CN106767656A - The high-accuracy calibration device and scaling method of a kind of rolling angle measurement system - Google Patents
The high-accuracy calibration device and scaling method of a kind of rolling angle measurement system Download PDFInfo
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- CN106767656A CN106767656A CN201710096914.6A CN201710096914A CN106767656A CN 106767656 A CN106767656 A CN 106767656A CN 201710096914 A CN201710096914 A CN 201710096914A CN 106767656 A CN106767656 A CN 106767656A
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- 238000005259 measurement Methods 0.000 title claims abstract description 34
- 238000005096 rolling process Methods 0.000 title claims abstract description 30
- 238000000034 method Methods 0.000 title claims abstract description 16
- 230000010287 polarization Effects 0.000 claims abstract description 39
- 238000005388 cross polarization Methods 0.000 claims description 2
- 230000011514 reflex Effects 0.000 claims description 2
- 230000003287 optical effect Effects 0.000 description 5
- 102100040678 Programmed cell death protein 1 Human genes 0.000 description 2
- 101710089372 Programmed cell death protein 1 Proteins 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
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- 238000003786 synthesis reaction Methods 0.000 description 2
- 230000001186 cumulative effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000005622 photoelectricity Effects 0.000 description 1
- 230000009897 systematic effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/22—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring angles or tapers; for testing the alignment of axes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
- G01B21/042—Calibration or calibration artifacts
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
Abstract
The high-accuracy calibration device and scaling method of a kind of rolling angle measurement system, caliberating device includes the first Amici prism for the light emitted line of generating laser to be divided into two-way, wherein light is input into rolling angle measurement system all the way, and another road light arrives separately at the first photodetector and reflective mirror through the second Amici prism；The reflection light of reflective mirror is divided into the perpendicular S light and P light of two beams through polarization splitting prism, S light enters the first prism of corner cube for being arranged on polarization splitting prism side, P light enters the second prism of corner cube being arranged on turning platform, and the third angle cone prism light being additionally provided with described polarization splitting prism for the prism of corner cube of repeated reflection first and the second prism of corner cube institute reflection light is gathered by after repeatedly subdivision reflection by the 3rd photodetector.Scaling method is segmented by prism of corner cube repeated reflection and improves stated accuracy, simple to operate, can realize Fast Calibration, economical and practical.
Description
Technical field
The present invention relates to lathe rolling measurement field, and in particular to a kind of high-precision scale of rolling angle measurement system
Determine device and scaling method.
Background technology
Demarcation is whether that the degree of accuracy (precision) using the metrical instrument of standard to used instrument detects confirm it
Meet standard, effect is to determine the Input output Relationship of instrument or measuring system, assigns instrument or measuring system scale division value, really
Determine the characteristic index of instrument or measuring system and eliminate systematic error, improve the accuracy of instrument or system, be scientific measurement
Important step.
In lathe rolling measurement system, closed with the input-output of roll angle by the phase difference of measuring system
System, demarcation obtains the angle gain of measuring system.Rolling angle measurement system can realize the high-acruracy survey to roll angle, linear to survey
Amount scope is smaller, and the small deflection of the wave plate of sensing element 1/2 all can produce large effect to angle gain coefficient, so as to influence
The precision measure of roll angle.In view of the complicated measuring condition of industry spot, the possibility of the wave plate of sensing element 1/2 generation minor rotation
Property greatly, therefore, it is that have very much must to carry out quick, accurate, inexpensive field calibration in industry spot to rolling angle measurement system
Want.
In conventional art, what is generally used is the XL-80 laser interferences for directly reading registration or Reinshaw on turning platform
Instrument provides roll angle and rotates exact value, so as to demarcate the angle gain coefficient of rolling angle measurement system.
The reading method directly read on turning platform is inaccurate, and cumulative errors are greatly, and uses XL-80 laser interferometer
Calibration process approximately as：Mirror holder is first passed through by near 1/2 wave plate coarse adjustment to sensitive volume, then by XL-80 laser interferometer
The position of 1/2 wave plate of accurate adjustment, is adjusted to sensitive volume, and records phase difference value now, finally according to record
Data separate least square fitting goes out to change straight line, obtains straight slope as angle gain coefficient, the scaling method process
It is cumbersome, and to be not suitable for field calibration and application by means of other independent precision instruments.
The content of the invention
It is an object of the invention to be directed to above-mentioned the problems of the prior art, there is provided a kind of rolling angle measurement system it is high-precision
Degree caliberating device and scaling method, it is not necessary to by expensive precision instrument, make full use of the existing optics of measuring system
Fast Calibration is realized, operating process is simple, and reference light can be shared with measuring system, stated accuracy is higher.
To achieve these goals, the high-accuracy calibration device of rolling angle measurement system of the present invention, including for by laser
The light emitted line of transmitter is divided into the first Amici prism of two-way, wherein light input rolling angle measurement system, Ling Yilu all the way
Light arrives separately at the first photodetector and reflective mirror through the second Amici prism；The reflection light of reflective mirror is through polarization spectro rib
Mirror is divided into the perpendicular S light and P light of two beams, and S light enters the first prism of corner cube for being located at polarization splitting prism side, and P light enters
Enter the second prism of corner cube being located on turning platform, be additionally provided with polarization splitting prism for the prism of corner cube of repeated reflection first and
The third angle cone prism of two prism of corner cube institute reflection lights, light is adopted by after repeatedly subdivision reflection by the 3rd photodetector
Collection.
The light for being input into rolling angle measurement system reaches reflecting prism by λ/2 wave plate on λ/4 wave plate and turning platform, instead
The reflection light for penetrating prism again passes by λ/2 wave plate and is gathered by the second photodetector.
Match somebody with somebody respectively at the light receiver end of described the first photodetector, the second photodetector and the 3rd photodetector
Set is provided with the first polarizer, the second polarizer and the 3rd polarizer.
The third angle cone prism is overlapped mutually reflected light path and is provided with several.
The high-precision calibrating method of rolling angle measurement system of the present invention, comprises the following steps：First will by Amici prism
Reference beam in rolling angle measurement system introduces caliberating device；Then two beams are divided into by light beam is demarcated by polarization splitting prism
Perpendicular S light and P light, S light is arranged on the first prism of corner cube reflection of polarization splitting prism side, and the entrance of P light is arranged on
On turning platform and the second prism of corner cube that can be rotated with turning platform, the reflected light of the first prism of corner cube and the second prism of corner cube
Line is segmented after polarization splitting prism into the repeated reflection of the third angle cone prism；Finally it is acquired via photodetector, it is complete
Into demarcation.
Reference beam in rolling angle measurement system is introduced by caliberating device, the of caliberating device by the first Amici prism
Two Amici prisms are received and introduce light beam and reflex to the first photodetector and reflective mirror respectively, and the reflection light of reflective mirror is passed through
Polarization splitting prism is divided into the perpendicular S light and P light of two beams.
Compared with prior art, the present invention can be integrated with rolling angle measurement system altitude, will by polarization splitting prism
Demarcate light beam and be divided into the perpendicular S light and P light of two beams, the first prism of corner cube that S light is arranged on polarization splitting prism side is anti-
Penetrate, P light enters the second prism of corner cube that be arranged on turning platform and can be rotated with turning platform, the first prism of corner cube and second
The reflection light of prism of corner cube is segmented after polarization splitting prism into the repeated reflection of the third angle cone prism, due to the overall length of light path
Degree is elongated, and this configuration obtains the optical fine factor higher, drastically increases stated accuracy, if arrangement the N number of 3rd
Prism of corner cube, Measurement Resolution can improve 2N times, therefore, it is possible to realize the high-precision calibrating of submicrosecond level.The present invention need not be borrowed
Any high-precision precision instrument is helped, is demarcated and is shared reference light with measurement, and operating process is simple, can realize quick mark
It is fixed.
Brief description of the drawings
Fig. 1 caliberating devices of the present invention and rolling angle measurement system combination schematic diagram；
The structure and principle schematic of Fig. 2 caliberating devices of the present invention；
Specific embodiment
The present invention is described in further detail below in conjunction with the accompanying drawings.
Referring to Fig. 1,2, caliberating device of the present invention includes being used for the light emitted lines of generating laser Laser point in structure
Into the first Amici prism BS1 of two-way, wherein light is arrived by the λ/2 wave plate HWP on λ/4 wave plate QWP and turning platform RT all the way
Up to reflecting prism R, the reflection light of reflecting prism R again passes by λ/2 wave plate HWP and is gathered by the second photoelectric detector PD 2, another
Road light arrives separately at the first photoelectric detector PD 1 and reflective mirror M, the reflection light warp of reflective mirror M through the second Amici prism BS2
Polarization splitting prism PBS is divided into the perpendicular S light and P light of two beams, and the entrance of S light is arranged on polarization splitting prism PBS sides
First prism of corner cube CP1, P light enters the second prism of corner cube CP2 being arranged on turning platform RT, on polarization splitting prism PBS also
The third angle cone prism CP3 for repeated reflection the first prism of corner cube CP1 and the second prism of corner cube CP2 institutes reflection light is provided with,
The third angle cone prism CP3 is overlapped mutually reflected light path and is provided with several, and light is after repeatedly subdivision is reflected by the 3rd photoelectricity
Detector PD3 is gathered.The light of the first photoelectric detector PD 1, the second photoelectric detector PD 2 and the 3rd photoelectric detector PD 3 connects
Receiving end is supporting respectively to be provided with the first polarizer P1, the second polarizer P2 and the 3rd polarizer P3.
Generating laser Laser changes phase-delay quantity, the phase difference of π is produced, as survey as light source, λ/2 wave plate HWP
The sensing element of roll angle is measured, λ/4 wave plate QWP changes phase-delay quantity, the phase difference of pi/2 produced, as amplifier element.
Second Amici prism BS2 is located in reference path, in the reference beam in measuring system is reflexed to calibration system,
Share reference beam.Reflective mirror M changes beam path, light beam is entered into calibration system.3rd polarizer P3 makes in light beam
P light and S light interference is formed on optical direction.Polarization splitting prism PBS makes incident beam be divided into P, S line polarisation, wherein P light
Pass through completely, and S light is reflected.Second prism of corner cube CP2 is fixed on turning platform RT as sensing element, with turning platform RT mono-
Rise and rotate.By polarization splitting prism PBS, the first prism of corner cube CP1, the second prism of corner cube CP2, the third angle cone prism CP3 realities
Showed optical fine, in order to obtain resolution ratio higher, be increased before the input window of system detector N prism of corner cubes by
It is elongated in the total length of light path, so the optical fine factor higher is obtained using this configuration, which results in 2N multiplications
Strong Measurement Resolution, only illustrates by taking a prism of corner cube as an example herein.Incident beam enters into polarization splitting prism PBS
In be divided into two beams vertical S light and P light, wherein S light beams are incided on turning platform into the first prism of corner cube CP1, P light beam
Second prism of corner cube CP2.P light reflection into the second prism of corner cube CP2 is re-introduced into polarization splitting prism PBS, directly leads to
Cross polarization splitting prism PBS and enter into the third angle cone prism CP3, what such P light just can be repeatedly carries out light path reflection.Enter into
The S light of the first prism of corner cube CP1 is reflected also be re-introduced into polarization splitting prism PBS, direct by polarization splitting prism PBS
The third angle cone prism CP3 is reflected into, Amici prism reflection is again introduced into after the reflection by the third angle cone prism CP3,
Light path is finely divided in such a system.
Fig. 1 show the difference interference rolling angle measurement system based on two-frequency laser, and its basic thought is heterodyne
Interference theory and polarization are theoretical, are the change of phase difference by the change modulates of roll angle using orthogonal polarization light, so as to realize rolling
The measurement of corner.The present invention on the basis of original measuring system, by increase Amici prism, speculum, one
Individual polarizer, multiple prism of corner cubes, a polarization splitting prism and a photelectric receiver, devise a calibration system.
Scaling method of the invention is：An Amici prism is put before photelectric receiver first in reference path, can
A branch of reference light is shared with measuring system.Prism of corner cube is fixed on turning platform as sensing element, by speculum incident ray
In the system being made up of multiple prism of corner cubes and polarization splitting prism, the reflection of multiple light path is carried out, realize that optics is thin
Point.
As shown in Fig. 2 polarization splitting prism PBS, the first prism of corner cube CP1, the second prism of corner cube CP2, the third angle cone rib
Mirror CP3 realizes optical fine.Incident beam is entered into and is divided into two beams vertical S light and P light in polarization splitting prism PBS,
Wherein S light beams enter the second prism of corner cube CP2 that the first prism of corner cube CP1, P light beam is incided on turning platform.
P light reflection into the second prism of corner cube CP2 is re-introduced into polarization splitting prism PBS, directly by polarization point
Light prism PBS enters into the third angle cone prism CP3.What so P light just can be repeatedly carries out light path reflection.
The S light for entering into the first prism of corner cube CP1 is reflected and be also re-introduced into polarization splitting prism PBS, by polarization
Amici prism PBS is directly reflected into the third angle cone prism CP3, meets to form synthesis light with P light.Synthesis light can pass through again
Polarization splitting prism PBS is subdivided again, and such light path can be segmented repeatedly in such a system.
Claims (6)
1. a kind of high-accuracy calibration device of rolling angle measurement system, it is characterised in that：Including for generating laser to be sent out
The first Amici prism (BS1) that light is divided into two-way is penetrated, wherein light input rolling angle measurement system all the way, another road light warp
Second Amici prism (BS2) arrives separately at the first photodetector (PD1) and reflective mirror (M)；The reflection light warp of reflective mirror (M)
Polarization splitting prism (PBS) is divided into the perpendicular S light and P light of two beams, and the entrance of S light is located at polarization splitting prism (PBS) side
The first prism of corner cube (CP1), P light enters and is located at the second prism of corner cube (CP2) on turning platform (RT), polarization splitting prism
(PBS) the 3rd for the prism of corner cube of repeated reflection first (CP1) and the second prism of corner cube (CP2) institute reflection light is additionally provided with
Prism of corner cube (CP3), light is gathered by after repeatedly subdivision reflection by the 3rd photodetector (PD3).
2. the high-accuracy calibration device of rolling angle measurement system according to claim 1, it is characterised in that：Input roll angle is surveyed
The light of amount system reaches reflecting prism (R), reflection by λ/2 wave plate (HWP) on λ/4 wave plate (QWP) and turning platform (RT)
The reflection light of prism (R) again passes by λ/2 wave plate (HWP) and is gathered by the second photodetector (PD2).
3. the high-accuracy calibration device of rolling angle measurement system according to claim 2, it is characterised in that：The first described light
The light receiver end of electric explorer (PD1), the second photodetector (PD2) and the 3rd photodetector (PD3) is respectively with being arranged
It is equipped with the first polarizer (P1), the second polarizer (P2) and the 3rd polarizer (P3).
4. the high-accuracy calibration device of rolling angle measurement system according to claim 1, it is characterised in that：The third angle cone
Prism (CP3) is overlapped mutually reflected light path and is provided with several.
5. a kind of high-precision calibrating method of rolling angle measurement system, it is characterised in that comprise the following steps：Pass through light splitting first
Reference beam in rolling angle measurement system is introduced caliberating device by prism；Then will be demarcated by polarization splitting prism (PBS)
Light beam is divided into the perpendicular S light and P light of two beams, and S light is arranged on the first prism of corner cube of polarization splitting prism (PBS) side
(CP1) reflect, P light enters the second prism of corner cube that be arranged on turning platform (RT) and can be rotated with turning platform (RT)
(CP2), the reflection light of the first prism of corner cube (CP1) and the second prism of corner cube (CP2) enters after polarization splitting prism (PBS)
The third angle cone prism (CP3) repeated reflection is segmented；Finally it is acquired via photodetector, completes to demarcate.
6. the high-precision calibrating method of rolling angle measurement system according to claim 5, it is characterised in that：By the first light splitting
Reference beam in rolling angle measurement system is introduced caliberating device, second Amici prism (BS2) of caliberating device by prism (BS1)
Receive and introduce light beam and reflex to the first photodetector (PD1) and reflective mirror (M) respectively, the reflection light warp of reflective mirror (M)
Cross polarization splitting prism (PBS) and be divided into the perpendicular S light and P light of two beams.
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| CN201710096914.6A CN106767656B (en) | 2017-02-22 | 2017-02-22 | A kind of high-accuracy calibration device and scaling method of rolling angle measurement system |
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| CN201710096914.6A CN106767656B (en) | 2017-02-22 | 2017-02-22 | A kind of high-accuracy calibration device and scaling method of rolling angle measurement system |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108168466A (en) * | 2017-12-23 | 2018-06-15 | 西安交通大学 | A kind of a wide range of and high-precision rolling angle measurement device and measuring method |
| CN108398104A (en) * | 2018-02-01 | 2018-08-14 | 中国科学院国家天文台南京天文光学技术研究所 | The photoelectricity dynamic angle measuring devices and its method of random error can be reduced |
| CN110988844A (en) * | 2019-12-27 | 2020-04-10 | 陈泽雄 | Light path system and laser radar |
| CN113156888A (en) * | 2021-05-07 | 2021-07-23 | 扬州大学 | Efficient calculation method for sensitive geometric errors of rotary pendulum head type five-axis reconfigurable machine tool |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108168466A (en) * | 2017-12-23 | 2018-06-15 | 西安交通大学 | A kind of a wide range of and high-precision rolling angle measurement device and measuring method |
| CN108168466B (en) * | 2017-12-23 | 2019-07-23 | 西安交通大学 | A kind of a wide range of and high-precision rolling angle measurement device and measurement method |
| CN108398104A (en) * | 2018-02-01 | 2018-08-14 | 中国科学院国家天文台南京天文光学技术研究所 | The photoelectricity dynamic angle measuring devices and its method of random error can be reduced |
| CN110988844A (en) * | 2019-12-27 | 2020-04-10 | 陈泽雄 | Light path system and laser radar |
| CN113156888A (en) * | 2021-05-07 | 2021-07-23 | 扬州大学 | Efficient calculation method for sensitive geometric errors of rotary pendulum head type five-axis reconfigurable machine tool |
| CN113156888B (en) * | 2021-05-07 | 2022-04-01 | 扬州大学 | Efficient calculation method for sensitive geometric errors of rotary pendulum head type five-axis reconfigurable machine tool |
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