CN107748426A - A kind of prism angle debugging device and Method of Adjustment - Google Patents
A kind of prism angle debugging device and Method of Adjustment Download PDFInfo
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- CN107748426A CN107748426A CN201711013768.2A CN201711013768A CN107748426A CN 107748426 A CN107748426 A CN 107748426A CN 201711013768 A CN201711013768 A CN 201711013768A CN 107748426 A CN107748426 A CN 107748426A
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- 239000000758 substrate Substances 0.000 claims abstract description 13
- 238000005259 measurement Methods 0.000 claims abstract description 6
- 210000004556 brain Anatomy 0.000 claims 1
- 230000005611 electricity Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 5
- 238000001228 spectrum Methods 0.000 description 5
- 238000009434 installation Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000003667 anti-reflective effect Effects 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 230000005622 photoelectricity Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
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Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/1805—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for prisms
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
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- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mounting And Adjusting Of Optical Elements (AREA)
Abstract
The present invention proposes a kind of prism angle debugging device and corresponding Method of Adjustment, and the measurement apparatus includes substrate, prism group platform, guide rail, precise rotating platform, autocollimator, computer, the problem of assembling, adjust which solves each prism angle in prism group.The reflected light information of prism surface is incided by catching light beam, realizes the measurement to prism angle.Overcome existing angular instrument can not measure several prism angle information and to prism packet size requirement it is too high the shortcomings that.
Description
Technical field
The present invention relates to the installation of optical element mounting technology, particularly prism group and adjustment.The present invention is mainly suitable for
The demarcation of prism group angle.
Background technology
In laser R＆D process, need often to laser spectrum (such as optical maser wavelength, laser linewidth), be controlled with
Meet different application demands.By taking excimer laser system as an example, for lithography application, in order to ensure semi-conductor silicon chip chip figure
The fineness of case, it is desirable to which photolithography light source has narrower laser linewidth output.Typically pass through linewidth narrowing in excimer laser
Module completes spectrum control.Prism group coordinates the method for grating to be to use wider spectrum-controlling method at present.
Fig. 1 is excimer laser system linewidth narrowing module basic structure schematic diagram, mainly includes prism group 11 and grating
22.Prism group 11 is one-dimensional to the light beam progress before reaching grating 22 to be expanded, collimates, and reduces intracavity beam energy density, together
When be advantageous to the selection and control of spectrum.After linewidth narrowing module, laser linewidth expression formula is Δ λ=Δ θ N1/2 Wherein, Δ θ is laser beam divergence, and N is round number of the single-pulse laser in resonator, and M is rib
Mirror expands multiplying power,For the grating dispersion of Littrow patterns,For prism group dispersion.It follows that prism group expands
Multiplying power is to influence the key of spectrum control result.
In order to obtain less line width (<0.5pm), it usually needs prism beam-expanded unit is formed using 3-4 prism, coordinated
Grating completes spectrum control function.The expand multiplying power and light beam of prism group have much relations in the incidence angle of prism surface
(Effects of prism beam expander and slits on excimer laser linewidth
Narrowing module, COL 11 (4), 041405 (2013)).In order to accurately control laser linewidth, it is necessary to light beam in rib
The incidence angle on mirror surface is accurately controlled, it is therefore desirable to the setting angle of several prisms in prism group is entered using a kind of device
Row fine-tunes.In addition, prism antireflective film only has good effect in narrower bandwidth range, pass through to increase light beam
Rate, the energy delivery efficiency for improving laser system are also required to carry out fine regulation and control to the setting angle of prism.At present,
Commercial angular instrument can only complete the demarcation of single prism angle or the demarcation of the relative angle of small size prism group.To larger chi
One technical problem up for solution of installation and debugging of prism relative angle in very little prism group.
The content of the invention
The purpose of the present invention is achieved through the following technical solutions.
A kind of prism angle debugging device, the measurement apparatus include substrate, prism group platform (1), guide rail (4), precision and turned
Platform (5), autocollimator (6), computer (7), it is characterised in that
Prism group platform (1) is fixed on substrate, for carrying, fixes prism group to be measured；
One 0 ° of high reflective mirror (2) is fixed on prism group platform (1), vertical with prism group platform (1)；
Aperture (3) is fixed on prism group platform (1), is coordinated with the one 0 ° of high reflective mirror (2) and is completed what adjustment benchmark determined
Function；
Guide rail (4) is fixed on substrate；
Precise rotating platform (5) is connected by sliding block with guide rail (4), can be moved freely along guide rail, and can be in guide rail anywhere
Locking, the precise rotating platform (5) can 360 ° rotate freely, rotate locking after can be achieved high-precision fine setting；
Autocollimator (6) is fixed on precise rotating platform, sends signal beams；
Computer (7) is connected with the autocollimator (6), the reflected light signal received for observing autocollimator (6)；
2nd 0 ° of high reflective mirror (8) is used to calibrate autocollimator (6), determines 0 ° of precise rotating platform.
Preferably, the one 0 ° of high reflective mirror (2) is unadjustable, and the 2nd 0 ° of high reflective mirror (8) and the one 0 ° of high reflective mirror (2) are perpendicular
Place in direction.
Preferably, the prism group includes prism (P1), prism (P2), prism (P3) and prism (P4).
Preferably, the autocollimator (6) is fixed on precise rotating platform, sends signal beams, and light beam incides prism table
Reflected behind face, if reflected light, in the range of autocollimator (6) receiving aperture, reflected light is by the photoelectricity of autocollimator (6)
Detector receives.
A kind of method that prism angle adjustment is carried out using any of the above-described device, including：
S1, precise rotating platform (5) zero setting, the light beam for sending autocollimator (6) are incided on the 2nd 0 ° of high reflective mirror (8).Root
The reflected light information shown according to computer (7), the angle of regulation autocollimator (6) make the reflected beams by backtracking；
S2, by precise rotating platform (5) rotate 90 °, regulation prism group platform (1) position, the light for sending autocollimator (6)
Beam can be incided on the one 0 ° of high reflective mirror (2) by aperture (3)；The angle of prism group platform (1) is adjusted, enables the reflected beams
Enough press backtracking；
S3, first piece of prism is installed on prism group platform (1)；Precise rotating platform (5) is moved to suitable position and turned
Dynamic certain angle, the light beam for enabling autocollimator (6) to send are irradiated on first piece of prism；
S4, according to the reflected light information on computer (7), finely tune first piece of prism, enable light beam by backtracking；It is fixed
First piece of prism；
S5, precise rotating platform (5) zero setting, before being moved to next piece of prism；The reflected light information observed on computer (7), fine setting
The angle of precise rotating platform (5), make to incide the light beam on the 2nd 0 ° of high reflective mirror (8) by backtracking；
S6, precise rotating platform (5) turned an angle, the light for enabling autocollimator (6) to send be irradiated to it is above-mentioned under
On one piece of prism；According to reflected light information on computer (7), the prism is finely tuned, enables light beam by backtracking；Fix the rib
Mirror；
S7, return to S5.
Preferably, when prism group is 4 pieces of prisms, the S5-S7 in claim 5 replaces with following steps：
S5, precise rotating platform (5) zero setting, before being moved to second piece of prism；The reflected light information observed on computer (7), fine setting
The angle of precise rotating platform (5), make to incide the light beam on the 2nd 0 ° of high reflective mirror (8) by backtracking；
S6, precise rotating platform (5) turned an angle, the light for enabling autocollimator (6) to send is irradiated to second piece of rib
On mirror；According to reflected light information on computer (7), second piece of prism is finely tuned, enables light beam by backtracking；Fix second piece of rib
Mirror；
S7, precise rotating platform (5) zero setting, before being moved to the 3rd piece of prism；The reflected light information observed on computer (7), fine setting
The angle of precise rotating platform (5), make to incide the light beam on the 2nd 0 ° of high reflective mirror (8) by backtracking.
S8, precise rotating platform (5) turned an angle, the light for enabling autocollimator (6) to send is irradiated to the 3rd piece of rib
On mirror；According to reflected light information on computer (7), the 3rd piece of prism is finely tuned, enables light beam by backtracking；Fix the 3rd piece of rib
Mirror；
S9, precise rotating platform (5) zero setting, before being moved to the 4th piece of prism；The reflected light information observed on computer (7), fine setting
The angle of precise rotating platform (5), make to incide the light beam on the 2nd 0 ° of high reflective mirror (8) by backtracking.
S10, precise rotating platform (5) turned an angle, the light for enabling autocollimator (6) to send is irradiated to the 4th piece of rib
On mirror；According to reflected light information on computer (7), the 4th piece of prism is finely tuned, enables light beam by backtracking；Fix the 4th piece of rib
Mirror.
Preferably, before s1 is carried out, also comprise the following steps：
Prism group platform (1), guide rail (4), the 2nd 0 ° of high reflective mirror (8) are fixed on substrate；
One 0 ° of high reflective mirror (2) and aperture (3) are fixed on prism group platform (1)；
Autocollimator (6) is fixed on precise rotating platform (5), and precise rotating platform (5) is connected by sliding block with guide rail (4), described
Precise rotating platform (5) can move on guide rail (4), and upper at an arbitrary position can lock；
Computer (7) is connected with autocollimator (6), and the reflected light that autocollimator (6) captures can be obtained by computer (7)
Signal；
2nd 0 ° of high reflective mirror (8) is placed in vertical direction with the one 0 ° of high reflective mirror (2).
The present invention proposes a kind of prism angle debugging device and corresponding Method of Adjustment, solves each prism angle in prism group
The problem of degree assembling, regulation.The reflected light information of prism surface is incided by catching light beam, realizes the survey to prism angle
Amount.Overcome existing angular instrument can not measure several prism angle information and to prism packet size requirement it is too high the shortcomings that.
Brief description of the drawings
By reading the detailed description of hereafter preferred embodiment, it is various other the advantages of and benefit it is common for this area
Technical staff will be clear understanding.Accompanying drawing is only used for showing the purpose of preferred embodiment, and is not considered as to the present invention
Limitation.And in whole accompanying drawing, identical part is denoted by the same reference numerals.In the accompanying drawings：
Fig. 1 is excimer laser system linewidth narrowing module basic structure schematic diagram in the prior art；
Fig. 2 is the prism angle installation adjusting device schematic diagram according to embodiment of the present invention；
Fig. 3 is the step schematic diagram according to the mounting and adjusting prism angle of embodiment of the present invention.
Embodiment
The illustrative embodiments of the disclosure are more fully described below with reference to accompanying drawings.Although this public affairs is shown in accompanying drawing
The illustrative embodiments opened, it being understood, however, that may be realized in various forms the disclosure without the reality that should be illustrated here
The mode of applying is limited.Conversely, there is provided these embodiments are to be able to be best understood from the disclosure, and can be by this public affairs
The scope opened completely is communicated to those skilled in the art.
Prism material difference is different to the refractive index of same light beam, and then makes light beam also different by the refraction angle of prism.
In order to avoid influence of the prism material to angle adjustment, therefore utilize the adjustment of reflected light information progress prism angle.
The present invention proposes a kind of prism angle debugging device and Method of Adjustment, and it is used for several prisms in measuring prism group
Angle.Measurement apparatus includes substrate (not shown), prism group platform 1, guide rail 4, precise rotating platform 5, autocollimator 6,7 six, computer
Point.Wherein, prism group platform 1 is fixed on substrate, for carrying, fixes prism group to be measured.Prism group generally comprises 3~
4 right-angle prisms, as shown in Fig. 2 being prism P1, P2, P3, P4.One 0 ° of high reflective mirror 2, it is fixed on prism group platform 1,
It is vertical with prism group platform 1, it is unadjustable.Aperture 3 and the one 0 ° of high reflective mirror 2, which coordinate, completes the function that adjustment benchmark determines.Lead
Rail 4 is fixed on substrate.Precise rotating platform 5 is fixed on guide rail, can be moved freely along guide rail, and can anywhere be locked in guide rail
It is fixed.Precise rotating platform 5 can 360 ° rotate freely, rotate locking after can be achieved high-precision fine setting.Autocollimator 6 is fixed on accurate turn
On platform, signal beams are sent, light beam reflects after inciding prism surface, if reflected light is in the receiving aperture of autocollimator 6
In the range of, reflected light can be received by the photodetector of autocollimator.The computer 7 being connected with autocollimator 6 is used to observe autocollimatic
The reflected light signal that straight instrument 6 receives.2nd 0 ° of high reflective mirror 8 is used to calibrate autocollimator 6, determines 0 ° of precise rotating platform.
Fig. 2 is prism angle debugging device schematic diagram.Device includes prism group platform 1, guide rail 4, precise rotating platform 5, autocollimatic
Straight 7, the 2nd 0 ° of instrument 6, computer high reflective mirrors 8.The one 0 ° of high reflective mirror 2 and aperture 3 are included in prism group platform 1.Prism group platform 1 is used
In carrying prism group, 3-4 prism can be typically placed, as shown in Fig. 2 being prism P1, P2, P3, P4.One 0 ° of high reflective mirror 2
It is used cooperatively with aperture 3, for determining adjustment benchmark.2nd 0 ° of high reflective mirror 8 is used to correct 0 ° of position of precise rotating platform.
Before adjustment, 4, the 2nd 0 ° of prism group platform 1, guide rail high reflective mirrors 8 are fixed on substrate.By the one 0 ° of high reflective mirror
2 and aperture 3 fixed on prism group platform 1.Autocollimator 6 is fixed on precise rotating platform 5, precise rotating platform 5 by sliding block with
Guide rail 4 is connected, and ensures that precise rotating platform 5 can move on guide rail 4, and upper at an arbitrary position can lock.Computer 7 and auto-collimation
Instrument 6 is connected, and the reflected light signal that autocollimator 6 captures can be obtained by computer 7.2nd 0 ° of high reflective mirror 8 and the one 0 ° of height
Anti- mirror 2 is substantially placed in vertical direction.As shown in figure 3, the present invention can use polylith prism, following embodiment with
Exemplified by four pieces of prisms, specific adjustment step is as follows：
1st, the zero setting of precise rotating platform 5, the light beam for sending autocollimator 6 are incided on the 2nd 0 ° of high reflective mirror 8.According to computer 7
The reflected light information of display, the angle of regulation autocollimator 6 make the reflected beams by backtracking.
2nd, precise rotating platform 5 is rotated 90 °, adjusts the position of prism group platform 1, the light beam for enabling autocollimator 6 to send
Incided by aperture 3 on the one 0 ° of high reflective mirror 2.The angle of prism group platform 1 is adjusted, the reflected beams is returned by former road
Return.
The 3rd, first piece of prism P1 is installed on prism group platform 1.Precise rotating platform 5 is moved to suitable position and rotation one
Determine angle, the light beam for enabling autocollimator 6 to send is irradiated on first piece of prism.
4th, according to the reflected light information on computer 7, first piece of prism is finely tuned, enables light beam by backtracking.Fix
One piece of prism.
5th, the zero setting of precise rotating platform 5, before being moved to second piece of prism P2.The reflected light information observed on computer 7, microadjustment precision
The angle of turntable 5, make to incide the light beam on the 2nd 0 ° of high reflective mirror 8 by backtracking.
6th, precise rotating platform 5 is turned an angle, the light for enabling autocollimator 6 to send is irradiated on second piece of prism.
According to reflected light information on computer 7, second piece of prism is finely tuned, enables light beam by backtracking.Fix second piece of prism.
7th, the zero setting of precise rotating platform 5, before being moved to the 3rd piece of prism P3.The reflected light information observed on computer 7, microadjustment precision
The angle of turntable 5, make to incide the light beam on the 2nd 0 ° of high reflective mirror 8 by backtracking.
8th, precise rotating platform 5 is turned an angle, the light for enabling autocollimator 6 to send is irradiated on the 3rd piece of prism.
According to reflected light information on computer 7, the 3rd piece of prism is finely tuned, enables light beam by backtracking.Fix the 3rd piece of prism.
9th, the zero setting of precise rotating platform 5, before being moved to the 4th piece of prism P4.The reflected light information observed on computer 7, microadjustment precision
The angle of turntable 5, make to incide the light beam on the 2nd 0 ° of high reflective mirror 8 by backtracking.
10th, precise rotating platform 5 is turned an angle, the light for enabling autocollimator 6 to send is irradiated on the 4th piece of prism.
According to reflected light information on computer 7, the 4th piece of prism is finely tuned, enables light beam by backtracking.Fix the 4th piece of prism.
The present invention realizes the measurement of each prism angle in prism group by rotating autocollimator, with conventional technology phase
Than, the apparatus structure compact, easy to operate, do not limited by prism packet size, adjustment precision is high, and uses the reflected beams
Obtain prism angle information is not influenceed by prism material.
The foregoing is only a preferred embodiment of the present invention, but protection scope of the present invention be not limited thereto,
Any one skilled in the art the invention discloses technical scope in, the change or replacement that can readily occur in,
It should all be included within the scope of the present invention.Therefore, protection scope of the present invention should be with the protection model of the claim
Enclose and be defined.
Claims (7)
1. a kind of prism angle debugging device, the measurement apparatus includes substrate, prism group platform (1), guide rail (4), precise rotating platform
(5), autocollimator (6), computer (7), it is characterised in that
Prism group platform (1) is fixed on substrate, for carrying, fixes prism group to be measured；
One 0 ° of high reflective mirror (2) is fixed on prism group platform (1), vertical with prism group platform (1)；
Aperture (3) is fixed on prism group platform (1), and the function of completing adjustment benchmark and determine is coordinated with the one 0 ° of high reflective mirror (2)；
Guide rail (4) is fixed on substrate；
Precise rotating platform (5) is connected by sliding block with guide rail (4), can be moved freely along guide rail, and can anywhere be locked in guide rail,
The precise rotating platform (5) can 360 ° rotate freely, rotate locking after can be achieved high-precision fine setting；
Autocollimator (6) is fixed on precise rotating platform, sends signal beams；
Computer (7) is connected with the autocollimator (6), the reflected light signal received for observing autocollimator (6)；
2nd 0 ° of high reflective mirror (8) is used to calibrate autocollimator (6), determines 0 ° of precise rotating platform.
2. device as claimed in claim 1, it is characterised in that
One 0 ° of high reflective mirror (2) is unadjustable, and the 2nd 0 ° of high reflective mirror (8) is placed in vertical direction with the one 0 ° of high reflective mirror (2).
3. device as claimed in claim 1, it is characterised in that
The prism group includes prism (P1), prism (P2), prism (P3) and prism (P4).
4. device as claimed in claim 1, it is characterised in that
The autocollimator (6) is fixed on precise rotating platform, sends signal beams, and light beam occurs instead after inciding prism surface
Penetrate, if reflected light, in the range of autocollimator (6) receiving aperture, reflected light is received by the photodetector of autocollimator (6).
5. a kind of method that prism angle adjustment is carried out using any one of claim 1-4 device, including：
S1, precise rotating platform (5) zero setting, the light beam for sending autocollimator (6) are incided on the 2nd 0 ° of high reflective mirror (8).According to electricity
The reflected light information of brain (7) display, the angle of regulation autocollimator (6) make the reflected beams by backtracking；
S2, by precise rotating platform (5) rotate 90 °, regulation prism group platform (1) position, the light beam for enabling autocollimator (6) to send
Enough incided by aperture (3) on the one 0 ° of high reflective mirror (2)；Adjust prism group platform (1) angle, enable the reflected beams by
Backtracking；
S3, first piece of prism is installed on prism group platform (1)；Precise rotating platform (5) is moved to suitable position and rotation one
Determine angle, the light beam for enabling autocollimator (6) to send is irradiated on first piece of prism；
S4, according to the reflected light information on computer (7), finely tune first piece of prism, enable light beam by backtracking；Fix first
Block prism；
S5, precise rotating platform (5) zero setting, before being moved to next piece of prism；The reflected light information observed on computer (7), microadjustment precision
The angle of turntable (5), make to incide the light beam on the 2nd 0 ° of high reflective mirror (8) by backtracking；
S6, precise rotating platform (5) turned an angle, the light for enabling autocollimator (6) to send is irradiated to above-mentioned next piece
On prism；According to reflected light information on computer (7), the prism is finely tuned, enables light beam by backtracking；Fix the prism；
S7, return to S5.
6. device as claimed in claim 5, it is characterised in that when prism group is 4 pieces of prisms, in claim 5
S5-S7 replaces with following steps：
S5, precise rotating platform (5) zero setting, before being moved to second piece of prism；The reflected light information observed on computer (7), microadjustment precision
The angle of turntable (5), make to incide the light beam on the 2nd 0 ° of high reflective mirror (8) by backtracking；
S6, precise rotating platform (5) turned an angle, the light for enabling autocollimator (6) to send is irradiated on second piece of prism；
According to reflected light information on computer (7), second piece of prism is finely tuned, enables light beam by backtracking；Fix second piece of prism；
S7, precise rotating platform (5) zero setting, before being moved to the 3rd piece of prism；The reflected light information observed on computer (7), microadjustment precision
The angle of turntable (5), make to incide the light beam on the 2nd 0 ° of high reflective mirror (8) by backtracking.
S8, precise rotating platform (5) turned an angle, the light for enabling autocollimator (6) to send is irradiated on the 3rd piece of prism；
According to reflected light information on computer (7), the 3rd piece of prism is finely tuned, enables light beam by backtracking；Fix the 3rd piece of prism；
S9, precise rotating platform (5) zero setting, before being moved to the 4th piece of prism；The reflected light information observed on computer (7), microadjustment precision
The angle of turntable (5), make to incide the light beam on the 2nd 0 ° of high reflective mirror (8) by backtracking.
S10, precise rotating platform (5) turned an angle, the light for enabling autocollimator (6) to send is irradiated to the 4th piece of prism
On；According to reflected light information on computer (7), the 4th piece of prism is finely tuned, enables light beam by backtracking；Fix the 4th piece of rib
Mirror.
7. the device as described in claim 5 or 6, it is characterised in that before s1 is carried out, also comprise the following steps：
Prism group platform (1), guide rail (4), the 2nd 0 ° of high reflective mirror (8) are fixed on substrate；
One 0 ° of high reflective mirror (2) and aperture (3) are fixed on prism group platform (1)；
Autocollimator (6) is fixed on precise rotating platform (5), and precise rotating platform (5) is connected by sliding block with guide rail (4), the precision
Turntable (5) can move on guide rail (4), and upper at an arbitrary position can lock；
Computer (7) is connected with autocollimator (6), and can obtain the reflected light that autocollimator (6) captures by computer (7) believes
Number；
2nd 0 ° of high reflective mirror (8) is placed in vertical direction with the one 0 ° of high reflective mirror (2).
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| CN201711013768.2A CN107748426A (en) | 2017-10-26 | 2017-10-26 | A kind of prism angle debugging device and Method of Adjustment |
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| CN201711013768.2A CN107748426A (en) | 2017-10-26 | 2017-10-26 | A kind of prism angle debugging device and Method of Adjustment |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109490206A (en) * | 2019-01-04 | 2019-03-19 | 北京科益虹源光电技术有限公司 | A kind of line width adjustment apparatus and system of spectrum-stable |
| CN110703451A (en) * | 2019-10-17 | 2020-01-17 | 云南北方驰宏光电有限公司 | System and method for installing and adjusting beam splitter prism |
| CN111856701A (en) * | 2020-07-20 | 2020-10-30 | 江苏普世祥光电技术有限公司 | Adjustable optical prism |
| CN113483993A (en) * | 2021-05-31 | 2021-10-08 | 浙江工业大学 | Intelligent measurement system and method for prism degree of micro-prism array lens |
| CN114077033A (en) * | 2020-08-20 | 2022-02-22 | 北京科益虹源光电技术有限公司 | Off-line optical element assembling and adjusting platform and assembling and adjusting method |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101033952A (en) * | 2007-01-19 | 2007-09-12 | 暨南大学 | Angle measurement method and device capable of distinguishing rotary direction of angle |
| CN101261119A (en) * | 2008-05-06 | 2008-09-10 | 中国航空工业第一集团公司北京长城计量测试技术研究所 | Light beam parallelism and collimating fault checking method |
| CN103235395A (en) * | 2013-04-24 | 2013-08-07 | 中国科学院上海光学精密机械研究所 | Prism beam expanding device |
| CN103399394A (en) * | 2013-08-23 | 2013-11-20 | 中国科学院长春光学精密机械与物理研究所 | Novel reflex light pipe capable of accurately levelling |
-
2017
- 2017-10-26 CN CN201711013768.2A patent/CN107748426A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101033952A (en) * | 2007-01-19 | 2007-09-12 | 暨南大学 | Angle measurement method and device capable of distinguishing rotary direction of angle |
| CN101261119A (en) * | 2008-05-06 | 2008-09-10 | 中国航空工业第一集团公司北京长城计量测试技术研究所 | Light beam parallelism and collimating fault checking method |
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