CN101144730B - 位置测量装置 - Google Patents

位置测量装置 Download PDF

Info

Publication number
CN101144730B
CN101144730B CN2007101489640A CN200710148964A CN101144730B CN 101144730 B CN101144730 B CN 101144730B CN 2007101489640 A CN2007101489640 A CN 2007101489640A CN 200710148964 A CN200710148964 A CN 200710148964A CN 101144730 B CN101144730 B CN 101144730B
Authority
CN
China
Prior art keywords
reflection
measurement device
divided beams
grating
scanning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN2007101489640A
Other languages
English (en)
Chinese (zh)
Other versions
CN101144730A (zh
Inventor
K·桑迪格
W·霍尔查普菲尔
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dr Johannes Heidenhain GmbH
Original Assignee
Dr Johannes Heidenhain GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dr Johannes Heidenhain GmbH filed Critical Dr Johannes Heidenhain GmbH
Publication of CN101144730A publication Critical patent/CN101144730A/zh
Application granted granted Critical
Publication of CN101144730B publication Critical patent/CN101144730B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Body Structure For Vehicles (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Vehicle Body Suspensions (AREA)
CN2007101489640A 2006-09-12 2007-09-12 位置测量装置 Active CN101144730B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102006042743.2 2006-09-12
DE102006042743A DE102006042743A1 (de) 2006-09-12 2006-09-12 Positionsmesseinrichtung

Publications (2)

Publication Number Publication Date
CN101144730A CN101144730A (zh) 2008-03-19
CN101144730B true CN101144730B (zh) 2012-07-18

Family

ID=38828495

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2007101489640A Active CN101144730B (zh) 2006-09-12 2007-09-12 位置测量装置

Country Status (6)

Country Link
US (1) US7710578B2 (https=)
EP (1) EP1901041B1 (https=)
JP (1) JP5100266B2 (https=)
CN (1) CN101144730B (https=)
AT (1) ATE496283T1 (https=)
DE (2) DE102006042743A1 (https=)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104457571A (zh) * 2013-09-11 2015-03-25 约翰内斯·海德汉博士有限公司 光学位置测量装置
KR102671210B1 (ko) 2019-04-26 2024-05-31 상하이 마이크로 일렉트로닉스 이큅먼트(그룹) 컴퍼니 리미티드 변위 측정 장치, 변위 측정 방법 및 포토리소그래피 장치

Families Citing this family (50)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006021484A1 (de) * 2006-05-09 2007-11-15 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
US7858922B2 (en) 2006-11-20 2010-12-28 Dr. Johannes Heidenhain Gmbh Position-measuring device
DE102007023300A1 (de) 2007-05-16 2008-11-20 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung und Anordnung derselben
DE102008007319A1 (de) * 2008-02-02 2009-08-06 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
DE102008025870A1 (de) * 2008-05-31 2009-12-03 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
DE102009029673A1 (de) 2009-09-22 2010-11-25 Carl Zeiss Smt Ag Manipulator zur Positionierung eines optischen Elementes in mehreren räumlichen Freiheitsgraden
DE102010029211A1 (de) * 2010-05-21 2011-11-24 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
NL2006743A (en) * 2010-06-09 2011-12-12 Asml Netherlands Bv Position sensor and lithographic apparatus.
DE102010041556A1 (de) 2010-09-28 2012-03-29 Carl Zeiss Smt Gmbh Projektionsbelichtungsanlage für die Mikrolithographie und Verfahren zur mikrolithographischen Abbildung
CN101979959A (zh) * 2010-11-02 2011-02-23 中国科学院长春光学精密机械与物理研究所 光电式微位移测量装置
DE102010063253A1 (de) * 2010-12-16 2012-06-21 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
DE102011082156A1 (de) * 2010-12-16 2012-06-21 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
DE102011076178B4 (de) 2011-05-20 2022-03-31 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
US8604413B2 (en) * 2011-06-13 2013-12-10 Mitutoyo Corporation Optical encoder including displacement sensing normal to the encoder scale grating surface
DE102011082570A1 (de) * 2011-09-13 2013-03-14 Dr. Johannes Heidenhain Gmbh Rotatorische Positionsmesseinrichtung
TWI516746B (zh) * 2012-04-20 2016-01-11 賽格股份有限公司 在干涉編碼系統中執行非諧循環錯誤補償的方法、裝置及計算機程式產品，以及微影系統
US9983028B2 (en) 2012-04-26 2018-05-29 Nikon Corporation Measurement method and encoder device, and exposure method and device
DE102012212759B4 (de) 2012-07-20 2022-04-28 Dr. Johannes Heidenhain Gmbh Vorrichtung zur Messung der linearen Abmessung einer Probe
WO2014062972A1 (en) 2012-10-18 2014-04-24 Kla-Tencor Corporation Symmetric target design in scatterometry overlay metrology
DE102013224381A1 (de) * 2012-12-20 2014-06-26 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
DE102013210999A1 (de) * 2013-06-13 2014-12-18 Dr. Johannes Heidenhain Gmbh Messeinrichtung
DE102013211758A1 (de) * 2013-06-21 2014-12-24 Dr. Johannes Heidenhain Gmbh Interferometer
TWI627379B (zh) * 2013-10-07 2018-06-21 德商強那斯海登翰博士有限公司 光學位置測量裝置
DE102013220214A1 (de) * 2013-10-07 2015-04-09 Dr. Johannes Heidenhain Gmbh Anordnung zur Positionierung eines Werkzeugs relativ zu einem Werkstück
NO348955B1 (no) * 2014-02-28 2025-07-28 Pgs Geophysical As Optisk bevegelsessensor
DE102014211004A1 (de) 2014-06-10 2015-12-17 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
JP6341883B2 (ja) * 2014-06-27 2018-06-13 キヤノン株式会社 位置検出装置、位置検出方法、インプリント装置及び物品の製造方法
EP3207339B1 (en) * 2014-10-13 2019-07-24 Zygo Corporation Interferometric encoder systems
ES2618855T3 (es) * 2014-10-14 2017-06-22 Dr. Johannes Heidenhain Gmbh Dispositivo de medición de posición con dispositivo para la compensación de errores por dilatación térmica de una regla graduada
JP6386337B2 (ja) * 2014-10-23 2018-09-05 株式会社ミツトヨ 光学式エンコーダ
NL2015639A (en) 2014-11-28 2016-09-20 Asml Netherlands Bv Encoder, position measurement system and lithographic apparatus.
DE102015200293A1 (de) * 2015-01-13 2016-07-14 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
CN104614955B (zh) * 2015-03-06 2017-01-11 中国科学院光电技术研究所 一种复合光栅纳米光刻自动对准系统
JP2016205854A (ja) * 2015-04-16 2016-12-08 株式会社小野測器 リニアゲージセンサ
JP6702666B2 (ja) 2015-07-28 2020-06-03 株式会社ミツトヨ 変位検出装置
CN106813578B (zh) * 2015-11-30 2019-02-22 上海微电子装备（集团）股份有限公司 一种二维光栅测量系统
DE102016200847A1 (de) * 2016-01-21 2017-07-27 Dr. Johannes Heidenhain Gesellschaft Mit Beschränkter Haftung Optische Positionsmesseinrichtung
JP6400036B2 (ja) * 2016-03-14 2018-10-03 キヤノン株式会社 位置検出装置、工作装置、および、露光装置
US10077991B2 (en) * 2016-09-27 2018-09-18 Mitutoyo Corporation Optical encoder configured to mitigate undesired interfering light components
US10274344B2 (en) * 2016-12-27 2019-04-30 Mitutoyo Corporation Displacement encoder
DE102017201257A1 (de) * 2017-01-26 2018-07-26 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
US10648838B2 (en) 2017-06-29 2020-05-12 Mitutoyo Corporation Contamination and defect resistant rotary optical encoder configuration including a rotary scale with yawed scale grating bars and structured illumination generating arrangement with a beam deflector configuration
DE102017219125A1 (de) * 2017-10-25 2019-04-25 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
DE102018212719A1 (de) * 2018-07-31 2020-02-20 Dr. Johannes Heidenhain Gesellschaft Mit Beschränkter Haftung Optische Positionsmesseinrichtung
CN112577431B (zh) * 2019-09-29 2022-02-08 上海微电子装备（集团）股份有限公司 光栅尺测量装置及测量方法
CN111610006B (zh) * 2020-06-11 2025-02-07 腾景科技股份有限公司 一种衍射光栅在线检测装置
DE102020209276A1 (de) 2020-07-23 2022-01-27 Dr. Johannes Heidenhain Gesellschaft Mit Beschränkter Haftung Optische Positionsmesseinrichtung
CN112504122B (zh) * 2020-12-03 2021-10-15 中国科学院西安光学精密机械研究所 星载双光栅准直器的指向光轴和光栅位姿标定系统及方法
CN114994938B (zh) * 2022-07-19 2022-10-25 中国科学院长春光学精密机械与物理研究所 色散增强光学元件及光谱合束、锁定、测量结构
CN120847763A (zh) * 2024-04-12 2025-10-28 阜时科技有限公司 一种光扫描方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5666196A (en) * 1993-05-31 1997-09-09 Canon Kabushiki Kaisha Optical detection apparatus for detecting information relating to relative displacement of an object on whch a diffraction grating is formed
US5742391A (en) * 1994-12-27 1998-04-21 Canon Kabushiki Kaisha Optical type sensor for use as an optical measuring head or optical pickup
CN1459019A (zh) * 2000-09-14 2003-11-26 约翰尼斯海登海恩博士股份有限公司 位置测量装置
CN1793778A (zh) * 2004-12-24 2006-06-28 三丰株式会社 位移检测器

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8413955D0 (en) 1984-05-31 1984-07-04 Pa Consulting Services Displacement measuring apparatus
DE3905730C2 (de) 1989-02-24 1995-06-14 Heidenhain Gmbh Dr Johannes Positionsmeßeinrichtung
US5079418A (en) 1990-02-20 1992-01-07 Dr. Johannes Heidenhain Gmbh Position measuring apparatus with reflection
DE9007559U1 (https=) 1990-03-13 1992-09-24 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut
US5104225A (en) 1991-01-25 1992-04-14 Mitutoyo Corporation Position detector and method of measuring position
US5497226A (en) 1994-08-22 1996-03-05 Polaroid Corporation Quadrature diffractive encoder
DE10022619A1 (de) 2000-04-28 2001-12-06 Heidenhain Gmbh Dr Johannes Abtasteinheit für eine optische Positionsmesseinrichtung
US7126696B2 (en) * 2003-09-30 2006-10-24 Mitutoyo Corporation Interferometric miniature grating encoder readhead using fiber optic receiver channels
DE102005029917A1 (de) 2005-06-28 2007-01-04 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5666196A (en) * 1993-05-31 1997-09-09 Canon Kabushiki Kaisha Optical detection apparatus for detecting information relating to relative displacement of an object on whch a diffraction grating is formed
US5742391A (en) * 1994-12-27 1998-04-21 Canon Kabushiki Kaisha Optical type sensor for use as an optical measuring head or optical pickup
CN1459019A (zh) * 2000-09-14 2003-11-26 约翰尼斯海登海恩博士股份有限公司 位置测量装置
CN1793778A (zh) * 2004-12-24 2006-06-28 三丰株式会社 位移检测器

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104457571A (zh) * 2013-09-11 2015-03-25 约翰内斯·海德汉博士有限公司 光学位置测量装置
KR102671210B1 (ko) 2019-04-26 2024-05-31 상하이 마이크로 일렉트로닉스 이큅먼트(그룹) 컴퍼니 리미티드 변위 측정 장치, 변위 측정 방법 및 포토리소그래피 장치

Also Published As

Publication number Publication date
DE502007006292D1 (de) 2011-03-03
JP5100266B2 (ja) 2012-12-19
ATE496283T1 (de) 2011-02-15
DE102006042743A1 (de) 2008-03-27
EP1901041A3 (de) 2008-06-25
US7710578B2 (en) 2010-05-04
JP2008070363A (ja) 2008-03-27
EP1901041A2 (de) 2008-03-19
US20080062432A1 (en) 2008-03-13
EP1901041B1 (de) 2011-01-19
CN101144730A (zh) 2008-03-19

Similar Documents

Publication Publication Date Title
CN101144730B (zh) 位置测量装置
US7872762B2 (en) Optical position measuring arrangement
CN100554868C (zh) 位置测量装置
CN101688795B (zh) 光学位置测量装置
CN1702435B (zh) 使用光纤接收器信道的干涉测量微型光栅编码器读取头
JP6161240B2 (ja) 変位センサ
CN100417917C (zh) 利用纤维光学接收器通道的微型成像编码器读取头
US5448358A (en) Optical apparatus and displacement-information measuring apparatus using the same
US20080067333A1 (en) Position-measuring device
US9733069B2 (en) Optical position-measuring device
CN104515468A (zh) 光学位置测量装置
JP4936980B2 (ja) 光学エンコーダ
US8570533B2 (en) Position measuring device
US20040178333A1 (en) Photoelectric encoder
JP4303804B2 (ja) 光学位置測定装置
US20130057872A1 (en) Device for Determining Distance Interferometrically
JPH1183432A5 (https=)
JPH032624A (ja) 測角装置
US7876451B2 (en) Position-measuring device with movable deflection device and grating and with stationary grating, light source, and detector
JP2005283357A (ja) 光電式エンコーダ
JP2001141521A (ja) 位置を測定しかつ案内誤差を算出する装置
EP0484104A1 (en) Opto-electronic scale reading apparatus
CN105143813B (zh) 用于干扰式测量距离的装置
JP2670457B2 (ja) 零点位置検出装置
NO334674B1 (no) Optisk avstandsmåler

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant