below.

Nt = N'-Ns'=(l+k[%])N-yk[0/〇]N = (l+(ly)k[%])N =N + (1 -y)k [%]N ( 23 ) where (1 - y ) k [ % ] N is the frequency of the portion of e of the 25th figure. Here, a correction example of the count results of the counters 75] and 7 5 -2 using the average 値 or the median T0' will be described. If the standard deviation is set to 2 = 0.02 □ 0, and 1〇% of ^^? is divided into 2 due to noise (the count result is 1 〇% error), due to the average 値T0' of the period of MHP It is 0_91 〇, the median T0 is 0.9949TO, so y when using the average 値το' is 〇_91, using the median -54- 200916731 number TO' y is 0.9949, the result of the correction is Ν' It is calculated as shown below. N5 = (1+0.1 (1-0.91))Ν=1.009Ν ...(24) Ν,= (1+0· 1(1-〇·995 ))Ν= 1 .000 5 Ν ...(25) (24) indicates the result of the correction after the correction using the average 値TO', and the equation (25) indicates the result of the correction N' after the correction using the median T0'. The error of the count result N' when the average 値T0' was used was 0.9%, and the error of the count result Ν' when the median TO' was used was 0.05%. Next, if the standard deviation is set to Σ = 0.05 Τ 0, and 20% of ΜΗΡ is divided into 2 due to noise (the count result is 20% error), since the average 値Τ0' of the period of ΜΗΡ is 0.83 Τ 0 The median Τ0' is 0.9682T0, so the y when using the average 値T0' is 0.83, and the y using the median T 0 ' is 〇. 9 6 8, the result of the correction is N' as shown below. Calculated. N,= ( 1+0.2( 1-0.83))N= 1.034N (26) N! = (1+0.2(1-0.968))N-1.0064N (27) The expression (2 6 ) is expressed When the average 値TO ' is used, the count result after correction Ν' is used, and the equation (27) indicates the count result N ' after the correction using the median T0'. The error of the count result N' when using the average 値T0' is 3.4%, and the error of the count result Ν' when using the median T0' is 0.64% ° -55- 200916731 From the above, if the period of the MHP is used, By correcting the count result by the number of digits, the error of the count result 补' after correction can be reduced. Next, the correction of the count result when the ΜΗΡ waveform is missing will be described. Since the intensity of enthalpy is small, the period of sputum at the time of counting is due to the normal distribution of ΜΗΡ0 as the original ΜΗΡ period, so it becomes a normal distribution with an average 値2T0 and a standard deviation of 2Σ (Fig. 26). In f). Assuming that the defect of j [%] is missing, the frequency of the cycle in which the cycle is doubled due to the omission is Nw ([%]·Ν). Further, the frequency of the period of about TO which is reduced by the leak at the time of counting is g shown in Fig. 26, and the frequency-reduced portion shown by h in Fig. 26 is 2Nw (=2j [%]). Therefore, the number of original flaws when no defects occur at the time of counting can be expressed by the following formula. N'=N+j[%]=N + Nw (28) Next, the threshold 周期 of the period when the Nw for correcting the counting result is counted is considered. Here, it is assumed that p[%] is divided into two due to noise in the frequency Nw of the period of the MHP in which the period is doubled due to the omission at the time of counting. The frequency of the period of the MHP divided into 2 in the missing MHP is Nw' (· p [ % ] · N ). The frequency distribution of the period of the MHP divided again to 2 is as shown in Fig. 27. When the threshold 周期 of the period regarded as Nw is set to 1.5T0, the frequency of the period of the MHP having a period of 0.5T0 or less is 〇.5Nw' (=〇.5p[%]·Nvv), and the period is 0.5Τ0 to The frequency of the period after 1.5Τ0 is Nw, (=ρ[ %]. -56- 200916731

Nw), the frequency of the period of the MHP with a period of 1.5 T0 or more (=0 · 5 ρ [ % ] · N w ). Therefore, the frequency distribution of all the cycles of the 成为 becomes as follows: If the threshold N of N s is set to 0.5 Τ 0, the Κ 1.5 Τ 0 of N w , the counting result can be expressed by the following formula. N = (N'-2Nw) + (Nw-Nw,) + 2Nw'=N, -Nw + Nw,. The result of correction by the formula (2 9 ) is as shown below, and no MHP occurs when counting. The original quantity N in the absence of leakage. N-0_5Nw'+ ( 〇.5Nw, + ( Nw-Nw,)) = (N-Nw + Nw,) + ( 〇 .5Nw, + ( Nw_Nw,)) = N, as can be seen from the above, if it is to be obtained The period N at the frequency N w is 1 · 5 times the median, and the count result N can be corrected. In the case where the period of the MHP is divided into two, the correction is performed using the median. Therefore, the same error occurs. In the above description, the case where the period of the excess count noise MHP is divided into two is described. And the case where the period of the MHP at the time of counting is doubled, but the situation is independent if the situation is expressed as a frequency distribution, that is, the 29th is 0.5Nw' g 28; the limit is set to • (29) It can be seen that the number of calculated MHPs is 30). The threshold is set to 1' and the result is caused by the missing T〇〇. -57- 200916731 If the threshold of Ns is set to 〇.5ΤΟ, set the threshold of Nw to 1.5T0, and the result of counting N can be expressed by the following formula. N= ( N'-2Nw-Ns) + ( Nw-Nw')+2Nw' + 2Ns = N, -Nw + Nw, + Ns ... ( 31) The result of the correction by the formula (3 1 ) As shown below, it can be seen that the number of original Η Η P in the case where no missing or excessive count occurs at the time of counting is calculated. N-{0.5Nw'+Ns} + {0.5Nw' + (Nw-Nw')} = {N-Nw + Nw'+Ns}-{0_5Nw'+Ns} + {0.5Nw,+ (Nw-Nw In the present embodiment, the correction of the missing of the MHP has been described as a case where the period of the ΜΗΡ is approximately twice as large as the original period due to one missing, but in the case of The present invention is also applicable to the case where two or more leaks are continuously generated. In the case of two consecutive 缺 missing, the ΜΗΡ of the three-fold period of the median is considered to be three ΜΗΡ. At this time, the frequency of the level which is about three times or more of the median of the period is obtained, and if the frequency is doubled, the missing defect can be corrected. If the thinking mode as shown above is generalized, the following formula can be used instead of the formula (16). -58- 200916731 N,=N + Nwl+Nw2+Nw3 + ."-Ns ...(33)

Nw 1 is the sum of the frequencies of the rank of 1 _ 5 times or more of the median period of the cycle, Nw2 is the sum of the frequencies of the rank of 2.5 times or more of the median of the cycle, and N w 3 is the median of the cycle. A sum of frequencies of about 3.5 times or more. (Third embodiment) Next, a third embodiment of the present invention will be described. In the second embodiment, the number of MHPs is obtained in the first counting period Pn and the second counting period Pm of a fixed length. However, the first counting period Pn and the second counting period Pm may be formed to have variable lengths. In the present embodiment, the configuration of the distance/speedometer is the same as that of the first embodiment, and therefore the description will be given using the reference numerals of the first embodiment. Fig. 30 is a block diagram showing an example of the configuration of the counting device 7 of the present embodiment, and Fig. 3 is a flow chart showing the operation of the counting device 7. The counting device 7 of the present embodiment is a changeover switch 7 0 a , a period measuring unit 7 1 a - 1 , 7 1 a - 2 , a determining unit 7 3 -1, 7 3 - 2 , a counting result correcting unit 76a-1, 76a-2; memory unit 77; period and calculation units 78-1 and 78-2; and number calculation unit 7 9 -1, 7 9 -2. Fig. 3 is a block diagram showing an example of the configuration of the counting result correcting unit 7 6 a_丨. The count result correcting unit 7 6 a - 1 is composed of a frequency distribution creating unit 7 6 1 a 'median calculating unit 7 6 2 a and a correcting unit calculating unit 7 6 3 a . Since the configuration of the count result correcting unit 76a-2 is the same as that of the counting result correcting unit -59-200916731, 76a-1, the description thereof is omitted. First, the operation of the changeover switch 70a is the same as the process of FIG. 3 and S301 (steps S400 and S401 of FIG. 31), and the operation of the determination unit and 73-2 is the same as that of step S302 of FIG. 13 (step 31). S 4 0 2 ). The cycle measuring unit 71a-1 is a cycle of a certain number of MHPs (N is a natural number of 2 or more) among the outputs of the determining unit 73-1 shown in Fig. 15(B) for each of the MHPs ( Figure 31, S4 03). Similarly, the period measuring unit 71a-2 measures the period of a certain number N MHP in the output of the determining unit 7 3 - 2 for each of these (step S403). At this time, the period measuring unit 71 7 1 a-2 is a period measured by one cycle of the clock signal CLK. The memory unit 77 determines the results of the memory cycle measuring units 71a-1 and 71a-2. After the measurement by the period measuring unit 7 1 a-1 is completed, the frequency distribution creating unit 761a of the counting result complement 76a-1 creates a cycle rate distribution of the MHP based on the measurement result of the period measuring unit 71 a-1 stored in the memory ΐ. (Step S1 in Fig. 31). Similarly, after the end of the period measurement 7 la-2 measurement, the frequency generation unit 76 1a of the count result correcting unit 76a-2 is a frequency distribution of the period of the MHP based on the measurement result of the period measuring unit 71 a_2 (step S404). Then, the median calculation unit of the count result correcting unit 76a-1 calculates the median T0 of the period of the MHP based on the frequency distribution created by the frequency distribution creating unit 76 of the counting result correcting unit 76a-1 (S3 00 73 -1 The number of steps N of the measurement N is the a-Ι 'MHP portion of the measuring portion 77 of the MHP is made 762a [a step S 4 0 5 of the 31-60-200916731 figure). Similarly, the median calculation unit 762a of the 'counting result correcting unit 7 6 a - 2 calculates the median TO of the period of the MHP based on the frequency distribution 'made by the frequency distribution creating unit 761 a of the counting result correcting unit 76 a -2 (Step S4〇5). The counting result correction unit 7 6 3 a of the counting result correcting unit 7 6 a -1 is a frequency distribution prepared by the frequency distribution creating unit 76 1 a of the counting result correcting unit 76a-1, and is obtained as the counting result correcting unit 76a. The median calculation unit 762a of -1 calculates the frequency total Ns of the level of 0.5 times or less of the median TO of the cycle calculated, and the frequency of the level of 1 _ 5 times or more of the median T0 of the cycle. The sum N w ' is corrected by a certain number N as shown in the equation (16) (step S 4 0 6 of Fig. 3). Similarly, the correction calculation unit 7 6 3 a of the 'counting result correction unit 7 6 a - 2 is determined based on the frequency distribution 'of the frequency distribution preparation unit 7 6 1 a of the counting result correction unit 7 6 a _ 2 Counting result: The sum of frequencies Ns of the level of 0.5 times or less the median T0 of the period calculated by the median calculation unit 762a of the correction unit 76a-2, and 1 to 5 times the median T 0 of the period The frequency total sum Nw of the above level is corrected by a certain number N as shown in the equation (16) (step S406). Next, the cycle and calculation unit 78-1 calculates the sum Sum of the periods of the MHP based on the measurement result of the period measuring unit 7 1 a-1 stored in the memory unit 7 (step S407 in Fig. 31). Similarly, the 'cycle and calculation unit 78-2 calculates the sum S u m of the periods of the MHP based on the measurement result of the period measuring unit 7 1 a·2 (step S 4 0 7 ). The number calculation unit 79-1 is divided by the correction 値 calculation unit 763 a of the count result correction unit 76a-l - 61 - 200916731 by the sum Sum of the periods of the MHP calculated by the period and calculation unit 78-〗. The corrected count result ν' is obtained, thereby calculating the number X of enthalpy per unit time in the first counting period Ρn (step S408 in Fig. 31). Similarly, the number calculation unit 79-2 is calculated by the correction/calculation unit 763a of the count result correction unit 76a-2 by the sum Sum of the period of the enthalpy calculated by the period and calculation unit 78-2. The corrected count result N', thereby calculating the number Y of MHP per unit time in the second count period Pm (step S408). The counting device 7 performs the above-described processing for each of the first and second counting periods pn and pm. The case where the numbers X and Y of Μ Η are simultaneously calculated is the same as in the first and second embodiments. However, as described above, in the present embodiment, the first counting period Ρη and the second counting period Pm become variable. length. In other words, the sum of the periods of the MHP calculated by the period calculating unit 78-1 corresponds to the length of the first counting period Ρη, and the sum of the periods of the enthalpy calculated by the period calculating unit 78-2 is equivalent. The length of Pm during the second counting period. In the present embodiment, the number of counts N corresponding to the counters 75-1 and 75-2 of the second embodiment is a fixed number N. The other configuration is the same as that of the second embodiment. In the second embodiment, since the first counting period Ρη and the second counting period Pm are fixed lengths, the total period of the MHP period calculated by the period and calculating unit 78-1 is the same as the first counting period Ρη. In the case where the lengths do not coincide with each other, the sum of the periods of the chirp calculated by the period and calculation unit 78-2 may not coincide with the length of the second count period P m . Therefore, in the second embodiment, there is a possibility that a measurement error occurs in the number -62 - 200916731 η, m obtained by the counting device 7, and a measurement error occurs in the distance and the speed. In the present embodiment, since the sum of the periods of the MHP calculated by the period and calculation units 78-1 and 78-2 is equal to the lengths of the first count period Pn and the second count period Pm, The measurement error of the number of MHPs η and m can be reduced. Therefore, according to the present embodiment, not only the same effects as those of the second embodiment can be obtained, but also the measurement accuracy of the distance and the speed can be further improved. (Fourth embodiment) Next, a fourth embodiment of the present invention will be described. In the first to third embodiments, when the calculation results of the equations (2) and (3) are equal, the state determination unit 8 2 determines that the measurement target 11 is in the state of minute displacement, and in the equation ( 4) When the calculation result of the equation (5) is equal, it is determined that the measurement object 11 is in the displacement state. However, 'due to the influence of noise, etc., in the case where the calculation results of the equations (2) and (3) are equal, and the calculation results of the equations (4) and (5) are not equal, The state of the measurement object 11 is determined, and in the case where the calculation results of the equations (2) and (3) are not identical, and the calculation results of the equations (4) and (5) are not identical, The state of the measurement object 11 cannot be determined. In the present embodiment, even when the state determination unit 82 cannot determine the state of the measurement target 11, the distance from the measurement target 11 and the speed of the measurement target 11 are calculated. In the present embodiment, the configuration of the distance and velocity meter is the same as that of the first embodiment -63-200916731. Therefore, the component symbol of Fig. 1 will be described. Fig. 3 is a block diagram showing an example of the configuration of the lotus calculator 8 of the present embodiment. Fig. 34 is a flowchart showing the operation of the arithmetic unit 8. The arithmetic unit 8 of the present embodiment is composed of a memory unit 80; a distance/speed calculating unit 8 1; and the state of the measuring object 1 1 is determined based on the calculation results of the distance/speed calculating unit 8 1 and a history displacement calculating unit to be described later. State determination unit 82a; speed determination unit 83a that determines the speed of measurement target 11 based on the determination result of state determination unit 82a, and distance determination unit 84a that determines the distance from measurement target 11 based on the determination result of state determination unit 82a; And a history displacement calculating unit 85 that calculates a history displacement of the difference between the candidate 値 calculated by the distance/speed calculating unit 8 1 and the candidate 在 of the distance calculated before the moment. The speed determining unit 83a and the distance determining unit 84a constitute a distance/speed determining means. First, the operation of the memory unit 80 of the arithmetic unit 8 is the same as that of step S201 of Fig. 8 (step S501 of Fig. 34). The operation of the distance/speed calculation unit 81 is the same as that of step S202 of Fig. 8 (step 34) S 5 02 ). The history displacement calculating unit 85 of the arithmetic unit 8 calculates the second candidate 値L a 2 ( t -1, t ) and the time t-2 to t-1 of the distance from time t -1 to t in accordance with the following equation: The difference between the first candidate 値Lal ( t-2, t-1 ) of the distance in the middle is the history displacement Vcalal ( t-2 ' t ); the first candidate 値L α 1 of the distance from time t to t+1 ( The difference between the second candidate 値La2(t-1, t) of the distance between t, t +1 and the time t -1 to t is the history displacement Vcala2 ( t-1, t+i ): time t-1 to The first candidate 値La 1 ( t-1,t ) of the distance in t and the second candidate 値L α 2 of the distance in time t -2 to t -1 ( t - 2 ' t -1 The difference is the history displacement Vcala3(t-2, t); the distance between the second candidate 値L a 2 ( t, t + 1 ) and the time t -1 to t in the time t to t+1 The difference between the first candidate 値Lai ( t-1, t ) is the history displacement Vcalot4 ( t-1 ' t+1 ): the fourth candidate 时刻 L β 4 ( t - 1, the distance from the time t -1 to t ί ) The difference between the third candidate 値Lp3 ( t-2, t-1 ) of the distance from time t-2 to t-1 is the history displacement Vcalpl (t-2, t); at time t to t+1 The third candidate 値L β 3 ( t, t +1 ) and the time t -1 to t The difference between the fourth candidate 値LP4 (t-1, t) of the distance is the history displacement Vcaip2 (t-1, t+1): the third candidate 时刻ίβ3 (t-1) of the distance from time t-1 to t , t ) and the difference between the fourth candidate 値ίβ4 ( t-2, t-1 ) of the distance from time t-2 to t-1 is the history displacement Vcaip3 ( t-2, t ); time t to t+1 The difference between the fourth candidate 値ίβ4 ( t, t+1 ) of the distance in the middle distance and the third candidate 値L β 3 ( t -1, t ) of the distance from time t_ 1 to t is the history displacement vca 1 β 4 ( t - 1 ' t + 1 ), and stored in the memory portion 80 (step S 5 0 3 of Fig. 34).

Vcalal ( t-2, t) = La2 (t-1, t) -Lai (t-2, t-1) ··· (34)

Vcala2 ( t-1, t+1) = Lal ( t, t+1) -La2 ( t-1, t) ... (35)

Vcala3 ( t-2, t) =La 1 ( t-1, t ) -La2 ( t-2, t-1) ··· (36)

Vcala4 (t-1, t+1 ) = La2(t,t+l) -Lai ( t-1, t ) ·· (37) -65- 200916731

Vcaipi ( t-2, t) = Lp4 ( t-1 , t ) -ίβ3 ( t-2, t-1 ) ·· ( 38 )

Vcalp2 ( t-1 , t+ 1 ) = Lp3 ( t, t+1 ) -LP4 ( t-1 , t ) .·_ ( 39 )

Vcalp3 ( t-2, t ) = Lp3 ( t-1, t) - ίβ4 ( t-2, t-1 ) ... (40)

Vcalp4 ( t-1 , t+1 ) = Lp4 ( t, t+1 ) - Lp3 ( t-1, t ) . ( 41 ) History shift Vcalal (t-2, t) , Vcala2 (t-1 't+1), Vcala3 (t-2,t), and Vcala4 (t-1,t+1) are the calculated 値, the history displacement Vcaipi (t- 2, t) ), Vcaip2 (t-1, t+1), Vcaip3 (t-2, t), and Vcaip4 (t-1, t+ 1) are 値 calculated by assuming that the measurement target U is in a displacement state. The history displacement calculating unit 85 calculates the number of MHPs by the counting means 7, that is, the calculation of the equation (34) to the equation (41). In the equation (3 4 ) to the equation (4 1 ), the direction of the measurement object 1 1 close to the distance • the speedometer is set to a positive speed 'the distance away from the distance · the speedometer is set to a negative speed . Next, the state determination unit 82a of the arithmetic unit 8 uses the calculation results of the equations (2) to (5) stored in the storage unit 80 and the calculation results of the equations (34) to (41). The shape energy of the measurement object 11 is determined (step S 5 0 4 of Fig. 4). Fig. 35 shows a flow chart showing the operation of this state determination -66-200916731 section 8 2 a. First, the state determination unit 82a determines the state of the measurement target 使用 using the calculation results of the equations (2) to (5) in the same manner as the state determination unit 8 2 of the first embodiment (step of FIG. S60丨). Here, when the calculation results of the equations (2) and (3) are equal, the state determination unit 8 2 a determines that the measurement target 11 is in a minute displacement state, and in the equation (4) and the equation ( When the calculation result of 5) is equal, it is determined that the measurement target 11 is in the displacement state, and it is judged that the state determination has ended (YES in step S610), and the processing of step s5 0 4 is ended. On the other hand, the state determination 邰8 2 a is when the calculation results of the equations (2) and (3) are equal, and the calculation results of the equations (4) and (5) are also equal, or When the calculation results of the equations (2) and (3) are not consistent, and the calculation results of the equations (4) and (5) are not consistent, since the state determination cannot be performed, the step is advanced. S 60 3. In the step S603, the state determining unit 82a determines the state of the measuring object 11 using the calculation results of the equations (2) to (5) and the calculation results of the equations (34) to (41). When the measurement target 1 1 is moved in a minute displacement state (equal motion), as shown in the patent document 1, the sign of the history displacement Vcalα calculated by the measurement target i 丨 being a minute displacement state is constant, and It is assumed that the average value of the absolute enthalpy of the velocity candidate 値Va and the history displacement Vcalct calculated by the measurement target 11 being the minute displacement state becomes equal. Further, when the measurement target 11 moves at a constant velocity in a minute displacement state, the history displacement calculated by the measurement target 11 as the displacement state is assumed -67- 200916731

The sign of the Vcaip is reversed every time the number of MHPs is calculated. Therefore, the state determination unit 82a is a history displacement Veal oil of the equation (34) calculated on the assumption that the measurement target 11 is in the minute displacement state. T-2, t) and the formula (35) of the equation (35) are coincident with the sign of the parameter VCaI(x2(t-1, t+1), and the calculated velocity candidate 値Votl (assuming the measurement target Π is in a minute displacement state) The average 値 of t, t+Ι) and Va2(t, t+Ι), and the absolute 値 of the history displacement Vcaltxl (t-2,t) and the absolute value of the historical displacement Vcala2 (t-Ι,t+Ι) When the average value is equal, it is determined that the measurement target 11 moves at a constant velocity in a minute displacement state. Alternatively, the state determination unit 82a is a history displacement of the equation (36) calculated on the assumption that the measurement target 11 is in a minute displacement state. The sign of the history displacement Vcala4 ( t-1, t+1 ) of VCala3 ( t-2, t ) and the equation (37 ) coincides, and the calculated velocity candidate 値Val is assumed to be in the minute displacement state of the measurement object 11 The average 値 of ( t,t + Ι ) and Va2 ( U t+Ι ), and the absolute 値 of the history displacement Vcala3 ( t-2,t ) When the average 値 of the absolute 値 of the history displacement V ca 1 a 4 ( t − 1, t + 1 ) is equal, it is determined that the measurement target 11 moves at a constant velocity in a minute displacement state. When the measurement target 11 moves in the displacement state (constant motion), the sign of the history displacement Vcaip calculated by the measurement target 11 as the displacement state is constant, and the measurement object 11 is assumed to be the displacement state. On the other hand, in the case where the measurement target Π is moved at the same speed as the displacement state, the measurement target 1 1 -68- 200916731 is assumed to be equal. The sign of the history displacement v C al α calculated by the small displacement state is inverted every time the number of ΜΗΡ is calculated. Therefore, the state determination unit 82a is calculated based on the assumption that the measurement target 11 is in the displacement state. The history displacement Vcalpl (t-2, t) of the equation (38) coincides with the sign of the history displacement Vcalp2(t-1, t+1) of the equation (39), and it is assumed that the measurement object 11 is in the displacement state. Calculated speed candidate The average 値 of 値νβ3 ( t, t+Ι ) and νβ4 ( t, t+Ι ), and the absolute 値 of the history displacement Vcaipi ( t-2, t) and the absolute value of the historical displacement Vcalp2 ( t-1 ' t+ 1 ) When the average 値 of the 値 is equal, it is determined that the measurement target 11 moves at the same speed in the displacement state. Alternatively, the state determination unit 82a is a history displacement Vcaip3 (t-2, t) of the equation (4〇) calculated on the assumption that the measurement target 11 is in the displacement state, and a history displacement Vcalp4 of the equation (41) (t- The symbols of 1, t+1 ) are identical, and the average 値 and history of the velocity candidates 値νβ3 ( t, t + Ι ) and νβ4 ( t, t + Ι ) calculated by the measurement object 11 are assumed to be in the displacement state. When the absolute 値 of the displacement Vcal03(t-2, t) and the average 値 of the absolute 値 of the history displacement Vcaip4(t-1, t+1) are equal, it is determined that the measurement target 11 moves at the same speed in the displacement state. As described in the patent document 1, when the measurement target 11 performs motion other than the constant velocity motion in the state of the minute displacement, the speed candidate 値v α and the assumed measurement calculated based on the measurement target 11 as the minute displacement state are assumed. The average 値 of the absolute 値 of the history displacement V ca 1 α calculated by the object 1 1 in the state of the minute displacement does not coincide. Similarly, the speed candidate 値ν β calculated on the assumption that the measurement target 11 is in the displacement state is not identical to the absolute value of the absolute 値 of the history displacement Vcalp calculated by the assumption that the measurement target 11 is in the -69-200916731 displacement state. . In the case where the measurement target 11 performs motion other than the constant velocity motion in the state of the minute displacement, the sign of the history displacement Vcala calculated by the measurement target 11 being the minute displacement state is the time at which the number of MHPs is calculated each time. When the inversion is performed, even if there is a sign change in the history displacement V c al β calculated by the measurement target 11 being in the displacement state, the fluctuation is not generated every time the number of turns is calculated. Therefore, the state determination unit 82a is a history displacement Vcalal (t-2, t) of the equation (34) calculated on the assumption that the measurement target 11 is in the minute displacement state, and a history displacement Vcala2 of the equation (35) (t- The symbols of 1, t+1) are not identical, and the average of the calculated velocity candidates 値Val ( t, t+Ι ) and Va2 ( t, t+Ι ) is assumed assuming that the measurement object 11 is in the minute displacement state, When the absolute enthalpy of the history displacement V c al a 1 ( t - 2, t ) and the average 値 of the absolute 値 of the history displacement Veal a2 ( t-1, t + 1 ) do not coincide with each other, the measurement target 1 1 is determined. Exercises other than constant velocity motion in a state of small displacement. Alternatively, the state determination unit 82a is a history displacement Veal α3 (t-2, t) of the equation (36) calculated on the assumption that the measurement target 11 is in a minute displacement state, and a history displacement Vcala4 of the equation (37) (t- The symbols of 1, t+1) are inconsistent, and the calculated velocity candidates 値V a 1 ( t, t + 1 ) and V a 2 ( t, t + 1) are assumed to be in the state of minute displacement. The average 値, which is inconsistent with the absolute 値 of the history displacement Veal a3 ( t-2, t ) and the absolute 値 of the history displacement Vc al a4 ( t-1 ' t+ 1 ) -70- 200916731 It is determined that the measurement target 11 performs motion other than constant velocity motion in a state of minute displacement. Among them, if we look at the velocity candidate 値νβ, the absolute 値 of Bay 1J νβ3 ( t,t+l ) and the absolute 値 of νβ4 ( t,t+1 ) are constant, which is equal to the assumption that the object 1 1 is tiny. The average 値 of the distance 値Lai ( t, t+l ) and La2 ( t, t+l ) calculated from the displacement state is multiplied by the wavelength change rate (Xb-λα ) of the semiconductor lasers 1-1 and 1-2. Ab. Therefore, the state determination unit 8 2 a may also determine the absolute 値 of the velocity candidate 値νβ3 ( t, t+l ) and the absolute 値 of νβ4 ( t, t+l ) calculated on the assumption that the measurement target 11 is in the displacement state. The mean 値 of the distance 値Lai ( t, t+l ) and La2 ( t, t+l ) is multiplied by the 波长 of the wavelength change rate (λ1?-λ3 ) /λΐ), and it is assumed that the measurement object 11 is in a minute displacement The average 値 of the speed candidates 値Val ( t,t+l ) and Va2 ( t,t+l ) calculated from the state, and the absolute enthalpy of the history displacement Vcalal ( t-2,t ) and the history displacement Veal a2 ( t When the average 値 of the absolute 値 of -1, t + l ) does not coincide with each other, it is determined that the measurement target 1 1 performs motion other than the constant velocity motion in the state of minute displacement. Further, the state determination unit 82a may also determine the absolute enthalpy of the velocity candidate 値νβ3 (t, t+1) and the absolute VM of VM(t, t+l) calculated on the assumption that the measurement target 11 is in the displacement state, equal to the distance candidate. The average 値 of 値Lai ( t, t+l ) and La2 ( t, t+ 1 ) is multiplied by the 波长 of the wavelength change rate (λΙ)−λα ) Ub, and the calculated velocity is determined assuming that the object 11 is in a minute displacement state. The mean 値 of the candidate 値Val ( t, t+l ) and Va2 ( t, t+l ), and the absolute 値 of the history displacement VcaU3 ( t-2, t ) and the history displacement vcala4 (t-1, t+ 1 ) When the average 値 of the absolute 値 does not match, it is determined that the measurement target 11 performs motion other than the constant velocity motion in the state of the minute displacement. In the case where the measurement target 1 1 performs motion other than the constant velocity motion in the displacement state, the speed candidate 値να calculated based on the minute displacement state and the assumed measurement target 1 1 are The average 値 of the absolute 値 of the history displacement Vcala calculated by the small displacement state does not coincide with each other, and the speed candidate 値νβ calculated by the measurement target 11 as the displacement state and the history calculated by the assumption that the measurement target 11 is the displacement state are assumed. The absolute mean 位移 of the displacement Vcaip is also inconsistent. In the case where the measurement target 11 performs motion other than the constant velocity motion in the displacement state, the sign of the history displacement Vcaip calculated by the measurement target 11 as the displacement state is reversed each time the number of MHPs is calculated. In the case where there is a sign change in the history displacement Vcala calculated on the assumption that the measurement target 11 is in the minute displacement state, the fluctuation is not generated every time the number of MHPs is calculated. Therefore, the state determination unit 8 2 a is the history displacement Vcalpl ( t-2, t ) of the equation (38 ) calculated on the assumption that the measurement target 1 1 is in the displacement state, and the history displacement Vcaip2 (t) of the equation (39). The symbols of -1, t+1) do not coincide with each other and the velocity candidates 値V β 3 ( t, t + 1 ) and V β 4 ( t, t + 1 ) calculated on the assumption that the measurement object 11 is in the displacement state are assumed. When the average 値 is not consistent with the absolute 値 of the history displacement Vcaipi ( t-2, t ) and the absolute 値 of the history displacement Vcaip2 ( t-1 ' t+ 1 ), the measurement object 1 1 is determined to be displaced. The state performs motion other than constant velocity motion. Alternatively, the state determination unit 8 2 a is a history displacement V c al β 3 ( t - 2, t - 72 - 200916731 ) and a formula of a number (4 0 ) calculated on the assumption that the measurement target 1 1 is in a displacement state. The sign of the history displacement Veal β4 ( t-1, t+1 ) of (41) does not coincide, and the calculated velocity candidates 値νβ3 (ΐ, t+Ι) and Vp4 (assuming the measurement object 11 is in the displacement state) In the case where the average 値 of t, t+Ι) does not coincide with the absolute 値 of the history displacement Vcalp3 ( t-2, t ) and the absolute 値 of the history displacement Vcaip4 ( t −1, t + 1 ), It is determined that the measurement target 11 performs a motion other than the constant velocity motion in the displacement state. Wherein, if attention is paid to the velocity candidate 値Va, the absolute 値 of U Val ( t,t+1 ) and the absolute 値 of Va2 ( t,t+1 ) are constant, and the absolute 値 is equal to the assumption that the measuring object U is in the displacement state. The calculated mean distances of the candidate 値Lp3 ( t, t+Ι ) and Lp4 ( t,t+Ι ) are multiplied by the wavelength change rate of the semiconductor lasers 1-1, 1-2 (λΐ^-λα) / ΐ ΐ). Therefore, the state determination unit 82a may also determine the absolute 値 of the velocity candidate 値Val ( t, t+Ι ) and the absolute 値 of Va2 ( t, t+1 ) calculated on the assumption that the measurement target 11 is in the minute displacement state. The mean 値 of the distance 値LP3 ( t,t+1 ) and ίβ4 ( t, t+1 ) is multiplied by the 波长 of the wavelength change rate (Xb-Xa ) /λΐ), and it is assumed that the measurement object 1 1 is in the displacement state. The average 値 of the velocity candidates 値νβ3 ( t, t+Ι ) and νβ4 ( t,t+Ι ), and the absolute enthalpy of the history displacement Vcaipi ( t-2,t ) and the history displacement Vcaip2 ( t-1,t When the average 値 of the absolute 値 of +1) does not match, it is determined that the measurement target 1 1 performs motion other than the constant velocity motion in the displacement state. Alternatively, the state determination unit 82a may also determine the absolute 値 of the velocity candidate 値Vet 1 ( t, t+ 1 ) and the absolute 値 of Va2 ( t, t+1 ) calculated on the assumption that the measurement target 11 is in the minute displacement state. The mean 値 of the distance 値Ι_, β3 ( t, t+1 ) and ίβ4 ( t, t+1 ) is multiplied by the wavelength change rate (λΙ) - λα ) -73 - 200916731 ab, and the measurement object 1 1 is assumed The average 値 of the velocity candidates 値νβ3 ( t,t+Ι ) and νβ4 ( t, t+Ι ) calculated in the displacement state, and the absolute enthalpy of the history displacement Vcalp3 ( t-2,t ) and the history displacement Vcalp4 ( When the average 値 of the absolute 値 of t-1, t+ 1 ) does not coincide with each other, it is determined that the measurement target 11 performs a motion other than the constant velocity motion in the displacement state. After the above processing, the processing of step S630 is ended. The determination operation of step S603 of the state determination unit 82a is shown in Fig. 36. Then, the speed determining unit 8 3 a of the arithmetic unit 8 determines the absolute value of the speed of the measurement target 11 based on the determination result of the state determining unit 8 2a (step S 5 0 5 of Fig. 4). In other words, when the measurement target 11 determines that the measurement target 11 performs the motion other than the constant motion or the constant velocity motion in the minute displacement state, the speed determination unit 83 3 a determines the speed candidate 値V α 1 (t t stored in the memory unit 80). The average 値 of t + 1 ) and V a 2 ( t, t + 1 ) is the absolute enthalpy of the velocity of the measurement object 1 1 at time t -1 to t + 値 (step S5 05). Further, the speed determining unit 8.3a determines the speed candidate 値νβ3 (1, t+) stored in the memory unit 80 in the case where it is determined that the measurement target 1 1 performs the motion other than the constant velocity motion or the constant velocity motion in the displacement state. The average 値 of Ι) and νβ4 (t, t+Ι) is the absolute 値 of the velocity of the measurement target 11 in the time t-1 to t+Ι (step S 5 05 ). In the case where it is determined that the measurement target 1 1 performs the motion other than the constant velocity or the constant velocity motion in the minute displacement state, the speed determination unit 83 3 a determines the speed candidate 値V a 5 stored in the memory unit 80. (t) is the absolute 速度 of the speed of the measurement target 1 1 at time t-1 to t (step S5 0 5 ). Further, the speed determining unit 83 3 a may calculate the speed of the memory unit 80 in the case where it is determined that the measurement target 1 1 performs the motion other than the constant velocity motion or the constant velocity motion in the state of the displacement -74 - 200916731. The candidate 値V β 6 ( t ) is the absolute 値 of the velocity of the measurement target 1 1 at time t − 1 to t (step S505 ). Then, the speed determining unit 83a calculates the equation (14) and the equation (15) in the same manner as step S205 in Fig. 8, and specifies the direction of the speed of the measurement target 1 (step S506 in Fig. 34). The speed determining unit 83a determines the absolute value of the velocity by using the calculation result of the equation (6) or the equation (7) instead of the calculation result using the equations (2) to (5) in step S505. In the case of comparing the numbers of the numbers X ( t ) and Y ( t ) of the MHP, when X ( t ) is larger than Y ( t ), it is determined that the object is close to the measurement object 1 1 and the ratio of Y ( t ) is X. When (t) is large, it is determined to be away from the measurement target 1 1 (step S506). Next, the distance determining unit 84a determines the distance from the measurement target 11 based on the determination result of the state determining unit 82a (step S 5 07 of Fig. 34). In other words, the distance determining unit 84a determines the distance candidate 値Lai (t, t+) stored in the memory unit 80 when it is determined that the measurement target 11 performs motion other than constant velocity or constant velocity motion in a state of minute displacement. The average 値 of Ι ) and L α 2 ( t, t + 1 ) is the average distance from the measurement object 11 in the time t -1 to t + 1 (step S 5 0 7 ). Further, the distance determining unit 8 4 a determines the distance candidate 记忆L β 3 (t stored in the memory unit 80) when it is determined that the measurement target 1 is performing motion other than constant velocity or constant velocity motion in the displacement state. The average 値 of t + 1 ) and L β 4 ( t, t+1 ) is the average distance from the measurement object 11 in the time t-1 to t+1 (step S507). -75-200916731, wherein the distance determining unit 8 4 a can determine the distance candidate stored in the memory unit 80 when it is determined that the measurement target 1 1 performs motion other than constant motion or constant velocity motion in a state of minute displacement.値L a 5 ( t ) is the average distance from the measurement target n among the times t-1 to t (step S507). Further, when the distance determining unit 8 4 a determines that the measurement target 1 1 performs the motion other than the constant velocity motion or the constant velocity motion in the displacement state, the distance candidate 値Lp6 ( t ) stored in the memory unit 80 is determined to be The average distance from the measurement object 1 1 at time t-Ι to t (step S 5 0 7 ). The arithmetic unit 8 performs the processing of steps S5 〇1 to S5 07 as shown above every time the number of MHPs is calculated by the counting means 7 until, for example, the user indicates that the measurement is ended (in the 34th figure). Step S5 〇8 is YES). The configuration other than the arithmetic unit 8 is the same as that of the first embodiment. In the present embodiment, even when the state of the measurement target 11 cannot be determined in the first embodiment due to the influence of noise or the like, the state of the measurement target 11 can be determined, and the distance from the measurement target 11 can be calculated. The speed of the object 11 is measured. (Fifth Embodiment) Next, a fifth embodiment of the present invention will be described. When the measurement target 11 performs a motion other than the constant velocity motion, when the sign of the acceleration of the measurement target 11 changes, the sign of the equation of the corresponding region that is not in the motion state is reversed, and thus an erroneous determination occurs. Therefore, in the fourth embodiment, the state determination unit 8 2 a of the arithmetic unit 8 may shift the Vcala2 (t-1, t+l) and the equation (37) in the history of the equation (3 5 ) -76 - 200916731. When the signs of the history displacement Vcala4 (t-1, t+1) match, it is determined that the measurement target 1 1 is moving at a constant speed, and the history displacement of the equation (39) is Vcaip2(t-1, t+l). When the sign of the history displacement Veal β4 ( t-1, t + l ) of the equation (41 ) coincides with each other, it is determined that the measurement target 11 is performing motion other than the constant velocity motion. (Sixth embodiment) In the first to fifth embodiments, the present invention is applied to a self-coupling type interferometer. However, the present invention can also be applied to an interferometer other than the self-coupling type. Fig. 3 is a block diagram showing the configuration of a distance/speedometer according to a sixth embodiment of the present invention, and the same components as those in Fig. 1 are denoted by the same reference numerals. In Fig. 37, '12-2 shows a beam splitter that separates incident light and reflected light. 0 The laser light of the semiconductor lasers 1-1 and 1-2 is emitted in parallel with each other and is incident. The object 11 is the same as that of the first embodiment. The laser beam that has passed through the beam splitters 1 2_1 , 1 2 - 2 and the lenses 3 -1, 3 - 2 is incident on the measurement object 1 1 °. Then, in the present embodiment, the semiconductor beam reflected by the measurement object 1 1 The light beams of the beams 1-1 and 1-2 are separated from the incident light incident on the measurement object 11 by the beam splitters 12-1 and 12-2', respectively, and are guided to the photo-electrode body 2 -1 , Ί-2. Since the configurations of the photodiodes 2-1 and 2-2 are the same as those of the first to sixth embodiments, the description thereof is omitted. As a result, even in an interferometer other than the self-prototype -77-200916731, the same effects as those of the first to sixth embodiments can be obtained. The counting device 7 and the arithmetic device 8 of the first to sixth embodiments can be realized by, for example, a computer having a CPU, a memory device, and an interface, and a program for controlling the hardware resources. The program for operating the computer as described above is provided in a state of being recorded on a recording medium such as a flexible disk, a CD-ROM, a DVD-ROM, or a memory card. The CPU writes the read program to the memory device, and executes the processing described in the first to sixth embodiments in accordance with the program. In the first to sixth embodiments, when the measurement target 11 has a vibration with a very small displacement (for example, a maximum speed of 2 nm), the actual distance change (amplitude) is several nm, but the distance calculation is analyzed. The degree is lower than the displacement resolution, so the error becomes large. Therefore, when the measurement object is in a motion state with a slight displacement, instead of the calculation result, the 値 which integrates the displacement (speed) as a change in the distance can improve the accuracy. Further, in the first to sixth embodiments, the minimum oscillation wavelength λα for the semiconductor lasers i _ 1 and 1-2 is the same, and the semiconductor laser is the same as the maximum oscillation wavelength λ ΐ 1 of 1-2. Although not limited to this, as shown in FIG. 38, between the semiconductor lasers 1-1 and 1-2, the minimum oscillation wavelength Xa and the maximum oscillation wavelength Xb are different. In Fig. 38, 'λ31, λΐ) 1 indicates the minimum oscillation wavelength of the semiconductor laser 1-1, and the maximum oscillation wavelength 'Xa2, Xb2 indicates the semiconductor laser! Minimum oscillation wavelength of _2, maximum oscillation wavelength. At this time, ' 1 X >.b 1 / { 4 X ( Xb 1 - λαΐ ) } and Xa2xXb2 / { 4χ ( Xb2-Xa2 ) } are always the same fixed 値 -78 - 200916731. In this case, Xa and Xb in the formulae (2) to (13) may be Xal, λΐ>1 or ka2 and Xb2. Further, in the first to sixth embodiments, the semiconductor lasers 1-1 and I-2 are triangular wave-shaped, but the invention is not limited thereto, and the semiconductor laser 1 may be made as shown in FIG. - 1 ' 1 - 2 oscillates in a saw wave. In other words, in the present invention, the semiconductor laser 1-1 is operated so that at least the first oscillation period P1 overlaps, and the semiconductor ray is made in such a manner that the increase and decrease of the oscillation wavelength is opposite to the semiconductor laser 1:1. Shoot 1 · 2 action. The same as in the case of Fig. 3, Xal#a2 and ZblMb2 may be the same as in the case of Fig. 2, and λα1 = λα2 ' Xbl = Xb2 ° The operation of the first oscillation period P1 is the same as the case of the triangular wave vibration edge. . However, in the case where the semiconductor lasers 1·1 and 1-2 are sawn in a wave shape, the outputs of the changeover switches 70 and 70a of the counter device 7 must be fixed. In other words, the switches 70 and 70a constantly connect the output of the filter circuit 6-1 to the input of the period measuring unit 71-1 and the determining unit 73-1, and the output of the filter circuit 6-2 is constant. It is connected to the input of the period measuring unit 7 1 - 2 and the determining unit 72-3. In the case where the semiconductor lasers 1-1 and 1-2 are caused to oscillate in a triangular wave, the amplitude adjustment of the amplitude adjustment device 1 〇 can be performed regardless of the state of the measurement target 11, but the semiconductor laser is made 1-1. When 1 _ 2 oscillates in a zigzag manner, the amplitude adjustment can be performed only when the measurement target 11 is in a stationary state. (Industrial Applicability) -79- 200916731 The present invention is applicable to a technique for measuring a distance from a measurement target and a speed of a measurement target. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a block diagram showing the configuration of a distance and a speedometer according to a first embodiment of the present invention. Fig. 2 is a view showing an example of temporal changes in the oscillation wavelength of the semiconductor laser in the first embodiment of the present invention. Fig. 3 is a view showing the output voltage waveform of the current-voltage conversion amplifier and the output voltage waveform of the filter circuit in the mode according to the first embodiment of the present invention. Fig. 4 is a block diagram showing an example of the configuration of a counting device according to a third embodiment of the present invention. Fig. 5 is a flow chart showing the operation of the counting device of Fig. 4. Fig. 6 is a view showing the counting period of the counting device of Fig. 4. Fig. 7 is a block diagram showing an example of the configuration of the arithmetic unit in the first embodiment of the present invention. Fig. 8 is a flow chart showing the operation of the arithmetic unit of Fig. 7. Fig. 9 is a diagram for explaining a change in the number of mode skip pulses as the wavelength of the semiconductor laser is switched. Fig. 10 is a view for explaining a method of adjusting the amplitude of a triangular wave drive current supplied from a radiation driver to a semiconductor laser in the first embodiment of the present invention. Fig. 1 is a view for explaining a method of making the calculation result of the velocity or the distance continuous before and after the timing change of the wavelength of the semiconductor laser $ Θ @ -80- 200916731. Fig. 1 is a block diagram showing an example of the configuration of the counting device according to the second embodiment of the present invention. Fig. 13 is a flow chart showing the operation of the counting device of Fig. 12. Fig. 14 is a block diagram showing an example of the configuration of the count result correcting unit in the counting device of Fig. 22. Fig. 15 is a view for explaining the operation of the counting device of Fig. 12. Fig. 16 is a diagram showing an example of the frequency distribution of the period of the mode skip pulse. Fig. 17 is a schematic diagram for explaining the correction of the counting result of the counter in the second embodiment of the present invention. Figure 18 shows the frequency distribution of the period of the mode skip pulse. Figure 19 shows the frequency distribution of the period of the pattern skip pulse containing noise. Figure 20 shows a graph of the median period of the pattern skip pulse containing noise. Fig. 2 is a graph showing the frequency distribution of the period of the mode skip pulse divided into two by the period. Fig. 2 is a graph showing the frequency distribution of the period of the mode skip pulse divided into two by the period. Fig. 23 is a graph showing the frequency distribution of the period of the mode skip pulse whose period is divided into two. Figure 24 shows the frequency distribution of the period -81 - 200916731 of the period skip pulse divided into 2 cycles. Figure 25 is a graph showing the error after the counter 値 is corrected. Fig. 26 is a graph showing the frequency distribution of the period of the mode skip pulse formed in a period of 2 times. Fig. 2 is a graph showing the frequency distribution of the period of the mode skip pulse divided into 2 in the mode skip pulse which is missing at the time of counting. Fig. 2 is a frequency distribution diagram showing the period of the mode skip pulse divided into 2 in the mode skip pulse which is missing at the time of counting. Fig. 29 shows a frequency distribution diagram of the period of the mode skip pulse when both the missing and the excess count occur at the time of counting. Fig. 30 is a block diagram showing an example of the configuration of the counting device according to the third embodiment of the present invention. Fig. 3 is a flow chart showing the operation of the counting device of Fig. 30. Fig. 3 is a block diagram showing an example of the configuration of the count result correcting unit in the counting device of Fig. 30. Fig. 3 is a block diagram showing an example of the configuration of the arithmetic unit in the fourth embodiment of the present invention. Fig. 34 is a flow chart showing the operation of the arithmetic unit of Fig. 3 . Fig. 35 is a flow chart showing the operation of the state determining unit in the arithmetic unit of Fig. 3 . Fig. 3 is a diagram showing the determination operation of the state determination unit in the arithmetic unit of Fig. 3 . Fig. 3 is a block diagram showing the configuration of a distance and a speedometer according to a sixth embodiment of the present invention. -82- 200916731 Fig. 3 is a view showing another example of temporal changes in the oscillation wavelength of the semiconductor laser in the first to sixth embodiments of the present invention. Fig. 3 is a view showing another example of temporal changes in the wavelength of the excitation of the semiconductor laser in the first to sixth embodiments of the present invention. Figure 40 is a diagram showing a composite resonance model of a semiconductor laser in a conventional laser measuring device. Fig. 41 is a graph showing the relationship between the oscillation wavelength of the semiconductor laser and the output waveform of the built-in photodiode. Fig. 42 is a block diagram showing the configuration of a conventional distance/speedometer. Fig. 43 is a view showing an example of temporal changes in the oscillation wavelength of the semiconductor laser in the distance/speedometer of Fig. 42. [Description of main component symbols], 1-2: Semiconductor laser 2_1, 2-2: Photodiode U, 3·2: Lens 1, 4-2: Laser driver 5_1, 5_2: Current-voltage conversion amplifier 6 - 1, 6_2: Filter circuit 7: Counting device 8: Arithmetic device 9: Display device 1 〇: Amplitude adjusting device - 83 - 200916731 1 1 : Measurement target 70, 70a: Switch 7 1-1, 7 1 - 2 7 1 a-1, 7 1 a-2 : period measuring unit 7 2 - 1 , 7 2 - 2 : converting unit 73 - 1 ' 7 3-2: determining unit 74-1, 74-2: logical AND operation Parts (AND) 75- 1 , 75-2 : Counters 76-1, 76-2, 76a-1, 76a-2: Counting result correction unit 7 7 : Memory unit 78-1, 78-2: Period and calculation section 79-1, 79-2: number calculation unit 8 0: memory unit 8: distance/speed calculation unit 82, 82a: state determination unit 8 3, 8 3 a : speed determination unit 84, 84a: distance determination unit 8 5 : History displacement calculation unit 1 0 1 : Semiconductor laser 102 : Wall opening surface of semiconductor crystal 1 0 3 : Photodiode 104 : Measurement target 2 0 1 : Semiconductor laser 2 0 2 : Photodiode 2 0 3: Lens-84- 200916731 204: Laser driver 205: current-voltage conversion amplification 2 0 6 : Signal extraction circuit 207 : Counting circuit 208 : Calculation device 209 : Display device 2 1 测定 : Measurement target 760 : Period measurement unit 7 6 1 : Frequency distribution creation unit 762 : Median calculation unit 763 : Correction calculation Part 7 6 1 a : Frequency distribution creation unit 762a : Median calculation unit 763 a : Correction calculation unit GS : audible signal LD1 : oscillation waveform LD2 of semiconductor laser 1-1 : oscillation of semiconductor laser 1-2 Waveform P1: first oscillation period P2: second oscillation period T: period of triangular wave: minimum 振荡Xb of oscillation wavelength in each period: maximum of oscillation wavelength in each period

Pn 1, Pn2, Pn3 > Pn4, Pn5, Pn6, Pn7, Pn8: 1st counting period -85- 200916731

Pm 1, Pm2, Pm3, Pm4, Pm5, Pm6, Pm7, Pm8: second counting period tOa, tl, t2, tOb, t3, t4, tOc, t5, t6, tOd, t7, t8: first counting period Pn At the time of the start or end of the second counting period Pm -86-

Claims (1)

200916731 X. Patent Application Range 1. A distance/speedometer characterized by having: a first semiconductor laser that radiates a first laser beam to a measurement target; and a second semiconductor laser that is parallel to the first laser beam The second laser beam is radiated to the measurement target; the first laser driver operates the first semiconductor laser so that the oscillation period continuously increases at least continuously with the oscillation wavelength. ♦ The second laser driver oscillates the wavelength The second semiconductor laser is operated in a manner opposite to the first semiconductor laser, and the first light receiver converts the first laser light and the return light from the measurement target into the electric signal. a second light receiver that converts the second laser light and the return light from the measurement target into the electrical signal; and the counting means for each of the output signals of the first and second light receivers 1. Counting the number of interference waveforms generated by the first and second laser beams and their returning light included in the output signal of the second photodetector; And the calculation means calculates at least one of a distance from the measurement target and a speed of the measurement target based on a minimum oscillation wavelength and a maximum oscillation wavelength of the first and second semiconductor lasers and a counting result of the counting means. (2) The distance/speedometer is characterized in that: the first semiconductor laser emits a first laser light to the measurement target. '-87 - 200916731 The second semiconductor laser is parallel to the first laser light. The measurement target emits the second laser beam; the first laser driver operates the first semiconductor laser so that the oscillation period in which the oscillation wavelength continuously increases monotonously continues to exist. > The second laser driver has an oscillation wavelength The second semiconductor laser operates in a manner opposite to the first semiconductor laser; the first photodetector converts the light output of the first semiconductor laser into an electrical signal; and the second photoreceptor The light output of the second semiconductor laser is converted into an electrical signal; and the counting means is for each of the output signals of the first and second light receivers, The first 'second receiving: the output signal of the optical device includes: counting the number of interference waveforms generated by the self-coinciding effect of the first and second laser light and the returning light; and calculating means, At least one of the distance from the measurement target and the speed of the measurement target is calculated based on the minimum oscillation wavelength of the first and second semiconductor lasers and the maximum vibration wavelength and the counting result of the counting means .3. The distance/speedometer according to the first or second aspect of the invention, wherein the counting means obtains an oscillation wavelength from the first and second semiconductor lasers in a first counting period shorter than the oscillation period The number of interference waveforms included in the output signal of the photoreceiver corresponding to the semiconductor laser that is being increased is simultaneously obtained in the second counting period from the same time as the first counting period -88 to 200916731. The second semiconductor laser is configured by means of the number of interference waveforms included in the output signal of the photoreceiver corresponding to the semiconductor laser whose oscillation wavelength is decreasing, and the foregoing operation means The distance/speed calculation means includes a candidate 距离 of the distance to the measurement target and a speed of the measurement target based on the minimum oscillation wavelength and the maximum oscillation wavelength of the first and second semiconductor lasers and the counting result of the counting means. The state determination means determines the state of the measurement target based on the candidate 速度 of the velocity calculated by the distance/speed calculation means, and the distance/speed determination means determines the genre based on the determination result of the state determination means At least one of the distance between the measurement target and the speed of the measurement target. 4. The distance/speed meter according to item 3 of the patent application scope, wherein the distance/speed calculation means is based on a result of assuming that the measurement target is in a minute displacement state, based on a counting result in the first counting period and one after the first counting period In the count result of the count period, the first candidate 速度 of the speed and the first candidate 距离 of the distance are calculated, and the count result of the second count period at the same time as the first count period in which the first candidate 已 has been calculated is The second candidate 値 of the speed and the second candidate 距离 of the distance are calculated as the result of the counting of the first counting period at the same time as the second counting period in which the first candidate 已 is calculated, and the measurement target is assumed to be in a variation ratio In the case of the displacement state in which the displacement state is fast, 'the third candidate 速度 of the speed and the third candidate 距离 of the distance are calculated based on the counting result in the first counting period and the counting result in the second counting period after one time, and the calculation is based on The count of the second count period at the same time in the first count period of the third candidate --89-200916731 and the result of the calculation of the third candidate 値In the second count period, the count result of the first count period at the same time is calculated, and the fourth candidate 速度 of the speed and the fourth candidate 距离 of the distance are calculated, and the state determination means is substantially equal to the first candidate 値 and the second candidate 前述 of the speed. In the case where the measurement target is in a minute displacement state, and the third candidate 値 and the fourth candidate 値 of the speed are substantially equal, it is determined that the measurement target is in a displacement state. 5. The distance/speed meter according to the fourth aspect of the patent application, wherein the distance/speed determining means sets the first candidate 値 and the second candidate of the speed when the measurement target is in a minute displacement state. Any one of the first measurement target 値 and the second candidate 前述 of the distance is a distance from the measurement target, and it is determined that the measurement target is in a displacement state. In any of the third candidate 値 and the fourth candidate 前述 of the speed, the speed of the measurement target is set, and any of the third candidate 値 and the fourth candidate 前述 of the distance is set as the measurement target. the distance. 6. The distance/speed meter according to the fourth aspect of the invention, wherein the distance/speed determining means sets the first candidate 値 and the second candidate of the speed when the measurement target is in a minute displacement state. The average value of 値 is the speed of the measurement target, and the average 値 of the first candidate 値 and the second candidate 前述 of the distance is a distance from the measurement target, and when it is determined that the measurement target is in a displacement state, The average 値 of the third candidate 値 and the fourth candidate 前述 of the speed is set as the speed of the measurement target, and the third candidate 値 of the distance and the flat-90-200916731 of the fourth candidate 値 are both determined as described above. The distance of the object. 7. The distance/speed meter according to item 4 of the patent application scope, wherein the distance/speed determining means compares ΣΧ and ΣΥ, wherein the ΣΧ is a count of the first counting period of the first candidate 计算 calculating the speed As a result, the sum of the count results of the first count period of the second candidate 前述 of the speed is calculated, and the ΣΥ is the count result of the second count period of the first candidate 计算 at which the speed is calculated, and the second calculation of the speed is calculated. When the sum of the counts in the second count period of the candidate 値 is larger than the above ,, it is determined that the measurement target is approaching, and when the ΣΥ is larger than the ΣΧ, the measurement target is determined to be positive. keep away. 8. The distance/speedometer according to the fourth aspect of the patent application, wherein the calculation means further includes a history displacement calculation means for assuming that the measurement target is in a state of minute displacement and assuming that the measurement object is in a displacement state. In each case, the history displacement of the difference between the candidate 値 calculated by the distance/speed calculation means and the candidate 値 calculated by the previous time is calculated, and the state determination means is based on the speed. When the candidate 値 cannot determine the state of the measurement target, the state of the measurement target is determined based on the calculation result of the history displacement calculation means. 9. The distance/speed meter of claim 2 or 2, wherein the counting means includes: a counter for each of the output signals of the first and second photoreceivers, the first and the first (2) counting the number of the interference waveforms included in the output signal of the photodetector; -91 - 200916731 The period measuring means is for each of the output signals of the first and second photoreceivers, each time the interference waveform is input, The period of the interference waveform in the counting period in which the number of the interference waveforms is counted is measured; and the frequency distribution forming means creates, based on the measurement result of the period measuring means, the respective output signals of the first and second photodetectors a frequency distribution of a period of the interference waveform in the counting period; and a median calculating means calculating a median period of the interference waveform for each of the output signals of the first and second photodetectors based on the frequency distribution; The correction correction means calculates the level below the first predetermined multiple of the median based on the frequency distribution. The frequency sum N s and the frequency sum nw of the level equal to or greater than the second predetermined multiple of the median, and the counters for the first and second photodetectors are corrected for the respective counters Ns and Nw according to the frequencies Ns and Nw Counting result; period and calculation means 'for each of the output signals of the first and second photodetectors', the sum of the periods of the interference waveforms is calculated based on the measurement results of the period measuring means; and the number calculating means is Each of the output signals of the first and second photoreceivers calculates the number of the aforementioned interference waveforms per unit time based on the sum of the count result corrected by the aforementioned correction 値 calculation means and the period calculated by the aforementioned period and calculation means. . 1 ° · The distance/speed meter according to item 1 or item 2 of the patent application scope, wherein the 'counting means includes: -92- 200916731 period measuring means for each of the output signals of the first and second receivers Each time the interference waveform is input, that is, a predetermined number of cycles of the interference waveform included in the output signals of the first and second photodetectors are measured; a frequency distribution forming means for the first and second photoreceivers Each of the output signals is a frequency distribution of the period of the interference waveform based on the measurement result of the period measuring means; and the median calculating means is based on the frequency distribution of each of the output signals of the first and second photodetectors Calculating a median of the period of the interference waveform; and correcting the 値 calculating means, obtaining a frequency sum NS of a level equal to or less than a first predetermined multiple of the median based on the frequency distribution, and a number of the median 2, the frequency sum Nw of the predetermined multiple or more, for each of the output signals of the first and second photoreceivers, according to the frequencies Ns and Nw, Correcting the predetermined number; the period and the calculation means calculating the sum of the periods of the thousands of waveforms based on the measurement results of the period measuring means for each of the output signals of the first and second photoreceivers; and the number calculating means For each of the output signals of the first and second photoreceivers, the sum of the number of interference waveforms corrected by the correction correction means and the sum of the periods calculated by the period and the calculation means' is calculated per unit time. The number of aforementioned interference waveforms. 1 1. The distance/speed meter according to item 9 or item 10 of the patent application scope, wherein the correction correction means is when the counter-93-200916731 result of the counter or the predetermined number is set to N, The corrected 値N ' is obtained by N'=N + Nw-Ns'. 12. The distance/speedometer according to claim 1 wherein the first predetermined number is 0.5 and the second predetermined number is 1.5. 13. The distance/speed meter according to the first aspect of the invention, wherein the period measuring means obtains an oscillation in the first and second semiconductor lasers in a first counting period shorter than the oscillation period. The period of the interference waveform included in the output signal of the photodetector corresponding to the semiconductor laser having an increased wavelength, and the first and second semiconductors are obtained in the second counting period at the same time as the first counting period. The period of the interference waveform included in the output signal of the receiver corresponding to the semiconductor laser whose oscillation wavelength is decreasing in the laser. 14. The distance/speed meter according to Item 5 or Item 6 of the patent application, further comprising an amplitude adjustment means for quantifying a speed at which the measurement target is in a minute displacement state and assuming that the measurement target is In the candidate for the speed in the displacement state, the distance/speed determining means determines the candidate speed of the speed that is not true and is not used, and the distance/speed determining means determines that it is true based on the determination result of the state determining means. The first and second laser drivers are supplied to the first and second lasers so that the candidate 値 is multiplied by the wavelength change rate of the first and second semiconductor lasers. The amplitude of at least one of the drive currents of the semiconductor laser. 1 5. The distance/speed meter according to item 5 or item 6 of the patent application, wherein the amplitude adjustment means additionally has a candidate for a speed at assuming that the aforementioned measurement is in a state of a slight displacement of the -94 - 200916731 image. In the candidate 速度 of the speed when the measurement target is in the displacement state, the first and second candidates of the speed used by the distance/speed determination means to determine the true speed are based on the determination result of the state determination means. The amplitude of at least one of the drive currents supplied to the first and second semiconductor lasers by the first and second laser drivers is adjusted so that the timing at which the wavelength change of the semiconductor laser is switched is continuous. 16. The distance/speed meter according to item 5 or item 6 of the patent application, wherein the amplitude adjustment means further includes a candidate for a distance when the measurement target is in a minute displacement state, and assuming that the measurement target is In the candidate for the distance in the state of the displacement, the wavelength of the first and second semiconductor lasers is changed by the distance 速度 determined by the distance/speed determining means and determined by the determination result by the state determining means. The amplitude of at least one of the drive currents supplied to the first and second semiconductor lasers by the first and second laser drivers is adjusted such that the timing of the switching is maintained before and after the switching. In the method of measuring the distance and velocity using a semiconductor laser, the method of measuring the distance and velocity of the laser beam to be measured is characterized in that the first oscillation step is continuously monotonously increased by at least the oscillation wavelength. The first semiconductor laser is operated in such a manner that the oscillation period is repeated; the second oscillation step "operates the second semiconductor laser so that the increase and decrease of the oscillation wavelength is opposite to the first semiconductor laser; and the counting step is performed by The first laser light included in the output signal of the first light receiver that is converted into the electrical signal by the first-semiconductor laser beam emitted by the first semiconductor laser and the output light of the first light-receiver that is converted into the electrical signal by the return light from the measurement target Counting the number of interference waveforms generated by the return light and the second received light that converts the second laser light emitted by the second semiconductor laser and the return light from the measurement target into the electrical signal. Counting the number of interference waveforms generated by the aforementioned second laser light and its returning light contained in the output signal of the device; The calculation step calculates at least one of a distance from the measurement target and a speed of the measurement target based on the minimum oscillation wavelength and the maximum oscillation wavelength of the first and second semiconductor lasers and the count result of the counting step. A distance/speed measurement method using a semiconductor laser to measure a distance and a velocity of a laser beam to be measured, wherein the first oscillation step is performed by repeating an oscillation period in which at least an oscillation wavelength continuously increases monotonously. The first semiconductor laser is operated in a second oscillation step, and the second semiconductor laser is operated in such a manner that the increase and decrease of the oscillation wavelength is opposite to the first semiconductor laser; and the counting step is performed on the first The first laser light emitted by the first semiconductor laser and the self-coupling of the return light from the measurement target of the laser light included in the output signal of the photoreceptor of the semiconductor laser The number of interference waveforms generated by the effect is counted, and for the light transmission of the aforementioned second semiconductor laser The output signal of the second photoreceiver that is converted into the electrical signal includes the second laser light emitted by the second half-96-200916731 conductor laser and the self-coupling effect of the return light from the target of the laser light. The number of the generated interference waveforms and the calculation step are based on the swash wavelength and the maximum oscillation wavelength of the first and second semiconductor lasers, the distance between the counting result of the counting step and the distance between the measurement target and the speed of the measurement target The method of measuring distances according to claim 17 or claim 18, wherein the step of counting is determined by the first counting period in a first counting period shorter than the vibration. (2) the number of interference waveforms included in the number of the photodetector corresponding to the semiconductor laser whose semiconductor oscillation wavelength is increasing, and the second and the second counting period at the same time as the first meter, and the first and second bodies are obtained. The steps of the steps of the number of interference waveforms included in the output signal corresponding to the semiconductor laser whose oscillation wavelength is decreasing in the laser include: • The speed calculation step, the minimum oscillation wavelength of the first and second semiconductor lasers, and the counting result of the maximum vibration and the counting step, and the candidate 値 of the measurement target and the candidate of the measurement target speed are calculated; Determining the state of the measurement target based on the speed calculated by the distance and speed calculation step; and determining the distance/speed determination result based on the determination result of the state determination step, and determining at least one of the measurement distance and the speed of the measurement target By. 20- If the distance and speed of the patent application range is the minimum speed, the calculation is less, and the calculation is less. • During the output period of the laser during the sloshing period, the distance of the semi-conductive receiver according to the pre-wavelength wavelength is 2 The step of the step of the step, the amount of the object method -97-200916731, wherein the distance/speed calculation step is based on the assumption that the measurement target is in the state of minute displacement, based on the count result in the first counting period and the first time after the first counting period In the count result of the count period, the first candidate 速度 of the speed and the first candidate 距离 of the distance are calculated, and the count result of the second count period at the same time as the first count period in which the first candidate 已 has been calculated is The second candidate 値 of the speed and the second candidate 距离 of the distance are calculated as the result of the counting of the first counting period at the same time as the second counting period in which the first candidate 已 is calculated, and the measurement target is assumed to be in a variation ratio The case of the displacement state in which the displacement state is fast is calculated based on the counting result in the first counting period and the counting result in the second counting period after one time. The third candidate of the degree and the third candidate of the distance are calculated based on the count result of the second count period at the same time as the first count period in which the third candidate is calculated, and the third candidate is calculated. In the second counting period of the second counting period, the counting result of the first counting period at the same time, the fourth candidate 速度 of the speed and the fourth candidate 距离 of the distance are calculated, and the state determination step is the first candidate 第 and the second candidate 前述 of the speed 値When it is substantially equal, it is determined that the measurement target is in a minute displacement state. 'When the third candidate 値 and the fourth candidate 前述 of the speed are substantially equal, it is determined that the measurement target is in a displacement state. 2 1. The distance/speed measuring method of the twentieth aspect of the patent application scope, wherein the 'distance and speed determining step is a table 1 candidate for the speed in the case where it is determined that the measurement target is in a minute displacement state. In the second candidate, the speed of the measurement target is set, and the distance between the first candidate 値 and the second candidate 前述 of the distance is determined as the distance from the measurement -98 to 200916731. When the measurement target is in the displacement state, any one of the third candidate 値 and the fourth candidate 前述 of the speed is the speed of the measurement target, and any of the third candidate 値 and the fourth candidate 前述 of the distance. The distance to the measurement target is set. 2. The distance/speed measuring method according to the twentieth aspect of the patent application, wherein the distance/speed determining step is to set the first candidate 前述 of the speed in the case where it is determined that the measurement target is in a minute displacement state. The average 値 of the second candidate 値 is the speed of the measurement target, and the average 値 of the first candidate 値 and the second candidate 前述 of the distance is a distance from the measurement target, and it is determined that the measurement target is in a displacement state. In this case, the average 値 of the third candidate 値 and the fourth candidate 前述 of the speed is set as the speed of the measurement target, and the average 値 between the third candidate 値 and the fourth candidate 前述 of the distance is determined as described above. The distance of the object. 23. The distance/speed measuring method according to claim 20, wherein the distance/speed determining step compares ΣΧ and ΣΥ, wherein the 计数 is a first counting period of the first candidate 计算 calculating the speed. And the sum of the count results of the first count period of the second candidate 计算 of the speed, the Σ Y is the count result of the second count period of the first candidate 计算 at which the speed is calculated, and the speed is calculated When the sum of the count results in the second count period of the second candidate ' is larger than the Σ Y, it is determined that the measurement target is approaching 'when the Σ Y is larger than the Σ X, then It is determined that the measurement target is far away from the crucible 24. The distance/speed measurement method of the twentieth of the patent application No. 20-200916731, wherein the calculation step additionally includes a history displacement calculation step for assuming that the measurement object is in a minute displacement The case of the state and the case of the case where the aforementioned measurement object is in the displacement state 'calculate the distance calculated by the aforementioned distance/speed calculation step In the case where the state of the measurement target is not determined based on the candidate of the speed, the state determination step is based on the calculation result of the history displacement step. The state of the aforementioned measurement object. 2 5. The distance of the application of the patent range No. 17 or item 18. The measurement method, wherein the 'counting step includes: the interference waveform counting step' for each of the first and second receivers, The number of the interference waveforms included in the output signals of the first and second photodetectors is counted as a period measuring step, and each time the input waveform is input to each of the first and second receivers, The interference waveform period in the counting period in which the number of the preceding waveforms is counted is measured; and the frequency distribution creating step is performed on each of the first and second photodetector output signals based on the measurement result of the periodic measurement step. a frequency distribution of a period of the interference waveform in the period; a median calculation step of calculating a median of the interference waveform period for each of the signals of the first and second photoreceivers according to the frequency distribution; According to the frequency distribution described above, it is determined as the previous step, and it is assumed that the output of the signal is calculated by the previous method. In the case of the output, the frequency sum Ns of the level of the first predetermined multiple of the number of digits of the number of digits is equal to or greater than the frequency of the second predetermined multiple of the median number, and the first and second photoreceivers. Each of the output signals corrects the counting result of the interference waveform counting step based on the frequencies NS and N w ; the period and the calculating step, for each of the output signals of the first and second photoreceivators, according to the period measuring step a result of the measurement, calculating a total of the periods of the interference waveforms, and a number calculation step for each of the output signals of the first and second photoreceivers based on the count result corrected by the correction step and the period The sum of the aforementioned interference waveforms per unit time is calculated by summing the periods calculated by the calculation steps. 26. The distance/speed smog method of the patent application scope item 17 or item 18 wherein the 'counting step includes: the period measuring step 'for each of the output signals of the first and second receivers' Each time the interference waveform is input, the period of the predetermined number of interference waveforms included in the output signals of the jth and second photodetectors is measured. The frequency distribution is performed in the step 'for the first and second photoreceivers. Each of the output signals 'the frequency distribution of the period of the interference waveform is generated based on the measurement result of the period measurement step; and the median calculation step 'for each of the output signals of the second and second photodetectors' is based on the frequency distribution. Calculating the median of the period of the interference waveform; correcting the 値π-th calculation step', based on the frequency distribution of glj, finding the sum of frequencies N s of the level below the first predetermined multiple of the number of bits -101 - 200916731 a frequency sum nw of a level equal to or greater than a second predetermined multiple of the median, for each of the output signals of the first and second photoreceivers, The equal frequency Ns and Nw correct the predetermined number; the period and the calculation step calculate the sum of the periods of the interference waveforms based on the measurement results of the period measuring step for each of the output signals of the first and second photoreceivers; And the number calculation step 'each of the output signals of the first and second photoreceivers' is based on the sum of the number of interference waveforms corrected by the aforementioned correction 値 calculation step and the period calculated by the aforementioned period and calculation step , Calculate the number of the aforementioned interference waveforms per unit time. [27] A distance/speed measuring method according to the second or second aspect of the patent application, wherein the method further includes an amplitude adjustment step for quantifying a speed at which the measurement target is in a minute displacement state, and assuming the aforementioned measurement target In the candidate for the speed in the displacement state, based on the determination result of the state determination step, the distance 速度 speed determination step determines the candidate 速度 of the speed that is not true and is not used, and the distance. The candidate 値 of the distance that is determined to be true is multiplied by the 値 of the wavelength change rate of the first and second semiconductor lasers, and is adjusted to be supplied to the first and second semiconductor lasers. The amplitude of at least one of the currents. 28. The distance/speed measuring method according to claim 21 or 22, wherein 'there is additionally an amplitude adjusting step which is a candidate for the speed at the assumption that the aforementioned measuring object is in a minute displacement state and a pre-hypothesis-102 - 200916731 In the candidate 速度 of the speed at which the measurement target is in the displacement state, based on the determination result of the state determination step, the candidate for the speed that is determined to be true in the distance* speed determination step is the first The amplitude of at least one of the drive currents supplied to the first and second semiconductor lasers is adjusted such that the timing at which the wavelength change of the second semiconductor laser is switched is continuous. 29. The distance measuring method according to claim 2, wherein the speed measuring method further includes an amplitude adjusting step of assuming a distance of the distance when the measuring object is in a minute displacement state, and assuming the foregoing In the candidate 距离 of the distance when the measurement target is in the displacement state, based on the determination result of the state determination step, the candidate for the distance that is determined to be true in the distance/speed determination step is the first and second semiconductors. The amplitude of at least one of the drive currents supplied to the first and second semiconductor lasers is adjusted such that the timing at which the wavelength change of the laser light is switched is continuous. -103-