CN101124859A - 夹具装置及成像装置 - Google Patents

夹具装置及成像装置 Download PDF

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Publication number
CN101124859A
CN101124859A CNA2006800028227A CN200680002822A CN101124859A CN 101124859 A CN101124859 A CN 101124859A CN A2006800028227 A CNA2006800028227 A CN A2006800028227A CN 200680002822 A CN200680002822 A CN 200680002822A CN 101124859 A CN101124859 A CN 101124859A
Authority
CN
China
Prior art keywords
mounting table
matrix
clamp
clamp member
workpiece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CNA2006800028227A
Other languages
English (en)
Chinese (zh)
Inventor
桥口昭浩
福井隆史
寺田和广
须藤浩树
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujifilm Corp
Original Assignee
Fujifilm Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujifilm Corp filed Critical Fujifilm Corp
Publication of CN101124859A publication Critical patent/CN101124859A/zh
Pending legal-status Critical Current

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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70791—Large workpieces, e.g. glass substrates for flat panel displays or solar panels
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03G—ELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
    • G03G15/00—Apparatus for electrographic processes using a charge pattern
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/707—Chucks, e.g. chucking or un-chucking operations or structural details
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/0061—Tools for holding the circuit boards during processing; handling transport of printed circuit boards
    • H05K13/0069—Holders for printed circuit boards
CNA2006800028227A 2005-01-20 2006-01-17 夹具装置及成像装置 Pending CN101124859A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP013372/2005 2005-01-20
JP2005013372A JP2006198725A (ja) 2005-01-20 2005-01-20 クランプ装置及び画像形成装置

Publications (1)

Publication Number Publication Date
CN101124859A true CN101124859A (zh) 2008-02-13

Family

ID=36692194

Family Applications (1)

Application Number Title Priority Date Filing Date
CNA2006800028227A Pending CN101124859A (zh) 2005-01-20 2006-01-17 夹具装置及成像装置

Country Status (4)

Country Link
JP (1) JP2006198725A (ko)
KR (1) KR20070094926A (ko)
CN (1) CN101124859A (ko)
WO (1) WO2006077804A1 (ko)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101807007A (zh) * 2009-02-16 2010-08-18 株式会社日立高新技术 液晶曝光装置
CN102034732A (zh) * 2009-09-30 2011-04-27 京瓷株式会社 吸附用构件、使用其的吸附装置及带电粒子线装置
TWI507267B (zh) * 2013-04-11 2015-11-11 Chao Shen Chou 加工工具機
CN108351312A (zh) * 2015-12-04 2018-07-31 株式会社V技术 检查装置
CN109143793A (zh) * 2018-09-06 2019-01-04 重庆科技学院 一种可调式芯片卡具的使用方法
CN114290178A (zh) * 2021-12-28 2022-04-08 苏州慧博光学科技有限公司 一种加工棱镜的工装夹具及其使用方法

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4866782B2 (ja) * 2007-04-27 2012-02-01 富士フイルム株式会社 基板クランプ機構及び描画システム
JP5593912B2 (ja) * 2010-07-22 2014-09-24 ソニー株式会社 表示装置
JP5813555B2 (ja) * 2012-03-30 2015-11-17 株式会社アドテックエンジニアリング 露光描画装置及び露光描画方法
CN103091997B (zh) * 2012-09-27 2014-08-20 上海现代先进超精密制造中心有限公司 楔形板组的胶合方法和夹具
JP6543061B2 (ja) * 2015-03-20 2019-07-10 株式会社オーク製作所 基板矯正治具を用いる露光装置、及び基板矯正治具
CN110977189B (zh) * 2019-11-18 2021-07-13 济南邦德激光股份有限公司 一种激光切割系统及其切割方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01130524A (ja) * 1987-11-16 1989-05-23 Mitsubishi Electric Corp 電子ビーム描画装置
JPH03282473A (ja) * 1990-03-30 1991-12-12 Ushio Inc フィルム露光装置
JP2002217276A (ja) * 2001-01-17 2002-08-02 Ushio Inc ステージ装置
JP2003039222A (ja) * 2001-07-26 2003-02-12 Matsushita Electric Works Ltd 積層板端面加工装置及びクランプヘッド

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101807007A (zh) * 2009-02-16 2010-08-18 株式会社日立高新技术 液晶曝光装置
CN101807007B (zh) * 2009-02-16 2013-06-12 株式会社日立高新技术 液晶曝光装置
CN102034732A (zh) * 2009-09-30 2011-04-27 京瓷株式会社 吸附用构件、使用其的吸附装置及带电粒子线装置
CN102034732B (zh) * 2009-09-30 2015-01-21 京瓷株式会社 吸附用构件、使用其的吸附装置及带电粒子线装置
TWI507267B (zh) * 2013-04-11 2015-11-11 Chao Shen Chou 加工工具機
CN108351312A (zh) * 2015-12-04 2018-07-31 株式会社V技术 检查装置
CN108351312B (zh) * 2015-12-04 2021-05-07 株式会社V技术 检查装置
CN109143793A (zh) * 2018-09-06 2019-01-04 重庆科技学院 一种可调式芯片卡具的使用方法
CN109143793B (zh) * 2018-09-06 2023-06-06 重庆科技学院 一种可调式芯片卡具的使用方法
CN114290178A (zh) * 2021-12-28 2022-04-08 苏州慧博光学科技有限公司 一种加工棱镜的工装夹具及其使用方法

Also Published As

Publication number Publication date
KR20070094926A (ko) 2007-09-27
WO2006077804A1 (ja) 2006-07-27
JP2006198725A (ja) 2006-08-03

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WD01 Invention patent application deemed withdrawn after publication