CN101229954A - Glass panel cutting method, glass panel cutting device and flat display - Google Patents
Glass panel cutting method, glass panel cutting device and flat display Download PDFInfo
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- CN101229954A CN101229954A CNA2007101026916A CN200710102691A CN101229954A CN 101229954 A CN101229954 A CN 101229954A CN A2007101026916 A CNA2007101026916 A CN A2007101026916A CN 200710102691 A CN200710102691 A CN 200710102691A CN 101229954 A CN101229954 A CN 101229954A
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Abstract
A method and a device for cutting a glass panel, which makes a nozzle (2) rotate around a rotation axis parallel to a surface of a glass panel (1); the nozzle (2) has a jet hole (20) for jetting digestion solution (L) which is capable of digesting material of the surface of the glass panel (1); when the jet hole (20) faces to the surface of the glass panel, the digestion solution (L) is jetted to impact the surface of the glass panel (1); when the nozzle (2) rotates, the glass panel (1) moves in the direction opposite to the rotation direction of the jet hole (20) when the jet hole (20) faces to the surface of the glass panel (1). The invention is capable of cutting the surface of the glass panel evenly with high speed, which is helpful in FPD and thin touch panel.
Description
Technical field
The present invention relates to employed glass panel cutting device in the manufacturing processed of flat-panel monitor and contact panel.
Background technology
Flat-panel monitor such as liquid-crystal display and plasma display (being designated hereinafter simply as FPD) is used in the various electronicss more, such as the display unit of computer or television receiver, mobile telephone display part etc.Thereby developing organic electroluminescent (EL) indicating meter that the employing luminous does not need backlight, has excellent high speed response characteristic recently, prospect in the future is worth expectation.
Require slimming for described FPD.Require slimming to be because slimming, miniaturization, the lightweight of the electronics that is carried.And notebook and mobile telephone especially require slimming and lightweight, therefore require FPD also slimming and lightweight.
On the other hand, even, popularizing owing to its life-time dilatation, but it is to be equipped on the such miniaturized electronics of mobile telephone after all, therefore still require slimming by on display panel, touching the contact panel that carries out the information input.
What account for most of thickness in FPD and contact panel is face glass.So, can reduce product thickness most effectively with face glass is slim.Therefore, disclose shown in the flat 5-249422 communique as Japanese Patent, by in the process of manufacturing process, the face glass surface being given etching and attenuate face glass, the thickness of attenuate product integral body thus.
(patent documentation 1) Japanese Patent discloses flat 5-249422 communique
But,, require highly to keep the Flatness on surface to being used for the face glass of FPD and contact panel.Have concavo-convexly if surface flatness is abominable, light can produce delicate at random in the jog office, therefore can show irregularly, makes the vision identification poor.
And unwanted step originally when glass panel cutting is the product assembling with the step of its thickness of attenuate must be finished in the short period of time, and when adopting the described technology of aforementioned communique, in order evenly to cut down and utmost point time-consuming.
Summary of the invention
The present invention is just in order to address the above problem, provide a kind of can be equably and the practical technique of cutting down at high speed with the face glass surface, and FPD and contact panel slim turned into contribution.
In order to address the above problem, technical solution of the present invention 1 is the glass panel cutting method that face glass is cut down equably, described method is to make nozzle rotation around the turning axle that is parallel to the face glass surface, described nozzle has the jet hole that sprays dissolution fluid, described dissolution fluid can be with the material stripping on the surface of face glass, when described jet hole during facing to face glass surperficial, the dissolution fluid that ejects impacts the surface of face glass and cuts down
It is characterized in that, when nozzle rotates, make face glass to moving over against the opposite direction of the sense of rotation of face glass this jet hole of when surface with jet hole.
The glass panel cutting method of technical scheme 2 of the present invention is in technical scheme 1, and the mobile of described face glass is to move towards the direction straight line perpendicular to described turning axle in the direction along the face glass surface.
The glass panel cutting method of technical scheme 3 of the present invention is in technical scheme 2, and the mobile of described face glass is that face glass along continuous straight runs straight line is moved.
The glass panel cutting method of technical scheme 4 of the present invention is glass panel cutting methods that face glass is cut down equably, described method is to make nozzle rotation around the turning axle that is parallel to the face glass surface, described nozzle has the jet hole that sprays dissolution fluid, described dissolution fluid can be with the material stripping on the surface of face glass, when described jet hole during facing to face glass surperficial, the dissolution fluid that ejects impacts the surface of face glass and cuts down
It is characterized in that, when nozzle rotates, make nozzle to moving over against the identical direction of the sense of rotation of face glass described jet hole of when surface with jet hole.
Technical scheme 7 of the present invention is in technical scheme 2, and the turning axle of the rotation of described nozzle is a vertical direction, and the mobile of described face glass is face glass to be remained on face glass is moved to the horizontal direction straight line.
Technical scheme 8 of the present invention is in technical scheme 5, has the structure that described face glass is remained on vertical position when cutting down.
Technical scheme 9 of the present invention is glass panel cutting devices that the surface of face glass is cut down equably, it is characterized in that having:
Nozzle, being used for can be with the dissolution fluid of the material stripping on face glass surface to the jet surface of face glass;
Supply with the dissolution fluid plenum system of dissolution fluid to nozzle;
Make nozzle with the rotating mechanism of rotation around the turning axle of the surperficial parallel direction of face glass,
Make nozzle when rotation by rotating mechanism, and at the jet hole of the nozzle that sprays dissolution fluid during facing to face glass surperficial, the dissolution fluid of ejection impacts the surface of face glass and cuts down,
Be provided with and make face glass with respect to nozzle and mobile travel mechanism, described travel mechanism has the structure that face glass is moved to the opposite direction of sense of rotation during over against the face glass surface with jet hole.
Technical scheme 10 of the present invention is in technical scheme 9, described travel mechanism have make described face glass along the direction on face glass surface towards the structure that moves with the vertical direction straight line of described turning axle.
Nozzle, being used for can be with the dissolution fluid of the material stripping on face glass surface to the jet surface of face glass;
Supply with the dissolution fluid plenum system of dissolution fluid to nozzle;
Make nozzle with the rotating mechanism of rotation around the turning axle of the surperficial parallel direction of face glass,
Make nozzle when rotation by rotating mechanism, and at the jet hole of the nozzle that sprays dissolution fluid during facing to face glass surperficial, the dissolution fluid of ejection impacts the surface of face glass and cuts down,
Be provided with and make nozzle with respect to face glass and mobile travel mechanism, described travel mechanism has the structure that nozzle is moved to the opposite direction of sense of rotation during over against the face glass surface with jet hole.
Technical scheme 15 of the present invention is in technical scheme 10, and the turning axle of the rotation of described nozzle is a vertical direction, and described travel mechanism has the structure that when face glass is remained on vertical position face glass is moved to the horizontal direction straight line.
Technical scheme 16 of the present invention is in technical scheme 13, and the turning axle of the rotation of described nozzle is a vertical direction, has the panel maintaining body that the face glass that will be cut down remains on vertical position.
Technical scheme 17 of the present invention is that described nozzle is longer in described turning axle direction in each of technical scheme 9 to 16, and described jet hole is provided with a plurality of along the length direction of described nozzle equably.
Technical scheme 18 of the present invention is in each of technical scheme 9 to 17, and described jet hole is provided with a plurality of along the side face that surrounds described turning axle equably.
Described milled processed is following carries out: make nozzle rotation around the turning axle parallel, and at jet hole during, impact the surface of face glass by the dissolution fluid that is ejected facing to face glass surperficial with the face glass surface with the jet hole that sprays dissolution fluid,
Simultaneously, when nozzle rotates, while make face glass carry out milled processed to moving over against the opposite direction of the sense of rotation of face glass described jet hole of when surface with jet hole,
By described milled processed, reach maximal roughness and be the Flatness below 0.5 micron.
The effect of invention
As described below, adopt each technical scheme of the present invention, can implement evenly and the high speed reduction the surface of face glass.
Description of drawings
Fig. 1 is the synoptic diagram of cutting method of the face glass of first example.
Fig. 2 is the positive cross-sectional schematic of the panel cutting device of first example.
Fig. 3 is the side cross-sectional schematic of glass panel cutting device shown in Figure 2.
Fig. 4 is the configuration of presentation graphs 2 jet holes 20 and the floor map of effect thereof.
Fig. 5 is the synoptic diagram of the effect of expression sense of rotation when opposite with the straight line travel direction.
Fig. 6 is the synoptic diagram of the glass panel cutting method of second example.
Fig. 7 is the positive cross-sectional schematic of the glass panel cutting device of second example.
Fig. 8 is the side cross-sectional schematic of glass panel cutting device shown in Figure 7.
Fig. 9 is a floor map of seeing the glass panel cutting device shown in Fig. 7 from the top.
Figure 10 is the schematic perspective view of panel retaining member 6 shown in Figure 7.
Figure 11 is the cross-sectional schematic of the FPD of example.
Main nomenclature
1: face glass 2: nozzle 20: jet hole
21: dissolution fluid plenum system 3: conveyance roller 30: transport mechanism
4: handle cabin 5: rotating mechanism A: turning axle
L: dissolution fluid
Embodiment
Below preferable form of the present invention (hereinafter referred to as example) is implemented in explanation.
First example at first is described.Fig. 1 is the synoptic diagram of the glass panel cutting method of first example.This method is the dissolution fluid L of the surperficial stripping that makes face glass 1 of the jet surface to the face glass 1 and surface is impacted.This method had both been utilized this chemical action of the stripping of dissolution fluid, utilized again and impacted this physical action, with the engraving method that just is soaked in the etching solution or spray etching solution the different of essence was arranged.But, dissolution fluid L is injected with huge pressure, therefore is to use the acceleration bigger than the gravity of himself to impact the surface of face glass 1.
In the method for this example, use nozzle 2, while and described nozzle 2 rotations are cut down with jet hole 20.Nozzle 2 is columnar catheter-like, and as shown in Figure 1, turning axle A is consistent with the central shaft of nozzle 2.Nozzle 20 is provided with a plurality of along the side face (surrounding all shape faces of central shaft) of nozzle 2.
Face glass 1 keeps the posture of level when cutting down.And face glass 1 along continuous straight runs when cutting down is that straight line moves.In this example, face glass 1 is stated from the conveyance roller, is keeping flat-hand position and straight line moves.
The length direction of nozzle is consistent with the width (perpendicular to the direction that moves the side) of face glass 1.The length of nozzle 2 is a bit larger tham the width of face glass 1.
As shown in Figure 1, make nozzle 2 rotations, and meanwhile dissolution fluid sprayed from jet hole, and make face glass 1 straight line move through the mid-way of two side nozzles 2.At this moment, the direction of rotation is opposite with the direction that straight line moves.More exactly, as shown in Figure 1, when jet hole 20 faced face glass 1 surperficial, the sense of rotation of jet hole was opposite with the direction that straight line moves.
By the surperficial stripping of the ballistic face glass 1 of dissolution fluid L that penetrates from nozzle 2 up and down in dissolution fluid L, and owing to the impact of dissolution fluid L is flowed out.Thus the upper and lower surface of face glass 1 is cut down simultaneously, made the thickness attenuation of face glass 1.
As dissolution fluid L, can use hydrofluoric acid, suitably dilute the back and use.When using hydrofluoric acid, dilute and be: be 10 to 50% degree (volume percent) for example for water 100.Jet hole 20 when the jet hole 20 of setting nozzle 2 faces face glass 1 is that 5mm to 150mm, dissolution fluid L are 0.5kg/cm in face glass 1 lip-deep surge pressure with the distance on the surface of face glass 1
2To 3.5kg/cm
2, when the rotation radius from turning axle to jet hole till 20 is 50mm to 100mm, the speed of rotation of nozzle 2 is 1 to 20rpm to be good, the translational speed of face glass 1 with 100mm/ divide to 1000mm/ branch degree be good.When cutting down with this understanding, can cut down with the thickness of 0.08 to 0.8 micron of per second.And by with nozzle 2 with impartial arranged spaced, the maximal roughness on the surface of the face glass 1 after cutting down can be controlled at below 0.5 micron, can realize the reduction of flatness excellence.
But, in the time need cutting down with identical speed, descend the spraying pressure of side nozzle 2 stronger sometimes, and impose uniform pressure in the both sides of face glass 1 than the spraying pressure of the nozzle 2 of upside in the both sides of face glass 1.
First example of the employed glass panel cutting device of method of this example below is described.Fig. 2 is the positive cross-sectional schematic of the glass panel cutting device of first example, and Fig. 3 is the side cross-sectional schematic of the glass panel cutting device of Fig. 2.
Fig. 2 and glass panel cutting device shown in Figure 3 have: nozzle 2, penetrate facing to the surface of face glass 1 in order to the dissolution fluid L with the surfacing of leachable face glass 1; Dissolution fluid L is supplied to the dissolution fluid plenum system 21 of nozzle 2; And rotating mechanism 5, with so that nozzle 2 rotating with around the turning axle of the surperficial parallel direction of face glass 1.
Described glass panel cutting device is that the strong acid that hydrofluoric acid is such uses as dissolution fluid L, therefore will carry out in will cutting down the airtight container of processing, has the cabin 4 of processing.Nozzle 2 is arranged on to be handled in the cabin 4.Be provided with the dissolution fluid plenum system 21 of supplying with dissolution fluid L in the nozzle 2.
Handling cabin 4 has: move into mouthfuls 41 with what face glass 1 was moved into; That after reduction face glass 1 is taken out of takes out of mouthfuls 42.Move into mouth 41 and take out of mouth 42 and can open and close with blocking gate 43.Can move and carry out by blocking gate 43 above-below directions and open and close.
Fig. 2 and device shown in Figure 3 have transport mechanism 30, in order to face glass 1 with the conveyance of flat-hand position along continuous straight runs.Transport mechanism 30 is made of a plurality of conveyance rollers 3 along horizontal carrying line configuration.Carrying line passes to be moved into mouth 41 and takes out of mouth 42, and face glass 1 is moved into and taken out of from taking out of mouth 42 after the reduction from moving into mouth 41.The mechanism that when as seen, transport mechanism 30 dual-purposes are for reduction face glass 1 is remained on the mechanism of flat-hand position and face glass 1 horizontal linear is moved.
Below, the formation of nozzle 2 is described.
As shown in Figure 3, nozzle 2 is the longitudinal bodies along the width extension of face glass 1.And nozzle 2 integral body are pipe shape (its cross section is round tubular).Nozzle 2 has projection in the position that is provided with spray orifice 20.Projected front ends is as opening, and this opening is as jet hole 20.
As shown in Figure 2, jet orifice 20 be central shaft around circumferential direction be provided with a plurality of equably.In this example, the size of jet hole 20 and shape are all identical, with 90 intervals of spending 4 jet holes 20. are set at circumferential direction
As shown in Figure 3, jet hole 20 is provided with a plurality of at the length direction (central axis direction) of nozzle 2 equably.At length direction, the size of jet hole 20 and shape are also all identical, and all uniformly-spaced to be provided with.
Along the circumferential direction the group of four jet holes 20 of Pai Lieing is arranged on the positions with 45 degree that stagger in the group of other adjacent jet hole 20 of length direction.That is, the group of four jet holes 20 is arranged on the position (different position mutually) of 45 degree that respectively stagger at length direction.Thereby, the group of a certain jet hole 20 with across one group and adjacent jet hole 20 (adjacent jet hole 20) is identical in the position of circumferential direction.
Above-mentioned structure is an example, and other structure also can.For example, also can make the group of adjacent jet hole 30 degree that respectively stagger.At this moment, the group of a certain jet hole 20 be separated by two groups and adjacent jet hole 20 is identical in the position of circumferential direction.Can also establish three jet holes 20 and 120 degree at interval at circumferential direction, make the group of adjacent jet hole 20 60 degree that respectively stagger, 40 degree that also can respectively stagger, or 30 degree that respectively stagger.
Each jet hole 20 is the microscler things that extend along the direction that tilts with respect to the length direction of nozzle 2.So-called vergence direction can be the directions with respect to length direction inclination 45 degree of nozzle 2.
This nozzle as shown in Figure 2, being separated by along conveyance direction (length direction of face glass 1), it is a plurality of all uniformly-spaced to be provided with.In order to cut down the surface of face glass 1 both sides simultaneously, nozzle 2 is across the carrying line upper and lower settings.As shown in Figure 2, the allocation position of each nozzle 2 is in the identical position of above-below direction.
Dissolution fluid plenum system 21 comprises the pipe arrangement 211 of supplying with dissolution fluid L, and this pipe arrangement 211 is to connect the wall of handling cabin 4 in liquid closed mode.The front end of pipe arrangement 211 is ends that connect each nozzle 2 via annulus conjugant (rotaryjoint).Dissolution fluid L is from the inside of pipe arrangement flow nozzle 2 by the annulus conjugant.
The other end closure of nozzle 2 is being fixed the turning axle of rotating mechanism 5 in this end) 51.Rotating mechanism 5 is not shown specifically on figure, can adopt for example following mechanism: the gear that will be fixed on each turning axle 51 with chain is connected with gear on the output shaft that is fixed on motor, and by CD-ROM drive motor each turning axle 51 is rotated.
Dissolution fluid plenum system 21 by: store the liquid storage 213 of dissolution fluid L, in order to the pipe arrangement 211 that connects liquid storage 213 and each nozzle 2, be arranged at the valve 214 on the pipe arrangement 211 and transmit liquid valve and constitute.The strainer of removing impurity and rubbish etc. from the dissolution fluid L that supplies with and pressure regulation also can be set as required with valve etc.
As shown in Figure 2, the bottom of handling cabin 4 is funnel-forms, and foot is provided with outlet orifice 44.At outlet orifice 44 places, connecting the vent pipe 45 of the dissolution fluid L discharge that will finish using.The dissolution fluid L that has dissolved in the surfacing of face glass 1 as described above falls to the bottom of handling cabin 4, and is discharged from by outlet orifice 44 and vent pipe 45.
Handling the inner-wall surface in cabin 4 and the surface of processing cabin 4 interior each parts is the structure of the L of anti-the dissolution fluid.For example, when dissolution fluid L was hydrofluoric acid, the surface applied of inner-wall surface and each parts covered for example such hydrofluoric acid resin of Teflon (registered trademark of E.I.Du Pont Company).Switching moves into mouthfuls 41 and take out of mouthfuls 42 blockade gate 43 and carry out the liquid sealing lock, and dissolution fluid L can not spill.
The below action of this device of explanation.
Face glass 1 is moved into and is handled in the cabin 4 through conveyance mouth 41 by transport mechanism 30.Face glass 1 is positioned on the carrying line in handling cabin 4 and more leans on the stand-by station of front than the position that is provided with nozzle 2.Therefore, blocking after gate 43 closes, dissolution fluid plenum system 21 begins action, by liquid-feeding pump 215 dissolution fluid L is supplied to each nozzle 2, and utilizes the liquor charging pressure of liquid-feeding pump 215 and dissolution fluid L is ejected from jet hole 20.And rotating mechanism 5 moves and each nozzle 2 is rotated.The sense of rotation of each nozzle 2 is identical, and speed of rotation is also identical.
Under this state, transport mechanism 30 moves once more, and face glass begins to move, and face glass 1 flatly moves.In the process that moves, between the nozzle up and down 2 of face glass 1 by rotation.At this moment, the upper and lower surface that the dissolution fluid that penetrates from nozzle will impact face glass 1 is cut down the surface in aforesaid mode.
Face glass 1 is cut down in this process by between the nozzle of arranging along the conveyance direction up and down 2.In case, cut down promptly and finish by between whole nozzles 2.Afterwards, transport mechanism 30 stops at face glass 1 and is about to arrive the stand-by station of taking out of mouth 42.Stop and after the rotation of nozzle 2 stops in the injection of dissolution fluid L, take out of mouthfuls 42 blockade gate 43 and open, transport mechanism 30 move once more and face glass 1 is taken out of from taking out of mouth 42.Afterwards, face glass 1 is cleaned processing, residue in the dissolution fluid on surface with wash.
The device of this example is characterised in that the shape and the configuration of nozzle 2, realizes thus cutting down at a high speed, uniformly and handles.About this point, illustrate with Fig. 4.Fig. 4 represent jet hole 20 in nozzle 2 configuration and effect thereof.
As previously mentioned, the each point on face glass 1 surface is subjected to the impact of dissolution fluid L during facing to face glass 1 surperficial and is cut down at the jet hole 20 of swivel nozzle 2.In Fig. 4, the dissolution fluid L that expression is ejected from a nozzle 2.Dissolution fluid L is extended to taper (horn-like) from jet hole 20.Each jet hole 20 is stated as previously mentioned, extend along the direction that tilts with respect to nozzle 2 length directions, so dissolution fluid L also extends expansion along this direction.Thereby the profile (hereinafter referred to as impacting figure, with dashed lines L1～L3 represents in Fig. 4) of the broad degree of the dissolution fluid L when impacting face glass 1 surperficial also becomes the shape with the contour approximation of jet hole 20.In Fig. 4, for convenience of description, the impact figure when having drawn jet hole 20 over against face glass 1 surperficial.
As previously mentioned, in this example, differ 45 degree in the position of the circumferential direction of the group of the length direction adjacent nozzles 2 of nozzle 2.For convenience of explanation, the group of the jet hole 20 that the position of circumferential direction relation is identical is as the first jet hole cohort 20a, and the group of jet holes 20 that the position relation of circumferential direction is differed 45 degree is as the second jet hole cohort 20b.In the jet hole 20 of each cohort, the jet hole 20 of a position of circumferential direction is made as 0 degree position, and is made as 90 degree positions successively, 180 degree positions, 270 degree positions.
In Fig. 4, the 0 degree position jet hole 20 of the first jet hole cohort 20a faces the surface of face glass 1 and carries out stripping.The impact figure of this moment is L1.In case from then on state rises and makes nozzle 2 rotations 45 degree, is exactly that 0 of the second jet hole cohort 20b spends the front of the jet hole 20 of position over against face glass 1 specifically, and the surface of face glass 1 is cut down.The impact figure of this moment is L2.Making nozzle 2 rotation 45 degree again, is the surface that the jet holes 20 of the 90 degree positions of the first jet hole cohort 20a face face glass 1 specifically, carries out stripping thus.The impact figure of this moment is L3.Carry out above-mentioned action repeatedly, the jet hole 20 of the one the second jet hole cohort 20a, the 20b is just alternately over against the surface of face glass 1 and carry out stripping.
The aggregate supply of the dissolution fluid of supplying with to the surface of face glass 1 is established face glass 1 and is immobilized for convenience of explanation.When making face glass 1 static, the dissolution fluid L that penetrates from the jet hole 20 of each cohort just impacts same area, for convenience of description, is the longitudinal axis (transverse axis is the width position of face glass) with the time unit, depicts the planar state that is transformed in Fig. 4.And the distribution La with the aggregate supply of the dissolution fluid L that impacts figure formation is shown in the lump in Fig. 4.This distribution La is the seen figure of width (length direction of nozzle) at face glass 1.
Respectively impact figure as can be known from shown in Figure 4, in the each point on the surface of face glass 1, the point P1 that is positioned at this front (be positioned at jet hole 20 under) during over against jet hole 20 only accepts the supply from the dissolution fluid L of this jet hole 20, and at the location point P2 place of leaving this position a little, then accept from the supply in abutting connection with the dissolution fluid L of the jet hole 20 of two cohorts.As shown in the above description, this does not also mean that simultaneously and receives, but in the supply of accepting sometime from the jet hole 20 of the first jet hole cohort 20a, is rotating the supply of 45 degree back acceptance from the jet hole 20 of the second jet hole cohort 20b then.
Acceptance is equivalent to the periphery in the expansion of dissolution fluid L from the some P2 of the supply of the dissolution fluid L of the jet hole 20 of two cohort 20a, 20b.On this P2, to compare with the some P 1 of the front position that is positioned at jet hole, the amount of the dissolution fluid L that supplies with from a jet hole 20 is few.Yet, be to accept supply along with the carrying out of rotation from the dissolution fluid of adjacency jet hole 20, therefore approximate amount on the front position point P1 by the aggregate supply of time cumulative dissolution fluid L.This state is represented with Fig. 4.Wherein Li represents to distribute from the total amount of 20 groups of dissolution fluid L that supply with of a jet hole.
As previously mentioned, in fact face glass 1 is that along continuous straight runs moves, and therefore the aggregate supply of dissolution fluid L shown in Figure 4 is distributed at travel direction.Thereby,, make the each point on the surface of face glass 1 accept impartial dissolution fluid and supply with by with suitable fixed speed face glass 1 being moved at the speed of rotation of nozzle 2.Cut down uniformly therefrom.
In addition, make each jet hole 20 also help even reduction along the direction extension this point that the travel direction with respect to face glass 1 tilts.This point below is described.
Each jet hole 20 of the present invention can be simple circular or square.In this occasion,, must make dissolution fluid L become overlap condition at the periphery place of the expansion of dissolution fluid L and impact for the point in the front that is not in jet hole 20 on the surface that makes this face glass 1 also can evenly be cut down.That is, not to utilize the rotation of nozzle 2 that the dissolution fluid L from adjacent jet hole 20 is repeatedly supplied with to a bit, but do not rely on the rotation of nozzle and make dissolution fluid L overlapping all the time.
But according to inventor of the present invention research, in case the expansion of dissolution fluid L is overlapping, dissolution fluid L just collides at lap, cause dissolution fluid L at random, disperse, irregular flowing.As a result, cause dissolution fluid L extremely inhomogeneous, can't cut down equably the impact on face glass 1 surface.And if nozzle 2 is along inclined direction extended, then the expansion of dissolution fluid L can be not overlapping, and can repeatedly accept the supply of dissolution fluid L by the rotation of nozzle, make on the surperficial each point of aggregate supply of the dissolution fluid L of accumulated time evenly at face glass 1.
And the opposite this point with the straight line travel direction of the sense of rotation of nozzle 2 helps high speed to cut down processing.With Fig. 5 this point is described.Fig. 5 is the synoptic diagram of the effect of expression sense of rotation when opposite with the straight line travel direction.
As previously mentioned, in this example, nozzle 2 rotation, and make dissolution fluid L impact the surface of face glass 1 during facing to face glass 1 surperficial at jet hole 20.In this occasion, while jet hole 20 also is to rotate the surface that faces toward face glass 1, while therefore the expansion of the dissolution fluid L that sprays from jet hole 20 also is to rotate the surface of impacting face glass 1.Thereby the surge pressure of impacting in theory, the dissolution fluid L of face glass 1 is the sum total from the pressure of the spraying pressure of jet hole 20 and moment of rotation generation.
Therefore, when rotation and straight line move to equidirectional, shown in Fig. 5 (1), face glass 1 is along the moment of rotation of dissolution fluid L (strictly speaking, the part that is parallel to the surface of face glass 1 in the moment of rotation becomes identical direction with respect to moving of face glass 1) advance the surge pressure that face glass 1 non-confrontational moment of rotation produces and advancing.So the mobile state that has reduced the surge pressure that is produced by moment of rotation that becomes face glass 1 reduces whole surge pressure.On the other hand, when rotation and straight line moved each other oppositely, shown in Fig. 5 (2), face glass 1 advanced with the state to the moment of rotation of shock proof dissolution fluid L, has increased the pressure by the mobile generation of face glass 1 in the whole surge pressure.Therefore, adopt the formation of this example, the rotation that can make full use of nozzle 2 realizes high speed reduction processing.
Because it is relative that straight line moves,, and nozzle 2 straight lines are moved again, also can obtain identical effect even therefore make face glass 1 static.As shown in the above description, in this occasion, jet hole 20 during over against face glass 1 surperficial the sense of rotation of this jet hole 20 identical with the direction that the straight line of nozzle 2 moves.Face glass 1 and nozzle 2 both sides are moved as straight line.Face glass 1 opposite direction straight line of sense of rotation of this jet hole 20 when facing face glass 1 surperficial with jet hole 20 is moved, Yi Bian nozzle 2 is moved to the direction straight line identical with its sense of rotation.Adopt this formation, can further improve surge pressure.
As mentioned above, method and device by this example, the surperficial maximal roughness of the face glass 1 after the reduction can be below 0.5 micron, and by configuration, shape or the spraying pressure of suitable selection nozzle 2, also can make maximal roughness is below 0.1 micron.Therefore, the method for example and device are applicable to the FPD or the manufacturing of contact panel.Adopt the method and the device of this example, the surface after the reduction has high flatness, therefore is equivalent to carry out " grinding ".
The device of above-mentioned example is across carrying line and upper and lower settings nozzle 2, and processing is cut down on the two sides (upper and lower surface) to the face glass 1 of flat-hand position simultaneously, but only nozzle 2 is set sometimes, or only nozzle 2 is set, only one side is cut down processing at downside at upside.Nozzle 2 also not necessarily is provided with a plurality of along the conveyance direction, can also have only a nozzle 2.
The glass panel cutting method of second example below is described.Fig. 6 is the synoptic diagram of the glass panel cutting method of second example.
In aforesaid first example, be to make face glass 1 cut down processing, but as shown in Figure 6 for flat-hand position, this second example is face glass 1 is become vertically (vertical) posture and to cut down processing.Face glass 1 keeps vertical position and is moved by transport mechanism 30 along continuous straight runs.
And nozzle 2 also vertically is provided with its length direction, and penetrates dissolution fluid to horizontal direction.Nozzle 2 be arranged at face glass 1 both sides (about).
In this example, each nozzle 2 also is rotation around alongst turning axle, but because length direction is a vertical direction, so turning axle also is a vertical direction.And the sense of rotation of each nozzle is, jet hole 20 face face glass 1 the surface the time this jet hole 20 sense of rotation and face glass 1 to move horizontally direction opposite.
Adopt this to constitute, also can obtain the effect identical with the method for aforementioned first example.When adopting this second example, easily with the two side impact dissolution fluids of uniform pressure to face glass 1.Therefore, be particularly useful for occasion that the face of face glass 1 both sides is cut down with same speed simultaneously.
Fig. 7 is the positive cross-sectional schematic of the glass panel cutting device of second example, and Fig. 8 is the side cross-sectional schematic of glass panel cutting device shown in Figure 7, and Fig. 9 is a floor map of seeing the glass panel cutting device shown in Fig. 7 from the top.
To shown in Figure 9, also is to cut down processing in handling cabin 2 as Fig. 7 in this example.And face glass 1 limit in cutting down treating processes keeps the flat-hand position limit by transport mechanism 30 conveyances, and is positioned in the conveyance way and handles the cabin and accept to cut down and handle.
In this example, face glass 1 is to be held in state in the panel retaining member 6 by conveyance.Figure 10 is the schematic perspective view of panel retaining member 6 shown in Figure 7.As shown in figure 10, panel retaining member 6 is that face glass 1 is generally perpendicularly erect the member that keeps.Panel retaining member 6 mainly is by: the substrate 61 of flat-hand position, be erected in the pillar 62 on the substrate 61, the bolster 66 that is installed on the pillar 62 constitutes.
Bolster 66 is the parts that directly contact with face glass 1, is used to avoid face glass 1 to rock.The material that bolster 66 usefulness can not be dissolved liquid L corrosion (resistance person) forms, and for example uses the such fluorine element resin formation of Teflon (trade mark of E.I.Du Pont Company).
As shown in figure 10, bolster 66 member that connected the lower end of each pillar 62 by the place, two ends at the long side direction of substrate 61 constitutes with the member of locating the upper end of connecting struts 62 at the two ends of identical long side direction.Each bight of maintained face glass 1 contacts with these bolsters 66.With the cross-sectional shape of the short side direction of the contacted downside bolster 66 of following vertex angle part of face glass 1 be concavity, and the cross-sectional shape of long side direction is the L font.With the cross-sectional shape of the short side direction of the bolster 66 of bight, the upper end butt of face glass 1 be horizontal concavity body.As shown in figure 10, when packing face glass 1 into, be the recess that inserts and make it to fall into each bolster 66 from the top.
As the transport mechanism 30 of this panel retaining member 6 of conveyance, in this example, also adopt conveyance roller 3 as shown in Figure 7.In addition, also can adopt rack-and-pinion mechanism.That is, tooth bar can be fixed on panel retaining member 6 below, and the configuration pinion(gear) replace each conveyance roller 3.
In Fig. 7 and Fig. 9, omit nozzle, but as shown in Figure 8, in handling cabin 4, disposed nozzle 2.In this example, as Fig. 8 and shown in Figure 9, along setting many carrying lines perpendicular to the horizontal direction of conveyance direction.Nozzle 2 is arranged at the both sides of each carrying line, so that cut down the both sides of the face glass 1 on each carrying line simultaneously.In this example, in handling cabin 4, three carrying lines are set, and nozzle 2 are set in its both sides.Nozzle 2 between each carrying line is used for to be handled the reduction of the face glass 1 of both sides, therefore in the direction perpendicular to carrying line four nozzles 2 is set as shown in Figure 8.
Below explanation is along the formation of each carrying line conveyance face glass.For ease of explanation, will be in Fig. 8 the face glass of conveyance on the carrying line in left side as face glass 1a, face glass that will conveyance on central carrying line is as face glass 1b, face glass that will conveyance on the carrying line on right side is as face glass 1c.And will be on the carrying line in left side the conveyance roller of conveyance face glass 1a as left conveyance roller 3a, will be on the carrying line of central authorities the conveyance roller of conveyance face glass 1b as central conveyance roller 3b, will be on the carrying line on right side the conveyance roller of conveyance face glass 1c as right conveyance roller 3c.
As shown in Figure 8, each conveyance roller 3a, 3b, 3c clip face glass 1a, 1b, 1c rotation up and down, and to specified direction rotation.The wheel portion of each conveyance roller 3a, 3b, 3c is provided with from the outstanding stage portion of axial region.Panel support mechanism 6 falls into this stage portion, and under this state conveyance face glass 1a, 1b, 1c.
The shape of each nozzle 2 and structure are identical with aforementioned first example, but the sense of rotation of each nozzle 2 is, each jet hole 20 over against the surface of face glass 1 the time this jet hole 20 sense of rotation opposite with the straight line travel direction of face glass 1.This point below is described.For ease of explanation, four nozzles are made as 2a, 2b, 2c, 2d successively from a left side.
The conveyance direction of this conveyance roller 3a, 3b, 3c at first, is described.In the conveyance roller 3a of three groups, 3b, 3c, left conveyance roller 3a is with identical direction conveyance face glass 1a, 1c with right conveyance roller 3c, and central conveyance roller 3b is then with different direction conveyance face glass 1b.For example, as shown in Figure 8, left side conveyance roller 3a and right conveyance roller 3c be along the direction of the vertical paper that runs through Fig. 8 and from top to down conveyance face glass 1a, 1c, and central conveyance roller 3b then is conveyance face glass 1b along the direction of the paper that vertically runs through Fig. 8 and from bottom to up.In the orthographic plan of Fig. 9, face glass 1a, 1c are conveyances from left to right, and face glass 1b then is conveyance from right to left.In each group of conveyance roller 3a shown in Figure 8,3b, 3c, when above-below direction was seen, the conveyance roller of upside and the conveyance roller of downside be rotation inversely mutually.
And as Fig. 8 and shown in Figure 9, in four nozzle 2a～2d, nozzle 2a and nozzle 2c are equidirectionals, and nozzle 2b and nozzle 2d be rotation round about then.During with this direction conveyance, as shown in Figure 9, nozzle 2a and nozzle 2c turn clockwise at face glass 1a～1c, and nozzle 2b, 2d are rotated counterclockwise.
Like this, each face glass 1a～1c is during by conveyance roller 3a～3c conveyance, and the sense of rotation of this nozzle 20 of jet hole 20 during over against face glass 1a～1c surperficial is opposite with the straight line travel direction of face glass 1a～1c.
The formation in dissolution fluid plenum system 21 and processing cabin 4 and the formation of other parts are identical with first example.In this second example, identical with first example, the maximal roughness on the surface of the face glass 1 after the reduction can be below 0.5 micron, and the configuration by suitable selection nozzle 2, shape, and spraying pressure can realize that maximal roughness is below 0.1 micron.Therefore method of this example and the manufacturing that device is applicable to FPD and contact panel.
In above-mentioned example, be three carrying lines to be set, but also can be four or more with the vertical horizontal direction of conveyance direction.As long as the conveyance direction is different mutually, and correspondingly makes the rotation of nozzle 1 reverse mutually, then can set up the carrying line of any amount.In addition, cut down when handling with the face glass 1 of 2 pairs of both sides carrying lines of a nozzle, can simplified construction, reduce number of spare parts, installation cost is reduced.Can certainly cut down processing to the face glass on the carrying line of both sides 1 by a nozzle, but special-purpose separately nozzle is set.
In addition, in second example, three carrying lines also can be made in handling cabin 4 direction throw-over gear and successive carrying line are set.At this moment, a face glass 1 is cut down processing by three times in handling cabin 4.Also direction throw-over gear can be arranged at the outside of handling cabin 4, and connect carrying line in the outside of handling cabin 4.
The reduction of each example is handled and is not only applicable to FPD or the preceding face glass 1 (that is, sheet glass) of contact panel assembling, also is applicable in the assembling process.
That is, FPD and contact panel are in vogue makes a plurality of products simultaneously with big sheet glass.For example, in the manufacturing of liquid-crystal display, use a pair of big glass substrate, and pack in each field as the structure (ITO electrode, colour filter etc.) of the liquid-crystal display of product.And after glass substrate is fitted, obtain each final product according to each field cut-out.
At this moment, the reduction of this example is handled under the state that is applicable to the big glass substrate before cut-out and is carried out.By big glass substrate is handled, can cut down processing in order to make each product totally, therefore can improve productivity.At this moment, owing to be that the reduction of carrying out after a pair of glass substrate is fitted is handled, so the injection of dissolution fluid L is to liking the outer side of the glass substrate after fitting.
Be not to as raw-material sheet glass but in manufacturing processed or the extreme trace operation of making cut down when handling, preferably the position that problem can take place to contact dissolution fluid L is pasted band with shielding and is covered.
In this example, the jet hole 20 of nozzle 2 is uniformly-spaced to be provided with, but this is that a plurality of examples is set equably.When the varying in size of jet hole, also can suitably change at interval.So-called " a plurality of equalization " is just impartial and a plurality of meanings is set to the surge pressure on face glass 1 surface for the dissolution fluid L that makes ejaculation.
In above-mentioned example, the mobile of face glass or nozzle is that straight line moves, but also is not that straight line moves.For example, can make face glass rotate the limit at the horizontal plane inner edge with flat-hand position around vertical turning axle with respect to the immobilized nozzle cuts down.
When as second example, making face glass 1 cut down processing for vertical position, when face glass 1 maximizes, be used to keep the structure of face glass 1 and travel mechanism also big, technical difficulty will increase, but cut down when handling as first example, face glass 1 being remained on flat-hand position, keep and the mechanism that moves all is easy to realize.
The working of an invention form of FPD below is described.
Figure 11 is the cross-sectional schematic of example FPD.The liquid-crystal display that shown in Figure 11 is as FPD one example.FPD shown in Figure 11 ends portion 12 with envelope a pair of face glass 1 is fitted.In the inside of a pair of face glass 1,, have electrode (pixel electrode, common electrode etc.) 11 that is formed at one of them face glass 1 inside and the liquid crystal of being enclosed 13 as the member that constitutes the light transmission control part.Inner face at another face glass 1 forms colour filter 14.The common liquid-crystal display of the formation of light transmission control part itself is identical.
FPD shown in Figure 11 is characterised in that two outer sides 100 of a pair of face glass 1 are ground by milled processed.Milled processed can be carried out with the cutting device of aforementioned each example, therefore omits its explanation.The maximum of the FPD of this example is characterised in that, by carrying out foregoing milled processed, can obtain external 100 and be the flatness below 0.5 micron.
Flatness below is described, shown in the enlarged view of Figure 11, in facial outside 100, with the distance between top 101 and the lowest part 102 as flatness.This value is equivalent to the mensuration of maximal roughness (Rmax) in the mensuration of surfaceness.There are many companies to sell the surface irregularity meter that to measure maximal roughness, can therefrom suitably select to measure the flatness of this external 100.Study through the present inventor, by carrying out above-mentioned milled processed, the thickness t that can make a face glass 1 and can obtain flatness (Rmax) below 0.5 micron below 0.5mm, can provide and not only realize thin typeization, lightweight, but also not have the inhomogenous high-performance FPD of demonstration.When stating cutting device in the use, also can realize the flatness below 0.1 micron by the shape optimizing that makes nozzle 2.
But, this sometimes flatness can be identical with the flatness of the outside of face glass 1 before the milled processed, in this occasion, also can not damage its flatness even cut down thickness.
In above-mentioned example, be with maximal roughness as flatness, but also can be with center line average roughness (Ra) as flatness.In this occasion, be to obtain center line average, and highly be the average absolute that benchmark is tried to achieve each concavo-convex difference of altitude with this at the concavo-convex center line average of external 100.At this moment, also can adopt the surface finish measurement device of the commercially available center line average roughness measured (Ra).And, when representing, can provide the FPD of the no display dot below 0.3 micron with center line average roughness, can utilize said external mechanical mill to handle and realize aforesaid flatness.
More than be to be example with the liquid-crystal display, even and the FPD beyond the liquid-crystal display, for example plasma display or OLED display, surface field indicating meter etc. can be implemented too.All FPD have the face glass that at least one piece size is equivalent to display part, can adopt the present invention.
In the explanation of conventional art, FPD and contact panel are separated, and the contact panel information of also carrying out shows, therefore also can be used as a kind of FPD.Therefore in scope of the present invention, flat-panel monitor comprises contact panel.
Claims (19)
1. glass panel cutting method, it is the glass panel cutting method that face glass is cut down equably, described method is to make nozzle rotation around the turning axle that is parallel to the face glass surface, described nozzle has the jet hole that sprays dissolution fluid, described dissolution fluid can be with the material stripping on the surface of face glass, when described jet hole during facing to face glass surperficial, the dissolution fluid that ejects impacts the surface of face glass and cuts down
It is characterized in that, when nozzle rotates, make face glass to moving over against the opposite direction of the sense of rotation of face glass this jet hole of when surface with jet hole.
2. glass panel cutting method as claimed in claim 1 is characterized in that, the mobile of described face glass is to move towards the direction straight line perpendicular to described turning axle in the direction along the face glass surface.
3. glass panel cutting method as claimed in claim 2 is characterized in that, the mobile of described face glass is that face glass along continuous straight runs straight line is moved.
4. glass panel cutting method, it is the glass panel cutting method that face glass is cut down equably, described method is to make nozzle rotation around the turning axle that is parallel to the face glass surface, described nozzle has the jet hole that sprays dissolution fluid, described dissolution fluid can be with the material stripping on the surface of face glass, when described jet hole during facing to face glass surperficial, the dissolution fluid that ejects impacts the surface of face glass and cuts down
It is characterized in that, when nozzle rotates, make nozzle to moving over against the identical direction of the sense of rotation of face glass this jet hole of when surface with jet hole.
5. glass panel cutting method as claimed in claim 4 is characterized in that, the mobile of described face glass is to move towards the direction straight line perpendicular to described turning axle in the direction along the face glass surface.
6. glass panel cutting method as claimed in claim 5 is characterized in that, when cutting down, described face glass is remained on flat-hand position.
7. glass panel cutting method as claimed in claim 2 is characterized in that the turning axle of the rotation of described nozzle is a vertical direction, and the mobile of described face glass is face glass to be remained on face glass is moved to the horizontal direction straight line.
8. glass panel cutting method as claimed in claim 5 is characterized in that the turning axle of the rotation of described nozzle is a vertical direction, when cutting down, described face glass is remained on vertical position.
9. a glass panel cutting device is the glass panel cutting device that the surface of face glass is cut down equably, it is characterized in that having:
Nozzle, being used for can be with the dissolution fluid of the material stripping on face glass surface to the jet surface of face glass;
Supply with the dissolution fluid plenum system of dissolution fluid to nozzle;
Make nozzle with the rotating mechanism of rotation around the turning axle of the surperficial parallel direction of face glass,
Make nozzle when rotation by rotating mechanism, and at the jet hole of the nozzle that sprays dissolution fluid during facing to face glass surperficial, the dissolution fluid of ejection impacts the surface of face glass and cuts down,
It is characterized in that, be provided with and make face glass with respect to nozzle and mobile travel mechanism, make nozzle when rotation, described travel mechanism make face glass to the opposite direction of sense of rotation during over against the face glass surface moves with jet hole utilizing described rotating mechanism.
10. glass panel cutting device as claimed in claim 9 is characterized in that, described travel mechanism make described face glass along the direction on face glass surface towards moving with the vertical direction straight line of described turning axle.
11. glass panel cutting device as claimed in claim 10 is characterized in that, described travel mechanism makes face glass move to the horizontal direction straight line when face glass is remained on flat-hand position.
12. a glass panel cutting device is the glass panel cutting device that face glass is cut down equably, it is characterized in that having:
Nozzle, being used for can be with the dissolution fluid of the material stripping on face glass surface to the jet surface of face glass;
Supply with the dissolution fluid plenum system of dissolution fluid to nozzle;
Make nozzle with the rotating mechanism of rotation around the turning axle of the surperficial parallel direction of face glass,
Make nozzle when rotation by rotating mechanism, and at the jet hole of the nozzle that sprays dissolution fluid during facing to face glass surperficial, the dissolution fluid of ejection impacts the surface of face glass and cuts down,
It is characterized in that, be provided with and make nozzle with respect to face glass and mobile travel mechanism that when making the nozzle rotation utilizing described rotating mechanism, described travel mechanism makes nozzle to the opposite direction of sense of rotation during over against the face glass surface moves with jet hole.
13. glass panel cutting device as claimed in claim 12 is characterized in that, described travel mechanism make described nozzle along the direction on face glass surface towards moving with the vertical direction straight line of described turning axle.
14. glass panel cutting device as claimed in claim 13 is characterized in that, has the panel maintaining body that the described face glass that will be cut down remains on flat-hand position.
15. glass panel cutting device as claimed in claim 10, it is characterized in that, the turning axle of the rotation of described nozzle is a vertical direction, and described travel mechanism has the structure that when face glass is remained on vertical position face glass is moved to the horizontal direction straight line.
16. glass panel cutting device as claimed in claim 13 is characterized in that, the turning axle of the rotation of described nozzle is a vertical direction, has the panel maintaining body that the face glass that will be cut down remains on vertical position.
17., it is characterized in that described nozzle is long in described turning axle direction as each described glass panel cutting device in the claim 9 to 16, described jet hole is provided with a plurality of along the length direction of described nozzle equably.
18., it is characterized in that described jet hole is provided with a plurality of along the side face that surrounds described turning axle equably as each described glass panel cutting device in the claim 9 to 16.
19. a flat-panel monitor has at least one transparent face glass, described face glass is cut down thickness by milled processed, and described milled processed is with the dissolution fluid of the material stripping on face glass surface can being impacted, it is characterized in that,
Described milled processed is following carries out: make nozzle rotation around the turning axle parallel, and at jet hole during, impact the surface of face glass by the dissolution fluid that is ejected facing to face glass surperficial with the face glass surface with the jet hole that sprays dissolution fluid,
Simultaneously, when nozzle rotates, while make face glass carry out milled processed to moving over against the opposite direction of the sense of rotation of face glass this jet hole of when surface with jet hole,
By described milled processed, has maximal roughness and is the Flatness below 0.5 micron.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007015641A JP4215170B2 (en) | 2007-01-25 | 2007-01-25 | Glass panel reduction planarization method and glass panel reduction planarization apparatus |
| JP2007015641 | 2007-01-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101229954A true CN101229954A (en) | 2008-07-30 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2007101026916A Pending CN101229954A (en) | 2007-01-25 | 2007-04-26 | Glass panel cutting method, glass panel cutting device and flat display |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP4215170B2 (en) |
| CN (1) | CN101229954A (en) |
| TW (1) | TW200831239A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102923936A (en) * | 2011-08-11 | 2013-02-13 | 富泰华工业（深圳）有限公司 | Etching device |
| CN104024173A (en) * | 2011-12-27 | 2014-09-03 | 旭硝子株式会社 | Surface glass for capacitive touch sensors |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101387711B1 (en) * | 2007-04-10 | 2014-04-23 | 에프엔에스테크 주식회사 | Glass substrate etching apparatus of flat panel display |
| JP5489051B2 (en) * | 2008-08-18 | 2014-05-14 | 日本電気硝子株式会社 | Manufacturing method of glass for touch panel |
| KR101574831B1 (en) | 2012-05-24 | 2015-12-04 | 주식회사 엘지화학 | Apparatus and method for forming flatness of glass substrate using the same |
-
2007
- 2007-01-25 JP JP2007015641A patent/JP4215170B2/en not_active Expired - Fee Related
- 2007-03-02 TW TW96107236A patent/TW200831239A/en unknown
- 2007-04-26 CN CNA2007101026916A patent/CN101229954A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102923936A (en) * | 2011-08-11 | 2013-02-13 | 富泰华工业（深圳）有限公司 | Etching device |
| CN102923936B (en) * | 2011-08-11 | 2014-12-10 | 富泰华工业（深圳）有限公司 | Etching device |
| CN104024173A (en) * | 2011-12-27 | 2014-09-03 | 旭硝子株式会社 | Surface glass for capacitive touch sensors |
Also Published As
| Publication number | Publication date |
|---|---|
| TW200831239A (en) | 2008-08-01 |
| JP4215170B2 (en) | 2009-01-28 |
| JP2008179519A (en) | 2008-08-07 |
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Open date: 20080730 |