CN101080122A - Optical phased array light beam scanner based on lanthanum-doped lead zirconate titanate - Google Patents
Optical phased array light beam scanner based on lanthanum-doped lead zirconate titanate Download PDFInfo
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- CN101080122A CN101080122A CN200710041584.7A CN200710041584A CN101080122A CN 101080122 A CN101080122 A CN 101080122A CN 200710041584 A CN200710041584 A CN 200710041584A CN 101080122 A CN101080122 A CN 101080122A
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- 230000003287 optical effect Effects 0.000 title claims abstract description 33
- 229910052451 lead zirconate titanate Inorganic materials 0.000 title abstract description 6
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 title abstract description 6
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 30
- 229910052746 lanthanum Inorganic materials 0.000 claims description 27
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 claims description 27
- 239000000463 material Substances 0.000 claims description 18
- 239000010409 thin film Substances 0.000 claims description 3
- 230000003247 decreasing effect Effects 0.000 abstract description 2
- 238000005516 engineering process Methods 0.000 description 13
- 230000000694 effects Effects 0.000 description 7
- 230000005693 optoelectronics Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 241000826860 Trapezium Species 0.000 description 2
- 229910010293 ceramic material Inorganic materials 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229910000980 Aluminium gallium arsenide Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 239000002178 crystalline material Substances 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 230000036962 time dependent Effects 0.000 description 1
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- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
Abstract
An optical phased array beam scanner based on lanthanum-doped lead zirconate titanate comprises a sheet-shaped lanthanum-doped lead zirconate titanate, and is characterized in that a conductive lower electrode is arranged on the lower surface of the lanthanum-doped lead zirconate titanate, and the lower electrode is directly connected with the negative electrode of a voltage driver or grounded; forming a phase modulation array electrode consisting of a plurality of strip-shaped electrodes on the upper surface of the lanthanum-doped lead zirconate titanate, wherein each adjacent strip-shaped electrode in the phase modulation array electrode has the same width and interval, and the lengths of the strip-shaped electrodes are sequentially decreased in an arithmetic manner or increased in an arithmetic manner; the strip electrodes are connected with the positive electrode of the voltage driver after being connected with each other through leads, and the control electrode of the voltage driver is connected with a computer. The invention greatly simplifies the driving system of the light beam scanner and has the advantages of good stability, high modulation speed, large working wavelength range and the like.
Description
Technical field
The present invention relates to beam flying, is a kind of optical phased array optical beam scanner based on lead lanthanum zirconate titanate, and the light beam that is mainly used in the space scans fast.
Background technology
In many application of laser optoelectronic, need light beam at spacescan.Traditional method is to adopt a tilting mirror or galvanometer.The sweep speed that method obtained and the ratio of precision of this employing mechanical movement are lower.In order to improve sweep speed, reduce the volume weight of device, adapt to the needs that use in the space, people carry out deep research to the optical phased array technology.Optical phased array is that a kind of light phase of beam wave surface that makes produces the optics of periodic modulation.Its basic principle as shown in Figure 1.When each unit of phase-modulator array 1 obtains one spatially during the time dependent phase place of linear distribution, beam wave surface will be deflected in the space, produce the effect of beam flying.In this technology, there is not mechanical moving element, therefore can obtain very high sweep speed.The key of optical phased array technology is a phase-modulator array.People have utilized different materials and technology, have demonstrated the performance of optical phased array.
Formerly one of technology (P.F.Mcmanamon, et.al.Proceedings of the IEEE, 1996, Vol.84, No.2 pp268-298) adopts liquid crystal to make the phase-modulator array.It has, and driving voltage is low, little advantages such as (the beam flying angle are big) of array cycle, but modulating speed is low, poor heat stability, operating wavelength range are restricted.Two (E.Shekel of technology formerly, et.al., LEOS 2002, advantages such as paper WA2) employing AlGaAs semiconductor hetero-junction material is made waveguide type phase-modulator array, and this structure has the modulating speed height, and the array cycle is little, but light beam coupling efficient is low, array size small scale, luminous power is restricted, and operating wavelength range is little.Formerly three of technology (R.A.Meyer, APPLIED OPTICS, 1972, Vol.11, No.3 pp613-616) adopts electrooptic crystal to make phase-modulator, and it has advantages such as modulating speed is fast, but has shortcomings such as operating voltage height, material cost height.At crystalline material price height, the problem that volume is little.People and have developed the transparent ceramic material with electro optic effect.Wherein lead lanthanum zirconate titanate (lead lanthanum zirconate titanate) is a kind of material of extremely paying attention to.Formerly four of technology (J.A.Thomas et.al.OPTICS LETTERS, 1995, Vol.20, No.13 pp1510-1512) utilizes the cross electro-optical effect of lead lanthanum zirconate titanate material to make phase-modulator array 1, and its structure is as shown in Figure 2.Owing to utilize cross electro-optical effect, the distance that has the phase modulated effect on light path is very short, and therefore the operating voltage that requires is very high.Simultaneously, owing to adopted the structure of interdigital electrode, the size of each unit of array is bigger, so the angle of beam deflection is smaller.Formerly five of technology (Q.W.Song et.al., APPLIED OPTICS, 1996, Vol.35, No.17, pp 3155-3162) adopt the longitudinal electro-optic effect of lead lanthanum zirconate titanate material to make phase-modulator array 1, and its structure as shown in Figure 3.This structure applies voltage with transparency electrode, and the material on light path all has electro optic effect.But in this structure, also there are contradiction in the size of electrode and the length of light path, when promptly increasing optical path length, must increase the electrode dimension, otherwise crosstalking between the array unit can have a negative impact.Therefore the size of array unit can not lower, so that the angle of beam deflection is also smaller.Six (Dong Zuoren of technology formerly, Fang Zujie, Qu Ronghui, Liu Feng, Ye Qing, Qin Shibo, the electric light wave guidance optical phase modulator array, utility model patent, the patent No.: ZL200520041530.7), the scheme that proposes utilizes the waveguiding structure form to design electric light wave guidance optical phase modulator, with the scanning voltage in the reduction system.But, with the first technology four that adopts lead lanthanum zirconate titanate, May Day sample, all need introduce the combination that different driving voltage forms different linear phase faces at different array phase modulation unit, thereby realize the scanning of light beam, this has increased the complexity of system configuration greatly.
Summary of the invention
At the problem of above-mentioned technology formerly, the present invention proposes a kind of optical phased array optical beam scanner based on lead lanthanum zirconate titanate, with the structure of the voltage driver of simplifying optical beam scanner, strengthens the practicality of optical beam scanner.
Technical solution of the present invention is as follows:
A kind of optical phased array optical beam scanner based on lead lanthanum zirconate titanate comprises a sheet lead lanthanum zirconate titanate, it is characterized in that establishing at the lower surface of this lead lanthanum zirconate titanate the bottom electrode of conduction, and this bottom electrode directly links to each other with the negative pole of voltage driver; Form the phase modulation array electrode that many bar shaped electrodes are formed at the upper surface of this lead lanthanum zirconate titanate, each adjacent strip electrode has identical width and at interval in this phase modulation array electrode, and the length of described strip electrode successively equal difference successively decrease or equal difference increases progressively; These strip electrodes interconnect the back by lead-in wire and link to each other with the positive pole of described voltage driver, and described voltage driver links to each other with computer.
Described lead lanthanum zirconate titanate is a block materials, or the thin-film material of waveguiding structure.
Described phase modulation array electrode is the cascade of trapezoidal array electrode or a plurality of trapezoidal array electrodes.
According to above-mentioned device architecture, no longer need the linear phase face that different voltage forms irradiating light beam that applies one by one between the strip electrode of phase modulation array electrode of the present invention.It can apply identical single voltage to different strip electrodes, forms the light path of linear change then by the linear change of control electrode length, thereby obtains the phase face of outgoing beam linear change.
From document (J.A.Thomas, Optical phase array beam Deflection using Lead LanthanumZirconate Titanate, Doctoral Dissertation, 2001) can know that the deflection angle theta of phase array optical beam scanner can be expressed as:
In the formula:
Be the phase difference between the adjacent bar electrode,
λ is the wavelength of incident beam,
D is the cycle of phase modulation unit,
K is a wave vector,
Δ l is that the electrode length of adjacent phase modulation unit is poor,
n
0Be the refractive index of material,
R
12Be electro-optic coefficient,
V and t are respectively the voltage of application and the thickness of specimen material.
As shown from the above formula, Δ θ ∝ Δ l, because each strip electrode of phase modulation array electrode of the present invention has identical width and interval, but its length equal difference is successively successively decreased or is increased progressively, be that each adjacent strip electrode has identical length difference, therefore the phase face of being made up of the outgoing beam of each strip electrode can form the distribution of a linearity, and no longer need to form the linear phase face of irradiating light beam by the voltage of adjusting each phase modulation unit one by one, structurally simplified the complexity of system greatly.
Therefore, the present invention has following advantage:
1, in the optical beam scanner of optical phased array phase modulation, an important techniques difficult problem is exactly the number of additional electrodes lead-in wire.Usually phase array N phase modulation unit of one pole need have N external driving voltage, the complexity of visible this scanner.And the present invention only need introduce a driving voltage in all phase modulation unit, and driving voltage is scanned the scanning that promptly can realize light beam, and this simplifies the drive system of whole scanner greatly.
2, electrode structure of the present invention both can adopt the La-doped lead zirconate-titanate ceramics material of body piece, also can adopt film lead lanthanum zirconate titanate material; The phased array scanner that both can be used for one pole also can be used for the optical phased array scanner of multi-stage cascade.
3, adopt the electrooptic birefringence effect of lead lanthanum zirconate titanate, compare with semi-conducting material, have advantages such as good stability, modulating speed is fast, operating wavelength range is big with liquid crystal.
Description of drawings
Fig. 1 is the basic principle of optical phased array;
Fig. 2 is the schematic diagram that adopts the cross electro-optical effect structure;
Fig. 3 is the schematic diagram that adopts the longitudinal electro-optic effect structure;
Fig. 4 is the structural representation of the embodiment of the invention one;
Fig. 5 is the structural representation of the embodiment of the invention two;
Fig. 6 is the structural representation of the embodiment of the invention three;
Embodiment
The invention will be further described below in conjunction with embodiment and accompanying drawing, but should not limit protection scope of the present invention with this.
See also Fig. 4 earlier, Fig. 4 is the structural representation of the embodiment of the invention one, as seen from the figure, the present invention is based on the optical phased array optical beam scanner of lead lanthanum zirconate titanate, comprise a sheet lead lanthanum zirconate titanate 1, it is characterized in that establishing at the lower surface of this lead lanthanum zirconate titanate 1 bottom electrode 2 of conduction, this bottom electrode 2 directly links to each other with the negative pole or the ground of voltage driver 4; Upper surface in this lead lanthanum zirconate titanate 1 forms the phase modulation array electrode 3 that many bar shaped electrodes are formed, each adjacent strip electrode has identical width and at interval in this phase modulation array electrode 3, and the length of described strip electrode successively equal difference successively decrease or equal difference increases progressively; These strip electrodes interconnect the back by lead-in wire and link to each other with the positive pole of described voltage driver 4, and the control utmost point of described voltage driver 4 links to each other with computer 5.The phase modulation array electrode 3 of present embodiment is the equal difference electrode structure of right-angled trapezium.1 is employed lead lanthanum zirconate titanate electrooptical material among the figure, and it can be a body piece electrooptic ceramic material, also can be the thin-film material of waveguiding structure.2 is the bottom electrode 2 of sputter or evaporation on lead lanthanum zirconate titanate electrooptical material 1, and its covers 1 whole lower surface, links to each other with ground by lead-in wire then.Computer 5 control voltage drivers 4 carry out voltage scanning.6 is incident beam; 7 is outgoing beam.
Fig. 5 is the structural representation of the embodiment of the invention two, and the difference of embodiment two and embodiment one is that described phase modulation array electrode 3 is trapezoidal equal difference electrode structures, and it is poor still to have equal lengths between adjacent strip electrode.
Fig. 6 is the structural representation of the embodiment of the invention three, embodiment three is that described phase modulation array electrode 3 is the cascade phase array array structures that are made of the equal difference electrode the cascade of two right-angled trapezium array electrodes that form at lead lanthanum zirconate titanate 1 upper surface with the difference of embodiment one, can control each sub-phase modulation array respectively by voltage driver 4 and computer 5 then and carry out the scanning of light beam.
Show that through on probation the present invention has simplified the drive system of scanner greatly, and have good stability, modulating speed The advantage such as hurry up, operating wavelength range is big.
Claims (3)
1, a kind of optical phased array optical beam scanner based on lead lanthanum zirconate titanate, comprise a slice lead lanthanum zirconate titanate (1), it is characterized in that establishing at the lower surface of this lead lanthanum zirconate titanate (1) bottom electrode (2) of conduction, this bottom electrode (2) directly links to each other with the negative pole of voltage driver (4); Upper surface in this lead lanthanum zirconate titanate (1) forms the phase modulation array electrode (3) that many bar shaped electrodes are formed, each adjacent strip electrode has identical width and at interval in this phase modulation array electrode (3), and the length of described strip electrode successively equal difference successively decrease or equal difference increases progressively; These strip electrodes interconnect the back by lead-in wire and link to each other with the positive pole of described voltage driver (4), and the control utmost point of described voltage driver (4) links to each other with computer (5).
2, optical phased array optical beam scanner according to claim 1 is characterized in that described lead lanthanum zirconate titanate is a block materials, or the thin-film material of waveguiding structure.
3, optical phased array optical beam scanner according to claim 1 is characterized in that the cascade of described phase modulation array electrode (3) for trapezoidal array electrode, a plurality of trapezoidal array electrodes.
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| CN200710041584.7A CN101080122A (en) | 2007-06-01 | 2007-06-01 | Optical phased array light beam scanner based on lanthanum-doped lead zirconate titanate |
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| CN200710041584.7A CN101080122A (en) | 2007-06-01 | 2007-06-01 | Optical phased array light beam scanner based on lanthanum-doped lead zirconate titanate |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106526900A (en) * | 2016-10-28 | 2017-03-22 | 天津医科大学 | Phased array solid-state optical scanner |
| CN108363051A (en) * | 2018-01-26 | 2018-08-03 | 北京航空航天大学 | A kind of self-adapting calibration system for the scanning of optical phased array light beam |
| CN109839625A (en) * | 2019-01-21 | 2019-06-04 | 浙江大学 | A kind of electric light phased-array laser radar based on LiNbO_3 film |
| CN109901263A (en) * | 2019-01-29 | 2019-06-18 | 浙江大学 | A kind of silicon substrate integrated optics phased array chip based on common electrode |
| CN110609398A (en) * | 2018-06-15 | 2019-12-24 | 北京万集科技股份有限公司 | Phase modulator module and phased array laser radar |
-
2007
- 2007-06-01 CN CN200710041584.7A patent/CN101080122A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106526900A (en) * | 2016-10-28 | 2017-03-22 | 天津医科大学 | Phased array solid-state optical scanner |
| CN108363051A (en) * | 2018-01-26 | 2018-08-03 | 北京航空航天大学 | A kind of self-adapting calibration system for the scanning of optical phased array light beam |
| CN108363051B (en) * | 2018-01-26 | 2021-09-21 | 北京航空航天大学 | Self-adaptive calibration system for optical phased array light beam scanning |
| CN110609398A (en) * | 2018-06-15 | 2019-12-24 | 北京万集科技股份有限公司 | Phase modulator module and phased array laser radar |
| CN109839625A (en) * | 2019-01-21 | 2019-06-04 | 浙江大学 | A kind of electric light phased-array laser radar based on LiNbO_3 film |
| CN109901263A (en) * | 2019-01-29 | 2019-06-18 | 浙江大学 | A kind of silicon substrate integrated optics phased array chip based on common electrode |
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