CN114609803A - Dynamic super-structure surface based on liquid crystal material - Google Patents
Dynamic super-structure surface based on liquid crystal material Download PDFInfo
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- CN114609803A CN114609803A CN202011398389.1A CN202011398389A CN114609803A CN 114609803 A CN114609803 A CN 114609803A CN 202011398389 A CN202011398389 A CN 202011398389A CN 114609803 A CN114609803 A CN 114609803A
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/0009—Materials therefor
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/0102—Constructional details, not otherwise provided for in this subclass
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1343—Electrodes
- G02F1/134309—Electrodes characterised by their geometrical arrangement
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1343—Electrodes
- G02F1/13439—Electrodes characterised by their electrical, optical, physical properties; materials therefor; method of making
Abstract
The invention provides a dynamic super-structure surface based on a liquid crystal material, which comprises a substrate, a reflector, a super-structure surface structure layer, a transmission electrode layer and a transmission substrate, wherein the super-structure surface structure layer is formed by a super-structure surface electrode and a liquid crystal unit; visible light or infrared light beams are emitted from the transmission substrate, modulated by the super-structure surface structure layer and reflected by the reflector, and then emitted along a set direction; the reflector is used as a super-structure surface electrode and a common electrode of the liquid crystal unit; the super-structure surface electrode is a grating array made of metal materials, and the liquid crystal unit is filled between every two adjacent gratings of the super-structure surface electrode; each transmission electrode of the transmission electrode layer independently applies voltage to the liquid crystal unit between two corresponding adjacent gratings, so that liquid crystal molecules in the liquid crystal units at different positions have different orientations, and different phase modulation is applied to incident light. The invention can perform phase modulation of more than 200 degrees on the light beams with set wavelength and polarization direction in visible or infrared light wave bands.
Description
Technical Field
The invention can be applied to the fields of display, communication, laser radar and the like, and particularly relates to a dynamic super-structure surface based on a liquid crystal material.
Background
In recent years, the introduction of a metassurface (metassurface) has attracted much attention. Through the structural design of sub-wavelength scale on the surface, the super-structure surface can flexibly regulate and control the characteristics of the electromagnetic wave such as amplitude, phase and polarization, and the like, thereby realizing the functions of wave front shaping, beam scanning, polarization regulation and control and the like. However, the currently proposed superstructure surface is mostly static and can only fulfill a single, specific function. The existing dynamic super-structure surface comprises schemes based on a mechanical structure, a modulated carrier concentration, a phase-change material and the like, but the effect is not ideal, and the problems of poor reliability, low efficiency, complex structure or low modulation speed and the like exist.
The liquid crystal is a material with optical birefringence effect, and the liquid crystal molecules can be controlled to turn by applying an external electric field to the liquid crystal, so that the phase of electromagnetic waves can be continuously modulated in real time. At present, liquid crystal materials have wide and mature application in the fields of display, light field regulation and control and the like. However, the conventional liquid crystal modulation device has some disadvantages. On the one hand, the refractive index difference of liquid crystal materials is limited, and to achieve a phase modulation range of 0 to 2 π, the thickness of the liquid crystal layer generally needs to be several wavelengths long. The modulation speed of the liquid crystal is proportional to the square of the thickness of the liquid crystal layer, so the modulation speed of the liquid crystal modulation device is limited to obtain an ideal phase modulation range. On the other hand, in the conventional liquid crystal modulation device, each liquid crystal modulation unit has a large size, generally several wavelength orders, which brings many limitations in practical applications, for example, the spatial bandwidth product is limited in the field of holographic display, and the scanning angle range is limited in the field of beam scanning.
The super-structure surface is combined with a liquid crystal material, and the resonance effect of incident light in a liquid crystal unit is designed, so that the phase of the incident light is expected to be greatly modulated in a structure with a sub-wavelength scale, the response speed of the liquid crystal is increased, and the performance of a liquid crystal device in the application fields of holographic display, beam scanning and the like is improved.
Disclosure of Invention
Aiming at the problems that the existing dynamic super-structure surface scheme is immature and the unit size of the traditional liquid crystal modulation device is large, the invention provides a dynamic super-structure surface based on a liquid crystal material. The invention can realize the flexible regulation and control of the phase and the wave front of the light beam under a considerable modulation rate by externally adding voltage.
In order to achieve the purpose, the invention adopts the following technical scheme:
the invention provides a dynamic super-structure surface based on a liquid crystal material, which is characterized by comprising a substrate, a reflector, a super-structure surface structure layer, a transmission electrode layer and a transmission substrate, wherein the substrate, the reflector, the super-structure surface structure layer, the transmission electrode layer and the transmission substrate are sequentially stacked from bottom to top; visible light or infrared light beams are incident to the dynamic super-structure surface from the transmission substrate, modulated by the super-structure surface structure layer and reflected by the reflector and then emitted along a set direction; the substrate and the transmission are substantially for providing physical support and electrical isolation, respectively; the reflector is used as a common electrode of the super-structure surface electrode and the liquid crystal unit; the super-structure surface electrode is a grating array made of metal materials, the liquid crystal unit is filled between every two adjacent gratings of the super-structure surface electrode, and the upper surface of the liquid crystal unit completely covers the upper surface of the super-structure surface electrode; the transmission electrode layer is a transmission electrode array which is consistent with the arrangement mode of the liquid crystal units and is oppositely arranged, and the transmission electrodes independently apply the same or different voltages to the liquid crystal units between two corresponding adjacent gratings respectively so that liquid crystal molecules in the liquid crystal units at different positions have different orientations, thereby applying different phase modulation to incident light.
Furthermore, the super-structure surface electrode is a wire grid-shaped array which is distributed along the x direction and extends along the y direction, incident light is s-polarized light along the y direction, and the z direction is along the thickness direction of the dynamic super-structure surface; the cross-section of each wire grid in the xz plane is rectangular or trapezoidal.
Further, the super-structure surface electrode is a grating array or a grating array distributed along an xy plane, the z direction is along the thickness direction of the dynamic super-structure surface, the polarization state of incident light is parallel to the initial orientation of liquid crystal molecules, and the cross section of each grating or grating in the xy plane can be circular or any polygon.
The invention has the characteristics and beneficial effects that:
the device designs a super-structure surface structure with strong response to the optical phase based on the optical characteristics of liquid crystal. Through reasonable design, under the action of an external voltage, the refractive index of the liquid crystal changes, the structure can perform phase modulation of more than 200 degrees on light beams with set wavelength and polarization direction in a visible or infrared light wave band, and multiple functions of light beam deflection, focusing, shaping and the like can be realized. Meanwhile, the thickness of the liquid crystal layer on the super-structure surface and the size of the liquid crystal unit are usually designed in the order of hundreds of nanometers, and compared with the traditional liquid crystal modulation device, the liquid crystal modulation device is reduced by several times, so that higher modulation rate and larger spatial resolution can be realized.
Drawings
Fig. 1 is a cross-sectional view of a one-dimensional dynamic nanostructured surface based on liquid crystal material according to the invention.
Fig. 2 is a top view of the one-dimensional dynamic nanostructured surface shown in fig. 1.
Fig. 3 is a cross-sectional view of a two-dimensional dynamic nanostructured surface based on liquid crystal material according to the invention.
FIG. 4 is a top view of the two-dimensional dynamic nanostructured surface shown in FIG. 3.
Fig. 5 is a schematic structural diagram of a phase modulator in an embodiment of the present invention.
FIG. 6 is a schematic diagram of the alignment of liquid crystal molecules in the phase modulator when no external voltage is applied in the first embodiment of the present invention.
FIG. 7 is a schematic diagram of the alignment of liquid crystal molecules in the phase modulator when an external voltage is applied according to the first embodiment of the present invention.
FIG. 8 is a graph showing the reflectivity and the reflection phase of a normal incident light beam after being reflected by a phase modulator according to the deflection angle of liquid crystal molecules in the first embodiment of the present invention.
Fig. 9 is a schematic diagram of the structure and principle of a beam deflection device in the second embodiment of the present invention.
FIG. 10 is a diagram showing the distribution of the reflectivity and phase of the liquid crystal cell in complex space according to the second embodiment of the present invention.
Fig. 11 is a diagram showing simulation results of the beam deflecting device in the second embodiment of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the detailed description and specific examples, while indicating the scope of the invention, are intended for purposes of illustration only and are not intended to limit the scope of the invention.
For a better understanding of the present invention, an example of the application of a dynamic nanostructured surface based on liquid crystal material proposed by the present invention is described in detail below.
Fig. 1 and 2 show structural diagrams of a dynamic one-dimensional nanostructured surface based on a liquid crystal material according to the present invention, and fig. 3 and 4 show structural diagrams of a dynamic two-dimensional nanostructured surface based on a liquid crystal material according to the present invention, each including a substrate (101, 201), a mirror (102, 202), a nanostructured surface structure layer composed of a nanostructured surface electrode (103, 203) and a liquid crystal cell (104, 204), a transmissive electrode layer (105, 205), and a transmissive substrate (106, 206) stacked in sequence from bottom to top. Visible light or infrared light beams (107, 207) are incident to the dynamic metamaterial surface from the transmission substrate (106, 206), are modulated by the metamaterial surface structure layer and are reflected by the reflecting mirror (102, 202) and then are emitted along a set direction. The substrate (101, 201) can be made of silicon material compatible with CMOS process, the transmission substrate (106, 206) covering the transmission electrode layer (105, 205) can be made of common transparent dielectric material such as fused glass, quartz and the like, and the substrate (101, 201) and the transmission substrate (106, 206) provide physical support and electrical isolation for other structural layers. The reflector (102, 202) may be made of a material having a high reflectivity to incident light (which represents a normal incidence reflectivity of greater than 80%), good conductivity (resistivity of 10%-6Ω · m or less), such as gold, silver, copper, etc., and the mirror (102, 202) also serves as a common electrode for the super-structured surface electrode (103, 203) and the liquid crystal cell (104, 204). For a one-dimensional ultrastructural surface, the ultrastructural surface electrode 103 is a wire grid-shaped array which is a one-dimensional array and is distributed along the x direction and extends along the y direction, the section of each wire grid in an xz plane is rectangular or trapezoidal, and incident light is s-polarized light along the y direction; for a two-dimensional nanostructure surface, the polarization state of incident light is parallel to the initial orientation of liquid crystal molecules, the nanostructure surface electrode 203 is an optical antenna or grating arranged along the xy plane, i.e. a two-dimensional array, and the cross-sectional shape of the optical antenna or grating in the xy plane can be circular or any polygon (here, the cross-sectional shape of the optical antenna or grating in the xy plane can be circular or any polygon)A rectangle is adopted); both the array period and the height of the super-structured surface electrodes (103, 203) are in the sub-wavelength scale, typically in the range of 1/10 to one wavelength of the incident light wavelength; the wire grid width and spacing of the nanostructured surface electrodes 103 can be flexibly selected according to the wavelength of incident light, typically 1/20 to one wavelength of the operating wavelength; the super-structure surface electrodes (103, 203) are selected to have good conductivity (resistivity is 10)-6Ω · m or less) such as gold, silver, copper, or the like. The liquid crystal cell (104, 204) is filled between adjacent electrodes in the super-structure surface electrode (103, 203) and completely covers the upper surface of the super-structure surface electrode (103, 203), the height of the upper surface of the liquid crystal cell (104, 204) exceeding the upper surface of the super-structure surface electrode (103, 203) is 1/10-one wavelength of the working wavelength, and the contact between the super-structure surface electrode (103, 203) and the transmission electrode layer (105, 205) is avoided; the liquid crystal units (104, 204) can flexibly select various liquid crystal materials which are transparent to incident light and have birefringence effect, such as 5CB, E7, liquid crystal doped with organic macromolecules and the like. The transmission electrode layers (105, 205) are transmission electrode arrays which are consistent with the arrangement mode of the liquid crystal units (104, 204) and are oppositely arranged, and each transmission electrode independently applies the same or different voltage (usually 0-10V) to the liquid crystal unit between two corresponding adjacent wire grids so that liquid crystal molecules in the liquid crystal units (104, 204) at different positions have different orientations, thereby applying different phase modulation to incident light; the thickness of the transmitting electrode layer (105, 205) is typically tens to hundreds of nanometers, and indium tin oxide conductive glass, amorphous silicon and other materials can be used.
To further illustrate the working principle of the device, two specific implementation examples are provided. The first embodiment is a one-dimensional super-structure surface phase modulator, and the second embodiment is a one-dimensional super-structure surface beam deflection device.
In one embodiment, the operating wavelength of the one-dimensional ultrastructural surface phase modulator is 1550 nm. As shown in fig. 5, the substrate 101 is made of silicon, and the transmissive substrate 106 is made of silicon dioxide and has a thickness of 500 μm. The reflector 102 and the super-structure surface electrode 103 are made of gold, and the thickness of the reflector 102 is 500 nanometers; e7 liquid crystal is selected as the material of the liquid crystal unit 104, and the refractive index change at 1550 nm waveband is 1.5 to 1.685; the transparent electrode layer 105 is made of ito conductive glass with a thickness of 50 nm, and applies a uniform voltage to each liquid crystal cell, and considering that the voltages applied to the liquid crystal cells are the same in this embodiment, the transparent electrode layer 150 is flat for simplicity of processing. By utilizing a finite difference time domain or strict coupled wave analysis method, the modulation amplitude of the phase and transmittance of incident light of the super-structure surface with different structure sizes (including parameters such as the height of the super-structure surface electrode, the width of the wire grid, the arrangement distance and the like) under different liquid crystal rotation angles is calculated, the height of the super-structure surface electrode 103 is determined to be 850 nanometers, the arrangement period of the super-structure surface electrode 103 is 750 nanometers, the width of the wire grid of the super-structure surface electrode 103 is 240 nanometers, and the thickness of the upper surface of the liquid crystal unit 104 exceeding the upper surface of the super-structure surface electrode 103 is 200 nanometers. As shown in fig. 6, when no applied voltage is applied, the liquid crystal molecules are aligned along the direction of extension of the super-structured surface electrode (y-direction) due to the influence of the super-structured surface electrode structure, and the refractive index of the liquid crystal cell for incident light polarized in the y-direction is 1.685. As shown in fig. 7, when a voltage in the z direction is applied to the liquid crystal cell, the liquid crystal molecular orientation will gradually shift to the z direction as the voltage is gradually increased. At this time, the refractive index of the liquid crystal cell for incident light polarized in the y-direction will gradually decrease to 1.5. In the process that the voltage is gradually increased from zero, the included angle between the liquid crystal molecules and the y axis in the yz plane is increased from 0 degrees to 90 degrees, the phase change of reflected light can reach 206 degrees, and the reflectivity is kept above 50 percent, as shown in fig. 8.
With the result of the first embodiment, the one-dimensional super-structured surface beam deflecting device in the second embodiment can be realized, and the basic structure is as shown in fig. 9. The transmitting electrode layer (905) adopts a thin film transistor electrode array, and the material and the design size of the rest part are the same as those of the first embodiment. Under the condition that the light beam with 1550 nm wavelength polarized in the y direction is normally incident, different voltages are independently applied to each liquid crystal unit through the thin film transistor electrode array, so that the light beam reflected by the device has the same phase difference in each liquid crystal unit
(where N is the number of liquid crystal cells contained in one phase period of 2 π, including but not limited to positive integers), so that the reflected light with a wavelength of λ has the same optical path difference at the liquid crystal cells
The geometrical relationship Δ p between the period d of the super-structured surface electrode and the optical path difference Δ p is d · sin θ, which indicates that the light beam reflected by the device is deflected by an angle θ, as shown in fig. 9. Therefore, by controlling the phase difference applied to the light beam by each liquid crystal cell through the applied voltage, the device of the present example can realize deflection and scanning in a specific direction for the light beam which is incident normally. In this example, the period of the super-structured surface electrode is 750 nm, the wavelength is 1550 nm, and the designed phase difference is pi/3 and 2 pi/3, respectively, so that the beam deflection at angles of 20.1 ° and 43.5 ° can be realized with one phase period of 6 liquid crystal cells and 3 liquid crystal cells, respectively. As a result of the electric field simulation, as shown in fig. 10, the beam deflection efficiencies are shown in fig. 11(a) and (b), respectively, and the efficiencies of the angularly deflected light are set to 46.1% and 42.8%, respectively.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (10)
1. A dynamic super-structure surface based on a liquid crystal material is characterized by comprising a substrate, a reflector, a super-structure surface structure layer, a transmission electrode layer and a transmission substrate, wherein the substrate, the reflector, the super-structure surface structure layer, the transmission electrode layer and the transmission substrate are sequentially stacked from bottom to top; visible light or infrared light beams are emitted to the dynamic super-structure surface from the transmission substrate, modulated by the super-structure surface structure layer and reflected by the reflector, and then emitted along a set direction; the substrate and the transmission are substantially for providing physical support and electrical isolation, respectively; the reflector is used as a common electrode of the super-structure surface electrode and the liquid crystal unit; the super-structure surface electrode is a grating array made of metal materials, the liquid crystal unit is filled between every two adjacent gratings of the super-structure surface electrode, and the upper surface of the liquid crystal unit completely covers the upper surface of the super-structure surface electrode; the transmission electrode layer is a transmission electrode array which is consistent with the arrangement mode of the liquid crystal units and is oppositely arranged, and the transmission electrodes independently apply the same or different voltages to the liquid crystal units between two corresponding adjacent gratings respectively so that liquid crystal molecules in the liquid crystal units at different positions have different orientations, thereby applying different phase modulation to incident light.
2. The dynamic nanostructured surface of claim 1, wherein the nanostructured surface electrodes are wire grid shaped arrays arranged along the x-direction and extending along the y-direction, the incident light is s-polarized light along the y-direction, and the z-direction is along the thickness direction of the dynamic nanostructured surface; the cross-section of each wire grid in the xz plane is rectangular or trapezoidal.
3. The dynamic surface of claim 1, wherein the electrodes are a grating array or a grating array arranged along the xy plane, the z direction is along the thickness direction of the dynamic surface, the polarization state of the incident light is parallel to the initial orientation of the liquid crystal molecules, and the cross-sectional shape of each grating or grating in the xy plane can be circular or any polygon.
4. A dynamic nanostructured surface according to claim 1, wherein the substrate is made of a silicon material compatible with CMOS processes.
5. A dynamic nanostructured surface according to claim 1, wherein the transmissive substrate is made of a transparent dielectric material.
6. A dynamic nanostructured surface according to claim 1, wherein said mirror is selected to have a resistivity of 10-6Omega.m or less.
7. A dynamic nanostructured surface according to claim 1, wherein the liquid crystal cells are made of a liquid crystal material that is transparent to the incident light and has a birefringent effect.
8. A dynamic nanostructured surface according to claim 1, characterized in that the thickness of the transmissive electrode layer is several tens to several hundreds of nanometers and is made of indium tin oxide conductive glass or amorphous silicon material.
9. The dynamic nanostructured surface of claim 1 wherein the array period and height of the nanostructured surface electrodes are both 1/10 to one wavelength long range of the wavelength of the incident light; the grating width and the spacing of the super-structured surface electrodes are 1/20 to one wavelength of the working wavelength; the height of the upper surface of the liquid crystal unit, which exceeds the upper surface of the electrode with the super-structure surface, is 1/10-one wavelength of the working wavelength.
10. The method according to any one of claims 1 to 9, wherein the sizes of the electrodes on the super-structured surface are determined by calculating the modulation amplitudes of the super-structured surfaces with different structure sizes on the phase and transmittance of incident light under different liquid crystal rotation angles through a finite difference time domain or strict coupled wave analysis method.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN114967219A (en) * | 2022-06-30 | 2022-08-30 | 火鸟科技有限公司 | Light beam steering gear based on super surface structure |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN114967219A (en) * | 2022-06-30 | 2022-08-30 | 火鸟科技有限公司 | Light beam steering gear based on super surface structure |
| CN114967219B (en) * | 2022-06-30 | 2023-12-26 | 火鸟科技有限公司 | Beam steering device based on super-surface structure |
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