JP5541773B2 - Physical quantity sensor and physical quantity measuring method - Google Patents

Physical quantity sensor and physical quantity measuring method Download PDF

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JP5541773B2
JP5541773B2 JP2009258771A JP2009258771A JP5541773B2 JP 5541773 B2 JP5541773 B2 JP 5541773B2 JP 2009258771 A JP2009258771 A JP 2009258771A JP 2009258771 A JP2009258771 A JP 2009258771A JP 5541773 B2 JP5541773 B2 JP 5541773B2
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達也 上野
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Azbil Corp
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本発明は、半導体レーザから放射したレーザ光と物体からの戻り光との自己結合効果によって生じる干渉の情報から、物体との距離や物体の速度等の物理量を計測する物理量センサおよび物理量計測方法に関するものである。   The present invention relates to a physical quantity sensor and a physical quantity measurement method for measuring a physical quantity such as a distance to an object and a speed of an object from information on interference caused by a self-coupling effect between laser light emitted from a semiconductor laser and return light from the object. Is.

従来より、半導体レーザの自己結合効果を用いた波長変調型の物理量センサが提案されている（特許文献１参照）。この物理量センサの構成を図２４に示す。図２４の物理量センサは、測定対象の物体２１０にレーザ光を放射する第１、第２の半導体レーザ２０１−１，２０１−２と、半導体レーザ２０１−１，２０１−２の光出力をそれぞれ電気信号に変換するフォトダイオード２０２−１，２０２−２と、半導体レーザ２０１−１，２０１−２からの光をそれぞれ集光して物体２１０に照射すると共に、物体２１０からの戻り光を集光して半導体レーザ２０１−１，２０１−２に入射させるレンズ２０３−１，２０３−２と、半導体レーザ２０１−１，２０１−２に発振波長が連続的に増加する第１の発振期間と発振波長が連続的に減少する第２の発振期間とを交互に繰り返させる第１、第２のレーザドライバ２０４−１，２０４−２と、フォトダイオード２０２−１，２０２−２の出力電流をそれぞれ電圧に変換して増幅する電流−電圧変換増幅器２０５−１，２０５−２と、電流−電圧変換増幅器２０５−１，２０５−２の出力電圧から搬送波を除去するフィルタ回路２０６−１，２０６−２と、フィルタ回路２０６−１，２０６−２の出力電圧に含まれる自己結合信号であるモードホップパルス（以下、ＭＨＰとする）の数を数える計数装置２０７と、物体２１０との距離および物体２１０の速度を算出する演算装置２０８と、演算装置２０８の算出結果を表示する表示装置２０９とを有する。   Conventionally, a wavelength modulation type physical quantity sensor using a self-coupling effect of a semiconductor laser has been proposed (see Patent Document 1). The configuration of this physical quantity sensor is shown in FIG. The physical quantity sensor of FIG. 24 electrically outputs the light outputs of the first and second semiconductor lasers 201-1 and 201-2 that emit laser light to the object 210 to be measured, and the semiconductor lasers 201-1 and 201-2, respectively. The light from the photodiodes 202-1 and 202-2 to be converted into signals and the semiconductor lasers 201-1 and 201-2 are condensed to irradiate the object 210, and the return light from the object 210 is condensed. Then, the lenses 203-1 and 203-2 that are incident on the semiconductor lasers 201-1 and 201-2, and the first oscillation period and the oscillation wavelength in which the oscillation wavelengths continuously increase in the semiconductor lasers 201-1 and 201-2. The output currents of the first and second laser drivers 204-1 and 204-2 and the photodiodes 202-1 and 202-2 that alternately repeat the continuously decreasing second oscillation period are obtained. Current-voltage conversion amplifiers 205-1 and 205-2 that convert and amplify the voltages, and filter circuits 206-1 that remove carrier waves from the output voltages of the current-voltage conversion amplifiers 205-1 and 205-2, 206-2, the distance between the object 210 and the counting device 207 that counts the number of mode hop pulses (hereinafter referred to as MHP) that are self-coupled signals included in the output voltages of the filter circuits 206-1 and 206-2, and An arithmetic device 208 that calculates the speed of the object 210 and a display device 209 that displays the calculation result of the arithmetic device 208 are included.

レーザドライバ２０４−１，２０４−２は、時間に関して一定の変化率で増減を繰り返す三角波駆動電流を注入電流として半導体レーザ２０１−１，２０１−２に供給する。これにより、半導体レーザ２０１−１，２０１−２は、注入電流の大きさに比例して発振波長が一定の変化率で連続的に増加する第１の発振期間と発振波長が一定の変化率で連続的に減少する第２の発振期間とを交互に繰り返すように駆動される。このとき、レーザドライバ２０４−１，２０４−２は、半導体レーザ２０１−１と２０１−２とで発振波長の増減が逆になるように駆動電流を供給する。図２５は半導体レーザ２０１−１，２０１−２の発振波長の時間変化を示す図である。図２５において、ＬＤ１は半導体レーザ２０１−１の発振波形、ＬＤ２は半導体レーザ２０１−２の発振波形、Ｐ１は第１の発振期間、Ｐ２は第２の発振期間、λａは各期間における発振波長の最小値、λｂは各期間における発振波長の最大値、Ｔｃａｒは三角波の周期である。   The laser drivers 204-1 and 204-2 supply a triangular wave drive current that repeatedly increases and decreases at a constant change rate with respect to time to the semiconductor lasers 201-1 and 201-2 as an injection current. As a result, the semiconductor lasers 201-1 and 201-2 have a first oscillation period in which the oscillation wavelength continuously increases at a constant change rate in proportion to the magnitude of the injection current, and an oscillation wavelength at a constant change rate. The second oscillation period that continuously decreases is driven to alternately repeat. At this time, the laser drivers 204-1 and 204-2 supply drive currents so that the increase and decrease of the oscillation wavelength are reversed between the semiconductor lasers 201-1 and 201-2. FIG. 25 is a diagram showing the change over time of the oscillation wavelengths of the semiconductor lasers 201-1 and 201-2. In FIG. 25, LD1 is the oscillation waveform of the semiconductor laser 201-1, LD2 is the oscillation waveform of the semiconductor laser 201-2, P1 is the first oscillation period, P2 is the second oscillation period, and λa is the oscillation wavelength in each period. The minimum value, λb is the maximum value of the oscillation wavelength in each period, and Tcar is the period of the triangular wave.

半導体レーザ２０１−１，２０１−２から出射したレーザ光は、レンズ２０３−１，２０３−２によって集光され、物体２１０に入射する。物体２１０で反射された半導体レーザ２０１−１，２０１−２の光は、それぞれレンズ２０３−１，２０３−２によって集光され、半導体レーザ２０１−１，２０１−２に入射する。電流−電圧変換増幅器２０５−１，２０５−２は、それぞれフォトダイオード２０２−１，２０２−２の出力電流を電圧に変換して増幅する。フィルタ回路２０６−１，２０６−２は、電流−電圧変換増幅器２０５−１，２０５−２の出力電圧から搬送波を除去する。計数装置２０７は、フィルタ回路２０６−１，２０６−２の出力電圧に含まれるＭＨＰの数を数える。演算装置２０８は、半導体レーザ２０１−１，２０１−２の最小発振波長λａと最大発振波長λｂと計数装置２０７の計数結果に基づいて物体２１０との距離および物体２１０の速度を算出する。   Laser light emitted from the semiconductor lasers 201-1 and 201-2 is collected by the lenses 203-1 and 203-2 and enters the object 210. The lights of the semiconductor lasers 201-1 and 201-2 reflected by the object 210 are collected by the lenses 203-1 and 203-2, respectively, and enter the semiconductor lasers 201-1 and 201-2. Current-voltage conversion amplifiers 205-1 and 205-2 convert the output currents of the photodiodes 202-1 and 202-2 into voltages, respectively, and amplify them. The filter circuits 206-1 and 206-2 remove the carrier wave from the output voltages of the current-voltage conversion amplifiers 205-1 and 205-2. The counting device 207 counts the number of MHPs included in the output voltages of the filter circuits 206-1 and 206-2. The arithmetic device 208 calculates the distance to the object 210 and the speed of the object 210 based on the minimum oscillation wavelength λa and the maximum oscillation wavelength λb of the semiconductor lasers 201-1 and 201-2 and the counting result of the counting device 207.

特開２００９−０１４７０１号公報JP 2009-014701 A

特許文献１に開示された自己結合型の物理量センサでは、距離や速度の算出にある程度の計測時間（特許文献１の例では、半導体レーザの発振波長変調の搬送波の半周期）が必要となるため、速度の変化が速い測定対象の計測においては計測誤差を生じるという問題点があった。また、信号処理においてＭＨＰの数を数える必要があるため、半導体レーザの半波長未満の分解能を実現することが難しいという問題点があった。   The self-coupled physical quantity sensor disclosed in Patent Document 1 requires a certain amount of measurement time (in the example of Patent Document 1, a half cycle of a carrier wave of oscillation wavelength modulation of a semiconductor laser) for calculating distance and speed. However, there is a problem that a measurement error occurs in the measurement of a measurement object whose speed changes rapidly. Further, since it is necessary to count the number of MHPs in signal processing, there is a problem that it is difficult to realize a resolution of less than a half wavelength of the semiconductor laser.

本発明は、上記課題を解決するためになされたもので、物体との距離や物体の速度等の物理量を高い分解能で計測することができ、計測に要する時間を短縮することができる物理量センサおよび物理量計測方法を提供することを目的とする。   The present invention has been made in order to solve the above-described problem, and a physical quantity sensor capable of measuring a physical quantity such as a distance to an object and a speed of the object with high resolution and reducing a time required for the measurement, and The object is to provide a physical quantity measurement method.

本発明の物理量センサ（第１の実施の形態）は、測定対象に第１のレーザ光を放射する第１の半導体レーザと、前記測定対象に前記第１のレーザ光と平行に第２のレーザ光を放射する第２の半導体レーザと、少なくとも発振波長が連続的に単調増加する発振期間が繰り返し存在するように前記第１の半導体レーザを動作させる第１の発振波長変調手段と、前記第１の半導体レーザと発振波長の増減が逆になるように前記第２の半導体レーザを動作させる第２の発振波長変調手段と、前記第１のレーザ光とこのレーザ光の前記測定対象からの戻り光との自己結合効果によって生じる干渉波形を含む電気信号を検出する第１の検出手段と、前記第２のレーザ光とこのレーザ光の前記測定対象からの戻り光との自己結合効果によって生じる干渉波形を含む電気信号を検出する第２の検出手段と、前記第１、第２の検出手段の出力信号に含まれる干渉波形の周期をそれぞれ干渉波形が入力される度に計測する第１、第２の信号抽出手段と、この第１、第２の信号抽出手段の計測結果からそれぞれ単位時間当たりの干渉波形の数を算出する第１、第２の個数算出手段と、この第１、第２の個数算出手段の算出結果に正負の符号を付与する符号付与手段と、この符号付与手段によって符号が与えられた、前記第１、第２の個数算出手段の符号付き算出結果の平均値を算出することにより、前記半導体レーザと測定対象との平均距離に比例した干渉波形の数である距離比例個数を求める距離比例個数算出手段と、前記符号付与手段によって符号が与えられた、前記第１の個数算出手段の最新の符号付き算出結果と、この算出結果よりも過去の、前記第１、第２の個数算出手段の符号付き算出結果の平均値との差の絶対値を算出するか、前記符号付与手段によって符号が与えられた、前記第２の個数算出手段の最新の符号付き算出結果と、この算出結果よりも過去の、前記第１、第２の個数算出手段の符号付き算出結果の平均値との差の絶対値を算出するか、あるいは２つの前記絶対値の平均値を算出することにより、前記測定対象の変位に比例した干渉波形の数である変位比例個数を求める変位比例個数算出手段と、前記符号付与手段によって符号が与えられた、前記第１、第２の個数算出手段の符号付き算出結果と前記変位比例個数算出手段が算出した変位比例個数に基づいて前記測定対象の物理量を算出する物理量算出手段とを備え、前記符号付与手段は、前記第１、第２の個数算出手段の最新の算出結果のうち大きい方の算出結果と、この算出結果よりも過去の、前記第１、第２の個数算出手段の符号付き算出結果を用いて算出された前記距離比例個数の２倍数との大小関係、前記第１、第２の個数算出手段の算出結果の増減方向の一致不一致、あるいは前記第１、第２の個数算出手段の算出結果の平均値の変化に応じて、前記第１、第２の個数算出手段の算出結果に正負の符号を付与することを特徴とするものである。 The physical quantity sensor (first embodiment) of the present invention includes a first semiconductor laser that emits a first laser beam to a measurement target, and a second laser that is parallel to the first laser beam on the measurement target. A second semiconductor laser that emits light; a first oscillation wavelength modulator that operates the first semiconductor laser so that at least an oscillation period in which the oscillation wavelength continuously increases monotonously exists; and Second oscillation wavelength modulation means for operating the second semiconductor laser so that the increase / decrease of the oscillation wavelength is opposite to that of the semiconductor laser, the first laser beam, and the return light of the laser beam from the measurement object The first detection means for detecting an electrical signal including an interference waveform generated by the self-coupling effect between the second laser beam and the interference waveform generated by the self-coupling effect between the second laser beam and the return beam of the laser beam from the measurement target Second detection means for detecting an electrical signal including the first and second measurement means for measuring the period of the interference waveform included in the output signals of the first and second detection means each time the interference waveform is input. a signal extraction means, the first, and the first, second count calculating means for calculating the number of interference waveforms per unit each time from the measurement results of the second signal extraction means, first this, the second A sign assigning means for assigning a positive or negative sign to the calculation result of the number calculating means, and an average value of the signed calculation results of the first and second number calculating means given the sign by the sign providing means. A distance proportional number calculating means for obtaining a distance proportional number that is the number of interference waveforms proportional to an average distance between the semiconductor laser and the measurement object; and the first number given by the sign providing means. The latest sign of the calculation means The absolute value of the difference between the calculated result and the average value of the signed calculation results of the first and second number calculating means before the calculated result is calculated, or the sign is given by the sign assigning means. The absolute difference between the latest signed calculation result of the second number calculation means and the average value of the signed calculation results of the first and second number calculation means in the past from the calculation result. A displacement proportional number calculating means for calculating a displacement proportional number that is the number of interference waveforms proportional to the displacement of the measurement object by calculating a value or calculating an average value of the two absolute values; Physical quantity calculating means for calculating the physical quantity of the measurement object based on the signed calculation results of the first and second number calculating means and the displacement proportional number calculated by the displacement proportional number calculating means, which are given signs by the means equipped with a door, The sign assigning means includes a larger calculation result of the latest calculation results of the first and second number calculation means, and a sign of the first and second number calculation means that is earlier than the calculation result. The size relationship with the double of the distance proportional number calculated using the attached calculation result, the coincidence mismatch of the increase / decrease direction of the calculation result of the first and second number calculation means, or the first and second numbers In accordance with a change in the average value of the calculation results of the calculation means, a positive or negative sign is added to the calculation results of the first and second number calculation means .

また、本発明の物理量センサ（第２の実施の形態）は、測定対象に第１のレーザ光を放射する第１の半導体レーザと、前記測定対象に前記第１のレーザ光と平行に第２のレーザ光を放射する第２の半導体レーザと、少なくとも発振波長が連続的に単調増加する発振期間が繰り返し存在するように前記第１の半導体レーザを動作させる第１の発振波長変調手段と、前記第１の半導体レーザと発振波長の増減が逆になるように前記第２の半導体レーザを動作させる第２の発振波長変調手段と、前記第１のレーザ光とこのレーザ光の前記測定対象からの戻り光との自己結合効果によって生じる干渉波形を含む電気信号を検出する第１の検出手段と、前記第２のレーザ光とこのレーザ光の前記測定対象からの戻り光との自己結合効果によって生じる干渉波形を含む電気信号を検出する第２の検出手段と、前記第１、第２の検出手段の出力信号に含まれる干渉波形の周期をそれぞれ干渉波形が入力される度に計測する第１、第２の信号抽出手段と、この第１、第２の信号抽出手段の計測結果からそれぞれ単位時間当たりの干渉波形の数を算出する第１、第２の個数算出手段と、この第１、第２の個数算出手段の算出結果に基づいて、前記測定対象が微小変位状態にあると仮定した場合と変位状態にあると仮定した場合の各々について前記測定対象の物理量の候補値を算出する物理量候補値算出手段と、前記第１の個数算出手段の算出結果の時間変化に対して前記第２の個数算出手段の算出結果の時間変化が逆方向の場合、前記測定対象が微小変位状態であると判定し、前記第１の個数算出手段の算出結果の時間変化に対して前記第２の個数算出手段の算出結果の時間変化が同方向の場合、前記測定対象が変位状態であると判定する状態判定手段と、前記状態判定手段の判定結果に基づいて前記候補値の選定を行い、前記測定対象の物理量を確定する物理量確定手段とを備えることを特徴とするものである。 The physical quantity sensor of the present invention (second embodiment) includes a first semiconductor laser that emits a first laser beam to a measurement target, and a second parallel to the first laser beam on the measurement target. A second semiconductor laser that emits the laser light, and a first oscillation wavelength modulation unit that operates the first semiconductor laser so that at least an oscillation period in which the oscillation wavelength continuously increases monotonously exists, Second oscillation wavelength modulation means for operating the second semiconductor laser so that the increase / decrease of the oscillation wavelength is opposite to that of the first semiconductor laser, the first laser beam, and the laser beam from the measurement target First detection means for detecting an electrical signal including an interference waveform caused by a self-coupling effect with return light, and the self-coupling effect between the second laser light and the return light from the measurement target of the laser light Dried Second detection means for detecting an electrical signal including a waveform, and first and first measurements of the period of the interference waveform included in the output signals of the first and second detection means each time the interference waveform is input. Two signal extracting means, first and second number calculating means for calculating the number of interference waveforms per unit time from the measurement results of the first and second signal extracting means, and the first and second number extracting means. Based on the calculation result of the number calculation means, the physical quantity candidate value for calculating the physical quantity candidate value of the measurement target for each of the case where the measurement target is assumed to be in a minute displacement state and the case where the measurement target is assumed to be in a displacement state When the time change of the calculation result of the second number calculation means is opposite to the time change of the calculation result of the calculation means and the first number calculation means, it is determined that the measurement object is in a minute displacement state And the first number calculating means If the time change of the calculation results of the second number calculating means with respect to the time change of the calculation result is the same direction, and determines the state determining means and the measurement target is in the displacement state, the determination result of said state determining means And a physical quantity determination means for selecting the candidate value based on the above and determining the physical quantity of the measurement target.

また、本発明の物理量センサの１構成例（第１の実施の形態）において、前記符号付与手段は、前記第１、第２の個数算出手段の算出結果のうち大きい方の算出結果が前記距離比例個数の２倍数よりも小さい場合、前記第１の個数算出手段の算出結果の時間変化に対して前記第２の個数算出手段の算出結果の時間変化が逆方向の場合、あるいは前記第１、第２の個数算出手段の算出結果の平均値に変化が無い場合、前記第１、第２の個数算出手段の算出結果にそれぞれ正の符号を付与した符号付き算出結果を出力し、前記第１、第２の個数算出手段の算出結果のうち大きい方の算出結果が前記距離比例個数の２倍数以上の場合、前記第１の個数算出手段の算出結果の時間変化に対して前記第２の個数算出手段の算出結果の時間変化が同方向の場合、あるいは前記第１、第２の個数算出手段の算出結果の平均値が変化した場合、前記第１、第２の個数算出手段の算出結果のうち大きい方の算出結果に正の符号を付与し、小さい方の算出結果に負の符号を付与した符号付き算出結果を出力し、前記物理量算出手段は、前記第１、第２の半導体レーザの最小発振波長および最大発振波長と前記符号付与手段によって符号が与えられた符号付き算出結果に基づいて前記測定対象との距離を算出し、前記第１、第２の半導体レーザの平均発振波長と前記変位比例個数算出手段が算出した変位比例個数に基づいて前記測定対象の速度を算出することを特徴とするものである。   Further, in one configuration example (first embodiment) of the physical quantity sensor of the present invention, the sign assigning unit has a larger calculation result of the distances calculated by the first and second number calculation units. When the time change of the calculation result of the second number calculation means is in the opposite direction to the time change of the calculation result of the first number calculation means, When there is no change in the average value of the calculation results of the second number calculation means, a signed calculation result obtained by adding a positive sign to the calculation results of the first and second number calculation means is output, and the first When the larger calculation result among the calculation results of the second number calculation means is equal to or greater than twice the distance proportional number, the second number with respect to the time change of the calculation result of the first number calculation means The time change of the calculation result of the calculation means is the same direction Or when the average value of the calculation results of the first and second number calculation means changes, a positive sign is given to the larger calculation result of the calculation results of the first and second number calculation means The signed calculation result obtained by adding a negative sign to the smaller calculation result is output, and the physical quantity calculation means includes the minimum and maximum oscillation wavelengths of the first and second semiconductor lasers, and the sign addition means. The distance from the object to be measured is calculated based on the signed calculation result given by the sign, and the average oscillation wavelength of the first and second semiconductor lasers and the displacement proportional number calculated by the displacement proportional number calculating means are calculated. Based on this, the speed of the measurement object is calculated.

また、本発明の物理量センサの１構成例（第２の実施の形態）において、前記物理量候補値算出手段は、前記測定対象の状態を微小変位状態あるいは前記微小変位状態よりも動きが急な変位状態のいずれかであるとし、前記測定対象が微小変位状態と仮定した場合と変位状態と仮定した場合の各々について、前記第１、第２の半導体レーザの最小発振波長および最大発振波長と前記第１、第２の個数算出手段の算出結果から前記測定対象との距離の候補値と前記測定対象の速度の候補値を算出し、前記状態判定手段は、前記第１の個数算出手段の算出結果の時間変化に対して前記第２の個数算出手段の算出結果の時間変化が逆方向の場合、前記測定対象が微小変位状態にあると判定し、前記第１の個数算出手段の算出結果の時間変化に対して前記第２の個数算出手段の算出結果の時間変化が同方向の場合、前記測定対象が変位状態にあると判定し、前記物理量確定手段は、前記測定対象が微小変位状態と判定された場合、前記測定対象が微小変位状態と仮定して算出された前記距離および速度の候補値を前記測定対象の物理量として確定し、前記測定対象が変位状態と判定された場合、前記測定対象が変位状態と仮定して算出された前記距離および速度の候補値を前記測定対象の物理量として確定することを特徴とするものである。   Further, in one configuration example (second embodiment) of the physical quantity sensor of the present invention, the physical quantity candidate value calculating means changes the state of the measurement target to a minute displacement state or a displacement that moves more rapidly than the minute displacement state. The minimum oscillation wavelength and the maximum oscillation wavelength of the first and second semiconductor lasers and the first oscillation wavelength for each of the cases where the measurement object is assumed to be a minute displacement state and the displacement state are assumed 1. A candidate value for the distance to the measurement object and a candidate value for the speed of the measurement object are calculated from the calculation results of the first and second number calculation means, and the state determination means calculates the calculation result of the first number calculation means. When the time change of the calculation result of the second number calculation means is opposite to the time change of the time, it is determined that the measurement object is in a minute displacement state, and the time of the calculation result of the first number calculation means Against change When the time change of the calculation result of the second number calculation means is in the same direction, it is determined that the measurement object is in a displacement state, and the physical quantity determination means is determined that the measurement object is in a minute displacement state, The distance and speed candidate values calculated on the assumption that the measurement object is in a minute displacement state are determined as physical quantities of the measurement object, and when the measurement object is determined to be in a displacement state, the measurement object is in a displacement state. The distance and speed candidate values calculated on the assumption are determined as physical quantities of the measurement object.

また、本発明の物理量センサの１構成例（第１、第２の実施の形態）は、さらに、前記第１、第２の信号抽出手段の計測結果を記憶する記憶手段と、前記第１の信号抽出手段によって計測された補正対象の干渉波形の周期の直前に計測され前記記憶手段に記憶された所定数の干渉波形の周期の移動平均値と、前記第１の信号抽出手段によって計測された補正対象の干渉波形の周期の直後に計測され前記記憶手段に記憶された所定数の干渉波形の周期の移動平均値とを前記第１の信号抽出手段の計測結果について算出する第１の移動平均値算出手段と、前記第２の信号抽出手段によって計測された補正対象の干渉波形の周期の直前に計測され前記記憶手段に記憶された所定数の干渉波形の周期の移動平均値と、前記第２の信号抽出手段によって計測された補正対象の干渉波形の周期の直後に計測され前記記憶手段に記憶された所定数の干渉波形の周期の移動平均値とを前記第２の信号抽出手段の計測結果について算出する第２の移動平均値算出手段と、前記第１の信号抽出手段によって計測された補正対象の干渉波形の周期と前記第１の移動平均値算出手段によって算出された２つの移動平均値から得られる１つの値とを比較することにより、前記第１の信号抽出手段によって計測された補正対象の干渉波形の周期を補正し、この補正の結果に従って前記記憶手段に記憶された周期を更新する第１の周期補正手段と、前記第２の信号抽出手段によって計測された補正対象の干渉波形の周期と前記第２の移動平均値算出手段によって算出された２つの移動平均値から得られる１つの値とを比較することにより、前記第２の信号抽出手段によって計測された補正対象の干渉波形の周期を補正し、この補正の結果に従って前記記憶手段に記憶された周期を更新する第２の周期補正手段とを備え、前記第１、第２の個数算出手段は、前記第１、第２の信号抽出手段の計測結果から単位時間当たりの干渉波形の数を算出する代わりに、前記第１、第２の周期補正手段によって補正された干渉波形の周期からそれぞれ単位時間当たりの干渉波形の数を算出することを特徴とするものである。 Further, one configuration example (first and second embodiments) of the physical quantity sensor of the present invention further includes storage means for storing the measurement results of the first and second signal extraction means, and the first A moving average value of a predetermined number of interference waveform periods measured immediately before the period of the interference waveform to be corrected measured by the signal extraction means and stored in the storage means, and measured by the first signal extraction means A first moving average that calculates a moving average value of a period of a predetermined number of interference waveforms that is measured immediately after the period of the interference waveform to be corrected and stored in the storage means, for the measurement result of the first signal extraction means. A moving average value of a period of a predetermined number of interference waveforms measured immediately before the period of the interference waveform to be corrected measured by the second signal extraction means and stored in the storage means; 2 by the signal extraction means Secondly, a moving average value of a predetermined number of interference waveform periods measured immediately after the measured period of the interference waveform to be corrected and stored in the storage means is calculated for the measurement result of the second signal extraction means. A moving average value calculating means, a period of the interference waveform to be corrected measured by the first signal extracting means, and one moving average value obtained by the two moving average values calculated by the first moving average value calculating means. A first period for correcting the period of the interference waveform to be corrected measured by the first signal extraction unit by comparing the value and updating the period stored in the storage unit according to the result of the correction a correction unit, and one of the values obtained from the two moving average value calculated by the second period of the interference waveform of the corrected measured by the signal extracting means and the second moving average value calculating means A second period correcting unit that corrects the period of the interference waveform to be corrected, measured by the second signal extracting unit, and updates the period stored in the storage unit according to a result of the correction, by comparing And the first and second number calculating means instead of calculating the number of interference waveforms per unit time from the measurement results of the first and second signal extracting means. The number of interference waveforms per unit time is calculated from the period of the interference waveform corrected by the period correction means.

また、本発明の物理量計測方法（第１の実施の形態）は、少なくとも発振波長が連続的に単調増加する発振期間が繰り返し存在するように第１の半導体レーザを動作させる第１の発振手順と、前記第１の半導体レーザと発振波長の増減が逆になるように第２の半導体レーザを動作させる第２の発振手順と、前記第１の半導体レーザから放射された第１のレーザ光とこのレーザ光の測定対象からの戻り光との自己結合効果によって生じる干渉波形を含む電気信号を検出する第１の検出手順と、前記第２の半導体レーザから放射された第２のレーザ光とこのレーザ光の前記測定対象からの戻り光との自己結合効果によって生じる干渉波形を含む電気信号を検出する第２の検出手順と、前記第１、第２の検出手順で得られた出力信号に含まれる干渉波形の周期をそれぞれ干渉波形が入力される度に計測する第１、第２の信号抽出手順と、この第１、第２の信号抽出手順の計測結果からそれぞれ単位時間当たりの干渉波形の数を算出する第１、第２の個数算出手順と、この第１、第２の個数算出手順の算出結果に正負の符号を付与する符号付与手順と、この符号付与手順によって符号が与えられた、前記第１、第２の個数算出手順の符号付き算出結果の平均値を算出することにより、前記半導体レーザと測定対象との平均距離に比例した干渉波形の数である距離比例個数を求める距離比例個数算出手順と、前記符号付与手順によって符号が与えられた、前記第１の個数算出手順の最新の符号付き算出結果と、この算出結果よりも過去の、前記第１、第２の個数算出手順の符号付き算出結果の平均値との差の絶対値を算出するか、前記符号付与手順によって符号が与えられた、前記第２の個数算出手順の最新の符号付き算出結果と、この算出結果よりも過去の、前記第１、第２の個数算出手順の符号付き算出結果の平均値との差の絶対値を算出するか、あるいは２つの前記絶対値の平均値を算出することにより、前記測定対象の変位に比例した干渉波形の数である変位比例個数を求める変位比例個数算出手順と、前記符号付与手順によって符号が与えられた、前記第１、第２の個数算出手順の符号付き算出結果と前記変位比例個数算出手順で算出した変位比例個数に基づいて前記測定対象の物理量を算出する物理量算出手順とを備え、前記符号付与手順は、前記第１、第２の個数算出手順の最新の算出結果のうち大きい方の算出結果と、この算出結果よりも過去の、前記第１、第２の個数算出手順の符号付き算出結果を用いて算出された前記距離比例個数の２倍数との大小関係、前記第１、第２の個数算出手順の算出結果の増減方向の一致不一致、あるいは前記第１、第２の個数算出手順の算出結果の平均値の変化に応じて、前記第１、第２の個数算出手順の算出結果に正負の符号を付与することを特徴とするものである。 Further, the physical quantity measuring method (first embodiment) of the present invention includes a first oscillation procedure for operating the first semiconductor laser so that at least an oscillation period in which the oscillation wavelength continuously increases monotonously exists. , A second oscillation procedure for operating the second semiconductor laser so that the increase / decrease of the oscillation wavelength is opposite to that of the first semiconductor laser, the first laser light emitted from the first semiconductor laser, and this A first detection procedure for detecting an electric signal including an interference waveform caused by a self-coupling effect with a return light from a measurement target of the laser light; a second laser light emitted from the second semiconductor laser; and the laser Included in the second detection procedure for detecting an electrical signal including an interference waveform caused by the self-coupling effect of light with the return light from the measurement target, and the output signals obtained by the first and second detection procedures interference From the measurement results of the first and second signal extraction procedures and the first and second signal extraction procedures for measuring the shape period each time an interference waveform is input, the number of interference waveforms per unit time is calculated. first calculated, and the second number calculation procedure, first this, the sign applying procedure for applying positive and negative signs on the calculation results of the second number calculation procedure, the code is given by the sign applying procedure, A distance proportionality is obtained by calculating an average value of the signed calculation results of the first and second number calculation procedures to obtain a distance proportional number that is the number of interference waveforms proportional to the average distance between the semiconductor laser and the measurement target. The number calculation procedure, the latest signed calculation result of the first number calculation procedure to which the code is given by the sign assigning procedure, and the first and second number calculation procedures past the calculation result Of signed calculation result of The absolute value of the difference from the average value is calculated, or the latest signed calculation result of the second number calculation procedure, which is given a sign by the sign assigning procedure, 1. Calculate the absolute value of the difference from the average value of the signed calculation result of the second number calculation procedure, or calculate the average value of the two absolute values, which is proportional to the displacement of the measurement object A displacement proportional number calculation procedure for obtaining a displacement proportional number which is the number of interference waveforms, a signed calculation result of the first and second number calculation procedures, and a displacement proportional number calculation , which are given codes by the sign assigning procedure. A physical quantity calculating procedure for calculating the physical quantity of the measurement object based on the displacement proportional number calculated in the procedure , wherein the sign assigning procedure is the larger of the latest calculation results of the first and second number calculating procedures. And the calculation result of , A magnitude relationship with a double of the distance proportional number calculated using the signed calculation result of the first and second number calculation procedures in the past from the calculation result, the first and second numbers The calculation result of the first and second number calculation procedures is positive or negative according to the coincidence / mismatch of the calculation results of the calculation procedure or the change in the average value of the calculation results of the first and second number calculation procedures. Is given .

また、本発明の物理量計測方法（第２の実施の形態）は、少なくとも発振波長が連続的に単調増加する発振期間が繰り返し存在するように第１の半導体レーザを動作させる第１の発振手順と、前記第１の半導体レーザと発振波長の増減が逆になるように第２の半導体レーザを動作させる第２の発振手順と、前記第１の半導体レーザから放射された第１のレーザ光とこのレーザ光の測定対象からの戻り光との自己結合効果によって生じる干渉波形を含む電気信号を検出する第１の検出手順と、前記第２の半導体レーザから放射された第２のレーザ光とこのレーザ光の前記測定対象からの戻り光との自己結合効果によって生じる干渉波形を含む電気信号を検出する第２の検出手順と、前記第１、第２の検出手順で得られた出力信号に含まれる干渉波形の周期をそれぞれ干渉波形が入力される度に計測する第１、第２の信号抽出手順と、この第１、第２の信号抽出手順の計測結果からそれぞれ単位時間当たりの干渉波形の数を算出する第１、第２の個数算出手順と、この第１、第２の個数算出手順の算出結果に基づいて、前記測定対象が微小変位状態にあると仮定した場合と変位状態にあると仮定した場合の各々について前記測定対象の物理量の候補値を算出する物理量候補値算出手順と、前記第１の個数算出手順の算出結果の時間変化に対して前記第２の個数算出手順の算出結果の時間変化が逆方向の場合、前記測定対象が微小変位状態であると判定し、前記第１の個数算出手順の算出結果の時間変化に対して前記第２の個数算出手順の算出結果の時間変化が同方向の場合、前記測定対象が変位状態であると判定する状態判定手順と、前記状態判定手順の判定結果に基づいて前記候補値の選定を行い、前記測定対象の物理量を確定する物理量確定手順とを備えることを特徴とするものである。 The physical quantity measurement method (second embodiment) of the present invention includes a first oscillation procedure for operating the first semiconductor laser so that at least an oscillation period in which the oscillation wavelength continuously increases monotonously exists. , A second oscillation procedure for operating the second semiconductor laser so that the increase / decrease of the oscillation wavelength is opposite to that of the first semiconductor laser, the first laser light emitted from the first semiconductor laser, and this A first detection procedure for detecting an electric signal including an interference waveform caused by a self-coupling effect with a return light from a measurement target of the laser light; a second laser light emitted from the second semiconductor laser; and the laser Included in the second detection procedure for detecting an electrical signal including an interference waveform caused by the self-coupling effect of light with the return light from the measurement target, and the output signals obtained by the first and second detection procedures interference From the measurement results of the first and second signal extraction procedures and the first and second signal extraction procedures for measuring the shape period each time an interference waveform is input, the number of interference waveforms per unit time is calculated. Based on the first and second number calculation procedures to be calculated and the calculation results of the first and second number calculation procedures, it is assumed that the measurement object is in a minute displacement state and a displacement state. The physical quantity candidate value calculation procedure for calculating the candidate value of the physical quantity to be measured for each of the measurement results, and the calculation result of the second number calculation procedure with respect to the time change of the calculation result of the first number calculation procedure. When the time change is in the reverse direction, it is determined that the measurement object is in a minute displacement state, and the time change of the calculation result of the second number calculation procedure is changed with respect to the time change of the calculation result of the first number calculation procedure. Are in the same direction, Characterized but the state determination procedure determines that the displacement state, performs selection of the determination result to the candidate values based of the state determination procedure, further comprising a physical quantity determined procedure for determining the physical quantity of the measurement object Is.

本発明によれば、発振波長の増減が逆になる第１、第２の半導体レーザからそれぞれレーザ光を測定対象に同時に放射させ、第１、第２の検出手段の出力信号に含まれる干渉波形の周期を計測し、２つの計測結果からそれぞれ単位時間当たりの干渉波形の数を算出し、２つの算出結果のうち大きい方の算出結果とこの算出結果よりも過去の算出結果を用いて算出された、半導体レーザと測定対象との平均距離に比例した干渉波形の数である距離比例個数の２倍数との大小関係、２つの算出結果の増減方向の一致不一致、あるいは２つの算出結果の平均値の変化に応じて、２つの算出結果に正負の符号を付与し、符号が与えられた最新の符号付き算出結果と過去の符号付き算出結果の平均値との差の絶対値を算出することにより変位比例個数を求め、符号付き算出結果と変位比例個数に基づいて測定対象の物理量を算出することにより、測定対象の物理量を従来よりも高い分解能で計測することができる。また、従来の物理量センサでは、半導体レーザの発振波長変調の搬送波の半周期分の計測時間がかかるのに対して、本発明では、１つ１つの干渉波形の周期を単位時間当たりの干渉波形の数に変換して、この干渉波形の数から測定対象の物理量を求めることができるので、計測に要する時間を大幅に短縮することができ、速度の変化が速い物体にも対応することができる。   According to the present invention, laser beams are simultaneously emitted from the first and second semiconductor lasers whose oscillation wavelengths increase and decrease are opposite to each other, and the interference waveforms included in the output signals of the first and second detection means. The number of interference waveforms per unit time is calculated from each of the two measurement results, and the larger one of the two calculation results and the past calculation result are used to calculate the number of interference waveforms. In addition, the magnitude relationship between the number of interference waveforms proportional to the average distance between the semiconductor laser and the object to be measured and the double of the proportional number of distances, the coincidence / mismatch of the increase / decrease direction of the two calculation results, or the average value of the two calculation results By adding a positive or negative sign to the two calculation results in accordance with the change of, and calculating the absolute value of the difference between the latest signed calculation result given the sign and the average value of past signed calculation results Displacement proportional number Because, by calculating the physical quantity to be measured on the basis of the signed calculated results and the displacement-proportional count, the physical quantity to be measured can be measured with a high resolution than before. Further, in the conventional physical quantity sensor, it takes a measurement time corresponding to a half cycle of the carrier wave of the oscillation wavelength modulation of the semiconductor laser, whereas in the present invention, the cycle of each interference waveform is set to the interference waveform per unit time. Since the physical quantity of the object to be measured can be obtained from the number of interference waveforms by converting it into a number, the time required for measurement can be greatly shortened, and an object with a fast change in speed can be dealt with.

また、本発明では、発振波長の増減が逆になる第１、第２の半導体レーザからそれぞれレーザ光を測定対象に同時に放射させ、第１、第２の検出手段の出力信号に含まれる干渉波形の周期を計測し、２つの計測結果からそれぞれ単位時間当たりの干渉波形の数を算出し、２つの算出結果に基づいて測定対象の物理量の候補値を算出し、２つの算出結果の増減方向の一致不一致に基づいて測定対象の状態を判定し、この判定結果に基づいて候補値の選定を行い、測定対象の物理量を確定することにより、測定対象の物理量を従来よりも高い分解能で計測することができる。また、本発明では、従来の物理量センサに比べて計測に要する時間を大幅に短縮することができ、速度の変化が速い物体にも対応することができる。   Further, in the present invention, laser light is simultaneously emitted from the first and second semiconductor lasers in which the increase and decrease of the oscillation wavelength are reversed, and the interference waveform included in the output signals of the first and second detection means. The number of interference waveforms per unit time is calculated from the two measurement results, the candidate value of the physical quantity to be measured is calculated based on the two calculation results, and the increase / decrease direction of the two calculation results is calculated. Measure the physical quantity of the measurement target with higher resolution than before by determining the state of the measurement target based on the coincidence mismatch, selecting the candidate value based on this determination result, and determining the physical quantity of the measurement target Can do. Further, in the present invention, the time required for measurement can be greatly reduced as compared with the conventional physical quantity sensor, and it is possible to deal with an object whose speed changes rapidly.

また、本発明では、第１、第２の信号抽出手段によって計測された干渉波形の周期を補正することにより、測定対象の物理量の計測精度を向上させることができる。   In the present invention, the measurement accuracy of the physical quantity to be measured can be improved by correcting the period of the interference waveform measured by the first and second signal extraction means.

本発明の第１の実施の形態に係る物理量センサの構成を示すブロック図である。It is a block diagram which shows the structure of the physical quantity sensor which concerns on the 1st Embodiment of this invention. 本発明の第１の実施の形態における電流−電圧変換増幅部の出力電圧波形およびフィルタ部の出力電圧波形を模式的に示す波形図である。It is a wave form diagram showing typically the output voltage waveform of the current-voltage conversion amplification part in the 1st embodiment of the present invention, and the output voltage waveform of a filter part. モードホップパルスについて説明するための図である。It is a figure for demonstrating a mode hop pulse. 半導体レーザの発振波長とフォトダイオードの出力波形との関係を示す図である。It is a figure which shows the relationship between the oscillation wavelength of a semiconductor laser, and the output waveform of a photodiode. 本発明の第１の実施の形態における信号抽出部の動作を説明するための図である。It is a figure for demonstrating operation | movement of the signal extraction part in the 1st Embodiment of this invention. 本発明の第１の実施の形態における演算部の構成を示すブロック図である。It is a block diagram which shows the structure of the calculating part in the 1st Embodiment of this invention. 本発明の第１の実施の形態における演算部の動作を示すフローチャートである。It is a flowchart which shows operation | movement of the calculating part in the 1st Embodiment of this invention. 本発明の第１の実施の形態における周期補正部の動作を説明するための図である。It is a figure for demonstrating operation | movement of the period correction | amendment part in the 1st Embodiment of this invention. 本発明の第１の実施の形態におけるモードホップパルスの周期の補正原理を説明するための図である。It is a figure for demonstrating the correction principle of the period of the mode hop pulse in the 1st Embodiment of this invention. モードホップパルスの周期の度数分布を示す図である。It is a figure which shows frequency distribution of the period of a mode hop pulse. 物体が等速運動している場合の物体との距離の変化を示す図である。It is a figure which shows the change of the distance with an object in case the object is moving at constant velocity. 物体が等速運動している場合のモードホップパルスの周期の度数分布を示す図である。It is a figure which shows the frequency distribution of the period of a mode hop pulse in case an object is moving at constant velocity. 物体の速度が変化している場合の物体との距離の変化および物体の速度の変化を示す図である。It is a figure which shows the change of the distance with an object in case the speed of an object is changing, and the change of the speed of an object. 物体の速度が変化している場合のモードホップパルスの周期の度数分布を示す図である。It is a figure which shows the frequency distribution of the period of a mode hop pulse when the speed of an object is changing. 本発明の第１の実施の形態における個数算出部の算出結果の時間変化の例を示す図である。It is a figure which shows the example of the time change of the calculation result of the number calculation part in the 1st Embodiment of this invention. 本発明の第２の実施の形態における演算部の構成を示すブロック図である。It is a block diagram which shows the structure of the calculating part in the 2nd Embodiment of this invention. 本発明の第２の実施の形態における演算部の動作を示すフローチャートである。It is a flowchart which shows operation | movement of the calculating part in the 2nd Embodiment of this invention. 本発明の第３の実施の形態における演算部の構成を示すブロック図である。It is a block diagram which shows the structure of the calculating part in the 3rd Embodiment of this invention. 本発明の第３の実施の形態における演算部の動作を示すフローチャートである。It is a flowchart which shows operation | movement of the calculating part in the 3rd Embodiment of this invention. 本発明の第４の実施の形態における演算部の動作を示すフローチャートである。It is a flowchart which shows operation | movement of the calculating part in the 4th Embodiment of this invention. 本発明の第５の実施の形態に係る物理量センサの構成を示すブロック図である。It is a block diagram which shows the structure of the physical quantity sensor which concerns on the 5th Embodiment of this invention. 本発明の第１〜第５の実施の形態における半導体レーザの発振波長の時間変化の他の例を示す図である。It is a figure which shows the other example of the time change of the oscillation wavelength of the semiconductor laser in the 1st-5th embodiment of this invention. 本発明の第１〜第５の実施の形態における半導体レーザの発振波長の時間変化の他の例を示す図である。It is a figure which shows the other example of the time change of the oscillation wavelength of the semiconductor laser in the 1st-5th embodiment of this invention. 従来の物理量センサの構成を示すブロック図である。It is a block diagram which shows the structure of the conventional physical quantity sensor. 図２４の物理量センサにおける半導体レーザの発振波長の時間変化の例を示す図である。It is a figure which shows the example of the time change of the oscillation wavelength of a semiconductor laser in the physical quantity sensor of FIG.

［第１の実施の形態］
以下、本発明の実施の形態について図面を参照して説明する。図１は本発明の第１の実施の形態に係る物理量センサの構成を示すブロック図である。図１の物理量センサは、測定対象の物体１０にレーザ光を放射する第１、第２の半導体レーザ１−１，１−２と、半導体レーザ１−１，１−２の光出力をそれぞれ電気信号に変換するフォトダイオード２−１，２−２と、半導体レーザ１−１，１−２からの光をそれぞれ集光して物体１０に照射すると共に、物体１０からの戻り光を集光して半導体レーザ１−１，１−２に入射させるレンズ３−１，３−２と、半導体レーザ１−１，１−２を駆動する第１、第２の発振波長変調手段となるレーザドライバ４−１，４−２と、フォトダイオード２−１，２−２の出力電流をそれぞれ電圧に変換して増幅する電流−電圧変換増幅部５−１，５−２と、電流−電圧変換増幅部５−１，５−２の出力電圧からそれぞれ搬送波を除去するフィルタ部６−１，６−２と、フィルタ部６−１，６−２の出力電圧に含まれる自己結合信号であるＭＨＰの周期を計測する信号抽出部７−１，７−２と、物体１０との距離および物体１０の速度を算出する演算部８と、演算部８の算出結果を表示する表示部９とを有する。 [First Embodiment]
Hereinafter, embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a block diagram showing a configuration of a physical quantity sensor according to the first embodiment of the present invention. The physical quantity sensor in FIG. 1 electrically outputs the optical outputs of the first and second semiconductor lasers 1-1 and 1-2 and the semiconductor lasers 1-1 and 1-2 that emit laser light to the object 10 to be measured. The light from the photodiodes 2-1 and 2-2 to be converted into signals and the light from the semiconductor lasers 1-1 and 1-2 are condensed to irradiate the object 10, and the return light from the object 10 is condensed. Lenses 3-1 and 3-2 incident on the semiconductor lasers 1-1 and 1-2, and a laser driver 4 serving as first and second oscillation wavelength modulating means for driving the semiconductor lasers 1-1 and 1-2. -1,4-2, and current-voltage conversion amplification units 5-1 and 5-2 for amplifying the output currents of the photodiodes 2-1 and 2-2 by converting them into voltages, and current-voltage conversion amplification units Filter section 6- removes the carrier wave from the output voltages 5-1 and 5-2, respectively. 6-2, and the distance between the object extraction unit 7-1 and 7-2 that measures the period of MHP that is a self-coupled signal included in the output voltages of the filter units 6-1 and 6-2, and the object 10 It has the calculating part 8 which calculates the speed of the object 10, and the display part 9 which displays the calculation result of the calculating part 8.

フォトダイオード２−１と電流−電圧変換増幅部５−１とは第１の検出手段を構成し、フォトダイオード２−２と電流−電圧変換増幅部５−２とは第２の検出手段を構成している。以下、説明容易にするために、半導体レーザ１には、モードホッピング現象を持たない型（ＶＣＳＥＬ型、ＤＦＢレーザ型）のものが用いられているものと想定する。   The photodiode 2-1 and the current-voltage conversion amplification unit 5-1 constitute first detection means, and the photodiode 2-2 and the current-voltage conversion amplification unit 5-2 constitute second detection means. doing. Hereinafter, for ease of explanation, it is assumed that a semiconductor laser 1 of a type that does not have a mode hopping phenomenon (VCSEL type, DFB laser type) is used.

レーザドライバ４−１，４−２は、時間に関して一定の変化率で増減を繰り返す三角波駆動電流を注入電流として半導体レーザ１−１，１−２に供給する。これにより、半導体レーザ１−１，１−２は、注入電流の大きさに比例して発振波長が一定の変化率で連続的に増加する第１の発振期間Ｐ１と発振波長が一定の変化率で連続的に減少する第２の発振期間Ｐ２とを交互に繰り返すように駆動される。   The laser drivers 4-1 and 4-2 supply triangular wave drive currents that repeatedly increase and decrease at a constant change rate with respect to time to the semiconductor lasers 1-1 and 1-2 as injection currents. As a result, the semiconductor lasers 1-1 and 1-2 have the first oscillation period P1 in which the oscillation wavelength continuously increases at a constant change rate in proportion to the magnitude of the injected current, and the change rate at which the oscillation wavelength is constant. The second oscillation period P2, which continuously decreases in step S2, is driven to alternately repeat.

このとき、レーザドライバ４−１，４−２は、半導体レーザ１−１と１−２とで発振波長の増減が逆になるように駆動電流を供給する。すなわち、半導体レーザ１−１と１−２は、発振波長の変化率の絶対値が同一で変化率の極性が逆になっている。したがって、半導体レーザ１−１の発振波長が最大値になったときに、半導体レーザ１−２の発振波長は最小値となり、半導体レーザ１−１の発振波長が最小値になったときに、半導体レーザ１−２の発振波長は最大値となる。半導体レーザ１−１の発振波形をＬＤ１、半導体レーザ１−２の発振波形をＬＤ２とすると、半導体レーザ１−１，１−２の発振波長の時間変化は、図２５に示したとおりである。本実施の形態では、発振波長の最大値λｂおよび発振波長の最小値λａはそれぞれ常に一定になされており、それらの差λｂ−λａも常に一定になされている。   At this time, the laser drivers 4-1 and 4-2 supply a drive current so that the increase and decrease of the oscillation wavelength are reversed between the semiconductor lasers 1-1 and 1-2. That is, the semiconductor lasers 1-1 and 1-2 have the same absolute value of the change rate of the oscillation wavelength and the polarity of the change rate is reversed. Therefore, when the oscillation wavelength of the semiconductor laser 1-1 becomes the maximum value, the oscillation wavelength of the semiconductor laser 1-2 becomes the minimum value, and when the oscillation wavelength of the semiconductor laser 1-1 becomes the minimum value, the semiconductor laser 1-1 has the minimum value. The oscillation wavelength of the laser 1-2 is the maximum value. When the oscillation waveform of the semiconductor laser 1-1 is LD1, and the oscillation waveform of the semiconductor laser 1-2 is LD2, the time variation of the oscillation wavelength of the semiconductor lasers 1-1 and 1-2 is as shown in FIG. In the present embodiment, the maximum value λb of the oscillation wavelength and the minimum value λa of the oscillation wavelength are always constant, and the difference λb−λa is also always constant.

半導体レーザ１−１，１−２から出射したレーザ光は、レンズ３−１，３−２によって集光され、物体１０に入射する。このとき、半導体レーザ１−１，１−２のレーザ光は互いに平行に出射して物体１０に入射する。物体１０で反射された半導体レーザ１−１，１−２の光は、それぞれレンズ３−１，３−２によって集光され、半導体レーザ１−１，１−２に入射する。なお、レンズ３−１，３−２による集光は必須ではない。フォトダイオード２−１，２−２は、それぞれ半導体レーザ１−１，１−２の内部又はその近傍に配置され、半導体レーザ１−１，１−２の光出力を電流に変換する。電流−電圧変換増幅部５−１，５−２は、それぞれフォトダイオード２−１，２−２の出力電流を電圧に変換して増幅する。   Laser light emitted from the semiconductor lasers 1-1 and 1-2 is collected by the lenses 3-1 and 3-2 and enters the object 10. At this time, the laser beams of the semiconductor lasers 1-1 and 1-2 are emitted in parallel with each other and enter the object 10. The light of the semiconductor lasers 1-1 and 1-2 reflected by the object 10 is collected by the lenses 3-1 and 3-2, respectively, and enters the semiconductor lasers 1-1 and 1-2. Note that light collection by the lenses 3-1 and 3-2 is not essential. The photodiodes 2-1 and 2-2 are disposed inside or near the semiconductor lasers 1-1 and 1-2, respectively, and convert the optical outputs of the semiconductor lasers 1-1 and 1-2 into currents. The current-voltage conversion amplification units 5-1 and 5-2 convert the output currents of the photodiodes 2-1 and 2-2 into voltages, respectively, and amplify them.

フィルタ部６−１，６−２は、変調波から重畳信号を抽出する機能を有するものである。図２（Ａ）、図２（Ｂ）はそれぞれ電流−電圧変換増幅部５−１，５−２の出力電圧波形を模式的に示す図、図２（Ｃ）、図２（Ｄ）はそれぞれフィルタ部６−１，６−２の出力電圧波形を模式的に示す図である。これらの図は、フォトダイオード２−１，２−２の出力に相当する図２（Ａ）、図２（Ｂ）の波形（変調波）から、図２５に示したような半導体レーザ１−１，１−２の発振波形（搬送波）を除去して、図２（Ｃ）、図２（Ｄ）のＭＨＰ波形（重畳波）を抽出する過程を表している。   The filter units 6-1 and 6-2 have a function of extracting a superimposed signal from the modulated wave. 2A and 2B are diagrams schematically showing output voltage waveforms of the current-voltage conversion amplification units 5-1 and 5-2, and FIGS. 2C and 2D are respectively shown. It is a figure which shows typically the output voltage waveform of the filter parts 6-1 and 6-2. These figures show the semiconductor laser 1-1 as shown in FIG. 25 from the waveforms (modulated waves) shown in FIGS. 2A and 2B corresponding to the outputs of the photodiodes 2-1, 2-2. , 1-2 is removed, and the MHP waveform (superimposed wave) shown in FIGS. 2C and 2D is extracted.

信号抽出部７−１，７−２は、それぞれフィルタ部６−１，６−２の出力電圧に含まれるＭＨＰの周期をＭＨＰが発生する度に計測する。ここで、自己結合信号であるＭＨＰについて説明する。図３に示すように、ミラー層１０１３から物体１０までの距離をＬ、レーザの発振波長をλとすると、以下の共振条件を満足するとき、物体１０からの戻り光と半導体レーザ１の光共振器内のレーザ光は強め合い、レーザ出力がわずかに増加する。
Ｌ＝ｑλ／２ ・・・（１）
式（１）において、ｑは整数である。この現象は、物体１０からの散乱光が極めて微弱であっても、半導体レーザ１の共振器内の見かけの反射率が増加することにより、増幅作用が生じ、十分観測できる。なお、図３において、１０１９はミラーとなる誘電体多層膜である。 The signal extraction units 7-1 and 7-2 measure the period of MHP included in the output voltages of the filter units 6-1 and 6-2, respectively, every time MHP is generated. Here, the MHP that is a self-coupled signal will be described. As shown in FIG. 3, when the distance from the mirror layer 1013 to the object 10 is L and the oscillation wavelength of the laser is λ, the return light from the object 10 and the optical resonance of the semiconductor laser 1 are satisfied when the following resonance conditions are satisfied. The laser light in the chamber strengthens and the laser output increases slightly.
L = qλ / 2 (1)
In Formula (1), q is an integer. This phenomenon can be sufficiently observed even if the scattered light from the object 10 is extremely weak, because the apparent reflectance in the resonator of the semiconductor laser 1 increases, causing an amplification effect. In FIG. 3, reference numeral 1019 denotes a dielectric multilayer film to be a mirror.

図４は、半導体レーザ１の発振波長をある一定の割合で変化させたときの発振波長とフォトダイオード２の出力波形との関係を示す図である。式（１）に示したＬ＝ｑλ／２を満足したときに、戻り光と光共振器内のレーザ光の位相差が０°（同位相）になって、戻り光と光共振器内のレーザ光とが最も強め合い、Ｌ＝ｑλ／２＋λ／４のときに、位相差が１８０°（逆位相）になって、戻り光と光共振器内のレーザ光とが最も弱め合う。そのため、半導体レーザ１の発振波長を変化させていくと、レーザ出力が強くなるところと弱くなるところとが交互に繰り返し現れ、このときのレーザ出力をフォトダイオード２で検出すると、図４に示すように一定周期の階段状の波形が得られる。このような波形は一般的には干渉縞と呼ばれる。この階段状の波形、すなわち干渉縞の１つ１つがＭＨＰである。物体１０が静止している場合、ある一定時間において半導体レーザ１の発振波長を変化させた場合、測定距離に比例してＭＨＰの数は変化する。なお、物体１０が運動している場合は、ある一定時間において半導体レーザ１の発振波長を変化させた場合、ＭＨＰの数は測定距離に比例する個数と変位に比例する個数とが線形結合した数になる。   FIG. 4 is a diagram showing the relationship between the oscillation wavelength and the output waveform of the photodiode 2 when the oscillation wavelength of the semiconductor laser 1 is changed at a certain rate. When L = qλ / 2 shown in Expression (1) is satisfied, the phase difference between the return light and the laser light in the optical resonator becomes 0 ° (the same phase), and the return light and the optical resonator The laser beam is the most intense, and when L = qλ / 2 + λ / 4, the phase difference is 180 ° (reverse phase), and the return light and the laser beam in the optical resonator are most weakened. Therefore, when the oscillation wavelength of the semiconductor laser 1 is changed, a place where the laser output becomes stronger and a place where the laser output becomes weaker appear alternately. When the laser output at this time is detected by the photodiode 2, as shown in FIG. A stepped waveform with a constant period can be obtained. Such a waveform is generally called an interference fringe. Each stepped waveform, that is, each interference fringe is MHP. When the object 10 is stationary, when the oscillation wavelength of the semiconductor laser 1 is changed for a certain period of time, the number of MHPs changes in proportion to the measurement distance. When the object 10 is moving, when the oscillation wavelength of the semiconductor laser 1 is changed for a certain period of time, the number of MHPs is a linear combination of the number proportional to the measurement distance and the number proportional to the displacement. become.

図５（Ａ）〜図５（Ｄ）は信号抽出部７−１の動作を説明するための図であり、図５（Ａ）はフィルタ部６−１の出力電圧の波形、すなわちＭＨＰの波形を模式的に示す図、図５（Ｂ）はＭＨＰを２値化した波形を示す図、図５（Ｃ）は信号抽出部７−１に入力されるサンプリングクロックを示す図、図５（Ｄ）は図５（Ｂ）に対応する信号抽出部７−１の測定結果を示す図である。   FIGS. 5A to 5D are diagrams for explaining the operation of the signal extraction unit 7-1. FIG. 5A illustrates the waveform of the output voltage of the filter unit 6-1, that is, the waveform of the MHP. FIG. 5B is a diagram illustrating a waveform obtained by binarizing MHP, FIG. 5C is a diagram illustrating a sampling clock input to the signal extraction unit 7-1, and FIG. ) Is a diagram illustrating a measurement result of the signal extraction unit 7-1 corresponding to FIG.

まず、信号抽出部７−１は、図５（Ａ）に示すフィルタ部６−１の出力電圧が上昇してしきい値ＴＨ１以上になったときにハイレベルと判定し、フィルタ部６−１の出力電圧が下降してしきい値ＴＨ２（ＴＨ２＜ＴＨ１）以下になったときにローレベルと判定することにより、フィルタ部６−１の出力を２値化する。そして、信号抽出部７−１は、２値化したＭＨＰの立ち上がりエッジの周期（すなわち、ＭＨＰの周期）を立ち上がりエッジが発生する度に測定する。このとき、信号抽出部７−１は、図５（Ｃ）に示すサンプリングクロックの周期を１単位としてＭＨＰの周期を測定する。図５（Ｄ）の例では、信号抽出部７−１は、ＭＨＰの周期としてＴα，Ｔβ，Ｔγを順次測定している。図５（Ｃ）、図５（Ｄ）から明らかなように、周期Ｔα，Ｔβ，Ｔγの大きさは、それぞれ５［ｓａｍｐｌｉｎｇｓ］、４［ｓａｍｐｌｉｎｇｓ］、２［ｓａｍｐｌｉｎｇｓ］である。サンプリングクロックの周波数は、ＭＨＰの取り得る最高周波数に対して十分に高いものとする。   First, the signal extraction unit 7-1 determines that the output voltage of the filter unit 6-1 shown in FIG. 5A increases to a threshold value TH1 or higher, and determines that the level is high, and the filter unit 6-1. The output voltage of the filter section 6-1 is binarized by determining the low level when the output voltage decreases to a threshold value TH2 (TH2 <TH1) or less. The signal extraction unit 7-1 measures the binarized MHP rising edge period (that is, the MHP period) every time the rising edge occurs. At this time, the signal extraction unit 7-1 measures the MHP cycle with the sampling clock cycle shown in FIG. 5C as one unit. In the example of FIG. 5D, the signal extraction unit 7-1 sequentially measures Tα, Tβ, and Tγ as the MHP cycle. As is clear from FIGS. 5C and 5D, the periods Tα, Tβ, and Tγ are 5 [samplings], 4 [samplings], and 2 [samplings], respectively. The frequency of the sampling clock is assumed to be sufficiently higher than the highest frequency that MHP can take.

信号抽出部７−２の動作は、信号抽出部７−１と同様である。すなわち、信号抽出部７−２は、信号抽出部７−１と同じサンプリングクロックを用いて、フィルタ部６−２の出力電圧に含まれるＭＨＰの周期を計測する。信号抽出部７−１がフィルタ部６−１の出力電圧に含まれるＭＨＰの周期ＴＸを計測すると同時に、信号抽出部７−２がフィルタ部６−２の出力電圧に含まれるＭＨＰの周期ＴＹを計測するといったように、ＭＨＰの周期ＴＸとＴＹは同時に求められる。   The operation of the signal extraction unit 7-2 is the same as that of the signal extraction unit 7-1. That is, the signal extraction unit 7-2 measures the period of MHP included in the output voltage of the filter unit 6-2 using the same sampling clock as that of the signal extraction unit 7-1. The signal extraction unit 7-1 measures the MHP cycle TX included in the output voltage of the filter unit 6-1, and the signal extraction unit 7-2 calculates the MHP cycle TY included in the output voltage of the filter unit 6-2. As measured, the MHP cycles TX and TY are obtained simultaneously.

次に、演算部８は、半導体レーザ１−１，１−２の最小発振波長λａと最大発振波長λｂとＭＨＰの周期ＴＸ，ＴＹに基づいて、物体１０との距離および物体１０の速度を算出する。図６は演算部８の構成を示すブロック図、図７はこの演算部８の動作を示すフローチャートである。   Next, the calculation unit 8 calculates the distance to the object 10 and the speed of the object 10 based on the minimum oscillation wavelength λa and the maximum oscillation wavelength λb of the semiconductor lasers 1-1 and 1-2 and the MTX periods TX and TY. To do. FIG. 6 is a block diagram showing the configuration of the calculation unit 8, and FIG. 7 is a flowchart showing the operation of the calculation unit 8.

演算部８は、信号抽出部７−１，７−２の計測結果等を記憶する記憶部８０と、補正対象のＭＨＰの周期の直前に計測され記憶部８０に記憶された所定数のＭＨＰの周期の移動平均値と補正対象のＭＨＰの周期の直後に計測され記憶部８０に記憶された所定数のＭＨＰの周期の移動平均値とを信号抽出部７−１，７−２の計測結果について算出する移動平均値算出部８１−１，８１−２と、移動平均値算出部８１−１，８１−２が算出した移動平均値と信号抽出部７−１，７−２によって計測され記憶部８０に記憶された補正対象のＭＨＰの周期とを比較することにより補正対象のＭＨＰの周期を補正する周期補正部８２−１，８２−２と、周期補正部８２−１，８２−２によって補正されたＭＨＰの周期から単位時間当たりのＭＨＰの数を算出する個数算出部８３−１，８３−２と、個数算出部８３−１，８３−２の算出結果の増減方向の一致不一致に応じて個数算出部８３−１，８３−２の算出結果に正負の符号を付与する符号付与部８４と、符号付与部８４によって符号が与えられた最新の符号付き算出結果と過去の符号付き算出結果の平均値との差の絶対値を算出することにより、物体１０の変位に比例したＭＨＰの数（以下、変位比例個数とする）を求める変位比例個数算出部８５と、物体１０との距離および物体１０の速度を算出する物理量算出部８６とから構成される。   The calculation unit 8 includes a storage unit 80 that stores the measurement results and the like of the signal extraction units 7-1 and 7-2, and a predetermined number of MHPs that are measured immediately before the MHP cycle to be corrected and stored in the storage unit 80. About the measurement result of the signal extraction units 7-1 and 7-2, the moving average value of the cycle and the moving average value of the predetermined number of MHP cycles stored immediately after the MHP cycle to be corrected and stored in the storage unit 80 The moving average value calculation units 81-1 and 81-2 to be calculated and the moving average value calculated by the moving average value calculation units 81-1 and 81-2 and the signal extraction units 7-1 and 7-2 are measured and stored. The correction is performed by the period correction units 82-1 and 82-2 that correct the period of the correction target MHP by comparing the period of the correction target MHP stored in 80, and the period correction units 82-1 and 82-2. The number of MHPs per unit time from the determined MHP period In accordance with the coincidence / mismatch of the increase / decrease direction of the calculation results of the number calculation units 83-1, 83-2 and the number calculation units 83-1, 83-2 to be output, By calculating the absolute value of the difference between the sign adding unit 84 for adding a positive and negative sign, and the average value of the latest signed calculation result given by the sign adding unit 84 and the past signed calculation result, It includes a displacement proportional number calculation unit 85 that calculates the number of MHPs proportional to the displacement of the object 10 (hereinafter referred to as a displacement proportional number), and a physical quantity calculation unit 86 that calculates the distance to the object 10 and the speed of the object 10. The

記憶部８０は、信号抽出部７−１，７−２の計測結果を記憶する。移動平均値算出部８１−１は、信号抽出部７−１によって計測された補正対象のＭＨＰの周期の直前に計測され記憶部８０に記憶された所定数のＭＨＰの周期の移動平均値ＴＡＸと、信号抽出部７−１によって計測された補正対象のＭＨＰの周期の直後に計測され記憶部８０に記憶された所定数のＭＨＰの周期の移動平均値ＴＢＸとを信号抽出部７−１の計測結果について算出する（図７ステップＳ１０）。   The storage unit 80 stores the measurement results of the signal extraction units 7-1 and 7-2. The moving average value calculation unit 81-1 measures the moving average value TAX of a predetermined number of MHP cycles measured and stored in the storage unit 80 immediately before the correction target MHP cycle measured by the signal extraction unit 7-1. Measurement of the moving average value TBX of a predetermined number of MHP cycles, which is measured immediately after the MHP cycle to be corrected measured by the signal extraction unit 7-1 and stored in the storage unit 80, is measured by the signal extraction unit 7-1. The result is calculated (step S10 in FIG. 7).

移動平均値算出部８１−１の処理と並行して移動平均値算出部８１−２は、信号抽出部７−２によって計測された補正対象のＭＨＰの周期の直前に計測され記憶部８０に記憶された所定数のＭＨＰの周期の移動平均値ＴＡＹと、信号抽出部７−２によって計測された補正対象のＭＨＰの周期の直後に計測され記憶部８０に記憶された所定数のＭＨＰの周期の移動平均値ＴＢＹとを信号抽出部７−２の計測結果について算出する（図７ステップＳ１０）。   In parallel with the process of the moving average value calculating unit 81-1, the moving average value calculating unit 81-2 is measured immediately before the period of the correction target MHP measured by the signal extracting unit 7-2 and stored in the storage unit 80. The moving average value TAY of the predetermined number of MHP cycles and the predetermined number of MHP cycles stored in the storage unit 80 measured immediately after the correction target MHP cycle measured by the signal extraction unit 7-2. The moving average value TBY is calculated for the measurement result of the signal extraction unit 7-2 (step S10 in FIG. 7).

移動平均値算出部８１−１，８１−２は、それぞれ信号抽出部７−１，７−２から新たな計測結果が出力され記憶部８０に格納される度に、移動平均値算出済みの現在の補正対象の周期よりも１回新しい計測結果を新たな補正対象の周期として、移動平均値ＴＡＸ，ＴＢＸ，ＴＡＹ，ＴＢＹの算出処理を行う。移動平均値算出部８１−１，８１−２の算出結果は、記憶部８０に格納される。   Each time the moving average value calculation units 81-1 and 81-2 output new measurement results from the signal extraction units 7-1 and 7-2 and store them in the storage unit 80, the moving average value has been calculated. The moving average values TAX, TBX, TAY, and TBY are calculated using the measurement result that is one time newer than the correction target period as a new correction target period. The calculation results of the moving average value calculation units 81-1 and 81-2 are stored in the storage unit 80.

次に、周期補正部８２−１は、移動平均値算出部８１−１が算出した移動平均値ＴＡＸ，ＴＢＸと信号抽出部７−１によって計測され記憶部８０に記憶された補正対象のＭＨＰの周期とを比較することにより、補正対象のＭＨＰの周期を補正する（図７ステップＳ１１）。周期補正部８２−１は、この補正を信号抽出部７−１から新たな計測結果が出力され記憶部８０に格納される度に行う。図８（Ａ）〜図８（Ｄ）は周期補正部８２−１の動作を説明するための図である。   Next, the cycle correction unit 82-1 includes the moving average values TAX and TBX calculated by the moving average value calculation unit 81-1 and the MHP to be corrected measured by the signal extraction unit 7-1 and stored in the storage unit 80. The period of the correction target MHP is corrected by comparing the period (step S11 in FIG. 7). The period correction unit 82-1 performs this correction every time a new measurement result is output from the signal extraction unit 7-1 and stored in the storage unit 80. 8A to 8D are diagrams for explaining the operation of the period correction unit 82-1.

周期補正部８２−１は、移動平均値算出部８１−１が算出した２つの移動平均値ＴＡＸ，ＴＢＸのうち小さい方をＴ１、大きい方をＴ２とし、Ｔｘ＝Ｔ１＋α・（Ｔ２−Ｔ１）としたとき（０≦α≦１）、図８（Ａ）に示すように補正対象のＭＨＰの周期Ｔがｋ・Ｔｘ未満の場合は（ｋは１未満の正の値）、図８（Ｂ）に示すように補正対象のＭＨＰの周期Ｔと次に計測されたＭＨＰの周期Ｔｎｅｘｔとを合わせた周期を補正後のＭＨＰの周期Ｔ’とし、周期を合わせた波形を１つの波形とする。   The period correction unit 82-1 sets T1 as the smaller one of the two moving average values TAX and TBX calculated by the moving average value calculation unit 81-1, and T2, and Tx = T1 + α · (T2−T1). 8 (0 ≦ α ≦ 1), when the period T of the correction target MHP is less than k · Tx as shown in FIG. 8A (k is a positive value less than 1), FIG. 8B As shown in FIG. 5, the period obtained by combining the MHP period T to be corrected and the MHP period Tnext measured next is defined as the corrected MHP period T ′, and the combined waveform is a single waveform.

また、周期補正部８２−１は、補正対象のＭＨＰの周期Ｔが（ｍ−０．５）・Ｔｘ以上で（ｍ＋０．５）・Ｔｘ未満の場合は（ｍは２以上の自然数）、補正対象のＭＨＰの周期Ｔをｍ等分した周期をそれぞれ補正後の周期とし、補正後の周期の波形がｍ個あるものとする。図８（Ｃ）の例は、ｍ＝２で補正対象のＭＨＰの周期Ｔが１．５Ｔｘ以上２．５Ｔｘ未満の場合であり、この場合、図８（Ｄ）に示すように補正対象のＭＨＰの周期ＴがＴｄｉｖ１，Ｔｄｉｖ２に２等分される。   Further, the period correction unit 82-1 corrects the correction when the period T of the MHP to be corrected is (m−0.5) · Tx or more and less than (m + 0.5) · Tx (m is a natural number of 2 or more). It is assumed that a period obtained by equally dividing the target MHP period T into m equal parts is a period after correction, and there are m waveforms with the period after correction. The example of FIG. 8C is a case where m = 2 and the period T of the correction target MHP is 1.5 Tx or more and less than 2.5 Tx. In this case, as shown in FIG. Is divided into two equal parts, Tdiv1 and Tdiv2.

周期補正部８２−１は、記憶部８０に記憶されている信号抽出部７−１の計測結果を、補正結果に従って更新する。したがって、図８（Ａ）、図８（Ｂ）に示した例の場合には、信号抽出部７−１の２つの計測結果が１つに合成されることになり、図８（Ｃ）、図８（Ｄ）に示した例の場合には、信号抽出部７−１の１つの計測結果が２つに分割されることになる。また、補正対象のＭＨＰの周期よりも前に計測されたＭＨＰの周期は、周期補正部８２−１によって既に補正されていることになる。つまり、移動平均値算出部８１−１が算出する移動平均値ＴＡＸは、補正済みの計測結果から算出されることになる。   The period correction unit 82-1 updates the measurement result of the signal extraction unit 7-1 stored in the storage unit 80 according to the correction result. Accordingly, in the example shown in FIGS. 8A and 8B, the two measurement results of the signal extraction unit 7-1 are combined into one, and FIG. In the case of the example shown in FIG. 8D, one measurement result of the signal extraction unit 7-1 is divided into two. In addition, the MHP cycle measured before the MHP cycle to be corrected is already corrected by the cycle correction unit 82-1. That is, the moving average value TAX calculated by the moving average value calculation unit 81-1 is calculated from the corrected measurement result.

周期補正部８２−１の処理と並行して周期補正部８２−２は、移動平均値算出部８１−２が算出した移動平均値ＴＡＹ，ＴＢＹと信号抽出部７−２によって計測され記憶部８０に記憶された補正対象のＭＨＰの周期とを比較することにより、補正対象のＭＨＰの周期を補正する（図７ステップＳ１１）。周期補正部８２−１との違いは、移動平均値ＴＡＸ，ＴＢＸの代わりに移動平均値ＴＡＹ，ＴＢＹを用いる点と、信号抽出部７−２によって計測されたＭＨＰの周期を補正する点である。これにより、周期補正部８２−２は、記憶部８０に記憶されている信号抽出部７−２の計測結果を、補正結果に従って更新する。
周期補正部８２−１，８２−２は、以上のような補正処理を信号抽出部７−１，７−２から新たな計測結果が出力され記憶部８０に格納される度に行う。 In parallel with the processing of the cycle correction unit 82-1, the cycle correction unit 82-2 is measured by the moving average values TAY and TBY calculated by the moving average value calculation unit 81-2 and the signal extraction unit 7-2, and is stored in the storage unit 80. The correction target MHP cycle is corrected by comparing the correction target MHP cycle stored in (step S11 in FIG. 7). The difference from the period correction unit 82-1 is that the moving average values TAY and TBY are used instead of the moving average values TAX and TBX, and the MHP period measured by the signal extraction unit 7-2 is corrected. . Thereby, the period correction unit 82-2 updates the measurement result of the signal extraction unit 7-2 stored in the storage unit 80 according to the correction result.
The period correction units 82-1 and 82-2 perform the correction process as described above every time new measurement results are output from the signal extraction units 7-1 and 7-2 and stored in the storage unit 80.

図９はＭＨＰの周期の補正原理を説明するための図であり、フィルタ部６−１，６−２の出力電圧の波形、すなわちＭＨＰの波形を模式的に示す図である。ただし、説明を簡単にするため、ここでの原理は物体１０が静止している場合もしくは物体１０の振動の中心が変化しない場合を説明しており、補正対象のＭＨＰの周期の比較対象として移動平均値Ｔ１，Ｔ２の代わりに、基準周期Ｔ０を用いている。基準周期Ｔ０は、物体１０が静止していたときのＭＨＰの周期、算出された距離におけるＭＨＰの周期、もしくは周期補正部８２−１，８２−２による周期補正の直前に計測された一定数のＭＨＰの周期の移動平均値のいずれかである。物体１０が動く場合の周期補正の原理については後述する。   FIG. 9 is a diagram for explaining the principle of correcting the MHP cycle, and is a diagram schematically showing the waveform of the output voltage of the filter units 6-1 and 6-2, that is, the waveform of the MHP. However, for the sake of simplicity of explanation, the principle here describes the case where the object 10 is stationary or the case where the center of vibration of the object 10 does not change, and is moved as a comparison target of the period of the correction target MHP. A reference period T0 is used instead of the average values T1 and T2. The reference period T0 is an MHP period when the object 10 is stationary, an MHP period at the calculated distance, or a fixed number measured immediately before period correction by the period correction units 82-1 and 82-2. It is one of the moving average values of the MHP period. The principle of period correction when the object 10 moves will be described later.

ＭＨＰの周期は物体１０との距離によって異なるが、物体１０との距離が不変であれば、ＭＨＰは同じ周期で出現する。しかし、ノイズのために、ＭＨＰの波形には欠落が生じたり、信号として数えるべきでない波形が生じたりして、ＭＨＰの周期に誤差が生じる。
信号の欠落が生じると、欠落が生じた箇所でのＭＨＰの周期Ｔｗは、本来の周期のおよそ２倍になる。つまり、ＭＨＰの周期が基準周期Ｔ０のおよそ２倍以上の場合には、信号に欠落が生じていると判断できる。そこで、周期Ｔｗを２等分することで、信号の欠落を補正することができる。 The period of MHP differs depending on the distance to the object 10, but if the distance to the object 10 is unchanged, the MHP appears in the same period. However, due to noise, the MHP waveform may be missing or a waveform that should not be counted as a signal may be generated, resulting in an error in the MHP cycle.
When signal loss occurs, the MHP cycle Tw at the location where the loss occurs is approximately twice the original cycle. That is, when the MHP cycle is approximately twice or more the reference cycle T0, it can be determined that the signal is missing. Therefore, the signal loss can be corrected by dividing the period Tw into two equal parts.

また、ノイズをカウントした箇所でのＭＨＰの周期Ｔｓは、少なくとも１つの周期は本来の周期のおよそ０．５倍以下になる。つまり、ＭＨＰの周期が基準周期Ｔ０のおよそ０．５倍未満の場合には、信号を過剰に数えていると判断できる。そこで、周期Ｔｓと次に計測される周期Ｔｎｅｘｔとを加算することで、誤って数えたノイズを補正することができる。   In addition, at least one period of the MHP period Ts at the point where noise is counted is approximately 0.5 times or less of the original period. That is, when the MHP cycle is less than about 0.5 times the reference cycle T0, it can be determined that the signals are excessively counted. Therefore, by adding the period Ts and the next measured period Tnext, it is possible to correct erroneously counted noise.

以上が、ＭＨＰの周期補正の基本原理である。信号に欠落が生じたと見なす周期Ｔｗを決めるためのしきい値を基準周期Ｔ０の２倍の値とせずに、１．５倍（本実施の形態で実際に用いるのは（ｍ−０．５）倍であり、ｍ＝２の場合に１．５倍となる）とする理由は、特開２００９−４７６７６号公報に開示されている。特開２００９−４７６７６号公報に記載された原理はＭＨＰの計測結果を補正する原理であるが、ＭＨＰの周期Ｔと計数結果Ｎとは、三角波の半周期あたりのサンプリングクロック数をＭとすると、Ｔ＝Ｍ／Ｎの関係にあり、Ｍは一定値であるから、信号に欠落が生じたと見なす周期Ｔｗを決めるためのしきい値は、計数結果Ｎを補正する場合と同様に、基準周期Ｔ０の１．５倍とすればよいことが分かる。   The above is the basic principle of MHP cycle correction. Instead of setting the threshold value for determining the period Tw that the signal is considered to be missing to a value that is twice the reference period T0, the threshold value is 1.5 times (the actual use in this embodiment is (m−0.5 )), And 1.5 (when m = 2, the reason) is disclosed in Japanese Patent Laid-Open No. 2009-47676. The principle described in Japanese Patent Application Laid-Open No. 2009-47676 is a principle for correcting the measurement result of MHP. The period T of MHP and the count result N are expressed as follows: M is the number of sampling clocks per half cycle of the triangular wave. Since T = M / N and M is a constant value, the threshold value for determining the cycle Tw in which the signal is considered to be missing is the reference cycle T0 as in the case of correcting the count result N. It can be seen that it may be 1.5 times the value.

次に、物体１０が動く場合の周期の補正原理について説明する。ＭＨＰの時間当たりの数は、物体１０との距離に比例した個数と物体１０の速度に比例する個数との和で表すことができる。物体１０がある状態でＭＨＰの周期がＴの場合、個々のＭＨＰの周期の確率分布はノイズなどによってばらつきが生じ、Ｔを中心とした概ね正規分布になる。よって、物体１０が静止している場合、個々のＭＨＰの周期の確率分布も基準周期Ｔ０を中心とした正規分布になり、静止している期間のＭＨＰの周期の度数分布は、図１０に示したように基準周期Ｔ０を中心とした正規分布になる。   Next, the principle of correcting the period when the object 10 moves will be described. The number of MHPs per time can be represented by the sum of the number proportional to the distance to the object 10 and the number proportional to the speed of the object 10. When the MHP cycle is T in the state where the object 10 is present, the probability distribution of the individual MHP cycles varies due to noise or the like, and becomes a generally normal distribution centered on T. Therefore, when the object 10 is stationary, the probability distribution of each MHP cycle is also a normal distribution centered on the reference cycle T0, and the frequency distribution of the MHP cycle during the stationary period is shown in FIG. As described above, a normal distribution centered on the reference period T0 is obtained.

ここで、図１１に示すように物体１０が等速運動している場合を考える。自己結合型のレーザセンサでは、物体１０の速度に比例するＭＨＰの数と比較すると、物体１０との距離に比例するＭＨＰの数の変化は非常に小さい。このため、個々のＭＨＰの周期の確率分布は、図１１のＡ点でもＢ点でも、物体１０との平均距離に相当するＴ０から速度の大きさの分だけ周期が変化した値Ｔを中心とした正規分布になるため、Ａ点からＢ点の期間のＭＨＰの周期の度数分布も、Ｔを中心とした正規分布になる（図１２）。   Here, consider a case where the object 10 is moving at a constant speed as shown in FIG. In the self-coupled laser sensor, the change in the number of MHPs proportional to the distance to the object 10 is very small compared to the number of MHPs proportional to the speed of the object 10. For this reason, the probability distribution of the period of each MHP is centered on a value T whose period has changed from T0 corresponding to the average distance to the object 10 by the magnitude of the velocity at both point A and point B in FIG. Therefore, the frequency distribution of the MHP period during the period from point A to point B is also a normal distribution centered on T (FIG. 12).

次に、図１３（Ａ）、図１３（Ｂ）に示すように物体１０の速度が変化している場合を考える。ここでは、簡略化するために、折れ線運動を考える。すなわち、物体１０との距離Ｌを期間Ａにおける距離ＬＡと期間Ｂにおける距離ＬＢに簡略化し、同様に物体１０の速度Ｖを期間Ａにおける速度ＶＡと期間Ｂにおける速度ＶＢに簡略化する。このように物体１０の運動を簡略化すると、ＭＨＰの周期の度数分布は図１４のようになる。図１４においてＴＡは期間Ａにおける物体１０の平均速度と平均距離に対応するＭＨＰの周期、ＴＢは期間Ｂにおける物体１０の平均速度と平均距離に対応するＭＨＰの周期である。ただし、距離比例分ＬＡとＬＢは同一とみなしても良い。   Next, consider a case where the speed of the object 10 is changing as shown in FIGS. 13 (A) and 13 (B). Here, for the sake of simplicity, a polygonal line motion is considered. That is, the distance L to the object 10 is simplified to the distance LA in the period A and the distance LB in the period B, and similarly, the speed V of the object 10 is simplified to the speed VA in the period A and the speed VB in the period B. When the motion of the object 10 is simplified in this way, the frequency distribution of the MHP cycle is as shown in FIG. In FIG. 14, TA is an MHP period corresponding to the average speed and average distance of the object 10 in the period A, and TB is an MHP period corresponding to the average speed and average distance of the object 10 in the period B. However, the distance proportional component LA and LB may be regarded as the same.

物体１０の速度変化がなだらかに変化しているとしたら、図１３（Ａ）、図１３（Ｂ）の時刻ｔでの物体１０の速度は速度ＶＡとＶＢとの間にあるので、ＭＨＰの周期も周期ＴＡとＴＢとの間にある。このときのＭＨＰの周期をＴＺとすると、信号に欠落が生じて２つのＭＨＰが１つになった場合のＭＨＰの周期の確率分布は、２ＴＺを中心とした正規分布になると考えられる。また、周期ＴＺのＭＨＰがノイズで２分割された場合のＭＨＰの２つの確率分布は、０．５ＴＺを軸にした対称の形になる。したがって、ＴＡからＴＢの間の値と考えられるＴＺの周期補正を考える場合、基準周期Ｔ０の代わりに、ＴＡとＴＢの移動平均値を基準として周期補正を行うことが妥当である。以上が、物体１０が動く場合のＭＨＰの周期補正の原理である。   If the speed change of the object 10 changes gently, the speed of the object 10 at the time t in FIGS. 13A and 13B is between the speeds VA and VB, so that the MHP cycle Is also between the periods TA and TB. If the MHP period at this time is TZ, it is considered that the probability distribution of the MHP period when a signal is lost and two MHPs become one becomes a normal distribution centered on 2TZ. Further, when the MHP of the period TZ is divided into two by noise, the two probability distributions of MHP are symmetrical with 0.5 TZ as the axis. Therefore, when considering the period correction of TZ considered to be a value between TA and TB, it is appropriate to perform the period correction based on the moving average value of TA and TB instead of the reference period T0. The above is the principle of MHP cycle correction when the object 10 moves.

次に、個数算出部８３−１，８３−２は、それぞれ周期補正部８２−１，８２−２によって補正されたＭＨＰの周期から単位時間当たりのＭＨＰの数を算出する（図７ステップＳ１２）。周期補正部８２−１によって補正されたＭＨＰの周期をＴＸ’とすると、個数算出部８３−１が算出する単位時間当たりのＭＨＰの数Ｘは次式のようになる。
Ｘ＝１／ＴＸ’ ・・・（２） Next, the number calculation units 83-1 and 83-2 calculate the number of MHPs per unit time from the MHP periods corrected by the period correction units 82-1 and 82-2, respectively (step S12 in FIG. 7). . If the MHP cycle corrected by the cycle correction unit 82-1 is TX ′, the number X of MHPs per unit time calculated by the number calculation unit 83-1 is as follows.
X = 1 / TX '(2)

同様に、周期補正部８２−２によって補正されたＭＨＰの周期をＴＹ’とすると、個数算出部８３−２が算出する単位時間当たりのＭＨＰの数Ｙは次式のようになる。
Ｙ＝１／ＴＹ’ ・・・（３）
個数算出部８３−１，８３−２は、以上のような算出処理を周期補正部８２−１，８２−２によってＭＨＰの周期が補正される度に行う。個数算出部８３−１，８３−２の算出結果は、記憶部８０に格納される。なお、図８（Ｃ）、図８（Ｄ）のような例の場合、ＭＨＰの周期をｍ等分する補正が行われるが、この場合はｍ等分された周期のうちの１個の周期について式（２）または式（３）から単位時間当たりのＭＨＰの数を算出すればよい。 Similarly, if the MHP cycle corrected by the cycle correction unit 82-2 is TY ′, the number Y of MHPs per unit time calculated by the number calculation unit 83-2 is expressed by the following equation.
Y = 1 / TY '(3)
The number calculation units 83-1 and 83-2 perform the calculation process as described above every time the MHP cycle is corrected by the cycle correction units 82-1 and 82-2. The calculation results of the number calculation units 83-1 and 83-2 are stored in the storage unit 80. In the case of the example shown in FIGS. 8C and 8D, correction is performed to divide the MHP period equally into m. In this case, one period out of m equally divided periods is used. What is necessary is just to calculate the number of MHP per unit time from Formula (2) or Formula (3).

次に、符号付与部８４は、個数算出部８３−１，８３−２の算出結果Ｘ，Ｙの増減方向の一致不一致を判定し（図７ステップＳ１３）、この判定の結果に応じて個数算出部８３−１，８３−２の算出結果Ｘ，Ｙに正負の符号を付与する（図７ステップＳ１４，Ｓ１５）。   Next, the sign assigning unit 84 determines whether or not the calculation results X and Y of the number calculation units 83-1 and 83-2 are in agreement in the increase / decrease direction (Step S 13 in FIG. 7), and calculates the number according to the determination result. Positive and negative signs are assigned to the calculation results X and Y of the sections 83-1 and 83-2 (steps S14 and S15 in FIG. 7).

図１５は符号付与部８４の動作を説明するための図であり、個数算出部８３−１，８３−２の算出結果Ｘ，Ｙの時間変化を示す図である。半導体レーザ１−１，１−２と物体１０との距離の変化率が半導体レーザ１−１，１−２の発振波長変化率よりも小さい場合、個数算出部８３−１の算出結果Ｘの時間変化と個数算出部８３−２の算出結果Ｙの時間変化は、互いの位相差が１８０度の正弦波形となる。特許文献１では、このときの物体１０の状態を微小変位状態としている。   FIG. 15 is a diagram for explaining the operation of the code assigning unit 84 and is a diagram showing temporal changes in the calculation results X and Y of the number calculating units 83-1 and 83-2. When the change rate of the distance between the semiconductor lasers 1-1 and 1-2 and the object 10 is smaller than the oscillation wavelength change rate of the semiconductor lasers 1-1 and 1-2, the time of the calculation result X of the number calculation unit 83-1. The time change of the change and the calculation result Y of the number calculation unit 83-2 becomes a sine waveform having a phase difference of 180 degrees. In Patent Document 1, the state of the object 10 at this time is a minute displacement state.

一方、半導体レーザ１−１，１−２と物体１０との距離の変化率が半導体レーザ１−１，１−２の発振波長変化率よりも大きい場合、個数算出部８３−１の算出結果Ｘの時間変化は、図１５の１５０で示す負側の波形が正側に折り返された形になり、同様に個数算出部８３−２の算出結果Ｙの時間変化は、図１５の１５１で示す負側の波形が正側に折り返された形になる。特許文献１では、この算出結果Ｘ，Ｙの折り返しが生じている部分における物体１０の状態を変位状態としている。算出結果Ｘ，Ｙの折り返しが生じていない部分における物体１０の状態は、上記の微小変位状態である。   On the other hand, when the rate of change of the distance between the semiconductor lasers 1-1 and 1-2 and the object 10 is larger than the rate of change of the oscillation wavelength of the semiconductor lasers 1-1 and 1-2, the calculation result X of the number calculating unit 83-1. 15 changes to the positive waveform of the negative waveform indicated by 150 in FIG. 15. Similarly, the time change of the calculation result Y of the number calculation unit 83-2 is negative as indicated by 151 in FIG. The waveform on the side is folded back to the positive side. In Patent Document 1, the state of the object 10 in the portion where the calculation results X and Y are folded is defined as the displacement state. The state of the object 10 in the part where the calculation results X and Y are not folded is the above-described minute displacement state.

運動している物体１０の物理量を求めるためには、物体１０が変位状態であるか微小変位状態であるかを判定し、物体１０が変位状態の場合には、正側に折り返されている計数結果Ｘ，Ｙが図１５の１５０，１５１で示した軌跡を描くように補正する必要がある。
そこで、符号付与部８４は、個数算出部８３−１の算出結果Ｘの時間変化に対して個数算出部８３−２の算出結果Ｙの時間変化が逆方向の場合（図７ステップＳ１３においてＮＯ）、算出結果Ｘ，Ｙに折り返しが生じていないことになるので、物体１０が微小変位状態であると判定し、個数算出部８３−１，８３−２の最新の算出結果Ｘ，Ｙにそれぞれ正の符号を付与した符号付き算出結果Ｘ’，Ｙ’を出力する（図７ステップＳ１４）。 In order to obtain the physical quantity of the moving object 10, it is determined whether the object 10 is in a displacement state or a minute displacement state, and when the object 10 is in a displacement state, the count turned back to the positive side. It is necessary to correct the results X and Y so as to draw the locus indicated by 150 and 151 in FIG.
Therefore, the sign assigning unit 84, when the time change of the calculation result Y of the number calculation unit 83-2 is in the reverse direction with respect to the time change of the calculation result X of the number calculation unit 83-1 (NO in step S13 in FIG. 7). Since the calculation results X and Y are not folded, it is determined that the object 10 is in a minute displacement state, and the latest calculation results X and Y of the number calculation units 83-1 and 83-2 are positive. The signed calculation results X ′ and Y ′ to which the sign of “” is added are output (step S14 in FIG. 7).

また、符号付与部８４は、個数算出部８３−１の算出結果Ｘの時間変化に対して個数算出部８３−２の算出結果Ｙの時間変化が同方向の場合（図７ステップＳ１３においてＹＥＳ）、算出結果Ｘ，Ｙのどちらか一方に折り返しが生じていることになるので、物体１０が変位状態であると判定し、個数算出部８３−１，８３−２の最新の算出結果Ｘ，Ｙのうち大きい方の算出結果に正の符号を付与し、小さい方の算出結果に負の符号を付与した符号付き算出結果Ｘ’，Ｙ’を出力する（図７ステップＳ１５）。   Moreover, the code | symbol provision part 84 is the case where the time change of the calculation result Y of the number calculation part 83-2 is the same direction with respect to the time change of the calculation result X of the number calculation part 83-1, (YES in FIG. 7 step S13). Since one of the calculation results X and Y is folded, it is determined that the object 10 is in a displaced state, and the latest calculation results X and Y of the number calculation units 83-1 and 83-2 are determined. Signed calculation results X ′ and Y ′ in which a positive sign is assigned to the larger calculation result and a negative sign is assigned to the smaller calculation result are output (step S15 in FIG. 7).

個数算出部８３−１の算出結果Ｘの増減は、最新の算出結果Ｘ（ｔ）と１回前の算出結果Ｘ（ｔ−１）との差Ｘ（ｔ）−Ｘ（ｔ−１）の符号で判別することができ、個数算出部８３−２の算出結果Ｙの増減は、最新の算出結果Ｙ（ｔ）と１回前の算出結果Ｙ（ｔ−１）との差Ｙ（ｔ）−Ｙ（ｔ−１）の符号で判別することができる。このような増減の判別の結果、算出結果Ｘ，Ｙが共に増加している場合あるいは共に減少している場合は、算出結果Ｘの時間変化と算出結果Ｙの時間変化が同方向であり、物体１０が変位状態であると判定することができる。また、算出結果Ｘ，Ｙのどちらか一方が増加していて他方が減少している場合は、算出結果Ｘの時間変化と算出結果Ｙの時間変化が同方向でなく、物体１０が微小変位状態であると判定することができる。   The increase / decrease in the calculation result X of the number calculation unit 83-1 is the difference X (t) −X (t−1) between the latest calculation result X (t) and the previous calculation result X (t−1). The increase / decrease in the calculation result Y of the number calculation unit 83-2 is the difference Y (t) between the latest calculation result Y (t) and the previous calculation result Y (t-1). It can be determined by the sign of -Y (t-1). When the calculation results X and Y are both increasing or decreasing as a result of such increase / decrease discrimination, the time change of the calculation result X and the time change of the calculation result Y are in the same direction, and the object It can be determined that 10 is a displacement state. Further, when either one of the calculation results X and Y increases and the other decreases, the time change of the calculation result X and the time change of the calculation result Y are not in the same direction, and the object 10 is in a minute displacement state. It can be determined that

符号付き算出結果Ｘ’，Ｙ’は、記憶部８０に格納される。符号付与部８４は、以上のような符号付与処理を、個数算出部８３−１，８３−２によってＭＨＰの数Ｘ，Ｙが算出される度に行う。   Signed calculation results X ′ and Y ′ are stored in the storage unit 80. The code assigning unit 84 performs the above-described code assigning process each time the number calculating units 83-1 and 83-2 calculate the numbers X and Y of MHPs.

次に、変位比例個数算出部８５は、次式のように符号付与部８４によって符号が与えられた最新の符号付き算出結果Ｘ’（ｔ）とｊ（ｊは正の整数）回前から１回前までに算出された過去の符号付き算出結果Ｘ’，Ｙ’の平均値との差の絶対値を算出することにより、変位比例個数ＮＶを求める（図７ステップＳ１６）。
ＮＶ＝｜Ｘ’（ｔ）−｛Ｘ’（ｔ−ｊ）＋Ｙ’（ｔ−ｊ）＋・・・＋Ｘ’（ｔ−１）
＋Ｙ’（ｔ−１）｝／２ｊ｜ ・・・（４） Next, the displacement proportional number calculation unit 85 calculates 1 from the latest signed calculation result X ′ (t) and j (j is a positive integer) given the sign by the sign assignment unit 84 as in the following equation. By calculating the absolute value of the difference from the average value of the past signed calculation results X ′ and Y ′ calculated up to the previous time, the displacement proportional number NV is obtained (step S16 in FIG. 7).
NV = | X ′ (t) − {X ′ (t−j) + Y ′ (t−j) +... + X ′ (t−1)
+ Y ′ (t−1)} / 2j | (4)

また、変位比例個数算出部８５は、次式のように符号付与部８４によって符号が与えられた最新の符号付き算出結果Ｙ’（ｔ）と過去の符号付き算出結果Ｘ’，Ｙ’の平均値との差の絶対値を算出することにより、変位比例個数ＮＶを求めてもよい。
ＮＶ＝｜Ｙ’（ｔ）−｛Ｘ’（ｔ−ｊ）＋Ｙ’（ｔ−ｊ）＋・・・＋Ｘ’（ｔ−１）
＋Ｙ’（ｔ−１）｝／２ｊ｜ ・・・（５） In addition, the displacement proportional number calculation unit 85 calculates the average of the latest signed calculation result Y ′ (t) to which the sign is given by the sign assigning unit 84 and the past signed calculation results X ′ and Y ′ as in the following equation. The displacement proportional number NV may be obtained by calculating the absolute value of the difference from the value.
NV = | Y ′ (t) − {X ′ (t−j) + Y ′ (t−j) +... + X ′ (t−1)
+ Y ′ (t−1)} / 2j | (5)

また、変位比例個数算出部８５は、式（４）の算出結果と式（５）の算出結果の平均値を変位比例個数ＮＶとしてもよい。変位比例個数ＮＶは、記憶部８０に格納される。変位比例個数算出部８５は、以上のような変位比例個数ＮＶの算出処理を、個数算出部８３−１，８３−２によってＭＨＰの数Ｘ，Ｙが算出される度に行う。   Further, the displacement proportional number calculation unit 85 may use the average value of the calculation result of Expression (4) and the calculation result of Expression (5) as the displacement proportional number NV. The displacement proportional number NV is stored in the storage unit 80. The displacement proportional number calculation unit 85 performs the above-described calculation process of the displacement proportional number NV every time the number calculation units 83-1 and 83-2 calculate the numbers X and Y of MHPs.

次に、物理量算出部８６は、半導体レーザ１−１，１−２の最小発振波長λａと最大発振波長λｂと平均発振波長λと符号付与部８４が出力した符号付き算出結果Ｘ’，Ｙ’と変位比例個数算出部８５が算出した変位比例個数ＮＶに基づいて、半導体レーザ１−１，１−２と物体１０との距離Ｌおよび物体１０の速度Ｖを算出する（図７ステップＳ１７）。物理量算出部８６は、次式のように物体１０との距離Ｌを算出する。
Ｌ＝λａ×λｂ×（Ｘ’＋Ｙ’）／（４×（λａ−λｂ）） ・・・（６）
また、物理量算出部８６は、次式のように物体１０の速度Ｖを算出する。
Ｖ＝ＮＶ×λ／２ ・・・（７） Next, the physical quantity calculation unit 86 calculates the minimum oscillation wavelength λa, the maximum oscillation wavelength λb, the average oscillation wavelength λ of the semiconductor lasers 1-1 and 1-2, and the signed calculation results X ′ and Y ′ output from the sign assigning unit 84. The distance L between the semiconductor lasers 1-1 and 1-2 and the object 10 and the speed V of the object 10 are calculated based on the displacement proportional number NV calculated by the displacement proportional number calculation unit 85 (step S17 in FIG. 7). The physical quantity calculator 86 calculates the distance L from the object 10 as in the following equation.
L = λa × λb × (X ′ + Y ′) / (4 × (λa−λb)) (6)
Further, the physical quantity calculation unit 86 calculates the velocity V of the object 10 as in the following equation.
V = NV × λ / 2 (7)

なお、物理量算出部８６は、個数算出部８３−１，８３−２が算出したＭＨＰの数Ｘ，Ｙの大小を比較し、半導体レーザ１−１の発振波長が増加し半導体レーザ１−２の発振波長が減少する期間においてＹよりもＸが大きい場合は物体１０が物理量センサに近づきつつあると判定し、ＸよりもＹが大きい場合は物体１０が物理量センサから遠ざかりつつあると判定することができる。また、物理量算出部８６は、半導体レーザ１−１の発振波長が減少し半導体レーザ１−２の発振波長が増加する期間においてＸよりもＹが大きい場合は物体１０が物理量センサに近づきつつあると判定し、ＹよりもＸが大きい場合は物体１０が物理量センサから遠ざかりつつあると判定することができる。   The physical quantity calculation unit 86 compares the MHP numbers X and Y calculated by the number calculation units 83-1 and 83-2, and the oscillation wavelength of the semiconductor laser 1-1 is increased. When X is larger than Y during the period when the oscillation wavelength decreases, it is determined that the object 10 is approaching the physical quantity sensor, and when Y is larger than X, it is determined that the object 10 is moving away from the physical quantity sensor. it can. Further, the physical quantity calculation unit 86 indicates that the object 10 is approaching the physical quantity sensor when Y is larger than X during the period in which the oscillation wavelength of the semiconductor laser 1-1 decreases and the oscillation wavelength of the semiconductor laser 1-2 increases. If X is larger than Y, it can be determined that the object 10 is moving away from the physical quantity sensor.

物理量算出部８６は、以上のような算出処理を、個数算出部８３−１，８３−２によってＭＨＰの数Ｘ，Ｙが算出される度に行う。
表示部９は、物理量算出部８６が算出した物体１０との距離Ｌおよび物体１０の速度Ｖを表示する。 The physical quantity calculation unit 86 performs the above-described calculation process every time the number calculation units 83-1 and 83-2 calculate the numbers X and Y of MHPs.
The display unit 9 displays the distance L from the object 10 calculated by the physical quantity calculation unit 86 and the speed V of the object 10.

特許文献１に開示された物理量センサでは、距離と速度の分解能は半導体レーザの半波長λ／２程度である。これに対して、本実施の形態では、半波長λ／２未満の分解能を実現することができ、従来よりも高分解能の計測を実現することができる。以上のように、本実施の形態では、物体との距離や物体の速度等の物理量を従来よりも高い分解能で計測することができる。   In the physical quantity sensor disclosed in Patent Document 1, the resolution of the distance and speed is about half the wavelength λ / 2 of the semiconductor laser. On the other hand, in this embodiment, a resolution of less than half wavelength λ / 2 can be realized, and measurement with higher resolution than before can be realized. As described above, in the present embodiment, physical quantities such as the distance to the object and the speed of the object can be measured with higher resolution than before.

また、特許文献１に開示された物理量センサでは、半導体レーザの発振波長変調の搬送波（三角波）の半周期分の計測時間がかかるのに対して、本実施の形態では、１つ１つのＭＨＰの周期を単位時間当たりのＭＨＰの数に変換して、このＭＨＰの数から物体との距離や物体の速度等の物理量を求めることができるので、計測に要する時間を大幅に短縮することができ、速度の変化が速い物体にも対応することができる。さらに、本実施の形態では、ＭＨＰの周期の誤差を補正することができるので、距離や速度の計測精度を向上させることができる。   In addition, in the physical quantity sensor disclosed in Patent Document 1, it takes a measurement time corresponding to a half cycle of a carrier wave (triangular wave) of oscillation wavelength modulation of a semiconductor laser, whereas in the present embodiment, each MHP has one MHP. Since the period can be converted into the number of MHPs per unit time, and physical quantities such as the distance to the object and the speed of the object can be obtained from the number of MHPs, the time required for measurement can be greatly reduced. It is also possible to deal with an object whose speed changes rapidly. Furthermore, in the present embodiment, since the error of the MHP cycle can be corrected, the measurement accuracy of distance and speed can be improved.

［第２の実施の形態］
次に、本発明の第２の実施の形態について説明する。図１６は本発明の第２の実施の形態に係る物理量センサの演算部８の構成を示すブロック図、図１７はこの演算部８の動作を示すフローチャートである。本実施の形態においても、物理量センサ全体の構成は第１の実施の形態と同様であるので、図１の符号を用いて説明する。 [Second Embodiment]
Next, a second embodiment of the present invention will be described. FIG. 16 is a block diagram showing the configuration of the calculation unit 8 of the physical quantity sensor according to the second embodiment of the present invention, and FIG. 17 is a flowchart showing the operation of the calculation unit 8. Also in the present embodiment, the configuration of the entire physical quantity sensor is the same as that of the first embodiment, and therefore, description will be made using the reference numerals in FIG.

図１６に示すように、本実施の形態の演算部８は、記憶部８０と、移動平均値算出部８１−１，８１−２と、周期補正部８２−１，８２−２と、個数算出部８３−１，８３−２と、半導体レーザ１−１，１−２の最小発振波長λａと最大発振波長λｂと個数算出部８３−１，８３−２の算出結果Ｘ，Ｙに基づいて物体１０との距離の候補値と物体１０の速度の候補値を算出する物理量候補値算出部８７と、個数算出部８３−１，８３−２の算出結果Ｘ，Ｙの増減方向の一致不一致に基づいて物体１０の状態を判定する状態判定部８８と、状態判定部８８の判定結果に基づいて候補値の選定を行い、物体１０との距離および物体１０の速度を確定する物理量確定部８９とから構成される。   As illustrated in FIG. 16, the calculation unit 8 of the present embodiment includes a storage unit 80, moving average value calculation units 81-1 and 81-2, period correction units 82-1 and 82-2, and number calculation. Based on the minimum oscillation wavelength λa and maximum oscillation wavelength λb of the semiconductor lasers 1-1 and 1-2, and the calculation results X and Y of the number calculation units 83-1 and 83-2 10 based on the coincidence / mismatch of the increase / decrease directions of the calculation results X and Y of the physical quantity candidate value calculation unit 87 and the number calculation units 83-1 and 83-2. From the state determination unit 88 that determines the state of the object 10 and the physical quantity determination unit 89 that selects a candidate value based on the determination result of the state determination unit 88 and determines the distance to the object 10 and the speed of the object 10. Composed.

記憶部８０、移動平均値算出部８１−１，８１−２、周期補正部８２−１，８２−２、個数算出部８３−１，８３−２の動作（図１７ステップＳ１０〜Ｓ１２）は、第１の実施の形態で説明したとおりである。   The operations of the storage unit 80, moving average value calculation units 81-1 and 81-2, period correction units 82-1 and 82-2, and number calculation units 83-1 and 83-2 (steps S10 to S12 in FIG. 17) are as follows. This is as described in the first embodiment.

物理量候補値算出部８７は、個数算出部８３−１，８３−２の算出結果Ｘ，Ｙから、半導体レーザ１−１，１−２と物体１０との距離の第１の候補値Ｌ１と第２の候補値Ｌ２を次式のように算出して、記憶部８０に格納する（図１７ステップＳ１８）。
Ｌ１＝λａ×λｂ×（Ｘ＋Ｙ）／（４×（λａ−λｂ）） ・・・（８）
Ｌ２＝λａ×λｂ×（Ｘ−Ｙ）／（４×（λａ−λｂ）） ・・・（９） The physical quantity candidate value calculation unit 87 calculates the first candidate value L1 and the first candidate value L1 of the distance between the semiconductor lasers 1-1 and 1-2 and the object 10 from the calculation results X and Y of the number calculation units 83-1 and 83-2. The candidate value L2 of 2 is calculated as the following equation and stored in the storage unit 80 (step S18 in FIG. 17).
L1 = λa × λb × (X + Y) / (4 × (λa−λb)) (8)
L2 = λa × λb × (XY) / (4 × (λa−λb)) (9)

また、物理量候補値算出部８７は、個数算出部８３−１，８３−２の算出結果Ｘ，Ｙから物体１０との速度の第１の候補値Ｖ１と第２の候補値Ｖ２とを次式のように算出して、記憶部８０に格納する（図１７ステップＳ１８）。
Ｖ１＝（Ｘ−Ｙ）×（λａ＋λｂ）／８ ・・・（１０）
Ｖ２＝（Ｘ＋Ｙ）×（λａ＋λｂ）／８ ・・・（１１） Further, the physical quantity candidate value calculation unit 87 calculates the first candidate value V1 and the second candidate value V2 of the velocity with the object 10 from the calculation results X and Y of the number calculation units 83-1 and 83-2 by the following equations. Is calculated and stored in the storage unit 80 (step S18 in FIG. 17).
V1 = (X−Y) × (λa + λb) / 8 (10)
V2 = (X + Y) × (λa + λb) / 8 (11)

式（８）〜式（１１）において、第１の候補値Ｌ１，Ｖ１は物体１０が微小変位状態にあると仮定して計算した値であり、第２の候補値Ｌ２，Ｖ２は物体１０が変位状態にあると仮定して計算した値である。
物理量候補値算出部８７は、以上のような算出処理を、個数算出部８３−１，８３−２によってＭＨＰの数Ｘ，Ｙが算出される度に行う。 In the equations (8) to (11), the first candidate values L1 and V1 are values calculated on the assumption that the object 10 is in a minute displacement state, and the second candidate values L2 and V2 It is a value calculated on the assumption that it is in a displacement state.
The physical quantity candidate value calculation unit 87 performs the above calculation process every time the number calculation units 83-1 and 83-2 calculate the numbers X and Y of MHPs.

次に、状態判定部８８は、個数算出部８３−１，８３−２の算出結果Ｘ，Ｙの増減方向の一致不一致に基づいて物体１０の状態を判定する（図１７ステップＳ１９）。この判定処理は、第１の実施の形態の符号付与部８４で行う判定処理と同じである。すなわち、状態判定部８８は、個数算出部８３−１の算出結果Ｘの時間変化に対して個数算出部８３−２の算出結果Ｙの時間変化が逆方向の場合、物体１０が微小変位状態であると判定し、個数算出部８３−１の算出結果Ｘの時間変化に対して個数算出部８３−２の算出結果Ｙの時間変化が同方向の場合、物体１０が変位状態であると判定する。
状態判定部８８は、以上のような判定処理を、個数算出部８３−１，８３−２によってＭＨＰの数Ｘ，Ｙが算出される度に行う。 Next, the state determination unit 88 determines the state of the object 10 based on the coincidence / mismatch of the increase / decrease directions of the calculation results X, Y of the number calculation units 83-1, 83-2 (step S19 in FIG. 17). This determination process is the same as the determination process performed by the code assigning unit 84 of the first embodiment. That is, when the time change of the calculation result Y of the number calculation unit 83-2 is opposite to the time change of the calculation result X of the number calculation unit 83-1, the state determination unit 88 is in a minute displacement state. If the time change of the calculation result Y of the number calculation unit 83-2 is in the same direction with respect to the time change of the calculation result X of the number calculation unit 83-1, it is determined that the object 10 is in a displacement state. .
The state determination unit 88 performs the determination process as described above every time the number calculation units 83-1 and 83-2 calculate the numbers X and Y of MHPs.

物理量確定部８９は、状態判定部８８の判定結果に基づいて物体１０との距離および物体１０の速度を確定する（図１７ステップＳ２０，Ｓ２１）。物理量確定部８９は、物体１０が微小変位状態と判定された場合、記憶部８０に記憶されている距離の候補値Ｌ１を物体１０との距離として確定し、速度の候補値Ｖ１を物体１０の速度として確定する（図１７ステップＳ２０）。また、物理量確定部８９は、物体１０が変位状態と判定された場合、記憶部８０に記憶されている距離の候補値Ｌ２を物体１０との距離として確定し、速度の候補値Ｖ２を物体１０の速度として確定する（図１７ステップＳ２１）。   The physical quantity determination unit 89 determines the distance to the object 10 and the speed of the object 10 based on the determination result of the state determination unit 88 (steps S20 and S21 in FIG. 17). When it is determined that the object 10 is in the minute displacement state, the physical quantity determination unit 89 determines the distance candidate value L1 stored in the storage unit 80 as the distance to the object 10 and sets the velocity candidate value V1 as the distance of the object 10. The speed is determined (step S20 in FIG. 17). Further, when the physical quantity determining unit 89 determines that the object 10 is in the displaced state, the physical quantity determining unit 89 determines the distance candidate value L2 stored in the storage unit 80 as the distance to the object 10 and sets the speed candidate value V2 to the object 10. (Step S21 in FIG. 17).

なお、物理量確定部８９は、個数算出部８３−１，８３−２が算出したＭＨＰの数Ｘ，Ｙの大小を比較し、半導体レーザ１−１の発振波長が増加し半導体レーザ１−２の発振波長が減少する期間においてＹよりもＸが大きい場合は物体１０が物理量センサに近づきつつあると判定し、ＸよりもＹが大きい場合は物体１０が物理量センサから遠ざかりつつあると判定することができる。また、物理量確定部８９は、半導体レーザ１−１の発振波長が減少し半導体レーザ１−２の発振波長が増加する期間においてＸよりもＹが大きい場合は物体１０が物理量センサに近づきつつあると判定し、ＹよりもＸが大きい場合は物体１０が物理量センサから遠ざかりつつあると判定することができる。
物理量確定部８９は、以上のような確定処理を、個数算出部８３−１，８３−２によってＭＨＰの数Ｘ，Ｙが算出される度に行う。 Note that the physical quantity determination unit 89 compares the MHP numbers X and Y calculated by the number calculation units 83-1 and 83-2, and the oscillation wavelength of the semiconductor laser 1-1 is increased. When X is larger than Y during the period when the oscillation wavelength decreases, it is determined that the object 10 is approaching the physical quantity sensor, and when Y is larger than X, it is determined that the object 10 is moving away from the physical quantity sensor. it can. Further, the physical quantity determination unit 89 indicates that the object 10 is approaching the physical quantity sensor when Y is larger than X during the period in which the oscillation wavelength of the semiconductor laser 1-1 decreases and the oscillation wavelength of the semiconductor laser 1-2 increases. If X is larger than Y, it can be determined that the object 10 is moving away from the physical quantity sensor.
The physical quantity determination unit 89 performs the determination process as described above every time the number calculation units 83-1 and 83-2 calculate the numbers X and Y of MHPs.

表示部９は、物理量確定部８９が確定した物体１０との距離および物体１０の速度を表示する。物理量センサの他の構成は、第１の実施の形態で説明したとおりである。
以上のようにして、本実施の形態では、第１の実施の形態と同様の効果を得ることができる。 The display unit 9 displays the distance from the object 10 determined by the physical quantity determination unit 89 and the speed of the object 10. The other configuration of the physical quantity sensor is as described in the first embodiment.
As described above, in the present embodiment, the same effects as in the first embodiment can be obtained.

［第３の実施の形態］
次に、本発明の第３の実施の形態について説明する。図１８は本発明の第３の実施の形態に係る物理量センサの演算部８の構成を示すブロック図、図１９はこの演算部８の動作を示すフローチャートである。本実施の形態においても、物理量センサ全体の構成は第１の実施の形態と同様であるので、図１の符号を用いて説明する。 [Third Embodiment]
Next, a third embodiment of the present invention will be described. FIG. 18 is a block diagram showing the configuration of the calculation unit 8 of the physical quantity sensor according to the third embodiment of the present invention, and FIG. 19 is a flowchart showing the operation of the calculation unit 8. Also in the present embodiment, the configuration of the entire physical quantity sensor is the same as that of the first embodiment, and therefore, description will be made using the reference numerals in FIG.

本実施の形態の演算部８は、記憶部８０と、移動平均値算出部８１−１，８１−２と、周期補正部８２−１，８２−２と、個数算出部８３−１，８３−２と、個数算出部８３−１，８３−２の算出結果のうち大きい方の算出結果とこの算出結果よりも過去の算出結果を用いて算出された距離比例個数の２倍数との大小関係に応じて、個数算出部８３−１，８３−２の算出結果に正負の符号を付与する符号付与部８４ａと、変位比例個数算出部８５と、物理量算出部８６と、半導体レーザ１−１，１−２と物体１０との平均距離に比例したＭＨＰの数である距離比例個数を求める距離比例個数算出部９０とから構成される。   The calculation unit 8 of the present embodiment includes a storage unit 80, moving average value calculation units 81-1, 81-2, period correction units 82-1, 82-2, and number calculation units 83-1, 83-. 2 and the larger one of the calculation results of the number calculation units 83-1 and 83-2, and the magnitude relationship between the calculation result and the double of the distance proportional number calculated using the past calculation result. Correspondingly, a sign assigning section 84a for giving positive and negative signs to the calculation results of the number calculating sections 83-1, 83-2, a displacement proportional number calculating section 85, a physical quantity calculating section 86, and the semiconductor lasers 1-1, 1. 2 is a distance proportional number calculation unit 90 for obtaining a distance proportional number that is the number of MHPs proportional to the average distance between the object 10 and the object 10.

移動平均値算出部８１−１，８１−２と周期補正部８２−１，８２−２と個数算出部８３−１，８３−２の動作は、第１の実施の形態と同じである（図１９ステップＳ１０，Ｓ１１，Ｓ１２）。
符号付与部８４ａは、個数算出部８３−１，８３−２の最新の算出結果Ｘ，Ｙのうち大きい方の算出結果とこの算出結果よりも過去の算出結果を用いて算出された距離比例個数ＮＬの２倍数２ＮＬとの大小関係を判定し（図１９ステップＳ２２）、この大小関係に応じて個数算出部８３−１，８３−２の最新の算出結果Ｘ，Ｙに正負の符号を付与する（図１９ステップＳ２３，Ｓ２４）。 The operations of the moving average value calculation units 81-1 and 81-2, the period correction units 82-1 and 82-2, and the number calculation units 83-1 and 83-2 are the same as those in the first embodiment (FIG. 19 steps S10, S11, S12).
The sign assigning unit 84a uses the larger calculation result of the latest calculation results X and Y of the number calculation units 83-1, 83-2 and the distance proportional number calculated by using the past calculation result. The magnitude relation between the NL double number 2NL is determined (step S22 in FIG. 19), and positive and negative signs are assigned to the latest calculation results X and Y of the number calculation units 83-1, 83-2 according to the magnitude relation. (FIG. 19, steps S23 and S24).

個数算出部８３−１，８３−２の最新の算出結果Ｘ，Ｙのうち大きい方の算出結果をＺとすると、算出結果Ｘ，Ｙの折り返しが生じている変位状態では、Ｚ≧２ＮＬが成立する。符号付与部８４ａは、Ｚ≧２ＮＬが成立する場合（図１９ステップＳ２２においてＹＥＳ）、個数算出部８３−１，８３−２の最新の算出結果Ｘ，Ｙのうち大きい方の算出結果に正の符号を付与し、小さい方の算出結果に負の符号を付与した符号付き算出結果Ｘ’，Ｙ’を出力する（図１９ステップＳ２４）。   If the larger one of the latest calculation results X and Y of the number calculation units 83-1 and 83-2 is Z, Z ≧ 2NL is established in the displacement state where the calculation results X and Y are folded back. To do. When Z ≧ 2NL is established (YES in step S22 in FIG. 19), the sign assigning unit 84a is positive for the larger one of the latest calculation results X and Y of the number calculation units 83-1, 83-2. Signed calculation results X ′ and Y ′ with a negative sign added to the smaller calculation result are output (step S24 in FIG. 19).

一方、算出結果Ｘ，Ｙの折り返しが生じていない微小変位状態では、Ｚ＜２ＮＬが成立する。符号付与部８４ａは、Ｚ＜２ＮＬが成立する場合（図１９ステップＳ２２においてＮＯ）、個数算出部８３−１，８３−２の最新の算出結果Ｘ，Ｙにそれぞれ正の符号を付与した符号付き算出結果Ｘ’，Ｙ’を出力する（図１９ステップＳ２３）。   On the other hand, Z <2NL is established in a minute displacement state in which the calculation results X and Y are not folded. When Z <2NL is established (NO in step S22 in FIG. 19), the sign assigning unit 84a has a sign that assigns a positive sign to the latest calculation results X and Y of the number calculating units 83-1 and 83-2. Calculation results X ′ and Y ′ are output (step S23 in FIG. 19).

符号付き算出結果Ｘ’，Ｙ’は、記憶部８０に格納される。符号付与部８４ａは、以上のような符号付与処理を、個数算出部８３−１，８３−２によってＭＨＰの数Ｘ，Ｙが算出される度に行う。
なお、ステップＳ２２において判定ＹＥＳとなる条件をＺ＞２ＮＬにして、ステップＳ２２において判定ＮＯとなる条件をＺ≦２ＮＬにしてもよい。 Signed calculation results X ′ and Y ′ are stored in the storage unit 80. The code assigning unit 84a performs the above-described code assigning process every time the number calculating units 83-1 and 83-2 calculate the numbers X and Y of MHPs.
Note that the condition for determination YES in step S22 may be Z> 2NL, and the condition for determination NO in step S22 may be Z ≦ 2NL.

次に、距離比例個数算出部９０は、符号付与部８４ａによって符号が与えられた符号付き算出結果から距離比例個数ＮＬを求める（図１９ステップＳ２５）。距離比例個数ＮＬは、算出結果Ｘ’，Ｙ’の平均値に相当する。距離比例個数算出部９０は、次式に示すように符号付き算出結果Ｘ’，Ｙ’を用いて、距離比例個数ＮＬを算出する。
ＮＬ＝（Ｘ’＋Ｙ’）／２ ・・・（１２） Next, the distance proportional number calculation unit 90 obtains the distance proportional number NL from the signed calculation result given the sign by the sign assigning unit 84a (step S25 in FIG. 19). The distance proportional number NL corresponds to the average value of the calculation results X ′ and Y ′. The distance proportional number calculation unit 90 calculates the distance proportional number NL using the signed calculation results X ′ and Y ′ as shown in the following equation.
NL = (X ′ + Y ′) / 2 (12)

なお、物理量の計測開始初期時においては、符号付与部８４ａが大小関係を判定するのに必要な距離比例個数ＮＬが得られていない。このため、符号付与部８４ａは、算出結果Ｘ，Ｙのうち大きい方の算出結果とこの算出結果よりも過去の算出結果を用いて算出された距離比例個数ＮＬの２倍数２ＮＬとの大小関係を判定することはできず、符号付き算出結果を出力することはできない。したがって、計測開始初期時においては、距離比例個数算出部９０は、式（１２）の代わりに個数算出部８３−１，８３−２の算出結果Ｘ，Ｙを用いる次式により距離比例個数ＮＬを算出する。
ＮＬ＝（Ｘ＋Ｙ）／２ ・・・（１３） It should be noted that at the initial measurement start of the physical quantity, the distance proportional number NL necessary for the sign assigning unit 84a to determine the magnitude relationship is not obtained. For this reason, the sign assigning unit 84a has a magnitude relationship between the larger calculation result of the calculation results X and Y and the double number 2NL of the distance proportional number NL calculated using the past calculation result. The determination cannot be made, and the signed calculation result cannot be output. Therefore, at the beginning of measurement, the distance proportional number calculation unit 90 calculates the distance proportional number NL according to the following equation using the calculation results X and Y of the number calculation units 83-1 and 83-2 instead of the equation (12). calculate.
NL = (X + Y) / 2 (13)

つまり、距離比例個数算出部９０は、計測開始初期時に式（１３）を用いて距離比例個数ＮＬを算出し、符号付与部８４ａによって距離比例個数ＮＬの算出に必要な符号付き算出結果が算出されるようになった後は式（１２）を用いて距離比例個数ＮＬを算出することになる。   That is, the distance proportional number calculation unit 90 calculates the distance proportional number NL using the equation (13) at the beginning of measurement, and the sign assigning unit 84a calculates a signed calculation result necessary for calculating the distance proportional number NL. After that, the distance proportional number NL is calculated using the equation (12).

距離比例個数算出部９０が算出した距離比例個数ＮＬは、記憶部８０に格納される。距離比例個数算出部９０は、以上のような距離比例個数ＮＬの算出処理を、個数算出部８３−１，８３−２によってＭＨＰの数Ｘ，Ｙが算出される度に行う。なお、本実施の形態では、１回分の算出結果を用いて距離比例個数ＮＬを算出しているが、２ｍ（ｍは正の整数）回の算出結果を用いて距離比例個数ＮＬを算出するようにしてもよい。   The distance proportional number NL calculated by the distance proportional number calculation unit 90 is stored in the storage unit 80. The distance proportional number calculation unit 90 performs the above-described processing for calculating the distance proportional number NL every time the number calculation units 83-1 and 83-2 calculate the numbers X and Y of MHPs. In this embodiment, the distance proportional number NL is calculated using the calculation result for one time, but the distance proportional number NL is calculated using the calculation result of 2m (m is a positive integer). It may be.

変位比例個数算出部８５と物理量算出部８６の動作は、第１の実施の形態と同じである（図１９ステップＳ１６，Ｓ１７）。
こうして、本実施の形態においても、第１の実施の形態と同様の効果を得ることができる。 The operations of the displacement proportional number calculation unit 85 and the physical quantity calculation unit 86 are the same as those in the first embodiment (steps S16 and S17 in FIG. 19).
Thus, also in this embodiment, the same effect as that of the first embodiment can be obtained.

［第４の実施の形態］
次に、本発明の第４の実施の形態について説明する。図１５で説明したような算出結果の折り返しが生じると、算出結果Ｘ，Ｙの平均値に変化が生じる。そこで、符号付与部８４は、算出結果Ｘ，Ｙの平均値の変化に応じて個数算出部８３−１，８３−２の最新の算出結果に正負の符号を付与するようにしてもよい。本実施の形態においても、物理量センサの構成は第１の実施の形態と同様であるので、図１、図６の符号を用いて説明する。 [Fourth Embodiment]
Next, a fourth embodiment of the present invention will be described. When the calculation result returns as described with reference to FIG. 15, the average value of the calculation results X and Y changes. Therefore, the sign assigning unit 84 may assign a positive or negative sign to the latest calculation result of the number calculating units 83-1 and 83-2 according to the change in the average value of the calculation results X and Y. Also in this embodiment, the configuration of the physical quantity sensor is the same as that of the first embodiment, and therefore, description will be made using the reference numerals in FIGS.

図２０は本実施の形態の演算部８の動作を示すフローチャートである。移動平均値算出部８１−１，８１−２と周期補正部８２−１，８２−２と個数算出部８３−１，８３−２の動作は、第１の実施の形態と同じである（図２０ステップＳ１０，Ｓ１１，Ｓ１２）。   FIG. 20 is a flowchart showing the operation of the calculation unit 8 of the present embodiment. The operations of the moving average value calculation units 81-1 and 81-2, the period correction units 82-1 and 82-2, and the number calculation units 83-1 and 83-2 are the same as those in the first embodiment (FIG. 20 steps S10, S11, S12).

本実施の形態の符号付与部８４は、現時刻ｔ以前に求めた算出結果Ｘの最新の平均値がこの値よりも前に求めた算出結果Ｘの平均値に対して所定のしきい値以内であり、かつ現時刻ｔ以前に求めた算出結果Ｙの最新の平均値がこの値よりも前に求めた算出結果Ｘの平均値に対して所定のしきい値以内である場合、算出結果Ｘ，Ｙのそれぞれの平均値に変化無しと判断して（図２０ステップＳ２６においてＮＯ）、個数算出部８３−１，８３−２の最新の算出結果Ｘ，Ｙにそれぞれ正の符号を付与した符号付き算出結果Ｘ’，Ｙ’を出力する（図２０ステップＳ２７）。   The sign assigning unit 84 of the present embodiment is such that the latest average value of the calculation result X obtained before the current time t is within a predetermined threshold with respect to the average value of the calculation result X obtained before this value. And the latest average value of the calculation result Y obtained before the current time t is within a predetermined threshold with respect to the average value of the calculation result X obtained before this value. , Y is determined to be unchanged (NO in step S26 in FIG. 20), and the latest calculation results X, Y of the number calculation units 83-1, 83-2 are respectively given positive signs. The attached calculation results X ′ and Y ′ are output (step S27 in FIG. 20).

また、符号付与部８４は、現時刻ｔ以前に求めた算出結果Ｘの最新の平均値がこの値よりも前に求めた算出結果Ｘの平均値に対して所定のしきい値を超えて変化したり、現時刻ｔ以前に求めた算出結果Ｙの最新の平均値がこの値よりも前に求めた算出結果Ｘの平均値に対して所定のしきい値を超えて変化したりした場合（図２０ステップＳ２６においてＹＥＳ）、個数算出部８３−１，８３−２の最新の算出結果Ｘ，Ｙのうち大きい方の算出結果に正の符号を付与し、小さい方の算出結果に負の符号を付与した符号付き算出結果Ｘ’，Ｙ’を出力する（図２０ステップＳ２８）。   In addition, the sign assigning unit 84 changes the latest average value of the calculation result X obtained before the current time t beyond a predetermined threshold with respect to the average value of the calculation result X obtained before this value. Or the latest average value of the calculation result Y obtained before the current time t changes beyond the predetermined threshold with respect to the average value of the calculation result X obtained before this value ( In step S26 in FIG. 20, YES is given to the larger calculation result among the latest calculation results X and Y of the number calculation units 83-1, 83-2, and the negative sign is assigned to the smaller calculation result. The signed calculation results X ′ and Y ′ to which are given are output (step S28 in FIG. 20).

符号付き算出結果Ｘ’，Ｙ’は、記憶部８０に格納される。符号付与部８４は、以上のような符号付与処理を、個数算出部８３−１，８３−２によってＭＨＰの数Ｘ，Ｙが算出される度に行う。
変位比例個数算出部８５と物理量算出部８６の動作は、第１の実施の形態と同じである（図２０ステップＳ１６，Ｓ１７）。
こうして、本実施の形態においても、第１の実施の形態と同様の効果を得ることができる。 Signed calculation results X ′ and Y ′ are stored in the storage unit 80. The code assigning unit 84 performs the above-described code assigning process each time the number calculating units 83-1 and 83-2 calculate the numbers X and Y of MHPs.
The operations of the displacement proportional number calculation unit 85 and the physical quantity calculation unit 86 are the same as those in the first embodiment (steps S16 and S17 in FIG. 20).
Thus, also in this embodiment, the same effect as that of the first embodiment can be obtained.

［第５の実施の形態］
次に、本発明の第５の実施の形態について説明する。第１〜第４の実施の形態では、ＭＨＰ波形を含む電気信号を検出する検出手段としてフォトダイオード２−１，２−２と電流−電圧変換増幅部５−１，５−２とを用いたが、フォトダイオードを使用することなくＭＨＰ波形を抽出することも可能である。図２１は本発明の第５の実施の形態に係る物理量センサの構成を示すブロック図であり、図１と同様の構成には同一の符号を付してある。本実施の形態の物理量センサは、第１の実施の形態のフォトダイオード２−１，２−２と電流−電圧変換増幅部５−１，５−２の代わりに、第１、第２の検出手段として電圧検出部１１−１，１１−２を用いるものである。 [Fifth Embodiment]
Next, a fifth embodiment of the present invention will be described. In the first to fourth embodiments, the photodiodes 2-1 and 2-2 and the current-voltage conversion amplification units 5-1 and 5-2 are used as detection means for detecting an electric signal including an MHP waveform. However, it is also possible to extract the MHP waveform without using a photodiode. FIG. 21 is a block diagram showing a configuration of a physical quantity sensor according to the fifth embodiment of the present invention. The same reference numerals are given to the same configurations as those in FIG. The physical quantity sensor according to the present embodiment uses the first and second detections instead of the photodiodes 2-1 and 2-2 and the current-voltage conversion amplification units 5-1 and 5-2 according to the first embodiment. The voltage detectors 11-1 and 11-2 are used as means.

電圧検出部１１−１，１１−２は、それぞれ半導体レーザ１−１，１−２の端子間電圧、すなわちアノード−カソード間電圧を検出して増幅する。半導体レーザ１−１，１−２から放射されたレーザ光と物体１０からの戻り光とによって干渉が生じるとき、半導体レーザ１−１，１−２の端子間電圧には、ＭＨＰ波形が現れる。したがって、半導体レーザ１−１，１−２の端子間電圧からＭＨＰ波形を抽出することが可能である。   The voltage detectors 11-1 and 11-2 detect and amplify the voltage between the terminals of the semiconductor lasers 1-1 and 1-2, that is, the anode-cathode voltage, respectively. When interference occurs between the laser light emitted from the semiconductor lasers 1-1 and 1-2 and the return light from the object 10, an MHP waveform appears in the voltage between the terminals of the semiconductor lasers 1-1 and 1-2. Therefore, it is possible to extract the MHP waveform from the voltage between the terminals of the semiconductor lasers 1-1 and 1-2.

フィルタ部６−１，６−２は、それぞれ電圧検出部１１−１，１１−２の出力電圧から搬送波を除去する。物理量センサのその他の構成は、第１〜第４の実施の形態と同じである。こうして、本実施の形態では、フォトダイオードを使用することなくＭＨＰ波形を抽出することができ、第１〜第４の実施の形態と比較して物理量センサの部品を削減することができ、物理量センサのコストを低減することができる。また、本実施の形態では、フォトダイオードを使用しないので、外乱光による影響を除去することができる。   Filter units 6-1 and 6-2 remove carrier waves from the output voltages of voltage detection units 11-1 and 11-2, respectively. Other configurations of the physical quantity sensor are the same as those in the first to fourth embodiments. Thus, in this embodiment, an MHP waveform can be extracted without using a photodiode, and the physical quantity sensor components can be reduced as compared with the first to fourth embodiments. The cost can be reduced. In this embodiment, since no photodiode is used, the influence of disturbance light can be eliminated.

なお、第１〜第５の実施の形態において少なくとも信号抽出部７−１，７−２と演算部８とは、例えばＣＰＵ、メモリおよびインタフェースを備えたコンピュータとこれらのハードウェア資源を制御するプログラムによって実現することができる。ＣＰＵは、メモリに格納されたプログラムに従って第１〜第５の実施の形態で説明した処理を実行する。   In the first to fifth embodiments, at least the signal extraction units 7-1 and 7-2 and the calculation unit 8 are, for example, a computer having a CPU, a memory and an interface, and a program for controlling these hardware resources. Can be realized. The CPU executes the processes described in the first to fifth embodiments according to the program stored in the memory.

また、第１〜第５の実施の形態では、半導体レーザ１−１と１−２の最小発振波長λａが同一で、かつ半導体レーザ１−１と１−２の最大発振波長λｂが同一の場合について説明したが、これに限るものではなく、図２２に示すように、半導体レーザ１−１と１−２の間で最小発振波長λａ及び最大発振波長λｂが異なっていてもよい。図２２において、λａ１，λｂ１は半導体レーザ１−１の最小発振波長、最大発振波長、λａ２，λｂ２は半導体レーザ１−２の最小発振波長、最大発振波長である。この場合、λａ１×λｂ１／｛４×（λｂ１−λａ１）｝とλａ２×λｂ２／｛４×（λｂ２−λａ２）｝とが常に同一の固定値であればよい。この場合、式（６）、式（８）〜式（１１）におけるλａ，λｂとしては、λａ１，λｂ１を使ってもよいし、λａ２，λｂ２を使ってもよい。   In the first to fifth embodiments, the semiconductor lasers 1-1 and 1-2 have the same minimum oscillation wavelength λa, and the semiconductor lasers 1-1 and 1-2 have the same maximum oscillation wavelength λb. However, the present invention is not limited to this, and as shown in FIG. 22, the minimum oscillation wavelength λa and the maximum oscillation wavelength λb may be different between the semiconductor lasers 1-1 and 1-2. In FIG. 22, λa1 and λb1 are the minimum and maximum oscillation wavelengths of the semiconductor laser 1-1, and λa2 and λb2 are the minimum and maximum oscillation wavelengths of the semiconductor laser 1-2. In this case, it is sufficient that λa1 × λb1 / {4 × (λb1−λa1)} and λa2 × λb2 / {4 × (λb2−λa2)} always have the same fixed value. In this case, λa1 and λb1 may be used as λa and λb in the equations (6) and (8) to (11), or λa2 and λb2 may be used.

また、第１〜第５の実施の形態では、半導体レーザ１−１，１−２を三角波状に発振させていたが、これに限るものではなく、図２３に示すように半導体レーザ１−１，１−２を鋸波状に発振させてもよい。すなわち、本発明では、少なくとも第１の発振期間Ｐ１が繰り返し存在するように半導体レーザ１−１を動作させ、半導体レーザ１−１と発振波長の増減が逆になるように半導体レーザ１−２を動作させればよい。図２２の場合と同様にλａ１≠λａ２、λｂ１≠λｂ２でもよいし、図２５の場合と同様にλａ１＝λａ２、λｂ１＝λｂ２でもよい。   In the first to fifth embodiments, the semiconductor lasers 1-1 and 1-2 are oscillated in a triangular wave shape. However, the present invention is not limited to this, and as shown in FIG. , 1-2 may be oscillated in a sawtooth shape. In other words, in the present invention, the semiconductor laser 1-1 is operated so that at least the first oscillation period P1 is repeatedly present, and the semiconductor laser 1-2 is changed so that the increase and decrease of the oscillation wavelength are opposite to those of the semiconductor laser 1-1. It only has to be operated. Similarly to the case of FIG. 22, λa1 ≠ λa2 and λb1 ≠ λb2 may be used, or as in the case of FIG. 25, λa1 = λa2 and λb1 = λb2.

本発明は、半導体レーザから放射したレーザ光と物体からの戻り光との自己結合効果によって生じる干渉の情報から、物体との距離や物体の速度等の物理量を計測する技術に適用することができる。   INDUSTRIAL APPLICABILITY The present invention can be applied to a technique for measuring physical quantities such as the distance to an object and the speed of the object from information on interference caused by the self-coupling effect between the laser light emitted from the semiconductor laser and the return light from the object. .

１−１，１−２…半導体レーザ、２−１，２−２…フォトダイオード、３−１，３−２…レンズ、４−１，４−２…レーザドライバ、５−１，５−２…電流−電圧変換増幅部、６−１，６−２…フィルタ部、７−１，７−２…信号抽出部、８…演算部、９…表示部、１０…物体、１１−１，１１−２…電圧検出部、８０…記憶部、８１−１，８１−２…移動平均値算出部、８２−１，８２−２…周期補正部、８３−１，８３−２…個数算出部、８４，８４ａ…符号付与部、８５…変位比例個数算出部、８６…物理量算出部、８７…物理量候補値算出部、８８…状態判定部、８９…物理量確定部、９０…距離比例個数算出部。   1-1, 1-2 ... semiconductor laser, 2-1, 2-2 ... photodiode, 3-1, 3-2 ... lens, 4-1, 4-2 ... laser driver, 5-1, 5-2 ... current-voltage conversion amplification unit, 6-1, 6-2 ... filter unit, 7-1, 7-2 ... signal extraction unit, 8 ... calculation unit, 9 ... display unit, 10 ... object, 11-1, 11 -2, voltage detection unit, 80 ... storage unit, 81-1, 81-2 ... moving average value calculation unit, 82-1, 82-2 ... period correction unit, 83-1, 83-2 ... number calculation unit, 84, 84a ... sign giving unit, 85 ... displacement proportional number calculation unit, 86 ... physical quantity calculation unit, 87 ... physical quantity candidate value calculation unit, 88 ... state determination unit, 89 ... physical quantity determination unit, 90 ... distance proportional number calculation unit.

Claims (10)

測定対象に第１のレーザ光を放射する第１の半導体レーザと、
前記測定対象に前記第１のレーザ光と平行に第２のレーザ光を放射する第２の半導体レーザと、
少なくとも発振波長が連続的に単調増加する発振期間が繰り返し存在するように前記第１の半導体レーザを動作させる第１の発振波長変調手段と、
前記第１の半導体レーザと発振波長の増減が逆になるように前記第２の半導体レーザを動作させる第２の発振波長変調手段と、
前記第１のレーザ光とこのレーザ光の前記測定対象からの戻り光との自己結合効果によって生じる干渉波形を含む電気信号を検出する第１の検出手段と、
前記第２のレーザ光とこのレーザ光の前記測定対象からの戻り光との自己結合効果によって生じる干渉波形を含む電気信号を検出する第２の検出手段と、
前記第１、第２の検出手段の出力信号に含まれる干渉波形の周期をそれぞれ干渉波形が入力される度に計測する第１、第２の信号抽出手段と、
この第１、第２の信号抽出手段の計測結果からそれぞれ単位時間当たりの干渉波形の数を算出する第１、第２の個数算出手段と、
この第１、第２の個数算出手段の算出結果に正負の符号を付与する符号付与手段と、
この符号付与手段によって符号が与えられた、前記第１、第２の個数算出手段の符号付き算出結果の平均値を算出することにより、前記半導体レーザと測定対象との平均距離に比例した干渉波形の数である距離比例個数を求める距離比例個数算出手段と、
前記符号付与手段によって符号が与えられた、前記第１の個数算出手段の最新の符号付き算出結果と、この算出結果よりも過去の、前記第１、第２の個数算出手段の符号付き算出結果の平均値との差の絶対値を算出するか、前記符号付与手段によって符号が与えられた、前記第２の個数算出手段の最新の符号付き算出結果と、この算出結果よりも過去の、前記第１、第２の個数算出手段の符号付き算出結果の平均値との差の絶対値を算出するか、あるいは２つの前記絶対値の平均値を算出することにより、前記測定対象の変位に比例した干渉波形の数である変位比例個数を求める変位比例個数算出手段と、
前記符号付与手段によって符号が与えられた、前記第１、第２の個数算出手段の符号付き算出結果と前記変位比例個数算出手段が算出した変位比例個数に基づいて前記測定対象の物理量を算出する物理量算出手段とを備え、
前記符号付与手段は、前記第１、第２の個数算出手段の最新の算出結果のうち大きい方の算出結果と、この算出結果よりも過去の、前記第１、第２の個数算出手段の符号付き算出結果を用いて算出された前記距離比例個数の２倍数との大小関係、前記第１、第２の個数算出手段の算出結果の増減方向の一致不一致、あるいは前記第１、第２の個数算出手段の算出結果の平均値の変化に応じて、前記第１、第２の個数算出手段の算出結果に正負の符号を付与することを特徴とする物理量センサ。 A first semiconductor laser that emits a first laser beam to a measurement object;
A second semiconductor laser that emits a second laser beam in parallel to the first laser beam to the measurement object;
First oscillation wavelength modulation means for operating the first semiconductor laser such that at least an oscillation period in which the oscillation wavelength continuously increases monotonously exists repeatedly;
Second oscillation wavelength modulation means for operating the second semiconductor laser so that the increase / decrease of the oscillation wavelength is opposite to that of the first semiconductor laser;
First detection means for detecting an electrical signal including an interference waveform caused by a self-coupling effect between the first laser light and the return light from the measurement target of the laser light;
Second detection means for detecting an electrical signal including an interference waveform generated by a self-coupling effect between the second laser light and the return light from the measurement target of the laser light;
First and second signal extraction means for measuring the period of the interference waveform included in the output signals of the first and second detection means each time the interference waveform is input;
First and second number calculating means for calculating the number of interference waveforms per unit time from the measurement results of the first and second signal extracting means;
Sign providing means for assigning positive and negative signs to the calculation results of the first and second number calculating means;
The interference waveform proportional to the average distance between the semiconductor laser and the measurement object by calculating the average value of the signed calculation results of the first and second number calculation means, to which the sign is given by the sign assignment means. A distance proportional number calculating means for obtaining a distance proportional number which is the number of
The latest signed calculation result of the first number calculation means to which the sign is given by the sign assignment means, and the signed calculation results of the first and second number calculation means in the past from the calculation result The absolute value of the difference from the average value of the second or the latest signed calculation result of the second number calculation means, given the sign by the sign giving means, and the past of the calculation result, By calculating the absolute value of the difference from the average value of the signed calculation results of the first and second number calculating means, or by calculating the average value of the two absolute values, it is proportional to the displacement of the measurement object A displacement proportional number calculating means for obtaining a displacement proportional number that is the number of interference waveforms obtained;
The physical quantity of the measurement object is calculated based on the signed calculation results of the first and second number calculating means and the displacement proportional number calculated by the displacement proportional number calculating means given the code by the sign providing means. Physical quantity calculation means,
The sign assigning means includes a larger calculation result of the latest calculation results of the first and second number calculation means, and a sign of the first and second number calculation means that is earlier than the calculation result. The size relationship with the double of the distance proportional number calculated using the attached calculation result, the coincidence mismatch of the increase / decrease direction of the calculation result of the first and second number calculation means, or the first and second numbers A physical quantity sensor, wherein positive and negative signs are added to the calculation results of the first and second number calculation means according to a change in an average value of calculation results of the calculation means. 測定対象に第１のレーザ光を放射する第１の半導体レーザと、
前記測定対象に前記第１のレーザ光と平行に第２のレーザ光を放射する第２の半導体レーザと、
少なくとも発振波長が連続的に単調増加する発振期間が繰り返し存在するように前記第１の半導体レーザを動作させる第１の発振波長変調手段と、
前記第１の半導体レーザと発振波長の増減が逆になるように前記第２の半導体レーザを動作させる第２の発振波長変調手段と、
前記第１のレーザ光とこのレーザ光の前記測定対象からの戻り光との自己結合効果によって生じる干渉波形を含む電気信号を検出する第１の検出手段と、
前記第２のレーザ光とこのレーザ光の前記測定対象からの戻り光との自己結合効果によって生じる干渉波形を含む電気信号を検出する第２の検出手段と、
前記第１、第２の検出手段の出力信号に含まれる干渉波形の周期をそれぞれ干渉波形が入力される度に計測する第１、第２の信号抽出手段と、
この第１、第２の信号抽出手段の計測結果からそれぞれ単位時間当たりの干渉波形の数を算出する第１、第２の個数算出手段と、
この第１、第２の個数算出手段の算出結果に基づいて、前記測定対象が微小変位状態にあると仮定した場合と変位状態にあると仮定した場合の各々について前記測定対象の物理量の候補値を算出する物理量候補値算出手段と、
前記第１の個数算出手段の算出結果の時間変化に対して前記第２の個数算出手段の算出結果の時間変化が逆方向の場合、前記測定対象が微小変位状態であると判定し、前記第１の個数算出手段の算出結果の時間変化に対して前記第２の個数算出手段の算出結果の時間変化が同方向の場合、前記測定対象が変位状態であると判定する状態判定手段と、
前記状態判定手段の判定結果に基づいて前記候補値の選定を行い、前記測定対象の物理量を確定する物理量確定手段とを備えることを特徴とする物理量センサ。 A first semiconductor laser that emits a first laser beam to a measurement object;
A second semiconductor laser that emits a second laser beam in parallel to the first laser beam to the measurement object;
First oscillation wavelength modulation means for operating the first semiconductor laser such that at least an oscillation period in which the oscillation wavelength continuously increases monotonously exists repeatedly;
Second oscillation wavelength modulation means for operating the second semiconductor laser so that the increase / decrease of the oscillation wavelength is opposite to that of the first semiconductor laser;
First detection means for detecting an electrical signal including an interference waveform caused by a self-coupling effect between the first laser light and the return light from the measurement target of the laser light;
Second detection means for detecting an electrical signal including an interference waveform generated by a self-coupling effect between the second laser light and the return light from the measurement target of the laser light;
First and second signal extraction means for measuring the period of the interference waveform included in the output signals of the first and second detection means each time the interference waveform is input;
First and second number calculating means for calculating the number of interference waveforms per unit time from the measurement results of the first and second signal extracting means;
Based on the calculation results of the first and second number calculation means, the candidate values of the physical quantities of the measurement object for each of the cases where the measurement object is assumed to be in a minute displacement state and the displacement state are assumed. A physical quantity candidate value calculating means for calculating
When the time change of the calculation result of the second number calculation means is in the opposite direction to the time change of the calculation result of the first number calculation means, it is determined that the measurement object is in a minute displacement state, and the first State determination means for determining that the measurement object is in a displacement state when the time change of the calculation result of the second number calculation means is in the same direction with respect to the time change of the calculation result of one number calculation means ;
A physical quantity sensor comprising: a physical quantity determination unit that selects the candidate value based on a determination result of the state determination unit and determines a physical quantity to be measured. 請求項１記載の物理量センサにおいて、
前記符号付与手段は、前記第１、第２の個数算出手段の算出結果のうち大きい方の算出結果が前記距離比例個数の２倍数よりも小さい場合、前記第１の個数算出手段の算出結果の時間変化に対して前記第２の個数算出手段の算出結果の時間変化が逆方向の場合、あるいは前記第１、第２の個数算出手段の算出結果の平均値に変化が無い場合、前記第１、第２の個数算出手段の算出結果にそれぞれ正の符号を付与した符号付き算出結果を出力し、前記第１、第２の個数算出手段の算出結果のうち大きい方の算出結果が前記距離比例個数の２倍数以上の場合、前記第１の個数算出手段の算出結果の時間変化に対して前記第２の個数算出手段の算出結果の時間変化が同方向の場合、あるいは前記第１、第２の個数算出手段の算出結果の平均値が変化した場合、前記第１、第２の個数算出手段の算出結果のうち大きい方の算出結果に正の符号を付与し、小さい方の算出結果に負の符号を付与した符号付き算出結果を出力し、
前記物理量算出手段は、前記第１、第２の半導体レーザの最小発振波長および最大発振波長と前記符号付与手段によって符号が与えられた符号付き算出結果に基づいて前記測定対象との距離を算出し、前記第１、第２の半導体レーザの平均発振波長と前記変位比例個数算出手段が算出した変位比例個数に基づいて前記測定対象の速度を算出することを特徴とする物理量センサ。 The physical quantity sensor according to claim 1,
When the larger one of the calculation results of the first and second number calculation means is smaller than a multiple of the distance proportional number, the sign assigning means determines the calculation result of the first number calculation means. When the time change of the calculation result of the second number calculation means is opposite to the time change, or when the average value of the calculation results of the first and second number calculation means is not changed, the first And a signed calculation result obtained by adding a positive sign to the calculation result of the second number calculation means, and the larger calculation result of the calculation results of the first and second number calculation means is proportional to the distance. When the number of times is more than twice the number, the time change of the calculation result of the second number calculation means is the same direction as the time change of the calculation result of the first number calculation means, or the first and second The average value of the calculation result of the number calculation means of In this case, a positive sign is assigned to the larger calculation result among the calculation results of the first and second number calculation means, and a signed calculation result in which a negative sign is assigned to the smaller calculation result is output. ,
The physical quantity calculating means calculates the distance to the measurement object based on the minimum and maximum oscillation wavelengths of the first and second semiconductor lasers and a signed calculation result given a sign by the sign providing means. A physical quantity sensor that calculates the velocity of the measurement object based on an average oscillation wavelength of the first and second semiconductor lasers and a displacement proportional number calculated by the displacement proportional number calculation means. 請求項２記載の物理量センサにおいて、
前記物理量候補値算出手段は、前記測定対象の状態を微小変位状態あるいは前記微小変位状態よりも動きが急な変位状態のいずれかであるとし、前記測定対象が微小変位状態と仮定した場合と変位状態と仮定した場合の各々について、前記第１、第２の半導体レーザの最小発振波長および最大発振波長と前記第１、第２の個数算出手段の算出結果から前記測定対象との距離の候補値と前記測定対象の速度の候補値を算出し、
前記状態判定手段は、前記第１の個数算出手段の算出結果の時間変化に対して前記第２の個数算出手段の算出結果の時間変化が逆方向の場合、前記測定対象が微小変位状態にあると判定し、前記第１の個数算出手段の算出結果の時間変化に対して前記第２の個数算出手段の算出結果の時間変化が同方向の場合、前記測定対象が変位状態にあると判定し、
前記物理量確定手段は、前記測定対象が微小変位状態と判定された場合、前記測定対象が微小変位状態と仮定して算出された前記距離および速度の候補値を前記測定対象の物理量として確定し、前記測定対象が変位状態と判定された場合、前記測定対象が変位状態と仮定して算出された前記距離および速度の候補値を前記測定対象の物理量として確定することを特徴とする物理量センサ。 The physical quantity sensor according to claim 2,
The physical quantity candidate value calculating means assumes that the state of the measurement object is either a minute displacement state or a displacement state whose movement is steeper than that of the minute displacement state. For each of the assumptions of the state, the minimum and maximum oscillation wavelengths of the first and second semiconductor lasers and the candidate values for the distance to the measurement object from the calculation results of the first and second number calculation means And a candidate value for the speed of the measurement object,
The state determination means has a minute displacement state when the time change of the calculation result of the second number calculation means is opposite to the time change of the calculation result of the first number calculation means. When the time change of the calculation result of the second number calculation means is in the same direction with respect to the time change of the calculation result of the first number calculation means, it is determined that the measurement object is in a displacement state. ,
When the measurement target is determined to be in a minute displacement state, the physical quantity determination means determines the distance and speed candidate values calculated on the assumption that the measurement target is in a minute displacement state as a physical quantity of the measurement target; When it is determined that the measurement target is in a displacement state, the distance and speed candidate values calculated on the assumption that the measurement target is in a displacement state are determined as physical quantities of the measurement target. 請求項１乃至４のいずれか１項に記載の物理量センサにおいて、
さらに、前記第１、第２の信号抽出手段の計測結果を記憶する記憶手段と、
前記第１の信号抽出手段によって計測された補正対象の干渉波形の周期の直前に計測され前記記憶手段に記憶された所定数の干渉波形の周期の移動平均値と、前記第１の信号抽出手段によって計測された補正対象の干渉波形の周期の直後に計測され前記記憶手段に記憶された所定数の干渉波形の周期の移動平均値とを前記第１の信号抽出手段の計測結果について算出する第１の移動平均値算出手段と、
前記第２の信号抽出手段によって計測された補正対象の干渉波形の周期の直前に計測され前記記憶手段に記憶された所定数の干渉波形の周期の移動平均値と、前記第２の信号抽出手段によって計測された補正対象の干渉波形の周期の直後に計測され前記記憶手段に記憶された所定数の干渉波形の周期の移動平均値とを前記第２の信号抽出手段の計測結果について算出する第２の移動平均値算出手段と、
前記第１の信号抽出手段によって計測された補正対象の干渉波形の周期と前記第１の移動平均値算出手段によって算出された２つの移動平均値から得られる１つの値とを比較することにより、前記第１の信号抽出手段によって計測された補正対象の干渉波形の周期を補正し、この補正の結果に従って前記記憶手段に記憶された周期を更新する第１の周期補正手段と、
前記第２の信号抽出手段によって計測された補正対象の干渉波形の周期と前記第２の移動平均値算出手段によって算出された２つの移動平均値から得られる１つの値とを比較することにより、前記第２の信号抽出手段によって計測された補正対象の干渉波形の周期を補正し、この補正の結果に従って前記記憶手段に記憶された周期を更新する第２の周期補正手段とを備え、
前記第１、第２の個数算出手段は、前記第１、第２の信号抽出手段の計測結果から単位時間当たりの干渉波形の数を算出する代わりに、前記第１、第２の周期補正手段によって補正された干渉波形の周期からそれぞれ単位時間当たりの干渉波形の数を算出することを特徴とする物理量センサ。 The physical quantity sensor according to any one of claims 1 to 4,
And storage means for storing the measurement results of the first and second signal extraction means;
The moving average value of a predetermined number of interference waveform periods measured immediately before the period of the interference waveform to be corrected measured by the first signal extraction means and stored in the storage means, and the first signal extraction means The moving average value of the cycles of the predetermined number of interference waveforms measured immediately after the cycle of the interference waveform to be corrected measured by the above and stored in the storage means is calculated for the measurement result of the first signal extraction means. 1 moving average value calculating means;
The moving average value of the period of the predetermined number of interference waveforms measured immediately before the period of the interference waveform to be corrected measured by the second signal extraction means and stored in the storage means, and the second signal extraction means The moving average value of the period of the predetermined number of interference waveforms measured immediately after the period of the interference waveform to be corrected measured by the above and stored in the storage means is calculated for the measurement result of the second signal extraction means. Two moving average value calculating means;
By comparing the period of the interference waveform to be corrected measured by the first signal extraction means and one value obtained from the two moving average values calculated by the first moving average value calculation means, First period correcting means for correcting the period of the interference waveform to be corrected measured by the first signal extracting means, and updating the period stored in the storage means according to the result of the correction;
By comparing the period of the correction target interference waveform measured by the second signal extraction unit and one value obtained from the two moving average values calculated by the second moving average value calculation unit, A second period correction unit that corrects the period of the interference waveform to be corrected measured by the second signal extraction unit and updates the period stored in the storage unit according to a result of the correction;
The first and second number calculating means instead of calculating the number of interference waveforms per unit time from the measurement results of the first and second signal extracting means, the first and second period correcting means. A physical quantity sensor, wherein the number of interference waveforms per unit time is calculated from the period of the interference waveform corrected by. 少なくとも発振波長が連続的に単調増加する発振期間が繰り返し存在するように第１の半導体レーザを動作させる第１の発振手順と、
前記第１の半導体レーザと発振波長の増減が逆になるように第２の半導体レーザを動作させる第２の発振手順と、
前記第１の半導体レーザから放射された第１のレーザ光とこのレーザ光の測定対象からの戻り光との自己結合効果によって生じる干渉波形を含む電気信号を検出する第１の検出手順と、
前記第２の半導体レーザから放射された第２のレーザ光とこのレーザ光の前記測定対象からの戻り光との自己結合効果によって生じる干渉波形を含む電気信号を検出する第２の検出手順と、
前記第１、第２の検出手順で得られた出力信号に含まれる干渉波形の周期をそれぞれ干渉波形が入力される度に計測する第１、第２の信号抽出手順と、
この第１、第２の信号抽出手順の計測結果からそれぞれ単位時間当たりの干渉波形の数を算出する第１、第２の個数算出手順と、
この第１、第２の個数算出手順の算出結果に正負の符号を付与する符号付与手順と、
この符号付与手順によって符号が与えられた、前記第１、第２の個数算出手順の符号付き算出結果の平均値を算出することにより、前記半導体レーザと測定対象との平均距離に比例した干渉波形の数である距離比例個数を求める距離比例個数算出手順と、
前記符号付与手順によって符号が与えられた、前記第１の個数算出手順の最新の符号付き算出結果と、この算出結果よりも過去の、前記第１、第２の個数算出手順の符号付き算出結果の平均値との差の絶対値を算出するか、前記符号付与手順によって符号が与えられた、前記第２の個数算出手順の最新の符号付き算出結果と、この算出結果よりも過去の、前記第１、第２の個数算出手順の符号付き算出結果の平均値との差の絶対値を算出するか、あるいは２つの前記絶対値の平均値を算出することにより、前記測定対象の変位に比例した干渉波形の数である変位比例個数を求める変位比例個数算出手順と、
前記符号付与手順によって符号が与えられた、前記第１、第２の個数算出手順の符号付き算出結果と前記変位比例個数算出手順で算出した変位比例個数に基づいて前記測定対象の物理量を算出する物理量算出手順とを備え、
前記符号付与手順は、前記第１、第２の個数算出手順の最新の算出結果のうち大きい方の算出結果と、この算出結果よりも過去の、前記第１、第２の個数算出手順の符号付き算出結果を用いて算出された前記距離比例個数の２倍数との大小関係、前記第１、第２の個数算出手順の算出結果の増減方向の一致不一致、あるいは前記第１、第２の個数算出手順の算出結果の平均値の変化に応じて、前記第１、第２の個数算出手順の算出結果に正負の符号を付与することを特徴とする物理量計測方法。 A first oscillation procedure for operating the first semiconductor laser so that at least an oscillation period in which the oscillation wavelength continuously increases monotonously exists;
A second oscillation procedure for operating the second semiconductor laser so that the increase / decrease of the oscillation wavelength is opposite to that of the first semiconductor laser;
A first detection procedure for detecting an electrical signal including an interference waveform caused by a self-coupling effect between the first laser light emitted from the first semiconductor laser and the return light from the measurement target of the laser light;
A second detection procedure for detecting an electrical signal including an interference waveform caused by a self-coupling effect between the second laser light emitted from the second semiconductor laser and the return light of the laser light from the measurement target;
First and second signal extraction procedures for measuring the period of the interference waveform included in the output signal obtained by the first and second detection procedures each time the interference waveform is input;
First and second number calculation procedures for calculating the number of interference waveforms per unit time from the measurement results of the first and second signal extraction procedures;
A sign assignment procedure for assigning positive and negative signs to the calculation results of the first and second number calculation procedures;
An interference waveform proportional to the average distance between the semiconductor laser and the measurement object by calculating the average value of the signed calculation results of the first and second number calculation procedures, which are given the codes by the sign assignment procedure. A distance proportional number calculation procedure for obtaining a distance proportional number that is a number of
The latest signed calculation result of the first number calculation procedure given the code by the sign assignment procedure, and the signed calculation result of the first and second number calculation procedures past the calculation result Calculating the absolute value of the difference from the average value of the first or the latest signed calculation result of the second number calculation procedure, which is given a sign by the sign assignment procedure, and the past of the calculation result, By calculating the absolute value of the difference from the average value of the signed calculation results of the first and second number calculation procedures, or by calculating the average value of the two absolute values, it is proportional to the displacement of the measurement object A displacement proportional number calculation procedure for obtaining a displacement proportional number which is the number of interference waveforms obtained;
The physical quantity of the measurement target is calculated based on the signed calculation results of the first and second number calculation procedures and the displacement proportional number calculated by the displacement proportional number calculation procedure, which are given the codes by the sign assignment procedure. A physical quantity calculation procedure,
The sign assigning procedure includes a larger calculation result of the latest calculation results of the first and second number calculation procedures, and a sign of the first and second number calculation procedures in the past than the calculation result. The size relationship with the double of the distance proportional number calculated using the attached calculation result, the coincidence mismatch of the increase / decrease direction of the calculation result of the first and second number calculation procedures, or the first and second numbers A physical quantity measuring method comprising: adding a positive or negative sign to the calculation results of the first and second number calculation procedures according to a change in an average value of calculation results of the calculation procedures. 少なくとも発振波長が連続的に単調増加する発振期間が繰り返し存在するように第１の半導体レーザを動作させる第１の発振手順と、
前記第１の半導体レーザと発振波長の増減が逆になるように第２の半導体レーザを動作させる第２の発振手順と、
前記第１の半導体レーザから放射された第１のレーザ光とこのレーザ光の測定対象からの戻り光との自己結合効果によって生じる干渉波形を含む電気信号を検出する第１の検出手順と、
前記第２の半導体レーザから放射された第２のレーザ光とこのレーザ光の前記測定対象からの戻り光との自己結合効果によって生じる干渉波形を含む電気信号を検出する第２の検出手順と、
前記第１、第２の検出手順で得られた出力信号に含まれる干渉波形の周期をそれぞれ干渉波形が入力される度に計測する第１、第２の信号抽出手順と、
この第１、第２の信号抽出手順の計測結果からそれぞれ単位時間当たりの干渉波形の数を算出する第１、第２の個数算出手順と、
この第１、第２の個数算出手順の算出結果に基づいて、前記測定対象が微小変位状態にあると仮定した場合と変位状態にあると仮定した場合の各々について前記測定対象の物理量の候補値を算出する物理量候補値算出手順と、
前記第１の個数算出手順の算出結果の時間変化に対して前記第２の個数算出手順の算出結果の時間変化が逆方向の場合、前記測定対象が微小変位状態であると判定し、前記第１の個数算出手順の算出結果の時間変化に対して前記第２の個数算出手順の算出結果の時間変化が同方向の場合、前記測定対象が変位状態であると判定する状態判定手順と、
前記状態判定手順の判定結果に基づいて前記候補値の選定を行い、前記測定対象の物理量を確定する物理量確定手順とを備えることを特徴とする物理量計測方法。 A first oscillation procedure for operating the first semiconductor laser so that at least an oscillation period in which the oscillation wavelength continuously increases monotonously exists;
A second oscillation procedure for operating the second semiconductor laser so that the increase / decrease of the oscillation wavelength is opposite to that of the first semiconductor laser;
A first detection procedure for detecting an electrical signal including an interference waveform caused by a self-coupling effect between the first laser light emitted from the first semiconductor laser and the return light from the measurement target of the laser light;
A second detection procedure for detecting an electrical signal including an interference waveform caused by a self-coupling effect between the second laser light emitted from the second semiconductor laser and the return light of the laser light from the measurement target;
First and second signal extraction procedures for measuring the period of the interference waveform included in the output signal obtained by the first and second detection procedures each time the interference waveform is input;
First and second number calculation procedures for calculating the number of interference waveforms per unit time from the measurement results of the first and second signal extraction procedures;
Based on the calculation results of the first and second number calculation procedures, the candidate value of the physical quantity of the measurement object for each of the cases where the measurement object is assumed to be in a minute displacement state and the displacement state is assumed. A physical quantity candidate value calculation procedure for calculating
When the time change of the calculation result of the second number calculation procedure is in the opposite direction to the time change of the calculation result of the first number calculation procedure, the measurement object is determined to be in a minute displacement state, and the first A state determination procedure for determining that the measurement object is in a displacement state when the time change of the calculation result of the second number calculation procedure is in the same direction with respect to the time change of the calculation result of the number calculation procedure of one ;
A physical quantity measurement method comprising: a physical quantity determination procedure for selecting the candidate value based on a determination result of the state determination procedure and determining the physical quantity of the measurement target. 請求項６記載の物理量計測方法において、
前記符号付与手順は、前記第１、第２の個数算出手順の算出結果のうち大きい方の算出結果が前記距離比例個数の２倍数よりも小さい場合、前記第１の個数算出手順の算出結果の時間変化に対して前記第２の個数算出手順の算出結果の時間変化が逆方向の場合、あるいは前記第１、第２の個数算出手順の算出結果の平均値に変化が無い場合、前記第１、第２の個数算出手順の算出結果にそれぞれ正の符号を付与した符号付き算出結果を出力し、前記第１、第２の個数算出手順の算出結果のうち大きい方の算出結果が前記距離比例個数の２倍数以上の場合、前記第１の個数算出手順の算出結果の時間変化に対して前記第２の個数算出手順の算出結果の時間変化が同方向の場合、あるいは前記第１、第２の個数算出手順の算出結果の平均値が変化した場合、前記第１、第２の個数算出手順の算出結果のうち大きい方の算出結果に正の符号を付与し、小さい方の算出結果に負の符号を付与した符号付き算出結果を出力し、
前記物理量算出手順は、前記第１、第２の半導体レーザの最小発振波長および最大発振波長と前記符号付与手順によって符号が与えられた符号付き算出結果に基づいて前記測定対象との距離を算出し、前記第１、第２の半導体レーザの平均発振波長と前記変位比例個数算出手順で算出した変位比例個数に基づいて前記測定対象の速度を算出することを特徴とする物理量計測方法。 The physical quantity measuring method according to claim 6,
In the sign assignment procedure, when the larger one of the calculation results of the first and second number calculation procedures is smaller than twice the distance proportional number, the calculation result of the first number calculation procedure When the time change of the calculation result of the second number calculation procedure is opposite to the time change, or when the average value of the calculation result of the first and second number calculation procedures is not changed, the first The signed calculation result obtained by adding a positive sign to the calculation result of the second number calculation procedure is output, and the larger calculation result of the calculation results of the first and second number calculation procedures is proportional to the distance. When the number of times is two or more times the number, when the time change of the calculation result of the second number calculation procedure is in the same direction with respect to the time change of the calculation result of the first number calculation procedure, or the first and second The average value of the calculation result of the number calculation procedure of The signed calculation result is output by adding a positive sign to the larger calculation result of the first and second number calculation procedures and adding a negative sign to the smaller calculation result. ,
The physical quantity calculation procedure calculates the distance to the measurement object based on the minimum oscillation wavelength and the maximum oscillation wavelength of the first and second semiconductor lasers and a signed calculation result given a sign by the sign assignment procedure. A physical quantity measuring method, comprising: calculating a velocity of the measuring object based on an average oscillation wavelength of the first and second semiconductor lasers and a displacement proportional number calculated in the displacement proportional number calculation procedure. 請求項７記載の物理量計測方法において、
前記物理量候補値算出手順は、前記測定対象の状態を微小変位状態あるいは前記微小変位状態よりも動きが急な変位状態のいずれかであるとし、前記測定対象が微小変位状態と仮定した場合と変位状態と仮定した場合の各々について、前記第１、第２の半導体レーザの最小発振波長および最大発振波長と前記第１、第２の個数算出手順の算出結果から前記測定対象との距離の候補値と前記測定対象の速度の候補値を算出し、
前記状態判定手順は、前記第１の個数算出手順の算出結果の時間変化に対して前記第２の個数算出手順の算出結果の時間変化が逆方向の場合、前記測定対象が微小変位状態にあると判定し、前記第１の個数算出手順の算出結果の時間変化に対して前記第２の個数算出手順の算出結果の時間変化が同方向の場合、前記測定対象が変位状態にあると判定し、
前記物理量確定手順は、前記測定対象が微小変位状態と判定した場合、前記測定対象が微小変位状態と仮定して算出した前記距離および速度の候補値を前記測定対象の物理量として確定し、前記測定対象が変位状態と判定した場合、前記測定対象が変位状態と仮定して算出した前記距離および速度の候補値を前記測定対象の物理量として確定することを特徴とする物理量計測方法。 The physical quantity measurement method according to claim 7,
In the physical quantity candidate value calculation procedure, it is assumed that the state of the measurement object is either a minute displacement state or a displacement state that moves more rapidly than the minute displacement state, and the measurement object is assumed to be in a minute displacement state. For each of the assumptions of the state, a candidate value for the distance to the measurement object from the minimum and maximum oscillation wavelengths of the first and second semiconductor lasers and the calculation results of the first and second number calculation procedures. And a candidate value for the speed of the measurement object,
In the state determination procedure, when the time change of the calculation result of the second number calculation procedure is in the reverse direction with respect to the time change of the calculation result of the first number calculation procedure, the measurement object is in a minute displacement state. If the time change of the calculation result of the second number calculation procedure is in the same direction with respect to the time change of the calculation result of the first number calculation procedure, it is determined that the measurement object is in a displacement state. ,
In the physical quantity determination procedure, when the measurement target is determined to be in a minute displacement state, the distance and speed candidate values calculated on the assumption that the measurement target is in a minute displacement state are determined as physical quantities of the measurement target, and the measurement is performed. A physical quantity measurement method characterized in that, when it is determined that a target is in a displacement state, the distance and speed candidate values calculated on the assumption that the measurement target is in a displacement state are determined as physical quantities of the measurement target. 請求項６乃至９のいずれか１項に記載の物理量計測方法において、
さらに、前記第１、第２の信号抽出手順の計測結果を記憶手段に記憶させる記憶手順と、
前記第１の信号抽出手順で計測した補正対象の干渉波形の周期の直前に計測され前記記憶手段に記憶された所定数の干渉波形の周期の移動平均値と、前記第１の信号抽出手順で計測した補正対象の干渉波形の周期の直後に計測され前記記憶手段に記憶された所定数の干渉波形の周期の移動平均値とを前記第１の信号抽出手順の計測結果について算出する第１の移動平均値算出手順と、
前記第２の信号抽出手順で計測した補正対象の干渉波形の周期の直前に計測され前記記憶手段に記憶された所定数の干渉波形の周期の移動平均値と、前記第２の信号抽出手順で計測した補正対象の干渉波形の周期の直後に計測され前記記憶手段に記憶された所定数の干渉波形の周期の移動平均値とを前記第２の信号抽出手順の計測結果について算出する第２の移動平均値算出手順と、
前記第１の信号抽出手順で計測した補正対象の干渉波形の周期と前記第１の移動平均値算出手順で算出した２つの移動平均値から得られる１つの値とを比較することにより、前記第１の信号抽出手順で計測した補正対象の干渉波形の周期を補正し、この補正の結果に従って前記記憶手段に記憶された周期を更新する第１の周期補正手順と、
前記第２の信号抽出手順で計測した補正対象の干渉波形の周期と前記第２の移動平均値算出手順で算出した２つの移動平均値から得られる１つの値とを比較することにより、前記第２の信号抽出手順で計測した補正対象の干渉波形の周期を補正し、この補正の結果に従って前記記憶手段に記憶された周期を更新する第２の周期補正手順とを備え、
前記第１、第２の個数算出手順は、前記第１、第２の信号抽出手順の計測結果から単位時間当たりの干渉波形の数を算出する代わりに、前記第１、第２の周期補正手順で補正された干渉波形の周期からそれぞれ単位時間当たりの干渉波形の数を算出することを特徴とする物理量計測方法。 The physical quantity measuring method according to any one of claims 6 to 9,
A storage procedure for storing the measurement results of the first and second signal extraction procedures in a storage unit;
The moving average value of a predetermined number of interference waveform periods measured immediately before the period of the interference waveform to be corrected measured in the first signal extraction procedure and stored in the storage means, and the first signal extraction procedure First, the moving average value of the period of the predetermined number of interference waveforms measured immediately after the measured period of the interference waveform to be corrected and stored in the storage unit is calculated for the measurement result of the first signal extraction procedure. Moving average calculation procedure;
The moving average value of a predetermined number of interference waveform periods measured immediately before the period of the interference waveform to be corrected measured in the second signal extraction procedure and stored in the storage means, and the second signal extraction procedure A moving average value of a period of a predetermined number of interference waveforms measured immediately after the measured period of the interference waveform to be corrected and stored in the storage means is calculated for the measurement result of the second signal extraction procedure. Moving average calculation procedure;
By comparing the period of the interference waveform to be corrected measured in the first signal extraction procedure with one value obtained from the two moving average values calculated in the first moving average value calculation procedure, the first A first cycle correction procedure for correcting the cycle of the interference waveform to be corrected measured in the signal extraction procedure of 1 and updating the cycle stored in the storage means according to the result of the correction;
By comparing the period of the interference waveform to be corrected measured in the second signal extraction procedure with one value obtained from the two moving average values calculated in the second moving average calculation procedure, the first A second cycle correction procedure for correcting the cycle of the interference waveform to be corrected measured in the signal extraction procedure of 2, and updating the cycle stored in the storage means according to the result of the correction,
In the first and second number calculation procedures, instead of calculating the number of interference waveforms per unit time from the measurement results of the first and second signal extraction procedures, the first and second cycle correction procedures are performed. A physical quantity measuring method, wherein the number of interference waveforms per unit time is calculated from the period of interference waveforms corrected in step (1).
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