CN101210310B - 微型钻头表面改性用多元多层硬质薄膜材料及其制备方法 - Google Patents
微型钻头表面改性用多元多层硬质薄膜材料及其制备方法 Download PDFInfo
- Publication number
- CN101210310B CN101210310B CN2007100327282A CN200710032728A CN101210310B CN 101210310 B CN101210310 B CN 101210310B CN 2007100327282 A CN2007100327282 A CN 2007100327282A CN 200710032728 A CN200710032728 A CN 200710032728A CN 101210310 B CN101210310 B CN 101210310B
- Authority
- CN
- China
- Prior art keywords
- layer
- thin film
- airshed
- 150sccm
- film material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000000463 material Substances 0.000 title claims abstract description 39
- 239000010409 thin film Substances 0.000 title claims abstract description 16
- 238000002360 preparation method Methods 0.000 title claims abstract description 12
- 230000004048 modification Effects 0.000 title claims abstract description 6
- 238000002715 modification method Methods 0.000 title description 2
- 229910052751 metal Inorganic materials 0.000 claims abstract description 16
- 239000002184 metal Substances 0.000 claims abstract description 16
- 230000007704 transition Effects 0.000 claims abstract description 12
- 150000004767 nitrides Chemical class 0.000 claims abstract description 7
- 238000012986 modification Methods 0.000 claims abstract description 4
- 230000008021 deposition Effects 0.000 claims description 6
- 229910003460 diamond Inorganic materials 0.000 claims description 6
- 239000010432 diamond Substances 0.000 claims description 6
- 238000007670 refining Methods 0.000 claims description 4
- 239000010408 film Substances 0.000 abstract description 28
- 238000000034 method Methods 0.000 abstract description 13
- 238000000151 deposition Methods 0.000 abstract description 9
- HSFWRNGVRCDJHI-UHFFFAOYSA-N Acetylene Chemical compound C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 abstract description 3
- 238000004140 cleaning Methods 0.000 abstract description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- 239000000956 alloy Substances 0.000 abstract 1
- 229910045601 alloy Inorganic materials 0.000 abstract 1
- 239000013077 target material Substances 0.000 abstract 1
- 238000012545 processing Methods 0.000 description 14
- 235000019589 hardness Nutrition 0.000 description 9
- 238000005553 drilling Methods 0.000 description 8
- 150000002500 ions Chemical class 0.000 description 8
- 239000007789 gas Substances 0.000 description 7
- 238000005516 engineering process Methods 0.000 description 5
- 230000003245 working effect Effects 0.000 description 5
- 229910052786 argon Inorganic materials 0.000 description 4
- 238000004377 microelectronic Methods 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 238000005260 corrosion Methods 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- MEYZYGMYMLNUHJ-UHFFFAOYSA-N tunicamycin Natural products CC(C)CCCCCCCCCC=CC(=O)NC1C(O)C(O)C(CC(O)C2OC(C(O)C2O)N3C=CC(=O)NC3=O)OC1OC4OC(CO)C(O)C(O)C4NC(=O)C MEYZYGMYMLNUHJ-UHFFFAOYSA-N 0.000 description 3
- QFUKUPZJJSMEGE-UHFFFAOYSA-N 5-(hydroxymethyl)-1-(3-methylbutyl)pyrrole-2-carbaldehyde Chemical compound CC(C)CCN1C(CO)=CC=C1C=O QFUKUPZJJSMEGE-UHFFFAOYSA-N 0.000 description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000011068 loading method Methods 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 description 1
- 239000003365 glass fiber Substances 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000001659 ion-beam spectroscopy Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 238000005728 strengthening Methods 0.000 description 1
- 229910021654 trace metal Inorganic materials 0.000 description 1
Images
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
Description
Claims (3)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2007100327282A CN101210310B (zh) | 2007-12-21 | 2007-12-21 | 微型钻头表面改性用多元多层硬质薄膜材料及其制备方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2007100327282A CN101210310B (zh) | 2007-12-21 | 2007-12-21 | 微型钻头表面改性用多元多层硬质薄膜材料及其制备方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101210310A CN101210310A (zh) | 2008-07-02 |
CN101210310B true CN101210310B (zh) | 2010-12-08 |
Family
ID=39610561
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2007100327282A Expired - Fee Related CN101210310B (zh) | 2007-12-21 | 2007-12-21 | 微型钻头表面改性用多元多层硬质薄膜材料及其制备方法 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN101210310B (zh) |
Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101775587B (zh) * | 2010-01-12 | 2012-07-04 | 中国科学院宁波材料技术与工程研究所 | 一种铜合金加工用微钻及其制备方法 |
CN101818321B (zh) * | 2010-03-31 | 2011-10-26 | 西华大学 | 活塞环表面铝铬氮复合涂层及其工艺方法 |
CN101871086A (zh) * | 2010-05-24 | 2010-10-27 | 广州有色金属研究院 | 一种催渗等离子氮碳共渗与类金刚石复合膜层的制备方法 |
CN102080207B (zh) * | 2010-12-25 | 2012-07-25 | 深圳市广大纳米工程技术有限公司 | 一种DLC/TiAlN/CrN/Cr多层超硬膜涂层及其制备方法 |
CN102732846A (zh) * | 2011-04-07 | 2012-10-17 | 鸿富锦精密工业(深圳)有限公司 | 被覆件及其制造方法 |
CN102409307B (zh) * | 2011-10-11 | 2013-10-16 | 宁波市瑞通新材料科技有限公司 | 一种具有Ti-Mo-N多元表面薄膜的切削工具 |
CN102673043A (zh) * | 2012-05-15 | 2012-09-19 | 北京有色金属研究总院 | 一种纺织钢领用高硬度、低摩擦系数耐磨涂层及其沉积方法 |
CN103710799B (zh) * | 2012-10-09 | 2016-06-08 | 昆山立特纳米电子科技有限公司 | 自润滑涂层钢领及其制备工艺 |
CN103008746A (zh) * | 2012-12-20 | 2013-04-03 | 上海壳瑞微材料科技有限公司 | 一种pcb用超硬耐磨铬基复合涂层微型铣刀及其制备方法 |
CN102975418A (zh) * | 2012-12-20 | 2013-03-20 | 上海壳瑞微材料科技有限公司 | 一种pcb用超硬耐磨铬基复合涂层微钻及其制备方法 |
CN105734489A (zh) * | 2014-12-09 | 2016-07-06 | 上海妙壳新材料科技有限公司 | 一种复合涂层氮气弹簧及其制备方法 |
CN107267984A (zh) * | 2016-04-08 | 2017-10-20 | 株洲钻石切削刀具股份有限公司 | 金刚石涂层刀具的制备方法 |
CN107604329A (zh) * | 2017-08-11 | 2018-01-19 | 广东工业大学 | 一种耐磨自润滑Mo‑Cu‑V‑N复合涂层及其制备方法和应用 |
CN108866480B (zh) * | 2018-06-06 | 2020-04-17 | 广东工业大学 | 一种多层多元纳米复合自润滑硬质涂层及其制备方法和应用 |
CN109355624B (zh) * | 2018-11-28 | 2020-09-04 | 福建工程学院 | 一种刀具表面类金刚石复合膜 |
KR102167990B1 (ko) * | 2018-11-30 | 2020-10-20 | 한국야금 주식회사 | 난삭재용 절삭 인써트 |
CN110218974A (zh) * | 2019-07-10 | 2019-09-10 | 河南富莱格超硬材料有限公司 | 金刚石涂层用复合基体及其制备方法 |
CN112757380A (zh) * | 2020-11-18 | 2021-05-07 | 江门崇达电路技术有限公司 | 一种提升线路板高密度微小孔钻孔效率的方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1786253A (zh) * | 2005-12-15 | 2006-06-14 | 西安理工大学 | 一种提高微型钻头使用寿命的复合镀层及其制备方法 |
CN1857836A (zh) * | 2005-05-06 | 2006-11-08 | 山高刀具公司 | 耐磨的薄涂层 |
CN1864900A (zh) * | 2006-06-16 | 2006-11-22 | 浙江汇锦梯尔镀层科技有限公司 | 印刷电路软板微钻专用硬质膜层 |
-
2007
- 2007-12-21 CN CN2007100327282A patent/CN101210310B/zh not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1857836A (zh) * | 2005-05-06 | 2006-11-08 | 山高刀具公司 | 耐磨的薄涂层 |
CN1786253A (zh) * | 2005-12-15 | 2006-06-14 | 西安理工大学 | 一种提高微型钻头使用寿命的复合镀层及其制备方法 |
CN1864900A (zh) * | 2006-06-16 | 2006-11-22 | 浙江汇锦梯尔镀层科技有限公司 | 印刷电路软板微钻专用硬质膜层 |
Also Published As
Publication number | Publication date |
---|---|
CN101210310A (zh) | 2008-07-02 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN101210310B (zh) | 微型钻头表面改性用多元多层硬质薄膜材料及其制备方法 | |
US8173278B2 (en) | Coated body | |
CN100506527C (zh) | 金属碳化物/类金刚石(MeC/DLC)纳米多层膜材料及其制备方法 | |
EP0842306B2 (en) | Improvements in and relating to methods for improving the sputter desposition of metal-sulphur coatings, e.g. molybdenum disulphide coatings and to improved coatings | |
JP3621943B2 (ja) | 高耐摩耗性高硬度皮膜 | |
US20030049083A1 (en) | Amorphous carbon coated tool and fabrication method thereof | |
CA2853137C (en) | Drill having a coating | |
KR20060115662A (ko) | 내마모성 박막 코팅 | |
KR101505222B1 (ko) | 다층 금속 산화물 코팅을 구비한 공구 및 코팅된 공구의 제조 방법 | |
CN111945111A (zh) | 一种沉积在立方氮化硼刀具表面的复合涂层及沉积方法 | |
CN111676449A (zh) | 具有多梯度涂层的刀具及制备方法 | |
JPH07205362A (ja) | 耐摩耗性に優れた表面被覆部材 | |
US20240093344A1 (en) | Hard carbon coatings with improved adhesion strength by means of hipims and method thereof | |
Erkens | New approaches to plasma enhanced sputtering of advanced hard coatings | |
JP2003321764A (ja) | 耐高温酸化に優れた高耐摩耗性・高硬度皮膜 | |
JPH07205361A (ja) | 耐摩耗性に優れた表面被覆部材 | |
CN114875361A (zh) | 一种高附着力金属涂层及其制备工艺 | |
CN112410727A (zh) | 一种新型WCrSiN梯度涂层及其制备方法 | |
KR20070088451A (ko) | 경질 다층 코팅 및 이를 포함하는 경질 다층 코팅 공구 | |
CN112262006B (zh) | 切削工具 | |
CN112262007B (zh) | 切削工具 | |
CN1173070C (zh) | 同基合金表面离子沉积方法 | |
Gorokhovsky | Lafad‐Assisted Plasma Surface Engineering Processes for Wear and Corrosion Protection: A Review | |
CN115323324A (zh) | 一种耐磨耐蚀抗氧化的纤维晶铬氮系厚膜及制备方法 | |
KR20240028537A (ko) | 피복 공구 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20171208 Address after: 510651 Changxin Road, Guangzhou, Guangdong, No. 363, No. Patentee after: GUANGDONG INSTITUTE OF NEW MATERIALS Address before: 510651 Changxin Road, Guangzhou, Guangdong, No. 363, No. Patentee before: GUANGZHOU Research Institute OF NON FERROUS METALS |
|
CP01 | Change in the name or title of a patent holder | ||
CP01 | Change in the name or title of a patent holder |
Address after: 510651 Changxin Road, Guangzhou, Guangdong, No. 363, No. Patentee after: Institute of new materials, Guangdong Academy of Sciences Address before: 510651 Changxin Road, Guangzhou, Guangdong, No. 363, No. Patentee before: GUANGDONG INSTITUTE OF NEW MATERIALS |
|
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20101208 |