CN101107482A - Fan filter unit - Google Patents
Fan filter unit Download PDFInfo
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- CN101107482A CN101107482A CNA2006800028123A CN200680002812A CN101107482A CN 101107482 A CN101107482 A CN 101107482A CN A2006800028123 A CNA2006800028123 A CN A2006800028123A CN 200680002812 A CN200680002812 A CN 200680002812A CN 101107482 A CN101107482 A CN 101107482A
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- 238000001514 detection method Methods 0.000 claims abstract description 25
- 230000009183 running Effects 0.000 claims description 29
- 230000006641 stabilisation Effects 0.000 claims description 9
- 230000000052 comparative effect Effects 0.000 claims description 3
- 238000002360 preparation method Methods 0.000 claims description 2
- 238000000746 purification Methods 0.000 claims 1
- 238000011105 stabilization Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 12
- 230000006870 function Effects 0.000 description 12
- 238000009434 installation Methods 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005755 formation reaction Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000005856 abnormality Effects 0.000 description 1
- 230000033228 biological regulation Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 239000003365 glass fiber Substances 0.000 description 1
- 230000002045 lasting effect Effects 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 230000008450 motivation Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F8/00—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying
- F24F8/10—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying by separation, e.g. by filtering
- F24F8/108—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying by separation, e.g. by filtering using dry filter elements
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D25/00—Pumping installations or systems
- F04D25/16—Combinations of two or more pumps ; Producing two or more separate gas flows
- F04D25/166—Combinations of two or more pumps ; Producing two or more separate gas flows using fans
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
- F04D27/004—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids by varying driving speed
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F11/00—Control or safety arrangements
- F24F11/0001—Control or safety arrangements for ventilation
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F11/00—Control or safety arrangements
- F24F11/70—Control systems characterised by their outputs; Constructional details thereof
- F24F11/72—Control systems characterised by their outputs; Constructional details thereof for controlling the supply of treated air, e.g. its pressure
- F24F11/74—Control systems characterised by their outputs; Constructional details thereof for controlling the supply of treated air, e.g. its pressure for controlling air flow rate or air velocity
- F24F11/77—Control systems characterised by their outputs; Constructional details thereof for controlling the supply of treated air, e.g. its pressure for controlling air flow rate or air velocity by controlling the speed of ventilators
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
- Y02A50/00—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE in human health protection, e.g. against extreme weather
- Y02A50/20—Air quality improvement or preservation, e.g. vehicle emission control or emission reduction by using catalytic converters
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
- Y02B30/00—Energy efficient heating, ventilation or air conditioning [HVAC]
- Y02B30/70—Efficient control or regulation technologies, e.g. for control of refrigerant flow, motor or heating
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Air Conditioning Control Device (AREA)
- Control Of Multiple Motors (AREA)
- Control Of Positive-Displacement Air Blowers (AREA)
- Ventilation (AREA)
Abstract
A fan filter unit comprises a plurality of fan motors, a plurality of detecting sections, a body control section, and a filter. Each fan motor includes a fan and a motor. The body control section performs feedback control of each fan motor so that its detection rotation speed coincides with a set rotation speed based on a rotation speed detected at the detecting section. When a rotation speed detection value at any detecting section is smaller than that at other detecting sections, rotation speed synchronization control is carried out for matching the rotation speed of other fan motors to that of the fan motor of slow rotation speed.
Description
Technical field
The present invention relates to fan filter unit (fan filter unit), this fan filter unit is made at needs in the clean room etc. of clean space of usefulness such as semiconductor, liquid crystal, plasma display and is used.
Background technology
For the fan filter unit, requirement is slim, and it is big that the area of clean air blow-off outlet is wanted, and requires to have the ability that can supply with even and sufficient air quantity.Therefore, use has a plurality of fan electromotors.But,, produce buzz sometimes using under the situation of a plurality of fan electromotors.
As the method that suppress to produce buzz, for example, the technology of accurately controlling the rotary speed of a plurality of motor in time per unit (below be called rotating speed) is disclosed in TOHKEMY 2004-205095 communique.
In having the fan filter unit of a plurality of fan electromotors, in the control of the existing technology that suppresses buzz, make the rotating speed of second fan electromotor consistent, also will make the rotating speed of the 3rd fan electromotor consistent with the rotating speed of second fan electromotor with the rotating speed of first fan electromotor.But,, under the situation of the upper motor ability of energy force rate of the next motor, just can not make the rotating speed unanimity because the ability of motor is inconsistent.
Summary of the invention
In order to solve this problem of the prior art, the purpose of this invention is to provide a kind of fan filter unit, even, also can suppress buzz corresponding to the deviation of the motor ability of fan filter unit.Fan filter unit of the present invention has a plurality of fan electromotors, a plurality of test section, main control section and filter.Each fan electromotor comprises blower fan and motor.Each test section detects the rotating speed of each motor.Main control section based on the rotating speed that test section detected, is carried out FEEDBACK CONTROL to each fan electromotor, makes this detection rotating speed consistent with the setting rotating speed.In addition, when value that the tachometer value that is detected by any one test section detects less than other test sections, just carry out synchronization control, the rotating speed of the fan electromotor that the rotating speed that makes other fan electromotors and rotating speed are slow is consistent.According to the present invention, in having the fan filter unit of a plurality of fan electromotors, comprise motor ability deviation, can make the rotating speed unanimity of each fan electromotor.Like this, can provide a kind of fan filter unit, even this fan filter unit when making the rotation speed change of fan electromotor mainly due to the change of installation site air pressure, also has the effect that can make the rotating speed unanimity, suppress buzz.
Description of drawings
Fig. 1 is the general configuration figure of the fan filter unit of embodiment of the present invention 1.
Fig. 2 is the circuit block diagram at the fan filter unit shown in Fig. 1.
Fig. 3 is the circuit block diagram of the fan filter unit of embodiment of the present invention 2.
Fig. 4 is the circuit block diagram of the fan filter unit of embodiment of the present invention 3.
Fig. 5 is the circuit block diagram of the fan filter unit of embodiment of the present invention 4.
Fig. 6 is the circuit block diagram of the fan filter unit of embodiment of the present invention 5.
Fig. 7 is the circuit block diagram of the fan filter unit of embodiment of the present invention 6.
The explanation of symbol
2A first blower fan
2B second blower fan
3A first motor
3B second motor
4A first motor driver
4B second motor driver
5A first fan electromotor
5B second fan electromotor
5C, 5D fan electromotor
6 filters
7,73,74,75,76,77 main control section
8 speed setting portions
9A first test section
9B second test section
The 10A first rotation control part
The 10B second rotation control part
11 synchronization control parts
16 stabilisation portions
18 runnings stop portion
19 retry portions (retry section)
20 retry count portions
21,22,31 the 3rd comparators
30A first comparator
30B second comparator
The specific embodiment
Embodiments of the present invention are described with reference to the accompanying drawings.In addition, in each embodiment, the structure identical with the front embodiment gives same symbol, and detailed explanation is omitted.The present invention is not limited to these embodiments.
(embodiment 1)
Fig. 1 represents the general configuration of the fan filter unit of embodiment of the present invention 1, is to be illustrated in a part of filter to be cut off front elevation under the state.Fig. 2 is its circuit block diagram.This fan filter unit has the first fan electromotor 5A, the second fan electromotor 5B and filter 6.Fan electromotor 5A is made up of the first blower fan 2A, the first motor 3A and the first motor driver 4A, and fan electromotor 5B is made up of the second blower fan 2B, the second motor 3B and the second motor driver 4B.Filter 6 is used for cleaning the air of being carried by blower fan 2A, 2B.Filter 6 for example is made of glass fibre, catches micron-sized particulate with very high efficient.More particularly, filter 6 captures the particulate of 0.3 μ m with the arresting efficiency more than 99.97%.What filter 6 was configured in blower fan 2A, 2B blows out side or suction side.
This fan filter unit has the main control section that is used for controlling fan electromotor 5A, 5B (below be called control part) 7, be used for the second test section 9B that detects the first test section 9A of motor 3A rotating speed and be used for detecting motor 3B rotating speed.The rotating speed that the rotating speed that control part 7 has the speed setting portion 8 that is used for setting fan electromotor 5A, 5B rotating speed, detect by input test section 9A controls the first rotation control part (below the be called control part) 10A of fan electromotor 5A rotation, detected by input test section 9B is controlled the second rotation control part (below the be called control part) 10B of fan electromotor 5B rotation.Control part 7 also has the first comparator 30A, the second comparator 30B, the 3rd comparator 31 and synchronization control part (below be called control part) 11. Comparator 30A, 30B compare rotating speed of being set by speed setting portion 8 and the rotating speed that is detected by test section 9A, 9B, and its result is sent to control part 10A, 10B respectively.Rotating speed that 31 pairs of comparators are detected by test section 9A and the rotating speed that is detected by test section 9B compare, and calculate slow how many r/min of the fast rotating speed of slow rotating ratio, and send control part 11 to.In other words, calculate rotating speed poor of rotating speed that test section 9A detects and test section 9B detection.Control part 11 will carry out Synchronization Control under the result who is obtained by comparator 31 is situation more than the setting, via one among control part 10A, the 10B, make among fan electromotor 5A, the 5B than rotating speed faster and reduce.
Each one that constitutes control part 7 is made of microcomputer and software or special circuit.Integral body of they formations still is provided with respectively and all is fine.Moreover test section 9A, 9B and control part 7 constitute one and also are fine.In addition, fan electromotor 5A, 5B install distantly in the inside of fan filter unit, though with control part 7 certain distance is arranged, tach signal also can not be subjected to very much the influence of noise.On the other hand, because the signal between control part 10A, 10B and motor driver 4A, the 4B has the influence of noise, so the distance between being necessary to shorten separately.Therefore, preferably fan electromotor 5A and control part 10A, fan electromotor 5B and control part 10B will be respectively in abutting connection with being provided with at least.
In said structure, will give motor 3A, 3B by the rotating speed that speed setting portion 8 is set at 2000r/min.Then, carry out FEEDBACK CONTROL, make the detection rotating speed of motor 3A, 3B become the setting rotating speed respectively.In other words, comparator 30A, 30B rotating speed that respectively test section 9A, 9B is detected and the rotating speed of being set by speed setting portion 8 compares.Then this result is relatively sent among control part 10A, the 10B.Control part 10A, 10B respectively based on the comparison the comparative result of device 30A, 30B motor driver 4A, 4B are controlled, make the rotating speed of motor 3A, 3B near the rotating speed of setting.
So, though carried out FEEDBACK CONTROL,, also have the situation of the speed discrepancy that produces fan electromotor 5A, 5B owing to fan electromotor 5A, the deviation of 5B ability or the variation of installation site air pressure.So, for example, reach 10r/min at speed discrepancy and will produce buzz when above.
At this moment, control part 11 is accepted the result of calculation of comparator 31, and 10B controls to control part, makes the rotating speed of the low fan electromotor 5A of the rotating speed that detects the high fan electromotor 5B of rotating speed and detection rotating speed consistent.In other words, the result of compare comparator 30A, 30B, control part 10A, 10B are preferentially from the control of control part 11.Thus, just can not be subjected to the influence of fan electromotor 5A, 5B ability deviation or the change of installation site air pressure, thereby suppress the generation of buzz.
In addition, produce the condition of buzz, because of the shape of the running rotating speed of fan electromotor 5A, 5B, size, blower fan 2A, 2B different.Therefore, preferably set the threshold value of the rotating speed deviation that begins to carry out synchronization control according to different situations.
As mentioned above, control part 7 carries out FEEDBACK CONTROL based on the rotating speed that is detected by test section 9A, make the rotating speed of fan electromotor 5A consistent with the rotating speed of setting, equally, carry out FEEDBACK CONTROL, make the rotating speed of fan electromotor 5B consistent with the rotating speed of setting based on the rotating speed that detects by test section 9B.Have again, under the situation more than the slow setting of rotating speed that the rotating ratio that is detected by test section 9A is detected by test section 9B, will carry out synchronization control, make the rotating speed of fan electromotor 5B be reduced to the rotating speed that detects by test section 9A.Equally, under the situation more than the slow setting of rotating speed that the rotating ratio test section 9A that is detected by test section 9B detects, will carry out synchronization control, make the rotating speed of fan electromotor 5A be reduced to the rotating speed that detects by test section 9B.
In addition, the situation that the dynamo-electric motivation of two typhoons is set has been described above, even but under the situation that three above fan electromotors are set, it is consistent to control the slowest fan electromotor of the rotating speed that makes other fan electromotors and rotating speed, also can access same effect.
(embodiment 2)
Fig. 3 is the circuit block diagram of the fan filter unit of embodiment of the present invention 2.The difference of the structure of the structure of present embodiment and embodiment 1 is, in main control section 73, is provided with stabilisation portion 16 between comparator 31 and synchronization control part (below be called control part) 11.Structure in addition is all identical with embodiment 1.
In other words, for example, be under the situation of 2000r/min setting rotating speed, stabilisation portion 16, the detection rotating speed of fan electromotor 5A, 5B poor each other to ± when 10r/min is above, can prevent that control part 11 from moving at interval at the appointed time.In other words, stabilisation portion 16 makes the time delay official hour of synchronization control beginning.That is to say, though the detection speed discrepancy of fan electromotor 5A, 5B to more than the 10r/min, official hour at interval in, control part 11 can not move yet.
The so-called stipulated time, if after for example connecting power supply and bringing into operation, just be set at 30 seconds, and if set rotating speed or because the load of fan electromotor 5A, 5B sharply changes under the situation that makes the detection rotation speed change, just be set at 10 seconds changing.These setting-up times are equivalent to time of preparing to turn round.Thus, just can be suppressed at the overreaction of the synchronization control under the fixed state of fan electromotor 5A, 5B rotary speed unstabilization.
What as mentioned above, main control section 73 made synchronization control begins to postpone official hour.Thus, just can prevent that control part 11 is in the fixed time action in the district of the detection rotary speed unstabilization of fan electromotor 5A, 5B.
(embodiment 3)
Fig. 4 is the circuit block diagram of the fan filter unit of embodiment of the present invention 3.The structure of present embodiment is with the difference of embodiment 1, is provided with retry portion 19 in main control section 74.Structure in addition is all identical with embodiment 1.Retry portion 19 also is made of microcomputer etc.
In use has the clean room of fan filter unit, carry out under the situation of important operation, stop the danger that fan electromotor 5A, 5B have the productivity ratio that makes this operation obviously to descend.So, carry out important procedure during in, wish to avoid fan electromotor 5A, 5B with because the rotating speed operation of the expection air quantity that low cruise and can not obtaining should obtain under the rotating speed of setting.
Retry portion 19 measures the duration of carrying out synchronization control.Therefore, because the ability deviation of fan electromotor 5A, 5B etc. and carry out synchronization control continuously, for example reach under 10 minutes the situation, by rotating control part (below be called control part) 10A, 10B fan electromotor 5A, 5B are controlled by the rotating speed of initial setting with regard to attempting.In other words, the instruction of being sent by retry portion 19 is than more preferentially being implemented by the control of control part 11.So, main control section 74 is carried out retry control when the synchronization control of carrying out the stipulated time, attempt making the rotating speed of fan electromotor 5A, 5B consistent with the rotating speed of setting.Thus, by synchronization control just can prevent can not get by set rotating speed lasting low-speed running under the state of this expection air quantity that obtains.Therefore, just can give full play to the original ability of fan electromotor 5A, 5B.Fan electromotor 5A, 5B are moved under as far as possible near the rotating speed of setting rotating speed again.
At this, the stipulated time that retry portion 19 is measured, depend on the internal capacity or the needed air quantity of clean room that the fan electromotor device is installed etc.
In addition, carry out retry control but the rotating speed of fan electromotor 5A, 5B still departs under the situation more than the regulation rotating speed, preferably carrying out synchronization control once more.For this reason, if not proceeding retry control but retry portion 19 couples of control part 10A, 10B when sending the instruction of a retry control, the duration of the synchronization control that retry portion 19 measures will be reset.Turn back to the common state of a control same then with embodiment 1.The control of carrying out is preferred like this.
(embodiment 4)
Fig. 5 is the circuit block diagram of the fan filter unit of embodiment of the present invention 4.The structure of present embodiment is with the difference of embodiment 3, is provided with retry count portion 20 and running and stops portion 18 in main control section 75.Structure in addition is all identical with embodiment 3.Retry count portion 20 and running stop portion 18 and are made of microcomputer.Running stops portion 18 makes fan electromotor 5A, 5B out of service by rotation control part 10A, 10B, in addition, also can stop to power to motor 3A, 3B.In other words, running stops portion 18 and also can be made of relay.
When retry count portion 20 detected the retray function of being realized by retry portion 19 repeated stipulated number in the predefined time, synchronization control is no longer carried out, stop portion 18 by running and stop fan electromotor 5A, 5B automatically.In other words, stopping instruction that portion 18 sends by running further has precedence over the instruction that retry portion 19 sends and is implemented.So, when having repeated the retry control of stipulated number at the appointed time, main control section 75 stops fan electromotor 5A, 5B.
The number of times of the retray function that 20 pairs in retry count portion moved in time of 1 hour is for example counted.When the number of times of counting for example surpasses 5 times, just be judged as unusual use then.State so is under the situation of the unusual use when having sneaked into foreign matters such as filter cloth in the pressure anomaly that for example causes installation environment or in fan electromotor 5A, 5B etc., perhaps exists to take place under the unusual situation in filter 6.When the number of times of retry count portion 20 inside counting at the appointed time reaches setting when above, stop portion's 18 output signals to running.Running stops portion 18 and accepts this signal, stops fan electromotor 5A, 5B automatically.So, just avoided the unusual use of fan electromotor 5A, 5B automatically.
At this, the stipulated time that the number of times of the retray function instruction that 20 pairs of retry portions 19 of retry count portion send is counted, select about 1～2 hour more appropriate.Because it is aforesaid unusual that the purpose of this control is detection, so preferably judge at short notice.And unusual situation is arranged is to implement retray function continuously, can be about 3～5 times so be used for stopping to running the threshold value of portion's 18 output signals.
(embodiment 5)
Fig. 6 is the circuit block diagram of the fan filter unit of embodiment of the present invention 5.The difference of the structure of present embodiment and embodiment 1 is, in main control section 76, replaces comparator 31 to be provided with function different the 3rd comparator 21 and running and stops portion 18.Structure in addition is same with embodiment 1 all.Comparator 21 also is made of microcomputer etc.
Like this, the detection rotating speed of comparator 21 couples of test section 9A, 9B and the setting rotating speed of speed setting portion 8 compare, and detect speed discrepancy.
As shown in Figure 6, be set the stage, the situation of setting and the diverse fan electromotor 5C of fan electromotor 5B is being arranged.Under the situation of so wrong use fan electromotor 5C, the rotating speed that comparator 21 detects fan electromotor 5C is very different, and can judge is the wrong state that is provided with.For example, the setting rotating speed is 2000r/min, and it is more than the 500r/min that comparator 21 just can detect the difference that detects rotating speed and set rotating speed.Under situation like this, comparator 21 just stops portion's 18 output signals to running.Running stops portion 18 and receives this signal, just stops fan electromotor 5A, 5C automatically.Like this, just can avoid the unusual use of fan electromotor 5C automatically.
Perhaps, be set correctly at fan electromotor 5A, 5B, the local obstruction under the situation that the side that makes among fan electromotor 5A, the 5B can not run well takes place in filter 6, and fan electromotor 5A, 5B are stopped.
In addition, be provided with under the situation with the fan electromotor 5B of fan electromotor 5A identical function replacing fan electromotor 5C, set the judgment standard value in the comparator 21, making running stop portion 18 and being failure to actuate.
As mentioned above, main control section 76 under the situation of difference greater than setting of the detection rotating speed of setting rotating speed and test section 9A or test section 9B, just makes fan electromotor stop.The mistake that just can prevent the fan electromotor of a side is thus used or is moved under abnormality.
(embodiment 6)
Fig. 7 is the circuit block diagram of the fan filter unit of embodiment of the present invention 6.The difference of the structure of present embodiment and embodiment 1 structure is, in main control section 77, replaces comparator 31 to be provided with function different the 3rd comparator 22 and running and stops portion 18.Structure in addition is all identical with embodiment 1.Comparator 22 also is made of microcomputer etc.
At this, fan electromotor 5C, 5D are different with the fan electromotor 5A, the 5B that have necessary ability, should install.Under these circumstances, fan electromotor 5C, 5D can not be with the rotating speed rotations of necessity.In other words, although will set speed setting in the limit of power of the fan electromotor that should install below predetermined rotating speed, after operation had just begun, the rotating speed that detects rotating speed and setting was also inconsistent.Under these circumstances, comparator 22 will be compared by test section 9A, 9B rotating speed that detects and the rotating speed of setting in speed setting portion 8, detect the mistake of fan electromotor 5C, 5D and use.Automatically stop fan electromotor 5C, 5D with regard to not carrying out synchronization control but stopping portion 18 then by running.
In speed setting portion 8, imagination will be set the limit of power of speed setting at fan electromotor 5A, 5B, for example the following situation of the 1800r/min within 1000～2000r/min.In the case, fan electromotor 5A, 5B have enough abilities, can carry out FEEDBACK CONTROL.But, if mistake has been installed fan electromotor 5C, 5D, then the rotating speed that detects by test section 9A, 9B do not enter set rotating speed for example ± 10r/min within.In the case, to judge be the unusual use of being misapplied etc. with fan electromotor 5A, the diverse fan electromotor 5C of 5B ability, 5D to comparator 22.Then, stop portion's 18 output signals to running.Running stops portion 18 and receives this signal, stops fan electromotor 5C, 5D automatically.So just avoided the unusual use of fan electromotor 5C, 5D automatically.
Being provided with under the situation that fan electromotor 5A, 5B replace fan electromotor 5C, 5D, set the judgment standard value in the comparator 22, making running stop portion 18 and being failure to actuate.
In addition, after running had just begun, as described in the embodiment 2, the rotary speed unstabilization of fan electromotor was fixed sometimes.Therefore, same with the function of the stabilisation portion 16 of embodiment 2, preferably in the regular hour, suppress running and stop portion 18 and move.
As mentioned above, under the situation of difference greater than setting of the detection rotating speed of setting rotating speed and test section 9A, 9B, main control section 77 stops fan electromotor 5A, 5B.
In addition, the structure that embodiment 2～embodiment 6 is intrinsic separately, only otherwise just can make up on the contrary mutually.So structure also within the scope of the invention.For example can be in the structure of embodiment 3～6 with the textural association of embodiment 2.
Utilizability on the industry
According to the present invention, comprising the indoor of the clean room that is provided with the approximate blower fan of many rotating speeds, Use synchronization control just can suppress the buzz of blower fan. Therefore, can be so that the operation ring Border and living environment are comfortable.
Claims (8)
1. a fan filter unit is characterized in that, comprising:
First fan electromotor with first blower fan and first motor;
Detect first test section of the rotating speed of described first motor;
Second fan electromotor with second blower fan and second motor;
Detect second test section of the rotating speed of described second motor;
The filter of the air that purification is sent into by described first blower fan and described second blower fan; With
Main control section, wherein,
The rotating speed that described main control section detects based on described first test section, carrying out FEEDBACK CONTROL makes the rotating speed of described first fan electromotor consistent with the setting rotating speed, and rotating speed based on described second test section detection, carrying out FEEDBACK CONTROL makes the rotating speed of described second fan electromotor consistent with described setting rotating speed, under the situation more than the slow setting of rotating speed that described second test section of the rotating ratio that described first test section detects detects, carry out synchronization control, make the rotating speed of described second fan electromotor be reduced to the rotating speed that described first test section detects, under the situation more than the slow setting of rotating speed that described first test section of the rotating ratio that described second test section detects detects, carry out synchronization control, make the rotating speed of described first fan electromotor be reduced to the rotating speed that described second test section detects.
2. the fan filter unit described in claim 1 is characterized in that,
Described main control section comprises:
The rotating speed that detects based on described first test section carries out FEEDBACK CONTROL, makes the rotating speed and the corresponding to first rotation control part of setting rotating speed of described first fan electromotor;
The rotating speed that detects based on described second test section carries out FEEDBACK CONTROL, makes the rotating speed and the corresponding to second rotation control part of described setting rotating speed of described second fan electromotor;
Rotating speed and described setting rotating speed that described first test section is detected compare, and comparative result are delivered to first comparator of the described first rotation control part;
Rotating speed and described setting rotating speed that described second test section is detected compare, and comparative result are delivered to second comparator of the described second rotation control part;
Calculate the 3rd comparator of the difference of the rotating speed of described first test section detection and the rotating speed that described second test section detects; With
Receive the result of calculation of described the 3rd comparator, under described result of calculation is situation more than the described setting, carry out Synchronization Control via the described first rotation control part and described second one of rotating in the control part, make the synchronization control part of the rotating speed reduction of a very fast side in described first, second fan electromotor.
3. the fan filter unit described in claim 1 is characterized in that,
Described main control section, the beginning delay stipulated time that described synchronization is controlled.
4. the fan filter unit described in claim 3 is characterized in that,
The described stipulated time, be set to from just brought into operation back and of described fan filter unit, until the time of the preparation running of the detection stabilization of speed of described first, second test section from the setting rotating speed of described fan electromotor after changing any one party just.
5. the fan filter unit described in claim 1 is characterized in that,
Described main control section when the stipulated time was carried out in described synchronization control, is carried out retry control, attempts making the rotating speed of described first, second fan electromotor consistent with described setting rotating speed.
6. the fan filter unit described in claim 5 is characterized in that,
Described main control section when repeating the described retry control of stipulated number at the appointed time, stops fan electromotor.
7. the fan filter unit described in claim 1 is characterized in that,
Described main control section, under any one situation of the difference of the detection rotating speed of the difference of the detection rotating speed of described setting rotating speed and described first test section and described setting rotating speed and described second test section, stop described first, second fan electromotor greater than setting.
8. the fan filter unit described in claim 1 is characterized in that,
Described main control section under the situation of difference greater than setting of the detection rotating speed of the difference of the detection rotating speed of described setting rotating speed and described first test section and described setting rotating speed and described second test section, stops described first, second fan electromotor.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP043712/2005 | 2005-02-21 | ||
| JP2005043712 | 2005-02-21 | ||
| PCT/JP2006/302799 WO2006088119A1 (en) | 2005-02-21 | 2006-02-17 | Fan filter unit |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101107482A true CN101107482A (en) | 2008-01-16 |
| CN101107482B CN101107482B (en) | 2010-05-26 |
Family
ID=36916516
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2006800028123A Active CN101107482B (en) | 2005-02-21 | 2006-02-17 | Fan filter unit |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US20100028164A1 (en) |
| JP (1) | JP4561828B2 (en) |
| KR (1) | KR100823404B1 (en) |
| CN (1) | CN101107482B (en) |
| WO (1) | WO2006088119A1 (en) |
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| CN102458082A (en) * | 2010-10-22 | 2012-05-16 | 鸿富锦精密工业（深圳）有限公司 | Temperature regulating device for electronic device |
| CN102465907A (en) * | 2010-11-03 | 2012-05-23 | 无锡华润上华半导体有限公司 | Fan control system and control method |
| CN104863880A (en) * | 2014-02-21 | 2015-08-26 | 奇鋐科技股份有限公司 | Fan rotating speed synchronization method and device |
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| CN106224280A (en) * | 2016-10-07 | 2016-12-14 | 上海格拉曼国际消防装备有限公司 | A kind of control system realizing both stage impellers synchronization in hydraulic pressure counter-rotating fan and control method thereof |
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- 2006-02-17 CN CN2006800028123A patent/CN101107482B/en active Active
- 2006-02-17 WO PCT/JP2006/302799 patent/WO2006088119A1/en active Application Filing
- 2006-02-17 JP JP2007503720A patent/JP4561828B2/en active Active
- 2006-02-17 KR KR1020077013299A patent/KR100823404B1/en active IP Right Grant
- 2006-02-17 US US11/722,816 patent/US20100028164A1/en not_active Abandoned
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Also Published As
| Publication number | Publication date |
|---|---|
| JP4561828B2 (en) | 2010-10-13 |
| KR20070086121A (en) | 2007-08-27 |
| CN101107482B (en) | 2010-05-26 |
| WO2006088119A1 (en) | 2006-08-24 |
| JPWO2006088119A1 (en) | 2008-07-03 |
| US20100028164A1 (en) | 2010-02-04 |
| KR100823404B1 (en) | 2008-04-18 |
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