CN101312122B - 工件处理装置 - Google Patents
工件处理装置 Download PDFInfo
- Publication number
- CN101312122B CN101312122B CN2008100997039A CN200810099703A CN101312122B CN 101312122 B CN101312122 B CN 101312122B CN 2008100997039 A CN2008100997039 A CN 2008100997039A CN 200810099703 A CN200810099703 A CN 200810099703A CN 101312122 B CN101312122 B CN 101312122B
- Authority
- CN
- China
- Prior art keywords
- producing apparatus
- plasma
- workpiece
- plasma producing
- processing apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000009434 installation Methods 0.000 claims description 52
- 230000015572 biosynthetic process Effects 0.000 claims description 16
- 238000000034 method Methods 0.000 claims description 9
- 230000008569 process Effects 0.000 claims description 9
- 230000007723 transport mechanism Effects 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 14
- 239000004020 conductor Substances 0.000 description 8
- 238000012423 maintenance Methods 0.000 description 7
- 239000000758 substrate Substances 0.000 description 4
- 230000009471 action Effects 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 238000005192 partition Methods 0.000 description 3
- 238000005096 rolling process Methods 0.000 description 3
- 230000008859 change Effects 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000004411 aluminium Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000005755 formation reaction Methods 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 150000002926 oxygen Chemical class 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32733—Means for moving the material to be treated
- H01J37/32752—Means for moving the material to be treated for moving the material across the discharge
- H01J37/32761—Continuous moving
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67069—Apparatus for fluid treatment for etching for drying etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32192—Microwave generated discharge
- H01J37/32311—Circuits specially adapted for controlling the microwave discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Power Engineering (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Plasma Technology (AREA)
- Chemical Vapour Deposition (AREA)
- Drying Of Semiconductors (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
Description
Claims (10)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007-139174 | 2007-05-25 | ||
JP2007139174 | 2007-05-25 | ||
JP2007139174A JP4629068B2 (ja) | 2007-05-25 | 2007-05-25 | ワーク処理装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101312122A CN101312122A (zh) | 2008-11-26 |
CN101312122B true CN101312122B (zh) | 2010-07-21 |
Family
ID=40071218
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2008100997039A Expired - Fee Related CN101312122B (zh) | 2007-05-25 | 2008-05-21 | 工件处理装置 |
Country Status (5)
Country | Link |
---|---|
US (1) | US20080289577A1 (zh) |
JP (1) | JP4629068B2 (zh) |
KR (1) | KR100996620B1 (zh) |
CN (1) | CN101312122B (zh) |
TW (1) | TW200847854A (zh) |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5378170A (en) * | 1976-12-22 | 1978-07-11 | Toshiba Corp | Continuous processor for gas plasma etching |
EP0997926B1 (en) | 1998-10-26 | 2006-01-04 | Matsushita Electric Works, Ltd. | Plasma treatment apparatus and method |
US6222155B1 (en) * | 2000-06-14 | 2001-04-24 | The Esab Group, Inc. | Cutting apparatus with thermal and nonthermal cutters, and associated methods |
JP4754115B2 (ja) * | 2001-08-03 | 2011-08-24 | 東京エレクトロン株式会社 | プラズマ処理装置 |
JP4244176B2 (ja) | 2002-10-25 | 2009-03-25 | 大日本スクリーン製造株式会社 | 基板処理装置 |
JP3945377B2 (ja) * | 2002-11-01 | 2007-07-18 | 松下電器産業株式会社 | プラズマ処理装置 |
US6827075B1 (en) * | 2002-11-20 | 2004-12-07 | Robert Bellospirito | Apparatus for burning stone |
TW200501201A (en) * | 2003-01-15 | 2005-01-01 | Hirata Spinning | Substrate processing method and apparatus |
JP4383057B2 (ja) * | 2003-01-20 | 2009-12-16 | 積水化学工業株式会社 | プラズマ処理装置 |
JP2006035045A (ja) * | 2004-07-23 | 2006-02-09 | Seiko Epson Corp | プラズマ処理装置、プラズマ処理方法、電気光学装置の製造方法、電気光学装置、および電子機器 |
US7806077B2 (en) * | 2004-07-30 | 2010-10-05 | Amarante Technologies, Inc. | Plasma nozzle array for providing uniform scalable microwave plasma generation |
JP2006134829A (ja) | 2004-11-09 | 2006-05-25 | Seiko Epson Corp | プラズマ処理装置 |
-
2007
- 2007-05-25 JP JP2007139174A patent/JP4629068B2/ja not_active Expired - Fee Related
-
2008
- 2008-04-17 TW TW097113932A patent/TW200847854A/zh unknown
- 2008-05-02 KR KR1020080041243A patent/KR100996620B1/ko not_active IP Right Cessation
- 2008-05-12 US US12/152,039 patent/US20080289577A1/en not_active Abandoned
- 2008-05-21 CN CN2008100997039A patent/CN101312122B/zh not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
TW200847854A (en) | 2008-12-01 |
JP2008293839A (ja) | 2008-12-04 |
KR20080103899A (ko) | 2008-11-28 |
US20080289577A1 (en) | 2008-11-27 |
JP4629068B2 (ja) | 2011-02-09 |
CN101312122A (zh) | 2008-11-26 |
KR100996620B1 (ko) | 2010-11-25 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN100530530C (zh) | 等离子体处理装置和等离子体处理方法 | |
JP4412675B2 (ja) | 除電搬送装置および搬送時の除電方法 | |
JPH02153546A (ja) | 半導体の無塵化製造装置 | |
KR20010112062A (ko) | 열 커터와 비열 커터를 가진 절단 정치 및 그 절단 방법 | |
JP2009539238A (ja) | はんだ付けモジュールと、可動性であり、はんだ付けモジュール内に交換可能に挿入できる、少なくとも1つのはんだ付けステーションを備えるはんだ付け装置 | |
KR20150026835A (ko) | 반송 장치 | |
JP2022097568A (ja) | 自動倉庫システム | |
KR20110139642A (ko) | 궤도식 대차 시스템 | |
KR20130038122A (ko) | 용접 장치 | |
JP2010263068A (ja) | 電子回路部品装着システム | |
WO2015137364A1 (ja) | プラズマ処理装置 | |
CN101312122B (zh) | 工件处理装置 | |
JP5601459B2 (ja) | 電子回路部品装着機および電子回路部品装着システム | |
KR20140059716A (ko) | 기판 반송 설비 | |
JP5207079B2 (ja) | 容器搬送設備 | |
CN100481364C (zh) | 制造平板显示器的系统 | |
KR20080021325A (ko) | 기판 로딩/언로딩 장치 및 그 구동방법 | |
JP2006265639A (ja) | 長尺被溶射管体に溶射皮膜を形成するための溶射装置 | |
EP1539386B1 (en) | Device for cleaning and inspecting reticles | |
JPH11191582A (ja) | カセット搬送システム | |
KR102409167B1 (ko) | 플라즈마 발생장치 | |
KR100894576B1 (ko) | 세혈 방전가공장치용 절연성 작업테이블 어셈블리 | |
JP2005175429A (ja) | 基板カセット、基板保管搬送装置、基板搬入システム、基板搬出システム及び基板搬入/搬出システム | |
WO2023105794A1 (ja) | 搬送ロボット及び部品実装システム | |
JP2005019529A (ja) | 吸着テーブルの静電気除去システム及びレーザ加工機 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: SAIAN CO., LTD. Free format text: FORMER OWNER: NORITSU KOKI CO. LTD. Effective date: 20100903 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20100903 Address after: Wakayama County Patentee after: Saian Corp. Address before: Wakayama County Patentee before: Noritsu Koki Co., Ltd. |
|
C17 | Cessation of patent right | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100721 Termination date: 20110521 |