CN104154882A - Double beam parallelism detection device and method based on differential defocus measurement - Google Patents
Double beam parallelism detection device and method based on differential defocus measurement Download PDFInfo
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Abstract
The invention provides a double beam parallelism detection device and method based on differential defocus measurement, and belongs to the technical field of optical detection. The double beam parallelism detection method comprises the following steps: double beams to be detected enter a dispersion prism after penetrating through a collimator objective, and is divided into a beam of reflected light and a beam of transmitted light on each light dispersion surface of the dispersion prism; the transmitted light beams and the reflected light beams of the double beams to be detected are respectively completely enter a transmitted image acquisition surface of a high-precision image acquisition device in the transmission direction and a reflected image acquisition surface of a high-precision image acquisition device in the reflection direction, wherein the image acquisition surfaces of the high-precision image acquisition devices are arranged in a differential defocus manner relative to focal planes of the collimator objective, and can be used for simultaneously obtaining four light spots of the two transmitted light beams and the reflected light beams of the double beams to be detected as well as centroid positions of the light spots; the included angle between the double beams to be detected can be calculated through a defocus distance and light spot centroid distances, and is used for representing the parallelism of the double beams to be detected. According to the method and the device provided by the invention, the parallelism of the double beams to be detected can be well detected, and the influence of off-axis error of incident beams can be avoided.
Description
Technical field
The invention belongs to optical detective technology, relate generally to a kind of based on differential confocal measuring principle, for pick-up unit and the method for two bundles or multi-beam collimation.
Background technology
In conjunction with multiaxis spectroscope group, laser interferometer can be for measurement of angle.When using laser interferometer measurement angle, the collimation of spectroscope group outgoing beam and the measuring accuracy of laser interferometer are closely related, and the quality of outgoing beam collimation is determining the measuring accuracy of laser interferometer to a great extent.Need the collimation of spectroscope group outgoing beam to detect for this reason.
The people such as the Zhang Lei of Changchun University of Science and Technology propose a kind of device that the collimation of two route parallel beams is detected, utilize two pentagonal prisms and a wedge distant two-beam to be changed into the two-beam of close together, and then can the two-beam after changing be focused on and measure [a kind of device for detecting parallelism of two route parallel beams, publication number: CN100504289C] with small-bore auto-collimation collimator.The design focal point of this device is with small-bore auto-collimation collimator, to measure the collimation of the two-beam of remote incident, to reduce the cost of manufacture of parallel light tube, but when tested twin-beam collimation is better, after this twin-beam focuses on, can on focal plane, form two hot spots that major part is overlapping, now focus on the collimation information that measuring method is difficult to obtain two parallel beams to be measured.
The people such as the Zhang Lei of Changchun University of Science and Technology propose again a kind of device for detecting wide distance light beam parallelism subsequently, its effect is still with small-bore auto-collimation collimator, to measure the collimation of the two-beam of remote incident, and extend to laser and infrared light spectrum section by original white-light spectrum section, become multispectral optical system [device for detecting wide distance light beam parallelism, publication number: CN101408413B].Yet this pick-up unit is still difficult to, when tested twin-beam collimation is better, obtain light beam collimation information to be measured.
The people such as the Zhu Qing of Shanghai Optics and Precision Mechanics institute, Chinese Academy of Sciences propose a kind of device of measuring laser beam collimation, utilize diaphragm, convergent lens, semi-transparent semi-reflecting lens, two post lens, two 4 quadrant detectors to form light beam collimation detecting device, based on method of astigmatism focus error detection, carry out the detection [device of measuring laser beam collimation, publication number: CN2847219Y] of light beam collimation.Yet the measurement emphasis of this device is aimed at the detection of the angle of divergence of beam of laser, rather than detect for the collimation between two bundles or multi beam directional light.
The people such as Cui Yanmei of Beijing Great Wall metrological testing technology research institute of company of Aerospace Science and Industry Corporation propose the detection method of a kind of light beam parallelism and pointing error, light beam to be measured is injected to transit by pentaprism, by transit, read the depth of parallelism [detection method of a kind of light beam parallelism and pointing error, publication number: CN101261119B] of light beam to be measured.The advantage of this measuring method is more direct, and its precision is mainly decided by transit, and whole system precision can reach 2 ".But the method measuring speed is slow, and when tested light beam collimation is better, be difficult to measure.
In sum, the method for current several measuring beam collimations, its subject matter is that hot spot eclipse effect measuring accuracy while focusing on measurement, particularly, when tested light beam collimation is better, is difficult to realize the measurement to twin-beam or multiple beam collimation.
Summary of the invention
The defect existing in order to solve above-mentioned background technology, the present invention proposes a kind of twin-beam device for detecting parallelism and method based on differential confocal measuring principle, with the concrete numerical value of beam angle after quantizing, characterize the collimation of light beam, measuring accuracy is high, particularly when tested twin-beam collimation is better, still can realize the high precision of tested light beam collimation is detected.
The object of the present invention is achieved like this:
A kind of twin-beam device for detecting parallelism of measuring based on differential confocal, in the optical axis incident direction of collimator objective, be provided with twin-beam to be measured, in the optical axis exit direction of collimator objective, configure successively Amici prism and transmission direction high precision image harvester, described transmitted light beam high precision image harvester is connected with the computing machine that image capture software is housed, twin-beam to be measured incides on Amici prism after by collimator objective, on the light splitting surface of Amici prism, be all divided into through Beam bundle and a branch of folded light beam, the transmitted light beam of described twin-beam to be measured is complete to be incided on the transmitted light beam image acquisition face of transmission direction high precision image harvester, at described twin-beam to be measured, through in the folded light beam light path of Amici prism, configure reflection direction high precision image harvester, the folded light beam of described twin-beam to be measured is complete to be incided on the folded light beam image acquisition face of reflection direction high precision image harvester, described reflection direction high precision image harvester is connected with the computing machine that image capture software is housed, described collimator objective has respectively transmission focal plane and reflection focal plane at transmission direction and the reflection direction of Amici prism, described transmission focal plane does not overlap with transmitted light beam image acquisition face, described reflection focal plane does not overlap with folded light beam image acquisition face, and when the transmitted light beam image acquisition face of transmission direction high precision image harvester is positioned at the front portion, transmission focal plane of collimator objective, the folded light beam image acquisition face of reflection direction high precision image harvester is positioned at the rear portion, reflection focal plane of collimator objective, or when the transmitted light beam image acquisition face of transmission direction high precision image harvester is positioned at the rear portion, transmission focal plane of collimator objective, the folded light beam image acquisition face of reflection direction high precision image harvester is positioned at the front portion, reflection focal plane of collimator objective.
A twin-beam collimation detection method of measuring based on differential confocal, comprises the following steps:
One, after twin-beam incident collimator objective to be measured, regulate transmission, the position of reflection direction high precision image harvester, guarantee transmission, the transmission of reflection direction high precision image harvester, folded light beam image acquisition face is anterior and reflection rear portion, focal plane in the transmission focal plane of collimator objective respectively, or transmission, folded light beam image acquisition face is anterior with reflection focal plane at the rear portion, transmission focal plane of collimator objective respectively, and adjustment transmission, folded light beam image acquisition face and transmission, reflection focal plane distance, make transmission, in the image of reflection direction high precision image harvester collection, all can see two distinct complete hot spots,
Two, the image capture software in use computing machine obtains the light spot image of two transmitted light beams in transmission high precision image harvester, by image, is processed and is obtained two corresponding facula mass center position (x
11, y
11) and (x
12, y
12), the centroid distance d of two hot spots
1for ((x
11-x
12)
2+ (y
11-y
12)
2)
0.5, in like manner obtain reflecting the facula mass center of two folded light beams in high precision image harvester apart from d
2, the angle between two beam directions to be measured is
the focal length that wherein f is collimator objective, β is for describing the collimation of twin-beam to be measured.
The present invention has following characteristics and good result:
1. device proposed by the invention is based on out of focus measuring principle, can collect the facula mass center positional information of two light beams simultaneously, when twin-beam collimation to be measured better (even two light beams are completely parallel), still can realize the synchronous acquisition to twin-beam facula mass center position, avoided focusing on the hot spot overlap problem of measuring method when twin-beam collimation to be measured is better, and greatly reduced that light source is beated and impact that the environmental factor such as air turbulence is measured collimation, this is that the present invention is different from one of main innovate point of prior art.
2. device proposed by the invention, the position of its two groups of high precision image harvesters lays respectively at behind the Qian He focal plane, focal plane of collimator objective, and these apparatus and method are to adopt differential confocal to measure.Adopt differential confocal to measure not only and can when twin-beam collimation to be measured better (even two light beams are completely parallel), still can realize the synchronous acquisition to twin-beam facula mass center position, and can eliminate the detecting error causing from axle due to incident light, this is two of the present invention's main innovate point of being different from prior art.
Accompanying drawing explanation
Fig. 1 is the twin-beam device for detecting parallelism structural representation of measuring based on differential confocal
Fig. 2 is hot spot and the centroid position schematic diagram of two transmitted light beams on image acquisition face
Piece number explanation in figure: 1. twin-beam to be measured, 2. collimator objective, 3. Amici prism, 4a. transmission direction high precision image harvester, 4b. reflection direction high precision image harvester, the 5. hot spot of computing machine, 6a. transmission focal plane, 6b. reflection focal plane, 7a. transmitted light beam image acquisition face, 7b. folded light beam image acquisition face, 8a8b. two transmitted light beams
Embodiment
Below in conjunction with accompanying drawing, embodiment of the present invention is elaborated.
A kind of twin-beam device for detecting parallelism of measuring based on differential confocal, in the optical axis incident direction of collimator objective 2, be provided with twin-beam 1 to be measured, in the optical axis exit direction of collimator objective 2, configure successively Amici prism 3 and transmission direction high precision image harvester 4a, described transmitted light beam high precision image harvester 4a is connected with the computing machine 5 that image capture software is housed, twin-beam 1 to be measured incides on Amici prism 3 after by collimator objective 2, on the light splitting surface of Amici prism 3, be all divided into through Beam bundle and a branch of folded light beam, the transmitted light beam of described twin-beam to be measured 1 is complete to be incided on the transmitted light beam image acquisition face 7a of transmission direction high precision image harvester 4a, at described twin-beam 1 to be measured, configure reflection direction high precision image harvester 4b in the folded light beam light path of Amici prism 3, the folded light beam of described twin-beam 1 to be measured is complete to be incided on the folded light beam image acquisition face 7b of reflection direction high precision image harvester 4b, described reflection direction high precision image harvester 4b is connected with the computing machine 5 that image capture software is housed, described collimator objective 2 has respectively transmission focal plane 6a and reflection focal plane 6b at transmission direction and the reflection direction of Amici prism 3, described transmission focal plane 6a does not overlap with transmitted light beam image acquisition face 7a, described reflection focal plane 6b does not overlap with folded light beam image acquisition face 7b, and when the transmitted light beam image acquisition face 7a of transmission direction high precision image harvester 4a is positioned at the transmission focal plane 6a front portion of collimator objective 2, the folded light beam image acquisition face 7b of reflection direction high precision image harvester 4b is positioned at the 6b rear portion, reflection focal plane of collimator objective 2, or when the transmitted light beam image acquisition face 7a of transmission direction high precision image harvester 4a is positioned at the 6a rear portion, transmission focal plane of collimator objective 2, the folded light beam image acquisition face 7b of reflection direction high precision image harvester 4b is positioned at the reflection focal plane 6b front portion of collimator objective 2.
The distance a of the transmitted light beam image acquisition face 7a of transmission direction high precision image harvester 4a and the transmission focal plane 6a of collimator objective 2
1, make the complete transmitted light beam image acquisition face 7a that incides of transmitted light beam of twin-beam 1 to be measured go up, and two light beams completely separately make transmission direction image collecting device 4a collect two complete and distinct hot spots; The distance a of the folded light beam image acquisition face 7b of reflection direction high precision image harvester 4b and the reflection focal plane 6b of collimator objective 2
2, make the complete folded light beam image acquisition face 7b that incides of folded light beam of twin-beam 1 to be measured go up, and two light beams completely separately make reflection direction image collecting device 4b collect two complete and distinct hot spots.
The described twin-beam collimation detection method of measuring based on differential confocal comprises the following steps:
One, after twin-beam incident collimator objective to be measured, regulate transmission, the position of reflection direction high precision image harvester, guarantee transmission, the transmission of reflection direction high precision image harvester, folded light beam image acquisition face is anterior and reflection rear portion, focal plane in the transmission focal plane of collimator objective respectively, or transmission, folded light beam image acquisition face is anterior with reflection focal plane at the rear portion, transmission focal plane of collimator objective respectively, and adjustment transmission, folded light beam image acquisition face and transmission, reflection focal plane distance, make transmission, in the image of reflection direction high precision image harvester collection, all can see two distinct complete hot spots,
Two, the image capture software in use computing machine obtains the light spot image of two transmitted light beams in transmission high precision image harvester, by image, is processed and is obtained two corresponding facula mass center position (x
11, y
11) and (x
12, y
12), the centroid distance d of two hot spots
1for ((x
11-x
12)
2+ (y
11-y
12)
2)
0.5, in like manner obtain reflecting the facula mass center of two folded light beams in high precision image harvester apart from d
2, the angle between two beam directions to be measured is
the focal length that wherein f is collimator objective, β is for describing the collimation of twin-beam to be measured.
While using the collimation that the above-mentioned twin-beam device for detecting parallelism of measuring based on differential confocal and method measure twin-beam to be measured, two groups of high precision image harvesters gather image simultaneously, obtain two hot spots of folded light beam of twin-beam to be measured by Amici prism and two hot spots of transmitted light beam image and the centroid position information of 4 hot spots altogether simultaneously, hot spot overlap problem while not only having avoided twin-beam collimation to be measured better, and greatly reduced that light source is beated and impact that the environmental factor such as air turbulence is measured collimation.
Amici prism 3 in the present invention also can replace with other minute optic component; And adopt apparatus and method of the present invention, be not restricted to the twin-beam being produced by spectroscope group, the collimation of a plurality of parallel beams that also can produce for other modes is measured, and the collimation between any two light beams in multiple beam all can be measured by method of the present invention.
Claims (2)
1. a twin-beam device for detecting parallelism of measuring based on differential confocal, in the optical axis incident direction of collimator objective (2), be provided with twin-beam to be measured (1), it is characterized in that: in the optical axis exit direction of collimator objective (2), configure successively Amici prism (3) and transmission direction high precision image harvester (4a), described transmitted light beam high precision image harvester (4a) is connected with the computing machine (5) that image capture software is housed, twin-beam to be measured (1) incides on Amici prism (3) after by collimator objective (2), on the light splitting surface of Amici prism (3), be all divided into through Beam bundle and a branch of folded light beam, the transmitted light beam of described twin-beam to be measured (1) is complete to be incided on the transmitted light beam image acquisition face (7a) of transmission direction high precision image harvester (4a), in folded light beam light path at described twin-beam to be measured (1) through Amici prism (3), configure reflection direction high precision image harvester (4b), the folded light beam of described twin-beam to be measured (1) is complete to be incided on the folded light beam image acquisition face (7b) of reflection direction high precision image harvester (4b), described reflection direction high precision image harvester (4b) is connected with the computing machine (5) that image capture software is housed, described collimator objective (2) has respectively transmission focal plane (6a) and reflection focal plane (6b) at transmission direction and the reflection direction of Amici prism (3), described transmission focal plane (6a) does not overlap with transmitted light beam image acquisition face (7a), described reflection focal plane (6b) does not overlap with folded light beam image acquisition face (7b), and when the transmitted light beam image acquisition face (7a) of transmission direction high precision image harvester (4a) is positioned at the front portion, transmission focal plane (6a) of collimator objective (2), the folded light beam image acquisition face (7b) of reflection direction high precision image harvester (4b) is positioned at the rear portion, reflection focal plane (6b) of collimator objective (2), or when the transmitted light beam image acquisition face (7a) of transmission direction high precision image harvester (4a) is positioned at the rear portion, transmission focal plane (6a) of collimator objective (2), the folded light beam image acquisition face (7b) of reflection direction high precision image harvester (4b) is positioned at the front portion, reflection focal plane (6b) of collimator objective (2).
2. a twin-beam collimation detection method of measuring based on differential confocal, is characterized in that: the method comprises the following steps:
One, after twin-beam incident collimator objective to be measured, regulate transmission, the position of reflection direction high precision image harvester, guarantee transmission, the transmission of reflection direction high precision image harvester, folded light beam image acquisition face is anterior and reflection rear portion, focal plane in the transmission focal plane of collimator objective respectively, or transmission, folded light beam image acquisition face is anterior with reflection focal plane at the rear portion, transmission focal plane of collimator objective respectively, and adjustment transmission, folded light beam image acquisition face and transmission, reflection focal plane distance, make transmission, in the image of reflection direction high precision image harvester collection, all can see two distinct complete hot spots,
Two, the image capture software in use computing machine obtains the light spot image of two transmitted light beams in transmission high precision image harvester, by image, is processed and is obtained two corresponding facula mass center position (x
11, y
11) and (x
12, y
12), the centroid distance d of two hot spots
1for ((x
11-x
12)
2+ (y
11-y
12)
2)
0.5, in like manner obtain reflecting the facula mass center of two folded light beams in high precision image harvester apart from d
2, the angle between two beam directions to be measured is
the focal length that wherein f is collimator objective, β is for describing the collimation of twin-beam to be measured.
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105865756A (en) * | 2016-06-07 | 2016-08-17 | 长春理工大学 | Thermal-optical test calibrating device |
| CN107037582A (en) * | 2017-04-11 | 2017-08-11 | 上海理工大学 | A kind of system for realizing optics Hilbert transform |
| CN108375453A (en) * | 2018-04-27 | 2018-08-07 | 中国科学院西安光学精密机械研究所 | Vertical adjustment system and method for X-ray focusing lens |
| CN112213078A (en) * | 2020-10-09 | 2021-01-12 | 中国人民解放军陆军工程大学 | Portable optical axis detection module for dual-wavelength laser reconnaissance system |
| CN112683198A (en) * | 2020-12-01 | 2021-04-20 | 江西省中久光电产业研究院 | Three-degree-of-freedom angle photoelectric measuring device and measuring method thereof |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03165201A (en) * | 1989-11-24 | 1991-07-17 | Hitachi Cable Ltd | Radial shearing interferometer |
| CN1731085A (en) * | 2005-08-12 | 2006-02-08 | 中国科学院上海光学精密机械研究所 | device for measuring laser beam parallelism |
| CN101226049A (en) * | 2008-01-22 | 2008-07-23 | 长春理工大学 | Device for detecting parallelism of two route parallel beams |
| CN101261119A (en) * | 2008-05-06 | 2008-09-10 | 中国航空工业第一集团公司北京长城计量测试技术研究所 | Method for detecting parallelism and aiming error of light beam |
| CN101408413A (en) * | 2008-11-28 | 2009-04-15 | 长春理工大学 | Device for detecting wide distance light beam parallelism |
| CN101852594A (en) * | 2010-05-10 | 2010-10-06 | 北京理工大学 | Super-resolution laser polarization differential confocal imaging method and device |
-
2014
- 2014-07-10 CN CN201410339034.3A patent/CN104154882B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03165201A (en) * | 1989-11-24 | 1991-07-17 | Hitachi Cable Ltd | Radial shearing interferometer |
| CN1731085A (en) * | 2005-08-12 | 2006-02-08 | 中国科学院上海光学精密机械研究所 | device for measuring laser beam parallelism |
| CN101226049A (en) * | 2008-01-22 | 2008-07-23 | 长春理工大学 | Device for detecting parallelism of two route parallel beams |
| CN101261119A (en) * | 2008-05-06 | 2008-09-10 | 中国航空工业第一集团公司北京长城计量测试技术研究所 | Method for detecting parallelism and aiming error of light beam |
| CN101408413A (en) * | 2008-11-28 | 2009-04-15 | 长春理工大学 | Device for detecting wide distance light beam parallelism |
| CN101852594A (en) * | 2010-05-10 | 2010-10-06 | 北京理工大学 | Super-resolution laser polarization differential confocal imaging method and device |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105865756A (en) * | 2016-06-07 | 2016-08-17 | 长春理工大学 | Thermal-optical test calibrating device |
| CN107037582A (en) * | 2017-04-11 | 2017-08-11 | 上海理工大学 | A kind of system for realizing optics Hilbert transform |
| CN107037582B (en) * | 2017-04-11 | 2020-04-10 | 上海理工大学 | System for realizing optical Hilbert transform |
| CN108375453A (en) * | 2018-04-27 | 2018-08-07 | 中国科学院西安光学精密机械研究所 | Vertical adjustment system and method for X-ray focusing lens |
| CN108375453B (en) * | 2018-04-27 | 2024-04-12 | 中国科学院西安光学精密机械研究所 | Vertical adjustment system and method for X-ray focusing lens |
| CN112213078A (en) * | 2020-10-09 | 2021-01-12 | 中国人民解放军陆军工程大学 | Portable optical axis detection module for dual-wavelength laser reconnaissance system |
| CN112213078B (en) * | 2020-10-09 | 2022-05-20 | 中国人民解放军陆军工程大学 | Portable optical axis detection module for dual-wavelength laser reconnaissance system |
| CN112683198A (en) * | 2020-12-01 | 2021-04-20 | 江西省中久光电产业研究院 | Three-degree-of-freedom angle photoelectric measuring device and measuring method thereof |
| CN112683198B (en) * | 2020-12-01 | 2023-02-21 | 江西省中久光电产业研究院 | Three-degree-of-freedom angle photoelectric measuring device and measuring method thereof |
| CN117190865A (en) * | 2023-10-20 | 2023-12-08 | 西安杰瑞测量科技有限公司 | Beam detection positioning instrument |
| CN117190865B (en) * | 2023-10-20 | 2024-06-18 | 西安杰瑞测量科技有限公司 | Beam detection positioning instrument |
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