CN114967219A - Light beam steering gear based on super surface structure - Google Patents
Light beam steering gear based on super surface structure Download PDFInfo
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/008—Surface plasmon devices
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/133553—Reflecting elements
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Abstract
The application provides a beam redirector based on a super surface structure, comprising: the substrate, the reflection stratum, the wire articulamentum, the printing opacity insulating layer, super surface micro-nano structure layer, the liquid crystal layer, first liquid crystal alignment layer, the second liquid crystal alignment layer, protective layer and printing opacity top layer, wire in the wire articulamentum passes through the via hole and is connected with the sub-wavelength micro-nano structure unit in super surface micro-nano structure layer, apply voltage to sub-wavelength micro-nano structure unit, make super surface micro-nano structure layer and liquid crystal layer between have the potential difference, make the liquid crystal layer have different liquid crystal molecule angle of turning to carry out preliminary modulation to the phase place of light, the light beam after preliminary modulation and super surface micro-nano structure plasmon resonance, light produces great phase change, the reflection stratum reflects the light beam and jets out, thereby realize that the light beam turns to. The light beam steering device can also realize deflection at a larger angle without designing thicker liquid crystal, so that the light beam steering device has a larger light conversion angle and smaller response time.
Description
Technical Field
The application relates to the technical field of light steering, in particular to a light beam steering device based on a super-surface structure.
Background
The existing liquid crystal beam redirector generally modulates the angle of light through the optical path difference of light in liquid crystal, but if such liquid crystal beam redirector wants to have a larger light conversion angle, the liquid crystal must be designed to be very thick, so that the light has a larger optical path difference to form a more phase change range, and further has a larger light conversion angle, but the thickness of the liquid crystal is increased, and the response time of the liquid crystal is also increased, namely the existing liquid crystal beam redirector has the problem that the light conversion angle and the response time cannot be balanced.
Disclosure of Invention
An object of the embodiments of the present application is to provide a beam steering gear based on a super-surface structure, so as to solve the problem that the light-turning angle and the response time cannot be balanced in the existing liquid crystal beam steering gear.
In a first aspect, the present invention provides a beam redirector, comprising: the liquid crystal display panel comprises a substrate, a metal reflecting layer, a wire connecting layer, a light-transmitting insulating layer, a super-surface micro-nano structure layer and a liquid crystal layer; the super-surface micro-nano structure layer comprises a plurality of sub-wavelength micro-nano structure units, the lead connecting layer comprises a plurality of leads, and each lead is electrically connected with at least one sub-wavelength micro-nano structure unit in the super-surface micro-nano structure layer through a light-transmitting insulating layer so as to apply corresponding voltage to the connected sub-wavelength micro-nano structure units; the liquid crystal layer is used for carrying out phase primary adjustment on the received light beam when the sub-wavelength micro-nano structure unit is applied with voltage, and transmitting the light beam after the phase primary adjustment to the super-surface micro-nano structure layer; the super-surface micro-nano structure layer is used for generating plasmon resonance with the light beam after the initial phase adjustment so as to amplify the phase change of the light beam after the initial phase adjustment to obtain a modulated light beam, and transmitting the modulated light beam to the light-transmitting insulating layer; the light-transmitting insulating layer is used for transmitting the modulated light beam to the metal reflecting layer and insulating and isolating the metal reflecting layer and the sub-wavelength micro-nano structure unit; and the metal reflecting layer is used for reflecting the modulated light beam so that the modulated light beam is emitted from the light beam steering device.
According to the designed light beam steering device based on the super-surface structure, firstly, voltage is applied to the sub-wavelength micro-nano structure unit in the super-surface micro-nano structure layer through the wire connecting layer, so that potential difference exists between the super-surface micro-nano structure layer and the liquid crystal layer, liquid crystals of the liquid crystal layer have different liquid crystal molecule steering angles, phase primary adjustment is conducted on light, then plasmon resonance is generated between the light beam after phase primary adjustment and the super-surface micro-nano structure, phase change of the light beam after phase primary adjustment is amplified, a modulated light beam is obtained, finally, the modulated light beam is reflected and emitted by the metal reflecting layer, and light beam steering is achieved. Therefore, the light beam steering device designed by the scheme can further amplify the phase change of the light beam with the initially adjusted phase on the basis that the liquid crystal performs the initial adjustment on the phase of the light beam, so that the scheme does not need to design a thick liquid crystal and can also realize the large change of the phase of the light beam, and the designed light beam steering device has large phase change and small response time.
In an optional implementation manner of this embodiment, the metal reflective layer is disposed on the substrate, the light-transmitting insulating layer is disposed on the metal reflective layer, the wire connection layer is embedded in the light-transmitting insulating layer, the super-surface micro-nano structure layer is disposed on the light-transmitting insulating layer, and the liquid crystal layer is disposed on the super-surface micro-nano structure layer.
In an optional implementation manner of this embodiment, each wire in the wire connection layer penetrates through the light-transmitting insulating layer in a via hole manner to be connected with a corresponding sub-wavelength micro-nano structure unit in the super-surface micro-nano structure layer.
In an optional implementation manner of this embodiment, a plurality of wires of the wire connection layer are embedded in the light-transmitting insulating layer at intervals, a through hole is formed in the light-transmitting insulating layer between each wire and the corresponding connected sub-wavelength micro-nano structure unit, and the wire is connected with the corresponding connected sub-wavelength micro-nano structure unit through the corresponding through hole.
In an optional implementation manner of this embodiment, the beam redirector further includes a first liquid crystal alignment layer and a protection layer, where the protection layer is disposed on the super-surface micro-nano structure layer, the first liquid crystal alignment layer is disposed on the protection layer, and the liquid crystal layer is disposed on the first liquid crystal alignment layer.
According to the embodiment, the first liquid crystal orientation layer is designed between the liquid crystal layer and the metal grating array and used for anchoring the direction of the liquid crystal, and the protection layer is designed, so that the super-surface micro-nano structure layer is protected.
In an optional implementation manner of this embodiment, the bottom of each sub-wavelength micro-nano structure unit is connected to the light-transmitting insulating layer, the peripheral surfaces of each sub-wavelength micro-nano structure unit except the bottom are abutted to the protective layer, and the upper surface of the protective layer is connected to the first liquid crystal alignment layer.
In an optional implementation manner of this embodiment, the light beam redirector further includes a second liquid crystal alignment layer and an ito layer, the second liquid crystal alignment layer is disposed on the liquid crystal layer, the ito layer is disposed on the second liquid crystal alignment layer, a width of the ito layer is greater than a width of the second liquid crystal alignment layer, the wire connection layer includes a ground wire, two ends of the ito layer are electrically connected to the ground wire through a conductive encapsulant, and the conductive encapsulant connected to each end of the ito layer is spaced from a corresponding end of the second liquid crystal alignment layer by a predetermined distance.
In an optional implementation manner of this embodiment, the beam redirector further comprises a light-transmissive top layer disposed on the ito layer for transmitting an external light beam to the ito layer.
In the above embodiment, the transparent top layer is designed on the ito layer, so that the lower layer structure is protected and encapsulated while transmitting the light beam.
In an optional implementation manner of this embodiment, the sub-wavelength micro-nano structure units connected by different wires are different, and voltages applied to the connected sub-wavelength micro-nano structure units by different wires are different.
In an optional implementation manner of this embodiment, the super-surface micro-nano structure layer includes a metal grating array, and the sub-wavelength micro-nano structure unit is a metal grating in the metal grating array.
In an optional implementation manner of this embodiment, the metal gratings in the metal grating array are distributed in a one-dimensional array or a two-dimensional array.
In an alternative embodiment of this embodiment, the liquid crystals in the liquid crystal layer are arranged in a twisted manner and/or in a parallel manner.
The foregoing description is only an overview of the technical solutions of the present application, and the present application can be implemented according to the content of the description in order to make the technical means of the present application more clearly understood, and the following detailed description of the present application is given in order to make the above and other objects, features, and advantages of the present application more clearly understandable.
Drawings
Various additional advantages and benefits will become apparent to those of ordinary skill in the art upon reading the following detailed description of the preferred embodiments. The drawings are only for purposes of illustrating the preferred embodiments and are not to be construed as limiting the application. Moreover, like reference numerals are used to refer to like elements throughout. In the drawings:
fig. 1 is a schematic diagram of phase change provided in an embodiment of the present application;
FIG. 2 is a schematic diagram of a first structure of a beam redirector according to an embodiment of the present disclosure;
fig. 3 is a schematic view of two arrangement modes of a metal grating array according to an embodiment of the present disclosure;
FIG. 4 is a second structural diagram of a beam redirector according to an embodiment of the present disclosure;
FIG. 5 is a schematic diagram of a third structure of a beam redirector according to an embodiment of the present application;
FIG. 6 is a cross-sectional schematic view of a beam redirector provided in an embodiment of the present application;
FIG. 7 is a schematic diagram of a cross-sectional view of a beam redirector in accordance with an embodiment of the present application;
fig. 8 is a fourth structural diagram of a beam redirector according to an embodiment of the present application.
Icon: 10-a substrate; 20-a metal reflective layer; 30-a wire connection layer; 40-a light-transmissive insulating layer; 50-a super-surface micro-nano structure layer; 510-sub-wavelength micro-nano structure units; 60-a liquid crystal layer; 70-a first liquid crystal alignment layer; 80-a protective layer; 90-a second liquid crystal alignment layer; a 100-indium tin oxide layer; 110-a light transmissive top layer; m1-conductive packaging glue; b1, B2, B3, B4-through holes.
Detailed Description
Embodiments of the present invention will be described in detail below with reference to the accompanying drawings. The following examples are merely used to more clearly illustrate the technical solutions of the present application, and therefore are only examples, and the protection scope of the present application is not limited thereby.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs; the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the application; the terms "including" and "having," and any variations thereof, in the description and claims of this application and the description of the above figures are intended to cover non-exclusive inclusions.
In the description of the embodiments of the present application, the technical terms "first", "second", and the like are used only for distinguishing different objects, and are not to be construed as indicating or implying relative importance or implicitly indicating the number, specific order, or primary-secondary relationship of the technical features indicated. In the description of the embodiments of the present application, "a plurality" means two or more unless specifically defined otherwise.
Reference herein to "an embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment can be included in at least one embodiment of the application. The appearances of the phrase in various places in the specification are not necessarily all referring to the same embodiment, nor are separate or alternative embodiments mutually exclusive of other embodiments. It is explicitly and implicitly understood by one skilled in the art that the embodiments described herein can be combined with other embodiments.
In the description of the embodiments of the present application, the term "and/or" is only one kind of association relationship describing an associated object, and means that three relationships may exist, for example, a and/or B, and may mean: a exists alone, A and B exist simultaneously, and B exists alone. In addition, the character "/" herein generally indicates that the former and latter related objects are in an "or" relationship.
In the description of the embodiments of the present application, the term "plurality" refers to two or more (including two), and similarly, "plural sets" refers to two or more (including two), and "plural pieces" refers to two or more (including two).
In the description of the embodiments of the present application, the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", and the like, indicate the directions or positional relationships indicated in the drawings, and are only for convenience of description of the embodiments of the present application and for simplicity of description, but do not indicate or imply that the referred device or element must have a specific direction, be constructed and operated in a specific direction, and thus, should not be construed as limiting the embodiments of the present application.
In the description of the embodiments of the present application, unless otherwise explicitly stated or limited, the terms "mounted," "connected," "fixed," and the like are used in a broad sense, and for example, may be fixedly connected, detachably connected, or integrated; mechanical connection or electrical connection is also possible; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meanings of the above terms in the embodiments of the present application can be understood by those of ordinary skill in the art according to specific situations.
Currently, the liquid crystal beam redirector implements the modulation of the light deflection angle by the optical path difference of the light in the liquid crystal.
The inventor researches and discovers that the modulation of light by light steering devices such as the liquid crystal beam steering device on the market is completely limited by the liquid crystal, including the thickness of the liquid crystal, the material selection of the liquid crystal and the like, and the devices have the defect that if a large light steering angle is required, the liquid crystal needs to be made thick, so that a large optical path difference forms a larger phase change range, and a larger light steering angle is provided. However, if the response time is desired to be shortened, the liquid crystal needs to be made relatively thin, but this limits the optical path difference of the liquid crystal, so that the phase change range is small, and the corresponding light conversion angle is not very large. That is, the current liquid crystal beam redirector is limited by the mutual restriction of the light conversion angle and the response time, so that the liquid crystal beam redirector cannot have a large light conversion angle and a small response time at the same time.
In view of the above problems, the present inventors have conducted extensive studies and designed a beam redirector, which is based on the super-surface phased array technology, and through the resonant response of light and a super-surface structure, the phase plane of light is greatly changed, and the deflection angles of liquid crystals are different, so as to generate different phases. For example, as shown in fig. 1, on the basis of the liquid crystal with the thickness of 2um, when a voltage is applied from 2V to 7V, liquid crystal molecules have different deflection angles, so that resonance response of light and the super-surface micro-nano structure layer is changed, and phase change is generated, and as can be seen from fig. 1, the phase change of light is from-pi to pi, and has the phase change of 2 pi. Therefore, on the basis of a large light conversion angle, the liquid crystal does not need to be designed to be thick, so that the response time is improved, and the problem that the traditional light beam steering gear is limited by the mutual restriction of the light conversion angle and the response time is solved.
The application provides a beam redirector, as shown in fig. 2, the beam redirector may include a substrate 10, a metal reflective layer 20, a wire connection layer 30, a transparent insulating layer 40, a super-surface micro-nano structure layer 50, and a liquid crystal layer 60. The super-surface micro-nano structure layer 50 comprises a plurality of sub-wavelength micro-nano structure units 510, wherein the super-surface micro-nano structure layer 50 can specifically adopt a metal grating array, and the sub-wavelength micro-nano structure units 510 can specifically be metal gratings in the metal grating array; besides the metal grating array is used as the super-surface micro-nano structure layer, the scheme can also adopt other super-surface structure forms which can generate plasma laser resonance with light beams, for example, the super-surface structure forms of other shapes such as a cylinder shape, a sawtooth shape and the like, and the super-surface structure forms are not limited to the grating array.
When the metal grating array is adopted, the metal grating in the metal grating array can be made of metal aluminum, and other metal materials can be adopted; or it may be a non-metallic material or a semiconductor material, and the specific material used may be determined according to the wavelength of the light beam to be steered and the required function of the device. In addition, the interval spacing between a plurality of metal gratings that are array interval distribution in the metal grating array of this scheme design can be the same, and the interval spacing between a plurality of metal gratings that are array interval distribution can also be different certainly, specifically can carry out the adaptability setting according to different actual scenes. In addition, as shown in fig. 3, a plurality of metal gratings in the metal grating array adopted in the scheme may be arranged in a one-dimensional array as shown in the left diagram of fig. 3 or in a two-dimensional array as shown in the right diagram of fig. 3, and may be specifically configured adaptively according to different actual scenes.
In the beam redirector with the above design, the wire connection layer 30 includes a plurality of wires, and each wire is electrically connected with at least one sub-wavelength micro-nano structure unit 510 in the super-surface micro-nano structure layer 50 through the light-transmitting insulation layer 40.
In the beam redirector with the above design, the wire connecting layer 30 can apply a voltage to the sub-wavelength micro-nano structure unit 510 in the super-surface micro-nano structure layer 50, so that a potential difference is generated between the super-surface micro-nano structure layer 50 and the liquid crystal layer 60, the potential difference can make the liquid crystal of the liquid crystal layer 60 have different liquid crystal molecule turning angles, so that the liquid crystal layer 60 performs phase primary adjustment on the entering light beam, the light beam after phase primary adjustment is continuously transmitted into the super-surface micro-nano structure layer 50, the super-surface micro-nano structure layer 50 and the light beam after phase primary adjustment generate plasmon resonance, so that the phase change of the light beam after phase primary adjustment is further amplified, the modulated light beam is generated and transmitted to the light-transmitting insulating layer 40, the light-transmitting layer 40 transmits the modulated light beam to the metal reflecting layer 20, the metal reflecting layer 20 reflects the modulated light beam, so that the modulated light beam is emitted from the beam redirector, the steering of the light beam is realized.
In the implementation process, the light-transmitting insulating layer 40 not only realizes a light beam transmission function, but also insulates and isolates the metal reflection layer 20 from the super-surface micro-nano structure layer 50, so that the super-surface micro-nano structure layer 50 is prevented from being conducted with the metal reflection layer 20, and therefore the situation that the sub-wavelength micro-nano structure units 510 are applied with the same voltage when different wires are applied with different voltages is caused.
The light beam steering device is characterized in that voltage is applied to a sub-wavelength micro-nano structure unit in the super-surface micro-nano structure layer through the wire connecting layer, so that potential difference exists between the super-surface micro-nano structure layer and the liquid crystal layer, liquid crystals of the liquid crystal layer have different liquid crystal molecule steering angles, phase primary adjustment is conducted on light, then plasmon resonance is generated between the light beam after the phase primary adjustment and the super-surface micro-nano structure, phase change of the light beam after the phase primary adjustment is amplified, a modulated light beam is obtained, and finally the modulated light beam is reflected and emitted by the metal reflecting layer, and light beam steering is achieved. Therefore, the light beam steering device designed by the scheme can further amplify the phase of the light beam with the initially adjusted phase on the basis that the liquid crystal performs the initial adjustment on the phase of the light beam, so that the scheme does not need to design a thick liquid crystal and can also realize the large change of the phase of the light beam, and the designed light beam steering device has large phase change and small response time.
In an optional implementation manner of this embodiment, the beam redirector with the above design can be implemented by a structure, as shown in fig. 4 and fig. 5, where the metal reflective layer 20 is disposed on the substrate 10, the light-transmitting insulating layer 40 is disposed on the metal reflective layer 20, the wire connection layer 30 is embedded in the light-transmitting insulating layer 40, the super-surface micro-nano structure layer 50 is disposed on the light-transmitting insulating layer 40, and the liquid crystal layer 60 is disposed on the super-surface micro-nano structure layer 50. As a possible embodiment, the length of the substrate 10 may range from 5mm to 8mm, and the width of the substrate may range from 5mm to 8 mm; the length and width of the light-transmitting insulating layer 40 can both be 5 mm-6 mm; the length of the super-surface micro-nano structure layer 50 can be 3 mm-4 mm, and the width of the super-surface micro-nano structure layer can be 2 mm-3 mm. As a specific example, the length of the substrate 10 may be specifically any one of 5mm, 7mm, and 8mm, and the width may be specifically any one of 5mm, 7mm, and 8 mm; the length and width of the light-transmitting insulating layer 40 may be any one of 5mm, 5.5mm, and 6 mm; the length of the super-surface micro-nano structure layer 50 can be any one of 3mm, 3.2mm and 4mm, and the width can be any one of 2mm, 2.2mm and 3 mm. It should be noted that the above size may be adaptively adjusted according to an application scenario, and is not limited completely.
In the beam redirector designed above, after entering the beam redirector, according to the above principle, the beam first generates a phase primary modulation in the liquid crystal layer 60, then transmits into the super-surface micro-nano structure layer 50 to perform plasmon resonance to amplify the phase change, and the modulated beam transmits through the transparent insulating layer 40, is reflected on the metal reflective layer 20, and then exits the beam redirector after reflection. The structure in fig. 4 is only an example, and besides the structures in fig. 4 and fig. 5, other structural solutions that can achieve the foregoing functions of the beam redirector of this solution also belong to the content of this solution.
In an alternative embodiment of the present embodiment, it is described above that the wire connection layer 30 is embedded in the light-transmitting insulating layer 40, on this basis, each wire in the wire connection layer 30 may be connected to the corresponding sub-wavelength micro-nano structure unit 510 in the super-surface micro-nano structure layer 50 through the light-transmitting insulating layer 40 in a via manner, for example, each wire in the wire connection layer 30 may be electrically connected to the corresponding metal grating in the metal grating array through the light-transmitting insulating layer 40 in a via manner.
Specifically, referring to fig. 6 and 7, fig. 6 is a schematic cross-sectional view of the present embodiment, and fig. 6 is a schematic longitudinal-sectional view of the present embodiment, as can be seen from fig. 6 and 7, a plurality of wires in the wire connection layer 30 are embedded in the light-transmitting insulation layer 40, and the plurality of wires are distributed at intervals and insulated from each other, a through hole is formed in the light-transmitting insulation layer 40 between each wire and the corresponding connected sub-wavelength micro-nano structure unit 510, and the wire is connected to the corresponding connected sub-wavelength micro-nano structure unit 510 through the corresponding through hole.
As a specific example, 4 sub-wavelength micro-nano structure units, which are respectively a sub-wavelength micro-nano structure unit 510A, a sub-wavelength micro-nano structure unit 510B, a sub-wavelength micro-nano structure unit 510C, and a sub-wavelength micro-nano structure unit 510D, are commonly seen in the cross-sectional schematic diagram shown in fig. 6, and a plurality of wires are commonly seen in the cross-sectional schematic diagram shown in fig. 7, if a wire a1 needs to be connected with the sub-wavelength micro-nano structure unit 510A and the sub-wavelength micro-nano structure unit 510B, a through hole B1 is formed at a position corresponding to the wire a1 and the sub-wavelength micro-nano structure unit 510A, and a through hole B2 is formed at a position corresponding to the wire a1 and the sub-wavelength micro-nano structure unit 510B; assuming that the lead A2 needs to be connected with the sub-wavelength micro-nano structure unit 510C, a through hole B3 is formed in a position, corresponding to the sub-wavelength micro-nano structure unit 510C, of the lead A2; assuming that the lead A3 needs to be connected to the sub-wavelength micro-nano structure unit 510D, a through hole B4 is formed at a position corresponding to the sub-wavelength micro-nano structure unit 510D on the lead A3.
In an optional implementation manner of this embodiment, the liquid crystal layer 60 may be directly disposed on the super-surface micro-nano structure layer 50 as shown in fig. 2. However, in order to anchor the liquid crystal direction and protect the super-surface micro-nano structure layer 50, as another possible implementation manner, as shown in fig. 6 and 7, the beam redirector further includes a first liquid crystal alignment layer 70 and a protection layer 80, where the protection layer 80 is disposed on the super-surface micro-nano structure layer 50, the first liquid crystal alignment layer 70 is disposed on the protection layer 80, and the liquid crystal layer 60 is disposed on the first liquid crystal alignment layer 70. Specifically, the bottom of each sub-wavelength micro-nano structure unit 510 is connected to the light-transmitting insulating layer 40, the peripheral surfaces of each sub-wavelength micro-nano structure unit 510 except the bottom are abutted to the protective layer 80, and the upper surface of the protective layer 80 is connected to the first liquid crystal alignment layer 70.
In the scheme, the first liquid crystal orientation layer 70 is designed to anchor the direction of liquid crystal, and the protection layer 80 is designed to protect the super-surface micro-nano structure layer 50, where it should be noted that the first liquid crystal orientation layer 70 and the protection layer 80 need to be made of light-transmitting materials to transmit light.
As a possible implementation manner, the protection layer 80 may be a silicon nitride material, and the thickness range may be 100 to 500nm, so that light is transmitted on the basis of protecting the super-surface micro-nano structure layer 50, and of course, the protection layer 80 may also be made of other light-transmitting materials besides silicon nitride.
In an alternative embodiment of this embodiment, as shown in fig. 6 and 7, the light beam redirector may further include a second liquid crystal alignment layer 90 and an ito layer 100, the second liquid crystal alignment layer 90 is disposed on the liquid crystal layer 60, the ito layer 100 is disposed on the second liquid crystal alignment layer 90, as can be seen from fig. 4 and 5, the ito layer 100 has a width larger than that of the second liquid crystal alignment layer 90, the wire connection layer 30 includes a ground wire GND, two ends of the ito layer 100 are electrically connected to the ground wire GND through conductive sealing glues M1, respectively, and the conductive sealing glue M1 connected to each end of the ito layer 100 is spaced from the corresponding end of the second liquid crystal alignment layer 90 by a predetermined distance, so that a potential difference is formed between the super-surface micro-nano structure layer 50 and the ito layer 100 by connecting the ito layer 100 to the ground wire GND of the wire connection layer 30, therefore, the turning of the light beam by the liquid crystal layer 60 can be regulated and controlled based on the potential difference between the super-surface micro-nano structure layer 50 and the indium tin oxide layer 100.
It should be noted that, in addition to the conductive packaging adhesive M1, other connection media with conductive properties may also be used in the present embodiment.
In an alternative embodiment of this embodiment, as shown in fig. 6 to 8, the beam redirector may further comprise a light-transmissive top layer 110, the light-transmissive top layer 110 may be disposed on the ito layer 100, and the light-transmissive top layer 110 may transmit the external light beam to the ito layer 100 for transmission to the liquid crystal layer 60. Wherein the light transmissive top layer 110 can be used to encapsulate the beam redirector, thereby protecting the liquid crystal layer 60 and the ito layer 100, since the ito layer 100 and the liquid crystal layer 60 are fragile and fragile. As a possible embodiment, the length of the light-transmitting top layer 110 ranges from 5mm to 8mm, and the width ranges from 5mm to 6mm, as a specific example, on the basis that the length of the super-surface micro-nano structure layer 50 is any one of 3mm, 3.2mm and 4mm, and the width is any one of 2mm, 2.2mm and 3mm, the length of the light-transmitting top layer 110 may be any one of 6mm, 7mm and 8mm, and the width may be any one of 5mm, 6mm and 7 mm.
As one possible embodiment, the light transmissive top layer 110 may include a glass layer and an anti-reflection layer, the anti-reflection layer may be disposed on the ito layer 100, and the glass layer may be disposed on the anti-reflection layer.
Taking the one-dimensional array mode of the metal grating array as an example, as a possible implementation, the number of the metal gratings connected to each conducting wire may be the same, for example, the number of the gratings in the metal grating array is 2048, and the number of the conducting wires is 64, so that each conducting wire may be connected to 32 metal gratings; for another example, the number of metal gratings in the metal grating array is 4096, and the number of conducting lines is 64, so that each conducting line can be connected with 64 metal gratings.
As another possible embodiment, the number of the metal gratings connected to each conducting line may be different, for example, the number of the metal gratings in the metal grating array is 2048, the number of the conducting lines is 64, the conducting line a may be connected to 12 metal gratings, the conducting line B may be connected to 24 metal gratings, the conducting line C may be connected to 32 metal gratings, and the 64 conducting lines may be respectively connected to different numbers of metal gratings, so that the 64 conducting lines are all connected to 2048 metal gratings.
It should be noted here that, when the metal grating array is in a two-dimensional array mode, the number of the metal gratings connected to the wires may be adaptively adjusted, and the present solution may adaptively adjust the metal gratings connected to each wire according to different application scenarios.
As a possible embodiment, the sub-wavelength micro-nano structure units connected by different wires are different, for example, the wire a1 described above connects the sub-wavelength micro-nano structure unit 510A and the sub-wavelength micro-nano structure unit 510B, the wire a2 connects the sub-wavelength micro-nano structure unit 510C, and the wire A3 connects the sub-wavelength micro-nano structure unit 510D, so that different wires can apply different voltages to the different sub-wavelength micro-nano structure units 510, so that the liquid crystal molecules in different regions in the liquid crystal layer are turned differently to adjust the phase of the light beam, and the phase change generated by the plasmon changes according to the change of the liquid crystal molecules, so that a phase difference is generated between adjacent sub-wavelength micro-nano structure units 510, the phase of the light is changed, and the light is deflected.
In an optional implementation manner of the present embodiment, the line widths of the plurality of conductive lines may adopt a preset size, and a preset distance may be provided between the terminal centers of adjacent conductive lines in the plurality of conductive lines, so that the plurality of conductive lines may be uniformly arranged in the light-transmitting insulating layer 40.
In an alternative embodiment of this embodiment, the aforementioned light-transmissive insulating layer 40 and the light-transmissive top layer 110 can both be made of oxide glass material, and can also be made of other light-transmissive materials, such as graphene. The metal reflective layer 20 can be made of a metal reflective material, such as an aluminum layer or other metal layer. The substrate 10 may be made of a soft material such as silicon or resin which is opaque.
The above description is only an example of the present application and is not intended to limit the scope of the present application, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, improvement and the like made within the spirit and principle of the present application shall be included in the protection scope of the present application.
Claims (12)
1. A beam redirector, comprising: the liquid crystal display panel comprises a substrate, a metal reflecting layer, a wire connecting layer, a light-transmitting insulating layer, a super-surface micro-nano structure layer and a liquid crystal layer;
the super-surface micro-nano structure layer comprises a plurality of sub-wavelength micro-nano structure units, the lead connecting layer comprises a plurality of leads, and each lead is electrically connected with at least one sub-wavelength micro-nano structure unit in the super-surface micro-nano structure layer through the light-transmitting insulating layer so as to apply corresponding voltage to the connected sub-wavelength micro-nano structure units;
the liquid crystal layer is used for carrying out phase primary adjustment on the received light beam when the super-surface micro-nano structure layer is applied with voltage, and transmitting the light beam after the phase primary adjustment to the super-surface micro-nano structure layer;
the super-surface micro-nano structure layer is used for generating plasmon resonance with the light beam after the initial phase adjustment so as to amplify the phase change of the light beam after the initial phase adjustment to obtain a modulated light beam, and transmitting the modulated light beam to the light-transmitting insulating layer;
the light-transmitting insulating layer is used for transmitting the modulated light beam to the metal reflecting layer and insulating and isolating the metal reflecting layer and the super-surface micro-nano structure layer;
the metal reflecting layer is used for reflecting the modulated light beam so that the modulated light beam is emitted from the light beam steering device.
2. The beam redirector of claim 1, wherein the metallic reflective layer is disposed on the substrate, the light transmissive insulating layer is disposed on the metallic reflective layer, the wire connecting layer is embedded in the light transmissive insulating layer, the micro-nano structured super-surface layer is disposed on the light transmissive insulating layer, and the liquid crystal layer is disposed on the micro-nano structured super-surface layer.
3. The beam redirector of claim 2, wherein each wire in the wire connection layer is connected to a corresponding sub-wavelength micro-nano structure unit in the super-surface micro-nano structure layer through the light-transmissive insulating layer in a via-hole manner.
4. The beam redirector of claim 3, wherein a plurality of wires of the wire connection layer are embedded in the light-transmitting insulation layer at intervals, a through hole is formed in the light-transmitting insulation layer between each wire and the corresponding connected sub-wavelength micro-nano structure unit, and the wires are connected with the corresponding connected sub-wavelength micro-nano structure unit through the corresponding through holes.
5. The beam redirector of claim 2, further comprising a first liquid crystal alignment layer and a protective layer, wherein the protective layer is disposed on the super-surface micro-nano structure layer, the first liquid crystal alignment layer is disposed on the protective layer, and the liquid crystal layer is disposed on the first liquid crystal alignment layer.
6. The beam redirector of claim 5, wherein the bottom of each sub-wavelength micro-nano structure unit is connected with the light-transmitting insulating layer, the peripheral surfaces of each sub-wavelength micro-nano structure unit except the bottom are abutted against the protective layer, and the upper surface of the protective layer is connected with the first liquid crystal orientation layer.
7. The beam redirector of claim 2, further comprising a second liquid crystal alignment layer disposed on the liquid crystal layer and an indium tin oxide layer disposed on the second liquid crystal alignment layer;
the width of the indium tin oxide layer is larger than that of the second liquid crystal orientation layer, the wire connecting layer comprises a grounding wire, two end parts of the indium tin oxide layer are electrically connected with the grounding wire through conductive packaging glue, and the conductive packaging glue connected with each end part of the indium tin oxide layer is spaced from the corresponding end part of the second liquid crystal orientation layer by a preset distance.
8. The beam redirector of claim 7, further comprising a light transmissive top layer disposed on the ITO layer for transmitting an external light beam to the ITO layer.
9. The beam redirector of claim 1, wherein different wires connect different sub-wavelength micro-nano structure units and different wires apply different voltages to the connected sub-wavelength micro-nano structure units.
10. The beam redirector of claim 1, wherein the super-surface micro-nano structure layer comprises a metal grating array, and the sub-wavelength micro-nano structure unit is a metal grating in the metal grating array.
11. The beam redirector of claim 10, wherein the metal gratings in the array of metal gratings are distributed in a one-dimensional array or a two-dimensional array.
12. The beam redirector of claim 1, wherein the liquid crystals in the liquid crystal layer are arranged in a twisted configuration and/or in a parallel configuration.
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106773266A (en) * | 2017-02-15 | 2017-05-31 | 苏州芯盟慧显电子科技有限公司 | A kind of reflective liquid-crystal display based on surface plasmons technology |
| US20180241131A1 (en) * | 2017-02-22 | 2018-08-23 | Elwha, Llc | Optical surface-scattering elements and metasurfaces |
| US10665953B1 (en) * | 2019-03-18 | 2020-05-26 | Lumotive LLC | Tunable liquid crystal metasurfaces |
| CN113031355A (en) * | 2021-02-26 | 2021-06-25 | 京东方科技集团股份有限公司 | Reflection-type array substrate, preparation method thereof and display device |
| CN114137772A (en) * | 2021-11-17 | 2022-03-04 | 武汉大学 | 4 pi modulation range pure phase high resolution spatial light modulator |
| CN114609803A (en) * | 2020-12-04 | 2022-06-10 | 清华大学 | Dynamic super-structure surface based on liquid crystal material |
-
2022
- 2022-06-30 CN CN202210763091.9A patent/CN114967219B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106773266A (en) * | 2017-02-15 | 2017-05-31 | 苏州芯盟慧显电子科技有限公司 | A kind of reflective liquid-crystal display based on surface plasmons technology |
| US20180241131A1 (en) * | 2017-02-22 | 2018-08-23 | Elwha, Llc | Optical surface-scattering elements and metasurfaces |
| US10665953B1 (en) * | 2019-03-18 | 2020-05-26 | Lumotive LLC | Tunable liquid crystal metasurfaces |
| CN114609803A (en) * | 2020-12-04 | 2022-06-10 | 清华大学 | Dynamic super-structure surface based on liquid crystal material |
| CN113031355A (en) * | 2021-02-26 | 2021-06-25 | 京东方科技集团股份有限公司 | Reflection-type array substrate, preparation method thereof and display device |
| CN114137772A (en) * | 2021-11-17 | 2022-03-04 | 武汉大学 | 4 pi modulation range pure phase high resolution spatial light modulator |
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