CN101261119A - Light beam parallelism and collimating fault checking method - Google Patents

Light beam parallelism and collimating fault checking method Download PDF

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Publication number
CN101261119A
CN101261119A CNA2008100972065A CN200810097206A CN101261119A CN 101261119 A CN101261119 A CN 101261119A CN A2008100972065 A CNA2008100972065 A CN A2008100972065A CN 200810097206 A CN200810097206 A CN 200810097206A CN 101261119 A CN101261119 A CN 101261119A
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China
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measuring equipment
instrument
light beam
parallelism
optical axis
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CNA2008100972065A
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CN101261119B (en
Inventor
崔岩梅
周自力
师会生
夏树林
冷杰
李涛
刘春梅
张富根
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Catic Great Wall Measurement & Testing Tianjin Co ltd
Beijing Changcheng Institute of Metrology and Measurement AVIC
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Avic I Beijing Changcheng Institute Of Metrology & Measurement (cimm)
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Abstract

The invention provides a method for detecting light beam parallelism and aiming error, which has the steps: (1) at first, optical axis parallelism measuring equipment, an instrument to be measured, a linear guide rail, a multi-tooth dividing table and a theodolite are horizontally adjusted, a cross of a reticle plate of the optical axis parallelism measuring equipment is illuminated, and an aiming cross of the instrument to be measured is adjusted to be coincident to the center of the cross of the reticle plate of the optical axis parallelism measuring equipment; (2) a pentagonal prism is arranged on the linear guide rail between the optical axis parallelism measuring equipment and the instrument to be measured, the angle of the pentagonal prism is adjusted so as to lead the aiming line of the theodolite to be coincident to the cross of the reticle plate of the optical axis parallelism measuring equipment, the linear guide rail is then moved to motion in an interface vertical to the light beam optical axis, and the light beam parallelism error of the optical axis parallelism measuring equipment is read out by the theodolite; (3) the multi-tooth dividing table is rotated at 90 DEG and the reticle plate of the instrument to be measured is illuminated, the corresponding angle of the center of the cross of the reticle plate of the instrument to be measured is read out by the theodolite so as to obtain the aiming error of the aiming instrument. Compared with the prior art, the technical proposal of the detection method has the outstanding advantages that the high-precision light beam parallelism and aiming error can be detected, with the precision of 2''.

Description

The detection method of a kind of light beam parallelism and pointing error
Technical field
The present invention is the detection method of a kind of light beam parallelism and pointing error, belongs to field of optical measuring technologies, relates to the detection method of light beam parallelism and pointing error.
Background technology
The plain shaft parallelism measuring equipment generally has a cross-graduation plate that can illuminate, this graticule is positioned on the focal plane of plain shaft parallelism measuring equipment, when therefore illuminating graticule, plain shaft parallelism measuring equipment output directional light, the cross-graduation plate is equivalent to an infinite distance target.During detection, tested equipment is positioned at the output terminal of plain shaft parallelism measuring equipment directional light, the cross-graduation plate of aiming plain shaft parallelism measuring equipment, and the aiming process finishes.Therefore, the light beam parallelism precision of plain shaft parallelism measuring equipment output should be higher than the pointing accuracy of sight device far away.But there is not method and apparatus that light beam parallelism and pointing error are quantitatively described as yet.
Summary of the invention
This invention designs the detection method that a kind of light beam parallelism and pointing error are provided at the shortcoming that exists in the existing method just, and its objective is to the plain shaft parallelism measuring equipment provides more high-precision test method of a kind of precision.
Technical solution of the present invention realizes by following measure:
The step of the detection method of this kind light beam parallelism and pointing error is:
(1) before the detection, at first with plain shaft parallelism measuring equipment, tested instrument, line slideway, multiteeth indexing table and transit level-off, illuminate the branch mark signature of plain shaft parallelism measuring equipment, and the aiming cross of adjusting tested instrument overlaps with the graticule cross center of plain shaft parallelism checkout equipment;
(2) on the line slideway between plain shaft parallelism measuring equipment and the tested instrument, place pentaprism and fixing then, adjusting pentaprism makes the boresight of transit overlap with the graticule cross of plain shaft parallelism measuring equipment, mobile again line slideway moves in the interface perpendicular to beam optical axis, is read the light beam parallelism error of plain shaft parallelism measuring equipment by transit;
(3) multiteeth indexing table is revolved turn 90 degrees, illuminate, read by the angle of test examination instrument graticule cross center correspondence, obtain the pointing error of sighting instrument aiming plain shaft parallelism measuring equipment by transit by the graticule of test examination instrument.
Description of drawings
Fig. 1 is the pick-up unit structural representation of light beam parallelism in the technical solution of the present invention
Fig. 2 is a pointing error pick-up unit structural representation in the technical solution of the present invention
Embodiment
Below with reference to accompanying drawing and embodiment technical solution of the present invention is further described:
Shown in accompanying drawing 1~2, (precision is that 0.3 "), transit 6 (precision is 1 ") constitute to the pick-up unit of light beam parallelism and pointing error by, tested instrument 5 (pointing accuracy 30 "), line slideway 4 (guide rail rectilinearity 2 "), pentaprism 2, multiteeth indexing table 3.Light beam parallelism be plain shaft parallelism measuring equipment 1 (precision is 5 " ~ 10 ") by test examination instrument, pointing error be sighting instrument 5 by test examination instrument.The detection method of this kind light beam parallelism and pointing error the steps include:
(1) before the detection, at first with plain shaft parallelism measuring equipment 1, tested instrument 5, line slideway 4, multiteeth indexing table 3 and transit 6 level-ofves, illuminate the branch mark signature of plain shaft parallelism measuring equipment 1, and the aiming cross of adjusting tested instrument 5 overlaps with the graticule cross center of plain shaft parallelism checkout equipment 1;
(2) on the line slideway 4 between plain shaft parallelism measuring equipment 1 and the tested instrument 5, place pentaprism 2 and fixing then, adjusting pentaprism 2 makes the boresight of transit 6 overlap with the graticule cross of plain shaft parallelism measuring equipment 1, mobile again line slideway 4 moves in the interface perpendicular to optical axis, and the light beam parallelism error of being read plain shaft parallelism measuring equipment 1 by transit 6 is 3 ";
(3) multiteeth indexing table 3 is revolved turn 90 degrees, illuminate by the graticule of test examination instrument 5, read by the angle of test examination instrument 5 graticule cross center correspondences by transit 6, the pointing error that obtains sighting instrument 5 aiming plain shaft parallelism measuring equipments 1 is 30 ".
In above-mentioned testing process, need to prove:
1, the corner deviation of pentaprism 2 should at first be examined and determine and be obtained, and should measure removal in the measuring process.
2, transit 6 can be substituted by other angle measuring instruments.
3, pentaprism 2 can be substituted by other light path rotation angle mechanisms.
4, multiteeth indexing table 3 can be substituted by other precision angles, rotation angle mechanism.
5, when mobile, the error that the guide rail rectilinearity is introduced should be far smaller than amount to be checked to line slideway 4 in the scope of optical axis cross section.
6, the error of multiteeth indexing table 3 introducings should be far smaller than amount to be checked.
7, the error of transit 6 or other angle-measuring equipments (as parallel light tube) introducing should be far smaller than amount to be checked.
Technical solution of the present invention compared with prior art, its outstanding advantages is to carry out high accuracy light The detection of the bundle depth of parallelism and collimating fault. Precision can reach 2 ".

Claims (1)

1. the detection method of light beam parallelism and pointing error, it is characterized in that: the step of this method is:
(1) before the detection, at first with plain shaft parallelism measuring equipment (1), tested instrument (5), line slideway (4), multiteeth indexing table (3) and transit (6) level-off, illuminate the branch mark signature of plain shaft parallelism measuring equipment (1), and the aiming cross of adjusting tested instrument (5) overlaps with the graticule cross center of plain shaft parallelism checkout equipment (1);
(2) line slideway (4) between plain shaft parallelism measuring equipment (1) and tested instrument (5) is gone up and is placed pentaprism (2) then, adjusting pentaprism (2) makes the boresight of transit (6) overlap with the graticule cross of plain shaft parallelism measuring equipment (1), mobile again line slideway (4) moves in the interface perpendicular to beam optical axis, is read the light beam parallelism error of plain shaft parallelism measuring equipment (1) by transit (6);
(3) multiteeth indexing table (3) is revolved turn 90 degrees, illuminate by the graticule of test examination instrument (5), read by the angle of test examination instrument (5) graticule cross center correspondence by transit (6), obtain the pointing error of sighting instrument (5) aiming plain shaft parallelism measuring equipment (1).
CN2008100972065A 2008-05-06 2008-05-06 Light beam parallelism and collimating fault checking method Expired - Fee Related CN101261119B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2008100972065A CN101261119B (en) 2008-05-06 2008-05-06 Light beam parallelism and collimating fault checking method

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Application Number Priority Date Filing Date Title
CN2008100972065A CN101261119B (en) 2008-05-06 2008-05-06 Light beam parallelism and collimating fault checking method

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CN101261119A true CN101261119A (en) 2008-09-10
CN101261119B CN101261119B (en) 2012-01-04

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Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103759923A (en) * 2014-01-20 2014-04-30 湖北航天技术研究院总体设计所 Collimator parallel optical axis orientation included angle calibration device
CN104154882A (en) * 2014-07-10 2014-11-19 哈尔滨工业大学 Double beam parallelism detection device and method based on differential defocus measurement
CN105423958A (en) * 2015-12-08 2016-03-23 中国航空工业集团公司洛阳电光设备研究所 Multi-optical-axis parallelism detection apparatus and method
CN107748426A (en) * 2017-10-26 2018-03-02 中国科学院光电研究院 A kind of prism angle debugging device and Method of Adjustment
CN108152013A (en) * 2017-12-28 2018-06-12 西安应用光学研究所 Electro-optical system pointing accuracy measuring device light path adjusting process
CN108507497A (en) * 2017-02-28 2018-09-07 北京卓力新航科技有限责任公司 Cannon multibarrel axis parallel degree optical alignment set
CN109374260A (en) * 2018-11-16 2019-02-22 中国科学院西安光学精密机械研究所 The calibration system and scaling method of the double-collimation zero-bit angle of optical delivery system

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CN1019525B (en) * 1989-12-21 1992-12-16 清华大学 Depth of parallelism and verticality laser measuring instrument and method
KR920006587B1 (en) * 1989-12-31 1992-08-10 삼성항공산업 주식회사 Parallel-measuring apparatus of light axis
CN1258072C (en) * 2002-10-15 2006-05-31 中国科学院长春光学精密机械与物理研究所 Inspection of parallelism of light axle of bending optical pipe
KR100596633B1 (en) * 2004-06-08 2006-07-03 학교법인 동아대학교 Abberations Measurement Apparatus for Aspherical Lens
CN1727843A (en) * 2005-01-13 2006-02-01 中国科学院长春光学精密机械与物理研究所 Laser emission and infrared reception two parallelism of optical axis caliberating devices on the surveyor's transit
CN1308656C (en) * 2005-08-12 2007-04-04 中国科学院上海光学精密机械研究所 Apparatus for measuring parallelity of laser beam

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103759923A (en) * 2014-01-20 2014-04-30 湖北航天技术研究院总体设计所 Collimator parallel optical axis orientation included angle calibration device
CN103759923B (en) * 2014-01-20 2016-08-17 湖北航天技术研究院总体设计所 Pointing instrumentation parallel optical axis orientation angle caliberating device
CN104154882A (en) * 2014-07-10 2014-11-19 哈尔滨工业大学 Double beam parallelism detection device and method based on differential defocus measurement
CN104154882B (en) * 2014-07-10 2017-06-13 哈尔滨工业大学 Dual-beam device for detecting parallelism and method based on differential confocal measurement
CN105423958A (en) * 2015-12-08 2016-03-23 中国航空工业集团公司洛阳电光设备研究所 Multi-optical-axis parallelism detection apparatus and method
CN105423958B (en) * 2015-12-08 2018-11-16 中国航空工业集团公司洛阳电光设备研究所 A kind of more parallelism of optical axis detection devices and detection method
CN108507497A (en) * 2017-02-28 2018-09-07 北京卓力新航科技有限责任公司 Cannon multibarrel axis parallel degree optical alignment set
CN107748426A (en) * 2017-10-26 2018-03-02 中国科学院光电研究院 A kind of prism angle debugging device and Method of Adjustment
CN108152013A (en) * 2017-12-28 2018-06-12 西安应用光学研究所 Electro-optical system pointing accuracy measuring device light path adjusting process
CN109374260A (en) * 2018-11-16 2019-02-22 中国科学院西安光学精密机械研究所 The calibration system and scaling method of the double-collimation zero-bit angle of optical delivery system
CN109374260B (en) * 2018-11-16 2023-09-01 中国科学院西安光学精密机械研究所 Calibration system and calibration method for double collimation zero included angle of optical transmission device

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